JPH11200071A - Surface exposing treatment vessel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a surface exposing treatment vessel capable of executing a desired surface exposing treatment without adversely affecting another production stage even if the specifications of the resist films formed in the respective sections of a metallic sheet or the production conditions, such as transporting speed, of the metallic sheet are changed at the time of producing etching parts in the continuous production stage using a long-sized belt-like metallic sheet as a blank. SOLUTION: The surface exposing treatment vessel 5 which has a surface exposing treatment liquid 7 and executes the surface exposing treatment on the resist films at the time of forming the resist films having the aperture parts exposing the metallic sheet according to prescribed patterns on the long- sized belt-like metallic sheet 1 includes a means 6 for changing the transporting route of the metallic sheet transported like a belt within the surface exposing treatment vessel to vary the contact time of the metallic sheet and the surface exposing treatment liquid while maintaining the transporting speed of the metallic sheet at the prescribed speed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus used for manufacturing an etching part such as a shadow mask incorporated in a color picture tube or a lead frame incorporated in a semiconductor integrated circuit device by a photo-etching method, and more particularly to the apparatus. In particular, the present invention relates to a surface treatment tank for performing a surface treatment on a thin metal plate.

[0002]

2. Description of the Related Art Electronic components such as a shadow mask incorporated in a color picture tube or a lead frame incorporated in a semiconductor integrated circuit device are made of a metal thin plate made of an iron alloy or copper and are subjected to a known photo-etching method. Manufacturing is the mainstream.

[0003] First, an alkali solution or the like is brought into contact with the surface of a thin metal plate to perform degreasing and leveling treatment on the surface of the thin metal plate. Next, a photosensitive resin, for example, a water-soluble photosensitive resin composed of polyvinyl alcohol and ammonium bichromate is applied to at least one of both surfaces of the thin metal plate 1 and dried, and as shown in FIG. Form 2 Next, as shown in FIG. 7B, the photosensitive resin layer 2 is exposed through an exposure pattern mask 3 having a predetermined pattern.
Is subjected to pattern exposure.

Next, a development process is performed to dissolve the unexposed and uncured portions of the photosensitive resin 2 to expose the metal surface from the openings corresponding to the pattern portions on the pattern mask 3 for exposure. Get 2. Next, after the chromic acid solution is brought into contact with the photosensitive resin layer 2, baking is performed on the metal sheet 1, a hardening treatment is performed on the photosensitive resin layer 2, and the photosensitive resin layer 2 after the development processing is processed as shown in FIG. Resist film 4 shown in c)
(Etching resistant layer).

[0005] Next, by using a ferric chloride solution or the like as an etching solution and bringing the etching solution into contact with the metal thin plate 1, etching is selectively performed on the portion of the metal thin plate 1 exposed from the resist film 4 (etching-resistant layer). Then, a predetermined etching pattern is formed on the metal sheet 1 as shown in FIG.

[0006] Next, a stripping solution such as an alkali solution is brought into contact with the etched metal sheet and then washed with water to form the metal sheet 1 on the metal sheet 1 as shown in FIG. After the resist film 4 (etching-resistant layer) is removed, the metal sheet 1 is cut using a mold or the like, and unnecessary parts are removed to obtain an etched part (part manufactured by a photo-etching method). It is. The manufacture of an etched component using a photoetching method includes at least the above-described steps.

Conventionally, in the above-described method of manufacturing an etched component using the photo-etching method, after a resist film 4 having an opening is obtained, a process called a skinning process is performed on the resist film 4. Thereafter, the metal sheet 1 may be subjected to an etching process.

In other words, simply by developing the photosensitive resin layer 2 after the pattern exposure, the bottom of the side surface of the opening 16 formed in the resist film 4X so as to expose the surface of the thin metal plate 1 is formed as shown in FIG. This is because, as shown in FIG. In addition, there is a case where the photosensitive resin slightly remains in the form of a thin film 18 at the bottom of the opening 16 where the metal sheet 1 should be exposed. When the etching is performed on the metal sheet 1, the hem 17 and the thin film 18 prevent the etching solution from contacting the metal sheet 1 at the opening 16 and the etching pattern to be formed on the metal sheet 1 does not have a desired shape. This results in an etched shape defect.

