JPH11171289A - Chemical liquid container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a chemical liquid container wherein a problem such as leakage of chemical liquid caused by vibration or the like during transportation of the container is eliminated, having safety with high airtightness and excellent resistance to impact. SOLUTION: A chemical liquid inlet 2 and a gas inlet 3 are made to protrude from a resin container 1" placed in a metallic container 1' through an upper opening of the metallic container 1', a chemical feed coupler 9 is fastened to the chemical liquid inlet 2 via a press cap 11 screwed onto an outer peripheral, face of the inlet 2 while a gas feed coupler 10 is fastened to the other gas inlet 3 via a press cap 12 screwed onto an outer peripheral face of the inlet 3, and both press caps 11, 12 are fastened and held to the metallic container 1' via a press plate 13 fastened to the metallic container 1'.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chemical solution container used for carrying and storing a chemical solution and the like.

[0002]

2. Description of the Related Art In the production of semiconductors and liquid crystals, high-purity chemicals such as cleaning solutions, developers, electrolytes, and strippers are used, and containers of these high-purity chemicals have sufficient airtightness for safety. And impact resistance are required.

[0003] The above-mentioned chemical liquid container usually has a small-diameter cylindrical opening integrally at the upper part of the container main body, and a lid having a supply and discharge port for a chemical solution and a gas is screwed into the cylindrical opening to tightly close the cylindrical opening, and then into the container main body. The injection of the chemical liquid is performed with the gas supply and discharge ports opened, and through the pipe connected to the chemical liquid supply and discharge port and inserted near the bottom of the container main body, while taking out the chemical liquid from the inside of the container main body Is performed by forcing the gas into the container body from the gas supply / discharge port, thereby discharging the chemical liquid in the container body from the chemical liquid supply / discharge port through the pipe.

However, if the lid is simply screwed into the cylinder opening of such a liquid container, the screwed portion may be loosened due to vibration during transportation or the like, which may cause leakage of the chemical solution. Particularly, in the case of a chemical liquid container having a double structure in which a resin container is disposed in a metal container, the inner container (resin container) floats and rattles in the outer container (metal container), which causes damage to the container.

[0005] In order to prevent such loosening of the lid from being screwed into the cylindrical mouth and play of the inner container, conventionally, for example, a double-layered chemical solution container composed of a metal container and a resin container projects from the upper opening of the metal container. Place the cover plate on the inner lid screwed into the cylinder opening of the resin container to be, and this cover plate and the periphery of the flange protruding from the outer periphery of the cylinder opening of the metal container,
A means for clamping and holding with a clamp band having a V-shaped cross section is employed.

[0006]

However, the conventional fastening structure using the clamp band cannot be said to be sufficient in both the airtightness and the impact resistance, and is required to be reviewed from the viewpoint of improving safety.

[0007] In recent years, chemicals have been frequently transported overseas by sea, and high airtightness and impact resistance have been required to meet the recommendations of the UN Committee on the Transport of Dangerous Goods regarding the transport of dangerous goods. There is a demand for a highly safe chemical solution container.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and has been made to conform to the above-mentioned recommendation and the like, and to reliably and stably realize airtightness between a container main body and a lid covered by a cylindrical opening thereof. While making it possible, sufficient impact strength is obtained,
Moreover, it is an object of the present invention to provide a chemical solution container which is easy to assemble.

[0009]

In order to achieve the above object,
The present invention tightens the chemical solution supply / discharge coupler with a press cap screwed to the outer peripheral surface of the chemical solution supply / discharge cylinder opening,
The gas supply / discharge coupler is fastened to the gas supply / discharge cylinder opening with a holding cap screwed to the outer peripheral surface of the cylinder opening, and both the holding caps are further fastened to the container by a holding plate that is bolted to the container. Configuration.

In addition, the above-mentioned holding caps are screwed into a gas supply / discharge cylinder opening and a chemical supply / discharge cylinder opening protruding from the resin container, respectively. The supply / discharge coupler and the gas supply / discharge coupler are tightened, and both holding caps are fastened to the metal container by a single holding plate bolted to the metal container.

The press plate is provided with a cap insertion hole having a shape for preventing rotation of each press cap. Further, the holding plate is bolted to the container between the holding cap of the chemical solution supply / discharge coupler and the holding cap of the gas supply / discharge coupler.

A chemical solution supply / discharge coupler for a chemical solution supply / discharge cylinder opening or a gas supply / discharge cylinder opening is provided by a double fastening structure in which the above-mentioned holding caps are fastened by screwing and both holding caps are bolted to the container with a common holding plate. Alternatively, high airtightness with the gas supply / discharge coupler can be ensured.

