JPH11185043A - Motion detector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a motion detector capable of accurately detecting the direction and speed of the motion of the image of a detection object even in the case that sensitivity and characteristics are different mutually among photodetectors. SOLUTION: This motion detector is provided with a photodetector 10 for outputting signals corresponding to the intensity of an image, a vibration means for generating relative vibration between the image and the photodetector 10, a time edge detection circuit 21 for detecting the timewise change of the output signals of the photodetector 10 and a motion judgement circuit 22 for judging the direction of the motion of the image based on the signals CLK2 for indicating the moving direction of the position of the photodetector 10 and on the output signals TRG of the time edge detection circuit 21. MOVERIGHT signals for indicating right movement or MOVELEFT signals for indicating left movement are outputted.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a motion detector suitable for integration on a semiconductor substrate, which can accurately detect the direction and speed of the motion of an image.

[0002]

2. Description of the Related Art As a method of detecting the direction and speed of the movement of an object using an image captured by a television camera, the brightness of a small area of an image and the correspondence of feature points are found between screens at predetermined time intervals. Thus, there is known a method of detecting the direction of movement of each small area or feature point, and detecting the speed based on the movement distance. In addition, a method is known in which the relationship between the time derivative and the spatial derivative of the brightness of an image assuming that the brightness on an object does not change with time is set as a constraint, and the speed is obtained (for example, “Computer vision”).・ 1
67-188 (9. Processing and Understanding of Moving Images) ", edited by Masahiko Yauchida, published March 31, 1990, Maruzen Co., Ltd.).

[0003] "C. Mead, Shirai, Yonezu Translated, Analog VLSI and Nervous System, Toppan Co., Ltd., 19
93, p. 269-299 ", which is obtained on a semiconductor integrated on a semiconductor, assuming that the brightness on the object does not change with time. A motion detection chip is shown. In addition, "R. Etienne-Cumming
s et al. , "A Focal Plane V
actual Motion MeasurementS
sensor ", IEEE Trans. on Ci
rcuits and Systems-I, Vol.
44, No. 1 pp. 55-66, 1997 "shows a device integrated on a semiconductor, which detects the direction and speed of movement based on the sign of a temporal change in spatial intensity of image brightness.

[0004] Also, "J. Kramer, Rahul
Sarpeshkar, Christof Koc
h. “Pulse-Based Analog”
VLSI Velocity Sensors ", I
EEE TRANSACTIONS ON CIRCU
ITS AND SYSTEMS-2: ANALOG
AND DIGITAL SIGNAL PROCE
SSING, VOL. 44. NO. 2, FEBR
UARY 1997 "shows a device integrated on a semiconductor substrate that detects the direction and speed of movement at high speed based on the time differential signals of the outputs of two photodetectors. U
SP5376813 discloses a photodetector circuit capable of adapting to long-term fluctuations in signal strength by changing the sensitivity over time in response to long-term changes in signal strength.

[0005]

The method of detecting using an image picked up by a television camera involves calculation by referring to a large number of pixels. Therefore, there is a problem that processing time is long and high-speed detection is difficult. . In addition, when the movement of the object is significantly faster than the imaging frame rate, it is difficult to detect the movement correctly. Further, since it is generally not suitable for integration on a semiconductor, it is difficult to reduce the size of the device.

[0006] In the mead motion detection chip, the speed is obtained by using the relationship between the time derivative and the spatial derivative of the brightness as a constraint condition. Therefore, there is a problem that it cannot be obtained properly unless the brightness of the object is slowly changing. is there. J. Kramer
et al. In this device, the motion is detected using the time derivative signal of the output of the photodetector, which is the temporal change in the brightness of the image caused by the motion of the object, so the magnitude of the time derivative signal depends on the speed of the motion of the object. Therefore, there is a problem that the moving direction and the speed cannot be detected stably in a wide speed range because of the change of the speed. Etienne-Cummings
et al. In the device described above, it is necessary to detect a spatial intensity change in the brightness of an image, and further to detect the sign of the time change, and thus there is a problem that the circuit scale becomes large.

[0007] Mead motion detection chip, Etien
e-Cummings et al. In the device described above, the calculation is performed using the difference between the output signals of the plurality of photodetectors. Therefore, if there is a difference in sensitivity or characteristic between the photodetectors, there is a problem that the motion or speed cannot be detected with high accuracy. J. Kram
er et al. In the device described above, motion is detected from the relationship between the time differential signals corresponding to a plurality of photodetectors. Therefore, if there is a difference between the characteristics of each time differential circuit, it is difficult to accurately detect the motion and speed. There's a problem. Also, a mead motion detection chip, J.M. Kramer et
al. Equipment and Etienne-Cumming
s et al. In the device described above, since the direction and speed of movement are detected using output signals of a plurality of photodetectors, there is a problem that wiring on a substrate becomes complicated.

Further, a photodetector having a function of adapting to brightness so that motion can be detected in a wide brightness range from daytime to dusk (eg, US Pat. No. 5,376,813)
When using, differences in the degree of adaptation between the photodetectors cause differences in sensitivity and characteristics between the photodetectors. Mead motion detection chip and Etienne-C
Ummings et al. In the device described above, the difference between the outputs of the photodetectors located at different positions is used for processing, and at this time, the spatial differentiation is not correct, and the motion cannot be detected correctly. For this reason, it is difficult to detect a motion in a wide brightness range in combination with the light detection circuit.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a method for detecting even a fast movement without using an image picked up by a television camera, suitable for integration on a semiconductor, and even if the brightness of an object does not change gradually. An object of the present invention is to provide a motion detecting device capable of detecting a moving direction and speed stably at high speed in a wide speed range. Another object of the present invention is to provide a motion detection device that can accurately detect a difference in sensitivity and characteristics between a photodetector and a processing circuit. Another object of the present invention is to provide a motion detection device capable of detecting motion in a wide brightness range from daytime to dusk in combination with a light detection circuit having a function of adapting to brightness. It is another object of the present invention to provide a motion detecting device which can detect based on an output signal of a single photodetector and has a simple wiring on a substrate.

[0010]

SUMMARY OF THE INVENTION The present invention detects the presence or absence of a change in the intensity of an image at a position where the position with respect to the image is repeatedly displaced with time, and based on the relationship between the position and the presence or absence of the change. A motion detection apparatus characterized in that at least one of a motion direction of an intensity pattern of an image and a transit time of a predetermined distance is obtained.

First, the configuration included in the above-described configuration will be described with an example.

