JPH11174030A - Ultrasonic inspection device for movable specimien - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ultrasonic inspection device for a movable specimen which is inexpensive and capable of miniaturizing a sampling pitch in the arrangement direction of an oscillator. SOLUTION: A linear array probe 2 in which a plurality of oscillators 2a to 2n are arranged linearly at a fixed pitch Ap is faced and set in a direction (X-direction) perpendicular to a moving direction (Y-direction) of a steel plate 1 as a specimen. While the linear array probe 2 is reciprocated drivingly in the arrangement direction of the oscillators by a probe transfer device 3 and a power transmitting part, an electronic scanning is repeated at specified timings. When the electronic scanning is repeated each time the linear array probe 2 is moved by a distance equivalent to Ap/3, the steel plate 1 can be sampled at a pitch of Ap/3, and a defect F extending in the transfer direction of the steel plate 1 can also be detected easily.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic inspection apparatus for inspecting an object moved along a predetermined movement route by using an ultrasonic probe.

[0002]

2. Description of the Related Art As described in, for example, Japanese Patent Application Laid-Open Nos. 4-314000 and 4-256852, a steel plate which moves on a predetermined moving route using a linear array probe has been conventionally used. There is known an ultrasonic inspection device that performs a wide range of flaw detection continuously.

Further, as described in Japanese Patent Publication No. Hei 6-77003, for a steel sheet to be inspected by scanning using a probe or a group of probes in a direction parallel to a conveying direction of the steel sheet or in a width direction of the steel sheet. An ultrasonic automatic flaw detector is known.

On the other hand, regarding the relationship between transmission and reception of ultrasonic waves as an ultrasonic inspection apparatus, see, for example, JP-A-58-21.
As disclosed in Japanese Patent Publication No. 162, a case where an ultrasonic wave is transmitted (transmitted) to a steel plate (subject) and its reflected wave is detected (received) for inspection, and a case where an ultrasonic wave is transmitted to the steel plate and its transmitted wave is detected It is generally well-known that there are cases where inspections are performed.

Hereinafter, a conventional technique will be described by taking an ultrasonic inspection apparatus using a linear array probe as an example.

FIG. 5 is a plan view showing a relationship between a moving route of a steel plate as an object and an arrangement of a linear array probe as an ultrasonic probe, wherein a plurality of transducers 2a to 2n are arranged at a constant pitch. A linear array probe 2 arranged in a straight line with Ap is set so that the arrangement direction of the transducers 2a to 2n is oriented in the direction (X direction) orthogonal to the moving direction (Y direction) of the steel plate 1. I have.

Ultrasonic flaw detection of the steel plate 1 is performed by repeatedly driving the linear array probe 2 electronically while moving the steel plate 1 at a constant speed in the Y direction. The electronic scanning of the linear array probe 2 can be performed by sequentially exciting each of the transducers 2a to 2n one by one, or by sequentially exciting each of a plurality of transducers. Can also. When excitation is performed for each set of a plurality of transducers, the ultrasonic beam can be focused at a predetermined position by shifting the excitation timing of the transducers in each set by a predetermined amount. When the transducers 2a to 2n are sequentially excited one by one, or when a plurality of transducers are excited for each group, and when the transducers in each group are excited at the same timing, the focus may be increased. Becomes a parallel beam without

FIG. 6 shows data sampling positions on the steel plate 1 obtained by sequentially exciting each of the transducers 2a to 2n of the linear array probe 2 and performing electronic scanning. Here, the sampling pitch Xp in the X direction is equal to each transducer 2
The sampling pitch Yp in the Y direction is equal to the arrangement pitch Ap of a to 2n. One cycle time Ts for driving the electronic scanning of each of the vibrators 2a to 2n and the steel sheet transport speed Vm in the Y direction.
Is equal to the product of When the linear array probe 2 is arranged at right angles to the transport direction of the steel plate 1, the sampling point for each electronic scan is actually determined by the linear array probe because the steel plate 1 is transported at a predetermined speed. Although it is inclined with respect to the arrangement direction of the contactors 2, such inclination is not directly related to the technical problem of the prior art. Is shown without tilting.

