JPH11153637A - Liquid crystal panel inspecting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To inspect a liquid crystal panel with improved detection level and S/N, at high precision. SOLUTION: On a substrate 4, a thin-type array sensor 1 and an amplifier and scanner 2 are provided. In addition, at an end part of the substrate 4, a plurality of step-like notches 6 re formed. With a lead-out electric line 3 formed by metal film forming, an array sensor 2, the amplifier and scanner 2, and the notch 6 are wired together. Since the array sensor 1 and the amplifier and scanner 2 as well as the electric line 3, are thin, the array sensor 1 is allowed to be close to a liquid crystal panel which is to be inspected. Further, through the lead-out electric line 3 of the notch 6, signal is easily taken out.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal panel inspection apparatus for inspecting a liquid crystal panel used for a television, a personal computer, and the like.

[0002]

2. Description of the Related Art Generally, methods for evaluating a liquid crystal panel include an operation test, a reliability test, and an appearance test. The above-mentioned inspection of the liquid crystal panel is mainly performed as a lighting operation confirmation test after assembling the product. However, as the size of the liquid crystal panel becomes larger and the definition thereof becomes higher, a higher speed of the inspection is required.

[0003]

Conventionally, there is a wire bonding method as a means for extracting and supplying a signal from a sensor electrode. This wire bonding method is a commonly practiced method, and as shown in FIG.
And the drive circuit chip 8 are connected by wire bonding 10. In FIG. 11, reference numeral 9 denotes a mounting substrate.

FIG. 12 shows an array sensor using the above wire bonding method. As shown in the figure, when the sensor 13 and the electrode pad 14 of the circuit board 12 are connected by wire bonding 10, the wire bonding 10
Emerges as shown in the figure. For this reason, the liquid crystal panel 23
There is a problem that the distance D between the sensor 13 and the sensor 13 becomes large, the sensor 13 cannot be brought close to the liquid crystal panel 23 to be inspected, the detection sensitivity decreases, and the S / N ratio deteriorates. In FIG. 12, reference numeral 11 denotes an amplifier.

In addition, as a method for inspecting the liquid crystal panel,
For example, as shown in FIG. 13, probe pins 31 and 32 are brought into contact with the source voltage wiring 35 and the gate voltage wiring 33 connected to the TFT transistor 30, respectively, and the disconnection and short circuit of the pixel electrode 21 are inspected from the output voltage. A prober method is used. This is the liquid crystal panel 2
The defect of the pixel electrode 21 of the liquid crystal display panel 23 is detected by applying an inspection signal to the source voltage wiring 35 and the gate voltage wiring 33 of No.3. In FIG. 13, reference numeral 34 denotes a substrate.

However, the method shown in FIG. 13 has a problem that the contact failure increases or the maintenance cost for replacing the styluses (probers) 31 and 32 increases. Furthermore, with the increase in the amount of display information, there has been a demand for a liquid crystal display to be large-sized, full-colored, and to have a reduced pixel pitch in accordance with high definition, so that high-speed inspection has become an important issue.

A liquid crystal panel 23 for a normal laptop personal computer is, for example, a 640 × 480 liquid crystal panel of a 10-inch type.
Pixels are provided for inspection of the liquid crystal panel 23 as shown in FIG.
The method of scanning the surface of the liquid crystal panel 23 with the array sensor 20 shown in FIG. In this case, the array sensor 20
It is necessary to manufacture the detection FET potential sensor 24 incorporated in the display at the same pitch or less as the pixel electrode 21 of the display.

[0008] However, FE can be realized by one array sensor.
Since it is difficult to arrange several hundred T potential sensors in a line, conventionally, a plurality of array sensors 20 are connected in series as shown in FIG. At this time, there is a problem that the pitch L of the FET potential sensors of the array sensor 20 is shifted to L1 at the connection portion of each array sensor 20 because of the casing.

[0009]

SUMMARY OF THE INVENTION An object of the present invention is to provide a liquid crystal panel inspection apparatus capable of inspecting a liquid crystal panel accurately and at high speed in view of the above-mentioned prior art.

