JPH11190639A - Production information display device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a production information display device that can effectively compare present production information with past production information. SOLUTION: A main control part 8 originates first image data showing a first chart on the basis of information of a production state successively detected by a sensor 1 and originates second image data showing a second chart using logging data held to an external storage device 4. In this originating process, at least either one of image data is originated according to assignment related to an axis accepted by an input device 7 and a GU 15. The main control part 8, the GU 15 and a display 6 output and display the first chart and second chart on the same image plane on the basis of the first image data and second image data. An operator can therefore compare the first chart with the second chart visually and easily.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a production process of a substrate processing apparatus such as a vertical CVD apparatus, a horizontal CVD apparatus, a single-wafer CVD apparatus, etc., for performing production processing on a substrate such as a semiconductor wafer or a glass substrate. The present invention relates to a production information display device that displays a chart based on information such as temperature, pressure, gas flow rate, and the like (hereinafter referred to as production information). In particular, production information that is sequentially detected and past production information are displayed on the same screen. To a production information display device.

[0002]

2. Description of the Related Art Conventionally, in a substrate processing apparatus such as a CVD apparatus, production processing such as CVD processing is performed on a substrate. Such a substrate processing apparatus allows an operator to grasp the status of the production processing. In order to perform this, there is provided a production information display device that detects production information such as temperature and pressure in production processing by a sensor and displays and outputs various charts based on the detected production information. A semiconductor manufacturing apparatus provided with such a production information display device will be described with reference to FIG.

In the semiconductor manufacturing apparatus 11, a sensor 13 provided in a reaction furnace 12 for performing a production process on a wafer detects a temperature and a pressure in the reaction furnace 12, and a control unit 14 controls a temperature detected by the sensor 13. And based on pressure
For example, a chart including the current production information as shown in FIG. FIG.
0 is a trend chart showing the relationship between furnace temperature and time.

Further, in the semiconductor manufacturing apparatus 11, the control unit 14 controls the sensor 1 at predetermined sampling intervals (for example, one second) at a time designated by the operator.
3 is logged (evacuated and stored) in the external storage device 16. The external storage device 16
The data structure of the production information that is logged in, for example, as shown in FIG. 11, is a record having the time at which logging was actually performed and the temperature and pressure in the reactor 12 at that time. The record is managed as a file in which the time designated by the operator is collected.

In the semiconductor manufacturing apparatus 11, the control unit 14 can output a chart based on the production information logged in the external storage device 16 to the display 15 and respond to an operator's instruction. Thus, the above-mentioned chart and the chart based on the logged production information can be switched and displayed. FIG. 12 shows an example of a temperature-related trend chart and a pressure-related trend chart that are displayed and output based on the logged production information.

[0006]

In a substrate processing apparatus such as a semiconductor manufacturing apparatus, it is necessary to grasp the current state of the production processing and change the settings of the production processing. It is necessary to compare a chart including the production information with a chart based on past production information. In such a case, in the conventional production information display device, it is necessary to switch and display the chart including the current production information and the chart based on the past production information. In order to grasp the difference, it is necessary to switch the chart many times, and there is a problem that it takes time and effort.

[0007] In addition, since the production processing in the substrate processing apparatus is generally intended for a substrate requiring high-precision processing, high precision is required for temperature control and the like in the production processing. Therefore, it is important to quickly grasp the status of the production process and promptly reflect the situation on the settings related to the control of the production process. The present invention has been made in view of the above-described conventional circumstances, and has as its object to provide a production information display device capable of effectively comparing current production information and past production information.

[0008]

In order to achieve the above-mentioned object, a production information display device according to the present invention comprises: a first chart based on production state information of a substrate processing apparatus sequentially detected by a sensor; A production information display device for displaying and outputting a second chart based on past production state information on the same screen, a sensor for sequentially detecting a production state of the substrate processing apparatus, and a past production state of the substrate processing apparatus. A first data chart based on information on a production state sequentially detected by a sensor; a logging data holding means for holding information on the axis; First
In addition to creating image data, second image data representing the second chart is created using the logging data held in the logging data holding unit.
A data creating unit that creates at least one of the image data in accordance with the designation of the axis received by the axis designation receiving unit; and a first image data and a second image data that are created by the data creating unit. 1
Display means for displaying and outputting the chart and the second chart on the same screen.

