JPH11197406A - Ultrasonic defoaming tank - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a defoaming tank capable of defoaming efficiently. SOLUTION: Ultrasonic oscillators 7, 10 are attached respectively to bottom parts of two defoaming tanks 2, 3 mutually communicated in lower parts and installed in an upstream side and a downstream side. The driving frequency of the ultrasonic vibrator 7 attached to the defoaming tank 2 in the upstream side is set to be low and the output is set high to accelerate defoaming of a liquid introduced into the defoaming tank 3. On the other hand, the driving frequency of the ultrasonic vibrator 10 attached to the defoaming tank 3 in the downstream side is set to be high and the output is set low to gather the foams of the liquid in the defoaming tank 3.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic degassing tank for removing air bubbles existing in a liquid.

[0002]

2. Description of the Related Art In the field of liquid optical measurement, etc.,
Conventionally, for example, as shown in FIG. 5, a defoaming tank a is used to reduce the influence of disturbance due to bubbles contained in the test solution.
The test liquid c is introduced from the introduction pipe b connected to the side
Is introduced to reduce the flow rate in the degassing tank a to collect bubbles upward to separate gas and liquid, and to discharge gas from the exhaust pipe d, while connecting the pipe e connected to the bottom of the defoaming tank a. The sample liquid c after gas separation from the sample is supplied to an analyzer (not shown).

[0003]

However, in the gas-liquid separation method as described above, relatively large bubbles can be separated, but fine bubbles remain dispersed in the liquid and are difficult to collect upward. In particular, it is difficult to completely separate gas and liquid with a highly viscous liquid, and analysis and measurement are often performed in a state where bubbles are not completely removed, and it has been difficult to improve measurement accuracy.

[0004] The present invention has been made in view of such circumstances,
An object of the present invention is to provide a defoaming tank capable of defoaming efficiently.

[0005]

According to the present invention, means for solving the above-mentioned problems are constituted as follows. That is, according to the first aspect of the present invention, an ultrasonic vibrator is attached to the defoaming container, and ultrasonic vibration is applied to the liquid introduced into the defoaming container to promote the foaming of the liquid or to generate bubbles. Are configured to be aggregated.

According to the second aspect of the present invention, an ultrasonic vibrator is attached to each of the upper and lower side walls of the cylindrical defoaming tank, and the upper ultrasonic vibrator has a low driving frequency and a large output. To promote the bubbling of the liquid introduced into the defoaming tank, while the lower ultrasonic vibrator has a high driving frequency and a small output to set Are characterized by being configured to collect bubbles.

According to the third aspect of the present invention, the ultrasonic vibrators are attached to the bottoms of two defoaming tanks arranged on the upstream side and the downstream side, respectively, with the lower part communicating with each other, and the upstream side degassing tank is provided. The ultrasonic vibrator attached to the foam tank has a low driving frequency and a large output to promote the foaming of the liquid introduced into the defoaming tank, while the ultrasonic transducer attached to the downstream defoaming tank The sonic vibrator is characterized in that the driving frequency is set to be high and the output is set to be small so that bubbles in the liquid in the defoaming tank are gathered.

By applying ultrasonic vibration to the liquid, the foaming of the gas dissolved in the liquid is promoted, or the bubbles can be aggregated, so that efficient defoaming becomes possible.

In particular, by applying high-energy, low-frequency ultrasonic vibrations, ultrasonic cavitation can be generated in a liquid to actively promote foaming, and high-frequency, low-energy ultrasonic waves can be generated. By applying the vibration, an ultrasonic standing wave is gently generated in the liquid, and the bubbles can be aggregated with each other. In addition, highly efficient degassing can be performed.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the ultrasonic degassing tank of the present invention will be described in detail with reference to the drawings. FIG. 1 is a configuration diagram when two degassing tanks are connected in series. Reference numeral 1 denotes a liquid introduction pipe, 2 denotes a first degassing tank, 3 denotes a second degassing tank, and 4 denotes a first defoaming tank 2. Connecting pipes connecting the first and second defoaming tanks 3, 5 and 6, exhaust pipes, 7 a first ultrasonic vibrator attached to the bottom of the first defoaming tank 2, and 8 a first ultrasonic vibrator 7 is a power source for driving 7, 9 is a nut for fixing the first ultrasonic vibrator 7, 10 is a second ultrasonic vibrator attached to the bottom of the second defoaming tank 3, 11 is a second ultrasonic vibrator A power supply for driving the ultrasonic vibrator 10, a nut 12 for fixing the second ultrasonic vibrator 10, and a liquid outlet tube 13.

