JPH11133458A - Liquid crystal display device, its production, substrate for display device, and projection type liquid crystal display device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the degree of separation between pixels. SOLUTION: The liquid crystal display device is provided with an active matrix substrate 1 arranging a switching transistor in each pixel electrode 15, a counter substrate 17 opposed to the substrate 1 and liquid crystal 19 held between both the substrates 1, 17 and constituted so that the upper surface of the pixel electrode 15 has a practically flat surface, the upper surfaces of all the pixel electrodes 15 form the same plane, an insulating member forming a pixel electrode separating area 16 and brought into contact at least with a part of the side of the electrode 15 is formed in a gap between adjacent electrode 15 and the height level of the upper surfaces of the electrodes 15 is made different from that of the member 16 on their boundary.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to a substrate for a display device,
More particularly, the present invention relates to a reflection type liquid crystal display device and a method for manufacturing the same.

[0002]

2. Description of the Related Art Conventionally, regarding a reflection type liquid crystal display device,
It has already been disclosed in JP-A-6-347828.
FIG. 8 shows a conventional example. The filler filled in the gap 405a between the pixel electrode 404 and the pixel electrode is a CMP (Chemical M
This is polished and planarized at the same time by mechanical polishing, so that the entire surface of the base substrate 407 is flush and the surface of the pixel electrode 404 is mirror-finished.

[0003]

However, in the above-mentioned conventional example, since the pixel electrodes and their gaps are flush with each other, the arrangement of the liquid crystal on the pixel electrodes and the alignment of the liquid crystal on the gaps are the same. Become. In this case, the diffracted light, which is known from the regularity of the pixel electrode arrangement, the scattered light scattered at the edge of the pixel electrode, or the scattered component of the incident light, etc., enters the adjacent pixel without any interruption, and is not a desired image signal. Is mixed into the output image, and as a result, there is a problem that the color reproducibility and sharpness of the displayed image are deteriorated.

[0004]

As a means for solving the above problems, a liquid crystal display device of the present invention comprises an active matrix substrate provided with a switching transistor for each pixel electrode, and an opposing substrate facing the active matrix substrate. Having a substrate and a liquid crystal sandwiched between the two substrates,
The upper surface of the pixel electrode has a substantially flat surface, the upper surfaces of all the pixel electrodes are flush with each other, and the gap between the adjacent pixel electrodes is in contact with at least a part of the side surface of the pixel electrode. A liquid crystal display device having an insulating member, wherein a height level at a boundary between the upper surface of the pixel electrode and the upper surface of the insulating member is different.

[0005] Further, in the liquid crystal display device, the upper surface of the insulating member disposed in the gap between all the pixel electrodes forms the same plane.

Further, the liquid crystal display device is characterized in that an upper surface of the insulating member is located closer to the counter substrate than an upper surface of the pixel electrode.

Further, in the liquid crystal display device, the upper surface of the pixel electrode is located closer to the counter substrate than the upper surface of the insulating member.

Further, the method for manufacturing a liquid crystal display device according to the present invention is characterized in that the step of forming the pixel electrode includes a polishing step by chemical mechanical polishing.

In a display device substrate according to the present invention, in a display device substrate having a plurality of pixel electrodes, the upper surface of the pixel electrode has a substantially flat surface, and the upper surfaces of all the pixel electrodes are the same. In a gap between the adjacent pixel electrodes, the pixel electrode has an insulating member in contact with at least a part of a side surface of the pixel electrode, and has a height at a boundary between the upper surface of the pixel electrode and the upper surface of the insulating member. A display device substrate having different levels.

[0010] The present invention is also a display device substrate, wherein the upper surface of the insulating member disposed in the gap between all the pixel electrodes forms the same plane.

[0011] The present invention is also a display device substrate, wherein an upper surface of the insulating member is located closer to the counter substrate than an upper surface of the pixel electrode.

[0012] The present invention is also a display device substrate, wherein the upper surface of the pixel electrode is located closer to the counter substrate than the upper surface of the insulating member.

Further, the liquid crystal display device and the display device substrate are characterized in that the upper surface of the pixel electrode has a surface having an arbitrary curvature.

Further, the projection type liquid crystal display device of the present invention is a projection type liquid crystal display device using the above liquid crystal display device.

Further, the projection type liquid crystal display device of the present invention has at least three liquid crystal panels for three colors, separates the blue light with a high reflection mirror and a blue reflection dichroic mirror, and further separates the red reflection dichroic. Mirror and green /
A projection type liquid crystal display device characterized in that red and green are separated by a blue reflection dichroic mirror and each liquid crystal panel is projected.

According to the present invention, the liquid crystal just above the gap between the pixel electrodes is made different from the liquid crystal just above the pixel electrode, and a discontinuous liquid crystal layer is formed between the pixels. Prevent unnecessary light from entering from adjacent pixels.

Further, the pixel electrode is flattened and mirror-finished by polishing, and becomes a reflective electrode having a high reflectance.

Also, by making the height level different at the boundary between the upper surface of the pixel electrode and the upper surface of the insulating member separating the pixels, the degree of separation between the pixels can be improved.

[0019]

【Example】

(First Embodiment) FIG. 1 (1-1) shows a cross section of an image display section of a liquid crystal display device according to the present invention. The liquid crystal driving element of the present invention is formed on a single crystal semiconductor substrate, and in this embodiment, has a configuration including an NMOS switching transistor formed on a single crystal Si substrate 1. The NMOS switching transistor includes a P-type low concentration diffusion layer P well 2 formed on a single crystal Si substrate 1 and a field oxide film 3.
And a gate oxide film 4, a gate electrode 5, an N-type low concentration diffusion layer NLD6, and an N-type high concentration diffusion layer NSD7 functioning as a source electrode or a drain electrode. NMO
A first AL 10 for transmitting a video signal is connected to the NSD 7 via a contact hole 9 opened in a BPSG 8 for protecting the S switching transistor. Plasma Si
A light-shielding film 12 is arranged on an interlayer film made of O ₂ 11, and this light-shielding film 12 is fixed to an arbitrary potential while blocking external light from entering the switching transistor. And also functions as one electrode of a pixel capacitance capacitor composed of

The pixel electrode 15 is connected to the first AL 10 via the through hole 14. Pixel electrode isolation region 1
Numeral 6 is formed from plasma SiO, and its upper surface 1
6 'is formed several tens of degrees higher than the upper surface 15' of the pixel electrode 15 toward the counter substrate 17 side. A transparent electrode 18 made of ITO or the like is provided on the surface of the opposing substrate 17 made of a transparent material such as glass on the Si substrate 1 side, and a liquid crystal 19 is sandwiched between the Si substrate 1 and the opposing substrate 17 to display a liquid crystal. Configure the device.

Hereinafter, a method of manufacturing the liquid crystal display device will be described with reference to FIGS. 2A to 2C to FIGS.

Here, the method of manufacturing the image display section will be mainly described. However, at the same time as the step of forming the image display section, peripheral drive circuits such as shift registers for driving the switching transistors of the display section are also formed on the same substrate. can do.

