JPH1114370A - Vibration gyroscope having pzt thin film and manufacture therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration gyroscope having a PZT (ceramics composed of a solid solution of lead zirconate titanate; lead titanate, lead zirconate) thin film by which the vibration gyroscope can be easily obtained and which can be miniaturized and is strong in a torsion and whose detecting sensitivity can be increased. SOLUTION: A base material 4 of a vibration gyroscope 1 is composed of stainless steel as an elastic metallic body forming a square pole. Mutually orthogonal through holes 10 and 7 are bored in upper and lower both parts of the base material 4, and parallel plate parts 3 and 2 are constituted. A titanium film is formed on outside surfaces of the parallel plate parts 2 and 3 by sputtering or the like, and a PZT thin film 14 is formed on the whole outside surface of the titanium film, and electrode films 15 which are composed of aluminum and have mutually the same area having a thickness of several μm, are formed above and below by a pair on its PZT thin film 14.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrating gyroscope having a PZT thin film and a method for manufacturing the same.

[0002]

2. Description of the Related Art As a conventional vibration gyro, a tuning fork type shown in FIG. 7 and a sound piece type shown in FIG. 8 are known.

As shown in FIG. 7, a tuning fork type vibrating gyroscope 21 has a pair of driving piezoelectric ceramic plates 23 erected at both ends of a connecting portion 22 so as to be parallel to each other, and the plane thereof is oriented in the X direction in the drawing. Are located in A piezoelectric ceramic plate 24 for detection is integrally erected on the center of the upper end of the piezoelectric ceramic plate 23 for driving, and is arranged so that its plane faces the Y direction in the figure. In addition,
The X direction and the Y direction are orthogonal to each other. Then, by applying an alternating voltage to the lower drive piezoelectric ceramic plate 23, the piezoelectric ceramic plate 23 is vibrated in the X and anti-X directions. In this vibration state, the vibration gyro 21
When the rotation around the axis is applied, the detection piezoelectric ceramic 24 is distorted, and the voltage generated at that time is detected, whereby the force applied to the detection piezoelectric ceramic 24 can be detected. This force is called Coriolis force Fc and is generally expressed by the following equation.

Fc = 2mV × Ω (1) where m is the mass of the vibrating gyroscope 21, V is the vibration speed of the vibrating gyroscope 21, and Ω is the angular velocity of the vibrating gyroscope 25 around the Z axis. If the mass m and the vibration velocity V are known, the angular velocity Ω can be derived.

The vibrating gyroscope 25 of the resonating type includes a quadrangular prism-shaped vibrating member 26 made of a constant elastic metal as shown in FIG. A pair of driving piezoelectric ceramic plates 2
7 is attached (only one is shown in the drawing). or,
A pair of piezoelectric ceramic plates for detection 2
8 is attached (only one is shown in the drawing). The vibrating gyroscope 25 vibrates the resonator element vibrator 26 in the X and anti-X directions by applying an alternating voltage to the driving piezoelectric ceramic plate 27. In this state, when rotation about the Z-axis is applied to the vibrating gyroscope 26, the detection piezoelectric ceramics 28 is distorted, and the voltage generated at that time is detected to reduce the Coriolis force acting on the detection piezoelectric ceramics 28. It becomes possible to detect.

By the way, bulk PZT (ceramic made of a solid solution of lead zircon / titanate: lead titanate, lead zirconate) is provided on the driving piezoelectric ceramic plates 23 and 27 and the detecting piezoelectric ceramic plates 24 and 28. Is used.

[0007]

However, the bulk PZT as described above has a problem that it is difficult to reduce the thickness of the bulk itself and to reduce the size of the entire vibrating gyroscope.

Further, when a vibrating gyroscope is formed by sticking a piezoelectric ceramic plate like a vibrating gyroscope of a sound piece type, there is a problem that the sticking process is increased and the bonding accuracy, that is, the positional accuracy is poor. Therefore, there is a problem that it affects the detection sensitivity and the like, and it is difficult to accurately manufacture a homogeneous product.

