JPH11142235A - Method and apparatus for measurement and evaluation of irregularity in quantity of light of scanning beam - Google Patents

Method and apparatus for measurement and evaluation of irregularity in quantity of light of scanning beam

Info

Publication number
JPH11142235A
JPH11142235A JP31227697A JP31227697A JPH11142235A JP H11142235 A JPH11142235 A JP H11142235A JP 31227697 A JP31227697 A JP 31227697A JP 31227697 A JP31227697 A JP 31227697A JP H11142235 A JPH11142235 A JP H11142235A
Authority
JP
Japan
Prior art keywords
scanning
scanning beam
light
optical system
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP31227697A
Other languages
Japanese (ja)
Inventor
Fumio Ichikawa
文雄 市川
Hideaki Kamimura
秀明 上村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP31227697A priority Critical patent/JPH11142235A/en
Publication of JPH11142235A publication Critical patent/JPH11142235A/en
Pending legal-status Critical Current

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  • Laser Beam Printer (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a method and an apparatus in which an irregularity in the quantity of light in the scanning direction of a scanning beam projected from a scanning optical system in an image formation apparatus is measured and evaluated quantitatively as the performance of the scanning optical system. SOLUTION: A moving state 20 is moved on which a photosensor 11 used to receive a scanning beam projected from a scanning optical system, and a quantity-of-light sensor 12, are mounted, by a control box 21 to a direction (a face parallel to a scanning face) perpendicular to the direction of the scanning beam. The number of detections by the photosensor 11 is added up by a counter 24 as the number of scanning operations of a scanning beam L1 projected from a reflecting face 4a by turning a rotating multiple-face mirror 4. The quantity of light of the scanning beam L1 is added up by a host computer 22 on the basis of the output signal of the quantity-of-light sensor 12, so as to be stored on a memory 25. The total quantity of light per rotation of the rotating multiple-face mirror 4 is found and compared under the control of the host computer 22, in a plurality of measuring points corresponding to a plurality of projection directions of the scanning beam.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、レーザービームプ
リンタやレーザーファクシミリ等の画像形成装置におけ
る走査ビームの光量を測定して設計通りであるか否かを
評価する走査ビームの走査方向の光量ムラ測定評価方法
及び測定評価装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for measuring a light quantity unevenness in a scanning direction of a scanning beam for measuring the light quantity of a scanning beam in an image forming apparatus such as a laser beam printer or a laser facsimile to evaluate whether or not the design is as designed. The present invention relates to an evaluation method and a measurement evaluation device.

【0002】[0002]

【従来の技術】近年、記録媒体である感光体ドラム面上
をレーザービームで光走査して画像の記録を行うレーザ
ービームプリンタ(LBP)等の画像形成装置が広く使
用されている。
2. Description of the Related Art In recent years, an image forming apparatus such as a laser beam printer (LBP) for recording an image by optically scanning a photosensitive drum surface as a recording medium with a laser beam has been widely used.

【0003】図5はこの種の画像形成装置に用いられる
走査光学系の要部概略図である。同図において半導体レ
ーザー等からなる光源手段71から放射されたレーザー
ビームはコリメーターレンズ72により平行なレーザー
ビームとされ、副走査方向に所定の屈折率を有するシリ
ンドリカルレンズ73により集光した後、回転多面鏡
(ポリゴンミラーより成る光偏向器)74の反射面(偏
向面)74aに入射している。そして回転多面鏡74の
反射面74aで反射偏向したレーザービームは結像レン
ズ系(fφレンズ)75を介し、被走査面、例えば感光
体ドラム76面上に投射している。結像レンズ系はレー
ザービームのドラム面上に結像する点像の移動を等速化
し、画像歪を補正するいわゆるfφ機能を有する。そし
て回転多面鏡74を図中矢印A方向に一定速度で回転さ
せることにより、レーザービームを反射する反射面が切
り替わるとともに被走査面上を繰返し矢印B方向に等速
に光走査している。
FIG. 5 is a schematic view of a main part of a scanning optical system used in this type of image forming apparatus. In the figure, a laser beam emitted from a light source means 71 composed of a semiconductor laser or the like is converted into a parallel laser beam by a collimator lens 72, and is condensed by a cylindrical lens 73 having a predetermined refractive index in the sub-scanning direction. The light is incident on a reflection surface (deflection surface) 74a of a polygon mirror (optical deflector made of a polygon mirror) 74. The laser beam reflected and deflected by the reflecting surface 74a of the rotary polygon mirror 74 is projected onto a surface to be scanned, for example, the surface of the photosensitive drum 76 via an imaging lens system (fφ lens) 75. The imaging lens system has a so-called fφ function of making the movement of a point image formed on the drum surface of the laser beam uniform, and correcting image distortion. By rotating the rotary polygon mirror 74 at a constant speed in the direction of arrow A in the figure, the reflection surface for reflecting the laser beam is switched, and the surface to be scanned is repeatedly optically scanned in the direction of arrow B at a constant speed.

