JPH11138469A - Hydraulic remote control-type micromanipulator device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a hydraulic remote control-type micromanipulator device having the tip of a micro tool not to be moved even when the temperature is changed. SOLUTION: In a hydraulic remote control-type micromanipulator device 1, when a moving table is slightly moved by operating a moving table slightly moving operation means of a micromanipulator slightly moving operating device, the liquid amounts in a first hydraulic cylinder and a second hydraulic cylinder are increased or decreased, the liquid amounts in a third hydraulic cylinder 76 and a fourth hydraulic cylinder 75 of the hydraulic micromanipulator are increased or decreased through a first hose 47 and a second hose 48, and an outer slider 63 capable of being freely slid in relation to an inner slider 65 is slightly moved.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hydraulic remote control type micromanipulator device which enables a microtool such as a glass electrode to be microscopically remotely controlled by a hydraulic pressure or the like under a microscope.

[0002]

2. Description of the Related Art In the fields of basic medicine and biotechnology, organs and biological tissues of living organisms, cells such as egg cells and single cells are held, and cells are subjected to cell processing such as suction, injection, and division. There is a micromanipulator that operates, and various types of cell processing are performed on these cells by finely manipulating the micromanipulator within the visual field of the microscope. By the way, if the operator touches the operation handle of the micromanipulator directly with his / her hand to make fine movements, the tremor generated in the hand may be enlarged and transmitted through the machine frame, and the tremor generated in the hand is suppressed as much as possible to quietly operate the micromanipulator. It must be operated, which is cumbersome and requires careful attention and considerable skill. Therefore, there is a hydraulic micromanipulator in which the micromanipulator can be finely and remotely controlled by a hydraulic pressure or the like.

FIG. 11 is an explanatory view schematically illustrating the configuration of a conventional cell processing apparatus. In FIG. 11, the cell processing apparatus includes a stage 103 on which an egg cell 101 is immersed and placed in a test solution in a petri dish 102;
, A micromanipulator 105 for actually performing cell processing, and an optical system 10 for observing an image illuminating the egg cell 101.
6 and these parts are integrally formed and placed on the vibration-proof mat 107 for operation. The micromanipulator 105 is equipped with a three-dimensional movement mechanism for mounting various microtools 108 according to the purpose of cell processing and moving the tip three-dimensionally, and a joystick 109 for an operator to instruct a fine movement operation. Thus, the three-dimensional moving mechanism is operated by hydraulic pressure or the like.

[0004] The joystick 109 hangs down the operating rod 111 with the tip of a support frame 110 formed in an eaves shape as a fulcrum, and is perpendicular to the operating rod 111 in two directions (arrows) 11.
A transmission unit 113 is provided for transmitting the rocking motion 2 to the above-described three-dimensional moving mechanism by hydraulic pressure or the like. The operating rod 111 is operated to finely perform two-dimensional movement mainly in a horizontal plane. . The operating rod 111 is arranged in two orthogonal directions (arrows) 1
There is a converter 114 for converting the rocking motion of twelve into a mechanical displacement in a horizontal plane, and the converter 114 is provided at a portion connected to the support frame 110.

[0005] In addition to the hanging operation rod 111, the operation rod 111 is provided directly upright on the conversion section 114. However, since the operator can easily operate at a low position without lifting the arm, the one provided by hanging is often used recently. In addition, there is a case where it is necessary to move the processing object in the vertical direction in the three-dimensional movement mechanism, and therefore, a mechanism for performing a fine movement operation in the vertical direction is provided in the vicinity to enable three-dimensional movement. There is.

[0006]

However, in the case of a hydraulic micromanipulator in which the micromanipulator is finely and remotely controlled by a hydraulic pressure or the like, when the temperature changes, the hydraulic fluid changes its volume in accordance with the temperature change. Will wake up. With the change in the volume of the working fluid, the tip of the micro tool of the micro manipulator drifts, which hinders accurate observation and operation. There is also a method in which the micromanipulator is electrically operated instead of the hydraulic pressure.However, since the tip of the micromanipulator's microtool easily moves due to an electrical obstacle or the like, the problem of causing a drift phenomenon cannot be similarly solved. there were. In particular, when observing or operating the sample by contacting the sample with the tip of the microtool for a long time, if the drift phenomenon occurs, the tip of the microtool moves away from the sample, and the observation and operation cannot be continued. is there.

Accordingly, an object of the present invention is to prevent a drift phenomenon of a micro tool caused by a change in the volume of a working fluid due to a temperature change even in a case of a temperature change in a hydraulic type hydraulic remote control type micromanipulator device. Is to do.

[0008]

SUMMARY OF THE INVENTION A hydraulic remote control type micromanipulator device according to the present invention which has solved the above-mentioned problems is provided with an operating portion which is movable forward and backward so as to be finely movable with respect to an operating portion side hydraulic cylinder. A micromanipulator fine movement operation device having a side piston, one of the operation unit side hydraulic cylinder and the operation unit side piston is fixed, and the other is finely moved by fine movement moving operation means,
An operating part side piston that is fitted to the operating part side hydraulic cylinder that communicates with the operating part side hydraulic cylinder via a hose so that the operating part side hydraulic cylinder can be finely moved, and the operating part side hydraulic cylinder; A hydraulic micromanipulator to which one of the operating unit-side pistons is fixed and a fine movement member is attached to the other, and an operation between the operating unit-side hydraulic cylinder and the operating unit-side hydraulic cylinder It is characterized by comprising a compensating means for compensating a movement amount substantially equal to the movement amount of the fine movement moving member due to a volume change accompanying a temperature change of the liquid.