Further, when the vibrator is a three-dimensional structure,
There is a case where it is difficult to attach the bulk PZT to an arbitrary place, and there is a problem that the attachment place is limited. The Coriolis force Fc, as shown in the above equation (1), increases the Coriolis force when the mass m of the vibrating gyroscope is increased. As a result, the amount of distortion of the piezoelectric ceramic for detection increases. The detection voltage also increases. That is, the detection sensitivity is increased. For this reason, it is preferable that the mass of the vibrating gyroscope is large in order to obtain detection sensitivity. However, in the case of a vibrating gyro using bulk PZT, bulk PZT
Unless the base material constituting T is made large, there is a problem that the mass cannot be increased, and there is a limit in increasing the detection sensitivity.

The Coriolis force Fc, as shown by the above equation (1), increases the Coriolis force when the vibration velocity V is increased. As a result, the amount of distortion of the detecting piezoelectric ceramic increases. Also, the detection voltage increases and the detection sensitivity increases. However, in the case of a tuning fork type vibrating gyroscope, for example, in the case of a tuning fork type vibrating gyroscope, if the bulk PZT base material is thinned, the rigidity is reduced, so that it becomes easy to be twisted and does not vibrate accurately, The distortion for detecting the element is also in a state in which the element is twisted, which causes a problem that accurate detection cannot be performed.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and a first object of the present invention is to provide a vibrating gyro that can be easily obtained, can be downsized, and is resistant to twisting. PZ that can increase detection sensitivity
An object of the present invention is to provide a vibrating gyroscope having a T thin film.

A second object of the present invention is to provide a manufacturing method capable of easily obtaining a vibrating gyroscope having a PZT thin film which can be reduced in size, is resistant to twisting, and can increase detection sensitivity.

[0013]

In order to solve the above-mentioned problems, the invention according to claim 1 has first to fourth side surfaces in a circumferential direction, and the first and third side surfaces are provided. The second side surface and the fourth side surface are provided with a quadrangular prism-shaped elastic metal located at positions opposite to each other by 180 degrees, and a through hole penetrating from the first side surface to the third side surface is formed below the elastic metal. , Second
A first parallel flat plate portion is formed by each of the flat plate portions including the side surface and the fourth side surface, and a through hole penetrating from the second side surface to the fourth side surface is formed in the upper portion of the elastic metal, and the first parallel plate portion is formed. A second parallel flat plate portion is formed by each flat plate portion including the side surface and the third side surface, and a second side surface and a fourth side surface of the first parallel flat plate portion, and a first side surface of the second parallel flat plate portion. A vibrating gyroscope comprising a PZT thin film, wherein a titanium film is formed on the third side surface, a PZT thin film is formed on the titanium film, and an electrode is provided on the PZT thin film. Is the gist.

According to a second aspect of the present invention, first to fourth side surfaces are provided in the circumferential direction, and the first side surface and the third side surface and the second side surface and the fourth side surface are located at positions opposite to each other by 180 degrees. In the lower part of the quadrangular prism-shaped elastic metal, a through hole penetrating from the first side surface to the third side surface is formed to form a first parallel plate portion, and the upper part of the elastic metal is Forming a through hole penetrating from the second side surface to the fourth side surface to form a second parallel flat plate portion, the second side surface and the fourth side surface of the first parallel flat plate portion, and the second parallel flat plate portion Forming a titanium film on the first side face and the third side face by a hydrothermal method.
Forming a PZT thin film on the titanium film;
Forming electrodes on the ZT thin film,
A method of manufacturing a vibrating gyroscope provided with a PZT thin film containing

According to a third aspect of the present invention, in the second aspect, the hydrothermal method comprises stirring a lead nitrate solution and zirconium oxychloride together with a mineralizer, pressurizing and heating to form a seed crystal on the titanium film. The step of obtaining and, for the substrate from which the seed crystal was obtained, a lead nitrate solution, zirconium oxychloride, and a solution of titanium tetrachloride were stirred with a mineralizer, heated and pressed,
The gist of the present invention is a method of manufacturing a vibrating gyroscope having a PZT thin film including the steps of: performing PZT crystal growth on a titanium film and forming a PZT thin film on the titanium film. (Function) According to the first aspect of the present invention, since the vibrating gyroscope includes the first and second parallel flat plate portions, the rigidity is increased and the vibrating gyroscope is resistant to torsion. In addition, the first and second parallel plate portions can adjust the mass of the vibrating gyroscope by the manner of forming the through-holes, thereby improving the detection sensitivity.

