JPH063455B2 - Vibrating gyro - Google Patents
Vibrating gyroInfo
- Publication number
- JPH063455B2 JPH063455B2 JP8939789A JP8939789A JPH063455B2 JP H063455 B2 JPH063455 B2 JP H063455B2 JP 8939789 A JP8939789 A JP 8939789A JP 8939789 A JP8939789 A JP 8939789A JP H063455 B2 JPH063455 B2 JP H063455B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- driving
- piezoelectric elements
- feedback
- vibrating body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【発明の詳細な説明】 （産業上の利用分野） この発明は振動ジャイロに関し、特に自励振駆動し、た
とえば自動車などに搭載されるナビゲーションシステム
に用いられる、振動ジャイロに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration gyro, and more particularly to a vibration gyro that is driven by self-excitation and is used in a navigation system mounted in, for example, an automobile.
（従来技術） 第５図は従来の振動ジャイロの一例を示す図解図であ
る。この振動ジャイロ１は、振動子２を含む。この振動
子２は、正３角柱状の振動体３を含み、振動体３の１つ
の側面に駆動用圧電素子４が形成され、振動体３の他の
２つの側面に帰還用圧電素子５ａおよび５ｂがそれぞれ
形成されている。そのため、この振動子２では、帰還用
圧電素子５ａおよび５ｂと駆動用圧電素子４との間に発
振回路６が接続され、帰還用圧電素子５ａおよび５ｂの
出力が発振回路６を介して駆動用圧電素子４に帰還され
る。したがって、この振動子２は自励振駆動する。(Prior Art) FIG. 5 is an illustrative view showing one example of a conventional vibration gyro. The vibrating gyro 1 includes a vibrator 2. The vibrator 2 includes a regular triangular prism-shaped vibrating body 3, a driving piezoelectric element 4 is formed on one side surface of the vibrating body 3, and a feedback piezoelectric element 5a and a feedback piezoelectric element 5a are formed on the other two side surfaces of the vibrating body 3. 5b are formed respectively. Therefore, in the vibrator 2, the oscillation circuit 6 is connected between the feedback piezoelectric elements 5a and 5b and the driving piezoelectric element 4, and the outputs of the feedback piezoelectric elements 5a and 5b are driven via the oscillation circuit 6. It is fed back to the piezoelectric element 4. Therefore, the vibrator 2 is self-excited.
そして、この振動ジャイロ１では、帰還用圧電素子５ａ
および５ｂからの出力電圧の差を差動回路７で検出する
ことによって、その回転角速度が測定される。In the vibrating gyro 1, the feedback piezoelectric element 5a is used.
The rotational angular velocity is measured by detecting the difference between the output voltages from the outputs 5 and 5b by the differential circuit 7.
（発明が解決しようとする課題） ところが、上述の振動ジャイロ１では、帰還用圧電素子
５ａおよび５ｂからの出力電圧の差を検出するため、帰
還用のみならず駆動用圧電素子に特性上のばらつきや経
時変化，温度変化があった場合、回転角速度を正確に測
定することが困難であった。(Problems to be Solved by the Invention) However, in the above-described vibrating gyro 1, since the difference in the output voltage from the feedback piezoelectric elements 5a and 5b is detected, there is a variation in characteristics not only for the feedback but also for the driving piezoelectric element. It has been difficult to accurately measure the rotational angular velocity when there is a change with time, a change in temperature, or a change in temperature.
それゆえに、この発明の主たる目的は、圧電素子の特性
に影響されることなく回転角速度を正確に測定すること
ができる、振動ジャイロを提供することである。Therefore, a main object of the present invention is to provide a vibrating gyro that can accurately measure the rotational angular velocity without being affected by the characteristics of the piezoelectric element.
（課題を解決するための手段） この発明は、自励振駆動する振動ジャイロにおいて、駆
動用の圧電素子の入力側に回転角速度を検出するための
検出用端子を接続した、振動ジャイロである。(Means for Solving the Problem) The present invention relates to a vibration gyro that is driven by self-excitation, in which a detection terminal for detecting a rotational angular velocity is connected to the input side of a driving piezoelectric element.
（作用） 検出用端子からは、圧電素子を介さずに、回転角速度に
応じた出力が得られる。(Operation) An output corresponding to the rotational angular velocity is obtained from the detection terminal without using the piezoelectric element.