【0004】この走査光学系については、画像形成装置
への組立等に際し、評価装置を用いて光学的な性能評価
を行っている。従来この性能評価では、走査光学系から
の走査ビーム(走査光束)を走査方向における異なる複
数の位置、例えばビームの走査開始位置、中間位置、走
査終り位置等で受光し、走査方向と直交する方向におけ
る走査位置、ビーム径、走査開始タイミング等を測定し
ている。
[0004] The optical performance of this scanning optical system is evaluated using an evaluation device when assembling it into an image forming apparatus or the like. Conventionally, in this performance evaluation, a scanning beam (scanning light beam) from a scanning optical system is received at a plurality of different positions in a scanning direction, for example, a beam scanning start position, an intermediate position, a scanning end position, and the like, and a direction orthogonal to the scanning direction. , The scanning position, beam diameter, scanning start timing, etc. are measured.

【0005】[0005]

【発明が解決しようとする課題】しかし、光学的な性能
評価の一つであるべき走査ビームの走査方向の光量ムラ
(走査方向に沿って生じる光量ムラ)については測定を
行うことなく、画像形成装置に組込み実際に紙に印字さ
せて、その印字濃度ムラを人が目視で評価しており、官
能検査であるがために評価基準が明確でなく、その評価
ばらつきが大きくあいまいであった。また走査光学系を
画像形成装置本体に組み込んで、製品として完成した状
態で印字しなければならないため、もし光量ムラの不良
が印字評価で検出されると、画像形成装置本体を分解し
て走査光学系を取り外すという手間がかかり、コスト高
を招く結果ともなっていた。
However, non-uniform light quantity in the scanning direction of the scanning beam (non-uniform light quantity generated along the scanning direction), which is one of the optical performance evaluations, is not measured without performing image formation. The print density unevenness was visually evaluated by a person by assembling it into a device and actually printing on paper. The evaluation standard was not clear because of the sensory test, and the evaluation variation was large and ambiguous. In addition, since the scanning optical system must be incorporated into the image forming apparatus main body and printed in a completed state as a product, if a defect in light amount unevenness is detected in the printing evaluation, the image forming apparatus main body is disassembled and the scanning optical system is disassembled. It took time and effort to remove the system, resulting in higher costs.

【0006】本発明は、上記の未解決の課題に鑑みてな
されたものであり、走査方向の光量ムラの評価を他の光
学的な性能評価と同様に走査光学系の性能として定量的
に測定評価をおこなうことにより、確実にしかも短時間
で評価可能な、走査ビームの光量ムラ測定評価方法およ
び装置を提供することを目的とするものである。
The present invention has been made in view of the above-mentioned unsolved problems, and quantitatively measures the evaluation of unevenness in the light amount in the scanning direction as the performance of a scanning optical system in the same manner as other optical performance evaluations. It is an object of the present invention to provide a method and an apparatus for measuring and evaluating unevenness in the amount of light of a scanning beam, which can be evaluated reliably and in a short time by performing the evaluation.

