JPH11167197A - Production of liner for protecting pellicle tacky adhesive - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liner for protecting a pellicle tacky adhesive of extremely high accuracy which prohibits the adhesion of foreign matter to a pellicle film and is not the source for the generation of dust to contaminate the inside of a holding vessel by using two pieces of inner and outer blanking blades formed to respectively seamless square annular shapes. SOLUTION: A plastic sheet which is a material to form the liner for protecting the pellicle tacky adhesive is blanked to the liner shape of the square annular form by two pieces of inner and outer blanking blades formed to the respectively square annular shapes, by which the liner for protecting the pellicle tacky adhesive is formed. The blanking blade 7 execute blanking by using two pieces of the inner and outer blanking blades 7, 7 which are formed to the endless square annular shapes which are respectively seamless. The blanking blade 7 to be used may be exactly formed as designed in the corner part shape and the side shape between the corner parts has high dimensional accuracy substantially free of the difference in the distances between the angle parts 7b and 7b and between the central parts of the sides 7a, 7a without bulging of the central part of the side 7a to the outer side.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pellicle for lithography, in particular, a semiconductor device such as an LSI or an VLSI or a liquid crystal display panel, which is used as a dust-repelling material to emit substantially 500 nm or less light. The present invention relates to a method for producing a pellicle pressure-sensitive adhesive protective liner suitably used for obtaining an antistatic pellicle for lithography in an exposure method used.

[0002]

2. Description of the Related Art LS
In the manufacture of semiconductors such as I and VLSI, or in the manufacture of liquid crystal display panels, etc., patterning is performed by irradiating light to a semiconductor wafer or a liquid crystal original plate, and dust adheres to the exposure original plate used in this case. In this case, the dust absorbs or bends the light, causing the transferred pattern to be deformed, the edges to be rough, and the ground to become black, resulting in dimensions, quality, appearance, etc. There is a problem that is damaged.

[0003] For this reason, these operations are usually performed in a clean room. However, it is difficult to keep the original exposure plate clean at all times even in this clean room. A method of mounting a pellicle that transmits light well has been adopted.

Here, the pellicle is usually provided with a pellicle film having excellent light transmittance on the upper end surface of a pellicle frame having a rectangular frame, forming an adhesive layer on the lower end surface, and further forming an adhesive layer on the adhesive layer. The pellicle adhesive protective liner is releasably adhered and stored in a dedicated storage container when not in use, is taken out of the container when used, and the pellicle adhesive protective liner is peeled off before use Although
For the purpose of its use, it is necessary to keep it from contaminating itself.
It is an absolute condition that the pellicle film is not contaminated.

The pellicle pressure-sensitive adhesive protective liner, which is one of the components of the pellicle, is usually formed by converting a plastic sheet having a thickness of about 0.1 mm into a single carbon tool rope called Victoria blade in a liner shape. It is manufactured by punching a bent blade with a punching blade embedded in a base material. FIG. 5 shows an example of a punching blade. This punching blade a is formed by bending a carbon tool rope and connecting both ends thereof to form a substantially square ring-shaped inner and outer blade into a base material b such as a resin. Each one is inset.

However, in the production of a liner using the punching blade a, since the punching blade a is joined at the starting point c and the ending point c of the bending process, a step, unevenness, and the like are generated at the joint c. When a plastic sheet is punched by such a punching blade a, the shape of the joint portion c is transferred as it is, and the joint transfer portion generated on this liner becomes a dust source, which may contaminate the pellicle and the container storing the pellicle. Occurs often.

[0007] Further, since the manufacture of the square ring-shaped blade is performed by bending a portion corresponding to each corner d, each side (linear portion) e of the blade a tends to bulge outward. In addition, since the distance f between the center portions of the two sides e and e facing each other is longer than the distance g between the two corners d and d, there is also a problem that a dimensional error easily occurs in the punched liner. Was.

The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a method of manufacturing a pellicle pressure-sensitive adhesive protective liner that solves the above-mentioned problems relating to dust generation and dimensional accuracy.

