JPH11153676A - Image selecting device of x-ray inspection system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To quickly and exactly select a desired optical image, by providing a first and a second rotors having a rotation axis formed in horizontal direction and vertical direction, a first mirror connected to the first rotor and reflecting an optical image with a specific angle, a second mirror connected to the second rotor and selecting a desired optical image among optical images, etc. SOLUTION: By a control command of a rotation controller 150, a first rotor 110 extended in Y-axis direction rotates. By this, a first mirror 120 combined at the end of a rotation axis 111 of the first rotor 110 rotates clockwise or counter clockwise by a specific angle and selects an optical image on an output screen 41 of an intensifier 40. On the other hand, a second rotor 130 extended in Z-axis direction rotates by the command of the rotor controller 150 by a specific angle. By this, a second mirror 140 combined at the end of a rotation axis 131 of the second rotor 130 rotates clockwise or counter clockwise by a specific angle and selects a desired optical image among optical images reflected from the first mirror 120.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an X-ray inspection system.
(X-ray inspection system)
More particularly, the present invention relates to an image selection device of an X-ray inspection system that can quickly and accurately select an image using a low inertia galvanometer. .

[0002]

2. Description of the Related Art X-rays are radiations discovered and named by WK Roentgen in 1895, are electromagnetic waves having a wavelength of about 10 to 10 ^-2 nm, and are of ordinary light (i.e., about 400 to 80 nm).
It has optical characteristics such as reflection, refraction, diffraction, and deviation as well as visible light having a wavelength band of 0 nm. It can also accurately measure wavelength using a diffraction grating.

[0003] X-rays have the ability to penetrate objects, and their transmittance varies depending on the type, density and thickness of the substance. Therefore, X-ray defect inspection method
Utilizing this property, the thickness and position of the defective portion are searched for based on the difference in the photosensitive density of the X-ray photograph. On the other hand, when X-rays are incident on an object, the current state of diffraction occurs.
In the (X-ray stress measurement method), when a specific X-ray of a certain wavelength is incident on an object and the elastic stress is applied, the change in the interplanar distance of the specific crystal lattice plane is measured through diffraction lines to obtain the stress. .

Generally, an X-ray inspection system is a type of a typical non-destructive inspection system to which an X-ray inspection method is applied, and the X-ray transmission system varies depending on the type, density, and thickness of a material constituting an opaque inspection target. This is an inspection system in which an X-ray fluoroscopic image reflecting characteristics is converted into an optical image so that a non-destructive inspection can be performed on a part that is not visually observed from the outside.

[0005] Such an X-ray inspection system has a wide range of application fields such as clothing, quality inspection, welding, electronic circuit brazing, and factory automation. U.S. Pat. No. 3,809,886 "dy
namic tomography with movable table ”, US Patent No. 4210815“ X-ray apparatus servo system ”
m ", U.S. Pat. No. 4,356,400" X-ray appara
tus alignment method and device, U.S. Pat. No. 4,809,308 "method and apparatus for perform"
ing automated circuit board solder quality inspect
ion, US Pat. No. 4,926,452 “automated l”
aminography system for inspection of electronic
s ", U.S. Pat. No. 5,023,899" method and ar
rangement for X-ray photography or the like ", US Patent No. 5048070" X-ray tube support
apparatus ", U.S. Pat. No. 5,164,974," X-ra
y exposure apparatus ", US Patent 5,541,856
Such technology is disclosed in, for example, “X-ray inspection system”.

Hereinafter, a general X-ray inspection system will be described. FIG. 2 is an exemplary view showing a general X-ray inspection system, and FIG. 3 is an exemplary view for explaining an image selection path of the general X-ray inspection system. As shown in the figure, a scanning X-ray tube (X-ray tube) 10
After 1 is generated and transmitted through the measured object 20, an optical image 42 is formed on an output screen 41 through an image intensifier 40. Next, a video selector (view selector) 50 outputs the output screen 41.
A desired optical image is selected from among the optical images formed in step (1).

