JPH11120613A - Optical recording medium - Google Patents

Optical recording medium

Info

Publication number
JPH11120613A
JPH11120613A JP9276027A JP27602797A JPH11120613A JP H11120613 A JPH11120613 A JP H11120613A JP 9276027 A JP9276027 A JP 9276027A JP 27602797 A JP27602797 A JP 27602797A JP H11120613 A JPH11120613 A JP H11120613A
Authority
JP
Japan
Prior art keywords
film
recording medium
substrate
weight
optical recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP9276027A
Other languages
Japanese (ja)
Inventor
Yuji Kuroda
裕児 黒田
Koichi Yasuda
宏一 保田
Yutaka Kasami
裕 笠見
Kotaro Kurokawa
光太郎 黒川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP9276027A priority Critical patent/JPH11120613A/en
Publication of JPH11120613A publication Critical patent/JPH11120613A/en
Abandoned legal-status Critical Current

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  • Other Surface Treatments For Metallic Materials (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)

Abstract

PROBLEM TO BE SOLVED: To improve the recording and reproducing characteristics of information by forming a phase transition type recording film so as to exactly reflect the surface shape of a substrate and forming this phase transition type recording film so as to have good characteristics. SOLUTION: A reflection film 3 consisting of a material essentially consisting of Al and contg. Si at a ratio of 0.4 to 0.8 (wt.%), Fe <=0.7 (wt.%), Cu 0.15 to 0.40 (wt.%), Mn <=0.15 (wt.%), Mg 0.8 to 1.2 (wt.%), Cr 0.04 to 0.35 (wt.%), Zn <=0.25 (wt.%) and Ti <=0.15 (wt.%) is formed on a substrate 1 of a thickness 0.3 to 1.2 (mm). At least the phase transition type recording film 4 is formed thereon and further, a light transparent layer 5 is laminated and formed thereon. The phase transition type recording film 4 is formed on the reflection film 3 via a dielectric film. The light transparent layer 5 may be formed via a dielectric film thereon. The substrate 1 which is formed with rugged parts, such as guide grooves 2, on one main surface 1a side formed with the reflection film 3 may be used as well.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、基板の一主面側に
情報記録層を有し、その上に光透過層が形成されてお
り、上記光透過層側からレーザ光を照射して情報の記録
及び/又は再生を行う光記録媒体に関する。詳しくは、
反射膜形成材料の組成を規定することにより、優れた記
録再生特性が確保される光記録媒体に係わるものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an information recording layer on one main surface of a substrate, on which a light transmitting layer is formed. The present invention relates to an optical recording medium for recording and / or reproducing information. For more information,
The present invention relates to an optical recording medium in which excellent recording / reproducing characteristics are ensured by defining the composition of a reflective film forming material.

【0002】[0002]

【従来の技術】近年、データ記録の分野においては光学
データ記録方式に関する研究が各所で進められている。
この光学データ記録方式は、非接触で記録・再生が行え
ること、磁気記録方式に比べて一桁以上も高い記録密度
が達成できること、再生専用型、追記型、書換可能型の
それぞれのメモリー形態に対応できる等の数々の利点を
有し、安価な大容量ファイルの実現を可能とする方式と
して産業用から民生用まで幅広い用途の考えられている
ものである。
2. Description of the Related Art In recent years, in the field of data recording, researches on optical data recording methods have been conducted in various places.
This optical data recording system enables non-contact recording and reproduction, achieves recording densities that are at least an order of magnitude higher than magnetic recording systems, and is designed for read-only, write-once, and rewritable memory types. It has a number of advantages such as compatibility, and is considered as a system that can realize an inexpensive large-capacity file for a wide range of uses from industrial use to consumer use.

【0003】その中でも特に、再生専用型のメモリー形
態に対応した光ディスクであり、音楽データが記録され
たデジタルオーディオディスクや画像データが記録され
た光学式ビデオディスク等は広く普及している。
[0003] Among them, in particular, an optical disk corresponding to a read-only type memory format, such as a digital audio disk on which music data is recorded and an optical video disk on which image data is recorded, are widely used.

【0004】上記デジタルオーディオディスク等の光デ
ィスクは、データ信号を示すピットやグルーブ等の凹凸
パターンが形成された厚さ1.2(mm)程度の透明基
板の凹凸パターンが形成された一主面上にアルミニウム
膜等の金属薄膜よりなる反射膜が形成されて記録層とな
され、さらにこの反射膜を大気中の水分,O2 から保護
するための保護膜が上記反射膜上に形成された構成とさ
れる。
An optical disc such as the above digital audio disc has an uneven pattern of a transparent substrate having a thickness of about 1.2 (mm) on which an uneven pattern such as pits or grooves indicating data signals is formed. A reflective film made of a metal thin film such as an aluminum film is formed as a recording layer, and a protective film for protecting the reflective film from atmospheric moisture and O 2 is formed on the reflective film. Is done.

【0005】また、書換可能型のメモリー形態に対応し
たものとしては、光磁気ディスクや相変化型光ディスク
が挙げられる。
[0005] In addition, a magneto-optical disk and a phase-change optical disk can be cited as those corresponding to the rewritable memory mode.

【0006】例えば、上記書換可能型のメモリー形態に
対応した相変化型光ディスクは、以下に示すような構成
を有する。すなわち、透明基板の一主面上に窒化珪素等
よりなる透明誘電体膜が形成され、その上にカルコゲン
化合物等よりなる相変化記録膜が形成され、さらに窒化
珪素等の透明誘電体膜が形成されて記録層をなし、さら
にはアルミニウム膜等の反射膜が形成されている。そし
て、透明基板側から光を照射して光学的に情報の記録再
生を行う。
For example, a phase-change type optical disk corresponding to the above-mentioned rewritable type memory has the following configuration. That is, a transparent dielectric film made of silicon nitride or the like is formed on one main surface of a transparent substrate, a phase change recording film made of a chalcogen compound or the like is formed thereon, and a transparent dielectric film made of silicon nitride or the like is further formed. Thus, a recording layer is formed, and a reflection film such as an aluminum film is formed. Then, light is irradiated from the transparent substrate side to optically record and reproduce information.

【0007】さらに、最近では画像、音楽、コンピュー
タデータ等の多様なデータを記録するためのDVD(D
igital Versatile Disc、以下、
DVDと称する。)も上市されている。このDVDにお
いては、基板の厚さを0.6(mm)程度として短波長
の光学系に対応可能とするとともに高開口数化された光
学系に対応可能として高記録密度化するようにしてい
る。
[0007] Recently, DVDs (Digital Media) for recording various data such as images, music, computer data and the like have been developed.
digital Versatile Disc,
It is called DVD. ) Is also on the market. In this DVD, the thickness of the substrate is set to about 0.6 (mm) so as to be compatible with an optical system having a short wavelength and to be compatible with an optical system having a high numerical aperture so as to have a high recording density. .