According to the second aspect of the present invention, when a through hole penetrating from the first side to the third side is formed in the lower portion of the elastic metal, the first parallel plate portion is formed.
A through hole penetrating from the second side surface to the fourth side surface is formed in the upper part of the elastic metal, and a second parallel plate portion is formed.
Subsequently, a titanium film is formed on the second and fourth side surfaces of the first parallel plate portion and on the first and third side surfaces of the second parallel plate portion.

A PZT thin film is formed on a titanium film by a hydrothermal method, and thereafter, an electrode is formed on each of the PZT thin films to form a vibrating gyroscope. Here, the hydrothermal method refers to a method of depositing and growing crystals from an aqueous solution under heating and pressure. The term “pressurization” is intended to include not only a case where pressure is positively applied but also an increase in vapor pressure due to heating in a pressure vessel. The hydrothermal method is generally referred to as a hydrothermal synthesis method, but in this specification, is referred to as a hydrothermal method.

According to the third aspect of the invention, the lead nitrate solution and the zirconium oxychloride are stirred together with the mineralizer,
By applying pressure and heat, seed crystals are obtained on the titanium film. Thereafter, a lead nitrate solution, a zirconium oxychloride, and a titanium tetrachloride solution were stirred with a mineralizer with respect to the elastic metal from which the seed crystals were obtained, heated and pressed, and PZT was applied to each of the titanium films. When the crystal growth of is performed, a PZT thin film is obtained on the titanium film.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below with reference to FIGS.
This will be described with reference to FIG. FIG. 1 shows a perspective view of the vibrating gyroscope. In addition, the thickness of the titanium film, the electrode film, and the side plate illustrated in each drawing including the above drawing are, for convenience of explanation,
It is shown enlarged as appropriate from the actual one.

As shown in FIG. 1, the vibrating gyroscope 1 has a quadrangular prism shape, and has parallel flat plate portions 2 and 3 provided above and below. The parallel plate portions 2 and 3 correspond to the first and second parallel plate portions of the present invention.

As shown in FIG. 1, the base 4 of the vibrating gyroscope 1 is made of stainless steel as an elastic metal body forming a square pole. Note that, in the present embodiment, the cross section of the base material 4 has a square shape. The cross section of the substrate 4 is preferably a square, but is not necessarily limited to a square. The surface of the base material 4 facing the X direction is a first side surface 5, and the second side surface 6, the third side surface, and the fourth side surface are arranged in the clockwise direction (circumferential direction) in this order. Then, the first side surface 5 and the third side surface are 180 degrees around the Z axis.
The second side surface 6 and the fourth side surface are also located 180 degrees opposite to each other about the Z-axis (note that only the first side surface and the second side surface are shown in the figure). Is shown).

The first side surface 5 and the third side surface at the lower portion of the base member 4 are provided with through holes 7 each having a rectangular cross section extending in the X-axis direction. Due to this through-hole 7, the lower part of the substrate 4
A pair of side plates 8 and 9 having the second side surface 6 and the fourth side surface as outer surfaces are formed. The side plates 8 and 9 correspond to the flat portions of the present invention. The thickness of the side plates 8 and 9 is set to several tens to several hundreds μm. Then, the both side plates 8, 9,
The through-hole 7 forms a parallel plate structure in which the lower portion of the base member 4 is arranged in parallel with each other, and the parallel plate portion 2 is formed.

The second side surface 6 and the fourth side surface of the upper part of the substrate 4 are formed with a through-hole 10 having a rectangular cross section in the Y-axis direction.
Are drilled. A pair of side plates 11 and 12 having the first side surface 5 and the third side surface as outer surfaces are formed in the upper part of the base material 4 by the through holes 10. Said side plate 1
Reference numerals 1 and 12 correspond to the flat plate portion of the present invention. The side plate 11,
12 has the same thickness as the side plates 8 and 9 of the parallel plate portion 2. The upper side of the base material 4 has a parallel plate structure arranged in parallel with each other by the side plates 11 and 12 and the through hole 10, thereby forming the parallel plate portion 3. The parallel plate portions 2 and 3 are arranged to be orthogonal to each other.

