JPH11213931A - Sample introducing device - Google Patents
Sample introducing deviceInfo
- Publication number
- JPH11213931A JPH11213931A JP10015431A JP1543198A JPH11213931A JP H11213931 A JPH11213931 A JP H11213931A JP 10015431 A JP10015431 A JP 10015431A JP 1543198 A JP1543198 A JP 1543198A JP H11213931 A JPH11213931 A JP H11213931A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- cover
- lid
- pressure
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims abstract description 34
- 239000011261 inert gas Substances 0.000 abstract description 13
- 239000000523 sample Substances 0.000 description 124
- 230000002411 adverse Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- -1 moisture Chemical compound 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- UBAZGMLMVVQSCD-UHFFFAOYSA-N carbon dioxide;molecular oxygen Chemical compound O=O.O=C=O UBAZGMLMVVQSCD-UHFFFAOYSA-N 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、走査型電子顕微鏡
などの真空下で試料を測定する装置の試料室に、大気中
では大気中の酸素、水分等と反応して変質する試料を変
質させることなく、試料を導入する試料導入装置に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample chamber of an apparatus for measuring a sample under vacuum, such as a scanning electron microscope, in which a sample which is degraded by reacting with oxygen, moisture and the like in the atmosphere is altered. The present invention relates to a sample introduction device that introduces a sample without using the sample introduction device.
【０００２】[0002]
【従来の技術】走査型電子顕微鏡などの真空下で試料を
観察する機器では、一般には試料を大気中において調製
して、機器内に導入した後に装置内の空気を排気して測
定を行っているので、リチウム、ナトリウム等のアルカ
リ金属のように大気中の酸素、二酸化炭素、水分、窒素
等と反応する試料を観察する場合には、大気中で変質す
るために正確な測定ができないという問題があった。そ
こで、この様な試料の測定のために、不活性気体により
陽圧雰囲気を形成できる導入前室を設け、試料を空気に
接触させることなく試料を取り付けた後に、真空雰囲気
を形成して試料の観察を行う装置が、特開昭６１−２２
５０号公報等において提案されている。2. Description of the Related Art In a device for observing a sample under vacuum, such as a scanning electron microscope, generally, a sample is prepared in the atmosphere, introduced into the device, and then the air in the device is evacuated to perform measurement. Therefore, when observing a sample that reacts with oxygen, carbon dioxide, moisture, nitrogen, etc. in the atmosphere, such as alkali metals such as lithium and sodium, accurate measurement cannot be performed due to deterioration in the atmosphere. was there. Therefore, in order to measure such a sample, a pre-introduction chamber in which a positive pressure atmosphere can be formed by an inert gas is provided, and after attaching the sample without bringing the sample into contact with air, a vacuum atmosphere is formed by forming a vacuum atmosphere. An apparatus for performing observation is disclosed in Japanese Patent Application Laid-Open No. 61-22 / 1986.
No. 50, for example.
【０００３】ところが、これらの装置では、不活性気体
の雰囲気中において、試料を容器中に封入し、予備試料
室へ導入し、室内を不活性気体の雰囲気にした後に、ハ
ンドグローブ等を利用して手作業で容器の蓋を開け、試
料室に導入するという作業が必要であった。However, in these apparatuses, a sample is sealed in a container in an atmosphere of an inert gas, introduced into a preliminary sample chamber, the interior of the chamber is made to have an inert gas atmosphere, and then hand gloves are used. It was necessary to manually open the lid of the container and introduce it into the sample chamber.
【０００４】[0004]
【発明が解決しようとする課題】本発明は、走査型電子
顕微鏡等による測定において、大気中で変質をする可能
性のある試料を測定装置内に容易に導入することが可能
な装置を提供することを課題とするものである。SUMMARY OF THE INVENTION The present invention provides an apparatus which can easily introduce a sample which is likely to be degraded in the atmosphere into a measuring apparatus in a measurement by a scanning electron microscope or the like. That is the task.