【0008】[0008]

【発明が解決しようとする課題】このような状況の中、
更なる次世代の光記録媒体として、特願平9−1096
60号公報に示すような片面にNTSC(Nation
al Television System Comm
ittee)方式で4時間記録再生が可能な光記録媒体
が提案されている。
In such a situation,
As a next-generation optical recording medium, Japanese Patent Application No. 9-1096
No. 60, NTSC (Nation
al Television System Comm
It has been proposed an optical recording medium capable of recording / reproducing for 4 hours by the (itte) method.

【0009】この光記録媒体においては、家庭用ビデオ
ディスクレコーダーとして4時間の記録再生を可能とす
ることにより、現在主流とされているビデオテープレコ
ーダー(Video Tape Recorder)に
代わる新しい記録媒体としての機能を備えることを目的
としている。また、この光記録媒体においては、音楽デ
ータが記録されたデジタルオーディオディスクと同じ形
状、サイズとすることにより、デジタルオーディオディ
スクの手軽さ、使い勝手に慣れ親しんだユーザーにとっ
て使いやすい製品とすることも考えられている。さら
に、この光記録媒体においては、形状をディスク状とす
ることにより、ディスク形状の最大の特徴であるアクセ
スの速さを利用し、小型、簡便な記録媒体というだけで
なく、瞬時の録画再生やトリックプレイや編集といった
多彩な機能を盛り込むことも考えられている。
This optical recording medium is capable of recording and reproducing for 4 hours as a home video disk recorder, thereby functioning as a new recording medium in place of a video tape recorder (Video Tape Recorder) which is currently mainstream. It is intended to have. In addition, this optical recording medium may have the same shape and size as a digital audio disc on which music data is recorded, so that the product is easy to use for users familiar with the simplicity and usability of the digital audio disc. ing. Further, in this optical recording medium, by making the shape of a disk, utilizing the speed of access which is the greatest feature of the disk shape, not only a compact and simple recording medium, but also an instant recording and reproduction Various functions such as trick play and editing are also considered.

【0010】そこで、上記光記録媒体においては、この
ような多彩な機能を盛り込むべく、8(GB)以上の記
憶容量が要求されている。
Therefore, the above-mentioned optical recording medium is required to have a storage capacity of 8 (GB) or more in order to incorporate such various functions.

【0011】ところが、従来の光記録媒体の何れにおい
ても8(GB)の記憶容量は達成されていない。例え
ば、高記憶容量とされているDVDにおいても、波長λ
が0.65(μm)、光学系の開口数(以下、NAと称
する。)が0.6とされて、4.7(GB)の記憶容量
しか確保されていない。
However, none of the conventional optical recording media has achieved a storage capacity of 8 (GB). For example, even in a DVD having a high storage capacity, the wavelength λ
Is 0.65 (μm), the numerical aperture of the optical system (hereinafter, referred to as NA) is 0.6, and only a storage capacity of 4.7 (GB) is secured.

【0012】例えば、ECC(Error Colle
ction Code)や変調方式といった信号フォー
マットをDVDの方式としたままで、8(GB)以上の
記憶容量を確保するためには、下記式1を満たす必要が
ある。
For example, ECC (Error Colle)
In order to secure a storage capacity of 8 (GB) or more while maintaining the DVD format as the signal format such as the Ction Code) and the modulation method, the following equation 1 must be satisfied.

【0013】 4.7×(0.65/0.60×NA/λ)2 ≧8・・・(式1) そして、上記式1よりNA/λ≧1.20であることが
必要となる。すなわち、短波長化或いは高NA化が必要
となる。
4.7 × (0.65 / 0.60 × NA / λ) 2 ≧ 8 (Equation 1) From the above equation 1, it is necessary that NA / λ ≧ 1.20. . That is, it is necessary to shorten the wavelength or increase the NA.

【0014】ここで、例えば高NA化すると、再生光が
照射されてこれが透過する部分の厚さを薄くする必要が
ある。これは、高NA化に伴い、光学ピックアップの光
軸に対してディスク面が垂直からズレる角度(チルト
角)により発生する収差の許容量が小さくなるためであ
り、このチルト角により発生する収差は再生光が透過す
る部分の厚さが厚いほど大きくなるためである。
Here, for example, when the NA is increased, it is necessary to reduce the thickness of a portion through which the reproduction light is irradiated and transmitted. This is because with the increase in NA, the allowable amount of aberration generated by an angle (tilt angle) at which the disc surface deviates from the perpendicular to the optical axis of the optical pickup becomes smaller. This is because the larger the thickness of the portion through which the reproduction light is transmitted, the larger the thickness.

【0015】また、同様の理由から、再生光が透過する
部分の厚さのばらつきも所定の範囲内に収める必要があ
る。
[0015] For the same reason, it is necessary to keep the variation in the thickness of the portion through which the reproduction light is transmitted within a predetermined range.

【0016】そこで、上記のような光記録媒体において
は、例えば基板の一主面上に凹凸部を形成し、その上に
反射膜を設けて記録層とし、さらにこの上に光を透過す
る薄膜である光透過層を設けるようにし、光透過層側か
ら再生光を照射して記録層のデータを再生するようにし
たり、基板の一主面上に反射膜を設け、その上に少なく
とも光磁気記録膜や相変化型記録膜を形成して記録層と
し、さらにこの上に光を透過する薄膜である光透過層を
設けるようにし、光透過層側から光を照射して記録層に
対してデータを記録及び再生するようにしている。この
ようにすれば、光透過層を薄型化していくことで光学系
の高NA化に対応可能である。
Therefore, in the above-mentioned optical recording medium, for example, an uneven portion is formed on one main surface of a substrate, a reflective film is provided thereon to form a recording layer, and a thin film that transmits light is further formed thereon. A light-transmitting layer, and reproducing data from the recording layer by irradiating reproduction light from the light-transmitting layer side, or providing a reflective film on one main surface of the substrate, and at least magneto-optical A recording layer is formed by forming a recording film or a phase-change type recording film, and a light transmitting layer, which is a thin film that transmits light, is provided thereon, and light is irradiated from the light transmitting layer side to the recording layer. Data is recorded and reproduced. With this configuration, it is possible to cope with an increase in the NA of the optical system by reducing the thickness of the light transmission layer.

