JPH1116115A - Manufacture of magnetic head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable the grinding work of a slider without being bonded or stuck on a jig by putting the slider in a template to be restricted in the sliding direction of the grinding work at the time of performing the grinding work on the floating surface of the slider, making the slider movable in the vertical direction of the floating surface and blowing a fluid on back side surface of the floating surface so as to form a proper pressure distribution. SOLUTION: A magnetic head slider 1 is put in one piece or plural pieces of a recessed part (template part) of a working jig 10 and is placed on a grinding fixing device 6 and grinding work is performed on the floating surface 7 of the magnetic head slider 1 by rotating the fixing device 6. At this time, an air pressure is added to the magnetic head slider 1 from fluid pressurizing holes 12 to press the floating surface 7 of the magnetic head slider 1 against the grinding fixing device 6. Consequently, the floating surface 7 of the magnetic head slider 1 can be worked with good mass productivity while controlling a grinding quantity, also the mechanization is facilitated because no bonding process is included and hence the work is performed without contamination by an adhesive.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a floating or contact type magnetic head for a magnetic disk drive.

[0002]

2. Description of the Related Art A magnetic disk device, which is a kind of external storage device, has a rotating magnetic disk 2 as shown in FIG.
The magnetic head (slider) 1 magnetically writes and reads information.

The magnetic head is made of ceramic and has an element for recording a magnetic signal and an element for reproducing a magnetic signal at its end. In a magnetic disk drive, a magnetic disk and a magnetic head are
Relative motion at a speed of several tens m / s or more. At this time,
A magnetic head that floats on a magnetic disk by receiving the dynamic pressure of a gas is called a floating type, and a magnetic head that slides while in contact is called a contact type.

Here, it is necessary to accurately form the shape of the air bearing surface which is the surface 7 facing the magnetic disk. Because
This is because the flying characteristics change and the wear resistance deteriorates due to the variation in the shape. Here, in order to accurately form the shape of the air bearing surface 7, it is necessary to perform the polishing process with one slider after the chip is cut.
This is because the shape of the air bearing surface may change due to chip cutting, and it is difficult to grind the connecting surface in a continuous direction with a curvature in a connected direction. Conventionally, such a process has been performed by fixing to a jig with an adhesive or an adhesive sheet / adhesive sheet 8 or the like. As shown in FIG. 5, a method of processing the air bearing surface while holding it with the adhesive force of an elastic body is exemplified in, for example, Japanese Patent Application Laid-Open No. 4-358378.

[0005]

However, Japanese Patent Laid-Open Publication No.
In the method described in Japanese Patent No. 58378, the adhesive adheres to the slider and is difficult to remove, and there is a problem of slider contamination. This step may be the last step of the processing, and the remaining residue leads to a decrease in yield.
Further, the hot-melt adhesive requires heating, and the heat-sensitive read element may be destroyed. Further, there is a problem that the slider is deformed by the adhesive and a desired air bearing surface cannot be obtained after peeling.

[0006] It is difficult to select an adhesive that satisfies these conditions and has corrosion resistance to the polishing liquid. With the method using an elastic body, it is difficult to uniformly apply a polishing load,
The polishing amount is not stable because it varies for each slider.
Hot-melt adhesives require heating, and the reading elements that are sensitive to heat may be destroyed. Further, there is a problem that the slider is deformed by the adhesive and a desired air bearing surface cannot be obtained after peeling. Furthermore, the size of the slider has been decreasing year by year, and handling by the slider unit is difficult by manual work, and automation and mechanization are required.

As a method for performing automation and mechanization, there is a method described in JP-A-3-256667. However, since an elastic body is used for pressing the polishing pressure, the same problem as described above occurs. I do.

[0008] It is an object of the present invention to solve the above-mentioned problem by eliminating the bonding step by performing polishing by pressurizing a fluid. Also, the fluid pressure can be equalized for each slider,
Another object of the present invention is to provide a processing method with a small variation in the polishing amount.

[0009]

First, the slider to be machined is placed in the template 11 and constrained in the sliding direction of the polishing process so that the slider is free to move in the direction perpendicular to the polishing surface. Then, a fluid is sprayed onto the surface on the back side of the floating surface to be processed so as to have an appropriate pressure distribution, so that a polishing pressure is generated, and the polishing proceeds accordingly.

At this time, the working efficiency can be adjusted by adjusting the pressure. Before and after processing, the slider is held in a jig by reducing the pressure of the fluid, and the transfer between the preceding and following steps is easy. Further, as the slider becomes smaller, the holding method using the adhesive force has a smaller area to be adhered and thus is more likely to come off. However, in the method of the present invention, such a problem occurs because the method is restricted by the template 11. Hard to do. In addition, since the polishing pressure can be changed during processing by controlling the pressure of the fluid, the processing amount can be adjusted and the surface shape can be controlled.

[0011] Further, since the fluid constantly flows near the slider, which is a workpiece, during processing, it is easy to remove chips generated during polishing. In particular, a polishing liquid or a lubricating liquid can be used as the fluid to be pressurized. In this case, the polishing liquid or the lubricating liquid can easily reach the processing point, and the processing is performed with high accuracy.

[0012]

BRIEF DESCRIPTION OF THE DRAWINGS FIG.
This will be described with reference to FIG.