【0007】[0007]

【課題を解決するための手段】本発明の走査ビームの光
量ムラ測定評価方法は、被評価走査光学系を作動させる
とともに、走査光学系の投射する走査ビームを受光する
走査ビーム受光部を走査ビームの中心方向に垂直な方向
に順次移動させ、走査ビーム受光部が予め測定ポイント
と定める走査ビームの複数の投射方向に到達する都度走
査ビーム受光部の移動を一時停止させ、回転多面鏡の一
回転毎の走査ビームの総光量を求め、複数の測定ポイン
ト毎に求めた総光量を比較する。
According to the present invention, there is provided a method for measuring and evaluating unevenness in the amount of light of a scanning beam. The method includes the steps of: operating a scanning optical system to be evaluated; and scanning a scanning beam receiving unit for receiving a scanning beam projected by the scanning optical system. The scanning beam receiver is sequentially moved in a direction perpendicular to the center direction, and the scanning beam receiver is temporarily stopped from moving each time the scanning beam receiver reaches a plurality of projection directions of the scanning beam which are determined in advance as measurement points, and one rotation of the rotating polygon mirror. The total light amount of the scanning beam for each is obtained, and the total light amounts obtained for a plurality of measurement points are compared.

【0008】予め定める複数の測定ポイントに走査ビー
ム受光部を一時停止させることに替え、走査ビーム受光
部を一定の速度で連続的に移動させながら光量測定を行
ってもよい。
Instead of temporarily stopping the scanning beam light receiving unit at a plurality of predetermined measurement points, the light amount measurement may be performed while the scanning beam light receiving unit is continuously moved at a constant speed.

【0009】本発明の走査ビームの光量ムラ測定、評価
装置は、被評価走査光学系を搭載する走査光学系搭載部
と、被評価走査光学系の投射する走査ビームを受光する
走査ビーム受光部を搭載し、走査ビーム受光部を被評価
走査光学系から一定の距離にあり、かつ走査ビームの中
心方向に垂直な方向に移動する受光部移動ステージと、
被評価走査光学系および受光部移動ステージの動作を制
御し、回転多面鏡の回転に伴ない、各反射面から投射さ
れる走査ビームの走査回数を積算するとともに各走査ビ
ームの光量を測定し、回転多面鏡の一回転分の走査ビー
ムの総光量を求め、移動する測定ポイント毎の総光量を
比較し、評価する制御部を有する。
An apparatus for measuring and evaluating unevenness in the amount of light of a scanning beam according to the present invention comprises a scanning optical system mounting section for mounting a scanning optical system to be evaluated, and a scanning beam light receiving section for receiving a scanning beam projected by the scanning optical system to be evaluated. Mounted, a light receiving unit moving stage that moves the scanning beam light receiving unit at a fixed distance from the evaluated scanning optical system and moves in a direction perpendicular to the center direction of the scanning beam,
Control the operation of the scanning optical system to be evaluated and the light receiving unit moving stage, with the rotation of the rotating polygon mirror, accumulate the number of scans of the scanning beam projected from each reflecting surface and measure the light amount of each scanning beam, A control unit is provided for obtaining the total light amount of the scanning beam for one rotation of the rotating polygon mirror, comparing and evaluating the total light amount for each moving measurement point.

【0010】走査ビーム受光部は、回転多面鏡の回転に
伴う走査ビームの走査回数をカウントするとともに光量
測定のタイミングを定めるためのフォトセンサと、その
タイミングに従って走査ビームの光量を測定する光量セ
ンサを有するものでもよい。フォトセンサおよび光量セ
ンサの受光面は走査ビームの走査方向に垂直な方向に長
尺な矩形状であるものでもよい。
The scanning beam receiving section includes a photosensor for counting the number of scans of the scanning beam associated with the rotation of the rotary polygon mirror and determining the timing of light quantity measurement, and a light quantity sensor for measuring the light quantity of the scanning beam according to the timing. May be provided. The light receiving surfaces of the photo sensor and the light amount sensor may have a rectangular shape elongated in a direction perpendicular to the scanning direction of the scanning beam.

【0011】[0011]

【発明の実施の形態】本発明の実施の形態を図面を参照
して説明する。
Embodiments of the present invention will be described with reference to the drawings.