Here, the designation of the axis serving as the reference of the chart to be displayed and output includes the position of the origin of the axis, the scale (scale) of the axis, and the type of axis (for example, temperature axis, time axis, pressure axis). Etc.). As a specific specification method, the specification of the information itself, or
A method of moving the position of the chart already displayed as the origin position of the axis in the up, down, left and right directions, and a method of expanding or reducing the chart already displayed as the scale on the axis in the vertical and horizontal directions may be used. It is only necessary to be able to specify the position, scale, and data type of the chart to be displayed.

In the above-mentioned production information display device, the axis designation receiving means receives designation from the operator regarding the axis serving as the reference of the chart to be displayed and output, and the data creation means receives the designation based on the production state information sequentially detected by the sensor. While creating the first image data representing one chart,
Using the logging data held in the logging data holding means, second image data representing the second chart is created, and in the creation processing, at least one of the image data is specified with respect to the axis received by the axis specification receiving means. The first chart and the second chart are displayed and output on the same screen based on the first image data and the second image data created by the data creating means. Therefore, the operator can easily compare the first chart and the second chart visually.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS As an example of a production information display device according to the present invention, a production information display device used in a semiconductor manufacturing apparatus will be described with reference to FIG. This production information display device includes a sensor 1, an external interface 2, a memory 3, an external storage device 4, a GUI (Graphical User I
nterface) 5, display 6, and input device 7
And a main control unit 8.

The sensor 1 is provided in a semiconductor manufacturing apparatus,
Production information such as temperature, pressure, gas flow rate and the like in the semiconductor manufacturing apparatus is detected, and a signal corresponding to the detected information is output. The external interface 2 receives the signal output from the sensor 1 and passes it to the main control unit 8.

The memory 3 is a storage device for reading and writing data and holding the data in a freely readable manner. The memory 3 holds image data representing an image to be output on the screen of the display 6 in correspondence with each dot constituting the screen of the display 6.
It has a memory area similar to a RAM (Video Random Access Memory). And in this memory area,
A first memory area for holding image data of a chart (hereinafter, referred to as a first chart) based on data including current production information, and a chart (hereinafter, referred to as a second chart) based on logged past production information. And (2) a second memory area for holding image data.

The external storage device 4 is a device for holding the production information detected by the sensor 1, and similarly to the conventional example shown in FIG. 11, the time when the logging was actually performed and the time in the reactor at that time. The production information is held as a record having the temperature and the pressure. The records are managed as one file for each logging time specified by the operator.

The GUI 5 causes the display 6 to output an image based on the information received from the main control unit 8,
The main control unit 8 receives an input from an input device 7 such as a keyboard or a mouse for buttons representing various instructions in an image displayed on the display 6 and notifies the main control unit 8 of the input.
The input received by the GUI 5 includes the type of chart to be displayed (for example, a chart of time and temperature, etc.),
There are instructions for superimposing charts, designation of past production information to be superimposed, parallel movement with respect to the second chart, and instructions for enlargement / reduction. For example, with regard to the translation of the second chart, the GUI 5 includes a left translation button for translating the second chart to the left on the screen of the display 6 as shown in FIG. And a right-translation button for causing the input device 7 to accept the input.

The main control unit 8 has a current data acquisition unit, a logging unit, a chart scrolling unit, a logging data acquisition unit, a position calculation unit, a dot data creation unit, and a data synthesis unit. I have. The current data acquisition means acquires production information notified from the external interface 2 at preset intervals. When the logging unit receives a logging instruction from the GUI 5, the logging unit stores the production information acquired by the current data acquisition unit in the external storage device 4 in association with the current time received from the timer in the main control unit 8. .

When displaying the production information obtained by the current data obtaining means as a chart, the chart scrolling means determines whether or not the obtained production information can be displayed in a predetermined range on the screen, and determines whether the obtained production information can be displayed within the predetermined range. If the display cannot be performed, the position of the chart in the first memory area is entirely moved (so-called scrolling) so that the production information is displayed within a predetermined range. Since scrolling is generally known, a detailed description thereof will be omitted here.