In order to solve the above-mentioned problems, the present invention provides a liquid crystal panel inspection apparatus having an array sensor incorporating a detection sensor, comprising: a thin array sensor provided on a substrate; Provided with a thin amplifier and scanner provided, and a plurality of step-shaped cuts independently provided at the end of the substrate, the metal film deposition, the array sensor, the amplifier and the scanner, and the cut A wiring is provided between them.

Further, according to the structure of the present invention, in a liquid crystal panel inspection apparatus for inspecting a disconnection or short circuit of a wiring by detecting a pixel voltage of the liquid crystal panel by using a potential sensor to which a field effect transistor is applied, the center is made convex. Substrate, an array sensor in which an FET potential sensor is disposed on a convex portion of the substrate, and an amplifier and a scanner provided in a portion adjacent to the array sensor but not in the convex portion. A wiring is provided between the sensor, the amplifier, and the scanner.

According to another aspect of the present invention, there is provided a liquid crystal panel inspection apparatus for inspecting pixel electrodes of a liquid crystal panel, comprising an array sensor in which FET potential sensors are arranged in two rows, wherein the plurality of array sensors are staggered on a substrate. It is characterized by being arranged.

[0013]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a schematic perspective view showing an array sensor according to a first embodiment of the present invention, FIG. 2 is an enlarged view showing an end of the array sensor, and FIG. 3 is a sectional view showing the array sensor.

As shown in FIG. 1 which is a schematic perspective view of the detection unit, a thin array sensor 1, a thin amplifier and a scanner 2 are arranged on a substrate 4. The amplifier and the scanner 2 are arranged adjacent to the left and right of the array sensor 1. Further, as shown in FIGS. 1 and 2, the left and right (ends) of the substrate 4
Are provided with a plurality of cuts 6 in a stepped manner, and the lead wire 3 is used to connect the array sensor 1, the amplifier and the scanner 2, and the cuts 6 by forming a metal film.

FIG. 3 shows an arrangement relationship between the liquid crystal panel 23 having the pixel electrodes 21 and the array sensor 1. In order to perform an accurate inspection, the distance d between the liquid crystal panel 23 and the array sensor 1 needs to be 20 μm or less. Therefore, in the first embodiment, the array sensor 1, the amplifier, the scanner 2 and the like are extremely thin, for example,
A lead electrode 3 having a thickness of μm is used, and the lead electrode 3 is wired up to the left and right cuts 6 by forming a metal film, thereby forming an independent structure.

As described above, since the array sensor 1, the amplifier and the scanner 2 are made extremely thin and the extraction electrode 3 is formed by forming a metal film, the distance d can be made 20 μm or less. Moreover, since the lead wires 3 are wired to the cuts 6, even if the distance d is 20 μm or less, it is possible to easily take out signals through the wires 3 in the cuts 6.

FIG. 1 shows the entire array sensor 1. In general, the array sensor 1 is inspected while scanning at a constant distance from the liquid crystal panel 23 while scanning it. , Liquid crystal panel 23 and array sensor 1
Can be reduced to 20 μm or less, so that the detection level of the sensor and the S / N ratio are improved,
A highly sensitive sensor system can be created.

FIG. 4 is a sectional view showing the principle of detection of the FET potential sensor according to the second embodiment of the present invention, FIG. 5 is a partial perspective view of the array sensor, and FIG. 7 and 8 are diagrams showing a method of determining a pixel electrode test using an FET potential sensor.

The main configuration of the array sensor according to the second embodiment is that the center of a substrate 27 is convex as shown in FIG. Has been placed. The amplifier 25 and the scanner 2 are located on the left and right sides of the FET
6 are arranged adjacently. A wiring 19 is formed between the FET potential sensor 24, the amplifier 25, and the scanner 26 by forming a metal film. The array sensor is scanned while being held at a constant distance from the liquid crystal panel, and the pixel electrodes 21 of the liquid crystal panel 23 are inspected.

As shown in FIG. 4, the principle of detection of the liquid crystal panel is as follows. As shown in FIG. 4, a potential sensor 24 using a field effect transistor (FET) detects a pixel voltage using the pixel electrode 21 of the liquid crystal panel 23 as a gate and disconnects the wiring.・ It detects short circuit. In FIG. 4, reference numeral 22 denotes glass.