（発明の効果） この発明によれば、圧電素子を介さずに回転角速度に応
じた出力が得られるので、圧電素子に特性上のばらつき
や経時変化，温度変化があっても、圧電素子の特性に影
響されることなく回転角速度を正確に測定することがで
きる。(Effect of the Invention) According to the present invention, an output according to the rotational angular velocity can be obtained without passing through the piezoelectric element, so that the characteristics of the piezoelectric element can be maintained even if the piezoelectric element has variations in characteristics, changes with time, or changes in temperature. The rotational angular velocity can be accurately measured without being affected by
この発明の上述の目的，その他の目的，特徴および利点
は、図面を参照して行う以下の実施例の詳細な説明から
一層明らかとなろう。The above-mentioned objects, other objects, features and advantages of the present invention will become more apparent from the following detailed description of the embodiments with reference to the drawings.
（実施例） 第１図はこの発明の一実施例を示す図解図である。この
振動ジャイロ１０は、特別な構造の振動子１２を含むの
で、この実施例では、まず、その振動子１２について詳
細に説明する。(Embodiment) FIG. 1 is an illustrative view showing one embodiment of the present invention. The vibrating gyroscope 10 includes a vibrator 12 having a special structure. Therefore, in this embodiment, the vibrator 12 will be described in detail first.
振動子１２は、たとえば正３角柱状の振動体１４を含
む。この振動体１４は、たとえばエリンバ，鉄−ニッケ
ル合金，石英，ガラス，水晶，セラミックなど、一般的
に機械的な振動を生じる材料で形成される。The vibrator 12 includes, for example, a vibrating body 14 having a regular triangular prism shape. The vibrating body 14 is formed of a material that generally causes mechanical vibration, such as elinvar, iron-nickel alloy, quartz, glass, crystal, and ceramic.
この振動体１４には、その３つの側面の中央部にそれぞ
れ圧電素子１６ａ，１６ｂおよび１６ｃが形成される。
圧電素子１６ａは、たとえばセラミックからなる圧電層
１８ａを含み、圧電層１８ａの両主面にはそれぞれ電極
２０ａおよび２２ａが形成される。なお、これらの電極
２０ａおよび２２ａは、たとえば金，銀，アルミニウ
ム，ニッケル，銅−ニッケル合金（モネルメタル）など
の電極材料で、たとえばスパッタリング、蒸着等の薄膜
技術であるいはその材料によっては印刷技術で形成され
る。同様に、他の圧電素子１６ｂおよび１６ｃも、それ
ぞれ、たとえばセラミックからなる圧電層１８ｂおよび
１８ｃを含み、それらの圧電層１８ｂと１８ｃとの両主
面にも、電極２０ｂおよび２２ｃと２０ｂおよび２２ｃ
とが、それぞれ形成されている。そして、これらの圧電
素子１６ａ〜１６ｃの一方の電極２０ａ〜２０ｃは、た
とえば接着剤で振動体１４に接着される。Piezoelectric elements 16a, 16b and 16c are formed in the center of the three side surfaces of the vibrating body 14, respectively.
The piezoelectric element 16a includes a piezoelectric layer 18a made of, for example, ceramic, and electrodes 20a and 22a are formed on both main surfaces of the piezoelectric layer 18a, respectively. The electrodes 20a and 22a are made of an electrode material such as gold, silver, aluminum, nickel, and a copper-nickel alloy (monel metal), and are formed by a thin film technique such as sputtering or vapor deposition or a printing technique depending on the material. To be done. Similarly, the other piezoelectric elements 16b and 16c also include piezoelectric layers 18b and 18c made of, for example, ceramics, and electrodes 20b and 22c and 20b and 22c are provided on both main surfaces of the piezoelectric layers 18b and 18c, respectively.
And are formed respectively. Then, one of the electrodes 20a to 20c of the piezoelectric elements 16a to 16c is bonded to the vibrating body 14 with an adhesive, for example.
