JPH11123649A - Multiple groove roller for wire saw - Google Patents
Multiple groove roller for wire sawInfo
- Publication number
- JPH11123649A JPH11123649A JP29394597A JP29394597A JPH11123649A JP H11123649 A JPH11123649 A JP H11123649A JP 29394597 A JP29394597 A JP 29394597A JP 29394597 A JP29394597 A JP 29394597A JP H11123649 A JPH11123649 A JP H11123649A
- Authority
- JP
- Japan
- Prior art keywords
- roller
- groove
- main body
- wire
- body part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
- B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
- B23D57/0053—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of drives for saw wires; of wheel mountings; of wheels
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、被加工物に砥粒の
存在下でワイヤーを摺動させて溝入れや切断などの加工
を行うワイヤーソーに用いられる多溝ローラに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multi-groove roller used in a wire saw for performing processing such as grooving and cutting by sliding a wire on a workpiece in the presence of abrasive grains.
【０００２】[0002]
【従来の技術】シリコンウエハーなどの半導体材料の精
密切断やセラミックス材料の加工などにワイヤーソーが
用いられている。このワイヤーソー１０の基本構成は、
図１に示すように、細いピアノ線等からなるワイヤー１
１が複数の多溝ローラ１の間に所定の張力を保って一方
向もしくは往復動自在に支持されており、このワイヤー
１１をシリコン、磁性材料、水晶などの被加工物１２に
押し当て、砥粒を含んだラッピングオイルの存在下で摺
動して溝入れや切断の加工を行う。上記多溝ローラ１に
はワイヤーを往復動させるドライブローラ(A)や被加工
物に対してワイヤーを支持するヘッドローラ(B)(C)等が
含まれ、いずれのローラにも、その外周面にはワイヤー
を装入して案内する多数の溝が設けられており、被加工
物は溝のピッチに応じて加工される。2. Description of the Related Art Wire saws are used for precision cutting of semiconductor materials such as silicon wafers and processing of ceramic materials. The basic configuration of this wire saw 10 is as follows:
As shown in FIG. 1, a wire 1 made of a thin piano wire or the like
1 is supported in a unidirectional or reciprocable manner while maintaining a predetermined tension between the plurality of multi-groove rollers 1. The wire 11 is pressed against a workpiece 12 such as silicon, magnetic material, crystal, etc. Sliding and grooving and cutting are performed in the presence of wrapping oil containing particles. The multi-groove roller 1 includes a drive roller (A) for reciprocating the wire, a head roller (B) (C) for supporting the wire on the workpiece, and the like. Is provided with a number of grooves for inserting and guiding a wire, and the workpiece is processed in accordance with the pitch of the grooves.
【０００３】ところで、従来の多溝ローラはナイロンや
ウレタン等の樹脂によって形成されているものが多いた
めにワイヤーによる溝部分の摩耗が激しく、特に、その
両端部における溝部分の摩耗が激しいために、ローラの
中央部は十分使用可能な状態であってもローラ端部の摩
耗により全体としての加工精度が低下し、そのために多
溝ローラ全体の交換を余儀なくされている。The conventional multi-groove rollers are often formed of a resin such as nylon or urethane, so that the wire is severely worn by the wire at the groove portions. Particularly, the groove portions at both ends are severely worn. However, even if the central portion of the roller is in a sufficiently usable state, the overall processing accuracy is reduced due to wear of the roller end portion, and thus the entire multi-groove roller must be replaced.
【０００４】多溝ローラについて摩耗量の具体例を図５
(a)〜(c)に示す。同図のグラフは、樹脂製多溝ローラに
ついて、使用開始から４時間後および２０時間後の溝部
分の摩耗量を示したものである。なお、図５(a)はドラ
イブローラ、(b)(c)はヘッドローラについての測定結果
である。４時間後の摩耗量はあまり大きくないが、２０
時間後には、同図に示すように、いずれのローラにおい
ても、中央部全体に対して両側端部の摩耗量が大きく、
さらにヘッドローラは一方の片側端部が著しく摩耗され
ている。FIG. 5 shows a specific example of the amount of wear for a multi-groove roller.