For this reason, the surface of the resist film 4X after the hardening process in which the openings 16 are formed is subjected to a surface treatment to sharpen the edge portion shape of the openings 16 formed in the resist film 4X, and to perform etching during etching. Then, a desired etching pattern is to be obtained.

[0010] An example of the skin appearance processing will be described below. Usually, it is generally said that the skin appearance treatment is performed in the skin appearance treatment tank 15. Here, FIG. 3 is a cross-sectional view of the skin appearance treatment tank 15,
FIG. 4 is a perspective view schematically illustrating a transport path of the metal sheet 1 transported in the skin treatment tank 15. As shown in FIGS. 3 and 4, the resist film 4X after the hardening process is completed.
Is transported into the skinning bath 15 where the direction changing rollers 6a, 6b and 6c
After being taken through the skinning treatment tank 15 via the skinning treatment tank 15, it is carried out from the skinning treatment tank 15. Here, the skin-releasing treatment liquid 7 (for example, an alkali metal permanganate solution containing an alkali metal hydroxide) is contained in the skin-releasing treatment tank 15. As a result, the metal sheet 1 conveyed while being bent inside the skin treatment tank 15 by the direction changing roller 6.
The surface of the resist film 4X on the thin metal plate 1 is slightly oxidized and dissolved by contact with the surface treatment liquid 7 in the surface treatment tank 15.

Due to slight oxidative dissolution on the surface of the resist film 4X, as shown in FIG.
19 is removed, the side surface of the opening 16 is shaped and the surface of the metal sheet 1 is completely exposed from the opening 16, and the edge shape of the opening 16 becomes clear. Membrane 4Y
Is obtained. Then, a thin metal plate 1 with a resist film 4Y
Is to be etched.

Here, each of the direction changing rollers 6 in the skin appearance processing tank 15 is a metal sheet 1 on which an etched part is formed.
It can be said that a roller generally called a non-touch roller is brought into contact with the left and right end regions on which the etched part is not formed so as not to contact the central region of the metal sheet. The rotation axis of the direction changing roller 6 is fixed to a wall surface or the like of the skin care treatment tank 15, and the position of the direction changing roller 6 is fixed. The direction changing rollers 6a and 6c are rotated by separately provided rotating means (not shown), and change the direction of the sheet metal 1 while conveying the sheet metal 1.
The squeezing roller 10 in FIGS. 3 and 4 is a cylindrical roller having a surface covered with an elastic body such as rubber and having a pair of thin metal plates 1 sandwiching the thin metal plate 1. By passing through, unnecessary liquid remaining on the surface of the metal sheet 1 is squeezed and removed.

In order to prevent the resist film 4 from being excessively oxidized and dissolved in the skinning treatment, the metal sheet 1 is carried out of the skinning treatment tank 15 and then the metal sheet 1 is separated from the stop solution (not shown). For example, the substrate is immersed in an oxalic acid solution (not shown) to stop the surface treatment of the resist film 4.

[0014]

Conventionally, a long strip-shaped metal sheet supplied from a take-up roll 11 has been used as a thin metal sheet 1 to be used as a material for an etched component, for reasons such as enhancing the manufacturing efficiency of the etched component. As shown in the example of FIG. 5, an etching part is often manufactured on a continuous manufacturing line.

In recent years, there has been a tendency for the number of types of etched parts to be small lots and many kinds, and various different specifications (for example, on a single strip-shaped metal sheet 1 on a continuous production line).
It is necessary to manufacture parts having manufacturing specifications, product specifications, etc.).

Therefore, in order to manufacture parts having various specifications on one strip-shaped metal sheet 1, the resist film 4 formed on the metal sheet 1 is not the same, and the strip-shaped metal sheet 1 is not formed. In some cases, the specifications of the resist film 4 are different in each part.

For example, the metal sheet 1 is taken up by the take-up roll 11.
At the beginning of the process, a thick resist film 4 is formed on the metal sheet 1, and when a certain amount of the metal sheet 1 is supplied from the winding roll 11, an etching part having another specification is manufactured. Therefore, a change such as forming a thin resist film 4 on a thin metal plate may be performed. In addition, it can be said that the material of the resist film 4 may be changed in each part of the strip-shaped metal sheet 1.