The second side surface 6 of the parallel plate portions 2, 3 and the fourth
A rectangular titanium film 13 formed by sputtering or the like is formed on the side surface, the first side surface 5 and the sixth side surface (see FIG. 4).

The entire surface of the titanium film 13 has a thickness of several tens μm.
m PZT thin film 14 (see FIG. 5) is formed,
On the T thin film 14, a pair of upper and lower electrode films 15 made of aluminum and having the same area and a thickness of several μm are formed. The electrode film 15 corresponds to the electrode of the present invention.

When using the vibrating gyroscope 1 configured as described above, with the lower end of the base 4 fixed, the base 4
The alternating voltages of the opposite potentials are synchronously applied to the electrode films 15 of the side plates 8 and 9 of the lower parallel plate portion 2 below.

Then, the polarization direction of the PZT thin film is changed to the electrode film 1.
When the PZT thin film 14 applied to the positive potential side is compressed from the direction 5 to the base material 4, the PZT thin film 14 applied to the negative potential side is stretched. The PZT thin film 14 is alternately compressed and stretched by the change in polarity due to the alternating voltage. As a result, the parallel plate portion 2 is driven in the X and anti-X directions, and the upper parallel plate portion 3 is driven. Vibrate in the same direction.

Then, in this vibration state, the vibration gyro 1
When the rotation about the Z-axis is applied, the PZT thin film 14 on one side in the parallel plate portion 3 is compressed (strained), and the other side (a side 180 degrees opposite to the one side). Is stretched (distorted). As a result, it is possible to detect the Coriolis force acting on the vibrating gyroscope 1 by detecting the voltage generated at that time. Further, as shown in the above (1), if the mass m and the vibration velocity V of the vibration gyro 1 are known, the angular velocity Ω can be derived.

Next, a method of manufacturing the vibrating gyroscope 1 will be described with reference to FIGS. FIG. 2 shows the substrate 4. The base material 4 made of stainless steel is formed in a quadrangular prism shape having a square cross section. The upper and lower portions of the base material 4 are inserted through the through holes 7 and 1 so as to be orthogonal to each other.
0 is formed. The formation of the through holes 7 and 10 may be performed by cutting or etching. By forming the through holes 7, the lower portion of the base member 4 has the second side surface 6 and the fourth side surface as outer surfaces as shown in FIG. 3, and has a thickness of several tens to several hundreds μm. A pair of side plates 8 and 9 are formed. The parallel plate portion 2 having a parallel plate structure in which the side plates 8 and 9 are arranged in parallel with each other is formed below the base member 4 by the side plates 8 and 9 and the through hole 7.

By forming the through-holes 10, the upper portion of the base member 4 is formed on the first side face 5 and the third side face 5 as shown in FIG.
A pair of side plates 11 and 12 having a plate thickness of several tens to several hundreds μm are formed, each of the side surfaces being an outer surface. Further, a parallel plate portion 3 having a parallel plate structure in which the side plates 11 and 12 are arranged in parallel with each other is formed on the upper portion of the base material 4 by the side plates 11 and 12 and the through hole 10.

Next, the substrate 4 is cleaned with an acid or the like, and the surface excluding the side on which the PZT thin film 14 is to be formed is removed in advance using a synthetic resin or a physical film forming method such as sputtering or vacuum deposition. A mask (not shown) is formed by coating with a metal other than titanium or the like.

Then, the first side surface 5 on the upper part of the substrate 4 and the third side
The titanium film 13 is formed on the side surface, the second side surface 6 and the fourth side surface under the base member 4 by a physical film forming method such as sputtering or vacuum evaporation.
Is formed (see FIG. 4).

Next, a PZT thin film 14 is formed on the titanium film 13 by a hydrothermal method. This hydrothermal method consists of two stages. (First step) substrate 4, zirconium oxychloride as a raw material (ZrOC ₂ · 8H ₂ O) and nitrate (Pb (NO
₃ ) An aqueous solution of ₂ ) and a KOH (8N) solution are charged into a Teflon bottle (not shown) and stirred. Since the piezoelectricity of the PZT thin film 14 is determined by the composition ratio of lead titanate and lead zirconate in the PZT thin film 14, the molar ratio between zirconium oxychloride and nitrate is changed according to the piezoelectricity of the PZT thin film 14 to be formed later. You just have to decide.