In addition, the supply / discharge coupler can be smoothly attached to each supply / discharge cylinder port by the presser cap, and the harmful rotation of the presser cap (rotation for releasing the screw) can be effectively prevented by the common presser plate. Thus, the holding of the supply / discharge coupler by the presser cap can be maintained sound.

Therefore, there is a problem of leakage of the chemical solution due to loosening of the screw-in portion as in the conventional example due to vibration or the like at the time of transporting the chemical solution container, or a double structure composed of an inner container (resin container) and an outer container (metal container). It is possible to provide a chemical solution container having a high impact strength and excellent safety, which eliminates the problem of container breakage due to floating of the inner container or rattling of the chemical solution container having a structure.

[0015]

FIG. 1 shows an embodiment of the present invention.
4 through FIG.

The chemical solution container 1 shown in FIGS. 1 and 2 forms a double structure container of a cylindrical metal container 1 'and a resin container 1 "fitted inside the metal container 1'. The container 1 'is formed of, for example, a stainless steel plate or the like, and reinforcing rib-like ribs 1c' are integrally provided on the outer peripheral surface of the container 1 'at intervals above and below the metal container 1'. A metal skirt 1d 'for stable support is fixed by welding, etc. On the other hand, the resin container 1 "is formed through an upper opening 1b' formed in a top wall 1a 'of the metal container 1'. The chemical solution supply / discharge port 2 and the gas supply / discharge port 3 integrally formed on the “top wall 1a” protrude upward.

FIG. 3 shows another embodiment, in which the chemical solution container 1 is formed of a single cylindrical container made of metal or resin, and is integrally formed on the top wall 1a of the container 1 in the same manner as described above. The gas supply / discharge port 2 and the gas supply / discharge port 3 are projected upward.

As shown in FIGS. 1 to 3, male screw portions 2a and 3a are formed on the outer peripheral surfaces of the supply and discharge cylinder ports 2 and 3, respectively. Container 1,
An opening is formed on the inner peripheral surface of the cylindrical opening 1 ", and annular sealing seats 2b, 3b are formed at the upper ends of the cylindrical openings 2, 3.

A lid 4 is fitted into the chemical solution supply / discharge cylinder opening 2, and the lid 4 is provided between the flange portion 4a projecting annularly from the upper peripheral edge thereof and the annular sealing seat 2b.
And are closely fitted.

At the center of the lid 4, a chemical supply / discharge port 6 is provided vertically penetrating, and a chemical supply / discharge pipe 8 is fitted into the chemical supply / discharge port 6. The chemical liquid supply / discharge pipe 8 has its upper end flange 8a closely engaged with the peripheral edge of the supply / drain port 6 on the upper surface of the lid 4 via a sealing O-ring 5.
The lower end of 5 reaches near the bottom of the container 1, 1 ".

On the other hand, the gas supply / discharge port 3 forms a gas supply / discharge port 7 at its opening.

A chemical solution supply / discharge coupler 9 is attached to the chemical solution supply / discharge port 6, while a gas supply / discharge coupler 1 is attached to the gas supply / discharge port 7.
The couplers 9 and 10 are screwed to the outer peripheral surfaces of the liquid supply / discharge tube opening 2 and the gas supply / discharge tube opening 3 so that the supply / discharge tube openings 6 and 7 are connected. Are pressed and held respectively.

The holding caps 11 and 12 have a cylindrical shape, and small-diameter cylindrical portions 11a and 12a through which the couplers 9 and 10 are inserted are respectively provided at the center of the upper end surfaces thereof. The distal ends of the couplers 9 and 10 are inserted into the portions 11a and 12a so as to protrude upward, and each of the annular step portions 11 formed on the respective connecting portions of the small-diameter cylindrical portions 11a and 12a.
b, 12b, the annular flange portions 9 at the base ends of the couplers 9, 10
a, 10a, respectively, and this engaging surface is
1 and 12 are the pressing surfaces.

On the inner peripheral surface on the lower end side of each of the cylindrical holding caps 11 and 12, female screw portions 11c and 12c screwed to the male screw portions 2a and 3a of the supply and discharge cylinder ports 2 and 3 are provided. Each of the supply / discharge couplers 9, 10 a of each of the supply / discharge couplers 9, 10 is pressed by the annular stepped portions 11 b, 12 b of each of the holding caps 11, 12 by this screw fastening. 10 are fastened to the supply / discharge ports 6 and 7, respectively.

