JPH05180992A - Condensing monochrometer - Google Patents

Abstract

PURPOSE:To simply form the curved shape of the light incident surface of a condensing monochrometer, to strongly hold said curved shape and to simply form a cooling passage structure. CONSTITUTION:A condensing monochrometer 40 is constituted by combining a single crystal element or multilayered film element 42 with a metal member 44. The rear surface of the single crystal element or multilayered film element 42 is formed into a comb-tooth shape. The metal member 44 is made of a material having high heat conductivity such as copper and the upper surface curved in a predetermined curvature thereof is formed into a comb-tooth shape. The comb-teeth 42a of the single crystal element or multilayered laminated element 42 and the comb-teeth 44a of the metal member 44 are strongly meshed with each other and the spaces formed between said comb-teeth become cooling passages 46 permitting cooling water to flow.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a condenser monochromator for monochromaticizing and condensing a beam by utilizing Bragg reflection in a synchrotron radiation (SOR) device and the like. The shape of the cooling passage can be easily made, the curved shape can be firmly held, and the cooling flow path structure can be easily made.

[0002]

2. Description of the Related Art In recent years, synchrotrons have been used as SOR devices for the production of ultra-ultra LSI circuits, diagnostics in the medical field,
It is expected to be applied to various fields such as molecular analysis and structural analysis.

FIG. 2 shows an outline of the SOR device. Electrons generated by an electron generator (electron gun, etc.) 10 are accelerated to near the speed of light by a linear accelerator (linac) 12, deflected by a deflection electromagnet 16 of a beam transport unit 14, and the inflector 1
It is injected into the storage ring 22 via 8. The electrons incident on the storage ring 22 are converged by the converging electromagnets 23 and 25 while being given energy in the high frequency acceleration cavity 21, are deflected by the deflection electromagnet 24, and continue to rotate in the storage ring 22. SOR generated when deflected by the deflection electromagnet 24
The light passes through the beam channel 26, for example, the exposure device 28.
And used as a light source or the like for creating an ultra-ultra LSI circuit.

In the beam channel 26, a condenser monochromator for extracting and condensing a wavelength that matches the purpose of use from the radiated SOR light is arranged. The monochromator is composed of a highly complete single crystal such as silicon or germanium or a multilayer film body in which two kinds of substances (for example, tungsten and carbon) are artificially alternately laminated in a certain cycle. When X-rays are incident on the monochromator at a predetermined angle (Bragg angle), Bragg reflection occurs on the single crystal body or the multilayer film body, and X-rays of a specific wavelength are emitted in parallel with the incident beam.

The condensing monochromator is constructed so that the surface of the monochromator is curved to collect X-rays. It is difficult for a condensing monochromator to grow a crystal in a curved state from the beginning or stack a multilayer film. Therefore, in the prior art, as shown in FIG. 3 in a simple manner, the surface of the flat plate-shaped single crystal body or the multilayer film body 30 is formed into a comb shape by machining or the like, and this is formed into a predetermined shape as shown in FIG. The condenser monochromator 33 is made to be curved with a curvature R so that its surface 32 serves as a light incident surface.

[0006]

The condensing monochromator 33 shown in FIG. 4 is used while being supported by, for example, two points P1 and P2 on the left and right. It was difficult. Further, the condenser monochromator 33 needs to be cooled because it is heated by the irradiation of X-rays, but it was difficult to form the cooling channel in the condenser monochromator 33 of FIG.

The present invention solves the above-mentioned problems in the prior art, makes it possible to easily make a curved shape of the light incident surface and to firmly hold the curved shape, and at the same time, the cooling flow path. An object of the present invention is to provide a condensing monochromator whose structure can be easily manufactured.

[0008]

According to a first aspect of the present invention, a flat plate-shaped single crystal body or a multi-layered film body, one surface of which is formed in a comb tooth shape, and the surface of which is formed in a comb tooth shape are formed. A metal member formed by curving the formed surface inward along the arrangement direction of the comb teeth, and inserting the comb teeth of the single crystal body or the multilayer film body into the grooves between the comb teeth of the metal member. Then, the single crystal body or the multilayer film body is curved by following the metal member by combining the single crystal body or the multilayer film body with the metal member, and the other of the single crystal body or the multilayer film body is curved. The surface of is used as an incident surface of light.

Further, according to the invention of claim 2, the space formed between the comb teeth of the single crystal body or the multilayer film body and the comb teeth of the metal member is used as a cooling channel. Is.