The above-mentioned first and second ultrasonic vibrators 7, 10
Consists of piezoelectric elements, such as piezoelectric ceramic materials such as lead zirconate titanate, barium titanate, or lithium niobate, or quartz, and their thickness changes when an AC voltage is applied. Ultrasonic waves are generated, and the frequency and output of the ultrasonic waves can be appropriately changed by the power supplies 8 and 11.

[0012] The power source 8 of the first ultrasonic transducer 7 is low frequency (e.g., 15 to 50 KHz), and is set the output to a large (e.g. ^{10Kw / m 2 ~100Kw / m 2} ), thereby, In the first degassing tank 2, ultrasonic cavitation is generated in the liquid by high-energy ultrasonic vibration, and fine bubbles dissolved in the liquid are actively foamed, and the gas desorbed from the liquid is generated. Is discharged from the exhaust pipe 5 to the outside, while the supernatant liquid moves to the second defoaming tank 3 via the connection pipe 4.

The power supply 11 of the second ultrasonic vibrator 10 is set to have a high frequency (for example, 100 KHz to 1 MHz) and a low output (for example, 3 Kw / m ^{2 to} 9 Kw / m ² ).
In the second defoaming tank 2, defoaming is performed by gently generating ultrasonic standing waves in the liquid and collecting microbubbles remaining in the liquid to aggregate into large bubbles to facilitate floating. The efficiency is improved. By such a two-stage defoaming process, only the completely degassed liquid is sent from the liquid outlet pipe 13 to the analyzer 14 (see FIG. 2). Note that the frequencies and outputs of the power supplies 8 and 11 may be appropriately changed and set according to the viscosity of the liquid to be defoamed, the degree of bubbles contained, and the like.

FIG. 2 shows the flow of the sample liquid. Reference numeral 21 is a liquid storage tank, 22 is a pump, 23 is a circulation line, 24 is an electromagnetic on-off valve, 141 is a light source, 142 is an optical system, 143 is a flow cell, and 144 is a flow cell. The reflecting mirror 145 is a diffraction grating, 146
Is the main body of the analyzer. In addition, the branch flow rate to the liquid introduction pipe 1 at the branch point B in the figure is, for example, about 1%. In such a flow, since bubbles in the sample liquid introduced into the flow cell 143 are removed by the degassing tanks 2 and 3, high analysis accuracy is obtained, and for example, a chemical concentration monitor provided in a semiconductor manufacturing line. And a liquid chemical monitor such as a liquid chemical in-line particle monitor.
In addition, such a defoaming system can be used for a medical drip system and the like, and can be appropriately used when deaeration in a liquid is required.

FIG. 3 shows a different embodiment, in which 101 is a liquid introduction pipe, 102 is a defoaming tank, 105 is an exhaust pipe, 107 and
207 is a first ultrasonic transducer, 109 and 209 are nuts,
Reference numerals 108 and 208 denote power supplies, 110 and 210 denote second ultrasonic vibrators, 112 and 212 denote nuts, 111 and 211 denote power supplies, and 113 denotes a liquid outlet pipe.
The defoaming is promoted at the upper part of 2, the bubbles are gathered at the lower part, and highly efficient defoaming is performed in the single defoaming tank 102.

