JPH08250297A - Vacuum chamber - Google Patents

Abstract

PURPOSE: To prevent deformation of an upper plate 25 and a lower plate 26 and make the upper plate 15 and the lower plate 26 thin. CONSTITUTION: A vacuum chamber is provided with a side plate 27 installed between one edge part 25a of an upper plate 25 and one edge part 26a of a lower plate 26 and a side plate 28 installed between the other edge part 25b of the upper plate 25 and the other edge part 26b of the lower plate 26. Regarding the vacuum chamber having a rectangular cross-section in which both of the edge parts 25a, 25b of the upper plate 25 are fixed in the side plates 27, 28 by welded parts 33a, 33b and both of the edge parts 26a, 26b of the lower plate 26 are fixed in the side plates 27, 28 by welded parts 34, 34b; projected parts 29a, 30a brought into contact with the edge parts 25, 26a and projected toward the edge parts 25b, 26b are formed in the side plate 27. Also, projected parts 29b, 30b brought into contact with the edge parts 25b, 26b and projected toward the edge parts 25a, 25b are formed in the side plate 28.

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention relates to a vacuum chamber used to generate emitted light from electrons.

[0002]

2. Description of the Related Art When an electron moving at a speed close to the speed of light is bent in its traveling direction by a magnetic field or an electric field, it emits an electromagnetic wave (light) called radiation light in the tangential direction of the orbit of the electron.

FIG. 5 is a plan view showing an example of such a radiation light generator.

In FIG. 5, 1 is a linear accelerator,
The linear accelerator 1 includes an electron generator 2 that emits electrons (charged particles) e, a straight tubular acceleration duct 3 having one end connected to the electron generator 2, and an electron moving inside the acceleration duct 3. and a high-frequency accelerator 4 for accelerating the electrons e by applying a high frequency to e.

The other end of the acceleration duct 3 is connected to one end of a curved tubular deflection duct 5 for bending the trajectory of electrons e moving inside the deflection duct 5. The bending electromagnet 6 is provided.

Reference numeral 7 is a synchrotron, and this synchrotron 7 has an endless duct 8 for causing the electrons e to form a circular orbit.
The other end of the deflection duct 5 is connected to the required location of.

A bending electromagnet 9 for bending the trajectory of the electrons e moving inside the endless duct 8 is provided in the curved portion of the endless duct 8 and a required portion of the endless duct 8 is provided. A high frequency accelerating device 10 for accelerating the electrons e by applying a high frequency to the electrons e moving inside the endless duct 8 is provided.

Further, in the curved portion of the endless duct 8 at a required position, the radiant light beam S emitted by bending the traveling direction of the electron e moving at a velocity close to the speed of light in the curved portion is emitted into the endless duct 8. 1 is connected to one end of a straight tubular beam channel 11 for guiding it to the outside, and an experimental device 12 is provided to the other end of the beam channel 11.

When the synchrotron radiation beam S is emitted by the above-described synchrotron radiation generator shown in FIG. 5, the inside of the acceleration duct 3, the deflection duct 5, the endless duct 8, the beam channel 11 and the experimental apparatus 12 is set to an ultrahigh vacuum. Depressurize to the state
Makes it possible to move inside the acceleration duct 3, the deflection duct 5, and the endless duct 8 at a speed close to the speed of light, and causes the electron generator 2 to emit electrons e.

The electrons e emitted from the electron generator 2 are
It is accelerated by the high-frequency accelerating device 4 and is bent by the deflecting electromagnet 6 to enter the endless duct 8.

The electron e incident on the endless duct 8 has its orbit bent at each curved portion by the deflection electromagnet 9 and is accelerated by the high frequency accelerating device 10, whereby a radiant light beam S is emitted from the electron e.

The radiant light beam S emitted at the curved portion of the endless duct 8 at a predetermined position is provided with a beam channel 11.
And then enters the experimental device 12.

The above-mentioned endless duct 8 is constructed by connecting a plurality of cylindrical vacuum chambers via bellows.

The conventional vacuum chamber used to connect to form the endless duct 8 will now be described.

FIGS. 3 and 4 show an example of a conventional vacuum chamber. The vacuum chamber includes a flat plate-shaped upper plate (first thin-walled portion forming member) 14 and a flat plate-shaped lower plate (first plate). The second thin plate portion forming member) 15, one side plate (first thick wall portion forming member) 16 and the other side plate (second thick wall portion forming member) 17.