(A) For example, "a detector for outputting a signal corresponding to the intensity of a projected image, vibrating means for generating relative vibration between the projected image and the detector, Time change detecting means for detecting a temporal change in the output signal of the output signal, and a motion determining means for determining the direction of the image motion based on the displacement direction of the position of the detector and the output signal of the temporal change detecting means. Are included in the above-described configuration. This configuration employs a vibration principle and employs a detection principle based on a relationship between a displacement direction of a position of a detector and an output signal of a temporal change detection means. Accordingly, even if a difference in sensitivity or characteristics occurs in the detector due to adaptation to a long-term fluctuation of the signal strength or the like, it is possible to accurately detect the movement and the speed. The configuration of (a) is, for example, such that “the motion determining means does not detect a temporal change in the detection signal of the detector when the detector moves to one side, and detects the detector when the detector moves to the other side. From the time when the temporal change in the detection signal is detected, the temporal change in the detection signal of the detector is detected when the detector moves to the other side, and the detection signal of the detector is detected when the detector moves to the other side. A motion detecting device that determines the moving speed of an image based on the time required until a temporal change is not detected and the amplitude of the vibration of the detector. The detailed principle of the configuration (a) and a concrete example of the configuration will be described later in detail.

(B) Further, "a detector which is provided at a plurality of positions and outputs a signal corresponding to the intensity of the projected image, storage means for storing the output signal of the detector, and A change detecting means for detecting a change in a signal of an output signal of a spatially different detector; and a spatial position of the detector being one or the other with respect to time depending on whether there is a change in the output signal of the detector spatially and temporally. , A motion detection device having a determination means for detecting the direction and speed of movement of the target object from the relationship detected by any one of the methods described above is also included in the configuration described at the beginning of the section of the "problem solving means". . In this configuration, the vibrating means and the temporal change detecting means in the above-mentioned configuration (a) are replaced with a storage means and a change detecting means having equivalent functions and effects without using the vibrating means. The detailed principle of the configuration (b) and a concrete example of the configuration will be described later in detail.

(C) A detector for outputting a signal corresponding to the intensity of the projected image, a vibration means for generating relative vibration between the projected image and the detector, and a detector Time change detecting means for detecting a change in the output signal with time,
A motion detecting device having a motion determining unit that determines a direction of a motion of an image based on a displacement section of a position of a detector and an output signal of the temporal change detecting unit ”,
In the configuration described at the beginning of the section. this is,
This configuration employs a vibration principle and employs a detection principle based on the relationship between the displacement section of the position of the detector and the output signal of the temporal change detection means. Accordingly, even if the detector has a difference in sensitivity or characteristics due to adaptation to a long-term fluctuation of the signal strength or the like, it is possible to accurately detect the movement and the speed. The detailed principle of the configuration (c) and a concrete example of the configuration will be described later in detail.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION Principle of motion direction detection. FIG.
The principle of motion direction detection will be described with reference to FIGS. In FIG. 1, the horizontal direction indicates space, and the vertical direction indicates time. As shown, the signal detecting means (eg, the photodetector of FIG. 2)
In the case where 10) vibrates at a constant speed in the left-right direction, as shown in (a), the spatial edge of the object (eg, the boundary edge between the pattern to be detected (= bright area) and the non-bright area) ) Is moving to the right at a speed sufficiently slower than the displacement of the signal detection means.

In this case, a change in the signal intensity (a change equal to or more than a predetermined value) is first detected when the signal detecting means is moved to the left. Further, after the change in the signal strength is detected, the change in the signal strength (change equal to or more than the predetermined value) is not detected when the signal detection unit is moved rightward.

When the spatial edge of the object is moving in the opposite direction (left direction), the same discussion holds except that the left and right relationship is reversed. It is assumed that the moving speed of the object is sufficiently lower than the displacement speed of the signal detecting means, and the vibration of the signal detecting means is the same as described above.

Therefore, when the signal detecting means moves in the direction a (rightward or leftward), no change in the signal intensity is detected (= all detected values are less than a predetermined value), and
When a change in signal strength is detected during a subsequent movement in the anti-a direction (leftward or rightward) (= a detected value equal to or greater than a predetermined value is obtained), the spatial edge of the object moves. The direction can be determined to be the a direction.

Further, when the signal detecting means moves in the direction a (rightward or leftward), a change in the signal intensity is detected (= a detected value equal to or more than a predetermined value is obtained), and the subsequent signal a When a change in signal strength is not detected when moving in the direction (leftward or rightward) (= all detected values are less than a predetermined value), the moving direction of the spatial edge of the object is It can be determined that the direction is the anti-a direction.

The above discussion is for the case where the moving speed of the spatial edge of the object is sufficiently slower than the speed of the signal detecting means. The moving speed of the spatial edge of the object is sufficiently slower than the signal detecting means. If not, the above argument does not hold.

That is, as shown in (b), when the spatial edge of the object is moving rightward at a speed faster than the signal detecting means, a change in signal strength (a change greater than a predetermined value) is detected for the first time. The moving direction of the signal detecting means when the operation is performed is undefined. That is, there can be both left and right directions. Further, a change in signal strength (a change equal to or more than a predetermined value) is detected only once.

Therefore, even if the above-described judgment condition is satisfied, the signal detecting means can be set in the direction a (right direction or right direction).
No change in signal strength is detected when moving to the left
All the detected values are less than the predetermined value), and a change in the signal intensity is detected during the subsequent movement in the anti-a direction (leftward or rightward) (= a detected value equal to or more than the predetermined value is obtained). ) And further a direction (rightward or
If no change in the signal strength is detected when moving to the left (= all the detected values are less than the predetermined value),
Since the moving speed of the object is faster than the signal detecting means, the moving direction may not be detected correctly.

2. The principle of motion speed detection. The principle of motion speed detection will be described with reference to FIG. As shown,
Consider a case where the spatial edge of the object moves rightward at a speed sufficiently lower than that of the signal detection means when the signal detection means vibrates at a constant speed in the left-right direction.

When the signal detecting means moves to the left, a change in signal strength (a change greater than a predetermined value) is detected for the first time.
Thereafter, when the signal detection means moves to the right, a change in signal strength (a change equal to or more than a predetermined value) is not detected. The time T from when the signal intensity change (change above a predetermined value) is detected for the first time to when the signal intensity change (change above a predetermined value) is no longer detected is determined by the amplitude of the vibration of the signal detecting means. Is the time required to cross the distance L of However,
Time is quantized by the period of oscillation.

When the spatial edge of the object moves in the opposite direction to the above, the same discussion holds except that the left-right relationship is reversed. It is assumed that the moving speed of the object is sufficiently lower than that of the signal detecting means as described above, and the vibration of the signal detecting means is the same as above.

Therefore, when the signal detecting means moves in the direction a (rightward or leftward), no change in the signal intensity is detected (= all detected values are less than a predetermined value), and
When a change in signal strength is detected (= a detected value equal to or more than a predetermined value is obtained) during a subsequent movement in the anti-a direction (leftward or rightward), timing is started. A change in signal strength is detected when moving in the anti-a direction (leftward or rightward) (= a detected value equal to or greater than a predetermined value is obtained),
In addition, when the change in the signal strength is not detected during the subsequent movement in the direction a (rightward or leftward) (= all the detected values are less than the predetermined value), the time is measured. By detecting the time, the time T required to cross the amplitude L of the vibration is obtained. Further, based on the time T, the moving speed V of the target object can be obtained.