Next, in a pressure vessel (not shown), the base material 4 is disposed above and zirconium oxychloride (ZrO 2
C ₂ · 8H ₂ O), an aqueous solution of nitrate _{(Pb (NO 3) 2)} , and while stirring KOH (8N) solution, heated and pressurized. The pressurization here is pressurization by the vapor pressure of the heated solution. The temperature condition is 150 ° C,
This condition is maintained for 48 hours. In addition, stirring was performed for 300 r.
pm.

As a result, in the supersaturated state, seed crystals (nuclei) of PZT are formed on the surfaces of the titanium films 13 of the two parallel flat plate portions 2 and 3 of the substrate 4. After the elapse of the above time, the substrate 4 is taken out of the pressure vessel, washed with water and dried.

(Second Step) Next, the base material 4 on which seed crystals are nucleated, and zirconium oxychloride (Z
aqueous solution of rOC ₂ · 8H ₂ O) and nitrate _{(Pb (NO 3) 2)} , titanium tetrachloride (TiCl ₄₎ and KOH (4
N) Put the solution in a Teflon bottle (not shown) and stir. Since the piezoelectricity of the PZT thin film 14 is determined by the composition ratio of lead titanate and lead zirconate in PZT, the molar ratio between zirconium oxychloride and nitrate may be determined according to the piezoelectricity of PZT to be formed later.

Next, in a pressure vessel (not shown), the substrate 4 is placed above and zirconium oxychloride (ZrO
C ₂ · 8H ₂ O), an aqueous solution of nitrate _{(Pb (NO 3) 2)} , with stirring titanium tetrachloride (TiCl ₄₎ and KOH (4N) solution, heated and pressurized. The pressurization here is pressurization by the vapor pressure of the heated solution. The temperature condition is 120 ° C., and this state is maintained for 48 hours. The stirring is performed at 300 rpm.

As a result, in the supersaturated state, the PZT thin film 14 is formed with a predetermined thickness (several tens of μm in this embodiment) on both outer surfaces of both the parallel plate portions 2 and 3 of the base material 4 (see FIG. 5). . After the elapse of the above time, the substrate 4 is taken out of the pressure vessel, washed with water and dried. Thereafter, the mask is removed.

Then, as shown in FIG.
After forming the electrode films 15 on the four surfaces by a physical film forming method such as sputtering or vacuum deposition, patterning is performed, unnecessary portions of the electrode films 15 are removed, and a pair of upper and lower electrode films 15 is formed. The gyro 1 is formed.

According to the present embodiment, the following operation and effect can be obtained. (1) In the present embodiment, the two parallel flat plate portions 2 and 3 of the base material 4
Since the PZT thin film 14 formed on the surface of the titanium film 13 is formed as thin as several tens μm, the vibration gyro 1
Can be reduced in size.

(2) In the present embodiment, the upper and lower portions of the base member 4 have a parallel plate structure, so that the base member 4 can be resistant to twisting. Accordingly, the vibration driving parallel plate portion 2 can accurately vibrate, and the detection parallel plate portion 3 can be accurately displaced, so that it is strong against noise.

(3) In the present embodiment, the hydrothermal method
A titanium film 13 is formed on both outer surfaces of the two parallel flat plate portions 2 and 3 of the substrate 4.
Was formed, a PZT thin film 14 was formed by a hydrothermal method, and then electrode films 15 were formed on both side surfaces of the substrate 4 on which the PZT thin film 14 was formed. As a result, the vibration gyro 1 composed of the combination of the vibration driving parallel flat plate portion 2 and the detection parallel flat plate portion 3 obtained in the same process (a process by the hydrothermal method) has improved quality such as detection sensitivity. It can be constant, ie homogeneous. or,
By the hydrothermal method, the PZT thin film 14 for driving and the P
Since the ZT thin film 14 can be formed at a time, unlike the case where the driving and detection PZT thin films are separately formed, the number of manufacturing steps can be reduced.