The compensating means suppresses a change in the volume of the hydraulic fluid between the operating portion side hydraulic cylinder and the operating portion side hydraulic cylinder when the hydraulic fluid attempts to change its volume due to a temperature change. This can be a suppressing means.

[0010] At this time, the restraint means causes the fine movement member to move slightly due to a volume change accompanying a temperature change of the hydraulic fluid between the operation part side hydraulic cylinder and the operation part side hydraulic cylinder. It may comprise a suppression hydraulic cylinder for pressing the fine movement member in a direction opposite to the direction, and a piston fitted to the suppression hydraulic cylinder.

Further, the hydraulic remote control type micromanipulator device according to the present invention has a movable base slidably fitted to a base, and has respective openings facing outward in the moving direction of the movable base. First and second hydraulic cylinders,
A first piston fixed to the first hydraulic cylinder so as to be able to move forward and backward, and a base end fixed to the base, and a first piston fitted to the second hydraulic cylinder so as to be able to move forward and backward; A second piston fixed to the base, a micromanipulator fine movement operation device having a movement base fine movement movement means for finely moving the movement table, and an outer slider having a concave groove engraved in the movement direction, An inner slider movably mounted in the concave groove of the outer slider, third and fourth hydraulic cylinders fixed with their respective openings facing outward in the moving direction of the outer slider, and A third piston, which is fitted into the hydraulic cylinder so as to be able to move forward and backward, and whose base end is fixed to the inner slider, is fitted into the fourth hydraulic cylinder so as to be able to move forward and backward, and the base end is fitted to the inner slider. A fixed fourth piston, Hydraulic micromanipulator having a first hose connecting the second hydraulic cylinder and the third hydraulic cylinder, and a second hose connecting the second hydraulic cylinder and the fourth hydraulic cylinder And, by operating the moving table fine movement moving operation means of the micromanipulator fine movement operation device to finely move the moving table,
The fluid amount in the first hydraulic cylinder and the second hydraulic cylinder increases and decreases, and the third hydraulic cylinder and the fourth hydraulic pressure are increased via the first hose and the second hose. The outer slider can be finely moved with respect to the fixed inner slider by increasing or decreasing the amount of liquid in the cylinder. Alternatively, the micromanipulator fine movement operation device, between the base and the moving table, the first hydraulic cylinder and the first piston which is fitted into the first hydraulic cylinder so as to advance and retreat, By interposing the second hydraulic cylinder and the second piston which is fitted into the second hydraulic cylinder so as to be able to advance and retreat, the moving table is finely moved, and the liquid amount in the first hydraulic cylinder is adjusted. Increases, the amount of fluid in the second hydraulic cylinder decreases, and when the amount of fluid in the first hydraulic cylinder decreases, the amount of fluid in the second hydraulic cylinder increases. You can also

[0012] Also, a movable table slidably fitted to the base, and a first and a second fixed to the base with their respective openings facing inward along the moving direction of the movable table. Second
A hydraulic cylinder, a first common piston fixed to the first and second hydraulic cylinders so as to be able to move forward and backward, and a central portion fixed to the movable table, and a movable table for finely moving the movable table. A micromanipulator fine movement operation device having a fine movement movement operation means, an outer slider having a groove formed in the movement direction, an inner slider movably mounted in the groove of the outer slider, and Third and fourth hydraulic cylinders fixed to face each other with their openings facing inward in the moving direction are fitted into the third and fourth hydraulic cylinders so as to be able to advance and retreat, and the central portion is A second common piston fixed to the outer slider; a first hose connecting the first hydraulic cylinder to the third hydraulic cylinder; a second hydraulic cylinder and the fourth hydraulic cylinder; No. connecting pressure cylinder And a hydraulic micromanipulator having a hose. When the movable table is finely moved by operating the movable table fine movement moving means of the micromanipulator fine movement operation device, the first hydraulic cylinder and the second hydraulic cylinder are moved. The amount of liquid in the hydraulic cylinder increases and decreases, and the amount of liquid in the third hydraulic cylinder and the fourth hydraulic cylinder increases and decreases via the first hose and the second hose,
The outer slider may be finely moved with respect to the fixed inner slider.

Further, the micromanipulator fine movement operation device can perform fine movement operation in three directions of front-rear direction, left-right direction and vertical direction, and the hydraulic micromanipulator can be operated in three-dimensional directions of front-rear direction, left-right direction and vertical direction. A hydraulic remote control type micromanipulator device characterized by being capable of fine movement can also be provided.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a hydraulic remote control type micromanipulator according to the present invention will be described below with reference to the drawings. FIG. 1 is a hydraulic remote control type micromanipulator device 1 according to a first embodiment of the present invention.
As shown in FIG. 1, the hydraulic remote control type micromanipulator device 1 includes a three-way handle type micromanipulator fine movement operation device 2 and a three-dimensional hydraulic micromanipulator 3. The micromanipulator fine movement operation device 2 is connected to a three-dimensional hydraulic micromanipulator (hereinafter, simply referred to as “micromanipulator”) 3 via hoses 47, 48, 57, 58, 59, 60 described later, and the micromanipulator 3 is connected. Is fixed to a mounting bar 6 gripped by a column 5. Further, the micromanipulator 3 includes:
A micro tool 9 is fixed via a fastener 7 and a holder 8.

The micromanipulator fine movement operation device 2 has a base plate 11, on which side plates 13, 14, 15, 16 are erected.
The upper ends of 14, 15, and 16 are covered with an upper plate 17. Base plate 11, side plates 13, 14, 15, 16 and upper plate 1
7 are fixed to each other, and the base plate 11, the side plates 13, 14,
A case 18 is formed from 15, 16 and the upper plate 17.