When the signal detecting means moves in the direction a (rightward or leftward), no change in the signal intensity is detected (= all the detected values are less than the predetermined value), and the subsequent signal strength changes. After a change in the signal intensity is detected during the movement in the anti-a direction (left direction or right direction) (= a detection value equal to or greater than a predetermined value is obtained), the signal detection means is set in the a direction (right direction or right direction). ,
A change in signal strength is detected when moving in the left direction (= a detected value equal to or greater than a predetermined value), and the signal strength changes when moving in the opposite anti-a direction (left or right direction). If a change is not detected (= all the detected values are less than the predetermined value), such a combination is impossible in principle, and in that case, it is determined to be an erroneous detection. can do.

3. Embodiment 1 FIG. FIG. 2A is a cross-sectional view schematically illustrating the structure of the device of Example 1, and FIG. 2B is a perspective view schematically illustrating the appearance. FIG. 3 is a block diagram showing a configuration example of the motion detection circuit 20 in FIG. 2B, and FIG. 4 is a logic circuit diagram showing a specific configuration example of the motion determination circuit 22 in FIG. FIG.
FIG. 15 is an explanatory diagram collectively showing movement directions in each case of FIGS. 10 to 14. 10 to 12 are explanatory diagrams showing the relationship between the movement of the photodetector 10, the movement of the image (spatial edge), and the output TRG of the time edge detection circuit 21. FIG. 15 is a diagram illustrating a problem when the photodetector 10 is vibrated by a sine wave,
FIG. 16 is an explanatory diagram showing an example of a vibration unit different from FIG.

In the apparatus of the first embodiment, when the moving direction of the image detected by the photodetector 10 is rightward, the MOVEIGHT signal is output from the motion detecting circuit 20. Also,
If the moving direction of the image is the left direction, the motion detection circuit 20
Outputs a MOVELEFT signal.

As shown in FIG. 2, the substrate 100 includes a piezoelectric element.
The lens is supported at the rear position (image forming position) of the lens in the case via 70. The piezoelectric element 70 is an element for vibrating the substrate 100 in a one-dimensional direction (the left-right direction described above) in the plane of the substrate, thereby moving the substrate 100 relative to an image irradiated on the light receiving surface of the substrate. It is possible to do. As a result, the direction and speed of movement of the image to be detected can be detected according to the principle described above.

The upper surface of the substrate 100 is a light receiving surface on which a light image of a target pattern is formed via a lens. The light receiving surface has a large number of photodetectors 10 and each of the photodetectors 10. The motion detecting circuits 20 connected one by one, the wiring 30 for inputting the output of each motion detecting circuit 20 to the reading circuit 40, and the reading circuit 40 are provided in an integrated manner.

A large number of photodetectors 10 are arranged on the light receiving surface in the vertical and horizontal directions, and a motion detection circuit 20 is connected to each photodetector 10. The photodetector 10 is a photoelectric converter configured to output a voltage signal corresponding to the intensity of the irradiated light and to adapt the sensitivity to a long-term variation in the light intensity.

The motion detection circuit 20 detects a temporal change of a detection signal of the photodetector 10 and a direction of displacement of the photodetector 10,
Based on these, the circuit detects the direction of movement of the image illuminated on the light receiving surface according to the principle described above and outputs the result.

For this reason, the motion detection circuit 20
Edge detection circuit that detects the temporal change of the detection signal
It has 21. The time edge detecting circuit 21 includes a time differentiating circuit 211 for detecting a temporal change of the positive polarity, a time differentiating circuit 212 for detecting a temporal change of the negative polarity, and outputs a predetermined A binarization circuit 213,214 for binarizing with a threshold value and outputting whether or not there is a time change;
An OR gate 215 for outputting the logical sum of the outputs of the value conversion circuits 213 and 214 as a signal TRG indicating the presence or absence of a temporal change.

Further, the motion detection circuit 20 includes the above-described signal TRG indicating whether or not the detection signal of the photodetector 10 has changed with time.
A motion judging circuit 22 (or a motion judging circuit 22A) for judging a moving direction of an image based on a moving direction of the substrate 100, in other words, a signal CLK2 (or a signal of the opposite polarity) indicating a vibration direction of the photodetector 10. ). Note that the signal CLK represents a basic clock signal, and the relationship with the signal CLK2 is shown in FIG.

When the photodetector 10 moves to the right (CLK2 = 1), the motion determination circuit 22 does not detect a temporal change in the detection signal of the photodetector 10 (TRG = 0), and If the temporal change (TRG = 1) of the detection signal of the photodetector 10 is detected during the subsequent leftward movement of the photodetector 10 (CLK2 = 0), the moving direction of the image is rightward. (FIGS. 10 (a) and 10 (c)), and a signal MOV indicating that
ERIGHT is output.

When the photodetector 10 moves to the left (CLK2 = 0), the motion determination circuit 22 does not detect a temporal change in the detection signal of the photodetector 10 (TRG = 0). and,
When the photodetector 10 subsequently moves to the right (CLK2 =
1) shows a temporal change in the detection signal of the photodetector 10 (TRG =
If 1) is detected, it is determined that the moving direction of the image is the left direction (FIGS. 10B and 10D), and a signal MOVELEFT indicating this is output.

The motion determining circuit 22 detects a temporal change (TRG = 1) of the detection signal of the photodetector 10 when the photodetector 10 moves rightward (CLK2 = 1), and , When the photodetector 10 subsequently moves to the left (CLK2 =
If no change in the detection signal of the photodetector 10 with time is detected (TRG = 0) at (0), it is determined that the moving direction of the image is the left direction (FIGS. 11 (e) and (g)). ), And outputs a signal MOVELEFT indicating that.

Further, the motion judging circuit 22 detects a temporal change (TRG = 1) of the detection signal of the photodetector 10 when the photodetector 10 moves to the left (CLK2 = 0), and , When the photodetector 10 moves rightward (CLK2 =
If the temporal change of the detection signal of the photodetector 10 is not detected in 1) (TRG = 0), it is determined that the moving direction of the image is the right direction (FIGS. 11F and 11H). ), And outputs a signal MOVERIGHT indicating that.

The motion judging circuit 22 which realizes the above-described function based on the output TRG of the time edge detecting circuit 21 and CLK2 indicating the moving direction of the photodetector 10 is constituted using a logic circuit as shown in FIG. Or may be realized by a computer operation. The motion determination circuit 22A shown in FIG.
Will be described later in the section of a second embodiment.

As is apparent from FIG. 1B and FIGS. 10 to 11, when the moving speed of the image to be detected is faster than the displacement due to the vibration of the photodetector 10, the moving direction of the image is correctly detected. It may not be possible. For this reason, it is necessary to vibrate the photodetector 10 sufficiently faster than the moving speed of the image.

When the photodetector 10 is vibrated by a sine wave, as shown in FIG. 15, the displacement speed of the photodetector 10 becomes small near the maximum point and the minimum point, and the movement of the image to be detected is shifted. Because it is slower than the speed, for example, in the locus of A in the figure,
The direction of movement of the image cannot be detected correctly. However, if the vibration is sufficiently fast, the ratio of the time during which the motion direction cannot be detected correctly in the entire time becomes sufficiently small, and it is considered that there is little practical problem.

