JPH11176741A5 - - Google Patents

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Publication number
JPH11176741A5
JPH11176741A5 JP1997362741A JP36274197A JPH11176741A5 JP H11176741 A5 JPH11176741 A5 JP H11176741A5 JP 1997362741 A JP1997362741 A JP 1997362741A JP 36274197 A JP36274197 A JP 36274197A JP H11176741 A5 JPH11176741 A5 JP H11176741A5
Authority
JP
Japan
Prior art keywords
optical system
imaging
light
projection
reticle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997362741A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11176741A (ja
JP3852196B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP36274197A priority Critical patent/JP3852196B2/ja
Priority claimed from JP36274197A external-priority patent/JP3852196B2/ja
Publication of JPH11176741A publication Critical patent/JPH11176741A/ja
Publication of JPH11176741A5 publication Critical patent/JPH11176741A5/ja
Application granted granted Critical
Publication of JP3852196B2 publication Critical patent/JP3852196B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP36274197A 1997-12-12 1997-12-12 投影光学系、投影露光装置及び走査投影露光方法 Expired - Lifetime JP3852196B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP36274197A JP3852196B2 (ja) 1997-12-12 1997-12-12 投影光学系、投影露光装置及び走査投影露光方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP36274197A JP3852196B2 (ja) 1997-12-12 1997-12-12 投影光学系、投影露光装置及び走査投影露光方法

Publications (3)

Publication Number Publication Date
JPH11176741A JPH11176741A (ja) 1999-07-02
JPH11176741A5 true JPH11176741A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2005-09-02
JP3852196B2 JP3852196B2 (ja) 2006-11-29

Family

ID=18477627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP36274197A Expired - Lifetime JP3852196B2 (ja) 1997-12-12 1997-12-12 投影光学系、投影露光装置及び走査投影露光方法

Country Status (1)

Country Link
JP (1) JP3852196B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006173305A (ja) * 2004-12-15 2006-06-29 Canon Inc 露光装置及び方法、並びに、デバイス製造方法
JP6936002B2 (ja) * 2016-12-08 2021-09-15 リコーインダストリアルソリューションズ株式会社 投射光学系および投射装置および撮像装置

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