【０００５】[0005]
【課題を解決するための手段】本発明は、測定装置の測
定室に試料を導入する試料導入装置において、試料を載
置する試料台を取り付ける空洞部、試料台を取り付けた
空洞部を気密に覆うことができる開閉可能な蓋体、蓋体
を常時開く方向へ付勢する付勢手段、空洞部を減圧手段
に結合する管路および開閉弁を有し、空洞部の減圧によ
って蓋体を内部と外部の圧力差によって気密に閉じた後
に、測定室を減圧することによって、付勢手段の付勢力
によって蓋体を開く試料導入装置である。According to the present invention, in a sample introduction device for introducing a sample into a measurement chamber of a measurement device, a cavity for mounting a sample stage on which a sample is mounted and a cavity for mounting the sample stage are hermetically sealed. It has a cover that can be opened and closed, an urging means for urging the lid to always open, a conduit connecting the cavity to the decompression means, and an on-off valve. This is a sample introduction device in which the lid is closed by the urging force of the urging means by depressurizing the measurement chamber after the airtight closing by the pressure difference between the outside and the outside.
【０００６】[0006]
【発明の実施の形態】すなわち、本発明の試料導入装置
は、大気中で変質する可能性のある試料を大気から隔離
した状態で試料導入装置に取り付け、真空下での測定を
行う測定室内に設置した後に、試料導入装置を開口する
ものであり、試料導入装置への試料の取り付けが容易で
あるとともに、測定室内への設置も大気圧下で可能であ
り、取り扱いが容易な試料導入装置である。DESCRIPTION OF THE PREFERRED EMBODIMENTS That is, the sample introduction device of the present invention is installed in a sample introduction device in a state where a sample which may be degraded in the atmosphere is isolated from the atmosphere, and is installed in a measurement chamber for performing measurement under vacuum. After installation, the sample introduction device is opened, and it is easy to mount the sample on the sample introduction device, and it can be installed in the measurement room under atmospheric pressure. is there.
【０００７】以下に図面を参照して本発明を説明する。
図１は、本発明の試料導入装置を説明する斜視図であ
る。試料導入装置１は、金属等のブロック等から構成さ
れた試料導入装置本体２に、試料台３を挿入する空洞部
４を有しており、試料台３には、試料載置部５を有して
いる。また、蓋体６が可動取り付け部材７によって試料
導入装置本体２に取り付けられており、蓋体６と試料導
入装置本体２との間には、ばね等の付勢手段８が結合さ
れており、図１に示すように、外力が働かない状態で
は、蓋体６が付勢手段によって常に開く状態となってい
る。また、付勢手段は、蓋体の可動取り付け部材と一体
に構成されたものであっても良い。試料導入装置本体２
と蓋体６とを気密に保持するために、Ｏ−リング等のガ
スケット９が取り付けられている。また、蓋体には試料
と接触しないように凹所６ａを設けることが好ましい。The present invention will be described below with reference to the drawings.
FIG. 1 is a perspective view illustrating a sample introduction device according to the present invention. The sample introduction apparatus 1 has a cavity 4 into which a sample table 3 is inserted in a sample introduction apparatus main body 2 composed of a block of metal or the like, and the sample table 3 has a sample mounting section 5. doing. The lid 6 is attached to the sample introduction device main body 2 by a movable attachment member 7, and between the lid 6 and the sample introduction device main body 2, biasing means 8 such as a spring is coupled. As shown in FIG. 1, when no external force is applied, the lid 6 is always opened by the urging means. Further, the biasing means may be formed integrally with the movable mounting member of the lid. Sample introduction device body 2
A gasket 9 such as an O-ring is attached in order to keep the lid and the lid 6 airtight. Further, it is preferable to provide a recess 6a in the lid so as not to contact the sample.
