JPH11145617A - Filling of paste and paste filling device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To contrive stabilization of the guality of a paste and enhancement of productivity of the paste, by a method wherein a base material only is moved at least longer than the length of the diameter of holes on the base material in the horizontal direction to separate the base material from a porous material in a state that the porous material is fixed on the base material and thereafter, vacuum suction of the porous material is released to take out the base material from under the lower part of the porous material. SOLUTION: A paste 19 on a pattern 12a is filled in holes formed in a base material 18 by a squeegee mechanism 3. After the movement of a paper 15e is prevented by damping and holding, which are conducted by an elastic body 11 and a block 10, the point of a non-paste filled part of the base material 18 is pinched by shear chucks 16, and the base material 18 is a little moved horizontally to a paper 15e to open the abutment of the upper surface of the paper 15e with the paste 19 on the lower parts of the holes formed in the base material 18. Accordingly, there are no undurations of the paper 15e and the rumple of the paper 15e. As the paper 15e and the base material 18 can be moved in parallel to each other in a state that the paper 15e and the base material 18 are closely adhered to each other, separation of the non-paste filled part from the paper 15e can be stabilized.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a paste filling method and a paste filling apparatus used for manufacturing double-sided or multilayer wiring boards used for various electronic devices.

[0002]

2. Description of the Related Art A conventional paste filling method and paste filling apparatus of this type will be described with reference to FIGS.

FIG. 11 is a manufacturing process diagram showing an example of a manufacturing process of a double-sided or multi-layer wiring board, FIG. 12 is a perspective view of a main part showing a structure of a base material composed of a prepreg and a film material, and FIG. It is principal part sectional drawing which shows the structure of an apparatus.

In FIG. 11, reference numeral 33 denotes glass epoxy;
It is a prepreg such as aramid epoxy or paper epoxy, and polyethylene terephthalate (hereinafter referred to as PET), paper, polyimide,
Alternatively, the base material 18 which is a laminate as shown in FIG. 12 is formed by bonding and bonding the composite film material 32 by thermocompression bonding or the like in the bonding step.

Next, in a hole forming step shown in FIG. 11, a predetermined number of holes 3 are formed at predetermined positions in the base material 18 made of the prepreg 33 and the film material 32 by drilling or laser processing.
6 is formed.

Next, in a filling step, a conductive paste 19 made of a conductive material, a mixed material, a solvent, or the like is filled into the holes 36 of the base material 18 by a squeegee or the like. By peeling the film material 32 from, a formation layer body 37 made of the prepreg 33 and the paste 19 filled in the holes 36 is formed.

[0007] Subsequent to this step, a double-sided board is formed by a laminating step, a resin curing step, and a pattern forming step. In the laminating step, conductive foils 35 such as copper foil are laminated on both sides of a forming layer body 37, and a resin is formed. The prepreg 33 of the formation layer body 37 and the paste 19 in the holes 36 are cured with a resin by heating and pressing by a heating press or the like in a curing step, and are strongly and electrically and mechanically joined to the conductive foil 35. Then, a predetermined conductive pattern 38 such as wiring and connection is formed on the conductive foil 35 by etching or the like in a pattern forming step to form a predetermined double-sided substrate 39.

The multi-layer substrate 42 is formed by a multi-layer laminating step, a resin curing step, and an outer layer pattern forming step subsequent to the above.
A conductive foil 40 such as a copper foil is laminated and bonded to both surfaces of the prepreg 33 of the formation layer body 37 by heating and pressing with a heating press or the like in a resin curing step. The paste 19 is hardened with a resin and is firmly electrically and mechanically bonded to the conductive pattern 38 and the conductive foil 40. In the outer layer pattern forming step, a predetermined conductive pattern 41 such as wiring and connection is formed on the conductive foil 40 by etching or the like. Then, a predetermined multilayer substrate 42 is formed.

Next, a conventional paste filling apparatus will be described. In FIG. 13, reference numeral 13b denotes a stage made of a metal material or the like. The stage 13b has a built-in bed 13 provided with a porous sintered metal 34 on the upper surface and provided with a plurality of suction holes 13f. On the lower surface, the ends of the respective suction holes 13f are gathered and a unified gathering part is connected to a suction port 13a of a suction pipe connected to a vacuum pump (not shown).

Reference numeral 13c denotes a slide shaft which is vertically slidably inserted through a bush 13d (a driving mechanism is not shown), and a tip of which is connected to a lower surface of the stage 13b. Bed 13
The vertical position is set or maintained or adjusted.

Reference numeral 15 denotes a continuous band-shaped paper having good air permeability used as a porous material. The paper 15 is supplied from a supply reel 15a and guided by guide rollers 15b.
, The upper surface of the sintered metal 34, and the guide roller 15
It is taken up by the take-up reel 15c via d.

Reference numeral 12 denotes a rectangular plate frame made of a metal material such as light and hard duralumin or a hard resin, and is formed of a metal material having a hole (not shown) for filling the paste 19 on its lower surface or a synthetic material. The plate 12a made of a resin material or the like is stuck under tension, and the base material 18 placed on the upper surface of the sintered metal 34 via the paper 15 and the plate 12a are maintained at a predetermined gap. It is installed in.

Reference numerals 3a and 3b denote squeegees. The squeegee heads 3d and 3c, which are integrally movable left and right, are individually movable up and down. Is held.

Reference numeral 19 denotes a paste.
The squeegee holder 27 drives the squeegee holder 27, that is, moves the distal ends of the squeegees 3a and 3b to fill the hole 36 of the base material 18.

Next, the operation will be described. First, plate frame 1
2 and the squeegee heads 3c, 3d are raised to the standby position.

Next, the substrate 18 having a predetermined shape and size shown in FIG. 12 is placed on the upper surface of the paper 15 on the stage 13b by a jig or manually, and the supply reel 15a and the take-up reel 15c are driven to rotate. The paper 15 is moved to set the base material 18 at a predetermined position on the sintered metal 34, and at the same time, the base material 18 is held by vacuum suction from the suction port 13a of the suction tube, and then the plate frame 12 and the squeegee head 3c, 3d
Is lowered to a predetermined position, and then the squeegee heads 3c and 3c
By moving d to the right, the paste 19 on the plate 12a is filled in the holes 36 of the base material 18.

Next, the plate frame 12 and the squeegee head 3
c, 3d are raised to the standby position, the vacuum suction of the suction port 13a is stopped, and then the paper 15 is moved so that the base material 18 in which the paste 19 is filled in the hole 36 is moved to the paper 15
At the same time, after being separated from the position of the sintered metal 34, the operator takes out the base material 18 and cuts the base material 18 through a spacer or the like without contacting the portion filled with the paste 19, and is provided separately. Prepreg 33
The film material 32 was peeled off from the substrate to form the formation layer body 37.

The filling of the paste 19 into the holes 36 of the base material 18 to be subsequently supplied and subsequently manufactured is performed by raising the squeegee 3a after the above-mentioned operation, and instead lowering the squeegee 3b, and 3c and 3d were moved to the left, so that the paste 19 could be filled both back and forth.

[0019]

However, in the paste filling method and the paste filling apparatus having the above-mentioned conventional configuration,
Since the steps of the paste filling and the film material peeling were performed by separate devices, it was necessary for an operator to supply and take out, and it was difficult to improve the productivity.