In this embodiment, as shown in FIGS. 4 and 6, the distance between the liquid crystal panel 23 and the FET potential sensor 24 is set within 20 μm, and the pixel voltage during operation is detected as the gate voltage. , Which are amplified to form a pixel electrode 21
Inspect for disconnections and short circuits.

In this case, the FET potential sensor 24 is connected to the substrate 2
7 and the wiring 19 is formed by forming a metal film, while the amplifier 25 and the scanner 26 are arranged in a non-convex portion, so that the amplifier 25 and the scanner 26 are thick. The upper surface of the amplifier 25 and the scanner 26
It is located below the upper surface of the FET potential sensor 24. Therefore, the liquid crystal panel 23 and the FET potential sensor 24 are not affected by the thicknesses of the amplifier 25 and the scanner 26.
Can be set within 20 μm.

The pixel electrodes 21 of the liquid crystal panel 23 have a 640 × 480 pixel arrangement as described above. Now, as shown in FIG. 6, when the array sensor 20 scans the surface of the liquid crystal panel 23 at intervals of 20 μm or less to inspect the pixel electrode 21, when a pulse voltage is applied to the pixel electrode A-1 in FIG.
A voltage waveform as shown in FIG. 8A is generated at the output of the FET potential sensor 28 facing the pixel electrode A-1, for example, for a disconnection. Becomes 0.

In this state, the vicinity of the FET potential sensor 29 assumed to be short-circuited in FIG.
When a voltage is generated at the position 1 or B-2, a voltage is generated at the FET potential sensor 29 even though the pulse voltage is applied only to the pixel electrode A-1. Can be determined to be short-circuited. While scanning the array sensor by this method, it is inspected whether the pixel electrode 21 of the liquid crystal panel 23 is disconnected or short-circuited.

By inspecting the liquid crystal panel 23 using the FET potential sensor 24, disconnection of the pixel electrode
Short-circuit inspection can be performed at high speed and with high sensitivity.

Next, a third embodiment of the present invention will be described. FIG. 9 is a schematic diagram of an array sensor according to a third embodiment arranged in a staggered manner. FIG. 10 is a perspective view of an array sensor according to the third embodiment arranged in a staggered manner.

FIG. 14 shows a state in which the pitch L of the FET potential sensor 24 is shifted to L1 at the connection point of each array sensor when the array sensors are connected in series. FIG. 9 shows the third embodiment. An array sensor is mounted according to the form.

As shown in FIG. 9, in each array sensor 20, FET potential sensors 24 for inspection of disconnection and short circuit are arranged in two columns in series at equal intervals. When this array sensor 20 is connected linearly, the pitch L between the FET potential sensors 24 at both ends of the array sensor 20 becomes L1, as shown in FIG. For this reason, in the third embodiment, they are arranged in a staggered pattern as shown in FIG.

Thus, the distance L between the pixel electrodes of the liquid crystal panel is calculated.
10, and by arranging a large number of array sensors 20 as shown in FIG. 10, it is possible to cope with the inspection of a large liquid crystal panel. In FIG. 10,
41 is an amplifier and a scanner, and 42 is an extraction electrode.

[0031]

As described in detail with the above embodiments, the present invention relates to a liquid crystal panel inspection apparatus having an array sensor incorporating a detection sensor, a thin array sensor provided on a substrate, A thin amplifier and scanner provided on the substrate adjacent to the sensor, and a plurality of step-shaped cuts provided independently at an end of the substrate; The configuration was such that wiring was performed between the amplifier and the scanner and the cut.

With such a configuration, in the present invention, there is no problem such as floating of wire bonding, the distance between the liquid crystal panel and the array sensor can be reduced, and the detection level and S / N can be improved. ,
Accuracy and sensitivity are increased.

According to the present invention, there is provided a liquid crystal panel inspection apparatus for inspecting a disconnection or short circuit of a wiring by detecting a pixel voltage of a liquid crystal panel using a potential sensor to which a field effect transistor is applied. An array sensor in which an FET potential sensor is disposed on a convex portion of the substrate,
An amplifier and a scanner provided adjacent to the array sensor and provided in a portion that is not a convex portion, and a metal film formed, between the array sensor, the amplifier, and the scanner,
Wiring configuration was adopted.