【0012】図1は走査光学系における走査ビームの光
量ムラ測定評価装置E1のシステム構成を示している。
光量ムラ測定評価装置E1は被評価走査光学系を搭載す
る走査光学系搭載部と、走査光学系の発する走査ビーム
を受光する受光部を搭載し、制御部は移動する受光部移
動ステージと、測定評価動作を制御する制御部を有す
る。
FIG. 1 shows a system configuration of an apparatus E1 for measuring and evaluating unevenness in light quantity of a scanning beam in a scanning optical system.
The light amount unevenness measurement and evaluation apparatus E1 includes a scanning optical system mounting section on which a scanning optical system to be evaluated is mounted, and a light receiving section for receiving a scanning beam emitted from the scanning optical system, and a control section includes a moving light receiving section moving stage, and a measuring section. It has a control unit for controlling the evaluation operation.

【0013】走査光学系の半導体レーザー1から発生さ
れたレーザー光は、コリメータレンズ2によって平行化
され、シリンドリカルレンズ3によって回転多面鏡4の
鏡面4aに線状に集光され、回転多面鏡4の回転によっ
て偏向走査される。走査ビームL1は球面レンズ5aや
トーリックレンズ5bを有する結像レンズ系5によって
仮想走査面6上に結像される。この仮想走査面は画像形
成装置における回転ドラムの感光体の表面に相当する。
A laser beam generated from a semiconductor laser 1 of a scanning optical system is collimated by a collimator lens 2 and condensed linearly on a mirror surface 4 a of a rotary polygon mirror 4 by a cylindrical lens 3. Deflection scanning is performed by rotation. The scanning beam L1 is imaged on a virtual scanning plane 6 by an imaging lens system 5 having a spherical lens 5a and a toric lens 5b. This virtual scanning surface corresponds to the surface of the photoconductor of the rotating drum in the image forming apparatus.

【0014】移動ステージ20にはフォトセンサ11お
よび光量センサ12が搭載されており、これらのセンサ
の受光面は仮想走査面6上を移動するようにセットされ
る。図2は、移動ステージ20に搭載されたセンサを正
面から見た図である。仮想走査面6上の目標走査線A1
を含むZ軸に平行な仮想走査面(YZ平面)内に長尺な
矩形状の受光面11aを有する第1の検出手段であるフ
ォトセンサ11と、仮想走査面内に長尺な矩形状の受光
面12aを有する第2の検出手段である光量センサ12
が示されている。これらは、目標走査線A1に沿ってY
軸方向に移動自在である受光部移動ステージ20に搭載
される。
The moving stage 20 has a photo sensor 11 and a light amount sensor 12 mounted thereon. The light receiving surfaces of these sensors are set so as to move on the virtual scanning surface 6. FIG. 2 is a diagram of a sensor mounted on the moving stage 20 as viewed from the front. Target scanning line A1 on virtual scanning surface 6
And a photo sensor 11 which is a first detecting means having a long rectangular light receiving surface 11a in a virtual scanning plane (YZ plane) parallel to the Z axis, and a long rectangular light receiving plane in the virtual scanning plane. Light amount sensor 12 as second detection means having light receiving surface 12a
It is shown. These are Y along the target scanning line A1.
It is mounted on a light receiving unit moving stage 20 that is movable in the axial direction.