When the operator takes out the base material 18 filled with the paste 19, the base material 18 is peeled off in a direction perpendicular to the paper 15, and the filled paste 19 adheres to the paper 15 and falls off. The material 18 was bent and the quality was not stable.

Further, if clogging occurs in the sintered metal 34 used to make the suction vacuum force uniform, the effect is reduced, and the sintered metal 34 itself is expensive. .

Further, in the filling step, the squeegee 3
Since there is no means for removing the paste 19 attached to the squeegees 3a and 3b, and the method depends on the natural fall of the paste 19 from the squeegees 3a and 3b, the dropping property of the paste 19 decreases with an increase in the number of sheets to be filled. There was a problem that productivity became worse.

An object of the present invention is to solve the above-mentioned conventional problems, and an object of the present invention is to provide a paste filling apparatus which is inexpensive, has stable quality, and has excellent productivity.

[0024]

According to the present invention, there is provided a paste filling method comprising: a bed provided with a plurality of vacuum suction holes in which at least one or more porous materials capable of intermittent conveyance are arranged; After filling the paste into the holes at predetermined positions of the base material made of the laminated body in a vacuum suction state, transferring the base material to the end of the bed with the porous material, and then fixing the porous material only to the base material After moving horizontally at least the hole diameter of the base material and peeling it from the porous material, release the vacuum suction to take out the base material, transport the porous material to take out the base material, or release the vacuum suction. Then, the base material is transported by a porous material to take out the base material.

Further, the paste filling apparatus in the above paste filling method comprises a supply section having a film material on the front and back sides and sequentially supplying a base material having a hole for filling the paste.
A hoop-shaped second porous material which is stacked and intermittently transported via a porous resin film on a metal bed provided with a plurality of vacuum suction holes, and an upper surface of the second porous material A plate frame abutting on the outer peripheral portion except for the paste-filled portion of the base material placed on the base material, and a filling portion formed of a squeegee for filling the paste into a paste-filling hole of the base material, The second porous material by horizontally moving the upper surface of the second porous material to shift the position with respect to the second porous material, and holding the sheared non-paste-filled portion of the base material A transport section that separates and transports the film material, a peel section that peels and separates the film material from the substrate, and a take-out section that removes the substrate that is a formation layer body in a state where the film material is peeled. It is.

According to the present invention, it is possible to reliably fill the holes formed in the base material with the paste, and to transfer the once-filled paste without dropping out of the holes and without causing any bending. It becomes possible to peel and separate the film material from the material.

[0027]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The invention according to claim 1 of the present invention is a method of filling a paste provided in a predetermined position of a base material with a squeezing method using a squeezing method. On a bed provided with a plurality of vacuum suction holes in which at least one porous material is arranged in close proximity, paste is filled in a predetermined position of the base material in a vacuum suction state, and the porous material is used as a base material. After the material is conveyed to the end of the bed, only the base material is moved in the horizontal direction at least the pore diameter provided in the base material in a state where the porous material is fixed, and separated and separated from the porous material, It is a paste filling method of releasing the vacuum suction and taking out the base material, only the base material in a state where the porous material is fixed on the spot without transporting the base material with the porous material after the paste filling. By moving at least the hole diameter of the substrate in the horizontal direction. Since the substrate is transported after being separated and separated from the porous material, the effect of undulation and wrinkling of the porous material generated during transport of the substrate is eliminated, and the paste filled in the holes of the substrate adheres to the porous material and falls off It has the effect of disappearing.

According to a second aspect of the present invention, there is provided a method of filling a paste provided in a predetermined position of a substrate with a squeezing method, wherein at least one porous material which can be intermittently conveyed is used. On a bed provided with a plurality of vacuum suction holes arranged in close proximity, after filling the paste at a predetermined position of the base material in a vacuum suction state, the vacuum suction is released and the porous material is fixed. In a state where only the base material is moved in the horizontal direction by at least the pore diameter provided in the base material and separated from the porous material and separated, and then the paste filling method is performed in which the base material is conveyed by the porous material and taken out. The porous material adheres to the table during lifting and transport due to warpage of the base material, eliminating undulation and wrinkling of the porous material, and the paste filled in the holes of the base material adheres to the porous material and falls off Function that disappears A.

According to a third aspect of the present invention, there is provided a method of filling a paste provided in a predetermined position of a substrate with a squeezing method by using a squeezing method. On a bed provided with a plurality of vacuum suction holes arranged in close proximity, filling the holes at predetermined positions of the base material in a vacuum suction state, and fixing the porous material only the base material. A paste filling method in which the material is horizontally displaced by at least the diameter of a hole provided in the base material, separated from the porous material and separated from the porous material, the vacuum suction is released, and the base material is conveyed by the porous material to take out the base material. Since the porous material can be horizontally moved and peeled off from the porous material without being affected by lifting or wrinkling of the porous material at the time of transportation due to warpage of the base material, the paste filled in the holes of the base material is removed by vertical peeling. Attach to porous material and fall off It has an effect that is eliminated.

According to a fourth aspect of the present invention, there is provided the paste filling method according to the first aspect, wherein the vacuum suction force at the time of transferring the substrate is smaller than that at the time of filling the paste. What is necessary is just to set the suction force so that the warp portion of the base material itself does not float, and undulation and wrinkles do not occur in the porous material. It has the effect of being able to be conveyed with low tension and preventing breakage of the porous material.

According to a fifth aspect of the present invention, there is provided a method for separating and separating a porous material from a porous material by moving only a substrate in a horizontal direction at least over a pore diameter provided in the substrate while fixing the porous material. 4. The paste filling method according to claim 3, wherein the vacuum suction force is made smaller than at the time of filling the paste, and only the base material is moved in the horizontal direction at least by the pore diameter of the base material while the porous material is fixed. By making the vacuum suction force at the time of peeling from the porous material smaller than that at the time of filling the paste, the porous material can be peeled with a low tension, and the base material can be prevented from breaking.

The invention according to a sixth aspect of the present invention provides a supply unit for sequentially supplying a base material on which a film material is pasted or laminated on the front and back and which has been subjected to hole processing for paste filling, and a metal provided with a plurality of vacuum suction holes. Hoop-shaped second intermittently conveyed on a bed made of a material via a first porous material
And a plate frame that is placed on the upper surface of the second porous material and abuts on the outer peripheral portion of the base material except for the paste-filled portion, and the paste is filled into the paste filling hole of the base material. The filling section made of the squeegee to be filled and the base material after filling the paste are placed on the second porous material and are horizontally moved, so that the second
A shearing part for displacing the position with the porous material, a conveying part for holding the sheared non-paste filled part of the base material, peeling it off from the second porous material, separating and conveying the same, and a film material from the base material This is a paste filling device consisting of a peeling section that peels off and separates the film and a take-out section that takes out the substrate in a state where the film material is peeled and separated. In addition, the paste once filled can be transported without dropping out of the hole, and the film material can be peeled and separated from the base material.

According to a seventh aspect of the present invention, the shearing portion includes a shearing member having a pin disposed at a predetermined position, and a relief groove for the pin disposed on a bed in contact with the pin of the shearing member. The base material, the first porous material and the second porous material are penetrated by the pin of the shear member, and the first porous material and the second porous material are fixed, and only the base material is pinned. 7. The paste filling device according to claim 6, wherein the paste filling device is configured to move in parallel in the escape groove to separate and separate.
This has the effect of preventing the paste filled at the time of peeling from attaching to the second porous material and falling off.

