JPH1116846A5 - - Google Patents
Info
- Publication number
- JPH1116846A5 JPH1116846A5 JP1997171441A JP17144197A JPH1116846A5 JP H1116846 A5 JPH1116846 A5 JP H1116846A5 JP 1997171441 A JP1997171441 A JP 1997171441A JP 17144197 A JP17144197 A JP 17144197A JP H1116846 A5 JPH1116846 A5 JP H1116846A5
- Authority
- JP
- Japan
- Prior art keywords
- seal cap
- furnace
- purge gas
- gas supply
- supply pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17144197A JP3785247B2 (ja) | 1997-06-27 | 1997-06-27 | 半導体製造装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17144197A JP3785247B2 (ja) | 1997-06-27 | 1997-06-27 | 半導体製造装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JPH1116846A JPH1116846A (ja) | 1999-01-22 |
JPH1116846A5 true JPH1116846A5 (enrdf_load_html_response) | 2005-05-12 |
JP3785247B2 JP3785247B2 (ja) | 2006-06-14 |
Family
ID=15923186
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17144197A Expired - Fee Related JP3785247B2 (ja) | 1997-06-27 | 1997-06-27 | 半導体製造装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3785247B2 (enrdf_load_html_response) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100835102B1 (ko) | 2002-12-16 | 2008-06-03 | 동부일렉트로닉스 주식회사 | 보트 회전체 |
JP6180276B2 (ja) * | 2013-10-25 | 2017-08-16 | 光洋サーモシステム株式会社 | 熱処理装置 |
KR102680412B1 (ko) * | 2018-11-27 | 2024-07-02 | 삼성전자주식회사 | 반도체 처리 장치 및 반도체 처리 시스템 |
KR20250002841A (ko) * | 2022-07-13 | 2025-01-07 | 베이징 나우라 마이크로일렉트로닉스 이큅먼트 씨오., 엘티디. | 반도체 공정 디바이스 |
-
1997
- 1997-06-27 JP JP17144197A patent/JP3785247B2/ja not_active Expired - Fee Related
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TW200735256A (en) | Lid opening/closing system of an airtight container | |
TW443956B (en) | Vacuum processing device and magnetic seal rotary bearing unit | |
JPH1116846A5 (enrdf_load_html_response) | ||
CN209557665U (zh) | 一种气流粉碎机气密封装置 | |
CN209401407U (zh) | 一种低气阻电缆绕包机箱 | |
US4039738A (en) | Device for charging an electric arc furnace through its inner electrode pipe and permitting connection of additional lengths of pipes thereto | |
CN205482367U (zh) | 电子材料烧成炉的置换室密封装置 | |
JPS6095832A (ja) | 管球の製造装置 | |
CN110203813A (zh) | 一种套筒类零件中转吊具 | |
CN213984508U (zh) | 一种气氛烧结炉结构 | |
JPH10265045A (ja) | 粉体の吸引輸送装置 | |
JP2674811B2 (ja) | 半導体装置の成長膜形成炉 | |
JP2000317296A (ja) | チャンバー装置 | |
JPH09246354A (ja) | 可搬式密閉コンテナのガスパージステーション | |
JPH0246052Y2 (enrdf_load_html_response) | ||
US5894009A (en) | Vacuum tight reaction vessel for steel processing with a packing gland | |
US1047235A (en) | Electric-arc lamp. | |
JPS6220257B2 (enrdf_load_html_response) | ||
CN209871605U (zh) | 一种半导体晶片倒装翻料装置 | |
JPH05318350A (ja) | 真空用ロボットの昇降機構 | |
CN217747062U (zh) | 一种磁力搅拌玻璃反应釜 | |
JPH0461727A (ja) | 蛍光表示管の排気封止装置 | |
JP3187924B2 (ja) | ロボットの防塵構造 | |
JPH0522370Y2 (enrdf_load_html_response) | ||
CN209654618U (zh) | 一种用于粮食仓房通风口的双环密封电动阀门 |