JPH11217197A - Conveying lifter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a conveying lifter capable of improving safety of conveying work of a conveying object and improving work efficiency. SOLUTION: A lift arm 23 is provided on a traveling truck 22 so as to be lifted, a clamp main body 24 is rotatably provided on the lift arm 23, a clamp seat 37 is detachably attached on the clamp main body 24, a conveying object 5 can be pinched between the clamp main body 24 and the clamp seat 37 and conveyed to the specified place. When the conveying object 5 is lifted by the operation of a lifting handle 31, the conveying object 5 is rotated by a rotational handle 35, and therefore, the conveying object is made into the erected state and placed in the specified place.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing apparatus, and more particularly to a transport lifter for transporting heavy equipment such as a heater of a vertical vapor phase thin film forming apparatus.

[0002]

2. Description of the Related Art As one of semiconductor manufacturing processes, there is a process for producing various thin films on the surface of a substrate to be treated such as a wafer by chemical vapor deposition. Widely used.

[0003] The vertical type vapor phase thin film forming apparatus is provided with a reactor having a heater on an outer portion. Each component of the reactor such as a heater is manufactured in a different place, and then transported to an assembly factory for assembly. Can be

[0004] When assembling a reaction furnace, a heavy object such as a heater is usually transported in an assembly factory by a transport hand lifter.

Referring to FIG. 5, a transfer lifter of the heater will be described.

The transport lifter 1 has a flat plate-shaped base 2, four wheels 3 rotatably provided at four corners on the lower surface of the base 2, and the base 2. It is composed of a hand pressing portion 4 erected at the rear end.

In the figure, reference numeral 5 denotes a heater. As shown in FIG. 6, the heater 5 has a hollow cylindrical shape with an open lower end, a height of 1.5 m, an outer diameter of 0.6 m, Weight 150 kg, heat generating part 6, heat insulating material 7, upper reinforcing material 8, lower reinforcing material 9, and outer plate 1
0.

The heat generating portion 6 has a cylindrical shape with a coil, and a heating wire 11 having a coil shape is embedded in the cylindrical portion.
The heat insulating material 7 is provided so as to surround the heat generating portion 6 on the outer periphery of the heat generating member 6. The disk-shaped upper reinforcing material 8 is fixed to the upper surface of the heat insulating material 7, and the annular lower reinforcing material 9 is provided at the lower end of the heat insulating material 7, and the heat insulating material 7 and the upper reinforcing material 8 are provided. The outer plate 10 made of stainless steel is provided so as to surround the outside of the lower reinforcing member 9.

A pallet 12 is placed in a storage place of the assembly plant, and the height of the upper surface of the pallet 12 is the same as the height of the upper surface of the board base 2 from the floor 13.

[0010] The manufactured heater 5 is transported to a storage location of an assembly factory and mounted on the pallet 12. Since the heater 5 is a vertically long heavy object, taking into consideration stability,
It is placed on its side.

When the heater is transported, the front end of the transport lifter 1 is brought into contact with the side surface of the pallet 12, and the upper surface of the pallet 12 and the upper surface of the board base 2 form substantially the same plane. The heater 5 is manually slid on the pallet by a plurality of workers and transferred onto the board base 2.

An operator presses the hand pusher 4 to move the transport lifter 1 on which the heater 5 is mounted from a storage location to a predetermined location near an assembly location.

The front end of the transport lifter 1 is brought into contact with the side surface of the pallet 14 at a predetermined location, so that the upper surface of the pallet 14 and the upper surface of the board base 2 are substantially flush with each other. After the heater 5 is manually slid on the board base 2 by a plurality of workers and transferred onto the pallet 14, the heater 5 is erected so that the lower end is opened.

Thereafter, the heater 5 is joined to other components in a standing posture by using a jig, and the reaction furnace is assembled.

[0015]

In the above-described conventional transfer lifter, the transfer operation between the transfer lifter of the large and heavy heater and the pallet, or the falling down operation of the heater on the transfer lifter, All standing work is done manually by workers, lacking work safety, poor work efficiency,
Further, there is a risk that the heater may be damaged or damaged.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a transport lifter capable of improving the safety of a transport operation and improving the operation efficiency.

[0017]

According to the present invention, a lift arm is provided on a traveling carriage so as to be able to move up and down, a clamp body is rotatably provided on the lift arm, and a clamp seat is detachably attached to the clamp body. The clamp body has an upper end holding seat, and the clamp seat has a lower end holding seat, and the upper end holding seat is an upper end of the conveying object. The present invention relates to a transport lifter having a resin block fitted to a portion and the lower end holding seat having a resin block fitted to a lower end portion of an object to be carried, and further comprising a resin plate having self-lubricating properties in the clamp seat. A transport lifter configured to receive the transported object via the resin plate, and to clamp the transported object between the clamp body and a clamp seat; It is transported to the location. Further, the object to be conveyed is moved up and down by operating a raising and lowering handle, and the object to be conveyed is rotated by operating a rotating handle to be in an upright state and placed at a predetermined location.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. In FIGS. 1 to 4, FIG.
6 are given the same reference numerals, and description thereof is omitted.