【０００８】本発明の試料導入装置への試料の取り付け
は、試料に悪影響を及ぼさない不活性気体等が満たされ
たグローブボックス等内において行うことが必要とな
る。グローブボックスを用いて試料の取り付けを行う場
合には、一般のグローブボックス内での操作と同様に、
室内を不活性気体の雰囲気にした状態で、試料導入装置
本体２の空洞部４に挿入した試料台３の試料載置部５に
試料を載置する。試料台３は、観察する試料に合致した
大きさのものを用いることができる。次いで、付勢手段
８の力に抗して蓋体６を閉じた後に、減圧装置（図示し
ない）への接続用の管路１２を取り付けた開閉弁１３を
閉じ、蓋体係止部材１０、１１によって蓋体を係止す
る。この状態では、試料は不活性気体の雰囲気にあっ
て、蓋体によって密閉されているので外部環境へ取り出
すことができる。外部への取り出しは、グローブボック
ス内の予備室等に移動した後に行うことができる。ま
た、観察用の試料が不活性気体の雰囲気の装置内におい
て取り扱われている場合には、試料導入装置を該装置内
に入れて不活性気体の雰囲気において試料を試料導入装
置に取り付けることができるので、試料の取り付け用の
グローブボックスを別に使用する必要がない。It is necessary to mount the sample on the sample introduction device of the present invention in a glove box or the like filled with an inert gas or the like which does not adversely affect the sample. When mounting a sample using a glove box, similar to the operation in a general glove box,
The sample is placed on the sample placing portion 5 of the sample stage 3 inserted into the cavity 4 of the sample introduction device main body 2 in a state where the room is in an inert gas atmosphere. The sample stage 3 can be of a size that matches the sample to be observed. Next, after closing the lid 6 against the force of the urging means 8, the on-off valve 13 to which the pipe line 12 for connection to the pressure reducing device (not shown) is attached is closed, and the lid locking member 10, 11 locks the lid. In this state, the sample is in an atmosphere of an inert gas and is sealed by the lid, so that the sample can be taken out to the external environment. Removal to the outside can be performed after moving to a spare room or the like in the glove box. When the sample for observation is handled in the apparatus in an atmosphere of an inert gas, the sample introduction device can be put in the device and the sample can be attached to the sample introduction device in the atmosphere of the inert gas. Therefore, there is no need to use a separate glove box for mounting the sample.
【０００９】図２は、本発明の試料導入装置に試料を取
り付けて蓋を閉めた状態を説明する斜視図である。図２
（Ａ）は、真空ポンプによって吸引する状態を示してお
り、図２（Ｂ）は、真空ポンプとの結合を取り外した状
態を説明する図である。試料導入装置内の試料は、図２
（Ａ）に示すように、グローブボックス等において試料
導入装置内に不活性雰囲気下で試料が取り付けられて密
閉されているので、大気中に取り出しても試料の変質等
の問題は生じない。試料導入装置本体の空洞部と連通し
た管路１２に真空ポンプ（図示しない）を結合し、開閉
弁１３を開いて内部の気体を吸引し、所定の真空度とな
った時点で、図２（Ｂ）に示すように開閉弁を閉じる。
真空度が低い場合には、蓋体を押し付ける力が不充分と
なるので、１Ｔｏｒｒ以下とすることが好ましい。FIG. 2 is a perspective view illustrating a state in which a sample is attached to the sample introduction device of the present invention and the lid is closed. FIG.
FIG. 2A shows a state in which suction is performed by a vacuum pump, and FIG. 2B is a view for explaining a state in which connection with the vacuum pump is removed. The sample in the sample introduction device is shown in FIG.
As shown in (A), since the sample is attached and sealed in an inert atmosphere in a sample introduction device in a glove box or the like, even if the sample is taken out to the atmosphere, there is no problem such as deterioration of the sample. A vacuum pump (not shown) is connected to the pipe 12 communicating with the cavity of the sample introduction device main body, the on-off valve 13 is opened to suck the gas inside, and when a predetermined degree of vacuum is reached, FIG. Close the on-off valve as shown in B).
When the degree of vacuum is low, the force for pressing the lid is insufficient, so that it is preferably 1 Torr or less.
【００１０】開閉弁を閉じた後は、蓋体係止部材を解除
しても試料導入装置内部が真空状態であるので、蓋体６
は大気圧によって試料導入装置本体２に押し付けられて
いるので、大気中に取り出しても、試料が悪影響を受け
ることはない。なお、付勢手段８としては、蓋体６を開
く方向へ作用する力が、大気圧によって蓋体を押し付け
る力よりも小さいものを用いることが必要である。After the on-off valve is closed, the inside of the sample introduction device is in a vacuum state even if the lid locking member is released.
Is pressed against the sample introduction device main body 2 by the atmospheric pressure, so that the sample is not adversely affected even if taken out into the atmosphere. In addition, as the urging means 8, it is necessary to use a force that acts in a direction to open the lid 6 is smaller than a force that presses the lid by the atmospheric pressure.