FIG. (1-2): First, the impurity concentration is 10 ¹⁵ c.
Boron is ion-implanted into an n-type single-crystal Si substrate 1 of m ⁻³ or less to form a P well 2 as a P-type impurity region having an impurity concentration of about 10 ¹⁶ cm ⁻³ . A field oxide film 3 is formed by partially oxidizing the Si substrate 1. As the field oxide film 3, the recess method and the trench method are advantageous in that the surface of the Si substrate 1 can be flattened and patterning in a later step becomes easy. After the entire surface of the Si substrate 1 is thermally oxidized to form the gate oxide film 4, the phosphorous is
^A gate electrode 5 made of N-type polysilicon doped at about ²⁰ cm ^-3 is formed, phosphorus ions are implanted into the entire surface of the Si substrate 1, and an N-type diffusion layer NLD 6 having an impurity concentration of about 10 ¹⁶ cm ^{-3 is} formed.
Is formed, and then phosphorus is ion-implanted using the patterned photoresist as a mask, and the impurity concentration is 10 ¹⁹ c.
An n-type diffusion layer NSD7 of about m ⁻³ is formed.

After an interlayer film BPSG 8 is formed on the entire surface of the Si substrate, a contact hole 9 is opened immediately above the NSD 7. This contact hole is completely buried with the laminate of TiN and W, and electrically connects the first AL 10 and the NSD 7. The first AL10 is ALSi, ALCu, ALSiC
A low resistance conductive material based on AL or Cu such as u is used. After the plasma SiO11 is formed on the entire surface of the Si substrate 1, the light-shielding film 12 is formed. This light-shielding film 12 is made of AL,
An opening 20 is formed by patterning only a portion which is made of a conductive material having an excellent light-shielding property against visible light such as Ti and covers the entire image display portion, and in which a through hole is opened in a later step. Subsequently, the plasma SiN 13 is laminated on the order of 4000 ° and the plasma SiO 21 on the order of 10000 °.

FIG. 2 (1-3): Using the patterned photoresist as a mask, plasma SiN 13 as an etching stopper, and plasma SiO 21 patterning by dry etching to form a pixel electrode formation region 22.
To form

By arranging a pattern having the same size and shape as that of the pixel electrode formation region 22 in a portion other than the image display region in the chip, thinning of the image display region caused by CMP performed in a later step is suppressed. Therefore, the flatness of the entire chip can be ensured.

FIG. 3 (1-4): Plasma SiN13
And a through hole 14 is formed in the plasma SiO11, and T
The through hole 14 is completely buried with a laminate of iN and W.

FIG. 3 (1-5): A pixel electrode material 23 having a film thickness of 10,000 ° or more is formed on the entire surface of the Si substrate 1. Since this pixel electrode material eventually becomes a reflective pixel electrode,
Materials that are conductive and have high reflectivity in the visible light region are desirable, and metal materials such as AL, Ag, and PT, and compound materials based thereon are suitable. Here, a single AL material was used.

FIG. 3 (1-6): The pixel electrode material 23 is polished by CMP, so that the pixel electrode 15 is flattened and mirror-finished, and at the same time, the pixel electrode material on the pixel electrode isolation region 16 is removed. Each pixel electrode 15 is formed electrically separated.

The CMP is a means for completely flattening the irregularities on the surface of the Si substrate 1. When polishing different materials at the same time, the polishing rate of each material can be made different by appropriately adjusting the polishing conditions. As a result, a step can be formed at the boundary between the two. For example, a suede-type Sugar manufactured by Rodale Co., Ltd.
EPO-114 manufactured by Ebara Seisakusho Co., Ltd. was used as a CMP apparatus using preme RN-H, XJFW8099 manufactured by Rodale Nitta Co., Ltd. containing Al ₂ O ₃ as abrasive grains and containing an oxidizing agent such as H ₂ O ₂ as a slurry. The polishing conditions used were a wafer pressing load of 100 gf / cm ² , and a wafer rotation speed of 31 r.
pm, at a polishing table rotation speed of 30 rpm (1-5)
Is polished, the pixel electrode material 23, A
While the polishing rate of L is about 1000 ° / min, the polishing rate of plasma SiO as the pixel isolation region 16 is about 50 ° / min. As a result, FIG.
A step-like step having a height of about 500 ° was formed between the pixel electrode upper surface 15 'and the pixel electrode isolation region upper surface 16' in FIG.

Further, AL was etched as a chemical component of the slurry XJFW8099, and phosphoric acid, sulfuric acid, hydrochloric acid, or the like having a small etching property with respect to SiO _{2 was} added by several wt% or less, and polished under the same conditions.
The polishing rate of plasma SiO does not change at about 50 ° / min, while the polishing rate of AL is about 2000 ° / m.
in, and as a result, a step of about 800 ° was formed at the boundary.

In the above two examples of CMP polishing, a region having an arbitrary curvature is formed on the surface of the pixel electrode over a range of several μm from the boundary between the pixel electrode and the pixel separation region to the inside of the pixel electrode. . This region reflects light incident on this region in the direction of the center of the pixel, and has a radius of curvature of about several hundred mm. Therefore, this reflected light does not enter adjacent pixels of the display image and is effective as display image light. Used for

A liquid crystal 19 is sandwiched between the active matrix substrate thus formed and the opposite substrate 17 provided with the transparent electrode 18 to form a liquid crystal panel. As a liquid crystal material, a polymer network liquid crystal PNLC was used.
However, PDLC or the like may be used as the polymer network liquid crystal. In this embodiment, an example in which an NMOS is used as a pixel switching transistor has been described.
It goes without saying that an S or CMOS configuration can be used. The conditions for CMP are not limited to the above, and a slurry made of abrasive grains such as MnO ₂ can be used as the slurry.

As described above, the feature of the liquid crystal display device according to the present embodiment is that the pixel electrode surface 15 'is flat and mirror-finished, and at the same time, the pixel electrode isolation region surface 16' is formed higher than the pixel electrode surface 15 '. The point is that a step is formed at the boundary. Due to the height difference and the step, the network of the polymer material in the liquid crystal material such as PNLC or PDLC has a different form on the pixel electrode 15 and the pixel electrode isolation region 16. As a result, the light scattering characteristics of the two become different, and the boundaries between pixels become clear when an image is displayed, so that a clear image can be obtained.

Next, the relationship between the seal structure and the panel structure will be described with reference to FIG. In FIG. 9, 35
1 is a seal portion, 352 is an electrode pad, and 353 is a clock buffer circuit. An amplifier unit (not shown) is used as an output amplifier at the time of panel electrical inspection. In addition, there is an Ag paste portion (not shown) for taking the potential of the counter substrate, 356 is a display portion using a liquid crystal element, and 357 is a peripheral circuit portion such as a horizontal / vertical shift register (SR).
The seal portion 351 is provided with a pixel electrode 312 on the semiconductor substrate 301 around four sides of the display portion 356 and the common electrode 31.
5 shows a contact area of a pressure-sensitive adhesive or an adhesive for bonding with a glass substrate provided with the glass substrate 5. After bonding with a seal 351, liquid crystal is sealed in the display unit 356 and the shift register unit 357.