(a) to (c) are shown. The graph in the figure shows the amount of wear of the groove portion of the resin multi-groove roller after 4 hours and 20 hours from the start of use. 5A shows the measurement results for the drive roller, and FIGS. 5B and 5C show the measurement results for the head roller. The amount of wear after 4 hours is not so large,
After a period of time, as shown in the figure, in any of the rollers, the amount of wear at both ends is large relative to the entire central portion,
Further, one end of the head roller is significantly worn.
【０００５】このようにローラ端部の摩耗量が大きい理
由は、ローラの端部はワイヤーの張力を直に受け、特に
ローラの反転時には大きな張力が端部に加わるのに対し
て、ローラの中央部には端部によって緩和された張力が
加わるためであると考えられる。The reason why the amount of wear at the end of the roller is large is that the end of the roller is directly subjected to the tension of the wire. This is considered to be because the tension relaxed by the ends is applied to the portion.
【０００６】[0006]
【発明の解決課題】本発明は、従来の多溝ローラにおけ
る上記問題を解決したものであって、ローラ端部の摩耗
が中央部よりも激しいことを見い出し、この端部を交換
可能に形成することにより、経済性に優れたワイヤーソ
ー用多溝ローラを完成させたものである。SUMMARY OF THE INVENTION The present invention solves the above-mentioned problem in the conventional multi-groove roller, and finds that the end of the roller is more severely worn than the center, and this end is formed to be replaceable. As a result, an economical multi-slot roller for a wire saw is completed.
【０００７】[0007]
【課題を解決する手段】即ち、本発明によれば、(１)ワ
イヤソーに用いられる多溝ローラであって、本体部とそ
の端部とからなり、該本体部と端部の表面にはワイヤー
が巻装される溝が設けられており、該端部と本体部が分
離自在に一体形成されていることを特徴とするワイヤー
ソー用多溝ローラが提供される。According to the present invention, there is provided (1) a multi-groove roller for use in a wire saw, which comprises a main body and an end thereof, and a wire is provided on the surfaces of the main body and the end. Is provided, and the end portion and the main body portion are integrally formed so as to be separable from each other.
【０００８】本発明に係る上記多溝ローラは、(２)ロー
ラの両端部が着脱自在に形成されている多溝ローラ、
(３)ローラの端部が本体部にネジ止めないし嵌着される
ことにより本体部と着脱自在に一体形成されているワイ
ヤーソー用多溝ローラ、(４)ローラ本体部と着脱自在な
ローラ端部が異なった材質によって形成されているワイ
ヤーソー用多溝ローラ、(５)ローラ本体部の少なくとも
ワイヤー溝の部分がセラミックスであり、かつローラ端
部が樹脂であるワイヤーソー用多溝ローラ、(６)ローラ
本体部の少なくともワイヤー溝の部分が樹脂であり、か
つローラ端部がセラミックスであるワイヤーソー用多溝
ローラ、(７)ローラ本体部の少なくともワイヤー溝の部
分がセラミックスからなる材質であり、かつローラ端部
がワイヤー溝部分の材質よりも高硬度の材質からなるワ
イヤーソー用多溝ローラを含む。The multi-groove roller according to the present invention is: (2) a multi-groove roller in which both ends of the roller are detachably formed;
(3) A multi-slot roller for a wire saw which is detachably formed integrally with the main body by screwing or fitting the end of the roller to the main body, (4) a roller end detachable from the roller main body (5) a wire saw multi-groove roller in which at least the wire groove portion of the roller body is made of ceramics and the roller ends are made of resin, 6) A wire saw multi-groove roller in which at least the wire groove portion of the roller body portion is made of resin and the roller end portion is made of ceramic. (7) At least the wire groove portion of the roller body portion is made of a ceramic material. And a multi-slot roller for a wire saw whose roller end is made of a material having a higher hardness than the material of the wire groove portion.
