JPH1116700A - Vacuum chamber for accelerator - Google Patents
Vacuum chamber for acceleratorInfo
- Publication number
- JPH1116700A JPH1116700A JP9167532A JP16753297A JPH1116700A JP H1116700 A JPH1116700 A JP H1116700A JP 9167532 A JP9167532 A JP 9167532A JP 16753297 A JP16753297 A JP 16753297A JP H1116700 A JPH1116700 A JP H1116700A
- Authority
- JP
- Japan
- Prior art keywords
- forming member
- chamber forming
- chamber
- beam chamber
- exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004891 communication Methods 0.000 claims abstract description 11
- 238000003466 welding Methods 0.000 claims abstract description 8
- 230000010354 integration Effects 0.000 abstract 1
- 238000003780 insertion Methods 0.000 description 7
- 230000037431 insertion Effects 0.000 description 7
- 238000010894 electron beam technology Methods 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000005855 radiation Effects 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 239000013585 weight reducing agent Substances 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001125 extrusion Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、加速器用真空チェ
ンバーに関するものであり、より詳しくは、軽量化と高
精度化を達成し得るようにした加速器用真空チェンバー
に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum chamber for an accelerator, and more particularly, to a vacuum chamber for an accelerator capable of achieving weight reduction and high accuracy.
【0002】[0002]
【従来の技術】光速に近い速度で移動する電子には、磁
場や電場によってその進行方向を強制的に曲げられた時
に、電子の軌道の接線方向へ放射光と呼ばれる電磁波
(光)を放出するという性質がある。2. Description of the Related Art Electrons moving at a speed close to the speed of light emit electromagnetic waves (light) called radiated light in the tangential direction of the trajectory of electrons when their traveling direction is forcibly bent by a magnetic field or an electric field. There is a property that.
【0003】近年、上記電子の性質を利用した高輝度の
放射光を発生させる手段として、シンクロトロンなどの
電子蓄積リング等の直線部分や直線加速器に設けるタイ
プのアンジュレータ装置等と呼ばれる挿入光源の研究開
発が進められている。尚、挿入光源という名称は、この
装置が電子蓄積リング等の直線部分に挿入配置されるこ
とに由来する。In recent years, as a means for generating high-brightness radiated light utilizing the above-mentioned properties of electrons, research on an insertion light source called an undulator device or the like provided in a linear portion such as an electron storage ring of a synchrotron or a linear accelerator has been studied. Development is underway. Note that the name of the insertion light source is derived from the fact that this device is inserted and arranged in a linear portion such as an electron storage ring.
【0004】図2は上記挿入光源の原理を示す構成図で
あり、電子ビーム1の通路と成る直線状の真空チェンバ
ー本体2の上下に対し、同一形状をした永久磁石などの
磁石3を複数個、その極性が交互に異なるように直線状
に配列して成る磁石列4,5を、真空チェンバー本体2
を挟んで対峙する磁石3の極性が互いに異なるよう配置
されている。FIG. 2 is a structural view showing the principle of the insertion light source. A plurality of magnets 3 such as permanent magnets having the same shape are provided above and below a linear vacuum chamber main body 2 which serves as a path for an electron beam 1. And the magnet rows 4 and 5 arranged in a straight line so that their polarities are alternately different from each other.
Are arranged so that the polarities of the magnets 3 that face each other across are different from each other.
【0005】この磁石列4,5は、それぞれ、図示しな
い磁石位置調整機構を介して真空チェンバー本体2に対
して近接離反動できるように支持されている。尚、6は
発生される放射光である。The magnet rows 4 and 5 are supported so as to be able to move toward and away from the vacuum chamber body 2 via a magnet position adjusting mechanism (not shown). Incidentally, reference numeral 6 denotes emitted light.
【0006】上述した構成を有する挿入光源において
は、対向配置された磁石列4,5により、真空チェンバ
ー本体2の内部に、上下な方向を向き且つ真空チェンバ
ー本体2の長手方向に沿って正弦波的な周期を有する磁
場が発生する。In the insertion light source having the above-described configuration, the sine waves are directed inside the vacuum chamber main body 2 in the vertical direction and along the longitudinal direction of the vacuum chamber main body 2 by the magnet rows 4 and 5 arranged opposite to each other. A magnetic field having a periodic period is generated.
【0007】尚、この磁場の周期は、真空チェンバー本
体2の長手方向に対する各磁石3の長さによって定ま
る。[0007] The period of the magnetic field is determined by the length of each magnet 3 with respect to the longitudinal direction of the vacuum chamber main body 2.