The conventional image selecting device 50 is constituted by a rotating body 54 which rotates in opposition to the image intensifier 40. The rotating body 54 includes a desired one of the optical images 42 formed on the output screen 41. Path 5 for guiding the moving optical image
A first mirror 51 and a second mirror 52 facing each other to form a third mirror 51 are formed.

The operation of such an image selection device 50 will be described. The rotating body 54 is provided with a control unit (for selecting a desired optical image from the optical images 41 formed on the output screen 41 of the image intensifier 40). (Not shown) and rotated by servo control.

At this time, if the rotation speed of the optical image on the output screen 41 due to the rotation of the scanning X-ray tube 10 and the rotation speed of the rotating body 54 of the image selection device 50 do not match, the selected optical image will have a low frequency. A blurring situation in which a large amount of components is included occurs. Therefore, when the desired optical image is determined, the rotating body 54 of the image selecting device 50
It is necessary to perform servo control so that the rotation speed is accurately synchronized with the rotation speed of the optical image formed on the output screen 41.

As described above, when the rotation speed of the optical image is accurately synchronized with the rotation speed of the rotator 54 of the image selection device 50, the optical image remains in a stopped state despite the rotation of the optical image. Can be selected.

[0011]

However, the image selection device of the conventional X-ray inspection system has a problem that it can be applied only to an optical image formed along the circumference of the output screen. That is, since the first and second mirrors for selecting a desired optical image by the image selection device are formed along the circumference of the rotating body, the optical image formed at the center of the output screen cannot be selected. However, in reality X
Line projection is also applied to the central part.

Further, when the radius of the circle formed by the X-ray fluoroscopic image formed by the rotation of the X-ray increases, the inertia increases.
As a result, it is difficult to perform normal speed control and high speed position control of the servo system of the image selection device, and there is a problem that a desired optical image cannot be quickly and accurately selected.

Accordingly, the present invention has been made in view of such problems, and an object of the present invention is to provide an image selecting apparatus of an X-ray inspection system capable of selecting an optical image at an arbitrary position. It is in.

It is another object of the present invention to provide an image selecting apparatus of an X-ray inspection system which enables a moving optical image to be selected quickly and accurately.

[0015]

According to a feature of the present invention to achieve the above object, an image intensifier is obtained by projecting X-rays from at least one or more directions and positions onto an object to be measured. A plurality of X-ray fluoroscopic images are converted into optical images and projected on an output screen, and a first rotating body is installed so that a rotation axis is formed in a horizontal direction with respect to the output screen. A first mirror is connected to the end of the rotating shaft to reflect an optical image from the output screen. Also, a second rotating body is installed so that a rotating shaft is formed in a direction perpendicular to the output screen, and a second mirror is connected to an end of the rotating shaft of the second rotating body so that an optical signal from the first mirror is formed. A desired optical image is selected from the images and input to the imaging device.

Preferably, a galvanometer can be used as the first rotating body and the second rotating body. The range of the rotation angle of the first rotating body is ± 90 ° with respect to the output screen,
The range of the rotation angle of the rotator is ± 90 ° with respect to the first mirror.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an image selecting apparatus of an X-ray inspection system according to the present invention will be described in detail with reference to the accompanying drawings. In the description, the components of the general X-ray inspection system shown in FIG. 2 will be described.

FIG. 1 is a block diagram showing a preferred embodiment of an image selection device of an X-ray inspection system according to the present invention. Referring to FIG. 2, a scanning X-ray tube 10 tilted at a certain angle to acquire X-ray inspection information for various directions and positions, rotates an X-ray 11 at a certain time interval, and moves an X-ray 11 to an inspection area of a measurement object 20. Scan. Also, the measured object transfer unit 30 such as an XY table supports the measured object 20 and transfers the measured object 20 in the horizontal direction so that the X-ray 11 can pass through a desired inspection area.