The logging data acquisition means extracts necessary production information from the external storage device 4 or calculates using the production information of the external storage device 4 according to an operator's instruction received from the GUI 5 as described below. To pass the data to the position calculating means. That is, when an instruction to overlay a chart and an instruction to file past production information to be overlayed are received from the GUI 5, the logging data acquisition unit searches the external storage device 4 for the corresponding file, and searches for the file from the first record in the file. Take out.

When an instruction to translate the second chart along the X-axis (horizontal axis) is received from the GUI 5 in a state where the charts are already superimposed,
For example, as shown in FIG. 3A, in the case of a move instruction to the left, a record acquired from the file is retrieved from a record after the record acquired last time, while if the movement direction is right, the record acquired in the previous time is acquired. From the previous record.

When an instruction to reduce the second chart in the X-axis direction is received from the GUI 5 in a state where the charts are already superimposed, for example, as shown in FIG. Records are acquired at predetermined intervals according to the reduction ratio. FIG. 3 shows an example in which there is an instruction to multiply the second chart in the X-axis direction by 倍.

When an instruction to enlarge the second chart in the X-axis direction is received from the GUI 5 in a state where the charts are already superimposed, for example, as shown in FIG. Then, new production information is created from a plurality of records in accordance with the enlargement ratio, and the created production information is extracted together with the production information of the original record. FIG. 3 shows an example in which an instruction to double the second chart in the X-axis direction is given. In this case, the position of the X-axis is (2n-1) (n is an integer). At the time, the production information of record number n is taken out and X
When the position of the axis is (2n) (n is an integer), the production information of the record numbers n and n + 1 is taken out and an average value is created.

When an instruction to translate the second chart along the Y-axis (vertical axis) is received from the GUI 5 in a state where the charts are already superimposed,
A record is acquired in the same manner as in the superposition, and the value of the acquired record is adjusted according to the instruction and passed to the position calculating means. For example, when there is an instruction to translate upward by 10 divisions, the data values corresponding to 10 divisions are added to all the acquired records, while 10
If there is an instruction to translate downward by the scale,
For all the acquired records, the data value corresponding to 10 scales is subtracted.

When the instruction to enlarge or reduce the second chart along the Y-axis (vertical axis) is received from the GUI 5 in a state where the charts have already been superimposed, the same procedure as in the superimposition is performed. To obtain a record, multiply and divide by the value of the obtained record according to the instruction, and pass it to the position calculating means. For example, if there is an instruction to double the size in the Y-axis direction, and if there is an instruction to double the data value in all of the acquired records while doubling the data value in the Y-axis direction, Sets the data value to に つ い て for all of the acquired records.

The position calculating means receives the production information obtained by the current data obtaining means or the logging data obtaining means, and performs a process of calculating coordinates at which the production information is displayed. Here, in this position calculation process, a data value in the production information corresponding to the type of the chart designated by the operator is used. If a chart with the pressure as the axis is specified using the temperature value of, the pressure value in the production information is used. A specific example of the processing by the position calculating means will be described with reference to FIG. The coordinates (45, 60) on the screen are used as the reference points of the chart, the interval of one graduation on the X-axis representing the order of data in the data to be displayed is 30 dots, and the 1-axis on the Y-axis representing the temperature. A description will be given of a process of calculating the position of the production information A in the figure when the interval between the scales (10 ° C.) is 15 dots.

Assuming that the X-axis coordinate of the production information A which is the sixth data and the temperature is 20 ° C. is x, and the Y-axis coordinate is y, these coordinates are expressed by the following equations (1) and (2). ).

[0026]

(Equation 1)

As a result, the coordinates of the production information A on the screen are calculated to be (225, 90).

The dot data creating means stores image data (for example, data of color information of the chart) in a form constituting a chart in a portion corresponding to the coordinates calculated by the position calculating means in the memory area. If the coordinates of the production information acquired by the current data acquisition unit are stored in the first memory area, the coordinates of the production information acquired by the logging data acquisition unit are stored.
It is stored in the second memory area. The data synthesizing means includes:
Image data corresponding to the same dot on the screen stored in the memory area and the second memory area are combined with each other to create display chart data, and the created display chart data is passed to the GUI 5.