In the case shown in FIG.
Since the change in the signal intensity is detected twice during the displacement to one side (the right side in the figure), when the TRG is detected twice during the displacement to one side, the two TRGs are detected. The above-described problem may be avoided by configuring the motion determination circuit 22 so as to consider that no motion is detected.

As described above, in the apparatus of the first embodiment, since the direction of movement of the image is detected based on the detection signal of the single photodetector 10 for each position, the sensitivity between the individual photodetectors and the like are determined. Even if there is a difference in characteristics, it is less affected. Further, since it is hard to be affected by differences in sensitivity and characteristics between individual photodetectors, a photodetector circuit having a characteristic in which the sensitivity adapts to a change in brightness (eg, a circuit described in US Pat. No. 5,376,813) is used. Can be used. Also,
Thereby, when the fluctuation of the brightness of the object is large (for example,
Even if the brightness varies from daytime to dusk, the motion of the image to be detected can be detected with high reliability in accordance with the variation. Also, since the direction of movement is detected based on the output signal of a single photodetector, circuit wiring is simplified and the integration is simpler than in the method of detecting the direction of motion from the relationship between the output signals of a plurality of photodetectors. The degree is raised. In addition, since a change (time differential) signal of the detector output due to the movement of the object itself is not used, the movement can be stably detected even in a wide speed range.

In other words, the apparatus according to the first embodiment includes a “photodetector 10 that outputs a signal corresponding to the intensity of a projected image, and a relative position between the projected image and the photodetector 10. Vibrating means 70 for generating an appropriate vibration, a time edge detecting circuit 21 for detecting a temporal change of an output signal of the photodetector, and a signal CLK2 (or its opposite polarity) indicating a displacement direction of the position of the photodetector. Signal) and the output signal TR of the time edge detection circuit.
Motion determining circuit for determining the direction of the image motion based on G
22. When the movement determination circuit 22 moves to one of the photodetectors 10, a temporal change in the detection signal of the photodetector 10 is not detected, and the other one of the subsequent photodetectors 10 (the above “ When a temporal change in the detection signal of the photodetector 10 is detected during the movement in the direction opposite to the “one side”, the moving direction of the image is “one side”.
, A motion detection device. "

Further, the apparatus according to the first embodiment includes a “photodetector 10 that outputs a signal corresponding to the intensity of a projected image, and a relative vibration between the projected image and the photodetector 10. , A time edge detection circuit 21 for detecting a temporal change in the output signal of the photodetector, a signal CLK2 indicating the direction of displacement of the position of the photodetector (or a signal having the opposite polarity). ) And a motion judging circuit 22 for judging the direction of motion of the image based on the output signal TRG of the time edge detecting circuit. The temporal change of the detection signal of the detector 10 is detected,
If the temporal change of the detection signal of the photodetector 10 is not detected during the subsequent movement of the photodetector 10 to the other side (the direction opposite to the above “one side”), the moving direction of the image is the above “other side”.
, A motion detection device. "

In the above-described example, the piezoelectric element 70 provided on the back surface of the substrate 100 is used as a means for vibrating the photodetector 10, but instead, for example, an electromagnetic force is used. An actuator may be used. Alternatively, the photodetector may be fixed, and the position of the image may be vibrated using the configuration shown in FIGS. 16 (a), (b), and (c).

For example, in FIG. 16A, when the focal length of the lens is sufficiently large, the light transmitting glass plate 71 disposed between the lens and the image forming plane is moved perpendicularly to the plane of the drawing. A configuration is shown in which the light irradiating the substrate surface in the fixed state is displaced (vibrated) relative to the photodetector 10 on the substrate surface in the in-plane direction of the substrate by minutely swinging about the line intersecting with the axis. ing.

FIG. 16B shows a state in which the direction of light is bent by 90 ° by a reflecting mirror 72 provided behind the lens to focus on a fixed substrate surface, and the reflecting mirror 72 is placed on the mirror surface. An arrangement is shown in which an image formed on the substrate surface is relatively displaced (vibrated) in the substrate in-plane direction with respect to the photodetector 10 by minutely vibrating in a direction orthogonal to the substrate.

FIG. 16C shows another method of realizing the vibration means. FIG. 1 shows a cross-sectional view of a substrate provided with a photodetector, in which light is incident from above. As shown in the figure, a light shielding means provided with an opening, which is provided in front of a light receiving area of the photodetector, and a means for displacing the light shielding means are used. By displacing from the upper state to the lower state in the figure, the position of the opening of the light incident on the photodetector can be moved by the displacement of the position of the light shielding means. Thus, by displacing or vibrating the position of the light shielding means, a relative displacement or vibration can be generated between the projected image and the photodetector.

In any case of FIG. 16, the same effect as the configuration using the piezoelectric element shown in FIG. In addition,
In addition to the illustrated configuration, for example, a configuration that achieves the same effect by vibrating the entire case including the lens is also possible. Further, in the first embodiment, an example is shown in which a large number of photodetectors are arranged in an array, but the arrangement is not necessarily required to be an array, and the number of photodetectors is one. Obviously, the present invention can be implemented.

4. Embodiment 2. FIG. FIG. 5 is a block diagram showing a configuration example of the motion detection circuit 20 in FIG.
FIG. 6 is a circuit diagram showing a specific configuration example of the motion judging circuit 22A in FIG. 5, and FIGS. 7 and 8 are timing charts showing the operation of the motion judging circuit 22A. 13 and 14 show the photodetector 10.
Movement and image (spatial edge) movement and time edge detection circuit
FIG. 21 is an explanatory diagram showing a relationship between the output TRG and output TRG 21. FIG. 17 is a block diagram illustrating a circuit configuration of the device according to the second embodiment. Note that the appearance of the device of the second embodiment and the structure for causing the photodetector 10 to vibrate are the same as those of the first embodiment.

In the apparatus of the second embodiment, when the photodetector 10 moves to the right (CLK2 = 1), no temporal change in the detection signal of the photodetector 10 is detected (TRG = 0), and , During the subsequent leftward movement (CLK2 = 0),
When a time change of the detection signal 10 is detected (TRG = 1 is present), in other words, when “A” is shown in FIG. 13 (m), the signal MOVERIGHT1 to that effect is output to the motion detection circuit 20. Is output to the right speed detection circuit 60R.

When the photodetector 10 moves to the left (C
(LK2 = 0), a temporal change in the detection signal of the photodetector 10 is detected (TRG = 1 exists), and when the photodetector 10 moves rightward (CLK2 = 1), the photodetector 10 is detected. No change in the detection signal over time was detected (TRG = 0)
At this time, in other words, when "i" is shown in FIG. 13 (m), a signal MOVERIGHT2 to that effect is output from the motion detection circuit 20 to the right speed detection circuit 60R.

In the rightward speed detection circuit 60R, MOVER
Based on the time Tr from the detection time of IGHT1 to the detection time of MOVERIGHT2 and the amplitude L of the vibration of the photodetector 10, the rightward moving speed Vri is calculated according to the principle described above.
ght is obtained as “Vright = L / Tr”, and the result is output.