【0017】例えば、光透過層の厚さtを10〜177
(μm)とし、光透過層の膜厚のばらつきをΔt(μ
m)としたときに、光記録媒体に対し情報の再生及び/
又は記録を行う光学系のNA、波長λ(μm)の間に下
記式2に示すような関係が成り立てば、記憶容量を8
(GB)とすることが可能であり、従来の記録再生装置
と同様の記録再生装置を使用して高記録容量化を図るこ
とが可能である。
For example, the thickness t of the light transmitting layer is set to 10 to 177.
(Μm), and the variation in the thickness of the light transmitting layer is Δt (μm).
m), the reproduction of information on the optical recording medium and / or
Alternatively, if the relationship as shown in the following equation 2 is established between the NA of the optical system for recording and the wavelength λ (μm), the storage capacity becomes 8
(GB), and it is possible to increase the recording capacity by using a recording and reproducing device similar to a conventional recording and reproducing device.

【0018】 Δt=±5.26(λ/NA4 )・・・(式2) ところで、上述のような光記録媒体のうち、例えば相変
化型記録膜を有する光記録媒体を製造するには、例えば
一主面に情報再生用のピット列や情報の記録及び再生を
行うための光学系のスポット光を導くための案内溝とい
った凹凸部が形成された基板の上記一主面上に反射膜を
スパッタ法のような通常の真空薄膜形成手段により形成
する。そして、この上に例えば誘電体膜、相変化型記録
膜、誘電体膜を順次積層形成して記録層とし、その上に
光透過層を形成する。
Δt = ± 5.26 (λ / NA 4 ) (Equation 2) By the way, among the above-described optical recording media, for example, an optical recording medium having a phase-change recording film is manufactured. For example, a reflective film is formed on the one main surface of the substrate on which a concave and convex portion such as a pit row for information reproduction or a guide groove for guiding a spot light of an optical system for recording and reproducing information is formed on one main surface. Is formed by ordinary vacuum thin film forming means such as a sputtering method. Then, on this, for example, a dielectric film, a phase change type recording film, and a dielectric film are sequentially laminated to form a recording layer, and a light transmitting layer is formed thereon.

【0019】すなわち、上述のような光透過層を有する
光記録媒体においては、相変化型記録膜に基板の凹凸部
を正確に反映させるのが相対的に困難となり、情報の記
録再生特性が損なわれてしまう。
That is, in the optical recording medium having the light transmitting layer as described above, it is relatively difficult to accurately reflect the uneven portion of the substrate on the phase change type recording film, and the recording / reproducing characteristics of information are impaired. I will be.

【0020】一主面に凹凸部を有する透明基板の上記一
主面上に例えば誘電体膜、相変化型記録膜、誘電体膜が
順次積層形成されてなる記録層を設け、その上に反射膜
を設け、透明基板側から情報の記録及び/又は再生を行
う光を照射する前述のような光記録媒体においては、基
板と相変化型記録膜間には高々100(nm)程度の厚
さの誘電体膜のみが介在する。このことから、相変化型
記録膜は、基板の凹凸部を正確に反映して形成される。
On a transparent substrate having an uneven portion on one main surface, a recording layer formed by sequentially laminating, for example, a dielectric film, a phase change recording film, and a dielectric film is provided on the one main surface. In the above-described optical recording medium in which a film is provided and light for recording and / or reproducing information is irradiated from the transparent substrate side, the thickness between the substrate and the phase-change recording film is at most about 100 (nm). Only the dielectric film is interposed. For this reason, the phase-change recording film is formed by accurately reflecting the uneven portions of the substrate.

【0021】ところが、光透過層を有する上述の光記録
媒体においては、基板の凹凸部が形成される一主面と相
変化型記録膜の間に反射膜と誘電体膜が介在することと
なり、これらの総厚が200(nm)弱程度となること
から、相変化型記録膜に基板の凹凸部を正確に反映させ
るのが相対的に困難となる。
However, in the above-described optical recording medium having a light transmitting layer, a reflective film and a dielectric film are interposed between one main surface of the substrate on which the uneven portions are formed and the phase change type recording film. Since the total thickness is less than about 200 (nm), it is relatively difficult to accurately reflect the irregularities of the substrate on the phase change recording film.

【0022】さらに、上記光透過層を有する光記録媒体
においては、基板の表面性が反射膜の結晶性に影響を及
ぼし、上記反射膜の結晶性が相変化型記録膜の特性に影
響を及ぼし、情報の記録再生特性が損なわれてしまう。
また、反射膜の組成に依存する粒径により形成される界
面形状も相変化型記録膜の特性に影響を及ぼし、情報の
記録再生特性が損なわれてしまう。
Further, in the optical recording medium having the light transmitting layer, the surface property of the substrate affects the crystallinity of the reflection film, and the crystallinity of the reflection film affects the characteristics of the phase change recording film. In addition, information recording / reproducing characteristics are impaired.
Further, the interface shape formed by the particle size depending on the composition of the reflection film also affects the characteristics of the phase change type recording film, and the information recording / reproducing characteristics are impaired.

【0023】さらにまた、上記反射膜の結晶性や反射膜
の組成に依存する粒径により形成される界面形状は、相
変化型記録膜の表面形状にも影響し、当該相変化型記録
膜に基板の凹凸部を正確に反映させるのが更に困難とな
り、情報の記録再生特性が損なわれてしまう。
Further, the interface shape formed by the crystallinity of the reflective film and the particle size depending on the composition of the reflective film also affects the surface shape of the phase change type recording film. It becomes more difficult to accurately reflect the irregularities of the substrate, and the recording / reproducing characteristics of information are impaired.

【0024】そこで本発明は、従来の実情に鑑みて提案
されるものであり、相変化型記録膜が基板の表面形状を
正確に反映して形成され、且つ相変化型記録膜が特性良
好に形成され、情報の記録再生特性が良好とされる光記
録媒体を提供しようとするものである。
Accordingly, the present invention has been proposed in view of the conventional situation, and the phase change type recording film is formed to accurately reflect the surface shape of the substrate, and the phase change type recording film has good characteristics. An object of the present invention is to provide an optical recording medium which is formed and has good information recording / reproducing characteristics.

【0025】[0025]

【課題を解決するための手段】上述の課題を解決するた
め、本発明に係る光記録媒体は、厚さ0.3〜1.2
(mm)の基板上に反射膜が形成され、上記反射膜上に
少なくとも相変化型記録膜が形成され、その上に厚さ1
0〜177(μm)の光透過層が形成されてなる光記録
媒体であり、上記反射膜が、Alを主成分とし、Siを
0.4〜0.8(重量%)、Feを0.7(重量%)以
下、Cuを0.15〜0.40(重量%)、Mnを0.
15(重量%)以下、Mgを0.8〜1.2(重量
%)、Crを0.04〜0.35(重量%)、Znを
0.25(重量%)以下、Tiを0.15(重量%)以
下の割合で含有する材料よりなることを特徴とするもの
である。
In order to solve the above-mentioned problems, an optical recording medium according to the present invention has a thickness of 0.3 to 1.2.
(Mm) substrate, a reflective film is formed, and at least a phase change recording film is formed on the reflective film, and a thickness of 1 mm is formed thereon.
An optical recording medium in which a light transmission layer of 0 to 177 (μm) is formed, wherein the reflective film contains Al as a main component, 0.4 to 0.8 (% by weight) of Si, and 0.1 to 0.1% of Fe. 7 (% by weight) or less, Cu is 0.15 to 0.40 (% by weight), and Mn is 0.1% or less.
15 (% by weight) or less; 0.8 to 1.2 (% by weight) of Mg; 0.04 to 0.35 (% by weight) of Cr; 0.25 (% by weight) of Zn; It is characterized by being made of a material contained in a proportion of 15 (% by weight) or less.