When the specifications (for example, film thickness, material, etc.) of the resist film 4 formed on the metal thin plate 1 are changed, the conditions for performing the above-described skinning process are also changed according to the specifications of the resist film 4. There is a need to.

Here, as one of means for changing the conditions of the skin exposure treatment, changing the contact time between the resist film 4 and the skin exposure treatment liquid 7 can be mentioned. That is, for example, in the portion where the resist film 4 is formed by increasing the film thickness, the contact time between the resist film 4 and the skin treatment solution 7 is increased, and conversely, the resist film 4 is formed by reducing the film thickness. In such a portion, changes are made such as shortening the contact time between the resist film 4 and the skin treatment solution 7. This is because, when the film thickness is reduced and the surface where the resist film 4 is formed is excessively exposed,
This is because the resist film 4 is excessively shaved by the oxidative dissolution, and the shape of the opening 16 is deformed. In addition, there is a problem that the metal thin plate 1 that should not be exposed from the resist film 4 is exposed.

As a means for changing the contact time between the resist film 4 and the skin treatment liquid 7, the level of the skin treatment liquid 7 in the skin treatment tank 15 may be varied. But,
It is cumbersome to change the level of the surface treatment liquid 7 according to the change in the specification of the resist film 4, and it takes time to raise and lower the level to a predetermined position. May not be able to perform appropriate skin appearance processing. Further, frequent raising and lowering of the liquid level is not desirable for maintenance of processing conditions such as the temperature of the skin care processing liquid and quality.

Next, as another means for changing the contact time between the resist film 4 and the skin exposure treatment liquid 7,
And changing the transport speed of the metal sheet 1 transported in a belt shape as appropriate. However, as described above, the manufacturing line of the etching component using the strip-shaped metal sheet 1 is often a continuous manufacturing process, and changes the contact time between the resist film 4 and the surface treatment liquid 7. Therefore, when the transport speed of the metal sheet 1 is changed in the skinning process, the manufacturing process other than the skinning process is affected.

For example, it is assumed that the transport speed of the metal sheet 1 is increased in order to shorten the contact time between the resist film 4 and the skin treatment solution 7. At this time, in the etching step which is the next step of the skinning treatment, the transport speed of the metal sheet 1 is increased, so that the time during which the metal sheet 1 stays in the etching step is shortened, and the metal sheet 1 is subjected to desired etching. Without being carried out, it is carried out to the next step of the etching (for example, the film removing step). As described above, in an etching part which is transported in a long strip shape and manufactured in a continuous process, changing the transport speed of the metal sheet 1 unnecessarily affects manufacturing processes other than the skinning process. Therefore, it is not desirable to change the transport speed of the metal sheet 1 in the skinning process.

Further, with the diversification of etching parts,
For example, it is necessary to flow thin metal sheets having various thicknesses of 0.1 mm to 0.3 mm into a production line. When etching metal thin plates having different thicknesses, the etching time for the metal thin plates varies. Therefore, the transport speed of the metal sheet flowing through the continuous production line is also changed for each sheet thickness. For example, when the plate thickness is large, the transport speed in the production line is slowed to take a long time in the etching process. Conversely, when the plate thickness is small, the etching time is short, so that the time in the etching process is reduced. In order to shorten the length, the conveying speed in the production line is increased.

If the transport speed of the metal sheet is changed according to the thickness of the metal sheet, the conventional skin treatment tank cannot perform the desired skin treatment. In other words, when the transport speed of the metal sheet is low, the contact time with the skin care treatment liquid in the skin care treatment tank becomes longer, the skin care treatment is performed excessively, and the diameter of the opening 16 becomes too large. The hole 16 becomes defective in shape. Conversely, when the conveying speed of the metal sheet is high, the contact time with the skin-finish treatment liquid is short, and the skin-finish processing becomes insufficient, which also causes the opening 16 to have a poor shape.

The present invention has been made in view of the above-mentioned problems. That is, according to the present invention, when a long strip-shaped metal thin plate is used as a raw material and an etching part is manufactured in a continuous manufacturing process, the specification of a resist film formed on each portion of the metal thin plate or the manufacturing speed of the metal thin plate, etc. It is an object of the present invention to provide a skin appearance treatment tank that can perform a desired skin appearance treatment without affecting other manufacturing processes even if the conditions are changed.

