CN107902265A - A kind of sealing transfer device - Google Patents
A kind of sealing transfer device Download PDFInfo
- Publication number
- CN107902265A CN107902265A CN201711354018.1A CN201711354018A CN107902265A CN 107902265 A CN107902265 A CN 107902265A CN 201711354018 A CN201711354018 A CN 201711354018A CN 107902265 A CN107902265 A CN 107902265A
- Authority
- CN
- China
- Prior art keywords
- connector
- axis hole
- nacelle
- transfer device
- side wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 title claims abstract description 29
- 238000012546 transfer Methods 0.000 title claims abstract description 21
- 230000005540 biological transmission Effects 0.000 claims abstract description 25
- 238000003780 insertion Methods 0.000 claims abstract description 3
- 230000037431 insertion Effects 0.000 claims abstract description 3
- 239000000565 sealant Substances 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 239000004519 grease Substances 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims 1
- 238000004321 preservation Methods 0.000 abstract description 3
- 238000001493 electron microscopy Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 17
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 230000033001 locomotion Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000012356 Product development Methods 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 108010066057 cabin-1 Proteins 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005194 fractionation Methods 0.000 description 1
- 239000004047 hole gas Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000505 pernicious effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
- B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
- B65D81/20—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas
- B65D81/2069—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas in a special atmosphere
- B65D81/2076—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas in a special atmosphere in an at least partially rigid container
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D43/00—Lids or covers for rigid or semi-rigid containers
- B65D43/14—Non-removable lids or covers
- B65D43/20—Non-removable lids or covers linearly slidable
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D43/00—Lids or covers for rigid or semi-rigid containers
- B65D43/26—Mechanisms for opening or closing, e.g. pedal-operated
Abstract
The invention discloses a kind of sealing transfer device, it includes nacelle, cover board, transmission shaft, nacelle includes bottom plate, the side wall being connected on bottom plate, is opened in the axis hole of interior, the limited cover being connected on side wall, axis hole includes openend and blind end, passage is formed between limited cover and side wall, the setting parallel with the axial direction of axis hole of the length direction of the passage；One end of transmission shaft forms closed chamber from the insertion of the openend of axis hole and between the blind end of axis hole with can axially move with piston head and the other end with the first connector, piston head；Cover board includes the limiting plate that lateral edges are removably inserted within passage, the second connector that is fixed on limiting plate and can be connected with the first connector.Device can not only realize isolating for sample and air during transport, it is often more important that can be automatically turned under Electron Microscopy Room vacuum state, splendid protects sample to be tested.In addition the present apparatus can be used for the transport and preservation of sample.
Description
Technical field
The present invention relates to a kind of sealing transfer device, applied to electrochemical research.
Background technology
In scientific research and product development, material and the surface layer information of product that people sometimes study oneself are very
It is interested.And scanning electron microscope be it is a kind of using electron beam scanning sample surfaces so as to obtaining the electron microscope of sample message.It
The high-definition picture of sample surfaces can be produced, and image, in three-dimensional, scanning electron microscope can be used to the table of identification sample
Face structure.But sample by putting scanning electron microscope between sample preparation during, some sample meetings and air reaction, especially to sample
Surface is likely to result in very macrolesion, and the observed result of such Electronic Speculum cannot directly display the sample surfaces that people want to see
Energy.So do not solve the problems, such as that sample cannot electricity consumption by air pollution, this kind of particular sample during transporting and putting into Electronic Speculum
Mirror observes its pattern.
So-called Electronic Speculum particular sample objective table, refer to a kind of protective device can utilize this device realize the transport of sample with
Observation process in Electronic Speculum.
The content of the invention
In order to solve the above technical problems, the object of the present invention is to provide a kind of sealing transfer device.