【0026】上記本発明に係わる光記録媒体において
は、反射膜上に、誘電体膜を介して相変化型記録膜が形
成され、その上に誘電体膜を介して光透過層が形成され
ているのが好ましい。
In the optical recording medium according to the present invention, a phase-change recording film is formed on a reflection film via a dielectric film, and a light transmission layer is formed on the phase change type recording film via a dielectric film. Is preferred.

【0027】なお、本発明の光記録媒体においては、基
板の反射膜形成面側に凹凸部が形成されていても良い。
Incidentally, in the optical recording medium of the present invention, an uneven portion may be formed on the reflection film forming surface side of the substrate.

【0028】本発明に係る光記録媒体においては、基板
上に、Alを主成分とし、Siを0.4〜0.8(重量
%)、Feを0.7(重量%)以下、Cuを0.15〜
0.40(重量%)、Mnを0.15(重量%)以下、
Mgを0.8〜1.2(重量%)、Crを0.04〜
0.35(重量%)、Znを0.25(重量%)以下、
Tiを0.15(重量%)以下の割合で含有する材料よ
りなる反射膜を形成しており、表面性の良好な反射膜が
形成される。従って、この上に少なくとも相変化型記録
膜を積層形成した場合に、相変化型記録膜は反射膜の結
晶性や反射膜の組成に依存する粒径により形成される界
面形状の影響を受け難く、基板の表面形状を正確に反映
すると共に特性良好に形成される。
In the optical recording medium according to the present invention, Al is a main component, Si is 0.4 to 0.8 (% by weight), Fe is 0.7 (% by weight) or less, and Cu is 0.15-
0.40 (% by weight), Mn is 0.15 (% by weight) or less,
0.8 to 1.2 (wt%) of Mg, 0.04 to Cr
0.35 (% by weight), Zn is 0.25 (% by weight) or less,
A reflective film made of a material containing Ti at a ratio of 0.15 (% by weight) or less is formed, and a reflective film having good surface properties is formed. Therefore, when at least a phase change type recording film is formed thereon, the phase change type recording film is hardly affected by the interface shape formed by the crystallinity of the reflection film and the particle size depending on the composition of the reflection film. , Which accurately reflects the surface shape of the substrate and has good characteristics.

【0029】また、反射膜上に、誘電体膜を介して相変
化型記録膜を形成した場合においても同様であり、上記
相変化型記録膜は、基板の表面形状を正確に反映すると
共に特性良好に形成される。
The same applies to the case where a phase change type recording film is formed on a reflective film via a dielectric film. The phase change type recording film accurately reflects the surface shape of the substrate and has a characteristic. Well formed.

【0030】なお、上記本発明の光記録媒体において、
基板として反射膜形成面側に凹凸部が形成されたものを
使用した場合においても、反射膜を上記のような組成と
して表面性を良好としていることから、相変化型記録膜
は反射膜の結晶性や反射膜の組成に依存する粒径により
形成される界面形状の影響を受け難く、基板の凹凸部を
有する表面形状を正確に反映して形成される。
In the optical recording medium of the present invention,
Even when a substrate having an uneven portion formed on the reflective film forming surface side is used as the substrate, since the reflective film has the above composition and good surface properties, the phase change type recording film is a crystal of the reflective film. It is hardly affected by the interface shape formed by the particle size depending on the properties and the composition of the reflective film, and is formed by accurately reflecting the surface shape of the substrate having the unevenness.

【0031】[0031]

【発明の実施の形態】以下、本発明の実施の形態を図面
を参照しながら説明する。なお、ここでは本発明をディ
スク状の記録媒体に適用した例を示すが、本発明はこの
ような構造に限定されるものではなく、カード状、シー
ト状といった記録媒体にも適用可能である。
Embodiments of the present invention will be described below with reference to the drawings. Here, an example in which the present invention is applied to a disk-shaped recording medium will be described. However, the present invention is not limited to such a structure, and can be applied to a card-shaped or sheet-shaped recording medium.

【0032】本例の光記録媒体は、図1に示すように、
基板1の一主面1a上に、反射膜3、相変化型記録膜
4、光透過層5が順次積層形成されてなるものである。
The optical recording medium of this embodiment is, as shown in FIG.
On one main surface 1a of a substrate 1, a reflection film 3, a phase change recording film 4, and a light transmission layer 5 are sequentially laminated.

【0033】上記基板1は、ガラスやプラスチック等よ
りなり、厚さが0.3〜1.2(mm)であり、一主面
1a側に情報再生用のピット列或いは情報の記録再生を
行うための光学スポットを導く目的で設けられる案内溝
といった凹凸部(ここでは案内溝2のみを示す。)を有
するものである。そして、案内溝2のトラックピッチを
P、基板1のスキューをΘ、光記録媒体の情報を再生又
は記録再生する光学ピックアップの開口数をNA、その
光源波長をλ、後述の光透過層5の厚さをtとすると、
下記式(3)〜(6)の関係を満足して8(GB)の記
録容量を達成している。
The substrate 1 is made of glass, plastic, or the like, has a thickness of 0.3 to 1.2 (mm), and performs pit rows for information reproduction or information recording / reproduction on one main surface 1a side. Having an uneven portion such as a guide groove provided for the purpose of guiding an optical spot (here, only the guide groove 2 is shown). Then, the track pitch of the guide groove 2 is P, the skew of the substrate 1 is Θ, the numerical aperture of an optical pickup for reproducing or recording / reproducing information on an optical recording medium is NA, the light source wavelength is λ, and If the thickness is t,
The recording capacity of 8 (GB) is achieved by satisfying the relations of the following expressions (3) to (6).