[0026]

That is, the present invention relates to a method for forming a resist film having an opening which exposes a metal sheet according to a predetermined pattern on a long strip-shaped metal sheet. In the skinning treatment tank containing the skinning treatment liquid, a means for changing the transport path of the metal sheet conveyed in a belt shape in the skinning treatment tank is provided, and the conveying speed of the metal sheet is reduced. A skinning treatment tank characterized in that the contact time between the metal thin plate and the skinning treatment liquid is made variable while maintaining a predetermined speed.

[0027]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 schematically shows an example of an embodiment of the skinning treatment tank 5 of the present invention, and FIG. 1 schematically shows an example of a transport path of the metal sheet 1 in the skinning treatment tank 5 of the invention. The present invention will be described with reference to FIG.

In FIG. 1 and FIG. 2, the metal sheet 1 is
It is a long strip-shaped material (sheet thickness 0.12 mm) made of an iron alloy (for example, nickel-42% nickel, iron-nickel alloy with the balance being iron) supplied from the take-up roll 11, as described above (prior art). As described in the above section, the process up to the application of the photosensitive resin layer 2, the pattern exposure, the development process, and the hardening process on the resist film 4 are completed, and the state shown in FIG. .

Next, the metal sheet 1 having undergone the hardening treatment
As shown in FIGS. 1 and 2, is carried into the skinning treatment tank 5 of the present invention. The skinning treatment tank 7 contains a skinning treatment liquid 7, and the level of the skinning treatment liquid 7 is constant. Further, direction changing rollers 6a, 6b, and 6c are provided in the skinning treatment tank 5, and the metal sheet 1 that has become a transport path bent through the direction changing rollers 6a, 6b, and 6c is a 6 (b) after the skin contacting treatment solution 7 (for example, an alkali metal permanganate solution containing an alkali metal hydroxide) is brought into contact with the solution.
It is carried out from the skin treatment tank 5. The metal sheet 1 carried out from the surface treatment tank 5 is immersed in a separately provided stop solution (not shown) such as an oxalic acid solution to stop the surface treatment of the resist film 4Y. Conveyed.

The direction changing roller 6 in the skin treatment tank 5
a, 6b and 6c are brought into contact with the left and right end regions on the left and right sides of the metal sheet on which no etched parts are formed, so as not to contact the central area of the metal sheet 1 on which the etched parts are formed;
The roller is generally called a non-touch roller.

The rotating shafts of the direction changing rollers 6a and 6c are fixed to the wall surface of the skin treatment tank 5, and the positions of the direction changing rollers 6a and 6c are fixed. Also,
The direction changing rollers 6a and 6c are rotated by a separately provided rotating means (not shown), and change the direction of the sheet metal 1 while conveying the sheet metal 1. The drawing roller 10 in FIGS. 1 and 2 is a pair of cylindrical rollers sandwiching the metal sheet 1 whose surface is covered with an elastic body such as rubber, and the metal sheet 1 is passed between the drawing rollers 10. Thus, the unnecessary liquid remaining on the surface of the metal sheet 1 is removed.

A feature of the skinning treatment tank 5 of the present invention is that it is provided with a means for changing a route when a metal sheet conveyed in a strip shape in the skinning treatment tank 5 is conveyed in the skinning treatment liquid 7. The contact time between the metal sheet 1 and the skin treatment liquid 7 is appropriately changed. In this embodiment, as a means for changing the transport path of the metal sheet 1 in the processing liquid 7, an arm 9 having one end passing through the rotating shaft of the direction changing roller 6c is provided. Here, the arm 9 is not fixed to the rotating shaft of the direction changing roller 6c, and the angle can be appropriately changed as shown in the figure by angle changing means (not shown) such as a gear. Has become. At the other end of the arm 9, a direction changing roller 6b is provided.
The transfer path of the metal sheet 1 in the processing liquid 7 is changed according to the change of the angle of the sheet metal.