FIG. 2 is a perspective view showing the X-axis fine movement operation mechanism in the left-right direction of the micromanipulator fine movement operation device, and FIG. 3 is an exploded perspective view thereof. As shown in FIGS. Has a through hole 13a in the center of
The tip of the bearing metal 21 is inserted and fitted into the through hole 13a. The bearing metal 21 is fitted in a center hole of a ring 22, and the ring 22 is fixed to the side plate 13 by bolts 23, 23. The small diameter shaft 25b of the X-axis fine movement screw shaft 25 is inserted into a through hole at the center of the bearing metal 21. The X axis fine movement screw shaft 25 is a male screw 25a for fine movement.
And a small diameter shaft 25b smaller in diameter than the fine movement male screw 25a, and an X-axis fine movement handle fixing male screw 25c provided at the rear end of the small diameter shaft 25b.

An outer periphery of the ring 22 is open at one side, and a cylindrical X-axis fine-adjustment handle 26 engraved with a knurl is rotatably fitted on the outer periphery of the closed side. An X-axis fine movement handle fixing male screw 25c of the X-axis fine movement screw shaft 25 is screwed with a female screw passing through the center of the X-axis fine movement handle 26, and a fixing nut 27 is further screwed therein. By tightening the nut 27, the X-axis fine movement handle 26 is non-rotatably fixed to the X-axis fine movement screw shaft 25. These X-axis fine movement handles 2
6. The X-axis fine movement screw shaft 25 and the like constitute fine movement moving operation means (moving table fine movement moving operation means).

A groove 3 is provided on the outer slider 30 serving as a base.
The inner slider 31 is slidably mounted in the groove 30a via a linear way bearing (not shown). A female screw 31a is screwed into a through hole formed in the inner slider 31 in the moving direction, and a fine male screw 25a of the X-axis fine movement screw shaft 25 is screwed into the female screw 31a of the inner slider 31. I have.

A side plate 3 is provided at one end of the outer slider 30.
3 is fixed by bolts 35, 35, and the outer slider 3
The other end of 0 is fixed to the side plate 13 of the case 18 by bolts 36,36. Further, a piston 37 serving as a first piston protrudes inward from the side plate 33, and a piston 38 serving as a second piston protrudes inward from the side plate 13.

A center plate 40 is fixedly provided at the center of the upper surface of the inner slider 31. The center plate 40 is used as a center for a hydraulic cylinder 41 as a first hydraulic cylinder and a second hydraulic cylinder. Hydraulic cylinder 42 is inner slider 3
The openings are fixed outward by the cylinder retainers 44 and 45 in the moving direction of the cylinder 1. The hydraulic cylinders 41 and 42 are cylindrical with one side open, and have flanges 41a and 42a on the outer periphery and hose connection ports 41b and 42b near the closed side of the cylinder.
2a is in contact with the side surfaces of the cylinder retainers 44, 45, and one ends of hoses 47, 48 are connected to the hose connection ports 41b, 42b, respectively. Here, the hose 47 is connected to a hydraulic cylinder 41 that is a first hydraulic cylinder and a third cylinder that will be described later.
Is a first hose that connects the X-axis hydraulic cylinder 76, which is a hydraulic cylinder. The hose 48 is a second hose that connects the hydraulic cylinder 42 as a second hydraulic cylinder and an X-axis hydraulic cylinder 75 as a fourth cylinder described later.

Further, pistons 37 and 38 are fitted in the hydraulic cylinders 41 and 42 so as to be able to advance and retreat, respectively. An oil chamber 41 'is formed between the hydraulic cylinder 41 and the piston 37, and the hydraulic cylinder 42 and the piston 37 Oil chamber 4 between
2 'is formed. Then, the X axis fine movement handle 26, X
Shaft fine movement screw shaft 25, bearing metal 21, ring 22, outer slider 30, inner slider 31, hydraulic cylinder 41,
An X-axis fine movement operation mechanism 50, which is the micromanipulator fine movement operation device 2 in the X-axis direction, is constituted by the piston 42, the pistons 37 and 38, and the like.

In the X-axis fine movement operation mechanism 50, when the operator rotates the X-axis fine movement handle 26, the X-axis fine movement
The shaft fine movement screw shaft 25 rotates. At this time, since the fine movement male screw 25a of the X-axis fine movement screw shaft 25 is screwed with the female screw 31a of the inner slider 31, the inner slider 31 moves in the X-axis direction (left-right direction), and the hydraulic cylinder 41, The size of the oil chambers 41 ', 42' of 42 is changed.

As shown in FIG. 1, a Y-axis fine movement operation mechanism 51 in the front-rear direction and a Z-axis fine movement operation mechanism 52 in the up-down direction are configured similarly to the X-axis fine movement operation mechanism 50. By rotating the Y-axis fine movement handle 54, a Y-axis fine movement screw shaft (not shown) is rotated, and an inner slider (not shown) moves in the outer slider to change the size of the oil chambers of the pair of hydraulic cylinders. Let the hose 57,5
The power is transmitted to a pair of Y-axis hydraulic cylinders (not shown) of the micromanipulator 3 via the control unit 8. Then, when the operator rotates the Z-axis fine movement handle 55, the Z-axis fine movement screw shaft (not shown) rotates, and the inner slider (not shown) moves in the outer slider, and the oil chamber of the pair of hydraulic cylinders Change the size, hose 59,6
0 to a pair of Z-axis hydraulic cylinders (not shown) of the micromanipulator 3.

FIG. 4 shows the X of the micromanipulator.
FIG. 5 is a perspective view showing a shaft fine movement mechanism portion, FIG.
FIG. 6 is a sectional view taken along the line II in FIG. 4. As shown in FIGS. 4 to 6, the X-axis fine movement mechanism 80 in the micromanipulator has an X-axis extra slider 63 that is a fine movement member. A groove 63a is formed in the outer X-axis slider 63 along the moving direction, and an X-axis inner slider 65 is movably mounted in the groove 63a via a linear way bearing (not shown). The X-axis inner slider 65 is fixed, and the X-axis outer slider 63 is movable.