According to an eighth aspect of the present invention, the shearing portion has a shear member formed of a chuck for holding one end of the base material, and a portion of the bed in contact with the non-filled portion of the base material placed on the bed. It consists of a relief portion provided at a predetermined position, and fits into the relief portion, sandwiches the base material with a shear member, and fixes the first porous material and the second porous material in a state where only the base material is released. The paste filling device according to claim 6, wherein the paste filling device is configured to move in parallel to separate and separate, and has an effect of preventing the filled paste from adhering to the second porous material and falling off.

According to a ninth aspect of the present invention, there is provided the paste filling apparatus according to the sixth aspect, wherein the squeegee of the filling section is provided with a scraping member for the paste remaining on the squeegee. This has the effect of shortening the time required for the squeegee to fall naturally.

According to a tenth aspect of the present invention, there is provided a squeegee stopper means for forming a gap smaller than the squeegee avoiding position on the upper surface of the plate frame and the lower end surface of the squeegee when the squeegee is on the plate frame of the filling portion. Claim 6
Wherein the gap is formed on the squeegee plate frame, so that the paste is likely to remain on the plate frame and the time required for the paste to fall naturally from the squeegee can be reduced.

According to the present invention, the paste filling apparatus according to the sixth aspect is configured such that a thin plate on which a part of the squeegee is slidably contacted is provided on the inner peripheral lower surface of the plate frame of the filling section. This has the effect of preventing the paste from flowing under the plate frame.

According to a twelfth aspect of the present invention, the separation part between the base material and the second porous material of the transfer part is provided with the second porous material on the lower surface side in the direction opposite to the base material transfer direction by 135 degrees or more. 7. The paste filling apparatus according to claim 6, wherein the paste is configured to separate the porous material, and prevents the paste filled during transportation by the second porous material from attaching to the second porous material and falling off. Has the effect of being able to.

According to a thirteenth aspect of the present invention, the peeling section for peeling the film material from the base material at the peeling section has a structure in which the film material is peeled in a direction opposite to the direction of transport of the base material by at least 135 degrees. Item 6 is a paste filling device according to Item 6, which has an effect that, when the substrate is a prepreg, the film material is not damaged and fluffing generated on the surface of the substrate can be minimized and peeling can be performed.

According to a fourteenth aspect of the present invention, at the time of taking out the base material from which the film material has been peeled off at the take-out part, the chuck holding the start end side in the transport direction and the two sides intersecting with the chuck are held respectively. 7. The paste filling apparatus according to claim 6, wherein a side chuck for applying tension in an expanding direction is provided, and when the base material is horizontally moved and sheared, the movement of the second porous material is performed. Can be prevented.

According to a fifteenth aspect of the present invention, when the base material is horizontally moved at the shearing portion to shift the position with respect to the second porous material, the movement of the second porous material is mechanically prevented. The paste filling device according to any one of claims 6 to 8, wherein the paste filling device has a configuration in which a brake portion is provided, and has an effect that the base material can be conveyed without causing deflection.

According to a sixteenth aspect of the present invention, instead of the squeegee in the filling section, a filling head made of an elastic material having a paste storage section therein is provided, and one end of the filling head is brought into close contact with the base material. The paste filling apparatus according to claim 6, wherein the paste is filled while applying pressure to the paste, and has an effect that a minute hole can be filled with the paste.

According to the seventeenth aspect, when the paste filling is started or when the paste filling is temporarily stopped and the paste filling is started again, the second porous material on the bed is at least as long as the length of the base material. 7. The paste filling apparatus according to claim 6, wherein the base material is placed on the upper surface of the second porous material after transferring the paste. Even if the porous material is present, the porous material is transferred and becomes a new surface, so that it has an effect of preventing dust from clogging the holes of the base material and not filling the paste.

According to the invention described in claim 18, the bed is kept in a vacuum suction state when the second porous material on the bed is moved at least by the length of the base material.
Or the paste filling device according to 17, wherein the second porous material is sucked and sent over the entire surface of the bed,
This has the effect of preventing wrinkles and undulations from being generated in the second porous material and preventing the paste from adhering to the second porous material and falling off.

According to a nineteenth aspect of the present invention, the base material having been filled with the paste is horizontally moved on the second porous material so as to be displaced from the second porous material, and then the base material is sheared. When the non-paste-filled portion of the material is held and the base material is transferred to the transfer portion that separates and separates from the second porous material and is transferred, at the same time a part of the base material is held by the transfer portion, 7. The paste filling apparatus according to claim 6, wherein the paste is conveyed in a state of vacuum suction with the bed, wherein the second porous material is free from wrinkles and undulations, and the paste is used as the second porous material. It has an effect of preventing it from being attached to and falling off.

According to a twentieth aspect of the present invention, when the base material after filling the paste in the shearing portion is horizontally moved on the second porous material, the bed is brought into contact with the second porous material in a vacuum suction state. 7. The paste filling apparatus according to claim 6, wherein the paste is shifted in position. The influence of wrinkles and undulations of the second porous material is eliminated, and the influence of floating of the base material itself is eliminated. It has an effect of preventing the adhesive from being attached to the second porous material and falling off.

According to a twenty-first aspect of the present invention, when the base material filled with the paste in the shearing section is horizontally moved on the second porous material while the bed is in a vacuum suction state, the vacuum at the time of filling the paste is used. The paste filling device according to claim 6, wherein the paste filling device is configured to be smaller than the suction force, and has an effect of reducing the load on the pin of the shear member and preventing the base material from breaking.

According to a twenty-second aspect of the present invention, the bed is provided with a plurality of holes for vacuum suction in which the peripheral portion of the base material and the contact portion or at least four corners have a large vacuum suction force. A paste filling apparatus according to any one of claims 6, 20, and 21, wherein the peripheral portion of the base material where warpage of the base material is likely to occur is horizontally moved in a state in which the base material is in close contact with the second porous material. Since the paste can be peeled off by shearing, the paste has an effect of preventing the paste from adhering to the second porous material and falling off.

According to a twenty-third aspect of the present invention, the bed is provided with a plurality of holes for vacuum suction having a hole diameter in contact with the peripheral portion of the base material larger than the other hole diameters.
20, 21 or 22, wherein the paste filling apparatus according to any one of 20, 21 and 22 is horizontally moved in a state in which the substrate peripheral portion where warpage of the substrate is likely to occur is in close contact with the second porous material. Since it can be peeled off by shearing, it has an effect of preventing the paste from adhering to the second porous material and falling off.

According to a twenty-fourth aspect of the present invention, there is provided a bed having a plurality of holes for vacuum suction, wherein the vacuum suction source is composed of two systems, a paste filling portion of the base material and a peripheral portion. A paste filling apparatus according to any one of 20, 21, 22, and 23, wherein the vacuum suction force at the peripheral portion of the substrate can be increased, and the substrate is likely to be warped. Since the peripheral portion can be horizontally moved in a state of being in close contact with the second porous material and can be sheared off, it has an effect of preventing the paste from adhering to the second porous material and falling off.