【0015】フォトセンサ11の受光面11aおよび光
量センサ12の受光面12aはZ軸方向に長尺であると
ともにY軸方向に一定の幅を有する。特に光量センサの
受光面12aのY軸方向の幅は光量ムラ検出の分解能設
定によって変わる。走査光学系の光量ムラ評価の目的は
特に結像レンズ系5のゴミ、汚れ、傷、歪等を検出する
ことなので、この結像レンズ系上での走査ビーム径の数
分の一を分解能とすればよい。例えば結像レンズ上での
走査ビーム径が1mmだとすれば、受光面12aの幅
(測定分解能)は0.3mm程度にすれば結像レンズ系
上での前記不良要因は検出可能である。また走査ビーム
は目標走査線A1上にかならずしも沿っているわけでは
なく、例えば曲線B1のように走査される。そのような
場合にも走査ビームを捕らえるためにZ軸方向に長尺な
受光面を持ち、ビームの光量変化を検出する。
The light receiving surface 11a of the photo sensor 11 and the light receiving surface 12a of the light amount sensor 12 are long in the Z-axis direction and have a certain width in the Y-axis direction. In particular, the width of the light receiving surface 12a of the light amount sensor in the Y-axis direction changes depending on the resolution setting for light amount unevenness detection. Since the purpose of evaluating the unevenness in the light amount of the scanning optical system is particularly to detect dust, dirt, scratches, distortion, etc. of the imaging lens system 5, a fraction of the scanning beam diameter on the imaging lens system is defined as the resolution. do it. For example, if the scanning beam diameter on the imaging lens is 1 mm, and the width (measurement resolution) of the light receiving surface 12a is about 0.3 mm, the cause of the defect on the imaging lens system can be detected. Further, the scanning beam does not always follow the target scanning line A1, but is scanned, for example, as a curve B1. In such a case as well, it has a long light receiving surface in the Z-axis direction in order to catch the scanning beam, and detects a change in the light amount of the beam.

【0016】制御部は、走査光学系および移動ステージ
の動作を制御するコントロールボックス21と、回転多
面鏡の反射鏡面数を格納する面数メモリ26と、反射鏡
面の切り替えによる走査回数をカウントするカウンタ2
4と、測定した走査ビームの光量を格納するメモリ25
と、測定評価装置全般の動作を制御し、回転多面鏡の一
回転毎の総光量を測定位置について比較し、評価するホ
ストコンピュータから成っている。
The control unit includes a control box 21 for controlling the operation of the scanning optical system and the moving stage, a surface number memory 26 for storing the number of reflecting mirror surfaces of the rotary polygon mirror, and a counter for counting the number of scans by switching the reflecting mirror surface. 2
4 and a memory 25 for storing the measured light amount of the scanning beam.
And a host computer that controls the overall operation of the measurement and evaluation device and compares and evaluates the total amount of light per one rotation of the rotating polygon mirror at the measurement position.

【0017】測定評価装置E1による走査ビームL1の
測定評価は以下のように行われる。図3は測定評価装置
E1による測定評価の手順を示すフローチャートであっ
て、まず対象となる走査光学系を測定評価装置E1の所
定の位置に設置し、半導体レーザー(光源)を発光さ
せ、回転多面鏡を回転させて走査状態とする(ステップ
1)。次に、ホストコンピュータ2はコントロールボッ
クス21に指令し、移動ステージ20をY軸方向に移動
させ、これによってフォトセンサ11と光量センサ12
を順次測定ポイントに移動させ、光量測定を開始する。
フォトセンサ11は測定のためのタイミングおよび計数
センサであり、ホストコンピュータ22はフォトセンサ
11で走査ビームを検知したのち、一定の時間遅延させ
て光量センサ12の出力信号を読み出す(ステップ2、
3、4)。そして光量センサ12の光量をフォトセンサ
11の信号をカウンタ24で計数した値すなわち走査回
数と対応づけて、メモリ25に格納する(ステップ5、
6、7)。これにより回転多面鏡の反射鏡1面毎の光量
がメモリ25に格納される。こうして格納された反射鏡
面毎の光量を、ホストコンピュータ22が面数26から
読み出し反射鏡の面数分加算した総光量を1測定ポイン
トでの光量とする。ホストコンピュータ22はこのカウ
ンタ24により得られた値(走査回数)が面数メモリ2
6の値と同数になった時点で(ステップ8)、すなわち
回転多面鏡4が一回転した時点でコントロールボックス
21へ指令を送り、次の測定ポイントへ受光部移動ステ
ージ20を移動させる(ステップ9)。そして最終測定
ポイントになるまでステップ2〜9を繰返す。このよう
にして検出された走査ビームL1の光量は、各測定ポイ
ント毎にホストコンピュータ22で算出され(ステップ
10)、その値の比較により光量ムラの評価が行われる
(ステップ11)。
The measurement and evaluation of the scanning beam L1 by the measurement and evaluation device E1 are performed as follows. FIG. 3 is a flowchart showing the procedure of measurement evaluation by the measurement evaluation apparatus E1. First, a target scanning optical system is installed at a predetermined position of the measurement evaluation apparatus E1, a semiconductor laser (light source) is made to emit light, and The mirror is rotated to enter a scanning state (step 1). Next, the host computer 2 instructs the control box 21 to move the moving stage 20 in the Y-axis direction.
Are sequentially moved to the measurement points, and the light quantity measurement is started.
The photo sensor 11 is a timing and counting sensor for measurement, and the host computer 22 detects the scanning beam with the photo sensor 11 and then reads out the output signal of the light amount sensor 12 with a certain delay (steps 2 and 3).
3, 4). Then, the light amount of the light amount sensor 12 is stored in the memory 25 in association with the value of the signal of the photo sensor 11 counted by the counter 24, that is, the number of scans (step 5,
6, 7). As a result, the amount of light for each reflecting mirror of the rotating polygon mirror is stored in the memory 25. The host computer 22 reads out the stored light amount for each reflecting mirror surface from the number of surfaces 26 and adds the light amount for the number of reflecting mirror surfaces to obtain the total light amount at one measurement point. The host computer 22 stores the value (the number of scans) obtained by the counter 24 in the surface number memory 2.
When the value becomes equal to the value of 6 (step 8), that is, when the rotary polygon mirror 4 makes one rotation, a command is sent to the control box 21 to move the light receiving unit moving stage 20 to the next measurement point (step 9). ). Steps 2 to 9 are repeated until the final measurement point is reached. The light amount of the scanning beam L1 detected in this way is calculated by the host computer 22 for each measurement point (step 10), and the light amount unevenness is evaluated by comparing the values (step 11).