(4) Side plate 11 of parallel plate portion 3 for detection
The connecting part connecting the upper part of the side plate 12 and the connecting part of the part between the parallel plate part 2 and the parallel plate part 3 is used as the mass m of the Coriolis force Fc of the above formula (1). it can. Therefore, it is possible to adjust m of the vibrating gyroscope 1 by appropriately changing the mass of the same portion. Thereby, the detection sensitivity of the vibrating gyroscope 1 can be increased.

The embodiment of the present invention can be modified as follows in addition to the above embodiment. (1) In the above embodiment, the electrode film 15 is formed of aluminum, but may be formed of Au (gold) or may be formed of another conductive metal.

(2) In the above embodiment, the electrode film 15,
Although the thickness of the PZT thin film 14 and the thickness of the substrate 4 are each set to a predetermined numerical value, they are not limited to the above numerical values, and may be other numerical values as required.

(3) In the above embodiment, the vibrating gyroscope 1 is embodied as a resonating piece, but the vibrating gyroscope 1 may be embodied as a vibrating gyroscope of a tuning fork type fixed to both ends of a connecting plate. In this case, a tuning fork-type vibrating gyroscope can be formed only by erection and fixing the pair of vibrating gyroscopes 1 in the above embodiment to both ends of a connecting plate as a connecting portion.

(4) In the above embodiment, a pair of upper and lower electrode films 15 are provided separately for each PZT thin film 14, but may be provided on the entire surface of the PZT thin film 14 without being separated. Here, in addition to the technical ideas described in the claims, the technical ideas grasped by the above-described embodiments are listed below together with their effects.

(1) A vibrating gyroscope according to claim 2, wherein the through hole has a PZT thin film having a rectangular cross section. The side walls of the first and second parallel flat plate portions are formed in a plate shape by the through holes having a square cross section, so that a parallel flat plate structure can be obtained.

[0049]

As described in detail above, according to the first aspect of the present invention, it is possible to easily obtain a vibration gyro, to reduce the size, to be resistant to twisting, and to increase the detection sensitivity. Can be.

According to the second and third aspects of the present invention, it is possible to easily obtain a vibration gyro that can be reduced in size, resistant to twisting, and capable of increasing the detection sensitivity.

[Brief description of the drawings]

FIG. 1 is a perspective view of a vibrating gyroscope.

FIG. 2 is a perspective view of a base material.

FIG. 3 is a perspective view of a base material in which a through hole is formed.

FIG. 4 is a perspective view of a base material formed by patterning a titanium film.

FIG. 5 is a perspective view of a substrate on which a PZT thin film is formed.

FIG. 6 is a perspective view of a vibrating gyroscope on which an electrode film is formed.

FIG. 7 is a perspective view of a conventional vibrating gyroscope.

FIG. 8 is a perspective view of a conventional vibrating gyroscope.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Vibrating gyroscope, 2, 3 ... Parallel plate part (constituting the 1st, 2nd parallel plate part), 4 ... Base material, 5 ... 1st side surface, 6
... 2nd side surface, 7,10 ... Through-hole, 8,9,11,12 ...
Side plate (constituting a flat plate portion), 13: titanium film, 14: P
ZT thin film, 15 ... electrode film.

[Procedure amendment]

[Submission date] July 17, 1997

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0033

[Correction method] Change

[Correction contents]

Next, a PZT thin film 14 is formed on the titanium film 13 by a hydrothermal method. This hydrothermal method consists of two stages. (First step) substrate 4, zirconium oxychloride as a raw material _{(ZrOC l 2 · 8H 2 O} ) and nitrate (Pb (N
An aqueous solution of O ₃ ) ₂ ) and a KOH (8N) solution are charged into a Teflon bottle (not shown) and stirred. In addition, PZT
Since the piezoelectricity of the thin film 14 is determined by the composition ratio of lead titanate and lead zirconate in the PZT thin film 14, the molar ratio between zirconium oxychloride and nitrate may be determined according to the piezoelectricity of the PZT thin film 14 to be formed later. .

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0034

[Correction method] Change

[Correction contents]

Next, in a pressure vessel (not shown), the base material 4 is disposed above and zirconium oxychloride (ZrO 2
_{C l 2 · 8H 2 O)} , an aqueous solution of nitrate _{(Pb (NO 3) 2)} , and while stirring KOH (8N) solution, heating and
Apply pressure. Note that the pressure here means a pressure by the vapor pressure of the heated solution. Temperature condition is 150 ° C
This state is continued for 48 hours. In addition, stirring was performed for 30 minutes.
Perform at 0 rpm.