That is, by properly screwing the holding caps 11 and 12 externally inserted into the supply / discharge couplers 9 and 10, the respective supply / discharge couplers 9 and 10 are properly positioned with respect to the supply / discharge ports 6 and 7. Supply and discharge couplers 9 and 1 in the supply and discharge cylinder ports 2 and 3, respectively.
0 can be easily tightened.

The chemical supply / discharge coupler 9 is provided between the sealing O-ring 5 and the flange 8 a of the chemical supply / discharge pipe 8.
Is pressed down on the upper surface of the lid 4, and the supply / discharge port 9b of the coupler 9 and the supply / discharge pipe 8 are in close communication.

On the other hand, the gas supply / discharge coupler 10 is pressed into the gas supply / discharge cylinder opening 3 with the sealing O-ring 5 interposed between the annular sealing seats 3b by screwing the holding cap 12 together. Supply / discharge port 1 of the coupler 10
0b and the supply / discharge port 7 of the supply / discharge cylinder port 3 are in close communication.

As clearly shown in FIG. 4, a plurality of reinforcing vertical ribs 11d, 12d are integrally provided on the outer peripheral edge on the upper end side of the holding caps 11, 12 at intervals in the circumferential direction. , On the outer peripheral edge at the lower end side of the caps 11 and 12,
Both caps 11, with a common holding plate 13 to be described later,
Flanges 11e and 12e for holding down 12 protrude annularly.

Furthermore, jig engaging portions 11f and 12f such as hexagons are formed on the outer peripheral surfaces of the pressing caps 11 and 12, and the screwing of the caps 11 and 12 to the supply / discharge cylinder openings 2 and 3 is facilitated. The supply and discharge couplers 9 and 10 can be freely attached to and detached from the respective supply and discharge cylinder ports 2 and 3 by releasing the screwing of the holding caps 11 and 12. 1
Numeral 3 designates both the holding caps 11 and 12 as containers 1, 1 '.
The holding plate 13 is a holding plate for tightening and holding the holding cap 1 as shown in FIG.
It is made of, for example, a metal plate, a resin plate, or the like, which has a substantially elliptical shape extending between 1 and 12, for example, both ends are semicircular.

The holding plate 13 is provided with cap fitting holes 14 and 15 for fitting the holding caps 11 and 12, respectively. The fitting holes 14 and 15 are fixed to the holding caps 11 and 12 respectively. The holding caps 11 and 12 are formed in a hole shape that is substantially synchronized with the tool engaging portions 11e and 12e, so as to prevent the rotation of the holding caps 11 and 12 respectively.

The cap fitting hole 14 of the holding plate 13
A bolt insertion hole 16 is provided between the holding caps 11 and 12, that is, between the holding caps 11 and 12, so as to penetrate the front and back of the plate 13, and a stud bolt 17 inserted through the insertion hole 16 is provided.
, And the holding plate 13 is tightened and held on the containers 1 and 1 ′.
The nuts 1 and 12 are fastened and held to the containers 1 and 1 'by tightening the nut 18.

The bolt 17 is used for the top wall 1 of the container 1, 1 '.
a, 1a ', and extends substantially vertically upward and is erected.
As shown in FIG. 2 and FIG.
The top wall 1a, 1a 'of 1' may be integrally erected by welding or the like, or the lower end of a bolt 17 may be screwed into a screw groove 19a of a bolt stand ring 19 provided integrally with the top wall 1a, 1a '. Erected in

Preferably, as shown in FIG. 4, a plurality of the bolts 17 and the bolt insertion holes 16 are arranged in a balanced manner at the center of the holding plate 13 so that the holding plate 13 and the holding caps 11 and 12 for the containers 1 and 1 'are provided. Securely tighten the.

More specifically, the bolt 17 is attached to the top wall 1a,
1a ', it stands on the top wall between the supply / discharge cylinder ports 2 and 3 provided in
The central part of the holding plate 13 is fastened to the container 1, 1 ′ between the holding caps 11, 12, and fastened to the caps 11, 12 at the holding plate part extending right and left from the self-fastening position (bolt tightening position). It is a structure that gives power and presses down.

As described above, while pressing the holding caps 11 and 12 into the cap insertion holes 14 and 15 of the holding plate 13 and inserting the bolts 17 into the bolt insertion holes 16 respectively, the holding caps 11 and 12, the lower surface of the holding plate 13 is supported by the flange portions 11e and 12e,
A nut 18 is screwed onto the upper end of the bolt 17 protruding upward from the upper surface of the holding plate 13, and the nut 18 is tightened by a jig to fasten the holding plate 13 to the containers 1, 1 ′. As a result, both the holding caps 11 and 12 are inserted into the respective cap fitting holes 14 and 15 of the holding plate 13.
By this, the rotation is prevented, and they are clamped and held by the containers 1, 1 '.