【００１１】図３は、本発明の試料導入装置を試料を測
定する測定室内に設置した状態を説明する図である。図
３（Ａ）に示すように、試料導入装置１を測定室２０内
部の所定の部位に設置し、測定室内を、試料に悪影響を
及ぼすことがない不活性気体等の雰囲気とした後に、測
定室内を測定に必要な真空度まで減圧する。測定室内が
減圧されると、図３（Ｂ）に示すように、試料導入装置
内の空洞部内の圧力と外気との圧力差によって、蓋体を
ばねの力に抗して押し付けていた力が小さくなる。その
結果、付勢手段８の作用によって蓋体６が開き、試料台
３上の試料載置部５の試料２１の測定が可能となる。FIG. 3 is a diagram illustrating a state in which the sample introduction device of the present invention is installed in a measurement room for measuring a sample. As shown in FIG. 3A, the sample introduction device 1 is installed at a predetermined position inside the measurement chamber 20, and after the measurement chamber is set to an atmosphere of an inert gas or the like that does not adversely affect the sample, the measurement is performed. The pressure in the room is reduced to the degree of vacuum required for measurement. When the pressure in the measurement chamber is reduced, as shown in FIG. 3 (B), the force that presses the lid against the force of the spring due to the pressure difference between the pressure in the cavity in the sample introduction device and the outside air. Become smaller. As a result, the lid 6 is opened by the action of the urging means 8, and the measurement of the sample 21 on the sample mounting portion 5 on the sample table 3 becomes possible.
【００１２】蓋体が開く圧力は、減圧によって確実に開
くようにするために、付勢手段の圧力を調整することが
必要であるが、０．１気圧以下に達した段階で開くよう
にすることが好ましい。蓋体が開く圧力は高真空状態で
はないので、試料導入装置を測定室内に設置した後に、
測定室内を試料に悪影響を及ぼさない不活性気体の雰囲
気とし、測定室内において残留する気体によって、試料
が変質することを防ぐようにすることが好ましい。In order to ensure that the lid opens when the pressure is reduced, it is necessary to adjust the pressure of the urging means, but it is opened when the pressure reaches 0.1 atm or less. Is preferred. Since the pressure at which the lid opens is not in a high vacuum state, after installing the sample introduction device in the measurement chamber,
It is preferable that the inside of the measurement chamber be an atmosphere of an inert gas that does not adversely affect the sample, so that the gas remaining in the measurement chamber does not deteriorate the sample.
【００１３】また、図４は、本発明の試料台の一例を説
明する図である。試料台３は、試料導入装置本体の空洞
部内に、安定して保持されるとともに、空洞部内が速や
かに減圧されるような構造を有することが必要である。
このために、試料台上部１４、試料台下部１５は、確実
に保持が可能なように、空洞部の内径にほぼ等しい径を
有している。また、試料台の中央部１６は、試料台の上
部および下部よりも小さな径を有しており、空洞部の内
壁面との間で環状の通路を形成している。また、試料台
上部１４および下部１５には、通気用の通路１７を有し
ており、試料台の中央部と空洞部の内壁面で形成される
環状の通路と連通しており、空洞部に結合した管路を真
空ポンプで吸引することによって、内部を速やかに減圧
させることができる。通気用の通路は、試料台の上部あ
るいは下部に切り欠きを設ける方法、あるいは孔を開け
る方法等の任意の方法によって形成することができる。FIG. 4 is a view for explaining an example of the sample stage of the present invention. The sample stage 3 needs to have a structure that is stably held in the cavity of the sample introduction device main body and that the pressure in the cavity is quickly reduced.
For this reason, the sample stage upper part 14 and the sample stage lower part 15 have a diameter substantially equal to the inner diameter of the hollow part so that the sample stage can be securely held. The central portion 16 of the sample stage has a smaller diameter than the upper and lower portions of the sample stage, and forms an annular passage with the inner wall surface of the cavity. The upper and lower portions of the sample stage 14 and the lower portion 15 each have a passage 17 for ventilation, which communicates with an annular passage formed by the central portion of the sample stage and the inner wall surface of the cavity. By suctioning the connected pipeline with a vacuum pump, the inside can be quickly depressurized. The ventilation passage can be formed by an arbitrary method such as a method of providing a notch in the upper or lower part of the sample table or a method of making a hole.