The upper plate 14 and the lower plate 15 are horizontally arranged at a predetermined interval.

One side plate 16 is one edge portion 14 of the upper plate 14.
a and the one edge 15a of the lower plate 15 and the upper plate 1
4 and the lower plate 15, the side plate 16 is welded to the upper plate 14 by the welded portions 31a and 32a.
And the lower plate 15 are fixed so as to maintain airtightness.

The other side plate 17 is the other edge portion 14 of the upper plate 14.
b and the other edge portion 15b of the lower plate 15 and the upper plate 1
4 and the lower plate 15, and the side plates are fixed to the upper plate 14 and the lower plate 15 by welding portions 31b and 32b so as to maintain airtightness.

A cooling medium flow passage 18 having a U-shaped cross section is attached to one of the side plates 16 so as to extend along the outside of the side plate 16. The cooling medium flow pipe 18 passes from the cooling medium supply pipe 19 to the cooling medium flow passage 18. When a cooling medium flows through the cooling medium discharge pipe 20, the inside of the vacuum chamber is cooled by the cooling medium flowing in the cooling medium flow passage 18.

The other side plate 17 is provided with a proper number of exhaust pipes 21 so as to penetrate therethrough.
By operating an exhaust pump (not shown) connected to 1, the inside of the vacuum chamber is depressurized to a high vacuum state.

Furthermore, the front and rear ends of the vacuum chamber (see FIG.
A short tube 23 having a flange 22 is fixed to both the left and right ends in (1) and is connected to another adjacent vacuum chamber via a bellows (not shown).

Further, in the vacuum chamber used as an insertion light source, a magnet array in which N poles and S poles are alternately arranged above the upper plate 14 and below the lower plate 15 is interposed between the vacuum chambers. Electrons e (see FIG. 5) traveling inside the vacuum chamber meander due to the magnetic fields generated inside the vacuum chamber by both magnet rows, and radiated light is thereby generated. .

As described above, in the vacuum chamber applied to the insertion light source, it is desirable to narrow the gap between the upper plate 14 and the lower plate 15 so that the magnetic field generated inside the vacuum chamber becomes stronger.

[0024]

When the inside of the vacuum chamber is depressurized to a high vacuum state, the upper plate 14, the lower plate 15, and the side plates 16 and 17 that constitute the vacuum chamber are subjected to a large external force due to the pressure difference between the inside and the outside. Accordingly, the upper plate 14 and the lower plate 15, which have a larger width dimension than the thickness dimension, tend to be deformed inward of the vacuum chamber.
Excessive tensile stress acts on b, 32a and 32b.

In order to prevent the deformation of the upper plate 14 and the lower plate 15 as described above, it is necessary to increase the thickness of the upper plate 14 and the lower plate 15 so as to have strength. Also, the amount of material required for the lower plate 15 is increased, and the weight of the vacuum chamber is increased.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a vacuum chamber capable of both preventing deformation and reducing the weight.

[0027]

In order to achieve the above object, in the present invention, a flat plate-shaped first thin portion forming member 25 is used.
And a flat plate-shaped second thin portion forming member 26 arranged so as to face the first chamber thin portion forming member 25.
And a first thick portion forming member 27 disposed between one edge portion 25a of the first thin portion forming member 25 and one edge 26a of the second thin portion forming member 26, and And a second thick portion forming member 28 arranged between the other edge portion 25b of the first thin portion forming member 25 and the other edge portion 26b of the second thin portion forming member 26. First thin portion forming member 25
The one edge portion 25a and the other edge portion 25b are welded to the first thick portion forming member 27 and the second thick portion forming member 28 by the welded portions 33a,
33b, and the second thin portion forming member 26
The one edge portion 26a and the other edge portion 26b are welded to the first thick portion forming member 27 and the second thick portion forming member 28 by the welded portions 34a,
In the vacuum chamber having a rectangular cross section fixed by 34b, one edge portion 25 of the first thin portion forming member 25 is provided.
a and one edge portion 26a of the second thin wall portion forming member 26 from inside the vacuum chamber, and both thin wall portion forming members 2
5, 26 are provided on the first thick portion forming member 27 with protrusions 29a, 30a protruding toward the other edge portions 25b, 26b.
The other edge portion 25b of the first thin-walled portion forming member 25 and the other edge portion 26b of the second thin-walled portion forming member 26 are abutted from the inside of the vacuum chamber and one edge portion 25a of both thin-walled portion forming members 25, 26. , 29a, 30b protruding toward 26a
Is provided on the second thick portion forming member 28.