【0018】以上は、測定ポイント毎に回転多面鏡一回
転分の光量を求めた後、順次受光部移動ステージを次の
測定ポイントに移動しているが、予め複数の測定ポイン
トを定めることに替え、移動ステージを一定の適宜な速
度で移動させながら同様な光量測定を行ない、測定点毎
の測定光量を求めてもよい。
In the above description, the light amount for one rotation of the rotating polygon mirror is obtained for each measurement point, and then the light receiving unit moving stage is sequentially moved to the next measurement point. Alternatively, the same light amount measurement may be performed while moving the moving stage at a constant appropriate speed, and the measured light amount at each measurement point may be obtained.

【0019】[0019]

【発明の効果】以上のように本発明によれば、各測定ポ
イントにおいて多面鏡一回転分の総光量を積算し、その
値で評価を行うので、各反射鏡面の面精度の不均一によ
る反射光量のばらつきに関係なく走査光学系の光量ムラ
を定量的に評価することができる効果がある。そしてそ
の結果により光学系にあるゴミ、ケバ等の位置を特定
し、その場で清掃、交換することにより欠陥を除くこと
が出来、従って走査光学系を画像形成装置等に組み込ん
で印字させて目視するのと異なり、走査光学系の光量ム
ラを短時間に定量的に測定評価できるため、走査光学系
を用いる画像形成装置等の製造コストを大幅に低減する
ことも可能になる。
As described above, according to the present invention, the total light amount for one rotation of the polygon mirror is integrated at each measurement point, and the evaluation is performed based on the integrated value. There is an effect that the light amount unevenness of the scanning optical system can be quantitatively evaluated regardless of the light amount variation. Then, based on the result, the position of dust, fluff, etc. in the optical system can be specified, and the defect can be removed by cleaning and replacing on the spot. Therefore, the scanning optical system is incorporated into an image forming apparatus or the like to print and visually inspect. Unlike the above, since the unevenness in the light amount of the scanning optical system can be quantitatively measured and evaluated in a short time, the manufacturing cost of an image forming apparatus or the like using the scanning optical system can be significantly reduced.

【図面の簡単な説明】[Brief description of the drawings]

【図1】走査ビームの光量ムラ測定評価装置の説明図で
ある。
FIG. 1 is an explanatory diagram of a scanning beam light amount unevenness measurement evaluation apparatus.