A side plate 66 is fixed to one end of the X-axis inner slider 65 by bolts 67, 67, and a side plate 69 is fixed to the other end of the X-axis inner slider 65 by bolts 70, 70. A piston 71, which is a fourth piston, protrudes inward from the side plate 66, and the side plate 6
9, a piston 72 as a third piston projects inward.

A center plate 74 is fixedly mounted at the center of the upper surface of the X-axis outer slider 63. With the center plate 74 as the center, an X-axis hydraulic cylinder 75, which is a fourth hydraulic cylinder,
An X-axis hydraulic cylinder 76 as a third hydraulic cylinder is fixed by cylinder holders 78 and 79 with their respective openings facing outward in the direction of movement of the X-axis slider 63. Each of the X-axis hydraulic cylinders 75, 76 has a cylindrical shape with one side opened, and has flanges 75a, 76a on the outer periphery and hose connection ports 75b, 76b near the closed side of the cylinder. 76a is a cylinder holder 78, 79
And one end of each of hoses 48 and 47 is connected to each of hose connection ports 75b and 76b.

Further, pistons 71 and 72 are fitted in the X-axis hydraulic cylinders 75 and 76 so as to be able to advance and retreat, respectively.
Oil chamber 75 ′ between shaft hydraulic cylinder 75 and piston 71
Is formed, and an oil chamber 76 ′ is formed between the X-axis hydraulic cylinder 76 and the piston 72. And hose 47,4
8, X-axis outside slider 63, X-axis inside slider 65, X
The X-axis fine movement mechanism 80 which is the micromanipulator 3 in the X-axis direction is constituted by the shaft hydraulic cylinders 75 and 76, the pistons 71 and 72, and the like.

In this embodiment, the hydraulic chamber 41 'of the hydraulic cylinder 41, the hose 47, and the oil chamber 76' of the X-axis hydraulic cylinder 76 constitute one hydraulic closed circuit (hereinafter referred to as "first hydraulic closed circuit"). Circuit "), and the hydraulic cylinder 42
Oil chamber 42 ', hose 48, and X-axis hydraulic cylinder 7
The fifth oil chamber 75 'constitutes one hydraulic closed circuit (hereinafter referred to as "second hydraulic closed circuit"). As will be described later, one of the hydraulic closed circuits constitutes a part of the micromanipulator fine movement operating device and the hydraulic micromanipulator, and the other is an operating part side hydraulic cylinder and an operating part side hydraulic cylinder. Suppressing means (hereinafter, simply referred to as “suppressing means”) for suppressing the volume change when the working fluid attempts to change the volume due to the temperature change during the period.
Is configured.

Next, the operation of the hydraulic remote control type micromanipulator device according to this embodiment will be described with reference to FIGS. Since the present invention is characterized in that the drift of the micro tool is prevented, the operation of the present embodiment will first be described with respect to the drift prevention function, and then the operation during operation will be described. Now, the first hydraulic closed circuit and the second hydraulic closed circuit respectively have an oil chamber 4 on the operation unit side.
1 'and 42', and oil chambers 76 'and 75' on the operation section side. Therefore, when there is a temperature change, the hydraulic oil tends to change its volume in each of the oil chambers 41 ', 42', 76 ', 75'. However, focusing on the operation unit side, since the oil chambers 41 ′ and 42 ′ are placed under the same temperature condition, the oil chambers 41 ′ and 42 ′ tend to cause the same volume change such as expansion when contracted and contraction when contracted. At this time, since the oil chambers 41 ′ and 42 ′ are both on the inner slider 31, the force of the hydraulic oil in the oil chambers 41 ′ and 42 ′ to cause a volume change is offset, and the volume change is prevented. Can be suppressed. The same can be said for the operation portion side for the operation of suppressing the volume change on the operation portion side. That is, the oil chamber 7 placed under the same temperature condition
6 'and 75' try to cause similar volume changes such as expansion if expansion and contraction if contraction, but since these are on the slider 63 outside the X axis, the hydraulic oil in the oil chambers 76 'and 75' The force that causes the volume change is offset,
Volume change can be suppressed. In the present embodiment, since the volume change of the hydraulic oil is suppressed in this way,
It is possible to prevent the drift of the slider 63 outside the X-axis and the drift of the micro tool 9 fixed to the slider 63 outside the X-axis.

Next, the operation at the time of operation will be described. When the operator grips the knurl on the outer periphery of the X-axis fine movement handle 26 of the X-axis fine movement operation mechanism 50 in the micromanipulator fine movement operation device 2 and rotates it clockwise,
The X-axis fine movement screw shaft 25 rotates in the same direction, and the inner slider 31 is moved along the X-axis direction by the female screw 31a screwed to the fine movement male screw 25a of the X-axis fine movement screw shaft 25, as shown in FIG. It moves slightly in the A direction. Along with this fine movement, the hydraulic cylinders 41 and 42 also finely move, so that the oil chamber 41 'is narrowed and the oil chamber 42' is widened. Hydraulic oil flows out from the narrowed oil chamber 41 '. At this time, in the X-axis fine movement mechanism 80 of the micromanipulator 3, the oil chamber 4
Hydraulic oil flowing out of 1 'flows into the oil chamber 76' of the X-axis hydraulic cylinder 76 via the hose 47, and receives the reaction of the piston 72 to slightly move the X-axis outer slider 63 in the direction of the side plate 66. When the slider 63 outside the X-axis slightly moves in the direction of the side plate 66 (the direction of arrow A shown in FIG. 4),
The micro tool 9 attached to the X-axis outside slider 63 moves finely in the same direction via the fastener 7 attached thereto. Further, since the piston 71 is fixed, the oil chamber 75 'is narrowed. While the oil chamber 75 'is narrowed, the oil chamber 42' in the X-axis fine movement operation mechanism 50 is widened, so that the hydraulic oil flows out from the oil chamber 75 'to the oil chamber 42' via the hose 48. .