(Embodiment 1) A correction device capable of forming a groove of 1 to 50 μm in a spiral shape on a surface of a polishing platen 6 with a diamond tool on a polishing machine is provided. It is desired that the rotating portion supported by the bearing has an inertial mass 1.5 to 4 times the mass of the rotating portion. Also, when the polishing platen is attached, the eccentricity of the outer periphery is 0.
It is necessary to make it 1 to 10 μm. The polishing platen to be used is fixed on a firm base,
It must be made of tin or an alloy containing about 0.1 to 40% of a dissimilar metal. P as a dissimilar metal
b, In, Cu, Fe, Ag, Sb, Zn, Bi and the like.

When the radius of the correction ring 4 is set on the surface plate,
The size is preferably such that it protrudes by 3 to 20 mm on the inner peripheral side and the outer peripheral side. As for the formation of the groove, the region to be in contact with the repair ring 4 must have a flatness of 1 μm to 10 μm. The tip R is 0.0 as a diamond bite
It is preferable that the tip angle is about 5 to 2 mm and the tip angle is about 30 to 75 degrees.
The surface plate may be corrected by sufficiently removing unnecessary burrs and irregularities by a correction device, and then cutting the diamond plate by feeding a diamond bite of about 1 μm to 50 μm. Further, the polishing plate is rotated on the polishing platen using a ceramic correction ring 4 while dropping the polishing liquid until the polishing platen has a sufficient flatness. At this time, it is preferable that the correction ring has a mechanism capable of forcibly applying a rotational movement.

The rotation ratio between the platen and the correction ring must be sufficiently stable.

As the polishing liquid, a diamond slurry containing a surfactant and having an average abrasive particle size of 1/10 to 1/2 μm is used. After confirming that the flatness of the polishing platen is sufficiently formed, cleaning is performed to remove abrasive grains from the polishing platen 6 and the correction ring 4. Thus, the polishing platen 6 is prepared.

Next, one or a plurality of magnetic head slides are mounted on a support jig 10 as shown in FIG.
And the air pressure on the back of the slider is
As a result, the slider is held by the jig as shown in FIG. This is placed on a polishing platen, and the slider 1 is pressed against the polishing platen 6 by pressurizing the air pressure with a fluid pressurizing hole 12 as shown in FIG. 2 to perform the polishing process as shown in FIG. After finishing the processing, the rotation of the polishing platen is stopped, and the air pressure is reduced to hold the slider 1 on the jig 11 as shown in FIG. It can be transferred from the panel to the case for cleaning at once. By this manufacturing method, the steps are simplified as shown in FIG.

(Embodiment 2) A platen 6 similar to that in Embodiment 1 is prepared, sliders are arranged in the depressions of the jig, and placed on a polishing platen. By applying a lubricating liquid to the back surface of the slider, the lubricating liquid acts as a polishing pressure to perform polishing. Since the density of the fluid is higher than when air is pressurized, the workpiece is less likely to vibrate and the processing is performed stably.

(Example 3) As shown in FIG. 8, a polishing tape 13 having a base thickness of 25 μm and diamond abrasive grains of 0.25 μm was used.
When the floating magnetic head is dry-polished at 8 MPa, the slider 1 is moved so that the template 11 does not shift laterally.
Is held, and polishing is performed by running the polishing tape 13 while applying pressure of about 0.1 to 0.4 kPa with air from the pressurizing hole 12 on the back surface of the slider.

After the processing is completed, the slider 1 is held on the jig 10 by reducing the air pressure on the back side of the slider, and is transferred to the next step.

[0021]

According to the present invention, the flying surface of the magnetic head can be processed with good mass productivity and while controlling the polishing amount. In addition, since the bonding method is not included in the manufacturing method, it is easy to mechanize, and there is no contamination by the adhesive.

[Brief description of the drawings]

FIG. 1 is a diagram showing a slider holding method of the present invention.

FIG. 2 is a sectional view of a jig during processing.

FIG. 3 is a schematic diagram of a magnetic disk device.

FIG. 4 is a view showing a polishing method.

FIG. 5 is a diagram showing a conventional slider holding method.

FIG. 6 is a sectional view of a jig when holding a workpiece.

FIG. 7 is a sectional view of a jig after transfer.

FIG. 8 is a cross-sectional view of a processing method using a polishing tape.

FIG. 9 is a manufacturing process diagram of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Magnetic head slider, 2 ... Magnetic disk, 3 ... Processing jig, 4 ... Repair ring, 5 ... Polishing liquid / lubricating liquid, 6 ... Polishing surface plate, 7 ... Floating surface / contact surface, 8 ... Adhesive elastic body sheet , 9: lower surface of processing jig, 10: processing jig of the present invention, 11: recessed portion (template) of processing jig of the present invention,
12: Hole for pressurizing fluid, 13: Polishing tape, 14: Case for slider conveyance.

Claims (4)

[Claims] 1. A method of manufacturing a magnetic head for polishing the flying surface of a magnetic head slider for a magnetic disk drive one by one, wherein the polishing is performed by applying pressure with a fluid without adhering or sticking the slider to a jig. Characteristic magnetic head manufacturing method. 2. The method according to claim 1, wherein the polishing is performed using air as a fluid. 3. The method of manufacturing a magnetic head according to claim 1, wherein the polishing is performed using a polishing liquid or a lubricating liquid as a fluid. 4. The method of manufacturing a magnetic head according to claim 1, further comprising a step of reducing the pressure of the fluid before or after performing the polishing process and holding and transferring said slider.