In the apparatus of the second embodiment, when the photodetector 10 moves to the left (CLK2 = 0), a temporal change in the detection signal of the photodetector 10 is not detected (TRG = 0). In addition, during the subsequent rightward movement (CLK2 = 1), a temporal change in the detection signal of the photodetector 10 is detected (TR
G = 1), in other words, when “O” is shown in FIG. 14 (p), the signal MOVELEFT1 to that effect is
It is output from the motion detection circuit 20 to the left speed detection circuit 60L.

When the photodetector 10 moves to the right (C
(LK2 = 1), a temporal change in the detection signal of the photodetector 10 is detected (TRG = 1 exists), and when the photodetector 10 moves leftward (CLK2 = 0), the photodetector 10 is detected. No change in the detection signal over time was detected (TRG = 0)
At the time, in other words, when "?" Is shown in FIG. 14 (p), a signal MOVELEFT2 to that effect is output from the motion detection circuit 20 to the left speed detection circuit 60L.

In the leftward speed detection circuit 60L, MOVEL
Based on the time Tl from the detection time of EFT1 to the detection time of MOVELEFT2, and the amplitude L of the vibration of the photodetector 10, the leftward moving speed Vleft is calculated according to the principle described above.
Is obtained as “Vleft = L / Tl”, and the result is output.

Since the measurement times Tr and Tl are both quantized at the cycle of the vibration, the higher the frequency of the vibration, the higher the accuracy of the speed detection.

The above MOVELIGHT1 and MOVIGHT1
ERIHT2 is generated at the timing shown in FIG. 7 by the motion determining circuit 22A (FIG. 6) that inputs TRG and CLK2 (and a signal of the opposite polarity of CLK2). The above-mentioned MOVELEFT1 and MOVELEFT2 are generated by the same motion determination circuit 22A at the timing shown in FIG. In other words, it is generated according to the logic described above.

As described above, in the apparatus according to the second embodiment, since the moving direction and the moving speed of the image are detected at each position based on the detection signal of the single photodetector 10, the distance between the individual photodetectors can be reduced. Even if there is a difference in the sensitivity and characteristics of, there is little influence from the difference. In addition, since it is hard to be affected by differences in sensitivity and characteristics between individual photodetectors, a photodetector circuit having characteristics in which sensitivity adapts to changes in brightness (eg, USP537)
No. 6813). In addition, even when the brightness of the object greatly fluctuates (eg, the brightness fluctuates from daytime to dusk),
The movement and moving speed of the image to be detected can be reliably detected in accordance with the fluctuation. Also, since the direction and speed of movement are detected based on the output signal of a single photodetector, circuit wiring is simplified compared to the method of detecting speed based on the relationship between the output signals of multiple photodetectors. , The degree of integration is increased.

In other words, the apparatus according to the second embodiment includes a “photodetector 10 that outputs a signal corresponding to the intensity of the projected image, and a relative position between the projected image and the photodetector 10. Vibrating means 70 for generating an appropriate vibration, a time edge detecting circuit 21 for detecting a temporal change of an output signal of the photodetector, and a signal CLK2 (or its opposite polarity) indicating a displacement direction of the position of the photodetector. Signal) and the output signal TR of the time edge detection circuit.
G, and the motion determining means 22, 60R, 60L for determining the direction and speed of the motion of the image based on G, said motion determining means 22, 60R, 60L
Does not detect a temporal change in the detection signal of the photodetector 10 when the photodetector 10 moves to one side, and detects the photodetection when the photodetector 10 subsequently moves to the other side (the opposite direction to the “one”). Container 10
From the time when the temporal change of the detection signal of
The time change of the detection signal of the photodetector 10 is detected when the 10 moves to the other side, and the time change of the detection signal of the photodetector 10 is not detected during the subsequent movement to the one side. A motion detection device that determines the moving speed of the image based on the required time until the time and the amplitude of the vibration of the photodetector 10,
Can be described as

Further, the apparatus according to the second embodiment is described as follows. In the above configuration, the motion determining means 22, 60R, 60L divides the amplitude of the vibration of the photodetector 10 by the required time to move the image. A motion detection device that determines the speed and determines the moving direction of the image to be one of the two directions. "

5. Embodiment 3 FIG. FIG. 18 is a block diagram illustrating a circuit configuration of the device according to the third embodiment. Note that the appearance of the device of the third embodiment and the structure for causing the photodetector 10 to vibrate are the same as those of the first and second embodiments. The configuration of the motion determination circuit of the device according to the third embodiment is the same as that of the second embodiment.

In the apparatus of the third embodiment, MOVELIGHT1, MOVERIGHT1 and MOVERIGHT1 are output from each motion detection circuit 20 corresponding to each photodetector 10.
OVERIGHT2, MOVELEFT1, MOVEL
Each signal of EFT2 is output when the same condition as that of the device of the second embodiment is satisfied.

In the device of the third embodiment, the first photodetector 10-1
Is detected in a certain direction (rightward or leftward) by the first motion detection circuit 20-1 corresponding to the first motion detection circuit 20-1, and then the motion detection direction (rightward or leftward) is detected from the first photodetector 10-1. Direction or left direction) at a position separated by a predetermined distance L1-2.
When the same motion is detected by the second motion detection circuit 20-2 corresponding to 10-2, the detection by the second motion detection circuit 20-2 is performed based on the detection time by the first motion detection circuit 20-1. Based on the required time T1-2 up to the time and the predetermined distance L1-2, the moving speed V of the image is set as "V = L1-2 / T1-2", and the speed detection circuit 60L1 / 60L2 / 60R1 / Required by 60R2.

6. In the case of two-dimensional vibration (Embodiment 4). In the first embodiment, the substrate 10 on which the photodetector 10 is provided is used.
Although the example in which 0 is vibrated in the left-right direction (one-dimensional direction) is described, the motion in each direction of the image is detected by detecting the vibration in two different directions and the corresponding motion of each direction component of the image. Can also be detected. In addition, two different
It is also possible to detect the movement and the moving speed of the image in each direction by detecting the vibration in the direction and the movement and the moving speed of each direction component of the image corresponding thereto.

In the example shown in FIG. 19, the photodetector is displaced along the locus shown in (a) by temporally displacing the photodetector in the x and y directions as shown in (b). FIG. 21 shows the detection principle in this case. FIG. 20A shows FIG.
This corresponds to (a). FIG. 20C corresponds to FIG. As can be seen from the comparison between the two, the principle of detecting the moving direction and moving speed of the image in the two-dimensional direction is basically the same as the principle of detection in the one-dimensional direction. In addition,
In FIG. 20, the part shown by the solid line corresponds to the rightward displacement of the photodetector, and the part shown by the broken line corresponds to the leftward displacement.

As shown in FIG. 20B, when the moving speed of the image increases, the trajectory of the image intersects for the first time or last in the period in which the photodetector is not displaced. Become. In such a case, the detection principle of the present invention will not function properly. In the case of two-dimensional vibration, the speed at which the trajectory of the image does not become such is the limit speed at which detection is possible.