As described above, when the X-axis fine movement handle 26 of the micromanipulator fine movement operation device 2 is operated to move the inner slider 31 in the direction of arrow A (left direction),
The X-axis slider 63 of the micromanipulator 3 also moves in the direction of arrow A (leftward). When performing this operation, the first hydraulic closed circuit functions as a part of the micromanipulator fine movement operating device and the hydraulic micromanipulator, and the second hydraulic closed circuit functions as a suppressing unit.

On the other hand, when the X-axis fine movement handle 26 is operated to move the inner slider 31 in the direction of arrow B (rightward), the hydraulic cylinders 41, 42 also move in the direction B, and the oil chamber 42 'of the hydraulic cylinder 42 is moved. The compressed hydraulic oil immediately flows from the hydraulic cylinder 42 through the hose 48 into the X-axis hydraulic cylinder 75 of the micromanipulator 3 and the oil chamber 41 ′ of the hydraulic cylinder 41 expands. Simultaneously, the outer slider 63 moves in the direction of arrow B (rightward) due to the hydraulic oil flowing into the X-axis hydraulic cylinder 75 of the micromanipulator 3, and the oil chamber 76 'of the X-axis hydraulic cylinder 76 is narrowed. The operating oil immediately flows into the hydraulic cylinder 41 of the micromanipulator fine movement operating device 2 from the X-axis hydraulic cylinder 76 via the hose 47. Accordingly, when the X-axis fine movement handle 26 of the micromanipulator fine movement operation device 2 is operated to move the inner slider 31 in the arrow B direction (right direction), the X-axis outer slider 63 of the micromanipulator 3 also moves in the arrow B direction (right direction). ). In this operation, the second hydraulic closed circuit functions as a part of the micromanipulator fine movement operating device and the hydraulic micromanipulator, and the first hydraulic closed circuit functions as the suppression means.
At this time, the size of the oil chambers 41 ′ and 42 ′ of the hydraulic cylinders 41 and 42 of the micromanipulator fine movement operating device 2 and the X-axis hydraulic cylinder 7 of the micromanipulator 3
The size of the oil chambers 75 ', 76' of the 5,76
By setting the ratio to 5, the micromanipulator can be further finely operated.

Although the mechanism in the X-axis direction has been described above, as shown in FIG. 1, similarly to the X-axis fine movement operation mechanism 50, the Y-axis fine movement operation mechanism 51 in the front-rear direction and the Z-axis fine movement An operation mechanism 52 is configured, and similarly to the X-axis fine movement mechanism 80, a Y-axis fine movement mechanism 81 and a vertical Z-axis fine movement mechanism 82 are also configured. Therefore, similarly to the mechanism in the X-axis direction, Y of the micromanipulator fine movement operating device 2
By rotating the shaft fine movement handle 54, the micromanipulator 3 can be finely operated in the Y-axis direction (front-back direction), and by rotating the Z-axis fine movement handle 55 of the micromanipulator fine movement operation device 2,
The micromanipulator 3 can be finely moved in the Z-axis direction (vertical direction). In addition, the X-axis slider 63
The mounting base 84 for the fastener is fixed to the base, and the base of the fastener 7 is inserted into a V-groove (not shown) of the mounting base 84 for the fastener so that the fastener 7 is L-shaped pressing plate 85. , And is fixed to the fastener mounting base 84 by a fastening bolt 86. Note that the fastener 7, the holder 8, and the micro tool 9 can be finely moved in a three-dimensional direction by an X-axis fine movement mechanism 80, a Y-axis fine movement mechanism 81, and a Z-axis fine movement mechanism 82.

Here, an experimental example showing the effect of the present invention will be described. FIG. 7 shows the drift amount of the micro tool attached to the three-dimensional hydraulic micromanipulator of the conventional hydraulic remote control type micromanipulator device at room temperature which changes in a temperature range of maximum 8 degrees at normal temperature (average 23 degrees),
4 is a table for comparing the drift amount of a micro tool attached to a three-dimensional hydraulic micro manipulator of the hydraulic remote control type micro manipulator device according to the present invention.
In FIG. 7, the size of the hydraulic cylinder (oil chamber) of the micromanipulator fine movement operation device and the size of the hydraulic cylinder (oil chamber) of the three-dimensional hydraulic micromanipulator are 1: 5 in both the conventional and the present invention. . According to this comparison table, it is shown that the three-dimensional hydraulic micromanipulator of the hydraulic remote control type micromanipulator according to the present invention has an extremely small drift amount, is almost zero, and can accurately maintain the position for a long time. .