なお、振動体１４をたとえばエリンバ，鉄−ニッケル合
金などの金属からなる振動材料で形成すれば、圧電素子
１６ａ〜１６ｃの一方の電極２０ａ〜２０ｃは形成され
なくてもよい。なぜなら、振動体１４がそれらの電極２
０ａ〜２０ｃを兼ねるからである。この場合、圧電層１
８ａ〜１８ｃは、たとえばＰＺＴ（ジルコン・チタン酸
鉛），ＺｎＯ（酸化鉛）などの圧電材料でたとえばスパ
ッタリング，蒸着などの薄膜技術によって形成されても
よい。If the vibrating body 14 is made of a vibrating material made of metal such as elinvar or iron-nickel alloy, the electrodes 20a to 20c of the piezoelectric elements 16a to 16c may not be formed. Because the vibrating body 14 has electrodes 2
This is because it also serves as 0a to 20c. In this case, the piezoelectric layer 1
8a to 18c are piezoelectric materials such as PZT (zircon / lead titanate) and ZnO (lead oxide) and may be formed by a thin film technique such as sputtering and vapor deposition.
この振動子１２では、圧電素子１６ａ〜１６ｃのうち任
意の２つが駆動用に用いられ、他の１つが帰還用に用い
られる。この実施例では、たとえば、圧電素子１６ａお
よび１６ｂが駆動用に用いられ、他の圧電素子１６ｃが
帰還用に用いられる。そのため、この振動子１２には、
帰還用の圧電素子１６ｃと駆動用の圧電素子１６ａおよ
び１６ｂとの間に、振動子１２を自励振駆動するための
帰還ループとして発振回路２４などが接続される。In the vibrator 12, any two of the piezoelectric elements 16a to 16c are used for driving, and the other one is used for feedback. In this embodiment, for example, the piezoelectric elements 16a and 16b are used for driving, and the other piezoelectric element 16c is used for feedback. Therefore, this oscillator 12 has
An oscillation circuit 24 or the like is connected between the feedback piezoelectric element 16c and the driving piezoelectric elements 16a and 16b as a feedback loop for driving the vibrator 12 by self-excitation.
すなわち、帰還用の圧電素子１６ｃの電極２２ｃは、発
振回路２４の入力端に接続される。そして、この発振回
路２４の出力端は、固定抵抗器２６ａを介して駆動用の
圧電素子１６ａの電極２２ａと固定抵抗器２６ｂを介し
て駆動用の圧電素子１６ｂの電極２２ｂとに接続され
る。そのため、帰還用の圧電素子１６ｃの出力は発振回
路２４などを介して２つの駆動用の圧電素子１６ａおよ
び１６ｂに帰還され、この振動子１２は自励振駆動す
る。この場合、振動子１２の振動体１４は、２つの駆動
用の圧電素子１６ａおよび１６ｂによる２つの駆動方向
を合成した方向に振動する。したがって、この実施例で
は、１つの駆動用圧電素子で駆動する従来例に比べて、
振動体１４の振幅が大きくなる。しかも、たとえば経時
変化，温度変化，取付け角度の変化，自重（重心位置）
の変化などによる機械的な状態変化に対して、振動体１
４の振動姿勢が安定である。That is, the electrode 22c of the piezoelectric element 16c for feedback is connected to the input end of the oscillation circuit 24. The output terminal of the oscillation circuit 24 is connected to the electrode 22a of the driving piezoelectric element 16a via the fixed resistor 26a and the electrode 22b of the driving piezoelectric element 16b via the fixed resistor 26b. Therefore, the output of the feedback piezoelectric element 16c is fed back to the two driving piezoelectric elements 16a and 16b via the oscillation circuit 24 and the like, and the vibrator 12 is driven by self-excitation. In this case, the vibrating body 14 of the vibrator 12 vibrates in a direction in which the two driving directions of the two driving piezoelectric elements 16a and 16b are combined. Therefore, in this embodiment, as compared with the conventional example driven by one driving piezoelectric element,
The amplitude of the vibrating body 14 increases. Moreover, for example, changes over time, changes in temperature, changes in mounting angle, weight (position of center of gravity)
Vibration body 1 against mechanical changes due to changes in
The vibration posture of No. 4 is stable.