A kind of sealing transfer device proposed by the present invention, it includes nacelle, cover board, transmission shaft,
Nacelle includes bottom plate, the side wall being connected on bottom plate, is opened in the axis hole of interior, the limit being connected on side wall
Position lid, axis hole includes openend and blind end, passage formed between limited cover and side wall, the length direction of the passage and axis hole
Axial parallel setting；
One end of transmission shaft with piston head and the other end with the first connector, piston head can axially move from axis
The openend in hole is inserted into and closed chamber is formed between the blind end of axis hole；
Cover board include lateral edges be removably inserted within passage limiting plate, be fixed on limiting plate and can with first company
The second connector that fitting is connected, the first connector and second connector, which are engaged, realizes that transmission shaft drives cover board to move
It is dynamic.
Further, sealant is provided between limiting plate and side wall.
Further, sealant is vacuum silicon grease.
Further, the second connector and the perpendicular setting of limiting plate.
Further, the first connector is mutually fastened with the second connector.
Further, nacelle is cuboid, and side wall surrounds the memory space of nacelle.The long wide scope of nacelle in 2cm-5cm,
Preferably long 4cm, wide 3.5cm, the nacelle short transverse are less than 1.7cm.
Further, transmission shaft is equal with axis hole quantity.
Further, axis hole is opened in opposite a pair of sidewalls of nacelle respectively, limited cover be also set, respectively on this one
To on side wall.
Further, nacelle further includes objective table, and objective table is separatably arranged in memory space.
Further, mounting hole is offered on bottom plate, objective table includes the 3rd connector and for placing thing to be transferred
The platform part of product, platform part and the 3rd connector are conductive material, and platform part is electrically connected with the 3rd connector, the 3rd connection
Part is projected to outside nacelle by mounting hole from bottom plate.
According to the above aspect of the present invention, the present invention has at least the following advantages：This sealing transfer device can not only be during transport
Realize isolating for sample and air, it is often more important that can be automatically turned under Electron Microscopy Room vacuum state, splendid protecting is treated
Sample.In addition the present apparatus can be used for the transport and preservation of sample.
Described above is only the general introduction of technical solution of the present invention, in order to better understand the technological means of the present invention,
And can be practiced according to the content of specification, below with presently preferred embodiments of the present invention and coordinate attached drawing describe in detail as after.
Brief description of the drawings
Fig. 1 is the fractionation structural representation of sealing transfer device；
Fig. 2 is the front view of nacelle；
Fig. 3 is nacelle left view；
Fig. 4 is nacelle top view；
Fig. 5 is cover board front view；
Fig. 6 is cover board left view；
Fig. 7 is cover board top view；
Fig. 8 is transmission shaft schematic diagram；
Fig. 9 is objective table schematic diagram；
Wherein：It is 1- nacelles, 2- cover boards, 3- transmission shafts, 4- objective tables, 11- axis holes, 12- side walls, 13- bottom plates, 14 spacing
Lid, 15- mounting holes, 16- passages, 17- memory spaces, 21- limiting plates, the second connectors of 22-, 31- piston heads, 32- first connect
Fitting, 41- platform parts, the 3rd connectors of 42-.
Embodiment
With reference to the accompanying drawings and examples, the embodiment of the present invention is described in further detail.Implement below
Example is used to illustrate the present invention, but is not limited to the scope of the present invention.
With reference to figures 1 through attached drawing 9, a kind of sealing transfer device, it includes nacelle 1, cover board 2, transmission shaft 3.
Nacelle 1 includes bottom plate 13, connection side wall 12 on base 13, the axis hole being opened in inside side wall 12, is connected to
Limited cover 14 on side wall 12, axis hole 11 include openend and blind end, and passage 16 is formed between limited cover 14 and side wall 12, should
The setting parallel with the axial direction of axis hole 11 of the length direction of passage 16.In the present embodiment, nacelle 1 is cuboid, and side wall 12 surrounds
The memory space 17 of nacelle 1.The long wide scope of nacelle 1 is in 2cm-5cm, preferably long 4cm, wide 3.5cm, the height of nacelle 1
Direction is less than 1.7cm.