【0034】 P≦0.64(μm)・・・(式3) Θ≦±84.115(λ/NA3 /t)・・・(式4) λ≦0.64(μm)・・・(式5) NA/λ≧1.20・・・(式6) そして、本例の光記録媒体においては特に、上記基板1
の案内溝2が形成される一主面1a上に反射膜3を形成
するようにしており、この反射膜3はAlを主成分と
し、Siを0.4〜0.8(重量%)、Feを0.7
(重量%)以下、Cuを0.15〜0.40(重量
%)、Mnを0.15(重量%)以下、Mgを0.8〜
1.2(重量%)、Crを0.04〜0.35(重量
%)、Znを0.25(重量%)以下、Tiを0.15
(重量%)以下の割合で含有する材料よりなる厚さ50
〜200(nm)の薄膜として形成されている。上記材
料により基板1上に反射膜3を形成する方法としては、
イオンビームスパッタ法、DCスパッタ法、RFスパッ
タ法といった手法が挙げられるが、イオンビームスパッ
タ法が好ましく例示される。
P ≦ 0.64 (μm) (Expression 3) Θ ≦ ± 84.115 (λ / NA 3 / t) (Expression 4) λ ≦ 0.64 (μm) (Equation 5) NA / λ ≧ 1.20 (Equation 6) In the optical recording medium of this embodiment, in particular, the substrate 1
The reflective film 3 is formed on one main surface 1a on which the guide groove 2 is formed. The reflective film 3 contains Al as a main component, and contains 0.4 to 0.8 (% by weight) of Si. Fe 0.7
(% By weight) or less, Cu is 0.15 to 0.40 (% by weight), Mn is 0.15 (% by weight) or less, and Mg is 0.8 to 0.8%.
1.2 (% by weight), Cr: 0.04 to 0.35 (% by weight), Zn: 0.25 (% by weight) or less, Ti: 0.15%
(Weight%) Thickness 50 made of a material contained in the following ratio
It is formed as a thin film of up to 200 (nm). As a method of forming the reflection film 3 on the substrate 1 by using the above-mentioned materials,
Examples of the method include an ion beam sputtering method, a DC sputtering method, and an RF sputtering method, and an ion beam sputtering method is preferably exemplified.

【0035】上記相変化型記録膜4はカルコゲン化合物
或いは単体のカルコゲンよりなる厚さ10〜30(n
m)の薄膜として形成されている。
The phase-change recording film 4 is made of a chalcogen compound or a single chalcogen and has a thickness of 10 to 30 (n).
m) is formed as a thin film.

【0036】また、上記光透過層5はこの種の光記録媒
体の光透過層と同様に形成すれば良い。ただし、本例の
光記録媒体においては、上記光透過層5の厚さをt、光
透過層の厚さのばらつきをΔtとしたときに、下記式
(7)及び式(8)を満足するように光透過層5が形成
されている。
The light transmitting layer 5 may be formed similarly to the light transmitting layer of this type of optical recording medium. However, in the optical recording medium of this example, when the thickness of the light transmitting layer 5 is t and the variation in the thickness of the light transmitting layer is Δt, the following expressions (7) and (8) are satisfied. The light transmitting layer 5 is formed as described above.

【0037】 10(μm)≦t≦177(μm)・・・式(7) Δt≦±5.26(λ/NA4 )・・・式(8) すなわち、本例の光記録媒体においては、基板上1に、
Alを主成分とし、Siを0.4〜0.8(重量%)、
Feを0.7(重量%)以下、Cuを0.15〜0.4
0(重量%)、Mnを0.15(重量%)以下、Mgを
0.8〜1.2(重量%)、Crを0.04〜0.35
(重量%)、Znを0.25(重量%)以下、Tiを
0.15(重量%)以下の割合で含有する材料よりなる
反射膜3を形成しており、表面性の良好な反射膜3が形
成される。従って、この上に積層形成される相変化型記
録膜4は、反射膜3の結晶性や反射膜3の組成に依存す
る粒径により形成される界面形状の影響を受け難く、基
板1の表面形状を正確に反映すると共に特性良好に形成
される。
10 (μm) ≦ t ≦ 177 (μm) Expression (7) Δt ≦ ± 5.26 (λ / NA 4 ) Expression (8) That is, in the optical recording medium of this example, , On the substrate 1,
Al as a main component, 0.4 to 0.8 (% by weight) of Si,
Fe is 0.7 (% by weight) or less, and Cu is 0.15 to 0.4.
0 (% by weight), Mn is 0.15 (% by weight) or less, Mg is 0.8 to 1.2 (% by weight), Cr is 0.04 to 0.35.
(Weight%), a reflective film 3 made of a material containing Zn at a ratio of 0.25 (% by weight) or less and Ti at a ratio of 0.15 (% by weight) or less is formed, and the reflective film has good surface properties. 3 is formed. Therefore, the phase-change recording film 4 formed thereon is hardly affected by the interface shape formed by the crystallinity of the reflective film 3 and the particle size depending on the composition of the reflective film 3. It accurately reflects the shape and has good characteristics.

【0038】なお、上記本例の光記録媒体においては、
基板1として反射膜3が積層形成される一主面1aに案
内溝2といった凹凸部が形成されているものを使用して
いるが、反射膜3を上記のような組成として表面性を良
好としていることから、相変化型記録膜4は、基板の案
内溝2といった凹凸部を有する表面形状を正確に反映し
て形成される。
In the optical recording medium of the present embodiment,
As the substrate 1, a substrate having a main surface 1a on which a reflective film 3 is formed by lamination and having an uneven portion such as a guide groove 2 is used. Therefore, the phase change type recording film 4 is formed by accurately reflecting the surface shape having the uneven portion such as the guide groove 2 of the substrate.

【0039】本発明に係わる光記録媒体としては、図2
に示すようなものも挙げられる。すなわち、先に図1に
示した光記録媒体と略同様の構成を有し、基板11の一
主面11a上に反射膜13が形成され、その上に第1の
誘電体層16を介して相変化型記録膜14が形成され、
さらにその上に第2の誘電体層17を介して光透過層1
5が積層形成されてなるものである。
As an optical recording medium according to the present invention, FIG.
And the like. That is, the optical recording medium has substantially the same configuration as that of the optical recording medium shown in FIG. 1, the reflective film 13 is formed on one main surface 11 a of the substrate 11, and the first dielectric layer 16 A phase change type recording film 14 is formed,
Further, the light transmitting layer 1 is further provided thereon via a second dielectric layer 17.
5 is formed by lamination.

【0040】上記基板11は、先に図1に示した光記録
媒体の基板1と同様に、ガラスや樹脂等よりなる厚さが
0.3〜1.2(mm)の基板であり、一主面1a側に
情報再生用のピット列或いは情報の記録再生を行うため
の光学スポットを導く目的で設けられる案内溝といった
凹凸部(ここでは案内溝12のみを示す。)を有するも
のである。そして、この基板11においても、基板1と
同様に上記式(3)〜(6)の関係を満足して8(G
B)の記録容量を達成している。
The substrate 11 is a substrate made of glass, resin or the like and having a thickness of 0.3 to 1.2 (mm), similarly to the substrate 1 of the optical recording medium shown in FIG. The main surface 1a has an uneven portion such as a guide groove provided for guiding an information reproducing pit row or an optical spot for recording and reproducing information (only the guide groove 12 is shown here). The substrate 11 also satisfies the relations of the above equations (3) to (6) as in the case of the substrate 1 and has a value of 8 (G
The recording capacity of B) is achieved.