【図2】図1の測定評価装置の受光面を示す図である。FIG. 2 is a diagram showing a light receiving surface of the measurement and evaluation device of FIG.

【図3】図1の装置によって走査ビームの光量ムラの測
定評価を行う手順を示すフローチャートである。
FIG. 3 is a flowchart showing a procedure for measuring and evaluating unevenness in light amount of a scanning beam by the apparatus of FIG. 1;

【図4】光量読出しのタイミングと光量の加算関係を示
す図である。
FIG. 4 is a diagram showing an addition relationship between a light amount reading timing and a light amount.

【図5】画像形成装置の走査光学系の説明用図である。FIG. 5 is an explanatory diagram of a scanning optical system of the image forming apparatus.

【符号の説明】[Explanation of symbols]

1、71 レーザ光線 2、72 コリメータレンズ 3、73 シリンドリカルレンズ 4、74 回転多面鏡 4a、74a 反射鏡面(偏向面) 5a 球面レンズ 5b トーリックレンズ 5、75 結像レンズ系 6 仮想走査面 76 感光体ドラム 11 フォトセンサ 12 光量センサ 11a、12a 受光面 20 移動ステージ 21 コントロールボックス 22 ホストコンピュータ 24 カウンタ 25 メモリ 26 面数メモリ 1, 71 Laser beam 2, 72 Collimator lens 3, 73 Cylindrical lens 4, 74 Rotating polygon mirror 4a, 74a Reflecting mirror surface (deflection surface) 5a Spherical lens 5b Toric lens 5, 75 Imaging lens system 6 Virtual scanning surface 76 Photoconductor Drum 11 Photo sensor 12 Light intensity sensor 11a, 12a Light receiving surface 20 Moving stage 21 Control box 22 Host computer 24 Counter 25 Memory 26 Surface number memory