The X-rays 12 transmitted through the measured object 20 form an X-ray fluoroscopic image 13 having different characteristics depending on the type, density and thickness of the measured object 20, on an input screen 43 formed on an image intensifier 40. Formed. At this time, the scanning X-ray tube 10 tilted at a certain angle outputs the X-rays 11 while rotating, so that the X-ray fluoroscopic image 13 is formed along the circumferential direction of the input screen 43.

As is well known, X transmitted through the body 20 to be measured
Since the wavelength of the line 12 is not included in the visible light wavelength band, it is not visually observed. This requires an image intensifier 40 to convert the fluoroscopic image 13 into an optical image that is a visible image.

A large number of X-ray fluoroscopic images 13 formed on the input screen 43 of the image intensifier 40 are incident on the image intensifier 40 and internally converted into an optical image through a predetermined process. As shown, an image is formed on an output screen 41 located below the video intensifier 40.

On the other hand, the image selection device 100 selects a desired optical image from the optical images formed on the output screen 41.

As shown in FIG. 1, an image selecting apparatus 100 according to the present invention includes a first rotating body 110 having a rotating shaft 111 extending in a horizontal direction with respect to an output screen 41 of an image intensifier 40. A first mirror 120 coupled to the end of the rotation shaft 111 of the first rotating body 110 and reflecting an optical image from the output screen 41 at a predetermined angle
And the output screen 41 of the video intensifier 40
A second rotating body 130 having a rotating shaft 131 formed in a direction perpendicular to the first mirror 120, and a second rotating body 130 coupled to an end of the rotating shaft of the second rotating body 130, facing the first mirror 120, The second mirror 140 that reflects the optical image at a predetermined angle, and the rotation angles of the first and second rotating bodies 110 and 130 are controlled such that the first and second mirrors 120 and 140 are controlled at desired reflection angles. And a rotating body control unit 150.

The rotator control unit 150 includes the first and second mirrors 1.
The optical path is formed such that an optical image at an arbitrary position on the output screen 41 is incident on the image pickup device 60 by appropriately controlling the reflection angles of the light sources 20 and 140. At this time, according to a preferred embodiment of the present invention, the first and second rotating bodies 110,
As 130, a galvanometer can be used.

Hereinafter, the operation of the video selecting apparatus 100 according to the present invention will be described in detail. First,
The galvanometer used for the first rotating body 110 and the second rotating body 130 according to a preferred embodiment of the present invention will be described. A galvanometer is a type of device for measuring the intensity of a current, and in particular, compares a small current or determines whether a current is small. It is a so-called "galvanometer" measuring instrument used for detection. Normally, unlike ordinary ammeters, in order to reduce the friction of the movable part, it is not supported by a pivot (pivot) but supported through a fine metal fiber, so the inertia is very small and it is used as a servo control rotating body Is capable of high-speed and intricate servo control. Therefore, in the present invention, by using the galvanometer as the first and second rotating bodies, the first and second optical images formed at arbitrary positions on the output screen can be controlled.
Mirror position control is possible, allowing quick and accurate selection of the desired optical image.

This will be described in more detail. The first command extended in the Y-axis direction by the control command of the rotation control unit 150 is described below.
The rotating body 110 rotates at a predetermined angle, thereby
The first rotating body 110 is connected to the end of the rotating shaft 111.
The mirror 120 is rotated clockwise or counterclockwise by a predetermined angle to select an optical image on the output screen 41 of the video intensifier 40. At this time, since the galvanometer used in the first rotating body 110 has a very small inertia, a desired optical image can be quickly and accurately selected. Preferably, the range of the rotation angle of the first rotating body 110 is ± 90 ° with respect to the output screen 41.