【０００９】[0009]
【発明の実施の形態】以下に本発明を図面に示す構成例
を参照して詳しく説明する。図２、図３は本発明に係る
多溝ローラを示す概略斜視図であり、図２はローラの本
体部と端部とが一体に形成された状態を示し、図３は両
端部を本体部から外した状態を各々示す。図４(ａ)〜
(ｃ)はローラの端部と本体部との取付状態の例を示す概
略斜視図である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to a configuration example shown in the drawings. 2 and 3 are schematic perspective views showing a multi-groove roller according to the present invention. FIG. 2 shows a state in which the main body and the end of the roller are integrally formed. FIG. , Respectively. FIG.
(c) is a schematic perspective view showing an example of a mounting state of the end of the roller and the main body.
【００１０】図２、図３に示すように、本発明の多溝ロ
ーラ１は、本体部２とその端部３とから形成されてい
る。円柱状の該本体部２と端部３の外周表面にはワイヤ
ーが巻装される多数の溝(ワイヤー溝)５が設けられてお
り、かつ該端部３と本体部２とが分離自在に一体形成さ
れており、該端部３が容易に本体部３から取外して交換
できるように形成されている。図３に示すように、好ま
しくは、多溝ローラ１の両側の端部３ａ,３ｂが着脱自
在に形成されている。As shown in FIGS. 2 and 3, the multi-groove roller 1 of the present invention is formed of a main body 2 and an end 3 thereof. A large number of grooves (wire grooves) 5 around which wires are wound are provided on the outer peripheral surfaces of the cylindrical main body 2 and the end 3, and the end 3 and the main body 2 can be separated from each other. The end 3 is formed so that it can be easily removed from the main body 3 and replaced. As shown in FIG. 3, preferably, both ends 3a and 3b on both sides of the multi-groove roller 1 are formed to be detachable.
【００１１】図４(ａ)〜(ｃ)は、多溝ローラ１の本体部
２と端部３を分離自在に一体形成する構成例である。同
図(ａ)は、本体部２の側端から突出す回転軸４にローラ
端部３を同軸に嵌着し、ネジ７により該端部３を本体部
２にネジ止めする例であり、同図(ｂ)は回転軸４を有す
る端部３を本体部２に軸合わせしてネジ止めする例であ
る。また、同図(ｃ)は端部３を本体部２の回転軸４に同
軸に嵌着してピン８により固定した例である。なお、こ
の場合、端部３が回転軸上で滑り回りしないように、回
転軸まわりに突起ないし溝部を形成し、あるいは回転軸
４の断面を角形に形成し、端部３の差込孔を回転軸４の
断面形状と同形にして互いに噛み合うように形成すると
良い。図示する何れの場合も、ネジ７ないしピン８を外
して端部３を本体部２から取り外すことができる。FIGS. 4A to 4C show an example of a structure in which the main body 2 and the end 3 of the multi-groove roller 1 are integrally formed so as to be separable. FIG. 2A shows an example in which the roller end 3 is coaxially fitted to a rotating shaft 4 protruding from a side end of the main body 2, and the end 3 is screwed to the main body 2 with a screw 7. FIG. 2B shows an example in which the end 3 having the rotating shaft 4 is aligned with the main body 2 and screwed. FIG. 3C shows an example in which the end 3 is coaxially fitted to the rotating shaft 4 of the main body 2 and fixed by the pin 8. In this case, a projection or a groove is formed around the rotation axis so that the end 3 does not slip around on the rotation axis, or the cross section of the rotation shaft 4 is formed in a square shape, and the insertion hole of the end 3 is formed. It is preferable to form the rotary shaft 4 so as to have the same cross-sectional shape as the rotary shaft 4 so as to mesh with each other. In any case shown, the end 7 can be removed from the main body 2 by removing the screw 7 or the pin 8.
【００１２】本発明の上記多溝ローラの本体部２および
端部３の材質は限定されず、金属、樹脂、セラミックス
などを用いることができる。セラミックスの種類は限定
されず、例えば、アルミナ、ジルコニア、炭化珪素、窒
化珪素、サーメット、サファイアなどを用いることがで
きる。また、セラミックス、金属、樹脂などを複合して
用いても良い。The material of the main body 2 and the end 3 of the multi-groove roller of the present invention is not limited, and metals, resins, ceramics and the like can be used. The type of ceramic is not limited, and for example, alumina, zirconia, silicon carbide, silicon nitride, cermet, sapphire, and the like can be used. Further, ceramics, metal, resin and the like may be used in combination.