As shown in FIG. 9, in the present embodiment, the total chip sips are provided both inside and outside the seal.
A circuit is provided to reduce ze. In this embodiment, the drawers of the pad are concentrated on one side of the panel. However, both sides on the long side can be taken out from multiple sides instead of one side. Sometimes effective.

Further, since the panel of the present invention uses a semiconductor substrate such as a Si substrate, strong light is irradiated as in a projector, and when light is applied to the side wall of the substrate, the substrate potential fluctuates. Panel malfunction may occur. Therefore, the side wall of the panel and the peripheral circuit portion of the display area on the top surface of the panel are a substrate holder capable of shielding light, and the back surface of the Si substrate has a high thermal conductivity through an adhesive having a high thermal conductivity. It has a holder structure in which metals such as Cu are connected.

Next, an optical system incorporating the reflection type liquid crystal panel of the present invention will be described with reference to FIG. FIG.
, 371 is a light source such as a halogen lamp, 372 is a condensing lens for narrowing down the light source image, 373 and 375 are planar convex Fresnel lenses, 374 is a color separation optical element for separating into R, G, and B, and is a dichroic. Mirrors, diffraction gratings, etc. are effective.

A mirror 376 guides each light separated into R, G, and B lights to the R, G, and B panels, and a mirror 377 illuminates the condensed beam to the reflection type liquid crystal panel with parallel light. The field lens 378 has an aperture at the position of the reflective liquid crystal element 379 described above. Reference numeral 380 denotes a projection lens that expands by combining a plurality of lenses.
Reference numeral 1 denotes a screen, which can normally provide a clear, high-contrast, bright image if it is composed of a Fresnel lens that converts projection light into parallel light and a lenticular lens that displays a wide viewing angle vertically and horizontally. . In the configuration of FIG. 10, only one color panel is described, but the space between the color separation optical element 374 and the squeezing portion 379 is separated into three colors, and a three-panel panel is arranged. Further, it is needless to say that not only three plates but also a single plate configuration is possible by providing a microlens array on the surface of the reflective liquid crystal device panel and irradiating different incident lights to different pixel regions. A voltage is applied to the liquid crystal layer of the liquid crystal element, and the light that has been specularly reflected at each pixel is transmitted through the squeezed portion 379 and projected on the screen.

On the other hand, when the voltage is not applied and the liquid crystal layer is a scatterer, the light incident on the reflective liquid crystal element is isotropically scattered, and the angle 379 in which the aperture of the diaphragm shown in FIG. Except for the scattered light inside, there is no need for the projection lens. Thereby, black is displayed. As can be seen from the above optical system, no polarizing plate is required, and the entire surface of the pixel electrode enters the projection lens with a high reflectance of the signal light, so that a display 2-3 times brighter than in the past can be realized. As described in the above embodiment, anti-reflection measures are taken on the surface and the interface of the counter substrate, the noise light component is extremely small, and high contrast display can be realized. In addition, since the panel size can be reduced, all optical elements (lenses, mirrors etc.) are reduced in size, and low cost and light weight are achieved.

The color unevenness, luminance unevenness, and fluctuation of the light source can be controlled by inserting an integrator (fly-eye lens type rod type) between the light source and the optical system to thereby improve the color unevenness, luminance unevenness on the screen. Could be solved.

A peripheral electric circuit other than the liquid crystal panel will be described with reference to FIG. In the figure, reference numeral 385 denotes a power supply, which is mainly divided into a lamp power supply and a system power supply for driving a panel and a signal processing circuit. Reference numeral 386 denotes a plug, and 387 denotes a lamp temperature detector. When there is an abnormality in the lamp temperature, the control board 388 controls the lamp to stop. This is controlled not only by the lamp but also by the 389 filter safety switch. For example, if a high-temperature lamp house box is to be opened, safety measures are taken to prevent the box from opening. Reference numeral 390 denotes a speaker, and 391 denotes an audio board. A processor for 3D sound, surround sound, or the like can be incorporated as required. Reference numeral 392 denotes an expansion board 1, which is an external device 396 for an S terminal for video signals, composite video and audio for video signals, and the like.
, A selection switch 395 for selecting which signal to select, and a tuner 394. A signal is sent to the extension board 2 via the decoder 393. On the other hand, the expansion board 2 mainly has a Dsub15 pin terminal for video from another system or a computer, and receives an A / D signal via a switch 450 for switching to a video signal from the decoder 393.
The signal is converted into a digital signal by the converter 451.

A main board 453 mainly includes a memory such as a video RAM and a CPU. The NTSC signal that has been A / D converted by the A / D converter 451 is temporarily stored in a memory and assigned to a high pixel count.
A signal is generated by interpolating an insufficient signal of a vacant element that does not match the number of liquid crystal elements, or performs signal processing such as gamma conversion edge gradation and brightness adjustment bias adjustment suitable for the liquid crystal display element. If a VGA signal is received instead of an NTSC signal, for example, a computer signal is also subjected to a resolution conversion process for a high-resolution XGA panel. The main board 453 also performs processing such as combining a computer signal with NTSC signals of a plurality of image data as well as one image data. The output of the main board 453 is subjected to serial / parallel conversion, and is supplied to the head board 454 in a form that is not easily affected by noise. The head board 454 performs parallel / serial conversion again, performs D / A conversion, and divides the data according to the number of video lines on the panel.
A signal is written to the liquid crystal panels 455, 456, and 457 of B, G, and R colors. Reference numeral 452 denotes a remote control operation panel, and a computer screen can be easily operated with the same feeling as a TV. In addition, each of the liquid crystal panels 455, 456, and 457 has the same liquid crystal device configuration including a color filter of each color.

(Second Embodiment) A method of manufacturing a liquid crystal display device according to a second embodiment will be described with reference to FIGS. 4A to 4C to FIGS.

FIG. (2-1): The steps up to the step of forming the light shielding film 12 are the same as in the first embodiment. A plasma SiO 31 having a thickness of about 10,000 ° is formed on the entire surface of the Si substrate 1.

FIG. 2B: The pixel electrode isolation region 32 is formed by patterning the plasma SiO 31. Here, the etching stopper is the light shielding film 12 made of Ti. In order to prevent the polymer which is a product of SiO ₂ etching from being deposited on the Ti surface, the etching is performed only with CF ₄ , and in order to suppress a dimensional difference (loading effect) due to etching in a pattern close to the resist and a pattern far from the resist , The pressure during etching is 1 torr
It was as follows. A plasma SiN 33 serving as an insulator for a pixel capacitor is formed on the entire surface of the Si substrate 1 to a thickness of about 4000 °.

FIG. 5 (2-3): Plasma SiN 33
And through hole 14 in plasma SiO11 and Ti
The through holes 14 are buried with a laminate of N and W.