【0008】そして、放射光6を発生させる際には、図
示しないシンクロトロンなどの電子蓄積リング等の一部
を構成する真空チェンバー本体2の内部を10-10To
rr程度の超高真空状態に保持した上で、図示しない電
子加速器などの加速手段によって加速された高エネルギ
ーの電子ビーム1を、真空チェンバー本体2の長手方向
へ入射させる。When the radiation 6 is generated, the inside of the vacuum chamber main body 2 which forms a part of an electron storage ring or the like such as a synchrotron (not shown) is set to 10 -10 To.
After maintaining an ultra-high vacuum state of about rr, a high-energy electron beam 1 accelerated by acceleration means such as an electron accelerator (not shown) is incident on the vacuum chamber main body 2 in the longitudinal direction.
【0009】すると、電子ビーム1が真空チェンバー本
体2の内部を進行する際に、磁石列4,5によって発生
する上記磁場の影響を受けるため、フレミングの左手の
法則により、電子ビーム1が、磁場の周期に対応するよ
うに左右方向へと蛇行し、その結果、電子ビーム1の軌
道の曲げられた部分から接線方向へ向かう放射光6が放
出される。Then, when the electron beam 1 travels inside the vacuum chamber main body 2, the electron beam 1 is affected by the magnetic field generated by the magnet rows 4 and 5. Meanwhile, meandering in the left-right direction corresponding to the period of .phi., And as a result, radiation 6 traveling tangentially from the bent portion of the trajectory of electron beam 1 is emitted.
【0010】このように、放射光6を放出させる上で、
電子ビーム1に蛇行を与える磁場が重要な役割を果すこ
ととなるため、図示しない磁石位置調整機構を設け、真
空チェンバー本体2に対して磁石列4,5を近付けたり
遠ざけたりすることにより磁場の影響を変化させること
ができるようにしている。As described above, when the radiation 6 is emitted,
Since the magnetic field that gives the meandering to the electron beam 1 plays an important role, a magnet position adjusting mechanism (not shown) is provided, and the magnetic field is adjusted by moving the magnet arrays 4 and 5 closer to or farther from the vacuum chamber body 2. The influence can be changed.
【0011】そして、磁石列4,5どうしが近付く程、
強い磁場が得られるので、図3・図4に示すように、上
下方向に扁平なビーム室7を形成すると共に、ビーム室
7を扁平化すると排気抵抗が高まるなどにより排気効率
が低下するので、ビーム室7の排気効率の低下を補うた
めに、ビーム室7の側部に、ビーム室7と連通する容積
の大きな排気室8を一体的に付設し、排気室8から排気
を行わせるようにした、複雑形状で長尺の真空チェンバ
ー本体2が使われている。Then, as the magnet rows 4 and 5 approach each other,
Since a strong magnetic field is obtained, as shown in FIGS. 3 and 4, the beam chamber 7 is formed to be flat in the vertical direction, and when the beam chamber 7 is flattened, the exhaust efficiency is reduced due to an increase in exhaust resistance and the like. In order to compensate for a decrease in the exhaust efficiency of the beam chamber 7, an exhaust chamber 8 having a large volume communicating with the beam chamber 7 is integrally provided on a side portion of the beam chamber 7, and the exhaust is performed from the exhaust chamber 8. A complicated and long vacuum chamber body 2 is used.
【0012】上記複雑形状の真空チェンバー本体2は、
従来、アルミ製とする場合には、押出し加工によって形
成し(図3)、又、ステンレス製とする場合には、上下
に二分割した形状の半割片9,10を切削加工によって
形成し、半割片9,10どうしを溶接(溶接部11,1
2)により一体化して形成するようにしている(図
4)。The vacuum chamber body 2 having the complicated shape is
Conventionally, when made of aluminum, it is formed by extrusion (FIG. 3), and when made of stainless steel, half halves 9, 10 each having a vertically divided shape are formed by cutting. Weld the halves 9 and 10 together (welded sections 11 and 1).
2) to be formed integrally (FIG. 4).
【0013】[0013]
【発明が解決しようとする課題】しかしながら、上記ビ
ーム室と排気室を有する複雑形状の加速器用真空チェン
バーには、以下のような問題があった。However, the vacuum chamber for an accelerator having the above-described beam chamber and the exhaust chamber having a complicated shape has the following problems.