According to a twenty-fifth aspect of the present invention, a single vacuum suction source is used, and a plurality of vacuum suction sources are separately branched into a paste filling portion and a peripheral portion of the substrate, and the vacuum suction force is individually controlled. Claims 6, 20, 21, wherein the bed is provided with holes.
22. A paste filling apparatus according to any one of 22 and 23, wherein the peripheral portion of the base material where warpage of the base material is apt to occur is horizontally moved in close contact with the second porous material and sheared off. Therefore, the paste has an effect of preventing the paste from adhering to the second porous material and falling off.

In the invention according to claim 26, the porous material and the first and second porous materials are a nonwoven fabric such as paper or a porous resin film having air permeability and liquid absorbability. 6 to 8, 12, 15, 17 to 21 according to any one of the paste filling apparatus,
The air permeability can transmit the vacuum suction force of the bed to the base material, and if the absorbency of the liquid is good, it absorbs the resin component etc. in the paste and raises the paste viscosity at the interface with the porous material to the porous material. Has the effect that the amount of paste adhered to the paste can be made small and stable.

According to a twenty-seventh aspect of the present invention, the base material is a prepreg sheet or a ceramic green sheet comprising a nonwoven fabric and a thermosetting resin having a film material on both sides, or a woven fabric and a thermosetting resin. ~ 8,12 ~
25. The paste filling apparatus according to any one of the above 25, which has an effect that filling of the paste can be surely performed.

According to a twenty-eighth aspect of the present invention, there is provided any one of the sixth, ninth, sixteenth, seventeenth, and nineteenth to twenty-first aspects, wherein the paste is mainly composed of powder of copper, silver, or an alloy thereof. The paste filling apparatus described above has an effect that filling of paste is easy and conductor resistance is reduced.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a cross-sectional view of a main part showing a configuration of a paste filling apparatus according to a first embodiment of the present invention, FIG. 2 is a perspective view showing the whole configuration, and FIG. 3 is a main part showing a configuration of a rotary paste filling apparatus. FIG. 4 is a perspective view, and FIG. 4 is a cross-sectional view of a main part showing a configuration of a paste filling device using a die coating method. Parts having the same configurations as those described in the related art will be assigned the same reference numerals, and detailed description thereof will be simplified.

First, as shown in FIG. 2, the entire paste filling apparatus is composed of a supply section 1, a filling section 2, a squeegee mechanism 3, a transport section 4, a peeling section 5, an extracting section 6, and a stocker 7. .

In FIG. 1, reference numeral 8 denotes a lifter movable vertically and horizontally. One or more holders 8b such as chucks or suction ports are provided on the lower surface. Alternatively, the base material 18 made of a laminate placed on the supply plate 8 a made of a resin material or the like is vacuum-sucked or chucked, and is conveyed to the filling unit 2 by moving the lifter 8.

Reference numerals 3c and 3d denote squeegee heads, 27 denotes a squeegee holder, and 3a and 3b denote squeegees, constituting the squeegee mechanism 3.

Reference numeral 12 denotes the paste 19 in the holes 36 of the base material 18.
, A plate frame configured to be in contact with the outer peripheral portion excluding the portion filled with, 12a is a plate, 13a is a suction port, 13c is a slide shaft, 13d is a bush, and 13b is one end of 45.
An acute angle of less than 10 degrees, that is, 13
The stage is made of a metal material having a shape of 5 degrees or more, and has a built-in bed 13 provided with a plurality of suction holes 13f.

Reference numeral 14 denotes a hoop-shaped porous resin film which is used as a first porous material made of a resin material having uniform porosity and excellent in solvent resistance and the like, and is supplied from a supply reel 14a and is connected to one end of a stage 13b. And a part of the upper surface and the upper surface of the bed 13 while being brought close to or in contact therewith, and wound on the take-up reel 14b.

Reference numeral 15e denotes a transporting paper made of Japanese paper or the like used as a hoop-shaped second porous material having excellent air permeability and liquid absorbability, supplied from a supply reel 15a, and guided by guide rollers 15b. The take-up reel 15c passes through the upper surface of the porous resin film 14 movable on the upper surface of the bed 13 by the above-described arrangement and the one end formed at an acute angle of the stage 13b while approaching or abutting.
Is intermittently conveyed.

Reference numeral 9 denotes a supply reel 15a and a guide roller 15.
A brake section installed between the paths of b, and an actuator 9a having a tip end movably mounted with an elastic body 11 made of a rubber material or the like abutting on one side of the paper 15e, and a paper 15e at a position facing the actuator 9a. It is constituted by a block 10 made of a metal material or a resin material or the like, which moves the elastic body 11 by driving the actuator 9a, and clamps the paper 15e by the block 10 to perform braking. It is configured.

Reference numeral 16 denotes a shearing chuck, which is capable of performing a chucking operation and can be moved horizontally. The conveying chuck 4 holds one end of the base material 18 filled with the paste 19 in the hole 36.
The substrate 18 transported from the transporting body 4a is transported to the peeling unit 5 by the transporting body 4b disposed adjacent to the transporting body 4a.

Reference numerals 5a and 5b denote a pair of peeling plates constituting the peeling section 5, one end of which is at an acute angle of 45 degrees or less so as to sandwich the end of the transporting body 4b, that is, with respect to the transport direction of the prepreg 33 in the forming layer body 37. The film material 32 is peeled from the base material 18 and the film material 32 is passed through the film material 32 while approaching or contacting the lower and upper surfaces of the peeling plates 5a and 5b. Not shown)
And the prepreg 33 in the formation layer body 37 from which the film material 32 has been peeled off from the base material 18 is configured to be mounted on a take-out plate 6b which can be moved left and right by the drive roller 6a of the take-out unit 6. Things.

Next, the operation will be described. First, the base material 18 of the laminate composed of the prepreg 33 such as glass epoxy, aramid epoxy, or paper epoxy and the film material 32 placed on the supply plate 8a of the supply unit 1 is positioned for each sheet, and the lifter 8 is positioned. Of the paper 15e in the filling section 2 and is conveyed by the movement of the lifter 8.

Next, the braking of the paper 15e by the elastic body 11 and the block 10 by the driving of the actuator 9a in the brake section 9 is released, and the paper 15e is moved rightward in the figure by driving the supply reel 15a and the take-up reel 15c. It is moved at regular intervals and transported to the upper surface of the bed 13 on which the hoop-shaped porous resin film 14 for preventing clogging is set.

At the start of the filling of the paste 19, dust generated during the cleaning work when the paste 19 is replaced or scattered dust may adhere to the paper 15e. In operation, the base material 18 is conveyed after automatically feeding at least the paper 15e of the size of the base material 18.

After setting at the predetermined position, the paper 15e is braked by the elastic body 11 and the block 10 by the actuator 9a to hold the base material 18 at that position.

Then, by vacuum suction through the suction port 13a of the suction tube, the substrate 18 is held by vacuum suction through the suction hole 13f of the bed 13. At this time, the local vacuum suction force is converted into a uniform vacuum suction force over the entire surface by the porous resin film 14, and the base material 18 is fixed and held uniformly via the paper 15e having good air permeability. Subsequently, the stage 13b including the bed 13 is raised or
By lowering the plate frame 12 and the squeegee mechanism 3, a predetermined interval is set between the lower surface of the plate 12 a of the plate frame 12 and the upper surface of the substrate 18.