【００１３】本発明の多溝ローラは本体部２と端部３を
同一の材質によって形成しても良いが、ローラ本体部２
と端部３とを分離自在に形成する本発明の特徴を利用し
て、本体部２と端部３とを異なった材質によって形成す
ることにより、耐久性と経済性および加工精度に優れた
多溝ローラを得ることができる。In the multi-groove roller of the present invention, the main body 2 and the end 3 may be formed of the same material.
The main body 2 and the end 3 are formed of different materials by utilizing the feature of the present invention in which the main body 2 and the end 3 are formed so as to be separable from each other. A grooved roller can be obtained.
【００１４】ローラ全体を樹脂によって製造すれば安価
であるが溝部分の摩耗が激しく耐久性が乏しいために加
工精度が低下する。ところが、本発明に従い、ローラの
本体部と端部とを分離自在に形成すれば、摩耗の激しい
端部を本体部から取り外して交換することができ、多溝
ローラの寿命を高めることができる。また、ローラの溝
部分全体をセラミックスで製造すれば摩耗し難く耐久性
は向上するが高価である。そこで、本発明に従い、例え
ば、本体部の少なくとも溝部分をセラミックスによって
形成することにより加工精度と耐久性を高め、摩耗が激
しい端部を樹脂によって形成すれば、摩耗した端部を随
時取り替えて本体部を継続して使用することができ、経
済性の高いローラを得ることができる。あるいは、比較
的摩耗の少ない本体部を樹脂によって形成し、摩耗の激
しい端部を耐久性に優れたセラミックスによって形成す
ることにより、ローラ全体の耐久性を高めることができ
る。また、ローラ本体部の少なくともワイヤー溝の部分
をセラミックスからなる材質とし、かつローラ端部をワ
イヤー溝部分の材質よりも高硬度、即ち耐摩耗性の高い
材質によって形成することにより多溝ローラの耐久性を
更に高めることができる。If the entire roller is made of resin, it is inexpensive, but the machining accuracy is reduced due to severe wear of the groove and poor durability. However, according to the present invention, if the main body and the end of the roller are formed to be separable, the end with severe wear can be removed from the main body and replaced, and the life of the multi-groove roller can be extended. Further, if the entire groove portion of the roller is made of ceramics, it is difficult to wear and the durability is improved, but it is expensive. Therefore, according to the present invention, for example, if at least the groove portion of the main body portion is formed of ceramics, the processing accuracy and durability are improved, and if the severely worn end portion is formed of resin, the worn end portion is replaced as needed. The roller can be continuously used, and a highly economical roller can be obtained. Alternatively, the durability of the roller as a whole can be increased by forming the body portion with relatively little wear from resin and forming the end portion with severe wear from ceramics having excellent durability. In addition, the durability of the multi-groove roller is improved by forming at least the wire groove portion of the roller main body portion from a material made of ceramics and forming the roller end portion from a material having higher hardness than the material of the wire groove portion, that is, a material having higher wear resistance. Properties can be further enhanced.
【００１５】本発明の上記多溝ローラにおいて、端部お
よび本体部の外周表面に設けられているワイヤー溝の溝
幅や溝の深さ、本数ないしピッチ等は限定されない。ま
た、端部と本体部とで溝の幅や深さ、ピッチなどが異な
るものでも良い。さらに、本発明の多溝ローラは、ワイ
ヤーソー装置において、全てのローラに適用しても良
く、或いは部分的に用いても良い。In the multi-groove roller of the present invention, the width, the depth, the number or the pitch of the wire grooves provided on the end portion and the outer peripheral surface of the main body are not limited. Further, the width, depth, pitch, and the like of the groove may be different between the end portion and the main body portion. Further, the multi-groove roller of the present invention may be applied to all rollers or may be partially used in a wire saw device.