【0041】また、反射膜13も先に図1に示した光記
録媒体の反射膜3と同様で、基板11の案内溝12が形
成される一主面11a上に、Alを主成分とし、Siを
0.4〜0.8(重量%)、Feを0.7(重量%)以
下、Cuを0.15〜0.40(重量%)、Mnを0.
15(重量%)以下、Mgを0.8〜1.2(重量
%)、Crを0.04〜0.35(重量%)、Znを
0.25(重量%)以下、Tiを0.15(重量%)以
下の割合で含有する材料よりなる厚さ50〜200(n
m)の薄膜として形成されている。上記材料により基板
11上に反射膜13を形成する方法としては、イオンビ
ームスパッタ法、DCスパッタ法、RFスパッタ法とい
った手法が挙げられるが、イオンビームスパッタ法が好
ましく例示される。
Further, the reflection film 13 is also the same as the reflection film 3 of the optical recording medium shown in FIG. 1, and has Al as a main component on one principal surface 11a of the substrate 11 where the guide groove 12 is formed. 0.4 to 0.8 (% by weight) of Si, 0.7 (% by weight) or less of Fe, 0.15 to 0.40 (% by weight) of Cu, and 0.1% of Mn.
15 (% by weight) or less; 0.8 to 1.2 (% by weight) of Mg; 0.04 to 0.35 (% by weight) of Cr; 0.25 (% by weight) of Zn; A thickness of 50 to 200 (n) made of a material contained at a ratio of 15 (% by weight) or less
m) is formed as a thin film. Examples of a method for forming the reflective film 13 on the substrate 11 using the above materials include a method such as an ion beam sputtering method, a DC sputtering method, and an RF sputtering method, and the ion beam sputtering method is preferably exemplified.

【0042】さらに、上記相変化型記録膜14も先に図
1に示した光記録媒体の相変化型記録膜4と同様に、カ
ルコゲン化合物或いは単体のカルコゲンよりなる厚さ1
0〜30(nm)の薄膜として形成されている。
Further, similarly to the phase change type recording film 4 of the optical recording medium shown in FIG. 1, the phase change type recording film 14 is formed of a chalcogen compound or a single chalcogen.
It is formed as a thin film of 0 to 30 (nm).

【0043】さらにまた、上記光透過層15も先に図1
に示した光記録媒体の光透過層5と同様に、この種の光
記録媒体の光透過層と同様に形成すれば良い。なお、本
例の光記録媒体においても、上記光透過層15の厚さを
t、光透過層の厚さのばらつきをΔtとしたときに、上
記式(7)及び式(8)を満足するように光透過層15
が形成されている。
Further, the light transmitting layer 15 is also shown in FIG.
May be formed in the same manner as the light transmitting layer of this type of optical recording medium, similarly to the light transmitting layer 5 of the optical recording medium shown in FIG. Note that also in the optical recording medium of this example, when the thickness of the light transmitting layer 15 is t and the variation in the thickness of the light transmitting layer is Δt, the above expressions (7) and (8) are satisfied. Light transmitting layer 15
Are formed.

【0044】そして、本例の光記録媒体においては、反
射膜13と相変化型記録膜14の間に第1の誘電体層1
6を介在させているが、この第1の誘電体層16は、A
l,Si,Zn等の金属及び半金属元素の窒化物、酸化
物、硫化物及びこれらの混合物よりなる厚さ10〜30
(nm)の薄膜として形成されている。
In the optical recording medium of the present embodiment, the first dielectric layer 1 is disposed between the reflection film 13 and the phase change type recording film 14.
6, the first dielectric layer 16 is made of A
a thickness of 10 to 30 made of nitrides, oxides, sulfides, and mixtures thereof of metals and metalloids such as l, Si, Zn, etc.
(Nm) thin film.

【0045】また、本例の光記録媒体においては、相変
化型記録膜14と光透過層15の間に第2の誘電体層1
7を介在させているが、この第2の誘電体層17は、A
l,Si,Zn等の金属及び半金属元素の窒化物、酸化
物、硫化物及びこれらの混合物よりなる厚さ50〜20
0(nm)の薄膜として形成されている。
In the optical recording medium of this embodiment, the second dielectric layer 1 is located between the phase-change recording film 14 and the light transmitting layer 15.
7, the second dielectric layer 17 is made of A
a thickness of 50 to 20 made of nitrides, oxides, sulfides, and mixtures thereof of metals and metalloids such as l, Si, Zn, etc.
It is formed as a thin film of 0 (nm).

【0046】本例の光記録媒体においても、先に挙げた
光記録媒体と同様に、基板上11に、Alを主成分と
し、Siを0.4〜0.8(重量%)、Feを0.7
(重量%)以下、Cuを0.15〜0.40(重量
%)、Mnを0.15(重量%)以下、Mgを0.8〜
1.2(重量%)、Crを0.04〜0.35(重量
%)、Znを0.25(重量%)以下、Tiを0.15
(重量%)以下の割合で含有する材料よりなる反射膜1
3を形成しており、表面性の良好な反射膜13が形成さ
れる。そして、この上に第1の誘電体層16を介在させ
て相変化型記録膜14を積層形成しても、当該相変化型
記録膜14は反射膜13の結晶性や反射膜13の組成に
依存する粒径により形成される界面形状の影響を受け難
く、基板11の表面形状を正確に反映すると共に特性良
好に形成される。
In the optical recording medium of this embodiment, similarly to the above-mentioned optical recording medium, the substrate 11 has Al as a main component, Si of 0.4 to 0.8 (% by weight), and Fe of 0.7
(% By weight) or less, Cu is 0.15 to 0.40 (% by weight), Mn is 0.15 (% by weight) or less, and Mg is 0.8 to 0.8%.
1.2 (% by weight), Cr: 0.04 to 0.35 (% by weight), Zn: 0.25 (% by weight) or less, Ti: 0.15%
(Weight%) Reflective film 1 made of a material containing at the following ratio
3 and the reflection film 13 having good surface properties is formed. Then, even if the phase-change recording film 14 is formed on the first dielectric layer 16 with the first dielectric layer 16 interposed therebetween, the phase-change recording film 14 has the crystallinity of the reflection film 13 and the composition of the reflection film 13. It is hardly affected by the interface shape formed by the dependent particle size, and accurately reflects the surface shape of the substrate 11 and has good characteristics.