一方、駆動用の圧電素子１６ａおよび１６ｂの入力側の
電極２２ａおよび２２ｂには、検出用端子２８ａおよび
２８ｂが、それぞれ接続される。これらの検出用端子２
８ａおよび２８ｂは、振動ジャイロ１０の回転角速度に
応じて変化する駆動用の圧電素子１６ａおよび１６ｂの
インピーダンス変化を検出するためのものである。On the other hand, detection terminals 28a and 28b are connected to the electrodes 22a and 22b on the input side of the driving piezoelectric elements 16a and 16b, respectively. These detection terminals 2
Reference numerals 8a and 28b are for detecting a change in impedance of the driving piezoelectric elements 16a and 16b which changes according to the rotational angular velocity of the vibration gyro 10.
これらの検出用端子２８ａおよび２８ｂは、差動回路３
０の２つの入力端に、それぞれ接続される。この差動回
路３０では、駆動用の圧電素子１６ａおよび１６ｂのイ
ンピーダンス変化が、それらの電極２２ａおよび２２ｂ
間の電位差として検出される。したがって、差動回路３
０からの出力によって、振動ジャイロ１０の回転角速度
を知ることができる。These detection terminals 28a and 28b are connected to the differential circuit 3
0 are connected to two input terminals, respectively. In this differential circuit 30, impedance changes of the driving piezoelectric elements 16a and 16b are caused by the electrodes 22a and 22b thereof.
It is detected as a potential difference between the two. Therefore, the differential circuit 3
From the output from 0, the rotational angular velocity of the vibration gyro 10 can be known.
この振動ジャイロ１０では、検出専用圧電素子は用いず
駆動用の圧電素子１６ａおよび１６ｂの電極２２ａおよ
び２２ｂ間の電位差、すなわち駆動用の圧電素子の入力
側の電位差を検出することによって回転角速度を測定す
るため、それらの圧電素子１６ａ〜１６ｃに特性上のば
らつきや経時変化，温度変化があっても、圧電素子の特
性やそれらの共振周波数のずれに影響されることなく駆
動電圧の共通化、安定化に伴い回転角速度を正確に測定
することができる。In this vibrating gyro 10, the rotational angular velocity is measured by detecting the potential difference between the electrodes 22a and 22b of the driving piezoelectric elements 16a and 16b without using the detection-dedicated piezoelectric element, that is, the potential difference on the input side of the driving piezoelectric element. Therefore, even if the piezoelectric elements 16a to 16c have variations in characteristics, changes over time, or changes in temperature, the driving voltage can be standardized and stabilized without being affected by the characteristics of the piezoelectric elements and their resonance frequency shifts. With this, the rotational angular velocity can be accurately measured.
さらに、この振動ジャイロ１０では、第５図に示す従来
例に比べて、振幅の大きい特別な構造の振動子１２が用
いられているため回転角速度の感度がよくなる。しか
も、たとえば経時変化などによる機械的な状態変化に対
して、振動体１４の振動姿勢が安定であるので、回転角
速度を安定的に測定することができる。Further, in the vibrating gyroscope 10, compared with the conventional example shown in FIG. 5, since the vibrator 12 having a special structure having a large amplitude is used, the sensitivity of the rotational angular velocity is improved. Moreover, since the vibrating posture of the vibrating body 14 is stable with respect to mechanical state changes due to, for example, changes over time, the rotational angular velocity can be stably measured.
第２図はこの発明の他の実施例を示す図解図である。こ
の実施例では、特に、振動体１４が正４角柱状に形成さ
れ、振動体１４の４つの側面に、それぞれ圧電素子１６
ａ，１６ｂ，１６ｃおよび１６ｄが形成される。そし
て、たとえば、隣接する２つの圧電素子１６ａおよび１
６ｂが駆動用に用いられ、他の２つの圧電素子１６ｃお
よび１６ｄが帰還用に用いられる。そのため、この実施
例でも、検出用端子２８ａおよび２８ｂは、駆動用の圧
電素子１６ａおよび１６ｂの入力側の電極２２ａおよび
２２ｂに接続される。FIG. 2 is an illustrative view showing another embodiment of the present invention. In this embodiment, in particular, the vibrating body 14 is formed in a regular quadrangular prism shape, and the piezoelectric elements 16 are respectively formed on the four side surfaces of the vibrating body 14.
a, 16b, 16c and 16d are formed. Then, for example, two adjacent piezoelectric elements 16a and 1
6b is used for driving, and the other two piezoelectric elements 16c and 16d are used for feedback. Therefore, also in this embodiment, the detection terminals 28a and 28b are connected to the electrodes 22a and 22b on the input side of the driving piezoelectric elements 16a and 16b.