On the other hand, the second rotating body 1 extended in the Z-axis direction
30 rotates at a predetermined angle according to a control command of the rotator control unit 150, whereby the second mirror 140 coupled to the end of the rotation shaft 131 of the second rotator 130 rotates clockwise or counterclockwise by a predetermined angle. By rotating, a desired optical image is selected from the optical images reflected from the first mirror 120. At this time,
As with the first rotating body 110, the galvanometer used as the second rotating body 130 has extremely small inertia, so that a desired optical image can be selected quickly and accurately. Preferably, the range of the rotation angle of the second rotating body 130 is ± 90 ° with respect to the first mirror 120.

As described above, the light is projected onto an arbitrary position on the XY plane of the output screen 41 through the optical path formed by appropriately controlling the reflection angles of the first mirror 120 and the second mirror 140. The optical image 42 can be selected.

In the prior art, only the optical image projected on the circumference of the output screen 41 can be selected. However, according to the video selecting apparatus 100 of the present invention, the optical image formed at an arbitrary position on the output screen 41 is also selected. The selected optical image can be ultimately input to the imaging device 60 and imaged on an image sensor or output through an image forming body such as a display, film, and printing paper.

Although the preferred embodiment of the present invention has been described in detail, those skilled in the art to which the present invention pertains can refer to the spirit and scope of the present invention as defined in the appended claims. The present invention can be variously modified or changed without departing from the present invention.

[0031]

As described above, according to the image selecting device of the X-ray inspection system of the present invention, an optical image formed at an arbitrary position on the output screen can be selected, and a desired optical image can be selected quickly and accurately.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a preferred embodiment of an image selection device of an X-ray inspection system according to the present invention.

FIG. 2 is a perspective view illustrating a general X-ray inspection system.

FIG. 3 is a partial cross-sectional perspective view illustrating an image selection path of a general X-ray inspection system.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Scanning X-ray tube 11 X-ray 12 X-ray 13 X-ray fluoroscopic image 20 Object to be measured 30 Object transfer part 40 Image intensifier 41 Output screen 42 Gradation visible image 43 Input screen 60 Imaging device 100 Image selection device 110 first rotating body 111 rotating axis 120 first mirror 130 second rotating body 131 rotating axis 140 second mirror 150 rotating body control unit

 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Taka Kunihara 373, Jucheng-dong, Yuseong-gu, Daejeon-si, Gyeonggi-do, Republic of Korea Department of Mechanical Engineering, Korea National Institute of Science and Technology (72) Inventor Park Won-jeong Daejeon, Gyeonggi-do, Republic of Korea Department of Mechanical Engineering, Korea University of Science and Technology, 373, Jucheng-dong, Yuseong-gu (72) Inventor Roh Ei-Shun Department of Mechanical Engineering, 373, Jucheng-dong, Yuseong-gu, Daejeon, Gyeonggi-do, Republic of Korea

Claims (5)

[Claims] An image intensifier that converts a plurality of X-ray fluoroscopic images obtained by projecting X-rays from at least one direction and position onto a measurement object into an optical image and projects the optical image on an output screen; A first rotating body having a rotation axis formed in a horizontal direction with respect to the output screen; and an optical image from the output screen connected to an end of the rotation shaft of the first rotating body at a predetermined angle. The first to do
A second rotating body having a rotating shaft formed in a direction perpendicular to the output screen; and a second rotating body connected to an end of the rotating shaft of the second rotating body and facing the first mirror. A second mirror for selecting a desired optical image from optical images from the first mirror; and a rotator control unit for controlling rotation angles of the first rotator and the second rotator. X-ray inspection system image selection device. 2. The apparatus according to claim 1, wherein the first rotator includes a galvanometer. 3. The apparatus according to claim 1, wherein the second rotating body includes a galvanometer. 4. The image selection device according to claim 1, wherein a range of a rotation angle of the first rotating body is ± 90 ° with respect to the output screen. 5. The apparatus according to claim 1, wherein a range of a rotation angle of the second rotator is ± 90 ° with respect to the first mirror.