Next, the paste 19 on the plate 12a is filled into the holes 36 of the base material 18 by the same driving operation of the squeegee mechanism 3, that is, the squeegees 3a and 3b as described in the prior art. The paste 19 uses powder of copper, silver and their alloys having an average of 2 μm as a conductive filler, a thermosetting epoxy resin (solvent-free type) as a resin, and an acid anhydride-based curing agent as a curing agent. 85
3 wt%, 12.5 wt%, 2.5 wt%
It is kneaded sufficiently with this roll.

Thereafter, the vacuum suction of the suction port 13a of the suction tube is stopped, the stage 13b or the plate frame 12 and the squeegee mechanism 3 are returned to the original positions, and the elastic body 11 and the block 1 are returned.
The brake holding by 0 is released, the paper 15e is moved, and the base material 18 is conveyed to one end of the stage 13b at an acute angle and stopped. Further, the stage 13b or the plate frame 12 and the squeegee mechanism 3 are returned to their original positions in the vacuum suction state of the suction port 13a of the suction tube, the brake holding by the elastic body 11 and the block 10 is released, and the paper 15e is moved. If the base material 18 is conveyed to one end of the stage 13b at an acute angle and stopped, the paper 15e can be conveyed without wrinkles or undulations. As a result, the paste 19 hardly falls out of the holes 36.

Further, if the suction force during the conveyance is smaller than that at the time of filling the paste, the paper 15e can be moved with a low tension, so that the breakage of the paper 15e can be prevented. The suction force during the conveyance may be such that the base material 18 does not float due to detachment or sliding from the paper 15e.

After the movement of the paper 15e is stopped by the elastic body 11 and the block 10, the movement of the base material 18 is stopped.
Of the non-paste-filled portion is sandwiched by the shearing chuck 16 and the base material 18 is slightly moved horizontally with respect to the paper 15e, so that the upper surface of the paper 15e and the paste 19 at the lower portion of the hole 36 of the base material 18 are separated. Release contact. Further, after the movement of the paper 15 e is prevented by the braking and holding by the elastic body 11 and the block 10, the leading end of the non-paste-filled portion of the base material 18 is sandwiched and held by the shearing chuck 16, and is horizontally placed with respect to the paper 15 e. When the base material 18 is slightly moved to release the contact between the upper surface of the paper 15e and the paste 19 in the lower part of the hole 36 of the base material 18, if the suction is performed in the vacuum suction state of the suction port 13a of the suction tube, the paper Since the base material 18 can be translated in a state where the paper 15e and the base material 18 are in close contact with each other without undulations and wrinkles of the base material 15e, the separation from the paper 15e is stabilized.

Thereafter, the paper 15e is released from the braking and holding state, and in synchronization with the movement of the base material 18 by the shear chuck 16, the paper 15e moves to the lower surface in the direction opposite to the direction in which the base material 18 is conveyed by 135 ° or more. Then, it is wound on the winding reel 15c.

As described above, the paste 19 is
The base material 18 composed of the prepreg 33 and the film material 32 is transferred to the transport unit 4 while being sequentially held while holding the non-paste-filled portion while minimizing the adhesion to e. At the same time that a part of the base material 18 is
If the paper 15e is vacuum-adsorbed, the paper 15e is wound up in a state where it is completely absorbed by the bed 13, so that the paste 15 is filled in the hole 36 of the next base material 18 without wrinkles or undulations in the paper 15e. The filling quality is stable. At this time, it is more preferable that the vacuum suction force be smaller than that at the time of filling the paste in order to prevent the paper 15e from being broken.

The base material 1 is transported by the transport bodies 4a and 4b of the transport section 4.
8 to the peeling unit 5, and the film material 3 of the base material 18 in the opposite direction of 135 ° or more with respect to the transport direction on both upper and lower surfaces.
2 is peeled off via the peeling plates 5b and 5a.

The upper or lower surface of the film material 3
In the case where 2 is peeled off, only one side may be used.

The formation layer body 37 from which the film material 32 of the base material 18 has been peeled is positioned on the take-out plate 6b of the take-out section 6, and is conveyed to the stocker 7 shown in FIG. It is. The porous resin film 14 has a predetermined number of fillings,
When the paste 19 is filled into the hole 36 of No. 8, the new porous resin film 14 is set on the bed 13 by the rotational drive of the supply reel 14a and the take-up reel 14b, and a predetermined air permeability is secured. It is.

Next, as another example in which the configuration of the filling section 2 is mainly different, a rotary paste filling apparatus will be described with reference to a perspective view of a main part in FIG.

In FIG. 3, reference numeral 17 denotes a cylindrical rotatable drum made of a metal material or the like, and an opening 17a for supplying or filling the paste 19 is provided on the circumferential surface.
18 is a substrate, 3a is a squeegee, 45 is a drum 17 at one end.
A squeegee chuck 47 is attached to one end of the drum 17 and is rotatably attached to one end of the fixed shaft 46. It is.

A drive motor 50 has a pulley 49 connected to the end of the rotating shaft, and drives the drum 17 to rotate by a belt 48 stretched between the pulley 49 and the pulley 49.

Reference numeral 52 denotes a slider to which the other end of the fixed shaft 46 is connected. The slider 52 moves up and down along the guide rail 51 by driving the actuator 53 to move the fixed shaft 46, that is, the squeegee 3a up and down. The state of contact between the base material 18 and the like is adjusted.

Reference numeral 54 denotes a pair of arms each having one end through which the tip of a fixed shaft 46 is inserted and the drum 17 rotatably mounted.
The adjustment of the contact between the outer circumference and the base material 18 and the setting such as pressing are performed.

Next, the operation will be described. First, the paste 19 is supplied from the opening 17a,
By the driving operation of the squeegees 3 and 55, the tip of the squeegee 3a and the outer circumferences at both ends of the drum 17 are brought into contact with the base material 18. Subsequently, the rotation of the drive motor 50 rotates the drum 17 while the squeegee 3a is fixed. Then, the paste 19 is filled into the predetermined holes 36 of the base material 18 while transferring the base material 18.

In order to fill the small holes 36 of the base material 18 with the paste 19, as shown in FIG. The paste 19 is supplied to a filling head 60 provided with a paste storage portion 59 formed by a side plate 56 made of a material or the like, and pressure is applied to the paste 19 from above (an application mechanism is not shown). The paste 19 may be filled in the minute holes 36 of the base material 18 by moving 60 to the left.

FIG. 5 is a perspective view of a main part showing a configuration of a shearing part in a filling part according to another embodiment of the present invention. In FIG. 5, reference numeral 21 denotes a pair of levers, each of which is a shearing member, and has a holding pin 21a made of a metal material and having an acute angle at one end, and is movable vertically and horizontally (a driving mechanism is not shown). It is. Vacuum suction holes (not shown) of a shape and size through which the holding pins 21a penetrate the bed 13 and do not come into contact with the inner surface even during the movement operation.
Is provided.

Further, the bed 13 has a suction hole at a portion in contact with four corners, which is a non-paste-filled portion of the base material 18, having a hole diameter (not shown) twice as large as the other suction holes. The peripheral portion 18 has a large vacuum suction force. In addition,
The vacuum suction source may be divided into two systems (not shown), or the vacuum suction source may be branched into two as one system to increase the vacuum suction force in the peripheral portion of the base material 18 by individual control (not shown).