Here, when the contact time between the metal sheet 1 and the surface treatment liquid 7 is changed in order to change the surface exposure processing according to the specification of the resist film 4 formed on the metal sheet 1, the arm 9 The angle is appropriately changed to change the position of the direction changing roller 6b. The surface of the skin treatment liquid 7 is kept constant, the angle of the arm 9 is appropriately changed, and the direction changing roller 6b is changed.
By changing the position, it is possible to appropriately change the transport distance of the metal sheet 1 in the skin tone treatment liquid 7 without changing the transport speed of the metal sheet 1. That is, it is possible to change the skinning processing time while keeping the transport speed of the metal sheet 1 constant.

Also, the sheet metal 1 used is thin,
When the transport speed of the metal sheet 1 is increased, the transport distance of the metal sheet 1 in the skin exposure liquid 7 is increased by lowering the arm 9, and the contact time between the metal sheet 1 and the skin exposure liquid is increased. As a result, the surface treatment of the metal sheet 1 can be sufficiently performed. Further, when the metal sheet 1 to be used is thick and the conveying speed of the metal sheet 1 is slowed down, by raising the arm 9, the conveying distance of the metal sheet 1 in the skin exposure treatment liquid 7 is shortened, The contact time between the metal sheet 1 and the skin treatment liquid is shortened, so that the metal sheet 1 can be prevented from being excessively exposed. As described above, in the skinning treatment tank of the present invention, a desired skinning treatment can be performed even when the transport speed of the metal sheet 1 is changed.

While the embodiment of the skinning treatment tank 5 of the present invention has been described above, the embodiment of the skinning treatment tank of the invention is not limited to the above-described drawings and description, and various modifications can be made. It goes without saying that you can go. For example, in the above description, the transport distance of the thin metal sheet 1 in the skin exposure treatment liquid 7 was changed by moving the direction changing roller 6b provided on the arm 9 having a variable angle. Is fixed, and the other direction changing roller 6a
Alternatively, the transfer distance of the thin metal sheet 1 in the skin exposure treatment liquid 7 may be changed by moving at least one of the positions 6c in the horizontal direction.

[0036]

As described above, according to the surface treatment bath of the present invention, the transport speed of the metal sheet is kept constant in accordance with the change in the specification of the resist film formed on each portion on the long strip-shaped metal sheet. It is possible to appropriately perform a desired skin appearance treatment without affecting manufacturing processes other than the skin appearance treatment process. Further, even if the manufacturing conditions such as the transport speed are changed according to the thickness of the thin metal sheet, it is possible to appropriately perform a desired skin appearance processing. That is, the present invention makes it possible to obtain high-quality etched parts without lowering the production efficiency, and it can be said that the present invention is excellent in practical use.

[0037]

[Brief description of the drawings]

FIG. 1 is an explanatory view showing a main part of an embodiment of a skin-dressing treatment tank according to the present invention.

FIG. 2 is an explanatory view showing an example of a thin metal sheet conveyed in the skin treatment tank of the present invention.

FIG. 3 is an explanatory view showing a main part of an example of a conventional skin care treatment tank.

FIG. 4 is an explanatory view showing an example of a conventional metal sheet conveyed in a surface treatment tank.

FIG. 5 is an explanatory view showing an example of a manufacturing process of a continuous etching component.

FIGS. 6A and 6B are explanatory diagrams showing an example of a skin appearance process in the order of steps.

FIGS. 7A to 7E are explanatory views showing an example of a manufacturing process of an etched component in the order of processes.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 metal thin plate 2 photosensitive resin layer 3 exposure pattern mask 4 resist film 5, 15 skinning treatment tank 6 direction changing roller 7 treatment liquid 8 treatment liquid tank 9 arm 10 squeeze roller 11 take-up roll 12 transport roller 16 open Hole 17 Hem 18 Thin film

Claims (1)

[Claims] 1. A surface treatment for forming a resist film having an opening exposing the metal sheet according to a predetermined pattern on the long strip-shaped metal sheet. A surface treatment tank having a liquid, wherein a means for changing a transport path of the metal sheet conveyed in a belt-like shape in the skin treatment tank is provided, and while maintaining the transport speed of the metal sheet at a predetermined speed, the metal sheet and the skin A skin care treatment tank characterized in that the contact time with the care treatment liquid is variable.