With such a configuration, according to the present invention, the distance between the liquid crystal panel and the array sensor can be reduced, the detection level and S / N can be improved, the accuracy and sensitivity can be increased, and disconnection of the pixel electrode can be improved. High-speed short-circuit inspection
It can be performed with high sensitivity.

According to the present invention, in a liquid crystal panel inspection apparatus for inspecting pixel electrodes of a liquid crystal panel, an array sensor in which FET potential sensors are arranged in two rows is provided, and the plurality of array sensors are arranged in a staggered manner on a substrate. The configuration was adopted.

With this configuration, in the present invention, the potential sensor pitch of the array sensor can be adjusted to the distance between the pixel electrodes of the liquid crystal panel, and the inspection of a large liquid crystal panel can be performed by disposing a large number of array sensors. Can be handled.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an array sensor according to a first embodiment of the present invention.

FIG. 2 is an enlarged view showing an end of the array sensor according to the first embodiment.

FIG. 3 is a sectional view showing an array sensor according to the first embodiment.

FIG. 4 is a sectional view showing an array sensor using a FET potential sensor according to a second embodiment of the present invention.

FIG. 5 is a perspective view showing a part of an array sensor according to a second embodiment.

6A and 6B show an array sensor and a liquid crystal panel according to a second embodiment, wherein FIG. 6A is a plan view and FIG. 6B is a front view.

FIG. 7 is an explanatory diagram showing a method for determining a pixel electrode test using an FET potential sensor.

FIG. 8 is an explanatory diagram showing a method for determining a pixel electrode test using an FET potential sensor.

FIG. 9 is a schematic diagram showing an array sensor according to a third embodiment.

FIG. 10 is a perspective view showing an array sensor according to a third embodiment.

FIG. 11 is an exemplary perspective view showing an electronic component subjected to wire bonding;

FIG. 12 is a configuration diagram showing a conventional array sensor using a wire bonding method.

FIG. 13 is a perspective view showing a conventional prober type inspection apparatus.

FIG. 14 is a configuration diagram showing a conventional series-connected array sensor using an FET potential sensor.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 array sensor 2 amplifier and scanner 3 lead wire 4 substrate 6 cut 7 liquid crystal display element 8 drive circuit chip 9 mounting substrate 10 wire bonding 11 amplifier 12 circuit board 13 sensor 14 electrode pad 19 wiring 20 array sensor 21 pixel electrode 22 glass 23 Liquid crystal panel 24 FET potential sensor 25 Amplifier 26 Scanner 27 Substrate 28 Disconnection FET potential sensor 29 Short-circuit FET potential sensor 30 TFT transistor 31 Probe (prober) 32 Probe (prober) 33 Gate voltage wiring 34 Substrate 35 Source voltage wiring 41 Amplifier and scanner 42 Extraction electrode

 ──────────────────────────────────────────────────の Continuing on the front page (72) Tadashi Hekkaku 3-2-1 Gion, Asaminami-ku, Hiroshima-shi, Hiroshima Hiroshima Koki Plant, Mitsubishi Heavy Industries, Ltd.

Claims (3)

[Claims] 1. A liquid crystal panel inspection apparatus having an array sensor incorporating a detection sensor, comprising: a thin array sensor provided on a substrate; a thin amplifier and a scanner provided on the substrate adjacent to the array sensor;
A plurality of step-shaped cuts provided independently at an end of the substrate, and wiring is provided between the array sensor, the amplifier and the scanner, and the cuts by forming a metal film. LCD panel inspection device. 2. A liquid crystal panel inspection apparatus for inspecting a disconnection or short circuit of a wiring by detecting a pixel voltage of a liquid crystal panel using a potential sensor to which a field effect transistor is applied. An array sensor in which an FET potential sensor is disposed in a convex portion of the array sensor; and an amplifier and a scanner provided in a portion adjacent to the array sensor and not in the convex portion. A liquid crystal panel inspection device, wherein a wiring is provided between the scanner and the scanner. 3. A liquid crystal panel inspection device for inspecting pixel electrodes of a liquid crystal panel, comprising an array sensor in which FET potential sensors are arranged in two rows, wherein the plurality of array sensors are arranged in a staggered manner on a substrate. LCD panel inspection device.