Next, a second embodiment will be described with reference to FIG. FIG. 8 is an exploded perspective view showing an X-axis fine movement operation mechanism 50 'of the micromanipulator fine movement operation device according to the second embodiment. As shown in the figure, a groove 87a is engraved on the outer slider 87 serving as a base.
An elongated hole 87b is formed at the bottom of the outer slider 87. An inner slider 88 serving as a moving table is slidably fitted into the groove 87a via a linear way bearing (not shown). A female screw 88a is screwed into a through hole formed in the inner slider 88 in the moving direction, and the fine screw male screw 25a of the X-axis fine movement screw shaft 25 is screwed into the female screw 88a of the inner slider 88. I have. A piston holding plate 89 is vertically provided on the side plate 33 side of the lower surface of the inner slider 88, and a long hole 8 is provided.
7b is inserted and protruded further downward, and a piston 38 'serving as a second piston is laterally provided on the piston holding plate 89 toward the side plate 13. A hydraulic cylinder 41, which is a first hydraulic cylinder, is fixed on the upper surface of the inner slider 88 by a cylinder retainer 44 with an opening directed toward the side plate 33, and a piston 37, which is a first piston, advances and retreats in the hydraulic cylinder 41. Mating is possible. Outside slider 87
The hydraulic cylinder 42 as the second hydraulic cylinder is
Is fixed by a cylinder holder 45 with its opening facing the side plate 33, and a piston 38 'is fitted in the hydraulic cylinder 42 so as to advance and retreat. Further, Y (not shown) in the front-rear direction
The shaft fine movement operation mechanism and the vertical Z-axis fine movement operation mechanism are configured similarly to the horizontal X-axis fine movement operation mechanism 50 '. The other configuration is the same as that of the above-described first embodiment, so that the same operation and effect as those of the above-described first embodiment are generated.

In the first embodiment, the hydraulic cylinders 41 and 42 are provided on the inner slider 31 side of the micromanipulator fine movement operation device 2 and the pistons 37 and 38 are provided on the outer slider 30 side. X-axis hydraulic cylinders 75 and 76 are provided on the off-axis slider 63 side.
Although the pistons 71 and 72 are provided on the X-axis inner slider 65 side, the present invention is not limited to this. The hydraulic cylinders 41 and 42 are provided on the outer slider 30 side of the micromanipulator fine movement operating device 2 and the inner slider 31 side is provided. , A common piston may be provided on the X-axis inner slider 65 side of the micromanipulator 3, and a common piston may be provided on the X-axis outer slider 63 side.

Further, in each of the above embodiments, the suppression means is provided on each of the operation unit side and the operation unit side. However, for example, a form in which the suppression means is provided only on the operation unit side may be adopted. An example of this embodiment will be described as a third embodiment, as shown in FIGS. 9 and 10.
Instead of providing the second hydraulic pressure closing circuit in the first embodiment, instead of providing the suppressing hydraulic cylinder 90 in the X-axis fine movement mechanism 80 ', the X-axis outer slider 63 is moved by the spring (not shown) in the direction of the side plate 69 (arrow). F direction). The restraining hydraulic cylinder 90 has a cylinder press 91 with its opening facing outward in the moving direction of the X-axis outer slider 63.
Has been fixed by. Also, the restraining hydraulic cylinder 90
A piston 92 is fitted therein so as to be able to advance and retreat, and an oil chamber 90 ′ is formed between the suppression hydraulic cylinder 90 and the piston 92. These suppression hydraulic cylinder 90 and piston 92
The X-axis outside slider 63, which is a fine movement member, presses the X-side outside slider 63 in a direction opposite to the direction in which the fine movement is to be performed. The rest of the configuration is the same as that of the first embodiment, so the same reference numerals are given and the description thereof is omitted.

The operation of the present embodiment will be described. In the first hydraulic closed circuit, the oil chamber 41 'in the X-axis fine movement mechanism 50 "and the oil chamber 76' in the X-axis fine movement mechanism 80 '.
When the hydraulic oil inside expands, the hydraulic oil in the oil chamber 90 'of the suppression hydraulic cylinder 90 under the same temperature condition also expands similarly, and X moves in the direction opposite to the direction in which the X-axis slider 63 tries to move. The off-axis slider 63 is pressed. Conversely, the first
When the hydraulic oil in the oil chambers 41 ′ and 76 ′ in the hydraulic closed circuit contracts, the suppression hydraulic cylinder 90 under the same temperature condition
The hydraulic oil in the oil chamber 90 ′ also contracts in the same way, and presses the X-axis slider 63 in a direction opposite to the direction in which the X-axis slider 63 tries to move. Therefore, the oil chamber 41 ',
The change in the volume of the hydraulic oil in 76 'and the suppression hydraulic cylinder 90
Therefore, the drift of the slider 63 outside the X axis and the drift of the micro tool 9 fixed thereto can be prevented.

Next, the operation at the time of operation in the third embodiment will be briefly described. When the operator grips the knurl on the outer periphery of the X-axis fine movement handle 26 and rotates it clockwise, the inner slider 31 It moves slightly along the axial direction in the direction of the side plate 33, and the oil chamber 4 of the hydraulic cylinder 41 is moved.
1 'narrows, and the hydraulic oil in the oil chamber 41' flows out. The outflowing hydraulic oil flows into the oil chamber 76 'of the X-axis hydraulic cylinder 76 in the X-axis fine movement mechanism 80' via the hose 47. Then, contrary to the urging force of a spring (not shown), the X-axis outside slider 63 moves slightly in the direction of the side plate 66. Conversely, when the operator grips the knurl on the outer periphery of the X-axis fine movement handle 26 and rotates it in the counterclockwise direction, the inner slider 31 finely moves in the direction of the side plate 13 along the X-axis direction, The room 41 'spreads. At this time, in the X-axis fine movement mechanism 80 ′, since the X-axis outer slider 63 is urged toward the side plate 69 by a spring (not shown), the urging force is applied to the oil chamber 76 of the X-axis hydraulic cylinder 76. ′ Flows into the oil chamber 41 ′ of the hydraulic cylinder 41. Thus, the X-axis outside slider 63 moves slightly in the direction of the side plate 69. Here, in the above-described first and second embodiments, six hoses to be used are required. However, in the third embodiment, since the second hydraulic closed circuit is not required, the hose to be used is used. Can be completed with three hoses 47, 57 and 59. Although not specifically described,
It goes without saying that the third embodiment can be applied not only to the X-axis direction but also to the Y-axis direction and the Z-axis direction, as in the first and second embodiments.