[0028]

In the vacuum chamber of the present invention, one edge portion 25a and the other edge portion 25b of the first thin wall portion forming member 25 are formed on the first thick wall portion forming member 27 and the second thick portion 25a is formed. By contacting the protrusion 29b formed on the thin portion forming member 28, the first thin portion forming member 25 is prevented from being deformed and thinned, and the one edge portion 26a of the second thin portion forming member 26 is formed. And the other edge portion 26b to the first thick portion forming member 2
7 and the second thick portion forming member 2
By abutting on the protrusion 30b formed in 8, the second thin portion forming member 25 is prevented from being deformed and thinned.

[0029]

Embodiments of the present invention will be described below with reference to the drawings.

FIGS. 1 and 2 show an embodiment of the vacuum chamber of the present invention. In the drawings, the parts designated by the same reference numerals as those in FIGS. 3 and 4 represent the same parts.

The vacuum chamber of this embodiment has a flat plate-shaped upper plate (first thin-walled portion forming member) 25, a flat plate-shaped lower plate (second thin-walled portion forming member) 26, and one side plate (first thin wall portion forming member). One thick portion forming member) 27 and the other side plate (second thick portion forming member) 28.

The upper plate 25 and the lower plate 26 are horizontally arranged at a predetermined interval.

The one side plate 27 has one edge portion 25 of the upper plate 25.
a and the upper plate 2 located between one edge 26a of the lower plate 26 and
5 and the lower plate 26 are arranged in close contact with each other, and the side plate 27 is welded to the upper plate 25 by the welded portions 33a and 34a.
The lower plate 26 and the lower plate 26 are fixed so as to maintain airtightness.

At the upper end of the side plate 27, the upper plate 2
5 is provided with a protrusion 29a having a substantially triangular cross section that extends toward the other edge of the upper plate 25 along the lower surface of the upper plate 25, and one edge of the upper plate 25 is fitted into the recess 35a immediately above the protrusion 29a. It is in a state of being covered.

Further, at the lower end of the side plate 27, there is provided a protrusion 30a having a substantially triangular cross section which extends toward the other edge of the lower plate 26 along the lower surface of the lower plate 26. One edge of the is fitted into the recess 36a immediately below the protrusion 30a.

The other side plate 28 has the other edge portion 25 of the upper plate 25.
b and the other edge 26b of the lower plate 26 and the upper plate 2
5 and the lower plate 26, and the side plate 28 is welded to the upper plate 25 by the welded portions 33b and 34b.
The lower plate 26 and the lower plate 26 are fixed so as to maintain airtightness.

At the upper end of the side plate 28, the upper plate 2
5 is provided with a protrusion 29b having a substantially triangular cross section extending toward one edge of the upper plate 25, and the other edge of the upper plate 25 is fitted into a recess 35b immediately above the protrusion 29b. It is in a state of being covered.

A protrusion 30b having a substantially triangular cross section is provided at the lower end of the side plate 28 and extends along the lower surface of the lower plate 26 toward one edge of the lower plate 26. The other edge is fitted into the recess 36b immediately below the protrusion 30b.

Also in the vacuum chamber of the present invention shown in FIGS. 1 and 2, one side plate 27 extends along the outside of the side plate 27, as in the case shown in FIGS. 3 and 4 described above. A cooling medium flow passage 18 having a U-shaped cross section is attached. When the cooling medium flows from the cooling medium supply pipe 19 through the cooling medium flow passage 18 to the cooling medium discharge pipe 20, the inside of the cooling medium flow passage 18 The inside of the vacuum chamber is cooled by the cooling medium flowing through.

On the other side plate 28, an appropriate number of exhaust pipes 21 are provided so as to penetrate therethrough.
The inside of the vacuum chamber can be depressurized to a high vacuum state by operating an exhaust pump (not shown) connected to 1.

Furthermore, the front and rear ends of the vacuum chamber (see FIG.
A short tube 23 having a flange 22 is fixed to both the left and right ends in (1) and is connected to another adjacent vacuum chamber via a bellows (not shown).

The operation of this embodiment will be described below.

When the inside of the vacuum chamber is depressurized to a high vacuum state by operating an exhaust pump (not shown) connected to the exhaust pipe 21, the upper plate 25 and the lower plate 26 constituting the vacuum chamber, The side plates 27, 28 receive a large external force due to the pressure difference between the inside and the outside thereof.