【0047】なお、上記本例の光記録媒体においても、
先に挙げた光記録媒体と同様に、基板11として反射膜
13が積層形成される一主面11aに案内溝12といっ
た凹凸部が形成されているものを使用しているが、反射
膜13を上記のような組成として表面性を良好としてい
ることから、相変化型記録膜14は、基板の案内溝12
といった凹凸部を有する表面形状を正確に反映して形成
される。
In the optical recording medium of the present embodiment,
As in the case of the optical recording medium described above, a substrate 11 in which an uneven portion such as a guide groove 12 is formed on one main surface 11a on which a reflective film 13 is laminated is used. Since the surface property is good as the above composition, the phase change type recording film 14 is formed in the guide groove 12 of the substrate.
It is formed by accurately reflecting the surface shape having the uneven portion.

【0048】従って、これまでに例示した光記録媒体に
おいては、相変化型記録膜4,14が基板1,11の表
面形状を正確に反映して形成され、且つ相変化型記録膜
4,14が特性良好に形成されることから、情報の記録
再生特性が良好となる。
Therefore, in the optical recording media exemplified so far, the phase change type recording films 4 and 14 are formed so as to accurately reflect the surface shape of the substrates 1 and 11, and the phase change type recording films 4 and 14 are formed. Are formed with good characteristics, so that information recording / reproducing characteristics are improved.

【0049】[0049]

【実施例】次に、本発明の効果を確認するべく、以下に
示すような実験を行った。
EXAMPLES Next, in order to confirm the effects of the present invention, the following experiments were conducted.

【0050】先ず、先に図2に示したような構成のディ
スク状の光記録媒体を製造した。すなわち、一主面にト
ラックピッチが1.0(μm)で幅が0.5(μm)の
案内溝が形成される厚さ1.2(mm)のポリカーボネ
ートよりなる基板の上記一主面上にAl合金よりなる反
射膜をイオンビームスパッタ(IBS)により形成し
た。なお、上記Al合金としては、Alを主成分とし、
Siを0.6(重量%)、Feを0.3(重量%)、C
uを0.3(重量%)、Mnを0.05(重量%)、M
gを1.0(重量%)、Crを0.2(重量%)、Zn
を0.05(重量%)、Tiを0.03(重量%)の割
合で含む合金を使用した。
First, a disk-shaped optical recording medium having the structure shown in FIG. 2 was manufactured. That is, a 1.2 (mm) -thick polycarbonate substrate on which a guide groove having a track pitch of 1.0 (μm) and a width of 0.5 (μm) is formed on one main surface. A reflective film made of an Al alloy was formed by ion beam sputtering (IBS). The Al alloy contains Al as a main component,
0.6% by weight of Si, 0.3% by weight of Fe, C
u is 0.3 (% by weight), Mn is 0.05 (% by weight), M
g: 1.0 (% by weight), Cr: 0.2 (% by weight), Zn
An alloy containing 0.05% by weight and 0.03% by weight of Ti was used.

【0051】次に、上記反射膜上に第1の誘電体層とし
てZnSとSiO2 の混合物よりなる厚さ10〜30
(nm)の薄膜を形成し、その上に相変化型記録膜とし
てGeSbTeよりなる厚さ10〜30(nm)の薄膜
を積層形成した。さらに、この上に第2の誘電体層とし
てZnSとSiO2 の混合物よりなる厚さ50〜200
(nm)の薄膜を形成し、紫外線硬化型樹脂よりなり厚
さ100(μm)の光透過層を積層形成し、案内溝の底
面に対応する部分に情報の記録(グルーブ記録)を行
い、実施サンプル1とした。
Next, a first dielectric layer having a thickness of 10 to 30 made of a mixture of ZnS and SiO 2 is formed on the reflective film.
(Nm), a thin film of GeSbTe having a thickness of 10 to 30 (nm) was formed thereon as a phase-change recording film. Further, a second dielectric layer having a thickness of 50 to 200 made of a mixture of ZnS and SiO 2 is formed thereon.
(Nm), a light-transmitting layer made of a UV-curable resin and having a thickness of 100 (μm) is laminated, and information recording (groove recording) is performed on a portion corresponding to the bottom surface of the guide groove. Sample 1 was used.

【0052】また、隣り合う案内溝間に対応する部分に
情報の記録(ランド記録)を行う以外は、実施サンプル
1と同様である光記録媒体を製造し、実施サンプル2と
した。
An optical recording medium was manufactured in the same manner as in Working Sample 1 except that information recording (land recording) was performed in a portion corresponding to a space between adjacent guide grooves, and Working Sample 2 was obtained.

【0053】さらに、比較のために、反射膜として従来
の光記録媒体のように、アルミニウムを主体としてチタ
ンを1.5(重量%)の割合で含むAl−Ti合金(以
下、Al−Ti(1.5wt%)と称する。)よりなる
薄膜をDCスパッタ法により形成する以外は、実施サン
プル1と同様である光記録媒体を製造し、比較サンプル
1とした。
Further, for comparison, an Al-Ti alloy (hereinafter, Al-Ti (hereinafter referred to as Al-Ti ( An optical recording medium was manufactured in the same manner as in Working Sample 1 except that a thin film of (1.5 wt%) was formed by a DC sputtering method.

【0054】さらにまた、隣り合う案内溝間に対応する
部分に情報の記録(ランド記録)を行う以外は、比較サ
ンプル1と同様である光記録媒体を製造し、比較サンプ
ル2とした。
Furthermore, an optical recording medium similar to Comparative Sample 1 was manufactured except that information recording (land recording) was performed in a portion corresponding to a space between adjacent guide grooves, and Comparative Sample 2 was obtained.

【0055】そして、先ず、実施サンプル1及び比較サ
ンプル1の反射膜の表面粗さを走査型トンネル顕微鏡で
測定した。結果を図3に示す。図3中横軸は基板の中心
からの距離を示し、縦軸は反射膜表面の基板表面からの
高さを示し、実線は実施サンプル1の結果、破線は比較
サンプル1の結果を示す。図3の結果を見てわかるよう
に、従来の光記録媒体と同様にして反射膜が形成されて
いる比較サンプル1においては、反射膜の表面粗さが±
7(nm)以上とされているのに対し、本発明を適用し
た実施サンプル1においては、反射膜の表面粗さが±3
(nm)の範囲内とされており、本発明を適用すること
で、表面性の良好な反射膜が形成されることが確認され
た。
First, the surface roughness of the reflective films of the working sample 1 and the comparative sample 1 was measured by a scanning tunneling microscope. The results are shown in FIG. In FIG. 3, the horizontal axis indicates the distance from the center of the substrate, the vertical axis indicates the height of the reflective film surface from the substrate surface, the solid line indicates the result of the working sample 1, and the broken line indicates the result of the comparative sample 1. As can be seen from the results in FIG. 3, in Comparative Sample 1 in which the reflective film was formed in the same manner as in the conventional optical recording medium, the surface roughness of the reflective film was ± 10%.
In contrast, the surface roughness of the reflective film is ± 3 in the working sample 1 to which the present invention is applied.
(Nm), and it was confirmed that a reflective film having good surface properties was formed by applying the present invention.