In the two-dimensional speed detection, a well-known window frame problem (eg, “Analog VLSI and neural system • 270
Pp. 275 (two-dimensional analog motion detector) ", 199
Published first edition on February 28, 3rd, C.I. Mead, Shiro Shirai ・
Since Yonezu Hiroo translated and published by Toppan Co., Ltd.), the speeds directly obtainable by the illustrated method are Vx and Vy in the speed space shown in FIG. 19C.

7. When no mechanical vibration occurs. FIG. 21 shows the principle of detecting the moving direction and speed of an image without causing mechanical vibration. The fundamental principle of the detection is described in “1.
Principle of Motion Direction Detection ".
The difference is that while the aforementioned principle used a vibration means to cause relative vibration between the image and the detector,
In the case of FIG. 21, the use of a set of detectors and storage means enables motion detection on the same principle without using vibration means. That is, using the detector 1 and the detector 2 set at two different positions and the storage means for storing output signals at different times, as shown in FIG. By capturing the output signal of the detector at (+) and detecting changes in the output signal of the detector at different spatiotemporal positions, the above-described principle can be applied. In the case where the principle of FIG. 21 is used, the vibration means is not required, so that the configuration of the device can be simplified. In the configuration shown in FIG. 21, variations in the characteristics of the detectors are problematic because motion is detected using the outputs of a plurality of detectors. However, since the subsequent processing circuits are common, the characteristics of the detectors are reduced. By aligning them, a highly accurate detection device can be realized. It is also possible to provide an adaptive function by performing common control on the detectors forming a pair.

8. Embodiment 5 FIG. Example 5 is an apparatus for detecting one-dimensional movement and velocity. The structure of the device of the fifth embodiment is a structure without the piezoelectric element 70 in FIG. FIG.
FIG. 9 is a block diagram illustrating a configuration of one unit of a circuit according to a fifth embodiment configured on a substrate. As shown in FIG. 22, the device according to the fifth embodiment includes a photoelectric converter (detector), a sample and hold circuit (storage means), a change detection circuit, and a motion determination circuit.

The photoelectric converters 1 and 2 output a signal corresponding to the light intensity at each position of the image. The corresponding sample-and-hold circuits control the respective control signals (SH1, S
When H2) is at the high level, the input signal (output signal of the photoelectric converter) is input as it is, and when the control signal changes from the high level to the low level, the input signal is stored. Outputs the stored signal. The change detection circuit compares the two input signals at the rising edge of CLK, and outputs a pulse signal TRG if the absolute value of the difference is equal to or greater than a predetermined value. The motion determination circuit is the same as that described in the first and second embodiments, but the signal corresponding to CLK2 of the motion determination circuit in the first and second embodiments is
The fifth embodiment is different from the fifth embodiment in that CLK2 is CLK3 (a signal obtained by delaying CLK2 by 周期 cycle). The reason for this is that, as can be seen from FIG. 23, the timing at which the TRG pulse is emitted is between the transitions of the photodetector due to vibration in the first and second embodiments, whereas the fifth embodiment is a virtual This is because it has just reached the peak of the vibration. FIG. 23 shows the time relationship of each signal with respect to the basic clock signal CLK.
Since the output of the motion determination circuit is the same as in the first and second embodiments, it is clear that the speed can be detected by the same speed detection circuit as in the second embodiment.

In order to adapt to long-term fluctuations in signal strength, it is necessary that the sensitivities of the photoelectric converters in the group adapt in the same manner. FIG. 2 shows a sensitivity control method for this purpose.
As shown in FIG. 4, using the output of each optical converter,
For example, a method (a) of controlling the sensitivity by averaging the signal strength or the like, and a method (b) of controlling the sensitivity using the output of any one of the optical converters can be considered. The former has an advantage that the sensitivity can be controlled according to the signal of each optical converter. The latter has the advantage that the configuration is simplified.
As shown in (c) and (d), there is a method in which a photoelectric converter for sensitivity control is provided separately from a photoelectric converter used for processing for motion detection.

Another configuration example of the fifth embodiment for detecting a one-dimensional working direction and speed will be described with reference to FIGS. 40 is a block diagram of the device, the left column of FIG. 41 shows the input / output characteristics of the change detection circuit, and the right column of FIG. 41 shows the relationship between the basic clock signal CLK and each signal. Note that CLK and C
LK2 has a different phase from CLK and CLK2 shown in FIG.

The photodetector outputs a voltage signal according to the light intensity. The switches conduct when the gate signals G1 and G2 are at a high level. With this switch and the capacitor, the output signal of the photodetector at the time when the gate signal changes from the high level to the low level is stored as the voltage of the capacitor. In the change detection circuit, the signal intensities at two points in time and space are compared, and when the absolute value of the difference is equal to or larger than the threshold value Vt, the output signal TRG becomes high level.

The motion judging circuit is a sequential circuit synchronized with CLK, and FIG. 42 is a state transition diagram thereof. The motion determination circuit outputs signals P, L, and R. The signal P is 2
This signal indicates that the signal strength has changed between points.
The signals L and R are signals indicating that leftward and rightward movements are detected, respectively. The speed calculation circuit counts the number of clocks in which the signal P is at a high level, and calculates L or R
, The speed is calculated from the count number when the signal becomes high level, the speed is output as the absolute value of the voltage between the output signals VP and VN, and the direction of movement (L or R) is output as the polarity of the voltage. At the same time, the counter for counting the signal P is reset.

FIG. 43 shows another example (state transition diagram) of the motion judgment circuit. In the example of FIG. 42, even when the signal TRG is at a high level or a low level for only one clock, the determination result is affected. Therefore, an erroneous determination is likely to occur when the edge of the target object is not very clear. Therefore, the erroneous determination can be reduced by using the case where the TRG signal is the same for several consecutive clocks as valid data.
The state transition diagram shown in FIG. 43 shows that when the TRG signal is the same for three consecutive clocks (partially two or more clocks in order to set the number of states to 8 which is a power of 2), the valid data This is an example in which the device is used as a device.

9. Embodiment 6 FIG. FIG. 25A is an embodiment when detecting the spatial distribution of the movement direction and the velocity. When the spatial distribution is detected, many circuits of the fifth embodiment may be arranged as they are as shown in FIG. 25B, but they may be adjacent to each other as in the sixth embodiment shown in FIG. When the matching photoelectric converters are arranged as a set, there is an effect that the spatial resolution is enhanced. In FIG. 25A, the meanings of the signals SH1 and SH2 are reversed every other pair, so that the polarity of the CLK3 signal of the change detection circuit (not shown in FIG. 25) needs to be reversed correspondingly. There is.

10. Embodiment 7 FIG. FIG. 26 shows an embodiment of the two-dimensional motion detection device. FIG. 26A shows a combination of the one-dimensional detector shown in FIG. 22 in the vertical direction (Y) and the horizontal direction (X). The configuration of FIG.
Two of the four optical converters in (a) are shared, and the configuration is simpler than that in (a). In addition, based on the same idea as in the sixth embodiment, FIG.
The configuration shown in (b) can be extended to a device for detecting a spatial distribution of two-dimensional motion as shown in FIG.
In the two-dimensional speed detection, since the window frame problem exists as described above, the speed directly obtained by this method is:
These are Vx and Vy in the velocity space shown in FIG.