One end of transmission shaft 3 can be moved vertically with piston head 31 and the other end with the first connector 32, piston head 31
Dynamicly it is inserted into from the openend of axis hole 11 and forms closed chamber between the blind end of axis hole 11.Transmission shaft 3 and 11 quantity of axis hole
It is equal.Axis hole 11 is opened in opposite a pair of sidewalls 12 of nacelle 1 respectively, and limited cover 14 is also set, respectively on a pair of sidewalls
On 12.
Cover board 2 includes the limiting plate 21 that lateral edges are removably inserted within passage, is fixed on limiting plate 21 and can be with
The second connector 22 that first connector 32 is connected.Second connector 22 and 21 perpendicular setting of limiting plate.First connector
32 and second connector 22 be engaged realize transmission shaft 3 drive cover board 2 move.In the present embodiment, the first connector 32 with
The connection mode of second connector 22 is mutually fastening.
In a kind of highly preferred embodiment, sealant is provided between limiting plate 21 and side wall 12.More preferably, it is close
Sealing is vacuum silicon grease.
Nacelle 1 further includes objective table 4, and objective table 4 is separatably arranged in memory space 17.Specifically, on bottom plate 13
Mounting hole 15 is offered, objective table 4 includes the 3rd connector 42 and the platform part 41 for placing article to be transferred, platform part 41
It is conductive material with the 3rd connector 42, and platform part 41 is electrically connected with the 3rd connector 42, the 3rd connector 42 passes through peace
Dress hole 15 is projected to outside nacelle 1 from bottom plate 13.
Operation principle：
Specific fit system is as follows：Under non-real air atmosphere in use, such as in the glove box full of argon gas, by objective table
In the mounting hole 15 of 4 the 3rd connector 42 insertion nacelle 1, it is located at so as to fulfill the platform part 41 of objective table 4 inside nacelle 1
Memory space 17, sample to be tested are put into the platform part 41 of objective table 4, and ensure that sample peak is less than side wall 12, if sample
It is sensitive to some atmosphere, as metal lithium sheet is sensitive to air or vapor, then between the 3rd connector 42 and mounting hole 15
It can be sealed set.
The piston head 31 of transmission shaft 3 is partially placed into the axis hole 11 of nacelle 1, since one end of axis hole 11 is closing knot
Structure, since piston head 31 is sealing structure relative to the axis hole wall of axis hole 11 and has certain frictional resistance, so allows for axis
It is empty that hole 11 forms a certain amount of compression after piston head 31 is inserted into, in the annular seal space between 11 blind end of piston head 31 and axis hole
Gas, the air pressure of compressed air can have the depth that piston head 31 is inserted into axis hole 11 to adjust.In addition the blind end of axis hole 11 can be
Selective connect-disconnect structure, in advance can unplug the blind end of axis hole 11, piston head 31 be filled in axis hole 11 again afterwards, by transmission shaft
3 go deep into certain depth in axis hole 11, and the blind end for blocking axis hole 11 again afterwards realizes the compressed gas air pressure adjustment of closing.
Transmission shaft 3 is filled in into nacelle 1 and then the second connector 22 by the first connector 32 and cover board 2 of transmission shaft 3
It is connected, connection herein can be buckle or riveting etc., and the limiting plate 21 of cover board 2 is filled in the spacing of nacelle 1 while connection
Passage 16 between lid 14 and side wall 12, limited cover 14 herein are partially attached to side wall 12, separately have part vacantly with side wall 12,
The passage 16 that limiting plate 21 moves is formed between overhanging portion and side wall 12.
The first connector 32 and the second connector 22 are successfully connected, while limiting plate 21 fills in more than 14 side wall 12 of limited cover
After passage, transmission shaft 3 is promoted finally to realize that the inside sky for the nacelle 1 that side wall 12 is formed with bottom plate 13 is completely covered in limiting plate 21
Between, the contact portion between limiting plate 21 and side wall 12 can smear sealant such as vacuum silicon grease in advance, realize that limiting plate 21 covers
It is sealing structure between the two after nacelle 1.