[0009]

DISCLOSURE OF THE INVENTION The present inventors have conducted intensive studies to produce a pellicle pressure-sensitive adhesive protective liner with extremely low dust generation and high dimensional accuracy. By manufacturing the liner by using a punching blade with high dimensional accuracy that has no seams and does not bulge to the outside of the side (straight line portion) by grinding the milling machine etc. instead of bending as a blade, The inventor has found that an extremely high-precision pellicle pressure-sensitive adhesive protective liner can be obtained without foreign matter adhering to the pellicle film or contaminating the inside of the storage container, and the present invention has been accomplished. .

Accordingly, the present invention provides a method of manufacturing a liner for protecting a pellicle adhesive by punching a plastic sheet into a square ring shape using two square ring-shaped punching blades. And a method for producing a liner for protecting a pellicle pressure-sensitive adhesive, wherein the liner is formed in a square ring shape having no seams.

The present invention will be described below with reference to FIGS. 1 to 3. The method of the present invention is a method for obtaining a pellicle pressure-sensitive adhesive protective liner indicated by 1 in FIG. The liner 1 is one of the components of the pellicle 2. In other words, the pellicle 2 has the pellicle film 4 stretched on the upper end surface of the pellicle frame 3 and the liner 1 for protecting the pellicle adhesive adhered to the lower side of the adhesive layer 5 formed by applying the adhesive on the lower end surface. The pellicle pressure-sensitive adhesive protective liner 1 obtained according to the present invention is obtained by punching a plastic sheet such as PET. The liner 1 has a square ring shape, and usually has a peeling guide liner tab 6 integrally protruding from one corner thereof. Although the thickness of the liner 1 is appropriately selected, it is usually about 0.10 to 0.16 mm.

In the method for producing a liner according to the present invention, a plastic sheet as a material for forming a liner is punched into a square ring-shaped liner shape by two square ring-shaped inner and outer punching blades. If so, the punching blade, as shown in FIG.
Punching is performed by using the punching blades 7, 2 of the inner and outer two sheets formed in a seamless endless square ring shape.

Here, the material of the punching blades 7, 7 is not particularly limited as long as it is a commonly used grinding tool material, and examples thereof include a cold die steel, a hot die steel, and a high speed steel. As a method of obtaining the above-described seamless closed-loop punching blade 7, a method of manufacturing a predetermined closed-loop punching blade 7 by cutting using a milling machine or the like is preferable. . Reference numeral 8 denotes a punching metal plate formed by cutting the inner and outer punching blades 7, 7 integrally.

The inner and outer punching blades 7, 7 are installed on a movable portion 9 of a press as shown in FIG. 3, for example, and a plastic sheet 11 is placed on a fixed side 10 of the press. 9 is lowered to perform punching.

[0015] The liner punched in this way is
Although the shape of the punching blade is transferred, there is no seam in the punching blade, so there is no place corresponding to the seam of the liner, and therefore there is no place that is likely to be a dust source. The worn pellicle is one in which dust generation from the liner is prevented.

Further, the punching blade obtained by the above-mentioned cutting can form the corners and the sides between the corners exactly as designed, and the center of the side (straight part) 7a is outward. Without bulging, between the corners 7b, 7b and the side 7
There is no substantial difference in the distance between the central portions a and 7a, and the dimensional accuracy is high. Therefore, the liner punched by the punching blade also has a high dimensional accuracy, and when the liner is attached to a pellicle, the amount of protrusion of the liner becomes uniform.

[0017]

EXAMPLES Hereinafter, the present invention will be described in detail with reference to Examples and Comparative Examples, but the present invention is not limited to the following Examples.

[Example] Production of a punching blade Cold die steel was cut with a milling machine, and the outer dimensions (I × II) except for the liner tab 6 as shown in FIG.
Two inner and outer punching blades 7, 7 each having a square ring shape having a size of mm × 122 mm were produced.