【0014】即ち、互いに連通しているビーム室7と排
気室8の合計の断面積が大きくなるため、これらの空間
を保持するのに真空チェンバー本体2の肉厚を大きくし
なければならないという問題があり、重量増加が避けら
れない。That is, since the total sectional area of the beam chamber 7 and the exhaust chamber 8 communicating with each other increases, the thickness of the vacuum chamber main body 2 must be increased in order to maintain these spaces. There is an inevitable increase in weight.
【0015】又、所望の磁場を発生させるのに、ビーム
室7の部分には高い精度が要求されるが、ビーム室7と
排気室8は左右にアンバランスな形状であり、且つ、断
面形状も大きく複雑なものであることから、アルミを押
出しで形成する場合に、所望の精度を出すことができな
かった。In order to generate a desired magnetic field, high accuracy is required in the beam chamber 7, but the beam chamber 7 and the exhaust chamber 8 are unbalanced right and left and have a cross-sectional shape. However, when aluminum is formed by extrusion, the desired accuracy cannot be obtained.
【0016】又、ステンレスを切削し溶接して形成する
場合も、上記と同様の理由により、所望の加工精度を出
すことができなかった。Also, when stainless steel is formed by cutting and welding, desired working accuracy cannot be obtained for the same reason as described above.
【0017】本発明は、上述の実情に鑑み、軽量化と高
精度化を達成し得るようにした加速器用真空チェンバー
を提供することを目的とするものである。SUMMARY OF THE INVENTION It is an object of the present invention to provide a vacuum chamber for an accelerator capable of achieving weight reduction and high accuracy in view of the above-mentioned circumstances.
【0018】[0018]
【課題を解決するための手段】本発明は、内部にビーム
室7を有するビーム室形成部材13と、内部に排気室8
を有する排気室形成部材14とを別部材にて形成し、ビ
ーム室形成部材13と排気室形成部材14を接合して一
体化したことを特徴とする加速器用真空チェンバーにか
かるものである。According to the present invention, a beam chamber forming member 13 having a beam chamber 7 therein and an exhaust chamber 8 inside thereof are provided.
And a vacuum chamber for an accelerator, wherein the beam chamber forming member 13 and the exhaust chamber forming member 14 are joined and integrated with each other.
【0019】この場合において、ビーム室形成部材13
をほぼ矩形閉断面とし、排気室形成部材14をほぼ矩形
閉断面として、ビーム室形成部材13の一側壁16に、
内外間を連通する連通孔17を形成すると共に、排気室
形成部材14の側部にビーム室形成部材13の厚さ寸法
とほぼ等しい間隔のスリット部18を形成して、排気室
形成部材14のスリット部18にビーム室形成部材13
の一側部を一部挿入して挿入部分を溶接固定するように
しても良い。In this case, the beam chamber forming member 13
Has a substantially rectangular closed cross section, and the exhaust chamber forming member 14 has a substantially rectangular closed cross section.
A communication hole 17 communicating between the inside and the outside is formed, and a slit portion 18 is formed at a side portion of the exhaust chamber forming member 14 at an interval substantially equal to the thickness dimension of the beam chamber forming member 13. The beam chamber forming member 13 is provided in the slit portion 18.
May be partially inserted to fix the inserted portion by welding.
【0020】又、ビーム室形成部材13をほぼ矩形閉断
面とし、排気室形成部材14をほぼC字断面として、ビ
ーム室形成部材13の一側壁16に、内外間を連通する
連通孔17を形成し、排気室形成部材14のC字の開口
部分19に、ビーム室形成部材13の一側部を一部挿入
して挿入部分を溶接固定するようにしても良い。The beam chamber forming member 13 has a substantially rectangular closed cross section, and the exhaust chamber forming member 14 has a substantially C-shaped cross section, and a communication hole 17 communicating between the inside and the outside is formed in one side wall 16 of the beam chamber forming member 13. Then, one side of the beam chamber forming member 13 may be partially inserted into the C-shaped opening 19 of the exhaust chamber forming member 14, and the inserted portion may be fixed by welding.
【0021】上記手段によれば、以下のような作用が得
られる。According to the above means, the following effects can be obtained.