なお、この実施例では、２つの帰還用の圧電素子１６ｃ
および１６ｄの電極２２ｃおよび２２ｄは可変抵抗器３
２の２つの固定端子３２ａおよひ３２ｂにそれぞれ接続
され、可変抵抗器３２の可動端子３２ｃは発振回路２４
の入力端に接続される。したがって、この実施例では、
２つの帰還用の圧電素子１６ｃおよび１６ｄからの出力
が合成された形で２つの駆動用の圧電素子１６ａおよび
１６ｂに帰還される。In this embodiment, two feedback piezoelectric elements 16c are provided.
The electrodes 22c and 22d of 16 and 16d are connected to the variable resistor 3
2 is connected to two fixed terminals 32a and 32b, and the movable terminal 32c of the variable resistor 32 is connected to the oscillation circuit 24.
Connected to the input end of. Therefore, in this example,
The outputs from the two feedback piezoelectric elements 16c and 16d are combined and fed back to the two driving piezoelectric elements 16a and 16b.
第３図はこの発明のさらに他の実施例を示す図解図であ
る。この実施例では、振動体１４が正３角柱状に形成さ
れ、振動体１４の２つの側面に、圧電素子１６ａおよび
１６ｂがそれぞれ形成される。そして、一方の圧電素子
１６ａが駆動用に用いられ、他方の圧電素子１６ｂが帰
還用に用いられる。そのため、駆動用の圧電素子１６ａ
の入力側の電極２２ａに、回転角速度を検出するための
検出用端子２８が接続される。FIG. 3 is an illustrative view showing still another embodiment of the present invention. In this embodiment, the vibrating body 14 is formed in a regular triangular prism shape, and the piezoelectric elements 16a and 16b are formed on two side surfaces of the vibrating body 14, respectively. Then, one piezoelectric element 16a is used for driving, and the other piezoelectric element 16b is used for feedback. Therefore, the driving piezoelectric element 16a
A detection terminal 28 for detecting the rotational angular velocity is connected to the electrode 22a on the input side of.
なお、この実施例では、帰還用の圧電素子１６ｂの電極
２２ｂは発振回路２４の入力端に接続され、発振回路２
４の出力端は固定抵抗器２６を介して駆動用の圧電素子
１６ａの電極２２ａに接続される。In this embodiment, the electrode 22b of the piezoelectric element 16b for feedback is connected to the input end of the oscillator circuit 24, and the oscillator circuit 2
The output terminal of No. 4 is connected to the electrode 22a of the driving piezoelectric element 16a via the fixed resistor 26.
第４図はこの発明の別の実施例を示す図解図である。こ
の実施例では、振動体１４が正４角柱状に形成され、振
動体１４の対向する２つの側面に、圧電素子１６ａおよ
び１６ｂがそれぞれ形成される。そして、一方の圧電素
子１６ａが駆動用に用いられ、他方の圧電素子１６ｂが
帰還用に用いられる。そのため、この実施例でも、第３
図に示す実施例と同様に、駆動用の圧電素子１６ａの入
力側の電極２２ａに、回転角速度を検出するための検出
用端子２８が接続され、帰還用の圧電素子１６ｂと駆動
用の圧電素子１６ａとの間に、直列接続された発振回路
２４および固定抵抗器２６が接続される。FIG. 4 is an illustrative view showing another embodiment of the present invention. In this embodiment, the vibrating body 14 is formed in a regular quadrangular prism shape, and the piezoelectric elements 16a and 16b are formed on two opposing side surfaces of the vibrating body 14, respectively. Then, one piezoelectric element 16a is used for driving, and the other piezoelectric element 16b is used for feedback. Therefore, also in this embodiment, the third
Similar to the embodiment shown in the figure, a detection terminal 28 for detecting the rotational angular velocity is connected to the input side electrode 22a of the driving piezoelectric element 16a, and the feedback piezoelectric element 16b and the driving piezoelectric element are connected. The oscillator circuit 24 and the fixed resistor 26 connected in series are connected between the oscillator 16 and 16a.