Next, the operation will be described. The paste 19 is filled in the filling section 2, and the squeegee mechanism 3 and the plate frame 12 are filled.
After raising the bed 13 or lowering the bed 13 to set a sufficient clearance between the plate frame 12 and the substrate 18, the pair of levers 21 waiting on the side of the bed 13
Move to the upper surface of the non-paste filled portion by swinging or sliding operation.

Then, by lowering the holding pin 21a perpendicularly to the base material 18, the tip of the holding pin 21a is inserted through the base material 18, the paper 15e and the porous resin film 14 to penetrate the vacuum suction hole. . Next, the brake unit 9
After the paper 15e is braked and held by the elastic body 11 and the block 10 to prevent the movement, the paired levers 21 are moved in the direction of the arrow to keep the paper 15e fixed (the moving part of the holding pin 21a is the paper). The base 18 (which cuts the porous resin film 14 from the base 15e) is moved slightly horizontally with respect to the paper 15e to release the contact between the paste 19 below the hole 36 of the base 18 and the paper 15e.

If this operation is performed in a vacuum suction state, the paper 1
In a state where the base material 5e and the base material 18 are in close contact, the base material 18 is removed from the paper 15e.
Can be separated and separated. Further, it is possible to prevent the base material 18 from breaking when the vacuum suction force is made smaller than when the paste is filled. The vacuum suction force at this time is
8 can be separated from the paper 15e in a slidable contact state and does not float. Further, the vacuum suction force of the peripheral portion where the warpage of the base material 18 is likely to occur, particularly the four corner portions, is slightly reduced. If it is made higher, it is possible to operate with a lower vacuum suction force as a whole, which is even better.

Then, after the movement inhibition of the paper 15e is released and the holding of the base material 18 by the holding pins 21a is also released, the predetermined conveyance of the base material 18 is performed by the movement of the paper 15e.

FIG. 6 is a perspective view of an essential part showing another configuration of the shearing portion. In FIG. 6, 13 g is a notch-shaped relief portion provided on both side bands of the bed 13, and 22 is a relief portion 13 g
A pair of chucks installed in the inside, a pinch 22a that can be opened and closed freely is attached to the tip, and can be set in the vertical direction and movable in the horizontal direction (the drive mechanism is not shown). Make up.

Next, the operation will be described. The paste 19 is filled in the filling section 2, and the squeegee mechanism 3 and the plate frame 12 are filled.
After raising the bed or lowering the bed 13 to set a sufficient clearance between the plate frame 12 and the base material 18, the chucks 22 waiting at the release portion 13 g are moved to the both side portions, which are non-paste filled portions of the base material 18. Then, the both sides, which are the non-paste filled portions, of the base material 18 are held by opening and closing the holding claws 22 a of the chuck 22.

Next, after the paper 15e is braked and held by the elastic body 11 and the block 10 in the brake portion 9 to prevent the movement, the base material 18 is moved slightly horizontally with respect to the paper 15e, and the hole of the base material 18 is formed. Paste 19 and paper 15e at the bottom of 36
Release the contact. Thereafter, the movement prevention of the paper 15e is released, and the holding of the base material 18 by the holding claws 22a is also released, so that the base material 18 is transported by the movement of the paper 15e.

FIGS. 7 (a) to 7 (e) are cross-sectional views of essential parts for explaining a paste scraping mechanism attached to a squeegee of the squeegee mechanism and an operation process thereof according to the embodiment of the present invention. In FIG. 7, reference numeral 23 denotes a paste filling portion of an opening on the plate 12a, reference numeral 24 denotes a non-paste filling portion of a non-opening portion, and reference numeral 25 denotes a plate made of a metal material or the like as a scraping member. The squeegee 3b is disposed so as to be in contact with the inner side surface and to be movable in the longitudinal direction, that is, the longitudinal direction of the squeegee 3b.

Next, the operation will be described. In order to fill the holes 36 of the base material 18 with the paste 19, first, FIG.
The squeegee 3a is raised as shown in FIG.
Is the paste filling portion 2 of the plate 12a provided in the plate frame 12.
3. The paste 19 around the plate 12a is moved to a predetermined position of the non-paste filling portion 24 on the plate 12a.

Next, as shown in FIG. 7B, the squeegee 3a
And then, as shown in FIGS. 7 (c) and (d),
The squeegees 3a and 3b are moved to the left, and the plate 25 is lowered until the squeegee 3a reaches the paste filling portion 23 of the plate 12a to forcibly remove the paste 19 attached to the inner side surface of the squeegee 3b. As shown in FIG. 7E, the paste 19 necessary for filling the hole 36 of the base material 18 is supplied near the tip of the squeegee 3a, and the paste 19 is effectively used for filling as much as possible. is there.

Note that the same operation of the plate (not shown) which is a scraping member in the squeegee 3a can be performed when the return path is changed from the return path to the outward path, that is, in the rightward operation in the figure.

FIGS. 8 (a) to 8 (e) are cross-sectional views of essential parts for explaining an operation process of scraping off the paste adhered to another squeegee of the squeegee mechanism. The operation will be described. First, as shown in FIG. 8A, the squeegee 3b is raised, and the squeegee 3a removes the remaining paste 19 around the paste filling portion 23 of the plate 12a provided in the plate frame 12.
The paste 19 is moved to a predetermined position of the non-paste filling portion 24 on the plate 12a.

Next, as shown in FIG.
a is controlled by means of a squeegee stopper (not shown) to raise only a small gap from the plate 12a with respect to the avoidance position of the squeegee 3a,
Descend.

Then, as shown in FIG. 8C, the squeegees 3a and 3b are moved in a direction opposite to the traveling direction up to that time, that is, leftward. By this operation, the squeegee 3a
The paste 19 attached to the squeegee 3b is pulled by its viscosity and surface tension, and is moved to the non-paste filling portion 24 so that the paste 19 necessary for filling is supplied to the vicinity of the tip of the squeegee 3b so that the paste 19 can be effectively used. I do.

Then, as shown in FIG. 8D, just before the squeegee 3a reaches the paste filling portion 23, the squeegee stopper is released to raise the squeegee 3a, and then, as shown in FIG. Further, the squeegees 3a and 3b are moved leftward to fill the holes 36 of the base material 18 with the paste 19.

Note that the same operation as described above can be performed by the same operation by the squeegee stopper (not shown) of the squeegee 3b even when the operation is changed from the return path to the outward path, that is, in the rightward operation.

FIG. 9 is a cross-sectional view of a main part showing the configuration of the plate frame of the filling section in the embodiment of the present invention. In FIG. 9, reference numeral 26 denotes a thin plate made of a material such as metal or resin having low rigidity and made of tape or the like. The plate 26 is attached to the plate frame 12 at a position where it comes into sliding contact with both ends of the squeegees 3a and 3b.
The paste is attached to both ends of the paste filling portion 23 of FIG.

The thickness of the thin plate 26 is the squeegee 3a,
3b is rigid enough to follow the pressing force of 3b,
The clearance between the bed 13 and the plate frame 12 is sealed, and the paste 19 by the operation of the squeegees 3a and 3b
2 is prevented from wrapping around the lower surface.