FIG. (2-4): A pixel electrode material 23 is formed on the entire surface of the Si substrate 1. As the material, AL is used here, but the material described in the first embodiment can also be used.

FIG. (2-5): CM described in the first embodiment
Under the P condition, the structure shown in FIG.
Is formed, flattened, and mirror-finished.

In this embodiment, the pixel isolation region 32 is covered with the plasma SiN 33, and the polishing is performed by the plasma SiN 33.
33 and the pixel electrode AL are polished simultaneously. Under the CMP conditions in the first embodiment, XJ was added to the slurry.
When FW8099 is used, the polishing rate of plasma SiN is smaller than that of plasma SiO because plasma SiN has higher mechanical hardness than plasma SiO,
As a result, the distance between the upper surface 34 of the pixel isolation region and the upper surface 15 'of the pixel electrode is about 8 / min.
A stepped step having a height of 00 ° was formed.

Further, when polishing was performed using a slurry in which any one of sulfuric acid and hydrochloric acid was added to the XJFW8099 in an amount of several wt% or less, the polishing rate of plasma SiN was about 25 ° / mi.
The polishing rate of AL is about 2000 ° / min with respect to n, and as a result, the upper surface 34 of the pixel isolation region has a polishing rate of about 1 / min.
A stepped step having a height of 000 ° was formed.

One of the features of this embodiment is that an insulator for forming a pixel capacitor is provided by plasma SiN 33 formed by film formation. Plasma Si that determines the capacitance of the pixel capacitance
Since the film thickness of N33 is determined by the accuracy of film formation, variation in pixel capacitance among pixels is suppressed, and an image without roughness is obtained. Another feature is that the pixel isolation region 32 is covered with the plasma SiN 33 so that the pixel isolation region surface 3
4 and the pixel electrode surface 15 'become large, and as a result, a clearer image can be obtained according to the principle described in the first embodiment.

(Third Embodiment) A method of manufacturing a liquid crystal display device according to a third embodiment will be described with reference to FIGS.
Will be described.

The explanatory view of FIG. 3A is the same as that of FIG. 1A of the first embodiment, and the forming method up to this point is the same as that of the first embodiment.

The surface of the structure shown in FIG. 3A is polished by CMP. Here, a suede type SupremeRN-H manufactured by Rodale Co., Ltd. is used for the polishing cloth, and the slurry is made of SiO ₂ such as colloidal silica or fumed silica.
Using abrasives containing no oxidizing agent and adjusted to pH 10 or more, such as SC-1 manufactured by Cabot,
Using EPO-114 manufactured by EBARA CORPORATION as an apparatus, polishing was performed at a wafer pressing load of 100 gf / cm ^{2 at a} wafer rotation speed of 31 rpm and a polishing table rotation speed of 30 rpm as polishing conditions. As a result, the polishing rate of AL as the pixel electrode material 23 was reduced. The polishing rate of the plasma SiO which is the pixel isolation region 16 is about 1000 °, while the rate is about 200 ° / min.
/ Min, and as a result, as shown in FIG. 3 (2), the pixel electrode upper surface 15 ′ is
The height was about 300 ° higher than 6 ′, and a stepped step was formed at the boundary between the two. By adjusting the pH of the slurry to a stronger alkali and increasing the chemical component for SiO ₂ polishing, the step-like step at the boundary can be further increased.

It is also possible to select a material having a high polishing rate for SiO _2, such as cesium oxide, as the abrasive material of the slurry.

The above-described steps and height differences cause disturbance of the network of the polymer material such as PNLC or PDLC described in the first embodiment, and as a result, the image becomes clear between the pixels and the image becomes clear. Can be obtained.

As described above, the feature of the present embodiment is that the use of a slurry of SiO ₂ -based abrasive grains, which is lower in cost than the Al ₂ O ₃ -based abrasive grains, realizes sharpness of an image and at the same time reduces the manufacturing cost. It is.

Fourth Embodiment FIG. 7A is a sectional view of a liquid crystal display device according to the present embodiment. Pixel electrode 1
The process up to the formation of 5 is the same as that of the first embodiment. The alignment film 4 is provided on the surface of the pixel electrode 15 and the pixel electrode isolation region 16.
1 is provided, and an alignment film 41 is also arranged on the surface of the transparent electrode 18 on the surface of the counter substrate 17 to orient the liquid crystal 42 in a prescribed direction. As the liquid crystal 42, a ferroelectric liquid crystal, a birefringence control type liquid crystal, or the like can be used in addition to a general TN type liquid crystal.

The feature of the present embodiment is that the step between the pixel electrode 15 and the pixel electrode separation region 16 causes the alignment of the alignment film 41 at the step to be disturbed. As a result, the alignment of the liquid crystal 42 on the pixel electrode and on the separation region. As a result, the boundary between pixels becomes clear, and when an image is displayed, a clear image can be obtained. It goes without saying that the form of this embodiment can be applied to the second and third embodiments.

(Fifth Embodiment) FIG. 12 is a structural view of an optical system of a front and rear projection type liquid crystal display device using the liquid crystal display device of the present invention. FIG. 12 shows a top view of FIG.
(A), FIG. 12 (b) showing a front view, FIG. 1 showing a side view
2 (c). In the figure, 1301 is a projection lens for projecting onto a screen, 1302 is a liquid crystal panel with a micro lens, 1303 is a polarizing beam splitter (PBS), 1340 is an R (red light) reflecting dichroic mirror, and 1341 is B / G (blue & green). Light) reflection dichroic mirror, 1342 is a B (blue light) reflection dichroic mirror, 1343 is a high reflection mirror that reflects all color light, 1350 is a Fresnel lens, 1351 is a convex lens, 1306 is a rod type integrator, 1307 is an elliptical reflector, 1308 is Metal halide, UHP
And the like. Here, R (red light) reflection dichroic mirror 1340, B / G (blue & green light)
The reflection dichroic mirror 1341 and the B (blue light) reflection dichroic mirror 1342 each have a spectral reflection characteristic as shown in FIG. And these dichroic mirrors together with the high reflection mirror 1343,
As shown in the perspective view of FIG. 14, they are arranged three-dimensionally, and color-separate the white illumination light into RGB as described later, and each primary color light is three-dimensionally different from the liquid crystal panel 1302. The liquid crystal panel 1302 is illuminated from the direction.