The transport lifter 21 comprises a traveling carriage 22, a lift arm 23 and a clamp 24.

First, the traveling carriage 22 will be described.

An elevating guide 2 provided with an elevating mechanism (not shown) at the rear end of a base frame 25 formed in a substantially U-shape.
6 and a bearing beam 2 is provided at the lower end of the elevating guide 26.
7 is protruded in the horizontal direction. A vertical shaft 2 is attached to the bearing beam 27.
A free running wheel 29 rotatable about 8 is provided and a running wheel 30 is provided at both ends of the base frame 25. On the front end of the bearing beam 27, an elevating handle 3 that tilts in a direction approaching and separating from the lift arm 23.
1 is erected upright, and the upper end of the elevating handle 31 is bent rearward. The lifting mechanism (not shown) can be driven by raising and lowering the lifting handle 31.

Next, the lift arm 23 will be described.

A lifter elevating panel 32 is provided on the elevating guide 26 so as to be able to elevate and lower. The lifter elevating panel 32
Is connected to the lifting mechanism (not shown). A front horizontal arm 33, 3 is attached to the lifter elevating panel 32.
3 is fixed to the left and right. One end of the arm 33 is provided with a rotary worm reducer 34, and a rotary handle 35 is fixed to an input shaft 60 of the rotary worm reducer 34 provided in parallel with the arm 33. The output shaft (not shown) of the rotation speed reducer 34 projects horizontally toward the center,
A driven shaft (not shown) is rotatably provided at the tip of the other arm 33 on the extension of the axis of the output shaft. The clamp 24 is supported by the output shaft and the driven shaft.

Next, the clamp 24 will be described.

The clamp 24 is composed of a clamp body 36 and a clamp seat 37, and the clamp seat 37 can be fitted to and removed from the lower end of the clamp body 36.

The clamp body 36 will be described. A column frame 39 extending downward and vertically is fixed to each of the four corners of the rectangular ceiling frame 38, and an upper front fixing bracket 40 and an upper rear fixing bracket 41 having an L-shaped cross section are attached to the lower surface of the ceiling frame 38. It is fixed in a direction perpendicular to the arm 33. The length of each support frame 39 is slightly higher than the height of the heater 5, and a clamp body side hole 42 is formed in the lower side surface in the left-right direction. The upper front fixing bracket 40
An upper front resin block 43 made of resin is fixed to the inner surface of the upper part, and an upper rear resin block 44 made of resin is fixed to the inner surface of the upper and lower fixing bracket 41 to form an upper end holding seat 45. The upper front resin block 43 is formed with an arc-shaped upper front recess 46 in plan view, and the upper rear resin block 44 is opposed to the upper front recess 46 and has the same upper rear recess as the upper front recess 46. The upper end of the heater 5 can be fitted into the upper front recess 46 and the upper rear recess 47. Further, the ceiling frame 38
The connecting frames 48, 48 extending vertically downward are respectively joined to the central portions of the left and right sides of the connecting frame. It is stuck. Thus, when the rotary handle 35 is rotated, the rotation is performed by the rotary worm reducer 34.
To the clamp body 36, and the clamp body 36 rotates around the output shaft and the driven shaft.

Next, the clamp seat 37 will be described. 2
A lower front fixing bracket 50 and a lower rear fixing bracket 51 are fixedly mounted on the horizontal members 49, 49, and a clamp seat side hole 52 is formed at both ends of each of the horizontal members 49 from the horizontal direction. The clamp seat fixing shafts 53 are respectively inserted through the clamp seat side holes 52 so as to be able to be inserted and removed.

The lower front fixture 50 has the same shape as the upper front fixture 40 and is provided at a position corresponding to the upper front fixture 40.

A resin front lower resin block 54 is fixed to the inner surface of the lower front fixing bracket 50, and a resin lower rear resin block 55 is fixed to the inner surface of the lower rear fixing bracket 51. 56 are configured. The lower front resin block 54 has a lower front recess 57 having the same shape as the upper front recess 46, and the lower rear resin block 55 has a lower rear recess 5 having the same shape as the upper rear recess 46.
8 are formed, and the lower front concave portion 57 and the lower rear concave portion 58 are formed.
The lower end of the heater 5 can be fitted to the heater.

A resin plate 59 made of resin is laid between the lower front fixing bracket 50 and the lower rear fixing bracket 51 on the horizontal member 49, and the resin plate 59 is provided.
Has the same height as the upper surfaces of the lower front concave portion 57 and the lower rear concave portion 58. The material of the resin plate 59 desirably has self-lubricating properties.