The sealing transfer device for building completion is taken out from non-real air atmosphere (glove box), being transferred to one afterwards can take out
Closed container is vacuumized (in the microscopical sample transfer bin of such as Scanning Electron) in the confined space of vacuum, at this time in axis hole 11
The gas of closing is transported outward as the reduction of air pressure in confined space can gradually expand against piston head 31 along axis hole 11 to nacelle
It is dynamic, and then transmission shaft 3 will drive cover board 2 together to cabin extracorporeal movement, due to being also sealed with one between cover board 2 and nacelle 1
Divide gas, with the reduction of air pressure in sealing space, this portion gas can also expand and promote cover board 2 to the side away from bottom plate 13
To movement, limited cover 14 will play limitation cover board 2 well and leave 12 surface of side wall at this time, and sealing space continues to be evacuated
And causing air pressure further to reduce, the gas of 11 inner sealing of axis hole is also increasing to the thrust of piston head 31, drives transmission shaft 3
And cover board 2 should be noted before cover board 2 will cannot completely enclose nacelle further away from nacelle at this time, nacelle interior sealing
The gas (argon gas such as stored in glove box) that gas still stores before, because before confined space vacuumizes, it is closed
Space is sometimes the sample protected well full of gas (such as air is to lithium piece) these argon gas being harmful to sample on objective table 4
Product, until the pernicious gas in confined space is largely pulled out confined space, damage possible to sample is reduced to and can connect
During the degree received, pass through the adjustment controls of some early periods (the advance blanket gas scale of construction, 21 sealing cabin 1 of limiting plate in such as axis hole 11
Afterwards exceed nacelle 1 size), under this degree, limiting plate 21 contacts the sealing to nacelle 1,2 meeting of inter-axle shaft 3 and cover board
Further away from nacelle, until after cover board 2 no longer blocks the sample on objective table 4, since piston head 31 (is mostly rubber material
Matter) between the inner wall of axis hole 11 (be mostly plastic material) have certain friction coefficient, so the gas closed in axis hole 11 with
That axis hole enclosure space is increasing, the air pressure of this portion gas is also less and less, until pushing away motionless piston head 31 in axis hole 11
After middle movement, relative motion will be stopped between transmission shaft 3 and cover board 2 and nacelle 1.
After completion is observed to sample, gas can be slowly injected in confined space makes in confined space atmospherically
Rise, after the air pressure of confining gas and piston head 31 are with 11 frictional force of axis hole during confined space air pressure is more than axis hole 11 at this time,
Transmission shaft 3 can drive cover board 2 close to nacelle again, and further, cover board 2 covers nacelle and intact preservation sample.
Nacelle 1,2 material of cover board can be plastics or stainless steel, and the first connector 32 of transmission shaft 3 is alternatively plastics or stainless
Steel.4 preferred metal materials of objective table, because always being needed sample conduction mostly in test, objective table 4 can pass through the 3rd at this time
Connector 42 receives electronics from outside and passes to platform part 41 and then pass to sample, realizes observation.
Attached drawing 2-7 gives the specific length parameter (unit cm) of dependency structure, this is intended merely to more preferable disclosure originally
Invention, in order to which other readings patent personnel are better understood from and implement the present invention, these length parameters are limited not as specific scope
Fixed or limited proportion.
The above is only the preferred embodiment of the present invention, is not intended to limit the invention, it is noted that for this skill
For the those of ordinary skill in art field, without departing from the technical principles of the invention, can also make it is some improvement and
Modification, these improvements and modifications also should be regarded as protection scope of the present invention.