[0010]

According to the invention of claim 1, since the comb teeth of the single crystal body or the multilayer film body and the comb teeth of the curved metal member are engaged with each other, the single crystal body or the multilayer film body is made of a robust metal. The member can firmly hold the curvature of the curvature.

According to the second aspect of the present invention, the cooling passage can be easily formed by using the space formed between the interlocking teeth of both members as the cooling passage.

[0012]

FIG. 1 shows an embodiment of the present invention. The condensing monochromator 40 is configured by combining a single crystal body or a multilayer film body (hereinafter simply referred to as “single crystal body”) 42 and a metal member 44. The lower surface of the single crystal body 42 is formed in a comb shape. The metal member 44 is made of a material having a high thermal conductivity such as copper, and the upper surface curved with a predetermined curvature is formed in a comb shape. The comb teeth 42a of the single crystal body 42 and the comb teeth 44a of the metal member 44 are firmly meshed with each other, and the space 46 formed between them is used as a cooling flow path to flow cooling water.

The single crystal body 42 is curved to a predetermined curvature R by being combined with a curved metal member 44,
The X-ray 50 from the light source 48 (for example, the deflection position of the storage ring) that is incident from the direction perpendicular to the bending direction is reflected and condensed with the upper surface 42b serving as the incident surface.

FIG. 5 shows an example of steps for manufacturing the condenser monochromator 40 of FIG. The steps from FIG. 5 to will be sequentially described.

A flat plate-shaped single crystal body 42 is produced.

Grooves 52 having a predetermined pitch and a predetermined width are formed on the surface of the single crystal body 42 by machining or the like to form parallel comb teeth 42a.

A flat plate-shaped metal member 44 made of copper or the like having a predetermined curvature R ′ is made.

Grooves 54 are formed on the surface of the metal member 42 by machining or etching with a pitch and a width suitable for the comb teeth 42a of the single crystal body 42, and the parallel comb teeth 44a are formed.
To form. In this case, the groove 54 is shallower than the groove 52 of the single crystal body 42.

The single crystal body 42 and the metal member 44 are assembled by interlocking the comb teeth 42a and 44a. Thus, the surface 42b of the single crystal body 42 is formed as a light incident surface having a predetermined curvature R. Also, the comb teeth 42a,
A space 46 formed between 44a serves as a cooling flow path.

In the condensing monochromator 40 produced as described above, the curved metal member 44 is the single crystal body 42.
Since it acts as a fixing frame for the single crystal body 42, the single crystal body 42 is firmly held to have a predetermined curvature R.

[0021]

As described above, according to the first aspect of the present invention, since the comb teeth of the single crystal body or the multilayer film body and the comb teeth of the curved metal member are engaged with each other, the single crystal body is formed. Alternatively, the multilayer film body can firmly hold the curvature of the curvature by the robust metal member.

According to the second aspect of the invention, the cooling flow passage can be easily formed by using the space formed between the comb teeth of both members as the cooling flow passage.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of the present invention.

FIG. 2 is a plan view showing an outline of an SOR device.

FIG. 3 is a perspective view showing a conventional comb tooth-shaped single crystal body.

FIG. 4 is a front view showing a condenser monochromator made by bending the single crystal body of FIG.

5 is a perspective view showing an example of a manufacturing process of the condenser monochromator of FIG. 1. FIG.

[Explanation of symbols]

 40 Condensing Monochromator 42 Single Crystal or Multi-Layered Film 42a Comb 44 Metal Member 44a Comb 46 Cooling Channel 52, 54 Groove

Claims (2)

[Claims] 1. A flat plate-shaped single crystal or multi-layered film body, one surface of which is formed in a comb shape, and a surface of which is formed in a comb shape and the surface on which the comb teeth are formed is arranged in the arrangement direction of the comb teeth. And a metal member curved inwardly along the same, wherein the comb teeth of the single crystal body or the multilayer film body are inserted into the grooves between the comb teeth of the metal member, and the single crystal body or the multilayer film body. And a metal member are combined to bend the single crystal body or the multilayer film body along the metal member, and the other surface of the single crystal body or the multilayer film body serves as a light incident surface. Monochromator. 2. The condenser monochromator according to claim 1, wherein a space formed between the comb teeth of the single crystal body or the multilayer film body and the comb teeth of the metal member is used as a cooling channel.