Here, the data creating means described in the claims mainly comprises a current data acquiring means of the main control unit 8, a logging data acquiring means, a position calculating means, and a dot data creating means. The logging data holding means described in the claims is mainly constituted by the external storage device 4, and the axis designation receiving means described in the claims is
The display means mainly includes a GUI 5 and an input device 7, and the display means in the claims includes a data synthesizing means, a GUI
I5 and the display 6.

Next, the operation of the production information display device will be described with reference to FIG. When the power of the production information display device is turned on, the main control unit 8 initializes the display chart data (step S1), and as long as there is a chart output request.
The following processing is continuously performed (step S2).

First, when the main control unit 8 receives an instruction to superimpose charts and a designation of a file containing production information to be superimposed from the operator via the GUI 5 (step S3), the main control unit 8 acquires the logging data acquisition means. Obtains the production information of the corresponding file from the beginning of the file, the position calculating means calculates the coordinates on the screen with respect to the obtained production information, and the dot data generating means corresponds to the calculated coordinate position of the second memory area. The image data of the form forming the chart is stored in the portion (steps S4 to S
8) The above processing (steps S4 to S8) is repeatedly performed until there is no more production information capable of storing image data in the second memory area.

When there is no more production information to be processed (step S4), it is detected whether or not it is time for the current data acquisition means of the main controller 8 to read the current production information (step S9). . As a result, if it is the time to read, the current data acquisition means receives the current production information detected by the sensor 1 from the external interface 2 (step S10). When the operator gives an instruction for logging, the logging unit of the main control unit 8 performs logging to the external storage device 4 based on the production information currently acquired by the data acquisition unit.

When the scroll means of the main control unit 8 displays the production information currently received by the data acquisition means on the screen, it detects whether or not scrolling is necessary, and if necessary, the first memory area. (Steps S11 and S12). Next, the position calculation means receives the production information, calculates coordinates on the screen for the production information, and the dot data creation means forms a chart in a portion corresponding to the calculated coordinate position in the first memory area. Store the data (step S1
3, S14).

The data synthesizing means synthesizes image data corresponding to the same dot on the screen stored in the first memory area and the second memory area to generate display chart data. It is created (step S15), and the created display chart data is passed to the GUI 5 (step S16). With this, GUI5,
For example, a screen in which the first chart and the second chart are superimposed as shown in FIG. Therefore, the first chart and the second chart can be compared easily as compared with the related art.

Here, only by the above-described superimposing operation of the charts, as shown in FIG. 6A, the time when the first chart and the second chart are in the same state (in FIG. ) May be shifted, and an unfavorable state may occur when comparing charts. On the other hand, in the above-described processing, the operation of adjusting the display of the second chart can also be performed. Hereinafter, the display adjustment operation of the second chart will be described.

First, after the first chart and the second chart are superimposed, the processing (steps S2 to S16) is repeatedly performed. In step S3 of the repeatedly performed processing, the main control unit 8 controls the GUI 5 , An adjustment instruction for the second chart is received from the operator. Note that the adjustment instruction includes the parallel movement, enlargement / reduction, etc. of the second chart as described above.

When the adjustment instruction is received, the logging data acquisition means of the main control unit 8 acquires the production information according to the instruction from the external storage device 4, or
The production information corresponding to the instruction is generated by using the production information of the above, the position calculating means calculates the coordinates of the obtained or generated production information on the screen, and the dot data generating means calculates the calculated coordinates of the second memory area. The image data in the form of the chart is stored in the portion corresponding to the position (steps S4 to S4).
8) The above processing (steps S4 to S8) is repeatedly performed until there is no more production information capable of storing image data in the second memory area.

Thus, the subsequent processing (step S9)
To S16), the GUI 5 displays the first chart,
A screen in which the second chart adjusted in accordance with the instruction of the operator is superimposed is displayed on the display 6. As described above, according to the display adjustment operation of the second chart described above, the second chart superimposed on the first chart as shown in FIG.
It can be adjusted as shown in (e). Therefore, the first chart and the second chart can be compared quickly and easily visually.