【００１４】また、試料台としては、観察すべき試料に
応じて所定の観察が可能な大きさおよび高さの試料台を
用いることができる。本発明の試料導入装置は、走査型
電子顕微鏡、Ｘ線光電子分光装置、オージェ電子分光分
析装置、電子プローブマイクロアナライザ等の真空下で
の測定を行う装置への試料導入装置として好適である
が、測定室内を減圧にする手段を有する装置であれば、
任意の装置に使用することができる。また、試料導入装
置に試料を入れた状態で輸送もできるので、試料の調整
を測定装置と離れた場所で行うことも可能である。Further, as the sample stage, a sample stage having a size and a height enabling predetermined observation according to the sample to be observed can be used. The sample introduction device of the present invention is suitable as a sample introduction device to a device that performs measurement under vacuum such as a scanning electron microscope, an X-ray photoelectron spectrometer, an Auger electron spectrometer, and an electron probe microanalyzer, If the device has means for reducing the pressure in the measurement chamber,
Can be used for any device. In addition, since the sample can be transported in a state where the sample is placed in the sample introduction device, the sample can be adjusted at a place remote from the measurement device.
【００１５】[0015]
【発明の効果】大気中で変質する試料を、大気と隔離し
た状態で収納した試料導入装置を、測定装置の測定室に
おいて、測定室内に形成される減圧状態によって測定可
能な状態とすることができるので、測定室に付加的な装
置を設けなくても大気と隔離した状態で試料を導入する
ことができ、また特別な試料の導入装置を有しない既存
の測定装置や試料の導入装置の取り付けが困難な装置に
おいても、本発明の試料導入装置を用いることによっ
て、大気と隔離した状態での試料の取り扱いが可能とな
る。また、試料を不活性気体中において取り扱っている
場合には、試料を直接に試料導入装置に取り付けること
ができるので、観察のためにグローブボックス等を用い
た操作の必要はなく、試料の取り扱いが容易となる。According to the present invention, a sample introducing device containing a sample that is degraded in the atmosphere and stored in a state isolated from the atmosphere can be set in a measurement room of the measurement device in a state that can be measured by a reduced pressure state formed in the measurement room. As a result, the sample can be introduced in a state isolated from the atmosphere without any additional equipment in the measurement room, and existing measurement equipment and sample introduction equipment without special sample introduction equipment can be installed. It is possible to use a sample introduction device of the present invention to handle a sample in a state where it is difficult to isolate the sample from the atmosphere. When the sample is handled in an inert gas, the sample can be directly attached to the sample introduction device, so there is no need to use a glove box or the like for observation. It will be easier.
【図１】図１は、本発明の試料導入装置を説明する斜視
図である。FIG. 1 is a perspective view illustrating a sample introduction device of the present invention.
【図２】図２は、本発明の試料導入装置に試料を取り付
けて蓋を閉めた状態を説明する斜視図である。FIG. 2 is a perspective view illustrating a state where a sample is attached to a sample introduction device of the present invention and a lid is closed.
【図３】図３は、本発明の試料導入装置を試料を測定す
る測定室内に設置した状態を説明する図である。FIG. 3 is a diagram illustrating a state where the sample introduction device of the present invention is installed in a measurement room for measuring a sample.
【図４】図４は、本発明の試料台の一例を説明する図で
ある。FIG. 4 is a diagram illustrating an example of a sample stage according to the present invention.
１…試料導入装置、２…試料導入装置本体、３…試料
台、４…空洞部、５…試料載置部、６…蓋体、６ａ…蓋
体の凹所、７…可動取り付け部材、８…付勢手段、９…
ガスケット、１０，１１…蓋体係止部材、１２…管路、
１３…開閉弁、１４…試料台上部、１５…試料台下部、
１６…試料台の中央部、１７…通気用の通路、２０…測
定室、２１…試料DESCRIPTION OF SYMBOLS 1 ... Sample introduction apparatus, 2 ... Sample introduction apparatus main body, 3 ... Sample stand, 4 ... Cavity part, 5 ... Sample mounting part, 6 ... Lid, 6a ... Lid recess, 7 ... Movable mounting member, 8 ... urging means, 9 ...