On the other hand, in each of the above embodiments, the suppression means for suppressing the change in the volume of the hydraulic fluid has been described as the compensation means in the present invention. In addition, for example, the change in the volume of the hydraulic fluid itself is allowed. In the part, a compensating means for compensating the movement amount due to the volume change may be separately provided. For example, a compensating device including a hydraulic cylinder and a piston is provided between the operating unit-side piston and the fine movement moving unit. When the volume of the hydraulic fluid expands, the compensating device includes the operating unit-side piston and the fine movement moving unit. When the volume of the hydraulic fluid shrinks when the distance between
An appropriate mode can be adopted such as increasing the distance between the operation unit side piston and the fine movement moving member.

Further, in each of the above embodiments, the hydraulic cylinder is used for the micromanipulator fine movement operation device and the micromanipulator. However, the present invention is not limited to this, and it is a matter of course that another hydraulic cylinder such as a hydraulic cylinder may be used. Alternatively, in each of the above embodiments, the size of the hydraulic cylinder of the micromanipulator fine movement operating device and the size of the hydraulic cylinder of the micromanipulator are set to 1: 5. However, the size is not limited to this, and other ratios such as 1: 1 may be used. Of course it is good. Furthermore, the ratio between the size of the oil chamber of the hydraulic cylinder in the suppression means and the size of the oil chamber of each of the hydraulic cylinder of the micromanipulator fine movement operating device and the hydraulic cylinder of the micromanipulator can also be set as appropriate. Further, in each of the above embodiments, the X axis,
Although the hydraulic remote control type micromanipulator device in the three axis directions of the Y axis and the Z axis has been described, the hydraulic remote control type micromanipulator device according to the present invention may be arranged in any one of these directions or in the two axis direction. It goes without saying that the present invention can also be applied to a moving object in a direction. In the first embodiment, a groove is formed along the moving direction of the slider outside the X-axis, and the slider inside the X-axis is movably mounted in this groove via a linear way bearing. Although the configuration, the slider used in the present invention,
The present invention is not limited to this mode. For example, a mode may be adopted in which a convex groove is provided on the X-axis outer slider, and an inner slider having a concave groove fitted to the convex groove is mounted. Alternatively, fix the hydraulic cylinder to the outer slider,
Needless to say, it is possible to adopt an appropriate modification such as a mode in which the inner slider is fixed.

[0042]

As described above, according to the present invention,
In a hydraulic-type hydraulic remote-control micromanipulator device, even if there is a temperature change, it is possible to prevent a drift phenomenon of a microtool accompanying a volume change of a working fluid due to the temperature change. Therefore, while maintaining good operability due to hydraulic pressure, and with the tip of the microtool of the hydraulic micromanipulator in contact with the cells during physiology, long-term observation and cell processing in an environment where temperature changes may occur It becomes possible to do.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a hydraulic remote control type micromanipulator device according to the present invention.

FIG. 2 is a perspective view showing an X-axis fine movement operation mechanism of the micromanipulator fine movement operation device according to the present invention.

FIG. 3 is an exploded perspective view showing an X-axis fine movement operation mechanism of the micromanipulator fine movement operation device according to the present invention.

FIG. 4 is a perspective view showing an X-axis fine movement mechanism portion of the micromanipulator according to the present invention.

FIG. 5 is an exploded perspective view showing an X-axis fine movement mechanism portion of the micromanipulator according to the present invention.

FIG. 6 is a sectional view taken along the line II in FIG. 4;

FIG. 7 shows the drift amount of a microtool attached to a three-dimensional hydraulic micromanipulator of a conventional hydraulic remote control type micromanipulator device at room temperature that changes in a temperature range of up to 8 degrees at room temperature, and the hydraulic pressure according to the present invention. It is a table | surface which shows the comparison with the drift amount of the microtool attached to the three-dimensional hydraulic micromanipulator of a remote control type micromanipulator apparatus.

FIG. 8 is an exploded perspective view showing an X-axis fine movement operation mechanism of the micromanipulator fine movement operation device according to the second embodiment of the present invention.

FIG. 9 is an exploded perspective view showing an X-axis fine movement operation mechanism of a micromanipulator fine movement operation device according to a third embodiment of the present invention.

FIG. 10 is an exploded perspective view showing an X-axis fine movement mechanism of a micromanipulator according to a third embodiment of the present invention.

FIG. 11 is an explanatory view schematically illustrating a configuration of a conventional cell processing apparatus.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Hydraulic remote control type micromanipulator device 2 Micromanipulator fine movement operation device 3 Three-dimensional hydraulic micromanipulator (micromanipulator) 5 Prop 6 Mounting bar 7 Fastening tool 8 Holder 9 Micro tool 11 Base plate 13, 14, 15, 16 Side plate 17 Upper plate 18 Case 25 X-axis fine movement screw shaft 26 X-axis fine movement handle 30 Outer slider (base) 31 Inner slider (moving base) 37, 38, Piston 40 Central plate 41, 42 Hydraulic cylinder 41 ', 42' Oil Chambers 44, 45 Cylinder retainers 47, 48, 57, 58, 59, 60 Hose 50, 50 ', 50 "X-axis fine movement operation mechanism 51 Y-axis fine movement operation mechanism 52 Z-axis fine movement operation mechanism 54 Y-axis fine movement handle 55 Z-axis Fine movement handle 63 X-axis outside slider 65 X-axis inside slider 71,7 The piston 74 center plate 75 and 76 X-axis hydraulic cylinder 75 ', 76' oil chambers 80, 80 'X-axis fine movement mechanism 81 Y-axis fine movement mechanism 82 Z-axis fine movement mechanism 90 suppressed hydraulic cylinder 91 cylinder retainer 92 piston