[0009]

As is apparent from FIG. 6, since a linear defect F extending in the Y direction, which is the rolling direction, is likely to occur on the steel sheet 1, such a defect F can be detected with high precision. In order to perform detection, it is necessary to reduce the sampling pitch Xp in the X direction, that is, to reduce the arrangement pitch Ap of the transducers 2a to 2n. Further, each of the transducers 2a to 2p that can form the sampling pitch Xp in the X direction
When the pitch is smaller than the 2n array pitch Ap, as described in the above-mentioned Japanese Patent Application Laid-Open No. 4-314000, the array pitch of each vibrator is shifted by ピ ッ チ pitch to form a two-row linear array. The probe 2 needs to be arranged.

However, according to the above configuration, the number of transducers is increased, and the circuit size of the electronic scanning circuit is increased. Therefore, there is a disadvantage that the cost of the apparatus is increased. In addition, when the arrangement pitch Ap of each of the transducers 2a to 2n is reduced and a large number of transducers are arranged in a straight line, one cycle time for driving the electronic scanning becomes longer, so that the sampling pitch Yp in the Y direction becomes smaller. On the contrary, there is a disadvantage that the size becomes large.

Further, in an ultrasonic inspection apparatus using a probe or a probe group as described in Japanese Patent Publication No. Hei 6-77003, each probe is placed at a fixed distance. The probe cannot be inspected between the probes due to the arrangement of the probe. Even if an attempt is made to increase the number of probes to reduce the pitch of the probes in order to eliminate such inconveniences, the single type ultrasonic probe has a large pitch due to the large size of each probe. There is naturally a limitation on the narrowing of the probe, and even if the narrowing can be achieved, the same problem as described above occurs because the number of probes increases.

SUMMARY OF THE INVENTION The present invention has been made to solve the above deficiencies of the prior art. It is an object of the present invention to reduce the sampling pitch in the X direction at low cost and to increase the sampling pitch in the Y direction. It is an object of the present invention to provide an ultrasonic inspection apparatus for a moving subject that does not have any problem.

[0013]

In order to achieve the above object, the present invention relates to an ultrasonic probe in which a plurality of transducers are linearly arranged at a predetermined arrangement pitch when an array probe is used. The array probe is attached in a direction crossing the movement route of the subject, and while the subject is moved in one direction, the electronic scanning of the ultrasonic array probe is repeated to transmit ultrasonic waves to the subject, In an ultrasonic inspection device that receives a reflected wave or a transmitted wave from an object and inspects the object, the ultrasonic inspection device is mounted on a probe transfer device that reciprocates the ultrasonic array probe in the arrangement direction of the transducers. Then, the probe transfer device is driven to reciprocate the ultrasonic array probe by a predetermined transfer amount.

The amount of transfer of the ultrasonic array probe by the above-described probe transfer device can be arbitrarily set, but the transfer amount is made as small as possible to reduce the size of the probe transfer device and the inspection efficiency. In order to improve the efficiency, it is preferable to set the pitch within the arrangement pitch of the vibrators.

In the case of using a single type probe, a plurality of single type ultrasonic probes are arranged to face the subject, and the plurality of single type ultrasonic probes are moved while moving the subject in one direction. In an ultrasonic inspection apparatus that transmits an ultrasonic wave to the subject from a single type ultrasound probe and receives a reflected wave or a transmitted wave from the subject to test the subject, the plurality of single type Ultrasonic probes are arranged in at least one row at a predetermined arrangement pitch in a direction crossing the movement route of the subject, and an ultrasonic probe group including a plurality of the single type ultrasonic probes is arranged. Mounted on a probe transfer device that reciprocates in the arrangement direction of the single type ultrasonic probe, drives the probe transfer device to reciprocate the ultrasonic probe group by a predetermined transfer amount. Was adopted.

The transfer amount of the ultrasonic probe group by the probe transfer device can be set arbitrarily. However, the transfer amount is made as small as possible to reduce the size of the probe transfer device and reduce the inspection efficiency. In order to improve the efficiency, it is preferable to set the distance within the arrangement pitch of the probe group.