[Procedure amendment 3]

[Document name to be amended] Statement

[Correction target item name] 0036

[Correction method] Change

[Correction contents]

(Second Step) Next, the base material 4 on which seed crystals are nucleated, and zirconium oxychloride (Z
rOC l ₂ · 8H ₂ O) and nitrate (Pb (NO _{3) 2)}
Aqueous solution, titanium tetrachloride (TiCl ₄ ) and KOH (4
N) Put the solution in a Teflon bottle (not shown) and stir. Since the piezoelectricity of the PZT thin film 14 is determined by the composition ratio of lead titanate and lead zirconate in PZT, the molar ratio between zirconium oxychloride and nitrate may be determined according to the piezoelectricity of PZT to be formed later.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0037

[Correction method] Change

[Correction contents]

Next, in a pressure vessel (not shown), the substrate 4 is placed above and zirconium oxychloride (ZrO
_{C l 2 · 8H 2 O)} , an aqueous solution of nitrate _{(Pb (NO 3) 2)} , titanium tetrachloride (TiCl ₄₎ and KOH (4N)
Heat and pressurize while stirring the solution. Note that the pressure here means a pressure by the vapor pressure of the heated solution. The temperature condition is 120 ° C., and this state is maintained for 48 hours. The stirring is performed at 300 rpm.

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Fumito Arai 501, 6-5-5 Aoyagi-cho, Chigusa-ku, Nagoya 501 (72) Inventor Koichi Itoigawa Noda 1 Toyoda-ji, Oji-machi, Oguchi-machi, Niwa-gun, Aichi Prefecture Address: Tokai Rika Electric Machinery Co., Ltd. (72) Inventor Hitoshi Iwata 1 Toyota Noda, Toyoda, Oguchi-machi, Oguchi-machi, Niwa-gun, Aichi Prefecture

Claims (3)

[Claims] 1. A quadrangular prismatic elastic member having first to fourth side surfaces in a circumferential direction, wherein the first side surface and the third side surface, and the second side surface and the fourth side surface are located at positions 180 degrees opposite to each other. A metal has a through hole formed in a lower portion of the elastic metal from a first side surface to a third side surface, and a first parallel flat plate portion includes a flat plate portion including a second side surface and a fourth side surface. Is formed at the upper portion of the elastic metal, and a through-hole is formed from the second side surface to the fourth side surface, and a second parallel flat plate portion is formed on each flat plate portion including the first side surface and the third side surface. Are formed, and a titanium film is formed on the second side surface and the fourth side surface of the first parallel plate portion and the first side surface and the third side surface of the second parallel plate portion. A PZT thin film is formed, and an electrode is provided on the PZT thin film.
Vibrating gyroscope with T thin film. 2. A rectangular prism having first to fourth side surfaces in a circumferential direction, wherein the first side surface and the third side surface, and the second side surface and the fourth side surface are located at positions opposite to each other by 180 degrees. A through hole penetrating from the first side to the third side is formed in the lower portion of the elastic metal to form a first parallel plate portion, and a second parallel side is formed in the upper portion of the elastic metal from the second side. Forming a through hole penetrating up to four side surfaces to form a second parallel plate portion; and forming a second side surface and a fourth side surface of the first parallel plate portion and a first side surface of the second parallel plate portion. A step of forming a titanium film on the third side surface, a step of forming a PZT thin film on the titanium film by a hydrothermal method, and a step of forming electrodes on the PZT thin film, respectively. A method for manufacturing a vibrating gyroscope comprising a PZT thin film, comprising: 3. The hydrothermal method comprises the steps of: stirring a lead nitrate solution and zirconium oxychloride together with a mineralizer, applying pressure and heating to obtain seed crystals on a titanium film; and obtaining the seed crystals. A lead nitrate solution, a zirconium oxychloride solution, and a titanium tetrachloride solution are stirred with a mineralizer, heated and pressurized on the base material to form a PZ on the titanium film.
Forming a PZT thin film on the titanium film by performing T crystal growth. 4. The PZ according to claim 3, wherein
A method for manufacturing a vibrating gyroscope having a T thin film.