【0022】ビーム室7を形成するビーム室形成部材1
3と、排気室8を形成する排気室形成部材14とを別部
材として構成し、その後、両者を一体化するようにして
いるので、ビーム室形成部材13と排気室形成部材14
の形状がそれぞれ単純化され、製造が容易化される。Beam chamber forming member 1 for forming beam chamber 7
3 and the exhaust chamber forming member 14 forming the exhaust chamber 8 are formed as separate members, and then the two are integrated, so that the beam chamber forming member 13 and the exhaust chamber forming member 14 are integrated.
Are simplified, and manufacturing is facilitated.
【0023】しかも、ビーム室形成部材13は、所望の
磁場を発生させる上で高い精度が要求されるが、断面形
状が単純化され、且つ、小さくなっているので、アルミ
を押出し成形する場合でも、ステンレスを各種製法で加
工する場合でも、高い精度で作成することが可能とな
る。Further, the beam chamber forming member 13 is required to have high accuracy in generating a desired magnetic field, but since the cross-sectional shape is simplified and small, it can be used even when extruding aluminum. Also, even when stainless steel is processed by various manufacturing methods, it can be manufactured with high accuracy.
【0024】更に、ビーム室形成部材13を閉断面とし
ているため、強度が高くなることから、ビーム室形成部
材13を薄肉に作成することが可能となり、全体の軽量
化を図ることが可能となる。Further, since the beam chamber forming member 13 has a closed cross section, the strength is increased, so that the beam chamber forming member 13 can be made thin, and the overall weight can be reduced. .
【0025】又、ビーム室形成部材13を薄肉とするこ
とができるので、その分、ビーム室形成部材13と排気
室形成部材14との溶接部20の入熱を少なくすること
ができ、歪の少ない溶接結果を得ることができる。Further, since the beam chamber forming member 13 can be made thin, the heat input of the welded portion 20 between the beam chamber forming member 13 and the exhaust chamber forming member 14 can be reduced by that much, and the distortion can be reduced. A small welding result can be obtained.
【0026】[0026]
【発明の実施の形態】以下、本発明の実施の形態を、図
示例と共に説明する。Embodiments of the present invention will be described below with reference to the drawings.
【0027】図1は、本発明の実施の形態の一例であ
る。FIG. 1 shows an embodiment of the present invention.
【0028】挿入光源の原理及び加速器用真空チェンバ
ーの基本的な形状については、図2〜図4と同様である
ため、同一の部分については同一の符号を付すことによ
り説明を省略する。Since the principle of the insertion light source and the basic shape of the vacuum chamber for the accelerator are the same as those shown in FIGS. 2 to 4, the same parts are denoted by the same reference numerals and their description is omitted.
【0029】本発明では、内部にビーム室7を有するビ
ーム室形成部材13と、内部に排気室8を有する排気室
形成部材14とを別部材にて形成し、その後、ビーム室
形成部材13と排気室形成部材14を接合して一体化す
るようにしたところに特徴がある。According to the present invention, the beam chamber forming member 13 having the beam chamber 7 therein and the exhaust chamber forming member 14 having the exhaust chamber 8 therein are formed as separate members. The feature is that the exhaust chamber forming member 14 is joined and integrated.
【0030】より具体的には、内部に扁平なビーム室7
と、ビーム室7から一側方へ延びる連通路形成用空間1
5とを有するほぼ矩形閉断面をした長尺のビーム室形成
部材13を設ける。ビーム室形成部材13は、所望の磁
場を発生させ得るようにするために高精度に作成する。
又、連通路形成用空間15は、ビーム室形成部材13の
一側壁16を貫通しないようなものとする。More specifically, a flat beam chamber 7 is provided inside.
And a communication path forming space 1 extending from the beam chamber 7 to one side.
5, a long beam chamber forming member 13 having a substantially rectangular closed cross section is provided. The beam chamber forming member 13 is formed with high precision so that a desired magnetic field can be generated.
The communication passage forming space 15 does not penetrate the one side wall 16 of the beam chamber forming member 13.
【0031】又、ビーム室形成部材13とは別に、内部
に排気室8を有するほぼ矩形閉断面又はほぼC字断面を
した長尺の排気室形成部材14を設ける。排気室形成部
材14は、それ程高い精度は要求されないので、通常の
精度で作成する。In addition to the beam chamber forming member 13, a long exhaust chamber forming member 14 having an exhaust chamber 8 inside and having a substantially rectangular closed cross section or a substantially C-shaped cross section is provided. Since the exhaust chamber forming member 14 is not required to have such high accuracy, it is formed with normal accuracy.