Further, the arrangement pitch of each single type ultrasonic probe constituting the ultrasonic probe group can be constant for all the single type ultrasonic probes, If there is an area that requires inspection at a particularly small pitch and an area that can be inspected at a larger pitch, the mounting position of each single-type ultrasonic probe Can change the arrangement pitch.
In this case, it is preferable that the transfer amount of the ultrasonic probe group is set within a smaller arrangement pitch among the arrangement pitches of the ultrasonic probe group.

As described above, in either case of using the array type probe or the single type probe, the ultrasonic probe is moved by the probe transfer device to the transducer or the single type probe. When the reciprocating transfer can be performed in the arrangement direction, the sampling pitch in the direction intersecting the moving direction of the subject is adjusted to be smaller than the arrangement pitch of each transducer or single-type probe by adjusting the transfer amount. Therefore, the accuracy of defect detection can be improved. In this case, there is no need to increase the number of transducers or single-type probes, so that it is possible to provide a high-accuracy ultrasonic inspection device at a low cost even if the additional portion of the probe transfer device is considered. it can. Further, since the number of transducers is not increased, it is possible to prevent an increase in one cycle time for driving the electronic scanning, and to prevent an increase in the sampling pitch in the Y direction. Also, even when using a single type probe, the number of probes is not increased,
It is possible to prevent the cycle time of transmission and reception of ultrasonic waves from being extended.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An example of an ultrasonic inspection apparatus according to the present invention will be described below with reference to FIGS.

FIG. 1 is a plan view showing a configuration of an ultrasonic inspection apparatus according to an embodiment and an arrangement with respect to a subject, and FIG. 2 is a diagram showing a driving method of a probe transfer device and driving an electronic scan of the ultrasonic probe. FIG. 3 is a plan view showing a data sampling position on a subject obtained by the ultrasonic inspection apparatus according to the embodiment.

In FIG. 1, reference numeral 1 denotes a steel plate as an object,
Denotes a linear array probe which is an ultrasonic probe, and 3 denotes a probe transfer device.

As shown in FIG. 1, the linear array probe 2
Has the same configuration as that according to the prior art shown in FIG. 5, and the arrangement direction of the plurality of transducers 2a to 2n is
The vibrators 2a to 2n are arranged in a straight line, and the direction of arrangement of the vibrators 2a to 2n is set in the direction (X direction) orthogonal to the moving direction (Y direction) of the steel plate 1.

The probe transfer device 3 includes a mounting portion for the linear array probe 2 (not shown) and a motor, a solenoid,
The linear array probe 2 includes a driving source such as an air cylinder, a power transmission unit including a link, a slider, a gear and a screw combined therewith, and a control unit for controlling these components. Are arranged to reciprocate in the arrangement direction.

As is clear from FIG. 2, the probe transfer device 3 of the present embodiment has a distance corresponding to ／ of the arrangement pitch Ap of the transducers 2 a to 2 n constituting the linear array probe 2. One cycle time Ts for driving electronic scanning as the transfer amount
Are reciprocally driven at a cycle four times as long as the first set position (Xp) of each of the vibrators 2a to 2n in the outward path.
= 0), Xp = Ap / 3 from the first set position
At the time point Xp = 2Ap / 3, which is the maximum amplitude of the linear array probe 2, and at the time point Xp = Ap / 3 from the first set position on the return path. Control is performed so as to coincide with the timing for driving the scanning. Note that, in order to completely match the moving amount of the probe in the X direction with the timing of driving the electronic scanning, the electronic scanning may be driven after moving the probe to each predetermined position.

With this control, as shown in FIG. 3, the data sampling position of the steel plate 1 is changed to the value of the electronic scanning drive performed at the time of Xp = 0 because the steel plate 1 is moving in a fixed direction. Data sampling position (L1)
In contrast, the data sampling position (L2) by the electronic scanning drive performed at the time of Xp = Ap / 3 in the forward path
And the data sampling position (L3) by the electronic scanning drive performed at the time of Xp = 2Ap / 3, and the data sampling position (L4) by the electronic scanning drive performed at the time of Xp = Ap / 3 on the return path. Each of the transducers 2a to 2n is shifted by 1/3 of the arrangement pitch Ap. Therefore, the steel plate 1 can be sampled at a pitch of Ap / 3 using the linear array probe 2 having the arrangement pitch Ap of the transducers 2a to 2n.