Here, a description will be given according to the progress of the light beam. First, the light beam emitted from the lamp 1308 of the light source is white light, and is condensed by the elliptical reflector 1307 at the entrance of the integrator 1306 in front of the light. As the reflection proceeds, the spatial intensity distribution of the light beam is made uniform. The light beam emitted from the integrator 1306 is the convex lens 1
The light is converted into a parallel light beam in the x-axis direction (reference to the front view in FIG. 12B) by the 351 and the Fresnel lens 1350, and first reaches the B reflection dichroic 19-ick mirror 1342. This B reflection dichroic mirror 1342 reflects only the B light (blue light), and is reflected in the z-axis direction, that is, on the lower side (FIG.
(Refer to the front view of (b)), the light is directed toward the R reflection dichroic mirror 1340 at a predetermined angle with respect to the z axis. On the other hand, the color light (R / G light) other than the B light passes through the B reflection dichroic mirror 1342, is reflected by the high reflection mirror 1343 at right angles in the z-axis direction (downward), and also travels toward the R reflection dichroic mirror 1340. . Here, both the B-reflection dichroic mirror 1342 and the high-reflection mirror 1343 transfer the luminous flux (x-axis direction) from the integrator 1306 in the z-axis direction (lower side) based on the front view of FIG. The high-reflection mirror 1343 has an inclination of exactly 45 ° with respect to the xy plane about the y-axis direction as a rotation axis. On the other hand, the B reflection dichroic mirror 1342 also has x
The angle is set to be shallower than 45 ° with respect to the −y plane. Accordingly, the R / G light reflected by the high reflection mirror 1343 is reflected at a right angle in the z-axis direction, while
The B light reflected by the B reflection dichroic mirror 1342 travels downward at a predetermined angle (tilt in the xz plane) with respect to the z axis. Here, the liquid crystal panel 13 of B light and R / G light
In order to match the illumination range on the liquid crystal panel 1302, the shift amount and the tilt amount of the high-reflection mirror 1343 and the B-reflection dichroic mirror 1342 are selected so that the principal rays of each color light intersect on the liquid crystal panel 1302.

Next, as described above, the downward direction (the z-axis direction)
The R / G / B light directed to is directed to the R reflection dichroic mirror 1340 and the B / G reflection dichroic mirror 1341, which are the B reflection dichroic mirror 134.
2 and the lower side of the high reflection mirror 1343,
The G reflection dichroic mirror 1341 is disposed at an angle of 45 ° with respect to the x-z plane with the x axis as the rotation axis, and the R reflection dichroic mirror 1340 is also positioned with respect to the xz plane with the x axis direction as the rotation axis. The angle is set shallower than 45 °. Therefore, of the R / G / B light incident on these, first, the B / G light is converted to the R reflection dichroic mirror 13.
40, the B / G reflecting dichroic mirror 13
41, the beam is reflected at right angles in the y-axis + direction,
After being polarized through 3, the liquid crystal panel 1302 arranged horizontally on the xz plane is illuminated.

Among them, the B light is as described above (FIG. 12).
(A) and FIG. 12 (b)), since the light travels at a predetermined angle (tilt in the xz plane) with respect to the x-axis, after reflection by the B / G reflection dichroic mirror 1341, The liquid crystal panel 13 maintains a predetermined angle (tilt in the xy plane) with respect to the liquid crystal panel 13 as an incident angle (in the xy plane direction).
Illuminate 02.

The G light is reflected at right angles by the B / G reflection dichroic mirror 1341, travels in the positive y-axis direction, is polarized through the PBS 1303,
That is, the liquid crystal panel 1302 is illuminated vertically. Further, as described above, the R light is reflected in the y-axis + direction by the R reflection dichroic mirror 1340 by the R reflection dichroic mirror 1340 disposed in front of the B / G reflection dichroic mirror 1341 as described above. )
As shown in (side view), a predetermined angle (y
(−z-plane tilt), advance in the y-axis + direction, and
After being polarized through the liquid crystal panel 1302, the liquid crystal panel 1302 is illuminated with an angle with respect to the y-axis as an incident angle (y-z plane direction). Further, similarly to the above, the liquid crystal panel 1 of each color of RGB is used.
In order to make the illumination ranges on 302 the same, the shift amount and the tilt amount of the B / G reflection dichroic mirror 1341 and the R reflection dichroic mirror 1340 are selected so that the principal rays of each color light intersect on the liquid crystal panel 1302. . Further, as shown in FIG. 13A, the cut wavelength of the B reflection dichroic mirror 1341 is 480 nm,
As shown in FIG. 13B, the cut wavelength of the B / G reflection dichroic mirror 1341 is 570 nm.
As shown in (c), the R reflection dichroic mirror 13
Since the cut wavelength of 40 is 600 nm, unnecessary orange light passes through the B / G reflection dichroic mirror 1341 and is discarded. Thereby, an optimal color balance can be obtained.

As will be described later, the liquid crystal panel 1302
The RGB light is reflected and polarization-modulated by the PBS 1303.
The light flux reflected on the PBS surface 1303a of the PBS 1303 in the + x-axis direction becomes image light, and the projection lens 13
01 is enlarged and projected on a screen (not shown). By the way, each RG that illuminates the liquid crystal panel 1302
Since the B light has a different incident angle, each of the RGB light reflected from the B light has a different emission angle.
As 301, a lens having a lens diameter and an opening large enough to capture all of them is used. However, the inclination of the light beam incident on the projection lens 1301 is made parallel by each color light passing twice through the micro lens, and the inclination of the light incident on the liquid crystal panel 1302 is maintained. However, as shown in FIG. 24, in the transmission type of the conventional example, the light beam emitted from the liquid crystal panel spreads more largely due to the condensing action of the microlens, so the projection lens for capturing this light beam is even larger. The numerical aperture is determined,
It was an expensive lens. However, in this example, since the spread of the light beam from the liquid crystal panel 2 is relatively small in this manner, a sufficiently bright projection image can be obtained on a screen even with a projection lens having a smaller numerical aperture, and a less expensive projection lens can be obtained. Can be used. Further, an example of a stripe type display method in which the same colors are arranged in the vertical direction shown in FIG. 25 can be used in the present embodiment, but it is not preferable in the case of a liquid crystal panel using a microlens as described later. .

Next, the liquid crystal panel 13 of the present invention used here
02 will be described. FIG. 15 shows the liquid crystal panel 1302.
14 shows an enlarged schematic cross-sectional view (corresponding to the yz plane in FIG. 14).
In the figure, 1321 is a microlens substrate, 1322
Is a micro lens, 1323 is a sheet glass, 1324
Denotes a transparent counter electrode, 1325 denotes a liquid crystal layer, 1326 denotes a pixel electrode, 1327 denotes an active matrix drive circuit unit,
328 is a silicon semiconductor substrate. Reference numeral 1252 denotes a peripheral seal portion. Here, in the present embodiment, R,
G and B pixels are integrated into one panel, and the size of one pixel is reduced. Therefore, it is important to increase the aperture ratio, and the reflective electrode must be present in the range of the collected light. The micro lens 1322
The pixel electrode 1 is formed on the surface of a glass substrate (alkali glass) 1321 by a so-called ion exchange method.
A two-dimensional array structure is formed at a pitch twice the pitch of 326.

The liquid crystal layer 1325 employs a so-called ECB mode nematic liquid crystal such as DAP or HAN adapted to the reflection type, and a predetermined alignment is maintained by an alignment layer (not shown). Since the voltage value is lower than in the other embodiments and the accuracy of the potential of the pixel electrode 1326 becomes more important, the circuit and configuration of the present invention are effective, and the number of pixels in a single plate is large, and thus the video line , The reduction of the coupling capacity of the other embodiments is very effective. The pixel electrode 1326 is made of Al and also serves as a reflecting mirror, and is subjected to a so-called CMP process in a final step after patterning in order to improve surface properties and improve reflectivity (details will be described later).