Gasket, 10, 11 ... lid body locking member, 12 ... pipe line,
13: open / close valve, 14: upper part of sample table, 15: lower part of sample table
16: central part of sample stage, 17: passage for ventilation, 20: measuring chamber, 21: sample
Claims (1)
導入装置において、試料を載置する試料台を取り付ける
空洞部、試料台を取り付けた空洞部を気密に覆うことが
できる開閉可能な蓋体、蓋体を常時開く方向へ付勢する
付勢手段、空洞部を減圧手段に結合する管路および開閉
弁を有し、空洞部の減圧によって蓋体を内部と外部の圧
力差によって気密に閉じた後に、測定室を減圧すること
によって、付勢手段の付勢力によって蓋体を開くことを
特徴とする試料導入装置。1. A sample introduction device for introducing a sample into a measurement chamber of a measurement device, a cavity for mounting a sample stage on which a sample is mounted, and an openable / closable lid capable of airtightly covering the cavity for mounting the sample stage. The body has a biasing means for biasing the lid in a direction to always open, a conduit connecting the cavity to the pressure reducing means, and an on-off valve, and the lid is hermetically sealed by the pressure difference between the inside and the outside by the pressure reduction of the cavity. A sample introduction device, wherein the lid is opened by the urging force of the urging means by depressurizing the measurement chamber after closing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10015431A JPH11213931A (en) | 1998-01-28 | 1998-01-28 | Sample introducing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10015431A JPH11213931A (en) | 1998-01-28 | 1998-01-28 | Sample introducing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11213931A true JPH11213931A (en) | 1999-08-06 |
Family
ID=11888609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10015431A Pending JPH11213931A (en) | 1998-01-28 | 1998-01-28 | Sample introducing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11213931A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012046775A1 (en) * | 2010-10-07 | 2012-04-12 | 株式会社日立ハイテクノロジーズ | Sample device for charged particle beam |
| CN107902265A (en) * | 2017-12-15 | 2018-04-13 | 苏州冠洁纳米抗菌涂料科技有限公司 | A kind of sealing transfer device |
| CN112630244A (en) * | 2020-12-15 | 2021-04-09 | 中国科学院大连化学物理研究所 | Sample transfer device applied to X-ray photoelectron spectrometer in specific atmosphere and application method |
| JP2022515471A (en) * | 2019-10-21 | 2022-02-18 | 上海耐默光電技術有限公司 | Sample encapsulation device for scanning electron microscope |
-
1998
- 1998-01-28 JP JP10015431A patent/JPH11213931A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012046775A1 (en) * | 2010-10-07 | 2012-04-12 | 株式会社日立ハイテクノロジーズ | Sample device for charged particle beam |
| US8729497B2 (en) | 2010-10-07 | 2014-05-20 | Hitachi High-Technologies Corporation | Sample device for charged particle beam |
| KR101399831B1 (en) * | 2010-10-07 | 2014-05-27 | 가부시키가이샤 히다치 하이테크놀로지즈 | Sample device for charged particle beam |
| DE112011103393B4 (en) * | 2010-10-07 | 2016-02-11 | Hitachi High-Technologies Corporation | Sample receiver for a charged particle beam |
| CN107902265A (en) * | 2017-12-15 | 2018-04-13 | 苏州冠洁纳米抗菌涂料科技有限公司 | A kind of sealing transfer device |
| CN107902265B (en) * | 2017-12-15 | 2023-10-27 | 苏州冠洁纳米材料科技有限公司 | Sealing transfer device |
| JP2022515471A (en) * | 2019-10-21 | 2022-02-18 | 上海耐默光電技術有限公司 | Sample encapsulation device for scanning electron microscope |
| US12040156B2 (en) | 2019-10-21 | 2024-07-16 | Shanghai Nemor Optoelectronic Technology Co., Ltd. | Sample protection device for scanning electron microscopy |
| CN112630244A (en) * | 2020-12-15 | 2021-04-09 | 中国科学院大连化学物理研究所 | Sample transfer device applied to X-ray photoelectron spectrometer in specific atmosphere and application method |
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