Therefore, according to the ultrasonic inspection apparatus according to the embodiment, the sampling pitch in the direction intersecting with the moving direction of the steel plate 1 is set to be 1/1 / the arrangement pitch Ap of each transducer.
3, the detection accuracy of the defect F can be improved. In addition, since it is not necessary to increase the number of transducers 2a to 2n constituting the linear array probe 2,
A high-accuracy ultrasonic inspection apparatus can be implemented at low cost even if the additional amount of the probe transfer device 3 is taken into consideration. Further, since the number of transducers is not increased, it is possible to prevent the cycle time of the repetition of electronic scanning from being extended, and to prevent the sampling pitch in the Y direction from increasing.

In the above embodiment, the moving amount of the linear array probe 2 is set to a distance corresponding to 2/3 of the arrangement pitch Ap of the transducers 2a to 2n, and the driving cycle of the linear array probe 2 is set. Is TL, and the relationship when one cycle time for driving the electronic scanning is Ts is TL = 4 × Ts, and the electronic scanning is performed by four times while the linear array probe 2 makes one reciprocation.
Although performed at equal intervals, the present invention is not limited to this, and the transfer amount and driving cycle of the linear array probe 2
The number of times of electronic scanning and the timing of starting electronic scanning during one reciprocation of the linear array probe 2 can be set arbitrarily irrespective of the embodiment. FIG.
In addition, the amount of transfer of the linear array probe 2 is
A distance corresponding to an array pitch Ap of 2n, TL ≠ n ×
A control method of a relational expression such as Ts (n: a positive integer) is illustrated. By such control, the moving amount in the X direction and the data sampling position (for example, L1 to L5 described above) by each electronic scan can be arbitrarily changed.

Further, in the above embodiment, the case where the object is a steel plate has been described as an example, but the gist of the present invention is not limited to this, and any object conveyed through a certain route can be used. Of course, it can be applied to the ultrasonic examination of the subject.

Further, in the above-described embodiment, the linear array probe is used as the ultrasonic probe, but the gist of the present invention is not limited to this, and a single type ultrasonic probe having a vibrator is used. An ultrasonic inspection apparatus having the same function as the ultrasonic inspection apparatus according to the embodiment can be obtained by using a probe group in which a plurality of ultrasonic probes are arranged. In this case, each probe of a probe group in which a plurality of single-type probes are arranged in at least one row may transmit and receive ultrasonic waves sequentially from the end, or all probes may be used. Can be controlled at a desired cycle, such as driving at once and performing transmission and reception. If the defect F shown in FIG. 6 does not exist near the center in the width direction of the steel sheet 1 to be inspected, if the user can determine that the steel sheet 1 is good, No detailed inspection is required over the entire direction. In such a case, it is not always necessary to arrange the single-type probes at a constant pitch, and the arrangement pitch of the single-type probes arranged linearly is set to a predetermined value at the center of the steel plate 1. It can be narrower at the portion facing the region and wider at both sides. By reciprocating the probe group within the narrowly arranged pitch, a desired portion can be inspected with a smaller width than the arranged pitch and with higher accuracy without increasing the number of probes.

Further, in the above-described embodiment, the ultrasonic inspection apparatus for transmitting ultrasonic waves to the subject and receiving the reflected waves reflected from the subject and inspecting the same is described. It is also apparent that the present invention can be applied to an ultrasonic inspection apparatus of a system for receiving and inspecting a transmitted wave transmitted through a subject when transmitted to a subject.

Further, as shown in the above-mentioned Japanese Patent Application Laid-Open No. Hei 4-314000, the present invention can be applied to an ultrasonic inspection apparatus having a plurality of rows of linear array probes, and can be applied with higher accuracy. Inspection can be performed without extending the scanning time.