Active matrix drive circuit 132
Reference numeral 7 denotes a semiconductor circuit provided on a so-called silicon semiconductor substrate 1328 for driving the pixel electrode 1326 in an active matrix. A gate line driver (not shown) (not shown) is provided around the circuit matrix. And signal line driver (horizontal register etc.)
Is provided (details will be described later). These peripheral drivers and active matrix drive circuits are R
Each of the pixel electrodes 1326 does not have a color filter, but each of the RGB primary color video signals is written into the predetermined RGB pixel by the primary color video signal written by the active matrix driving circuit.
The pixels are distinguished as GB pixels, and form a predetermined RGB pixel array described later.

Here, looking at the G light illuminating the liquid crystal panel 1302, the G light is P
The liquid crystal panel 13 after being polarized by the BS 1303
02 perpendicularly. An arrow G (in / out) in the drawing shows an example of a ray incident on one micro lens 1322a. As shown in the figure, the G light beam is collected by the micro lens 1322, and illuminates the G pixel electrode 1326g. Then, the light is reflected by the pixel electrode 1326g made of Al, and is emitted to the outside of the panel again through the same micro lens 1322a. When the G light (polarized light) reciprocates through the liquid crystal layer 1325 in this manner, the G light (polarized light) is modulated by the operation of the liquid crystal due to the electric field formed between the pixel electrode 1326g and the counter electrode 1324 by a signal voltage applied to the pixel electrode 1326g. Exit the liquid crystal panel,
It returns to PBS1303.

Here, the PBS surface 1 depends on the degree of modulation.
The amount of light reflected at 303a and traveling toward the projection lens 1301 changes, and so-called gray-scale gradation display of each pixel is performed. On the other hand, as described above, the cross section (y-
For R light incident from an oblique direction in the (z plane),
When attention is paid to, for example, an R ray incident on the microlens 1322b after being polarized by the PBS 1303, as shown by an arrow R (in) in the figure, the light is condensed by the microlens 1322b and is located on the left side immediately below. The R pixel electrode 1326r at the shifted position is illuminated. Then, the reflected light is reflected by the pixel electrode 1326r, and as shown in FIG.
322a and exits out of the panel (R (ou
t)).

At this time, the R light (polarized light) is also applied to the opposite electrode 13 by the signal voltage applied to the pixel electrode 1326r.
The liquid crystal panel is modulated by the operation of the liquid crystal by an electric field corresponding to an image signal formed between the liquid crystal panel 24 and the liquid crystal panel, and is emitted from the liquid crystal panel.
It returns to PBS1303. In the subsequent process, the image light is projected from the projection lens 1301 in exactly the same manner as in the case of the G light described above. By the way, in the description of FIG. 15, the color lights of the G light and the R light on the pixel electrode 1326g and the pixel electrode 1326r partially overlap and interfere with each other, but this is schematically represented by the thickness of the liquid crystal layer. Is actually exaggerated, and the thickness of the liquid crystal layer is actually 1 to 5 μm.
This is very thin compared to 50-100 μm of the sheet glass 1323, and such interference does not occur regardless of the pixel size.

Next, FIG. 16 is a view for explaining the principle of color separation / color synthesis in this embodiment. Here, FIG. 16A is a schematic top view of the liquid crystal panel 1302, and FIGS. 16B and 16C are AA ′ (x
3 is a schematic cross-sectional view of FIG. Here, the micro lens 1322 is formed as shown in FIG.
As shown by the one-dot chain line, one for each half of two adjacent two-color pixels centering on the G light. FIG. 16C corresponds to FIG. 15 showing the yz cross section, and shows how the G light and R light entering each micro lens 1322 enter and exit. As can be seen from this, each G pixel electrode is disposed directly below the center of each microlens, and each R pixel electrode is disposed directly below the boundary between microlenses. Therefore, the angle of incidence of the R light is
is preferably set to be equal to the ratio of the pixel pitch (B & R pixel) to the distance between the microlens and the pixel electrode. On the other hand, FIG.
This corresponds to the y section. In this xy section, the B pixel electrodes and the G pixel electrodes are alternately arranged as in FIG. 16C, and each G pixel electrode is also arranged directly below the center of each microlens, and The pixel electrodes are arranged immediately below the boundaries between the microlenses.

As described above, the B light illuminating the liquid crystal panel is incident on the cross section (xy plane) in FIG. 12 from the oblique direction after being polarized by the PBS 1303 as described above. In exactly the same manner, the B ray incident from each microlens 1322 is reflected by the B pixel electrode 1326b as shown in the figure, and exits from the microlens 1322 adjacent to the incident microlens 1322 in the x direction. The modulation by the liquid crystal on the B pixel electrode 1326b and the projection of the B emission light from the liquid crystal panel are the same as the above-described G light and R light.

Each of the B pixel electrodes 1326b is disposed immediately below the boundary between the microlenses, and the incident angle of the B light to the liquid crystal panel is the same as that of the R light.
It is preferable to set nθ to be equal to the ratio between the pixel pitch (G & B pixel) and the distance between the microlens and the pixel electrode. By the way, in the liquid crystal panel of this example, as described above, the arrangement of each RGB pixel is RGRGRG in the z direction.
Are arranged in the x-direction, and FIG. 16 (a) shows a planar arrangement thereof. As described above, each pixel size is about half of the microlens in both the vertical and horizontal directions, and the pixel pitch is half of that of the microlens in both the x and z directions. Also,
The G pixel is also located directly below the center of the microlens in plan view, the R pixel is located between the G pixels in the z direction and at the microlens boundary, and the B pixel is located between the G pixels in the x direction and at the microlens boundary. I have. Further, the shape of one microlens unit is rectangular (double the size of a pixel).

FIG. 17 is a partially enlarged top view of the present liquid crystal panel. Here, a broken-line grid 1329 in the figure indicates a group of RGB pixels constituting one picture element. That is, when each of the RGB pixels is driven by the active matrix driving circuit unit 1327 in FIG. 15, the RGB pixel units indicated by the broken-line grid 1329 correspond to the R pixels corresponding to the same pixel position.
It is driven by a GB video signal. Here, the R pixel electrode 132
Focusing on one pixel composed of 6r, G pixel electrode 1326g, and B pixel electrode 1326b, first, R pixel electrode 1
326r is the micro lens 1 as indicated by the arrow r1.
As described above, the illumination light is illuminated with the R light obliquely incident from 322b, and the R reflected light is emitted through the microlens 1322a as indicated by an arrow r-2. B pixel electrode 132
6b denotes a micro lens 132 as indicated by an arrow b1.
As described above, the illumination light is illuminated with the B light obliquely incident from 2c, and the B reflected light is also emitted through the micro lens 1322a as shown by the arrow b2. Further, the G pixel electrode 1326g is illuminated with the G light incident vertically (in the direction toward the back of the paper) from the micro lens 1322a as described above, as indicated by the front rear arrow g12, and the G reflected light is the same micro lens 1322a. Vertically (in the direction coming out of the page).