なお、上述の各実施例では、振動子１２の振動体１４が
正３角柱状あるいは正４角柱状に形成されているが、こ
の発明では、振動体１４は、正３角柱状，正４角柱状以
外の多角柱状に形成されてもよい。この場合も、検出用
端子は、振動体の側面に形成される駆動用の圧電素子の
入力側に接続されればよい。In each of the above-described embodiments, the vibrating body 14 of the vibrator 12 is formed in a regular triangular prism shape or a regular quadrangular prism shape, but in the present invention, the vibrating body 14 is a regular triangular prism shape or a regular quadrangular prism shape. It may be formed in a polygonal column shape other than the column shape. Also in this case, the detection terminal may be connected to the input side of the driving piezoelectric element formed on the side surface of the vibrating body.
第１図はこの発明の一実施例を示す図解図である。 第２図はこの発明の他の実施例を示す図解図である。 第３図はこの発明のさらに他の実施例を示す図解図であ
る。 第４図はこの発明の別の実施例を示す図解図である。 第５図は従来の振動ジャイロの一例を示す図解図であ
る。 図において、１０は振動ジャイロ、１２は振動子、１４
は振動体、１６ａ，１６ｂおよび１６ｃは圧電素子、２
８ａおよび２８ｂは検出用端子を示す。FIG. 1 is an illustrative view showing one embodiment of the present invention. FIG. 2 is an illustrative view showing another embodiment of the present invention. FIG. 3 is an illustrative view showing still another embodiment of the present invention. FIG. 4 is an illustrative view showing another embodiment of the present invention. FIG. 5 is an illustrative view showing one example of a conventional vibrating gyro. In the figure, 10 is a vibration gyro, 12 is a vibrator, and 14
Is a vibrating body, 16a, 16b and 16c are piezoelectric elements, 2
Reference numerals 8a and 28b denote detection terminals.
Claims (1)
動用の圧電素子の入力側に回転角速度を検出するための
検出用端子を接続したことを特徴とする、振動ジャイ
ロ。1. A vibrating gyroscope which is driven by self-excitation, wherein a detection terminal for detecting a rotational angular velocity is connected to an input side of a driving piezoelectric element.
Priority Applications (14)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8939789A JPH063455B2 (en) | 1989-04-06 | 1989-04-06 | Vibrating gyro |
| GB8918103A GB2223309B (en) | 1988-08-12 | 1989-08-08 | Vibrator and vibratory gyroscope using the same |
| DE19893926504 DE3926504C2 (en) | 1988-08-12 | 1989-08-10 | Vibratory gyroscope |
| DE3943787A DE3943787C2 (en) | 1988-08-12 | 1989-08-10 | Oscillator exciter used as gyro component |
| DE3943805A DE3943805C2 (en) | 1988-08-12 | 1989-08-10 | Vibratory gyroscope |
| DE3943788A DE3943788C2 (en) | 1988-08-12 | 1989-08-10 | Bearing structure for an oscillator of an oscillating gyroscope |
| GB9301204A GB2262343A (en) | 1988-08-12 | 1993-01-22 | A vibrator for use in a vibratory gyroscope |
| GB9301203A GB2262342A (en) | 1988-08-12 | 1993-01-22 | A vibrator for use in a vibratory gyroscope |
| US08/044,630 US5349857A (en) | 1988-08-12 | 1993-04-12 | Vibratory gyroscope |
| US08/263,894 US5505085A (en) | 1988-08-12 | 1994-06-22 | Vibrator and vibratory gyroscope using the same |
| US08/276,759 US5493166A (en) | 1988-08-12 | 1994-07-18 | Vibrator and vibrating gyroscope using the same |
| US08/474,118 US5569969A (en) | 1988-08-12 | 1995-06-07 | Vibrator and vibratory gyroscope using the same |
| US09/163,830 US6161432A (en) | 1988-08-12 | 1998-09-01 | Vibrator and vibratory gyroscope using the same |
| US09/163,829 US6016699A (en) | 1988-08-12 | 1998-09-01 | Vibrator including piezoelectric electrodes of detectors arranged to be non-parallel and non-perpendicular to Coriolis force direction and vibratory gyroscope using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8939789A JPH063455B2 (en) | 1989-04-06 | 1989-04-06 | Vibrating gyro |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4328476A Division JPH0765898B2 (en) | 1992-11-13 | 1992-11-13 | Vibrating gyro |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02266214A JPH02266214A (en) | 1990-10-31 |