【0032】そして、ビーム室形成部材13の一側壁1
6に、連通路形成用空間15と外部とを連通する連通孔
17を、ビーム室形成部材13の長手方向に対し、所定
のピッチで多数形成する。Then, one side wall 1 of the beam chamber forming member 13
6, a large number of communication holes 17 for communicating the communication path forming space 15 with the outside are formed at a predetermined pitch in the longitudinal direction of the beam chamber forming member 13.
【0033】次に、排気室形成部材14を矩形閉断面と
した場合には排気室形成部材14の側部にビーム室形成
部材13の厚さ寸法とほぼ等しい間隔のスリット部18
を長手方向に形成する。Next, in the case where the exhaust chamber forming member 14 has a rectangular closed cross section, the slit portions 18 are provided on the side portions of the exhaust chamber forming member 14 at intervals substantially equal to the thickness dimension of the beam chamber forming member 13.
Are formed in the longitudinal direction.
【0034】そして、排気室形成部材14のスリット部
18に、又は、排気室形成部材14をC字断面とした場
合には、C字の開口部分19に、ビーム室形成部材13
の一側部を一部挿入して挿入部分を溶接固定するように
する(溶接部20)。When the exhaust chamber forming member 14 has a C-shaped cross section, the beam chamber forming member 13 is formed in the slit portion 18 of the exhaust chamber forming member 14 or in the C-shaped opening 19.
Is partially inserted so that the inserted portion is welded and fixed (welded portion 20).
【0035】次に、作動について説明する。Next, the operation will be described.
【0036】挿入光源により放射光を得る過程について
は図2の場合と同様なので説明を省略する。The process of obtaining emitted light by the insertion light source is the same as in the case of FIG.
【0037】本発明では、ビーム室7を形成するビーム
室形成部材13と、排気室8を形成する排気室形成部材
14とを別部材として構成し、その後、両者を一体化す
るようにしているので、ビーム室形成部材13と排気室
形成部材14の形状がそれぞれ単純化され、製造が容易
化される。In the present invention, the beam chamber forming member 13 forming the beam chamber 7 and the exhaust chamber forming member 14 forming the exhaust chamber 8 are formed as separate members, and thereafter, they are integrated. Therefore, the shapes of the beam chamber forming member 13 and the exhaust chamber forming member 14 are simplified, respectively, and the manufacturing is facilitated.
【0038】しかも、ビーム室形成部材13は、所望の
磁場を発生させる上で高い精度が要求されるが、断面形
状が単純化され、且つ、小さくなっているので、アルミ
を押出し成形する場合でも、ステンレスを各種製法で加
工する場合でも、高い精度で作成することが可能とな
る。Further, the beam chamber forming member 13 is required to have high accuracy in generating a desired magnetic field, but since the cross-sectional shape is simplified and small, even when extruding aluminum. Also, even when stainless steel is processed by various manufacturing methods, it can be manufactured with high accuracy.
【0039】更に、ビーム室形成部材13を閉断面とし
ているため、強度が高くなることから、ビーム室形成部
材13を薄肉に作成することが可能となり、全体の軽量
化を図ることが可能となる。Further, since the beam chamber forming member 13 has a closed cross section, the strength is increased, so that the beam chamber forming member 13 can be made thin, and the overall weight can be reduced. .
【0040】又、ビーム室形成部材13を薄肉とするこ
とができるので、ビーム室形成部材13と排気室形成部
材14との溶接部20の入熱を少なくすることができ、
その分、歪の少ない溶接結果を得ることができる。Further, since the beam chamber forming member 13 can be made thin, the heat input to the welded portion 20 between the beam chamber forming member 13 and the exhaust chamber forming member 14 can be reduced.
Accordingly, a welding result with less distortion can be obtained.
【0041】尚、本発明は、上述の実施の形態にのみ限
定されるものではなく、本発明の要旨を逸脱しない範囲
内において種々変更を加え得ることは勿論である。It should be noted that the present invention is not limited only to the above-described embodiment, and it goes without saying that various changes can be made without departing from the spirit of the present invention.
【0042】[0042]
【発明の効果】以上説明したように、本発明の加速器用
真空チェンバーによれば、軽量化と高精度化を達成する
ことができるという優れた効果を奏し得る。As described above, according to the vacuum chamber for an accelerator of the present invention, an excellent effect that weight reduction and high precision can be achieved can be obtained.
【図1】本発明の実施の形態の一例の縦断面図である。FIG. 1 is a longitudinal sectional view of an example of an embodiment of the present invention.