FIG. 10 is a plan view of a main part showing the structure of the take-out unit in the embodiment of the present invention. In FIG. 10, reference numeral 28 denotes two pairs of fixed cams, each of which has an inclined portion at the leading end in the transport direction of the formation layer body 37. 57 is a pair of fixed transport rails, 58 is a sliding body that is movable across the transport rail 57, and 30 is a plurality of take-out chucks that hold the leading end of the prepreg 33 in the formation layer body 37 by opening and closing. .

Reference numeral 31 denotes an oscillating type side chuck which sandwiches both side bands of the prepreg 33 in the formation layer body 37 by opening and closing, and one end of which is swingably held by a fulcrum pin 31a, and the other end of which has the above-mentioned circumference. A rotatable cam follower 31b abutting on the inner surface side of the fixed cam 28 is provided.
The side chuck 31 is swung about the fulcrum pin 31a as a fulcrum.

Reference numeral 29 denotes a tension type spring, which includes a sliding member 58 and a cam follower 3 of the side chuck 31.
The cam follower 31b is biased toward the inner surface of the fixed cam 28.

Next, the operation will be described. First, substrate 1
When the film material 32 is peeled from the prepreg 8, the prepreg 33 in the formation layer body 37 is clamped by the chuck 30 for taking out the leading end in the traveling direction and transported in the transport direction indicated by the arrow.

At this time, both side portions of the prepreg 33 in the formation layer body 37 are sandwiched by the swingable side chucks 31, and the tension is applied to the outside by the tension of the spring 29 by the inclined portion of the fixed cam 28. This prevents the prepreg 33 from being bent in the layer body 37.

After the transfer, the take-out plate 6 shown in FIG.
After the formation layer body 37 is received and positioned on the four sides b,
It is configured to be transported to the stocker 7 shown in FIG.

In the embodiment described above, a prepreg sheet of aramid epoxy made of a non-woven fabric and a thermosetting resin having a film material on the front and back surfaces of a base material, or a glass epoxy made of a paper phenol, a woven fabric and a thermosetting resin is used. Used
A ceramic green sheet with a film material on the front and back may be used.If the pin cannot penetrate the base material at the sheared portion, the paste is filled in the same way if the pin is inserted beforehand and the pin is inserted in the position where it contacts the pin. Is possible.

[0113]

As described above, since the paste filling method and the paste filling apparatus according to the present invention perform the two steps of paste filling and film material peeling continuously, there is no need for an operation by an operator and the paste adheres to the squeegee. The paste can be effectively used to forcibly scrape off the paste, and the process time is shortened to improve the productivity.

In addition, the filling of the paste, that is, the porous resin film can be uniformly sucked without clogging at the time of filling, and the filled paste adheres to the paper and drops off by the shear feeding. Since the substrate can be transported and taken out without bending the base material, the quality is stabilized.

[Brief description of the drawings]

FIG. 1 is a sectional view of a main part showing a configuration of a paste filling apparatus according to an embodiment of the present invention.

FIG. 2 is a perspective view showing the entire configuration of the paste filling apparatus.

FIG. 3 is a perspective view of a main part showing a configuration of a rotary paste filling apparatus.

FIG. 4 is a cross-sectional view of a main part showing a configuration of a paste filling apparatus using a die coating method.

FIG. 5 is a perspective view of a main part showing a configuration of a shearing section in the filling section.

FIG. 6 is an essential part perspective view showing the configuration of another shearing portion.

FIG. 7 is an essential part cross-sectional view for explaining a scraping mechanism of the squeegee mechanism and an operation process thereof;

FIG. 8 is an essential part cross sectional view for explaining another scraping operation process of the squeegee mechanism.

FIG. 9 is a cross-sectional view of a main part showing a configuration of a plate frame of the filling unit.

FIG. 10 is a plan view of a main part showing the configuration of the take-out unit.

FIG. 11 is a manufacturing process diagram showing an example of a manufacturing process of a double-sided or multilayer substrate.

FIG. 12 is a perspective view of a main part showing a configuration of a base material composed of a prepreg and a film material.

FIG. 13 is a sectional view of a main part showing a configuration of a conventional paste filling apparatus.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 supply unit 2 filling unit 3 squeegee mechanism 3a, 3b squeegee 3c, 3d squeegee head 4 transfer unit 4a, 4b transfer unit 5 separation unit 5a, 5b separation plate 6 extraction unit 6a drive roller 6b extraction plate 7 stocker 8 lifter 8a supply plate 8b Holder 9 Brake unit 9a Actuator 10 Block 11 Elastic body 12 Plate frame 12a Plate 13 Bed 13a Suction port 13b Stage 13c Slide shaft 13d Bush 13f Suction hole 13g Relief unit 14 Porous resin film 14a Supply reel 14b Take-up reel 15, 15e Paper 15a Supply reel 15b, 15d Guide roller 15c Take-up reel 16 Shear chuck 17 Drum 17a Opening 18 Base material 19 Paste 20 Elastic seal 21 Lever 21a Holding pin 22 Chuck 22 Pinching claw 23 paste filling part 24 non-paste filling part 25 plate 26 thin plate 27 squeegee holder 28 fixed cam 29 spring 30 chuck 31 side chuck 31a fulcrum pin 31b cam follower 32 film material 33 prepreg 34 sintered metal 35, 40 conductive foil 36 hole 37 Forming layer body 38, 41 Conductive pattern 39 Double-sided board 42 Multi-layer board 45 Squeegee chuck 46 Fixed shaft 47 Pulley 48 Belt 49 Pulley 50 Drive motor 51 Guide rail 52 Slider 53 Actuator 54 Arm 55 Actuator 56 Side plate 57 Transfer rail 58 Sliding body 59 Paste Storage section 60 Filling head

 ──────────────────────────────────────────────────の Continuing on the front page (72) Inventor Kanji Kato 1006 Kazuma Kadoma, Osaka Prefecture Inside Matsushita Electric Industrial Co., Ltd. (72) Inventor Yusho Minato 1006 Kazama Kadoma, Kazuma Osaka Prefecture Inside Matsushita Electric Industrial Co., Ltd. (72) Inventor Kohei Harazono 1006 Kazuma Kadoma, Osaka Pref.Matsushita Electric Industrial Co., Ltd. (72) Inventor Toshihiko Yamamoto 1006 Odaka Kadoma, Kadoma City, Osaka Pref. Matsushita Electric Industrial Co., Ltd. (72) Toshiaki Takenaka Matsushita Electric Industrial Co., Ltd., 1006 Kadoma, Kadoma, Osaka Prefecture (72) Yukihiro Hiraishi, Inventor 1006 Kadoma, Kadoma, Osaka Pref.