Claims (10)
- A kind of 1. sealing transfer device, it is characterised in that：It includes nacelle, cover board, transmission shaft,The nacelle includes bottom plate, the side wall being connected on the bottom plate, is opened in the axis hole of the interior, is connected to Limited cover on the side wall, the axis hole include openend and blind end, passage are formed between the limited cover and side wall, should The setting parallel with the axial direction of axis hole of the length direction of passage；One end of the transmission shaft can axially move with piston head and the other end with the first connector, the piston head Ground forms closed chamber from the insertion of the openend of the axis hole and between the blind end of axis hole；The cover board includes the limiting plate that lateral edges are removably inserted within the passage, is fixed on the limiting plate and energy Enough the second connectors being connected with first connector.
- A kind of 2. sealing transfer device according to claim 1, it is characterised in that：Set between the limiting plate and side wall It is equipped with sealant.
- A kind of 3. sealing transfer device according to claim 2, it is characterised in that：Sealant is vacuum silicon grease.
- A kind of 4. sealing transfer device according to claim 1, it is characterised in that：Second connector and the limit The position perpendicular setting of plate.
- A kind of 5. sealing transfer device according to claim 1, it is characterised in that：First connector and described second Connector mutually fastens.
- A kind of 6. sealing transfer device according to claim 1, it is characterised in that：The nacelle is cuboid, the side Wall surrounds the memory space of the nacelle.
- A kind of 7. sealing transfer device according to claim 1, it is characterised in that：The transmission shaft and the axis hole quantity It is equal.
- A kind of 8. sealing transfer device according to claim 1, it is characterised in that：The axis hole is opened in nacelle respectively Opposite a pair of sidewalls on, the limited cover is also set, respectively in a pair of sidewalls.
- A kind of 9. sealing transfer device according to claim 6, it is characterised in that：The nacelle further includes objective table, The objective table is separatably arranged in the memory space.
- A kind of 10. sealing transfer device according to claim 9, it is characterised in that：Installation is offered on the bottom plate Hole, the objective table include the 3rd connector and the platform part for placing article to be transferred, the platform part and the described 3rd Connector is conductive material, and the platform part is electrically connected with the 3rd connector, and the 3rd connector passes through described Mounting hole is projected to outside the nacelle from the bottom plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711354018.1A CN107902265B (en) | 2017-12-15 | 2017-12-15 | Sealing transfer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711354018.1A CN107902265B (en) | 2017-12-15 | 2017-12-15 | Sealing transfer device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107902265A true CN107902265A (en) | 2018-04-13 |
| CN107902265B CN107902265B (en) | 2023-10-27 |
Family
ID=61869815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711354018.1A Active CN107902265B (en) | 2017-12-15 | 2017-12-15 | Sealing transfer device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107902265B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110514685A (en) * | 2019-09-29 | 2019-11-29 | 广西师范大学 | A kind of loading instrument for the test of in-situ scanning Electronic Speculum |
| WO2021077981A1 (en) * | 2019-10-21 | 2021-04-29 | 上海耐默光电技术有限公司 | Sample closure device for scanning electron microscopy |
| CN117038547A (en) * | 2023-09-28 | 2023-11-10 | 江苏快克芯装备科技有限公司 | Sealing transfer mechanism and chip packaging equipment |
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| CN110514685A (en) * | 2019-09-29 | 2019-11-29 | 广西师范大学 | A kind of loading instrument for the test of in-situ scanning Electronic Speculum |
| WO2021077981A1 (en) * | 2019-10-21 | 2021-04-29 | 上海耐默光电技术有限公司 | Sample closure device for scanning electron microscopy |
| CN117038547A (en) * | 2023-09-28 | 2023-11-10 | 江苏快克芯装备科技有限公司 | Sealing transfer mechanism and chip packaging equipment |
| CN117038547B (en) * | 2023-09-28 | 2023-12-05 | 江苏快克芯装备科技有限公司 | Sealing transfer mechanism and chip packaging equipment |
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