【図2】挿入光源の原理を示す一部破断した概略斜視図
である。FIG. 2 is a partially broken schematic perspective view showing the principle of an insertion light source.
【図3】従来の真空ダクト本体をアルミ製とした場合の
縦断面図である。FIG. 3 is a longitudinal sectional view when a conventional vacuum duct main body is made of aluminum.
【図4】従来の真空ダクト本体をステンレス製とした場
合の縦断面図である。FIG. 4 is a longitudinal sectional view when a conventional vacuum duct body is made of stainless steel.
7 ビーム室 8 排気室 13 ビーム室形成部材 14 排気室形成部材 16 一側壁 17 連通孔 18 スリット部 19 開口部分 7 Beam Chamber 8 Exhaust Chamber 13 Beam Chamber Forming Member 14 Exhaust Chamber Forming Member 16 One Side Wall 17 Communication Hole 18 Slit 19 Opening
Claims (3)
形成部材(13)と、内部に排気室(8)を有する排気
室形成部材(14)とを別部材にて形成し、ビーム室形
成部材(13)と排気室形成部材(14)を接合して一
体化したことを特徴とする加速器用真空チェンバー。A beam chamber forming member (13) having a beam chamber (7) therein and an exhaust chamber forming member (14) having an exhaust chamber (8) inside are formed as separate members. A vacuum chamber for an accelerator, wherein a forming member (13) and an exhaust chamber forming member (14) are joined and integrated.
断面とし、排気室形成部材(14)をほぼ矩形閉断面と
して、ビーム室形成部材(13)の一側壁(16)に、
内外間を連通する連通孔(17)を形成すると共に、排
気室形成部材(14)の側部にビーム室形成部材(1
3)の厚さ寸法とほぼ等しい間隔のスリット部(18)
を形成して、排気室形成部材(14)のスリット部(1
8)にビーム室形成部材(13)の一側部を一部挿入し
て挿入部分を溶接固定した請求項1記載の加速器用真空
チェンバー。2. The beam chamber forming member (13) has a substantially rectangular closed cross section, and the exhaust chamber forming member (14) has a substantially rectangular closed cross section, and one side wall (16) of the beam chamber forming member (13) has:
A communication hole (17) communicating between the inside and the outside is formed, and a beam chamber forming member (1) is formed on a side portion of the exhaust chamber forming member (14).
Slits (18) at intervals substantially equal to the thickness of (3)
Is formed, and the slit portion (1) of the exhaust chamber forming member (14) is formed.
The vacuum chamber for an accelerator according to claim 1, wherein one side of the beam chamber forming member (13) is partially inserted into the beam chamber forming member (8), and the inserted portion is fixed by welding.
断面とし、排気室形成部材(14)をほぼC字断面とし
て、ビーム室形成部材(13)の一側壁(16)に、内
外間を連通する連通孔(17)を形成し、排気室形成部
材(14)のC字の開口部分(19)に、ビーム室形成
部材(13)の一側部を一部挿入して挿入部分を溶接固
定した請求項1記載の加速器用真空チェンバー。3. The beam chamber forming member (13) has a substantially rectangular closed cross section, and the exhaust chamber forming member (14) has a substantially C-shaped cross section. A communication hole (17) is formed, and one side of the beam chamber forming member (13) is partially inserted into the C-shaped opening (19) of the exhaust chamber forming member (14) to insert the inserted portion. The vacuum chamber for an accelerator according to claim 1, wherein the vacuum chamber is fixed by welding.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9167532A JPH1116700A (en) | 1997-06-24 | 1997-06-24 | Vacuum chamber for accelerator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9167532A JPH1116700A (en) | 1997-06-24 | 1997-06-24 | Vacuum chamber for accelerator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH1116700A true JPH1116700A (en) | 1999-01-22 |
Family
ID=15851451
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9167532A Pending JPH1116700A (en) | 1997-06-24 | 1997-06-24 | Vacuum chamber for accelerator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH1116700A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014075294A (en) * | 2012-10-05 | 2014-04-24 | Toshiba Corp | Charged particle deflector, charged particle irradiation device, charged particle accelerator, and method for manufacturing charged particle deflector |
-
1997
- 1997-06-24 JP JP9167532A patent/JPH1116700A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014075294A (en) * | 2012-10-05 | 2014-04-24 | Toshiba Corp | Charged particle deflector, charged particle irradiation device, charged particle accelerator, and method for manufacturing charged particle deflector |
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