【００１６】[0016]
【発明の効果】本発明のワイヤーソー用多溝ローラは、
ローラの本体部とその端部が分離自在に形成されてい
る。従って、摩耗の激しい端部を本体部から取り外して
新しいものと交換し、摩耗の少ない本体部は引き続いて
使用することができ、多溝ローラ全体の経済性ないし耐
久性(寿命)を高めることができる。また、ローラの端部
と本体部とが分離自在であるので、これらを異なった材
質で形成することができ、使用条件に応じた材質によっ
て形成されたものを用いることにより、経済性および耐
久性を更に向上することができる。The multi-slot roller for a wire saw according to the present invention is
The main body of the roller and its end are formed to be separable. Therefore, the severely worn end can be removed from the main body and replaced with a new one, and the less worn main body can be used continuously, and the economy or durability (life) of the entire multi-groove roller can be improved. it can. In addition, since the end of the roller and the main body are separable, they can be formed of different materials. By using a material formed according to the use conditions, economy and durability can be improved. Can be further improved.
【図１】 ワイヤーソーの基本構成を示す概念図。FIG. 1 is a conceptual diagram showing a basic configuration of a wire saw.
【図２】 本発明の多溝ローラの概略を示す外観斜視図FIG. 2 is an external perspective view schematically showing a multi-groove roller of the present invention.
【図３】 本発明の多溝ローラの両端部を外した状態を
示す概略斜視図FIG. 3 is a schematic perspective view showing a state where both ends of the multi-groove roller of the present invention are removed.
【図４】(ａ)(ｂ)(ｃ) 本発明に係る多溝ローラの本体
部と端部の取付状態を示す概略斜視図。FIGS. 4A, 4B, and 4C are schematic perspective views showing a mounting state of a main body portion and an end portion of the multi-groove roller according to the present invention.
【図５】(ａ)(ｂ)(ｃ) 多溝ローラＡ〜Ｃの溝部分の摩
耗量を示すグラフ。5 (a), (b), and (c) are graphs showing the amounts of wear of the groove portions of the multi-groove rollers A to C. FIG.
１−多溝ローラ、２−ローラの本体部、３,３a,３b−ロ
ーラの端部、４−回転軸、５−ワイヤー溝、１０−ワイ
ヤーソー、１１−ワイヤー、１２−被加工物、Ａ−ドラ
イブローラ、Ｂ，Ｃ−ヘッドローラ1-multi-groove roller, 2-roller body, 3,3a, 3b-roller end, 4-rotation shaft, 5-wire groove, 10-wire saw, 11-wire, 12-workpiece, A -Drive rollers, B, C-Head rollers
Claims (7)
って、本体部とその端部とからなり、該本体部と端部の
表面にはワイヤーが巻装される溝が設けられており、該
端部と本体部が分離自在に一体形成されていることを特
徴とするワイヤーソー用多溝ローラ。1. A multi-groove roller for use in a wire saw, comprising a main body and an end thereof, wherein a groove on which a wire is wound is provided on the surfaces of the main body and the end. A multi-slot roller for a wire saw, wherein an end and a main body are integrally formed so as to be separable.
いる請求項１に記載のワイヤーソー用多溝ローラ。2. The multi-slot roller for a wire saw according to claim 1, wherein both ends of the roller are detachably formed.
嵌着されることにより本体部と着脱自在に一体形成され
ている請求項１または２に記載のワイヤーソー用多溝ロ
ーラ。3. The multi-slot roller for a wire saw according to claim 1, wherein an end of the roller is detachably integrated with the main body by screwing or fitting the end to the main body.
異なった材質によって形成されている請求項１、２また
は３に記載のワイヤーソー用多溝ローラ。4. The multi-slot roller for a wire saw according to claim 1, wherein the roller main body and the detachable roller end are formed of different materials.
部分がセラミックスであり、かつローラ端部が樹脂であ
る請求項４に記載のワイヤーソー用多溝ローラ。5. The multi-slot roller for a wire saw according to claim 4, wherein at least a portion of the wire groove of the roller body is made of ceramics, and a roller end is made of resin.
部分が樹脂であり、かつローラ端部がセラミックスであ
る請求項４に記載のワイヤーソー用多溝ローラ。6. The multi-slot roller for a wire saw according to claim 4, wherein at least a portion of the wire groove of the roller body is made of resin, and a roller end is made of ceramic.