For example, when the screen as shown in FIG. 6A is displayed, the first chart and the second chart are changed as shown in FIG. Times representing the same state can be displayed in agreement with each other, and the first chart and the second chart can be compared quickly and easily.

In the above-described embodiment, the first chart and the second chart are displayed on the same screen so that they can be superimposed. However, as shown in FIGS. Even if the area for displaying one chart and the area for displaying the second chart are displayed separately and displayed side by side or up and down on the same screen, the first chart and the second chart can be easily displayed as compared with the related art. Comparison with charts can be performed.

In the above embodiment, the second memory area is not scrolled when scrolling the first memory area. However, when the first memory area is scrolled, the second memory area is scrolled simultaneously. May be made to perform the same scroll processing. In this case, since the positional relationship between the first chart and the second chart does not change by scrolling the first chart, the first chart and the second chart are not changed. Can be easily compared.

In the above-described embodiment, the display is adjusted only for the second chart. However, the display may be adjusted for the first chart, or the display may be adjusted for both charts. In any case, the display relationship between the first chart and the second chart can be easily adjusted, and the two charts can be easily compared.

It should be noted that the present invention is not limited to the above-described embodiment, and any substrate processing apparatus such as a vertical CVD apparatus, a horizontal CVD apparatus, a single-wafer CVD apparatus, etc., which performs production processing on substrates such as wafers and glass substrates. The effects of the present invention can be obtained by using the production information display device according to the present invention.

[0044]

As described above, the production information display apparatus according to the present invention creates the first image data representing the first chart based on the information on the production state sequentially detected by the sensor, and creates the logging data. Is used to create the second image data representing the second chart, and in the creation process, at least one of the image data is created according to the specification regarding the axis received from the operator, and the first image data is created.
Since the first chart and the second chart are displayed and output on the same screen based on the image data and the second image data, the first chart and the second chart can be compared quickly and easily.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a production information display device according to an embodiment of the present invention.

FIG. 2 is an example of an instruction input screen for moving a chart according to an embodiment of the present invention.

FIG. 3 is a diagram illustrating acquisition of a record by a logging data acquisition unit according to an embodiment of the present invention.

FIG. 4 is a diagram illustrating a coordinate calculation process according to an embodiment of the present invention.

FIG. 5 is a flowchart illustrating an operation of the production information display device according to one embodiment of the present invention.

FIG. 6 is a diagram illustrating chart superposition and chart position adjustment by the production information display device according to one embodiment of the present invention.

FIG. 7 is a diagram for explaining position adjustment of a chart by the production information display device according to one embodiment of the present invention.

FIG. 8 is a display example of a chart on the same screen by the production information display device according to one embodiment of the present invention.

FIG. 9 is a configuration diagram of a production information display device according to a conventional example.

FIG. 10 is a screen for displaying current production information of a production information display device according to a conventional example.

FIG. 11 is a diagram illustrating a data structure of production information logged in an external storage device.

FIG. 12 is a display output screen of a chart based on production information logged by a production information display device according to a conventional example.

[Explanation of symbols]

1. sensor, 2. external interface, 3. memory, 4. external storage device, 5. GUI, 6. display, 7. input device, 8.
-Main control unit.

Claims (1)

[Claims] 1. A production system for displaying and outputting on a same screen a first chart based on information on a production state of a substrate processing apparatus sequentially detected by a sensor and a second chart based on information on a past production state. An information display device, a sensor for sequentially detecting a production state of the substrate processing apparatus, a logging data retaining unit for retaining past production state information of the substrate processing apparatus, and an axis serving as a reference of a chart displayed and output from an operator. Using axis designation receiving means for receiving designation of the first chart and first image data representing the first chart based on information on the production state sequentially detected by the sensor, and using the logging data held in the logging data holding means. Second image data representing the second chart is created, and in the creation processing, at least one of the image data is used as an axis finger. A data creating means for creating in accordance with designation of the axis received by the fixed receiving means; and a first chart and a second chart on the same screen based on the first image data and the second image data created by the data creating means. A production information display device, comprising: display means for displaying and outputting to a display device.