That is, the mounting of the supply / discharge couplers 9 and 10 to the respective supply / discharge cylinder openings 2 and 3 is performed by tightening the press caps 11 and 12, and the prevention of loosening of the press caps 11 and 12 is performed by tightening the press plate 13. .

In the embodiment shown in FIG. 3, the lower end of the bolt 17 is screwed into the bolt stand ring 19 by tightening the nut 18, and both the holding plate 13 and the holding caps 11, 12 are tightened to the container 1. Can be adopted.

As described above, the chemical solution supply is performed by the screwing of the holding caps 11 and 12 and the double fastening structure in which the holding caps 11 and 12 are fastened to the containers 1 and 1 ′ by the holding plate 13 with the nut 18. High airtightness with the chemical solution supply / discharge coupler 9 or the gas supply / discharge coupler 10 with respect to the discharge port 6 or the gas supply / discharge port 7 is ensured.

The holding plate 13 effectively prevents harmful rotation of each of the holding caps 11 and 12, that is, prevents the holding caps 11 and 12 from being loosened.
In addition, the tightening and holding of the press caps 11 and 12 with respect to the gas supply / discharge cylinder opening 3 is maintained soundly.

As shown in FIGS. 1 and 2, a metal container 1 '
On the other hand, the resin container 1 "can be firmly and airtightly fixed by the holding caps 11, 12 and the holding plate 13, and the backlash of the resin container 1" in the metal container 1 'is reliably prevented.

[0041]

According to the present invention, the double tightening structure of tightening each supply / discharge coupler by screwing each press cap and tightening both press caps by the press plate tightened to the container cooperates. In addition, it is possible to provide a chemical liquid container having high safety, high airtightness and high impact strength.

Further, each of the supply / discharge couplers can be smoothly mounted by the presser cap and the presser plate, and harmful rotation of the presser cap (rotation to cancel the screwing) can be effectively prevented, and each presser cap can be removed. Can maintain the tightening and holding of each supply / discharge coupler soundly.

[Brief description of the drawings]

FIG. 1 is a partially cutaway side view showing a liquid medicine container according to an embodiment of the present invention.

FIG. 2 is an enlarged sectional view of a main part of the chemical solution container.

FIG. 3 is an enlarged sectional view of a main part of a chemical solution container showing another embodiment.

FIG. 4 is a plan view showing a state in which a pressing cap is pressed by a pressing plate.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Chemical solution container 1 'Metal container 1 "Resin container 2 Chemical solution supply / discharge cylinder opening 3 Gas supply / discharge cylinder opening 2a, 3a Male screw part 4 Lid 5 Sealing O-ring 6 Chemical supply / discharge port 7 Gas supply / discharge port 8 Chemical supply / discharge pipe 9 Chemical solution supply / discharge coupler 10 Gas supply / discharge coupler 11, 12 Holding cap 11c, 12c Female thread 11e, 12e Flange 11f, 12f Jig engaging portion 13 Holding plate 14, 15 Holding cap fitting hole 16 Bolt insertion hole 17 Bolt 18 Nut 19 Bolt stand ring

Claims (4)

[Claims] In a chemical container provided with a chemical solution supply / discharge cylinder opening and a gas supply / discharge cylinder opening, a chemical solution supply / discharge coupler is tightened with a holding cap screwed onto the outer peripheral surface of the chemical solution supply / exhaust cylinder opening. The gas supply / discharge coupler is fastened to the supply / discharge cylinder opening with a holding cap screwed to the outer peripheral surface of the cylinder opening, and the two holding caps are further fastened to the container by a single holding plate that is fastened to the container. A chemical solution container having a configuration. 2. A chemical solution container comprising a metal container and a resin container arranged in a double structure, wherein a chemical solution supply / discharge port and a gas supply / discharge port are protruded from the resin container through an upper opening of the metal container. The chemical liquid supply / discharge coupler is fastened to the chemical liquid supply / discharge cylinder opening by a press cap screwed to the outer peripheral surface of the cylinder opening, and the gas supply / discharge is supplied to the gas supply / discharge cylindrical opening by a press cap screwed to the outer peripheral surface of the cylinder opening. A chemical solution container, wherein a coupler is fastened, and the two holding caps are fastened to the metal container by a single holding plate fastened to the metal container. 3. The chemical solution container according to claim 1, wherein the holding plate is provided with cap insertion holes each having a shape for preventing rotation of each of the holding caps. 4. The chemical solution container according to claim 1, wherein the holding plate is bolted to the container between a holding cap of the chemical solution supply / discharge coupler and a holding cap of the gas supply / discharge coupler.