Claims (7)

[Claims] An operating portion-side piston which is fitted to the operating portion-side hydraulic cylinder so as to be able to advance and retreat so as to be finely movable, and one of the operating portion-side hydraulic cylinder and the operating portion-side piston; Is fixed, and the other is finely moved by a fine movement moving operation means, and a micromanipulator fine movement operation device, and an operation unit side hydraulic cylinder communicating with the operation unit side hydraulic cylinder via a hose so as to be finely movable. A hydraulic micromanipulator having an operating part side piston that is fitted to be able to advance and retreat, one of the operating part side hydraulic cylinder and the operating part side piston is fixed, and the other is provided with a fine movement member. With the volume change due to the temperature change of the hydraulic fluid between the operation unit side hydraulic cylinder and the operating unit side hydraulic cylinder,
A hydraulic remote control type micromanipulator device, comprising: a compensating means for compensating a movement amount substantially equal to a movement amount of the fine movement moving member. 2. The system according to claim 1, wherein the compensating unit suppresses a volume change of the hydraulic fluid between the operation unit-side hydraulic cylinder and the operating unit-side hydraulic cylinder when the hydraulic fluid attempts to change its volume due to a temperature change. 2. The hydraulic remote control type micromanipulator device according to claim 1, wherein the control device is a suppressing means for performing the operation. 3. A direction in which the fine movement member tries to make a fine movement due to a volume change caused by a temperature change of the hydraulic fluid between the operation part side hydraulic cylinder and the operation part side hydraulic cylinder. 3. The hydraulic remote control type micromanipulator device according to claim 2, further comprising a suppression hydraulic cylinder for pressing the fine movement member in a direction opposite to the direction, and a piston fitted to the suppression hydraulic cylinder. 4. A moving table slidably fitted to a base, first and second hydraulic cylinders fixed with their respective openings facing outward in the moving direction of the moving table, A first piston fitted into the first hydraulic cylinder so as to be able to advance and retreat, and a first piston having a base fixed to the base; fitted into the second hydraulic cylinder so as to be able to advance and retreat; A micromanipulator fine movement operating device having a second piston fixed to a base, and a moving table fine movement moving means for finely moving the moving table; an outer slider having a concave groove engraved in a moving direction; An inner slider movably mounted in a concave groove of the outer slider; third and fourth hydraulic cylinders fixed with their respective openings facing outward in the moving direction of the outer slider; and the third liquid. Into the pressure cylinder so that it can advance and retreat A third piston fixed to the inner slider, a fourth piston fitted to the fourth hydraulic cylinder so as to be able to advance and retreat, and a base end fixed to the inner slider; and the first hydraulic cylinder. And a first hose connecting the third hydraulic cylinder, and a hydraulic micromanipulator having a second hose connecting the second hydraulic cylinder and the fourth hydraulic cylinder, When the moving table is finely moved by operating the moving table fine movement moving operation means of the micromanipulator fine movement operating device, the liquid amount in the first hydraulic cylinder and the second hydraulic cylinder increases and decreases, and The amount of fluid in the third hydraulic cylinder and the fourth hydraulic cylinder increases and decreases via the first hose and the second hose, and the outer slider is slightly moved with respect to the fixed inner slider. Move Hydraulic remote controlled micromanipulator apparatus characterized by comprising. 5. The micromanipulator fine-movement operating device, wherein the first hydraulic cylinder and the first hydraulic cylinder are fitted between the base and the movable base so as to advance and retreat in the first hydraulic cylinder. By interposing a piston and the second hydraulic cylinder and the second piston which is fitted into the second hydraulic cylinder so as to be able to advance and retreat, the moving table is finely moved, and the inside of the first hydraulic cylinder is moved. When the fluid volume in the second hydraulic cylinder increases, the fluid volume in the second hydraulic cylinder decreases, and when the fluid volume in the first hydraulic cylinder decreases, the fluid volume in the second hydraulic cylinder increases. The hydraulic remote control type micromanipulator device according to claim 4, wherein: 6. A moving table slidably fitted to a base, and a first and a second base fixed to the base with their respective openings facing inward along the moving direction of the moving table. A second hydraulic cylinder, a first common piston fitted into the first and second hydraulic cylinders so as to be able to advance and retreat, and a central portion fixed to the movable table, and finely moving the movable table. A micromanipulator fine movement operating device having a moving table fine movement moving operation means, an outer slider having a concave groove engraved in the moving direction, an inner slider movably mounted in the concave groove of the outer slider, Third and fourth hydraulic cylinders fixed so as to face each other with their openings facing inward in the direction of movement of the slider; Part with the part fixed to the outer slider A first hose connecting the first hydraulic cylinder and the third hydraulic cylinder; and a second hose connecting the second hydraulic cylinder and the fourth hydraulic cylinder. And a hydraulic micromanipulator having a hose. When the moving table is finely moved by operating the moving table fine movement moving operation means of the micromanipulator fine moving operation device, the first hydraulic cylinder and the second liquid are moved. The fluid volume in the pressure cylinder increases and decreases, and the fluid volume in the third hydraulic cylinder and the fourth hydraulic cylinder increases and decreases via the first hose and the second hose. A hydraulic remote control type micromanipulator device wherein a slider is finely moved with respect to the fixed inner slider. 7. The micromanipulator fine movement operation device can perform fine movement operations in three directions of front-rear direction, left-right direction, and vertical direction, and the hydraulic micromanipulator can finely move in three-dimensional directions of front-rear direction, left-right direction, and vertical direction. The hydraulic remote control type micromanipulator device according to claim 1, wherein the micromanipulator device is movable.