11. Embodiment 8 FIG. FIG. 28 is a modification of the configuration shown in the fifth embodiment (FIG. 24A), in which a plurality of sample-hold circuits and subsequent circuits (not shown in FIG. 28) are provided for one set of photoelectric converters. (Three sets in the figure). In this configuration, the movement of the spatial edge of the object can be detected at a plurality of frequencies by setting each set of the basic clock signals CLK to different frequencies. Therefore, as compared with the configuration of the fifth embodiment in which the movement of the spatial edge of the object is detected at a single frequency, there is an effect that the range of detectable speed can be expanded. Also, by setting the threshold value of the change detection circuit to a different value and giving priority to the motion detection result from the set of change detection circuits having a large threshold value, when the intensity of the spatial edge of the target object varies,
There is an effect that the motion can be detected with higher reliability than the configuration of the fifth embodiment in which the motion of the spatial edge is detected with a single threshold value.

12. Principle for displacement along a convex trajectory. Next, an embodiment based on a principle different from the principle shown in paragraph numbers 0011 to 0027 will be described. This detection principle is illustrated in FIG.
9 will be described. As shown in FIG. 29, when the photodetector is repeatedly displaced on the sides a, b, c, and d of the diamond-shaped ABCD, the spatial edge of the object (the spatial edge of the object is locally a straight line) ) Is moving temporally at a speed sufficiently slower than the period of displacement of the photodetector, such as h-i-j-k. At this time, in each of the sections a, b, c, and d, it is detected whether or not the output of the photodetector has changed by a predetermined value or more. That is, a time edge is detected. Then, the direction of the motion is detected based on the combination of the sections in which the time edges have been detected, and the speed is detected from the temporal length between them. In the two-dimensional speed detection, since the window frame problem exists as described above,
The velocities directly obtained by this method are Vx and Vy in the velocity space shown in FIG.

When the target spatial edge moves as shown in FIG. 29, a time edge is first detected in a section between a and d (while the spatial edge moves from h to i), and then (space). While the edge moves from i to j, a time edge is detected in the section between a and c, and finally (the spatial edge changes from j to k).
), A time edge is detected in the section between c and b. Since a time edge is first detected in the section between a and d, it can be determined that the velocity Vx in the x direction is positive.
Subsequently, it is possible to determine that the velocity Vy in the y direction is positive from the detection of the time edge in the section between a and c. Then, the speed Vx in the x direction is obtained from the time tx from when the time edge is first detected in the section between a and d until the time edge is no longer detected in the section between c and b.
The speed Vy in the y direction is obtained from the time ty during which the time edge is detected in the section of. That is, the spatial edge is
During the time tx, apparently, it has moved in the x direction by the distance Dx, so the speed Vx is Dx / tx. Similarly, the speed Vy is Dy / ty.

FIGS. 30 and 31 show the velocities Vx and Vy including the case where the spatial edge moves in a direction different from that of FIG.
(I.e., the direction of motion) and methods for detecting the times tx and ty corresponding to the speed are summarized in a state transition diagram. FIGS. 32 and 33 are explanatory diagrams corresponding to the respective transitions in the state transition diagrams of FIGS. 30 and 31. Here, FIG. 31 is a continuous drawing below FIG. 30, and a continuous portion of both is shown by a broken line and a part thereof is overlapped. FIG. 32 is a drawing arranged on the right side of FIG. 30, and FIG. 33 is a drawing arranged on the right side of FIG. Each continuous part is shown by a broken line and a part is overlapped. FIG. 29 shows an example in which the photodetector is displaced on a locus of a rhombus. However, the locus does not have to be a rhombus, and the locus may be a convex locus passing each of points A, B, C, and D. If so, the same principle holds. For example, it may be displaced in a circular locus as shown in a tenth embodiment described later. In this case, the diameters of the circles are Dx and Dy.

13. Embodiment 9 FIG. The ninth embodiment is a speed detecting device for detecting a spatial distribution of a speed in a two-dimensional direction. As shown in FIG. 34, a plurality of photodetectors arranged in an array on the sensor surface on which an image is formed and outputting signals corresponding to the intensity of the image at each position, It is composed of a connected motion detection circuit and a vibration means for periodically displacing the relative positional relationship of each photodetector with respect to the image in a two-dimensional locus. The vibration means is a photodetector (more precisely, a substrate on which the photodetector and the like are integrated),
As shown in FIGS. 6 to 37, the vibrator is vibrated so as to draw a locus of rhombus. As the vibration means, for example, a piezoelectric actuator or the like can be used.

As shown in FIG. 35, each of the motion detection circuits connected to each of the photodetectors operates when the absolute value of the time change of the signal intensity detected by the corresponding photodetector is equal to or larger than a predetermined value. A time edge detection circuit that outputs a signal TRG, and a position displacement section (the above sections a, b, c, and
d) and a signal TRG, a section determining circuit for determining in which section a time edge is detected, and an output of the section determining circuit using the output of the section determining circuit to determine the movement of the spatial edge of the object in the x and y directions. Time t corresponding to presence / absence and its speed
and a time calculation circuit for detecting x and ty.

As shown in FIG. 35, the time edge detecting circuit includes a time differentiating circuit for detecting a time change of a positive polarity, a time differentiating circuit for detecting a time change of a negative polarity, and each time differentiating circuit. A binarizing circuit for binarizing a circuit output value with a threshold to detect the presence or absence of a time change, and an OR for obtaining a logical sum of a positive time change and a negative time change
And a gate.

The change position detection circuit obtains a, a from the time edge signal TRG detected by the time edge detection circuit and the synchronization signal of the vibration means (a signal indicating which section the photodetector is displaced). b, c, and d are detected, and FIGS.
A ^* b, b ^* c, c ^* d, in the state transition diagram shown in FIG.
The signals d ^* a, a ^* c, and b ^* d are output to the time calculation circuit.

The time calculation circuit uses a logic circuit for performing state transitions shown in FIGS.
This is a circuit for obtaining x and ty. The speeds Vx and Vy are t
It is calculated from x and ty as described above. In the ninth embodiment, the calculation for obtaining Vx and Vy from tx and ty is performed by another external circuit.

14. Embodiment 10 FIG. In the ninth embodiment, an example in which the locus is displaced on the locus of the rhombus has been described. However, the locus does not have to be a rhombus, and the same principle is valid if the locus is a convex shape.
38 to 39 show examples in which the photodetector is vibrated so as to draw a circular locus. The configuration and operation of the device are the same except that the photodetector (accurately, the substrate on which the photodetector and the like are arranged in an array) vibrates so as to draw a circular locus.
This is the same as the ninth embodiment. As described above, when the photodetector is vibrated along a circular locus, the abrupt change in the locus is smaller than when the photodetector is vibrated along a locus, so that the substrate of the photodetector is displaced with less force. There is a merit that it can be done.