部分がセラミックスからなる材質であり、かつローラ端
部がワイヤー溝部分の材質よりも高硬度の材質からなる
請求項４に記載のワイヤーソー用多溝ローラ。7. The wire saw according to claim 4, wherein at least the wire groove portion of the roller body is made of a ceramic material, and the roller end portion is made of a material having a higher hardness than the material of the wire groove portion. Groove roller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29394597A JPH11123649A (en) | 1997-10-27 | 1997-10-27 | Multiple groove roller for wire saw |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29394597A JPH11123649A (en) | 1997-10-27 | 1997-10-27 | Multiple groove roller for wire saw |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11123649A true JPH11123649A (en) | 1999-05-11 |
Family
ID=17801215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29394597A Withdrawn JPH11123649A (en) | 1997-10-27 | 1997-10-27 | Multiple groove roller for wire saw |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11123649A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007175784A (en) * | 2005-12-26 | 2007-07-12 | Kyocera Corp | Wire saw device |
| EP2123384A1 (en) * | 2008-05-22 | 2009-11-25 | CO.FI.PLAST. S.r.l. | Multiwire sawing machine for the cutting of material in block form |
| JP2011051032A (en) * | 2009-08-31 | 2011-03-17 | Taiheiyo Cement Corp | Roller for wire saw |
| ITMO20100191A1 (en) * | 2010-06-25 | 2011-12-26 | Luigi Pedrini | SUPPORT ROLLER / GUIDE OF DIAMOND WIRES IN MULTIPLE CUTTING MACHINES NATURAL STONE OR ARTIFICIAL |
| DE102018221922A1 (en) | 2018-12-17 | 2020-06-18 | Siltronic Ag | Method for producing semiconductor wafers using a wire saw, wire saw and semiconductor wafer made of single-crystal silicon |
-
1997
- 1997-10-27 JP JP29394597A patent/JPH11123649A/en not_active Withdrawn
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007175784A (en) * | 2005-12-26 | 2007-07-12 | Kyocera Corp | Wire saw device |
| EP2123384A1 (en) * | 2008-05-22 | 2009-11-25 | CO.FI.PLAST. S.r.l. | Multiwire sawing machine for the cutting of material in block form |
| JP2011051032A (en) * | 2009-08-31 | 2011-03-17 | Taiheiyo Cement Corp | Roller for wire saw |
| ITMO20100191A1 (en) * | 2010-06-25 | 2011-12-26 | Luigi Pedrini | SUPPORT ROLLER / GUIDE OF DIAMOND WIRES IN MULTIPLE CUTTING MACHINES NATURAL STONE OR ARTIFICIAL |
| WO2011161713A1 (en) * | 2010-06-25 | 2011-12-29 | Luigi Pedrini | Roller for support and/or guide of diamond wires in multi-wire machine for cutting blocks of artificial or natural stone |
| CN103025465A (en) * | 2010-06-25 | 2013-04-03 | 路易吉·贝得利尼 | Roller for support and/or guide of diamond wires in multi-wire machine for cutting blocks of artificial or natural stone |
| CN103025465B (en) * | 2010-06-25 | 2016-06-29 | 意大利贝得里尼独资股份公司 | The roller of the diamond wire of multi-thread machine for supporting and/or lead for cutting artificial or blocks of natural stone |
| DE102018221922A1 (en) | 2018-12-17 | 2020-06-18 | Siltronic Ag | Method for producing semiconductor wafers using a wire saw, wire saw and semiconductor wafer made of single-crystal silicon |
| WO2020126787A2 (en) | 2018-12-17 | 2020-06-25 | Siltronic Ag | Method for producing semiconductor wafers using a wire saw, wire saw, and semiconductor wafers made of monocrystalline silicon |
| EP4300542A2 (en) | 2018-12-17 | 2024-01-03 | Siltronic AG | Method for producing semiconductor wafers using a wire saw, wire saw, and semiconductor wafer made of monocrystalline silicon |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A761 | Written withdrawal of application |
Effective date: 20041202 Free format text: JAPANESE INTERMEDIATE CODE: A761 |