As described above, in the present liquid crystal panel, 1
Regarding the RGB pixel units constituting one picture element, although the incident illumination position of each primary color illumination light is different, their emission is the same micro lens (1322 in this case).
a). This is also true for all other picture elements (RGB pixel units).

Therefore, as shown in FIG. 18, all the light emitted from the present liquid crystal panel is transmitted to the PBS 1303 and the projection lens 13.
When the image is projected on the screen 1309 through the optical system 01 and optically adjusted so that the position of the micro lens 1322 in the liquid crystal panel 1302 is image-formed and projected on the screen 1309, the projected image becomes a micro lens lattice as shown in FIG. Each of the picture elements has a mixed state of the light emitted from the RGB pixel units constituting each picture element, that is, a picture element in a mixed color state of the same pixel. In addition, it is possible to display high quality and good color images without the so-called RGB mosaic as in the related art.

Next, as shown in FIG. 15, the active matrix driving circuit 1327 is connected to each pixel electrode 1326.
15, each RGB pixel constituting a picture element is simply drawn side by side on the circuit sectional view of FIG. 15, but the drain of each pixel FET is a two-dimensional pixel as shown in FIG. 17. To each of the RGB pixel electrodes 1326 in a specific arrangement.

FIG. 19 is an overall block diagram of a driving circuit system of the projection type liquid crystal display device. Here, reference numeral 1310 denotes a panel driver which inverts the polarity of an RGB video signal and forms a liquid crystal drive signal obtained by a predetermined voltage amplification.
Various timing signals are formed. An interface 1312 decodes various video and control transmission signals into standard video signals and the like. Reference numeral 1311 denotes a decoder which decodes and converts a standard video signal from the interface 1312 into an RGB primary color video signal and a synchronization signal, that is, an image signal corresponding to the liquid crystal panel 1302. Reference numeral 1314 denotes a ballast for driving and lighting an arc lamp 1308 in the elliptical reflector 1307. 1
A power supply circuit 315 supplies power to each circuit block. Reference numeral 1313 denotes a controller including an operation unit (not shown), which comprehensively controls the respective circuit blocks. As described above, in the present projection type liquid crystal display device, the drive circuit system is very common as a single-panel type projector. It is possible to display a color image with a natural texture.

FIG. 21 is a partially enlarged top view of another embodiment of the liquid crystal panel according to the present embodiment. Here, the B pixel electrode 132 is located just below the center of the micro lens 1322.
6b, and G pixels 1326g in the left-right direction.
Are alternately arranged in the vertical direction so that the R pixels 1326r are alternately arranged in the vertical direction. Even with this arrangement,
By making the B light vertically incident and the R / G light obliquely incident (different directions at the same angle) so that the reflected light from the RGB pixel unit constituting the picture element is emitted from one common microlens, Exactly the same effect can be obtained. Further, R is located just below the center of the micro lens 1322.
Arrange the pixels and set the other color pixels in the
G and B pixels may be arranged alternately with respect to the pixels.

(Sixth Embodiment) FIG. 22 shows another embodiment of the liquid crystal panel according to the present invention. This figure is a partially enlarged sectional view of the present liquid crystal panel 1320. The difference from the other embodiments is as follows. First, a sheet glass 1323 is used as a facing glass substrate, and a micro lens 1220 is used.
Is formed on the sheet glass 1323 by a so-called reflow method using a thermoplastic resin. Further, spacer columns 1251 are formed in non-pixel portions by photolithography of a photosensitive resin. The liquid crystal panel 1
FIG. 23A shows a partial top view of the portion 320. As can be seen from this figure, the spacer pillars 1251 are formed in the non-pixel area at the corners of the microlenses 1220 at a predetermined pixel pitch. AA 'passing through this spacer column 1251
A cross-sectional view is shown in FIG. This spacer pillar 125
1 is preferably provided in a matrix at a pitch of 10 to 100 pixels.
It is necessary to set both the flatness of No. 3 and the injectability of liquid crystal, which are opposite parameters to the number of spacer pillars. Further, in the present embodiment, the light shielding layer 1221 made of a metal film pattern is provided to prevent the leakage light from entering from each microlens boundary. As a result, a decrease in the saturation of the projected image (due to the mixing of the primary color image light) and a decrease in the contrast due to the leak light are prevented. Therefore, by using the present liquid crystal panel 1320 to configure a projection display device including the liquid crystal panel as in the present embodiment, it is possible to obtain sharper and better image quality.

[0083]

As described above, according to the present invention,
By making the height level different at the boundary between the upper surface of the pixel electrode and the upper surface of the insulating member separating the pixels, the degree of separation between the pixels can be improved.

According to the present invention, a discontinuous liquid crystal layer is formed in the gap between the liquid crystal on the pixel electrode and the liquid crystal on the pixel electrode.
Crosstalk from adjacent pixels can be prevented and a liquid crystal display device with a clear display image can be obtained.

Since the pixel electrodes are flattened and mirror-finished by polishing, a high-brightness liquid crystal display device with high light use efficiency can be realized.

[Brief description of the drawings]

FIG. 1 is a sectional view of a liquid crystal display according to a first embodiment of the present invention.

FIG. 2 is an explanatory diagram of a manufacturing process of the liquid crystal display device according to the first embodiment of the present invention.

FIG. 3 is an explanatory diagram of a manufacturing process of the liquid crystal display device according to the first embodiment of the present invention.

FIG. 4 is an explanatory diagram of a manufacturing process of a liquid crystal display device according to a second embodiment of the present invention.

FIG. 5 is an explanatory diagram of a manufacturing process of a liquid crystal display device according to a second embodiment of the present invention.

FIG. 6 is an explanatory diagram of a manufacturing process of a liquid crystal display device according to a third embodiment of the present invention.

FIG. 7 is a sectional view of a liquid crystal display according to a fourth embodiment of the present invention.

FIG. 8 is a sectional view of a liquid crystal display device according to a conventional example.

FIG. 9 is a conceptual diagram of a liquid crystal panel of a liquid crystal device according to the present invention.

FIG. 10 is a conceptual diagram of a liquid crystal projector using the liquid crystal device according to the present invention.

FIG. 11 is a circuit block diagram showing the inside of a liquid crystal projector according to the present invention.

FIG. 12 is an overall configuration diagram showing an embodiment of an optical system of a projection type liquid crystal display device according to the present invention.

FIG. 13 is a graph showing a spectral reflection characteristic of a dichroic mirror used in an optical system of a projection type liquid crystal display device according to the present invention.

FIG. 14 is a perspective view of a color separation illumination unit of the optical system of the projection type liquid crystal display device according to the present invention.

FIG. 15 is a sectional view of one embodiment of a liquid crystal panel according to the present invention.

FIG. 16 is a diagram illustrating the principle of color separation and color synthesis of a liquid crystal panel according to the present invention.