It should be noted that the embodiment of the temporal change detecting means and the motion judging means shown in this specification can replace the equivalent processing with another mechanism using a known digital image processing technique. it is obvious. Further, in the present invention, the portion referred to as "photodetector" in the specification is not necessarily a means for detecting light, for example, by replacing it with a means for detecting electromagnetic waves or ultrasonic waves, Obviously, the present invention can also be applied to detecting the motion from an ultrasonic image.

[0092]

According to the present invention, the presence or absence of a change in the image intensity at a portion where the position with respect to the image repeatedly changes over time is detected, and the intensity pattern of the image is determined based on the relationship between the portion and the presence or absence of the change. Since it is characterized in that at least one of the moving direction of the and the transit time of a predetermined distance is obtained,
Even when there is a difference in sensitivity or characteristic between the detectors or between the processing circuits, it is possible to accurately detect the movement of the image to be detected.

[Brief description of the drawings]

FIGS. 1A and 1B are explanatory diagrams of the principle of the present invention, in which FIG. 1A shows the principle of detection of the movement direction, FIG. 1B shows the speed of displacement (vibration) of the position of the signal detection means and whether or not the movement direction can be detected; ) Shows the principle of detecting the moving speed of the object.

FIGS. 2A and 2B show a motion detection device of each embodiment, in which FIG. 2A is a schematic cross-sectional view showing a structure, and FIG. 2B is a perspective view schematically showing an appearance.

FIG. 3 is a block diagram showing a configuration example of a motion detection circuit 20 shown in FIG.

FIG. 4 is a logic circuit diagram showing a specific configuration example of a motion determination circuit 22 in FIG. 3;

FIG. 5 is a block diagram showing an example in which the motion detection circuit 20 shown in FIG. 2B is configured differently from FIG.

FIG. 6 is a logic circuit diagram showing a specific configuration example of a motion determination circuit 22A in FIG. 6;

FIG. 7 is a timing chart showing the operation of the logic circuit in FIG. 7;

8 is a timing chart showing the operation of the logic circuit in FIG.

FIG. 9 is an explanatory diagram collectively showing a relationship between a moving direction of an image and a signal.

FIG. 10 shows the displacement direction of the photodetector 10, the moving direction of the image, and TR.
Explanatory drawing which shows the relationship of G.

FIG. 11 shows the displacement direction of the photodetector 10, the moving direction of the image, and TR.
Explanatory drawing which shows the relationship of G.

FIG. 12 shows the displacement direction of the photodetector 10, the moving direction of the image, and TR.
Explanatory drawing which shows the relationship of G.

FIG. 13 shows the displacement direction of the photodetector 10, the moving direction of the image, and TR.
Explanatory drawing which shows the relationship of G.

FIG. 14 shows the displacement direction of the photodetector 10, the moving direction of the image, and TR.
Explanatory drawing which shows the relationship of G.

FIG. 15 is an explanatory diagram corresponding to FIGS. 1 (a) and 1 (b),
A problem when the photodetector 10 is vibrated in a sine wave shape will be described.

16A and 16B are explanatory diagrams showing a configuration example different from FIG. 2 in which the substrate 100 of the motion detection device is vibrated with respect to an image, and FIG.
Shows an example in which the light transmitting plate 71 in front of the substrate 100 is swung, (b) shows an example in which the reflecting mirror 72 for guiding an image to the light receiving surface is moved forward and backward, and (c) shows an example in which the light shielding means provided on the front surface is displaced. .

FIG. 17 is a block diagram showing a circuit for detecting a moving direction and a speed of an image.

FIG. 18 is a block diagram showing a circuit different from FIG. 17 for detecting a moving direction and a speed of an image.

19A is a trajectory when the photodetector is vibrated in two dimensions, FIG. 19B is a temporal displacement in the x and y directions for realizing the trajectory in FIG. 19A, and FIG. Explanatory drawing which shows the speed which can be directly calculated | required in the case of the displacement of (b).

20A and 20B are explanatory diagrams of a principle in a case where a photodetector is vibrated two-dimensionally, wherein FIG. 20A is a principle of detecting a movement direction, and FIG. 20B is a speed and movement of displacement (vibration) of a position of the photodetector. (C) shows the principle of detecting the moving speed of the image.

FIG. 21 is an explanatory diagram of the principle of detection without using mechanical vibration.

FIG. 22 is a block diagram illustrating a configuration of a detection circuit according to a fifth embodiment.

FIG. 23 is a timing chart showing signals in FIG. 23;

FIG. 24 is a block diagram showing a configuration example when a sensitivity control circuit for adapting to long-term fluctuation is added to FIG. 23;

FIG. 25 is a block diagram showing a circuit configuration example of a sixth embodiment.

FIG. 26 is a block diagram showing a circuit configuration example of a seventh embodiment.

FIG. 27 is a block diagram in the case where the configuration example of FIG. 27B is extended two-dimensionally.

FIG. 28 is a block diagram illustrating a circuit configuration according to an eighth embodiment.

FIG. 29 is an explanatory diagram of a detection principle when the photodetector is displaced along a convex locus.

FIG. 30 is a part of a state transition diagram showing a method of detecting motion and speed.

FIG. 31 is the rest of the state transition diagram showing the method of detecting motion and speed. FIG. 31 is a diagram that is continuous below FIG. 30, and both continuous portions are indicated by broken lines.

FIG. 32 is an explanatory view supplementing FIG. 30; It is assumed that it is arranged on the right side of FIG.

FIG. 33 is an explanatory view supplementing FIG. 31; It is assumed that it is arranged on the right side of FIG.

FIG. 34 is a cross-sectional view and a perspective view schematically showing the configuration of an apparatus according to a ninth embodiment.

FIG. 35 is a block diagram of a photodetector and a motion detection circuit of the device according to the ninth embodiment.

FIG. 36 is a part of an explanatory view in the case of vibrating along a locus of diamonds.

FIG. 37 is a remaining part of the explanatory diagram in the case of vibrating along a locus of rhombus.

FIG. 38 is a part of an explanatory diagram in the case of vibrating along a circular locus;

FIG. 39 is a remaining part of the explanatory diagram in the case of vibrating along a circular locus.

FIG. 40 is a block diagram showing another configuration example of the device of the fifth embodiment.

41 is an input / output characteristic diagram (left column) of the change detection circuit in FIG. 40 and a timing chart (right column) showing the state of each signal.

FIG. 42 is a state transition diagram of the motion determination circuit in FIG. 40;

FIG. 43 is a state transition diagram when FIG. 42 is modified to make the case where the TRG signal is the same for three clocks or more valid;

[Explanation of symbols]

 Reference Signs List 10 photodetector 20 motion detection circuit 22 motion determination circuit 22A motion determination circuit 70 piezoelectric element (vibration means)

Claims (1)

[Claims] 1. A method for detecting the presence or absence of a change in image intensity at a portion where a position with respect to an image is repeatedly displaced with time, and detecting a movement direction of an intensity pattern of an image based on a relationship between the portion and the presence or absence of the change. A motion detection device for determining at least one of a passage time of a predetermined distance.