For comparison, two inner and outer square ring-shaped punching blades a, a as shown in FIG. 5 were produced by bending according to the conventional method. ). Production of a liner for protecting a pellicle adhesive and measurement of dimensions The above-mentioned punching blades were each attached to a movable part of a press machine, and a 125 μm-thick liner material (material PET) was placed at a predetermined position of the press machine. The liner material placed down was punched out, and five pellicle pressure-sensitive adhesive protective liners were manufactured.

Using an automatic size measuring device (manufactured by Shin-Etsu Engineering Co., Ltd.) using image processing with a resolution of 5 μm on the obtained liner, measurement points were set on the long side and the short side as shown in FIG. Outside dimensions in the center and 15m from each corner
A total of 6 points of the outer dimensions inside the m were measured, and the dimensions of the pellicle pressure-sensitive adhesive protective liner at the determined positions were measured. Table 1 shows the results. Foreign substance evaluation The pellicle with the liner attached to the mask adhesive layer of the pellicle manufactured by Shin-Etsu Chemical Co., Ltd. was housed in a special container, and set in this state on a vibration tester based on a sine wave vibration test method C0040 of JIS standard. , Frequency 10-500 Hz,
Vibration was performed under the conditions of 10 sweep cycles and 2 hours of the durability test.

Next, the pellicle is taken out of the container in a class 100 clean room, irradiated with light of 400,000 lux in a dark room, and the number of foreign particles on the pellicle film surface and the number of foreign particles in the container are checked for each particle diameter. Was. Table 2 shows the results.

[0022]

[Table 1]

[0023]

[Table 2]

From the results of Tables 1 and 2, the pellicle pressure-sensitive adhesive protective liner manufactured by the punching blade of the present invention is as follows.
Both the long side and the short side had an error within ± 20 μm of the reference dimension, and the center of the side did not curve, confirming that the liner had high dimensional accuracy.

Further, it was confirmed that even when the liner obtained by the production method of the present invention was used, no foreign matter was generated from the liner and it did not become a dust source.

On the other hand, in the pellicle pressure-sensitive adhesive protective liner of the comparative example, the center of the side is curved outward, and the long side has a maximum of seven.
A dimensional error of 5 μm and a maximum of 60 μm (one side) occurred on the short side.

Further, as a result of the foreign substance measurement, a maximum of four foreign substances were confirmed. Since all these foreign substances were PET of the liner material, it was confirmed that the liner was a source of foreign substances.

[0028]

According to the method for producing a pellicle pressure-sensitive adhesive protective liner of the present invention, a pellicle pressure-sensitive adhesive protective liner having extremely high dimensional accuracy can be continuously obtained without generating dust.

[Brief description of the drawings]

FIG. 1 shows a configuration of a pellicle, (A) is a front view,
(B) is a sectional view taken along line AA in (A).

2A and 2B show a punching blade used in the present invention, wherein FIG. 2A is a front view, and FIG. 2B is a cross-sectional view taken along line AA in FIG.

FIG. 3 is an explanatory view illustrating a manufacturing process of the present invention;
Shows the state before punching, and (B) shows the state at the time of punching.

FIG. 4 is an explanatory diagram showing measurement positions of liner dimensions in an example of the present invention.

FIG. 5 is an explanatory view showing a punching blade of a conventional pellicle pressure-sensitive adhesive protective liner, where (A) is a front view and (B) is (A).
FIG. 4 is a cross-sectional view taken along the line AA in the figure, and FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Pellicle adhesive protective liner 2 Pellicle 3 Pellicle frame 4 Pellicle film 5 Adhesive layer 6 Liner tab 7 Punching blade

Claims (2)

[Claims] 1. A method for producing a liner for protecting a pellicle pressure-sensitive adhesive by punching a plastic sheet into a square ring with two square ring-shaped inner and outer punching blades, wherein the inner and outer two punching blades each have a joint. A method for producing a liner for protecting a pellicle adhesive, wherein the liner is formed in a square ring shape. 2. The method according to claim 1, wherein the punching blade is formed by cutting.