At this time, in this embodiment, the upper plate 25
The lower surfaces of the one edge portion 25a and the other edge portion 25b are side plates 27, 2
8 is in contact with the protrusions 29a, 29b, and the upper surfaces of the one edge 26a and the other edge 26b of the lower plate 26 are in contact with the protrusions 30a, 30b of the side plates 27, 28. No. 26 is less likely to be deformed inward of the vacuum chamber, so that no excessive tensile stress acts on the welded portions 33a, 33b, 34a, 34b.

Further, the plate thicknesses of the upper plate 25 and the lower plate 26 can be made thinner than the decompression conditions inside the vacuum chamber, and the weight of the vacuum chamber can be reduced, and the vacuum can be reduced. When the chamber is applied to the insertion light source, the gap between the magnet rows arranged above the upper plate 25 and below the lower plate 26 can be reduced,
The magnetic field generated inside the vacuum chamber becomes stronger.

The vacuum chamber of the present invention is not limited to the above-mentioned embodiments, and it goes without saying that various modifications can be made without departing from the gist of the present invention.

[0047]

As described above, in the vacuum chamber of the present invention, the one edge portion 2 of the first thin portion forming member 25 is used.
5a and the other edge portion 25b abut the protrusion 29a formed on the first thick portion forming member 27 and the protrusion 29b formed on the second thick portion forming member 28, and the second thin portion The one edge portion 26a and the other edge portion 26b of the forming member 26 come into contact with the protruding portion 30a formed on the first thick portion forming member 27 and the protruding portion 30b formed on the second thick portion forming member 28. Therefore, when the inside of the vacuum chamber is depressurized to a high vacuum state, it is possible to prevent deformation of both thin-walled portion forming members 25 and 26 and to prevent excessive tensile stress from acting on the welded portions 33a, 33b, 34a and 34b. It is possible to achieve an excellent effect that it is possible to reduce the weight of the vacuum chamber by reducing the thickness of both the thin portion forming members 25 and 26.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing an embodiment of a vacuum chamber of the present invention.

FIG. 2 is a plan view showing an embodiment of the vacuum chamber of the present invention.

FIG. 3 is a cross-sectional view showing an example of a conventional vacuum chamber.

FIG. 4 is a plan view showing an example of a conventional vacuum chamber.

FIG. 5 is a conceptual diagram showing an example of a radiation light generation device.

[Explanation of reference numerals] 25 upper plate (first thin wall portion forming member) 25a, 26a one edge portion 25b, 26b other edge portion 26 lower plate (second thin wall portion forming member) 27 side plate (first thick wall portion) Forming member) 28 Side plate (second thick part forming member) 29a, 29b, 30a, 30b Projection part 33a, 33b, 34a, 34b Welded part

Claims (1)

[Claims] 1. A flat plate-shaped first thin portion forming member (25)
A flat plate-shaped second thin-wall portion forming member (26) arranged so as to face the first chamber thin-wall portion forming member (25), and the first thin-wall portion forming member (25). A first thick portion forming member (27) arranged between one edge portion (25a) and one edge portion (26a) of the second thin portion forming member (26); A second thick portion forming member (28) arranged between the other edge portion (25b) of the portion forming member (25) and the other edge portion (26b) of the second thin portion forming member (26); And an edge portion (25) of the first thin portion forming member (25).
a) and the other edge portion (25b) to the first thick portion forming member (2
7) and the second thick portion forming member (28) with the welded portion (33
a) (33b), the one edge portion (26a) and the other edge portion (26b) of the second thin portion forming member (26).
In the vacuum chamber having a rectangular cross-sectional shape, the first thin wall portion is fixed to the first thick wall portion forming member (27) and the second thick wall portion forming member (28) by the welding portions (34a) (34b). Both edge portions (25a) of the forming member (25) and one edge portion (26a) of the second thin portion forming member (26) are contacted from the inside of the vacuum chamber and both thin portion forming members (25) (26). ) Protrusions (29a) (30a) protruding toward the other edges (25b) (26b) are provided in the first thick portion forming member (27), and the first thin portion forming member (2) is formed.
5) The other edge portion (25b) and the second thin portion forming member (2)
6) A protrusion (29) that abuts the other edge (26b) from the inside of the vacuum chamber and projects toward both edges (25a) (26a) of the thin-wall forming members (25) (26).
b) (30b) is provided in the second thick portion forming member (28), which is a vacuum chamber.