[0032]

As described above, according to the present invention, the ultrasonic probe can be reciprocated in the arrangement direction of the transducers by the probe transfer device, so that it intersects with the moving direction of the subject. In this case, the sampling pitch in the moving direction can be made smaller than the arrangement pitch of the transducers, and the accuracy of defect detection can be improved. In this case, since it is not necessary to increase the number of transducers, a high-accuracy ultrasonic inspection apparatus can be provided at a low cost even if the additional probe transfer device is considered. Furthermore, since the number of transducers is not increased,
It is also possible to prevent an increase in the cycle time of the repetition of electronic scanning, and to prevent an increase in the sampling pitch in the moving direction of the subject.

[Brief description of the drawings]

FIG. 1 is a plan view showing a configuration of an ultrasonic inspection apparatus according to an embodiment and an arrangement with respect to a subject.

FIG. 2 is a graph showing a driving method of a probe transfer device and an electronic scanning timing of an ultrasonic probe.

FIG. 3 is a plan view showing data sampling positions on a subject obtained by the ultrasonic inspection apparatus according to the embodiment.

FIG. 4 is a graph showing another example of the driving method of the probe transfer device and the electronic scanning timing of the ultrasonic probe.

FIG. 5 is a plan view showing a configuration of an ultrasonic inspection apparatus according to a conventional example and an arrangement with respect to a subject.

FIG. 6 is a plan view showing data sampling positions on a subject obtained by an ultrasonic inspection apparatus according to a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Subject (steel plate) 2 Ultrasonic probe (linear array probe) 2a-2n Transducer 3 Probe transfer device

Claims (6)

[Claims] 1. An ultrasonic array probe in which a plurality of transducers are linearly arranged at a predetermined arrangement pitch is attached in a direction crossing a movement route of a subject, and moving the subject in one direction. In an ultrasonic inspection apparatus that repeats electronic scanning of the ultrasonic array probe, transmits ultrasonic waves to the subject, receives reflected waves or transmitted waves from the subject, and tests the subject, The ultrasonic array probe is mounted on a probe transfer device that reciprocates the ultrasonic array probe in the arrangement direction of the transducers, and drives the probe transfer device to reciprocate the ultrasonic array probe by a predetermined transfer amount. An ultrasonic inspection apparatus characterized in that: 2. The ultrasonic inspection apparatus according to claim 1, wherein a transfer amount of the ultrasonic array probe by the probe transfer device is set within an array pitch of the transducers. Ultrasonic inspection equipment. 3. A plurality of single-type ultrasonic probes are arranged in opposition to the subject, and the plurality of single-type ultrasonic probes are moved to the subject by moving the subject in one direction. In an ultrasonic inspection apparatus for transmitting an ultrasonic wave and receiving a reflected wave or a transmitted wave from the subject and inspecting the subject, at least one of the plurality of single type ultrasound probes is arranged at a predetermined arrangement pitch. More than one row is arranged in a direction intersecting with the movement route of the subject, and an ultrasonic probe group composed of the plurality of single type ultrasonic probes is reciprocated in the arrangement direction of the single type ultrasonic probes. An ultrasonic inspection apparatus which is mounted on a probe transfer device to be transferred, and drives the probe transfer device to reciprocate the ultrasonic probe group by a predetermined transfer amount. 4. The ultrasonic inspection apparatus according to claim 3, wherein a transfer amount of the ultrasonic probe group by the probe transfer device is set within an array pitch of the ultrasonic probes. Ultrasonic inspection equipment characterized. 5. The ultrasonic inspection apparatus according to claim 3, wherein the ultrasonic probe group is provided with a part where the arrangement pitch of the single type ultrasonic probes is large and a part where the arrangement pitch is small. Ultrasonic inspection equipment. 6. The ultrasonic inspection apparatus according to claim 5, wherein a transfer amount of the ultrasonic probe group by the probe transfer device is smaller than an array pitch of the ultrasonic probe group. An ultrasonic inspection apparatus characterized by being within the arrangement pitch of the two.