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 回転多面鏡の回転により一定方向に繰返
し移動する走査ビームを投射する走査光学系の走査ビー
ムの投射方向の変化に伴う走査方向の光量ムラを測定評
価する走査ビームの光量ムラ測定評価方法において、 被評価走査光学系を作動させるとともに、該走査光学系
の投射する走査ビームを受光する走査ビーム受光部を該
走査ビームの中心方向に垂直な方向に順次移動させ、 前記走査ビーム受光部が予め測定ポイントと定める走査
ビームの複数の投射方向に到達する都度走査ビーム受光
部の移動を一時停止させ、回転多面鏡の一回転毎の走査
ビームの総光量を求め、 前記複数の測定ポイント毎に求めた総光量を比較するこ
とを特徴とする走査ビームの光量ムラ測定、評価方法。
1. A scanning optical system for projecting a scanning beam which repeatedly moves in a fixed direction by rotation of a rotary polygon mirror, and measures and evaluates a scanning beam unevenness in a scanning direction due to a change in a scanning direction of the scanning beam. In the evaluation method, the scanning optical system to be evaluated is operated, and a scanning beam receiving unit that receives a scanning beam projected by the scanning optical system is sequentially moved in a direction perpendicular to a center direction of the scanning beam. Each time the unit reaches a plurality of projection directions of the scanning beam that is determined in advance as a measurement point, the movement of the scanning beam light receiving unit is temporarily stopped, and the total light amount of the scanning beam per rotation of the rotating polygon mirror is obtained, and the plurality of measurement points are determined. A method for measuring and evaluating unevenness in the amount of light of a scanning beam, wherein the total amount of light obtained for each is compared.
【請求項2】 前記予め走める複数の測定ポイントに走
査ビーム受光部を一時停止させることに替え、走査ビー
ム受光部を一定の速度で連続的に移動させながら光量測
定を行う請求項1に記載の走査ビーム光量ムラ測定評価
方法。
2. The method according to claim 1, wherein instead of temporarily stopping the scanning beam light receiving unit at the plurality of measurement points that can be run in advance, the light amount is measured while the scanning beam light receiving unit is continuously moved at a constant speed. Scanning beam light amount unevenness measurement evaluation method described in the above.
【請求項3】 回転多面鏡の回転により一定方向に繰返
し移動する走査ビームを投射する走査光学系の走査ビー
ムの投射方向の変化に伴う走査方向の光量ムラを測定評
価する走査ビームの光量ムラ測定、評価装置において、 被評価走査光学系を搭載する走査光学系搭載部と、 前記走査光学系の投射する走査ビームを受光する走査ビ
ーム受光部を搭載し、該受光部を前記走査光学系から一
定の距離にあり、かつ前記走査ビームの中心方向に垂直
な方向に移動する受光部移動ステージと、 前記走査光学系および前記受光部移動ステージの動作を
制御し、回転多面鏡の回転に伴ない、各反射面から投射
される走査ビームの走査回数を積算するとともに各走査
ビームの光量を測定し、回転多面鏡の一回転分の走査ビ
ームの総光量を求め、移動する測定ポイント毎の前記総
光量を比較し、評価する制御部を有することを特徴とす
る走査ビームの光量ムラ測定、評価装置。
3. A scanning light beam non-uniformity measurement for measuring and evaluating a scanning beam non-uniform light amount unevenness due to a change in a scanning direction of a scanning beam of a scanning optical system for projecting a scanning beam repeatedly moving in a fixed direction by rotation of a rotary polygon mirror. An evaluation apparatus, comprising: a scanning optical system mounting unit that mounts a scanning optical system to be evaluated; and a scanning beam light receiving unit that receives a scanning beam projected by the scanning optical system, and the light receiving unit is fixed from the scanning optical system. And a light receiving unit moving stage that moves in a direction perpendicular to the center direction of the scanning beam, and controls the operations of the scanning optical system and the light receiving unit moving stage, with the rotation of the rotating polygon mirror, Integrates the number of scans of the scanning beam projected from each reflecting surface, measures the amount of light of each scanning beam, obtains the total amount of scanning beam for one rotation of the rotating polygon mirror, and moves the measurement. An apparatus for measuring and evaluating unevenness in the amount of light of a scanning beam, comprising a control unit for comparing and evaluating the total amount of light for each point.
【請求項4】 前記走査ビーム受光部は、回転多面鏡の
回転に伴う走査ビームの走査回数をカウントするととも
に、光量測定のタイミングを定めるためのフォトセンサ
と、前記タイミングに従って前記走査ビームの光量を測
定する光量センサを有する請求項3に記載の光量ムラ測
定、評価装置。
4. The scanning beam receiving section counts the number of scannings of the scanning beam associated with the rotation of the rotary polygon mirror, and determines a timing of light quantity measurement, and detects a light quantity of the scanning beam according to the timing. The light amount unevenness measurement and evaluation device according to claim 3, further comprising a light amount sensor for measuring.
【請求項5】 前記フォトセンサおよび光量センサの受
光面は走査ビームの走査方向に垂直な方向に長尺な矩形
状である請求項4に記載の光量ムラ測定評価装置。
5. The light amount unevenness measurement and evaluation apparatus according to claim 4, wherein the light receiving surfaces of the photosensor and the light amount sensor are rectangular in a direction elongated in a direction perpendicular to the scanning direction of the scanning beam.
JP31227697A 1997-11-13 1997-11-13 Method and apparatus for measurement and evaluation of irregularity in quantity of light of scanning beam Pending JPH11142235A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31227697A JPH11142235A (en) 1997-11-13 1997-11-13 Method and apparatus for measurement and evaluation of irregularity in quantity of light of scanning beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31227697A JPH11142235A (en) 1997-11-13 1997-11-13 Method and apparatus for measurement and evaluation of irregularity in quantity of light of scanning beam

Publications (1)

Publication Number Publication Date
JPH11142235A true JPH11142235A (en) 1999-05-28

Family

ID=18027299

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31227697A Pending JPH11142235A (en) 1997-11-13 1997-11-13 Method and apparatus for measurement and evaluation of irregularity in quantity of light of scanning beam

Country Status (1)

Country Link
JP (1) JPH11142235A (en)

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