FIG. 4 shows another embodiment, wherein 301 is a liquid introduction pipe, 302 is a defoaming tank, 305 is an exhaust pipe, 307 is a first ultrasonic vibrator section, 310 is a second ultrasonic vibrator section, 30
Reference numerals 8 and 311 denote power supplies and 313 denotes a liquid outlet pipe. In this case, the defoaming tank 302 is formed in a cylindrical shape, and its peripheral wall 332 is provided.
To one of the electrode plates 33 via a buffer material such as ultrasonic grease.
3 is wound in a ring shape, and a piezoelectric element 334 is attached in a ring shape on the outside thereof, and the other two electrode plates 335 and 336 are attached in a ring shape on the upper half and the lower half respectively. And the first ultrasonic vibrating section 3
07 forms a second ultrasonic vibration section 310 in the lower half. With such a configuration, the ultrasonic vibration waves can be concentrated toward the central portion of the defoaming tank 302, and the air bubbles can be collected at the central portion, so that extremely efficient defoaming can be performed.

[0017]

As described above, according to the first aspect of the present invention, by applying ultrasonic vibration to the liquid introduced into the defoaming container, foaming of the liquid is promoted, or bubbles are generated. Are collected, so that bubbles in the liquid can be efficiently removed.

According to the second aspect of the present invention, the ultrasonic vibrators are attached to the upper and lower sides of the side wall of the cylindrical defoaming tank, respectively, and the upper ultrasonic vibrator has a low driving frequency and
While the output is set to high, the lower ultrasonic vibrator sets the drive frequency high and the output is low, so at the top of the defoaming tank, ultrasonic cavitation is generated in the liquid,
Blowing can be positively promoted, and underneath, quiet standing ultrasonic waves can be generated in the liquid, and bubbles can be gathered together. Becomes possible.

According to the third aspect of the present invention, the ultrasonic vibrators are attached to the bottoms of the two defoaming tanks arranged on the upstream side and the downstream side, respectively, with their lower parts communicating with each other, and The ultrasonic vibrator attached to the defoaming tank has a low driving frequency and sets a large output, while the ultrasonic vibrator attached to the downstream defoaming tank has a high driving frequency and
Since the output is set to a small value, ultrasonic cavitation is generated in the liquid in the upstream defoaming tank and foaming can be actively promoted, and quiet in the liquid in the downstream defoaming tank. In this way, an ultrasonic standing wave can be generated, and bubbles can be aggregated, so that efficient degassing can be performed.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing one embodiment of an ultrasonic defoaming tank of the present invention.

FIG. 2 is a drawing showing a flow of the sample liquid.

FIG. 3 is a configuration diagram showing a different embodiment of the ultrasonic degassing tank.

FIG. 4 is a configuration diagram showing another embodiment of the ultrasonic degassing tank.

FIG. 5 is a configuration diagram showing an example of a conventional defoaming tank.

[Explanation of symbols]

2, 3, 102, 302 ... degassing tank, 7, 10, 107,
207, 110, 210, 307, 310 ... ultrasonic vibrator, 8, 11, 108, 208, 111, 211, 30
8, 311 ... power supply.

Claims (3)

[Claims] An ultrasonic vibrator is attached to a defoaming container, and ultrasonic vibration is applied to a liquid introduced into the defoaming container to promote foaming of the liquid or to collect bubbles. Ultrasonic degassing tank characterized by doing. 2. An ultrasonic vibrator is attached to each of the upper and lower side walls of a cylindrical defoaming tank, and the upper ultrasonic vibrator has a low driving frequency and a high output to defoam. While promoting the bubbling of the liquid introduced into the tank, the lower ultrasonic vibrator has a high driving frequency and a small output so that bubbles in the liquid in the defoaming tank are gathered together. An ultrasonic defoaming tank characterized in that: 3. An ultrasonic vibrator is attached to each of the bottoms of two defoaming tanks arranged on the upstream side and the downstream side with the lower portions communicating with each other, and the ultrasonic wave attached to the defoaming tank on the upstream side. The vibrator has a low driving frequency and a large output to promote the bubbling of the liquid introduced into the defoaming tank, while the ultrasonic vibrator attached to the downstream defoaming tank has a low driving frequency. An ultrasonic defoaming tank characterized in that it is configured to have a high output and a small output so as to collect bubbles in the liquid in the defoaming tank.