FIG. 17 is a partial enlarged top view of the liquid crystal panel of one embodiment according to the present invention.

FIG. 18 is a partial configuration diagram showing a projection optical system of a projection type liquid crystal display device according to the present invention.

FIG. 19 is a block diagram showing a driving circuit system of the projection type liquid crystal display device according to the present invention.

FIG. 20 is a partially enlarged view of a projected image on a screen of the projection type liquid crystal display device according to the present invention.

FIG. 21 is a partial sectional view of a liquid crystal panel according to an embodiment of the present invention.

FIG. 22 is a partially enlarged cross-sectional view of a liquid crystal panel of one embodiment according to the present invention.

FIG. 23 is a partially enlarged top view and a sectional view of a liquid crystal panel of one embodiment according to the present invention.

FIG. 24 is a conceptual diagram showing a light beam traveling direction of a liquid crystal panel of a liquid crystal device.

FIG. 25 is a configuration diagram of a color pixel of a liquid crystal panel of a liquid crystal device.

[Explanation of symbols]

 Reference Signs List 1 single-crystal Si substrate 2 p-well 3 field oxide film 4 gate oxide film 5 gate electrode 6 NLD 7 NSD 8 BPSG 9 contact hole 10 first AL 11 plasma SiO 12 light-shielding film 13 plasma SiN 14 through-hole 15 pixel electrode 15 'pixel electrode Top surface 16 Pixel electrode separation region 16 'Pixel electrode separation region Top surface 17 Opposite substrate 18 Transparent electrode 19 Liquid crystal 20 Opening 21 Plasma SiO 22 Pixel electrode formation region 23 Pixel electrode material 31 Plasma SiO 32 Pixel electrode separation region 33 Plasma SiN 34 Pixel electrode isolation region upper surface 41 Alignment film 42 Liquid crystal 401 Glass substrate 402 Counter electrode 403 Liquid crystal material 405 Protective film 405a Gap 405b Opening 406 Field silicon oxide film 406a, b Through hole 407 Base substrate 408 Source region 409 Drain region 410 Gate electrode 411 Gate insulating film 201, 501 Semiconductor substrate 202, 502 Scribe region 203, 503 Selective oxide film 504 Well 205, 505, 705, 805 First insulating film 207, 507, 707, 808 Contact 209, 509, 709, 809 Metal layer 602, 603 Metal layer 601 Effective area 511 Through hole 701, 802 Insulating substrate 810 Transparent insulating film 301 Semiconductor substrate 302, 302 'P-type and n-type well 303, 303' Source region 304 Gate region 305, 305 'Drain region 306 LOCOS insulating layer 307 Light shielding layer 308 PSG 309 Plasma SiN 310 Source electrode 311 Connecting electrode 312 Reflecting electrode & pixel electrode 313 Anti-reflection film 314 Crystal layer 315 Common transparent electrode 316 Counter electrode 317, 317 'High-concentration impurity region 319 Display region 320 Antireflection film 321, 322 Shift register 323 nMOS 324 pMOS 325 Holding capacitor 327 Signal transfer switch 328 Reset switch 329 Reset pulse input terminal 330 Reset Power supply terminal 331 Video signal input terminal 332 Boost level shifter 342 Inverter for pulse delay 343 Switch 344 Output 345 Capacity 346 Protection circuit 351 Seal section 352 Electrode pad 353 Clock buffer 371 Light source 372 Condenser lens 373,375 Fresnel lens 374 Color separation optical element 376 mirror 377 field lens 378 liquid crystal device 379 aperture unit 380 projection lens 381 screen 385 power supply 38 Plug 387 Lamp temperature detection 388 Control board 389 Filter safety switch 453 Main board 454 Liquid crystal panel drive head board 455, 456, 457 Liquid crystal device 1220 Micro lens (reflow heat sag type) 1251 Spacer pillar 1252 Peripheral seal part 1301 Projection lens 1302 Micro lens LCD panel 1303 Polarized beam splitter (PBS) 1306 Rod integrator 1307 Elliptical reflector 1308 Arc lamp 1309 Screen 1310 Panel driver 1311 Decoder 1312 Interface circuit 1314 Ballast (Arch lamp lighting circuit) 1320 Liquid crystal panel with micro lens 1321 Micro lens glass substrate 1322 Micro lens (index distribution ) 1323 sheet glass 1324 opposing transparent electrode 1325 liquid crystal 1326 pixel electrode 1327 active matrix drive circuit section 1328 silicon semiconductor substrate 1329 basic picture element unit 1340 R reflection dichroic mirror 1341 B / G reflection dichroic mirror 1342 B reflection dichroic mirror 1343 high reflection mirror 1350 Fresnel lens (second condenser lens) 1351 First condenser lens

Claims (11)

[Claims] An active matrix substrate on which a switching transistor is provided for each pixel electrode; a counter substrate facing the active matrix substrate; and a liquid crystal sandwiched between the two substrates. Has a substantially flat surface, the upper surfaces of all the pixel electrodes are flush with each other, and an insulating member that is in contact with at least a part of the side surface of the pixel electrode is provided between adjacent pixel electrodes. A liquid crystal display device having a height level at a boundary between an upper surface of the pixel electrode and an upper surface of the insulating member. 2. The liquid crystal display device according to claim 1, wherein upper surfaces of the insulating members disposed in the gaps between all the pixel electrodes are on the same plane. 3. The liquid crystal display device according to claim 1, wherein an upper surface of the insulating member is located closer to the counter substrate than an upper surface of the pixel electrode. 4. The liquid crystal display device according to claim 1, wherein the upper surface of the pixel electrode is located closer to the counter substrate than the upper surface of the insulating member. 5. The liquid crystal display device according to claim 1, wherein the upper surface of the pixel electrode has a surface having an arbitrary curvature. 6. The method for manufacturing a liquid crystal display device according to claim 1, wherein the step of forming the pixel electrode includes a polishing step by chemical mechanical polishing. Method. 7. A display device substrate having a plurality of pixel electrodes, wherein the upper surface of the pixel electrode has a substantially flat surface, and the upper surfaces of all the pixel electrodes are flush with each other. In the gap between the pixel electrodes, an insulating member that contacts at least a part of the side surface of the pixel electrode is provided, and a height level at a boundary between the upper surface of the pixel electrode and the upper surface of the insulating member is different. Display device substrate. 8. The display device substrate according to claim 7, wherein the upper surface of the insulating member disposed in the gap between all of the pixel electrodes forms the same plane. 9. The display device substrate according to claim 7, wherein the upper surface of the pixel electrode has a surface having an arbitrary curvature. 10. A projection type liquid crystal display device using the liquid crystal display device according to claim 1. 11. The projection type liquid crystal display device according to claim 10, wherein the liquid crystal panel has at least three colors for three colors.
And separates blue light with a high reflection mirror and a blue reflection dichroic mirror, further separates red and green with a red reflection dichroic mirror and a green / blue reflection dichroic mirror, and projects each liquid crystal panel. A projection type liquid crystal display device characterized by the above-mentioned.