JPH11200011A5 - - Google Patents
Info
- Publication number
- JPH11200011A5 JPH11200011A5 JP1998017907A JP1790798A JPH11200011A5 JP H11200011 A5 JPH11200011 A5 JP H11200011A5 JP 1998017907 A JP1998017907 A JP 1998017907A JP 1790798 A JP1790798 A JP 1790798A JP H11200011 A5 JPH11200011 A5 JP H11200011A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1790798A JPH11200011A (ja) | 1998-01-13 | 1998-01-13 | 真空蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1790798A JPH11200011A (ja) | 1998-01-13 | 1998-01-13 | 真空蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11200011A JPH11200011A (ja) | 1999-07-27 |
| JPH11200011A5 true JPH11200011A5 (cs) | 2005-08-18 |
Family
ID=11956828
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1790798A Pending JPH11200011A (ja) | 1998-01-13 | 1998-01-13 | 真空蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11200011A (cs) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3596502B2 (ja) | 2001-09-25 | 2004-12-02 | セイコーエプソン株式会社 | マスク及びその製造方法、エレクトロルミネッセンス装置及びその製造方法並びに電子機器 |
| JP4669017B2 (ja) * | 2008-02-29 | 2011-04-13 | 富士フイルム株式会社 | 成膜装置、ガスバリアフィルムおよびガスバリアフィルムの製造方法 |
| JP2013044015A (ja) * | 2011-08-24 | 2013-03-04 | Fujifilm Corp | 成膜装置 |
| JP2016065292A (ja) * | 2014-09-25 | 2016-04-28 | 株式会社アルバック | スパッタリング装置および透明導電膜の形成方法 |
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1998
- 1998-01-13 JP JP1790798A patent/JPH11200011A/ja active Pending