| JPH063455B2 true JPH063455B2 (en) | 1994-01-12 |
Family
ID=13969516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8939789A Expired - Fee Related JPH063455B2 (en) | 1988-08-12 | 1989-04-06 | Vibrating gyro |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH063455B2 (en) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04361112A (en) * | 1991-06-07 | 1992-12-14 | Akai Electric Co Ltd | Controlling device of vibration |
| DE69225505T2 (en) * | 1991-06-07 | 1998-09-10 | Mitsubishi Electric Corp | Vibration control device |
| JP2583691B2 (en) * | 1991-06-07 | 1997-02-19 | 赤井電機株式会社 | Vibrating gyro |
| JP2583701B2 (en) * | 1991-08-27 | 1997-02-19 | 赤井電機株式会社 | Vibrating gyroscope and adjustment method thereof |
| JPH0571968A (en) * | 1991-09-17 | 1993-03-23 | Akai Electric Co Ltd | Vibration control device |
| JPH0587576A (en) * | 1991-09-25 | 1993-04-06 | Akai Electric Co Ltd | Vibrator |
| JP2589422B2 (en) * | 1991-09-25 | 1997-03-12 | 赤井電機株式会社 | Vibrating gyro |
| JPH05126585A (en) * | 1991-10-08 | 1993-05-21 | Akai Electric Co Ltd | Vibration gyro |
| JPH0618267A (en) * | 1991-10-09 | 1994-01-25 | Akai Electric Co Ltd | Oscillatory gyroscope having diagnosis function |
| JPH05107068A (en) * | 1991-10-18 | 1993-04-27 | Akai Electric Co Ltd | Vibratory gyroscope |
| JPH05118853A (en) * | 1991-10-24 | 1993-05-14 | Akai Electric Co Ltd | Vibration gyro |
| JPH05126581A (en) * | 1991-10-31 | 1993-05-21 | Akai Electric Co Ltd | Vibration gyro |
| JPH05133752A (en) * | 1991-11-12 | 1993-05-28 | Akai Electric Co Ltd | Vibrator |
| JPH05264279A (en) * | 1992-03-19 | 1993-10-12 | Akai Electric Co Ltd | Vibrating gyro with diagnostic function |
| JPH0658760A (en) * | 1992-08-06 | 1994-03-04 | Akai Electric Co Ltd | Oscillating gyroscope having diagnostic function |
| JPH07167661A (en) * | 1993-12-14 | 1995-07-04 | Murata Mfg Co Ltd | Vibrating gyro |
| JP2996157B2 (en) * | 1995-10-12 | 1999-12-27 | 株式会社村田製作所 | Vibrating gyro |
| US6272925B1 (en) | 1999-09-16 | 2001-08-14 | William S. Watson | High Q angular rate sensing gyroscope |
| US7886598B2 (en) * | 2005-08-08 | 2011-02-15 | Northrop Grumman Guidance And Electronics Company, Inc. | Vibratory gyro bias error cancellation using mode reversal |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6186612A (en) * | 1984-10-05 | 1986-05-02 | Hitachi Ltd | Angular velocity sensor |
| JPS61164109A (en) * | 1985-01-16 | 1986-07-24 | Yokogawa Electric Corp | Vibration type angular velocity meter |
| JPS62148812A (en) * | 1985-12-24 | 1987-07-02 | Tokyo Keiki Co Ltd | Gyroscope device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6367921U (en) * | 1986-10-24 | 1988-05-07 |
-
1989
- 1989-04-06 JP JP8939789A patent/JPH063455B2/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6186612A (en) * | 1984-10-05 | 1986-05-02 | Hitachi Ltd | Angular velocity sensor |
| JPS61164109A (en) * | 1985-01-16 | 1986-07-24 | Yokogawa Electric Corp | Vibration type angular velocity meter |
| JPS62148812A (en) * | 1985-12-24 | 1987-07-02 | Tokyo Keiki Co Ltd | Gyroscope device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02266214A (en) | 1990-10-31 |
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