Claims (28)

[Claims] 1. A method of filling a paste provided in a predetermined position of a base material with a paste using a squeezing method, wherein a plurality of intermittently transportable porous materials are arranged in close proximity to each other. On a bed provided with holes for vacuum suction, filling the holes at predetermined positions of the base material in a vacuum suction state, and transporting the base material to the end of the bed with a porous material,
With the porous material fixed, the base material alone is moved in the horizontal direction by at least the hole diameter provided in the base material, separated from the porous material and separated, and then the paste for releasing the vacuum suction and taking out the base material Filling method. 2. A method for filling a paste provided in a predetermined position of a base material with a squeezing method using a squeezing method, wherein a plurality of intermittently transportable porous materials are arranged in close proximity to each other. On a bed provided with holes for vacuum suction, after filling the paste in a predetermined position of the base material in a vacuum suction state, releasing the vacuum suction and fixing the porous material only the base material A paste filling method in which the substrate is horizontally displaced by at least the diameter of a hole provided in the substrate, separated from the porous material and separated, and then conveyed by the porous material to take out the substrate. 3. A method of filling a paste provided in a predetermined position of a substrate with a squeezing method, wherein a plurality of intermittently transportable porous materials are arranged close to each other. On a bed provided with holes for vacuum suction, filling the holes at predetermined positions of the base material in a vacuum suction state, and fixing only the base material in the horizontal direction with the porous material fixed at least to the base material. A paste filling method for removing the base material by releasing the vacuum suction after transferring by the porous material after being separated from the porous material by moving by a diameter larger than that provided in the above. 4. The paste filling method according to claim 1, wherein the vacuum suction force at the time of transporting the substrate is smaller than at the time of filling the paste. 5. The method of filling a paste with a vacuum adsorbing force at the time of separating and separating from a porous material by moving only the substrate in a horizontal direction at least a diameter of a hole provided in the substrate while fixing the porous material. 4. The paste filling method according to claim 3, wherein the paste filling time is smaller than that of the paste filling method. 6. A supply section for sequentially supplying a base material which has been subjected to hole processing for paste filling, in which a film material is stuck or laminated on the front and back sides, and is provided on a bed made of a metal material provided with a plurality of holes for vacuum suction. A hoop-shaped second porous material which is intermittently conveyed by being stacked and arranged via the first porous material;
A plate frame which is placed on the upper surface of the porous material except for the paste filling portion of the base material, which comes into contact with the outer peripheral portion, and a filling portion formed of a squeegee for filling the paste into the paste filling hole of the base material,
By placing the base material after the paste filling on the second porous material and moving it horizontally, a shearing part for displacing the position with the second porous material, a non-paste filling part of the sheared base material A transporting section that holds and peels from the second porous material and separates and transports, a peeling section that peels and separates the film material from the substrate, and a substrate in a state where the film material is peeled and separated. A paste filling device consisting of a take-out section. 7. A shearing portion comprising a shearing member having a pin disposed at a predetermined position, and a relief groove for the pin disposed on a bed in contact with the pin of the shearing member. With the first porous material and the second porous material fixed by penetrating the porous material and the second porous material with the pin of the shear member, only the base material is translated in the pin escape groove. The paste filling device according to claim 6, wherein the paste filling device is configured to be separated by peeling. 8. A shearing member comprising a chuck holding one end of a base material and a relief portion provided at a predetermined position of the bed at a portion in contact with a non-filled portion of the base material placed on the bed. In a state in which the first porous material and the second porous material are fixed while the first porous material and the second porous material are fixed, the base material alone is moved in parallel in the relief portion and peeled off. 7. The paste filling device according to claim 6, wherein the paste filling device is configured to be separated. 9. The paste filling apparatus according to claim 6, wherein the squeegee of the filling section is provided with a scraping member for the paste remaining on the squeegee. 10. A squeegee stopper means for forming a gap having a size smaller than the squeegee avoidance position between the upper surface of the plate frame and the lower end surface of the squeegee when the squeegee is on the plate frame of the filling portion. Paste filling equipment. 11. A thin plate on which a part of a squeegee slides and abuts is provided on the inner peripheral lower surface of the plate frame of the filling portion.
3. The paste filling device according to item 1. 12. A structure in which a separation portion between a base material and a second porous material of a transfer portion is configured to separate the second porous material on a lower surface side in a direction opposite to or more than 135 degrees with respect to the transfer direction of the base material. The paste filling device according to claim 6. 13. The paste filling according to claim 6, wherein the peeling section for peeling the film material from the base material at the peeling section is configured to peel the film material in a direction 135 ° or more opposite to the transport direction of the base material. apparatus. 14. A chuck for holding a starting end side in a conveying direction and both sides intersecting the chuck, and a tension in an expanding direction when taking out a base material from which a film material has been peeled and separated at a take-out section. 7. The paste filling apparatus according to claim 6, wherein a side chuck for applying the pressure is provided. 15. A brake unit for mechanically preventing the movement of the second porous material when the base material is horizontally moved in the shearing unit and shifted from the position of the second porous material. The paste filling device according to any one of claims 6 to 8. 16. A filling head made of an elastic material having a paste storage part provided therein is provided in place of the squeegee of the filling part, and one end of the filling head is brought into close contact with the base material to apply pressure to the paste. 7. The paste filling apparatus according to claim 6, wherein the filling is performed. 17. When the paste filling is started, or when the paste is paused and the paste filling is started again, the second porous material on the bed is transferred at least by the length of the base material, and then the second porous material is transferred. The paste filling apparatus according to claim 6, wherein the base material is placed on the upper surface of the porous material. 18. The paste filling apparatus according to claim 6, wherein the bed is kept in a vacuum suction state when the second porous material on the bed is moved at least by the length of the base material. 19. The non-paste-filled portion of the base material that has been sheared after the paste-filled base material is moved horizontally on the second porous material so as to be displaced from the second porous material. Holding, when transporting the substrate to a transport unit that separates and separates from the second porous material and transports, a part of the substrate is held in the transport unit and at the same time as a vacuum suction state with the bed The paste filling device according to claim 6, wherein the paste filling device is configured to be conveyed. 20. The base material after filling the paste in the shearing part,
7. The paste filling apparatus according to claim 6, wherein when the bed is horizontally moved on the second porous material, the bed is shifted in position from the second porous material in a vacuum suction state. 21. The base material after filling the paste in the shearing part,
7. The paste filling apparatus according to claim 6, wherein when the bed is horizontally moved on the second porous material in a vacuum suction state, the vacuum suction force at the time of filling the paste is smaller. 22. A bed provided with a plurality of holes for vacuum suction in which a portion in contact with a peripheral portion of a base material or at least four corners has a large vacuum suction force. The paste filling device according to any one of the above. 23. The bed according to claim 6, wherein the bed is provided with a plurality of holes for vacuum suction having a hole diameter in contact with a peripheral portion of the base material larger than the other hole diameters. A paste filling device according to one of the preceding claims. 24. A bed provided with a plurality of holes for vacuum suction, wherein the vacuum suction source is composed of a paste filling portion of a base material and a peripheral portion.
3. The paste filling apparatus according to any one of 3. 25. A bed having a single vacuum suction source and two branches into a paste filling portion and a peripheral portion of a substrate, and having a plurality of vacuum suction holes with individually controlled vacuum suction force. The paste filling apparatus according to any one of claims 6, 20, 21, 22, and 23 having a configuration. 26. The porous material according to claim 6, wherein the porous material and the first and second porous materials are a nonwoven fabric such as paper or a porous resin film having air permeability and liquid absorbability.
The paste filling apparatus according to any one of 12, 15, 17 to 21. 27. The prepreg sheet and the ceramic green sheet, wherein the base material is a non-woven fabric having a film material on both sides and a thermosetting resin, or a prepreg sheet made of a woven fabric and a thermosetting resin. The paste filling device according to any one of the above. 28. The paste according to claim 6, 9 or 16, wherein the paste is mainly composed of powders of copper, silver and an alloy thereof.
The paste filling apparatus according to any one of 17, 19 to 21.