The clamp seat 37 is provided on the support frame 3.
9 can be fitted inside the lower end of the clamp body side hole 42.
And the clamp seat side hole 52 are aligned with each other, and the clamp seat fixing shaft 53 is inserted through the clamp body side hole 42 and the clamp seat side hole 52, thereby forming the clamp seat 3.
7 is integrated with the clamp body 36.

Hereinafter, the operation of transporting the heater 5 will be described.

The manufactured heater 5 is transported to an assembly factory, and is placed on the pallet 12 in a state of lying down. The transport lifter 21 is moved, the pallet 12 is positioned in a space surrounded by the base frame 25, and the posture of the transport lifter 21 is adjusted so that the axis of the heater 5 is parallel to the arm 33. I do. Also, the clamp seat 37
Pulls out the clamp seat fixing shaft 53 and keeps it separated from the clamp body 36.

By operating the rotating handle 35, the clamp body 36 is held until the clamp body 36 is in a horizontal state.
Turn counterclockwise. By operating the elevating handle 31, the clamp body 36 is lowered via the lifter elevating panel 32 and the arm 33, and the heater 5 is positioned in a space surrounded by the support frame 39. After the transport lifter 21 is retracted and the upper end of the heater 5 is fitted into the upper front recess 46 and the upper rear recess 47,
The clamp seat 37 is fitted to the lower end of the support frame 39. The clamp body side hole 42 and the clamp seat side hole 52 are matched with each other, the clamp seat fixing shaft 53 is inserted through the clamp body side hole 42 and the clamp seat side hole 52, and the clamp seat 37 is inserted into the clamp body 36. Attach. Thus, the upper front concave portion 46 and the upper rear concave portion 4
7, the upper part of the heater 5 is fitted,
7. The lower end of the heater 5 is supported by the lower rear recess 58, and the heater 5 is clamped between the clamp body 36 and the clamp seat 37.

An operator pushes the transport lifter 21 and moves the transport lifter 21 on which the heater 5 is mounted from a storage location to a predetermined location near an assembly location.

By operating the lifting / lowering handle 31, the clamp 2 is moved through the lifting / lowering panel 31 and the arm 33.
After raising the number 4, the rotating handle 35 is operated to rotate the clamp 24 clockwise until the clamp 24 is in the upright state.

The pallet 14 is positioned in a space surrounded by the base frame 25, and the clamps are operated by operating the raising / lowering handle 31 so that the upper surface of the pallet 14 and the upper surface of the horizontal member 49 become the same height. 24 is lowered.

After removing the upper front fixing bracket 40 and the lower front fixing bracket 50, the heater 5 is slid on the resin plate 59 in the upright state and transferred onto the pallet 14. Since the resin plate 59 is made of a resin having a small frictional resistance on its surface, a large amount of labor is not required to slide the heater 5 on the resin plate 59.

In the above-described embodiment, the transfer of the heater of the vertical vapor phase thin film forming apparatus has been described. However, it is needless to say that the present invention can be used for other transfer objects such as heavy equipment other than the heater. Nor.

[0040]

As described above, according to the present invention, when transferring from a pallet or the like to the transport lifter, it is not necessary for the operator to manually slide the transport object, and only the operation of the handle is required. , The object to be laid down can be returned to the upright state. Therefore, the safety at the time of carrying work is improved, and the working efficiency can be improved.

Further, since the object to be transported is supported by a fixing bracket via a resin block made of resin, various excellent effects such as a reduced risk of damage or damage to the object to be transported during the transport operation are reduced. Demonstrate.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram illustrating a state in which a heater is supported by a transport lifter according to an embodiment of the present invention.

FIG. 2 is a plan view of a clamp seat according to the embodiment.

FIG. 3 is an explanatory diagram showing an operation of supporting a heater on the transport lifter according to the embodiment.

FIG. 4 is an explanatory diagram showing an operation of transferring a heater from the transport lifter to the pallet according to the embodiment.

FIG. 5A is an explanatory diagram showing an operation of transferring a heater from a pallet to a transport lifter, and FIG. 5B is an explanatory diagram showing an operation of transferring a heater from the transport lifter to a pallet.

FIG. 6 is a sectional view of a heater.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 21 Conveyor lifter 22 Traveling trolley 23 Lift arm 24 Clamp 31 Lifting handle 33 Arm 35 Rotating handle 36 Clamp body 37 Clamp seat 40 Upper front fixing metal 41 Upper rear fixing metal 50 Lower front fixing metal 51 Lower rear fixing metal

Claims (1)

[Claims] A lift arm provided on the traveling carriage so as to be able to move up and down, and a clamp body is provided rotatably on the lift arm;
A transport lifter, wherein a clamp seat is detachable from the clamp body, and an object to be transported can be clamped between the clamp body and the clamp seat.