【0056】また、実施サンプル1,2及び比較サンプ
ル1,2に対して繰り返し情報の書き換えを行い、書き
換え回数に対するジッターの変化を調査した。結果を図
4に示す。図4中横軸は書き換え回数を示し、縦軸はジ
ッターを示す。また、●は実施サンプル1の結果を示
し、○は実施サンプル2の結果を示し、×は比較サンプ
ル1の結果を示し、△は比較サンプル2の結果を示す。
図4の結果を見てわかるように、従来の光記録媒体と同
様にして反射膜が形成されている比較サンプル1,2に
おいて書き換え回数が1000回を越えるとジッターが
15(%)を越えてしまうのに対し、本発明を適用した
実施サンプル1,2においては書き換え回数が1000
0回あたりではジッターが15(%)以下に抑えられて
おり、書き換え耐久性に優れていることが確認された。
またこのことから、本発明を適用した実施サンプル1,
2においては書き換え可能回数として10000回以上
を保証することが可能である。
Further, information was repeatedly rewritten for the working samples 1 and 2 and the comparative samples 1 and 2, and a change in jitter with respect to the number of times of rewriting was examined. FIG. 4 shows the results. In FIG. 4, the horizontal axis indicates the number of rewrites, and the vertical axis indicates jitter. In addition, ● shows the result of Working Sample 1, ○ shows the result of Working Sample 2, X shows the result of Comparative Sample 1, and Δ shows the result of Comparative Sample 2.
As can be seen from the results in FIG. 4, in Comparative Samples 1 and 2 in which a reflective film is formed in the same manner as in the conventional optical recording medium, if the number of rewrites exceeds 1,000, the jitter exceeds 15 (%). On the other hand, in the working samples 1 and 2 to which the present invention is applied, the number of rewrites is 1000
At about 0 times, the jitter was suppressed to 15% or less, and it was confirmed that the rewriting durability was excellent.
Further, from this, the working sample 1 to which the present invention was applied,
In No. 2, it is possible to guarantee 10,000 or more rewritable times.

【0057】さらにまた、上記実施サンプル1と比較サ
ンプル1において500(kHz)におけるディスクノ
イズを測定したところ、実施サンプル1のディスクノイ
ズの方が比較サンプル1のディスクノイズよりも4.5
(dB)低かった。
Further, when the disk noise at 500 (kHz) was measured for the above-mentioned sample 1 and comparative sample 1, the disk noise of sample 1 was 4.5 than that of comparative sample 1.
(DB) It was low.

【0058】これらことから、本発明を適用した光記録
媒体においては、相変化型記録膜が基板の表面形状を正
確に反映して形成され、且つ相変化型記録膜が特性良好
に形成され、情報の記録再生特性が良好となることが確
認された。
From the above, in the optical recording medium to which the present invention is applied, the phase change type recording film is formed accurately reflecting the surface shape of the substrate, and the phase change type recording film is formed with good characteristics. It was confirmed that the information recording / reproducing characteristics were good.

【0059】[0059]

【発明の効果】上述のように、本発明に係る光記録媒体
においては、基板上に、Alを主成分とし、Siを0.
4〜0.8(重量%)、Feを0.7(重量%)以下、
Cuを0.15〜0.40(重量%)、Mnを0.15
(重量%)以下、Mgを0.8〜1.2(重量%)、C
rを0.04〜0.35(重量%)、Znを0.25
(重量%)以下、Tiを0.15(重量%)以下の割合
で含有する材料よりなる反射膜を形成しており、表面性
の良好な反射膜が形成される。従って、この上に少なく
とも相変化型記録膜を積層形成した場合に、相変化型記
録膜は反射膜の結晶性や反射膜の組成に依存する粒径に
より形成される界面形状の影響を受け難く、基板の表面
形状を正確に反映すると共に特性良好に形成される。
As described above, in the optical recording medium according to the present invention, Al is used as the main component, and Si is added to the optical recording medium.
4 to 0.8 (% by weight), Fe is 0.7 (% by weight) or less,
0.15 to 0.40 (% by weight) of Cu and 0.15 of Mn
(% By weight): 0.8 to 1.2 (% by weight) of Mg;
r is 0.04 to 0.35 (% by weight), Zn is 0.25
(% By weight) or less, a reflective film made of a material containing Ti in a ratio of 0.15 (% by weight) or less is formed, and a reflective film having good surface properties is formed. Therefore, when at least a phase change type recording film is formed thereon, the phase change type recording film is hardly affected by the interface shape formed by the crystallinity of the reflection film and the particle size depending on the composition of the reflection film. , Which accurately reflects the surface shape of the substrate and has good characteristics.

【0060】また、反射膜上に、誘電体膜を介して相変
化型記録膜を形成した場合においても同様であり、上記
相変化型記録膜は、基板の表面形状を正確に反映すると
共に特性良好に形成される。
The same applies to the case where a phase change type recording film is formed on a reflection film via a dielectric film. The phase change type recording film accurately reflects the surface shape of the substrate and has a characteristic. Well formed.

【0061】なお、上記本発明の光記録媒体において、
基板として反射膜形成面側に凹凸部が形成されたものを
使用した場合においても、反射膜を上記のような組成と
して表面性を良好としていることから、相変化型記録膜
は反射膜の結晶性や反射膜の組成に依存する粒径により
形成される界面形状の影響を受け難く、基板の凹凸部を
有する表面形状を正確に反映して形成される。
In the optical recording medium of the present invention,
Even when a substrate having an uneven portion formed on the reflective film forming surface side is used as the substrate, since the reflective film has the above composition and good surface properties, the phase change type recording film is a crystal of the reflective film. It is hardly affected by the interface shape formed by the particle size depending on the properties and the composition of the reflective film, and is formed by accurately reflecting the surface shape of the substrate having the unevenness.

【0062】すなわち、本発明は、情報の記録再生特性
が良好な光記録媒体を提供することができるものであ
る。
That is, the present invention can provide an optical recording medium having good information recording / reproducing characteristics.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る光記録媒体の一例の構成を示す要
部概略断面図である。
FIG. 1 is a schematic cross-sectional view of a main part showing a configuration of an example of an optical recording medium according to the present invention.

【図2】本発明に係る光記録媒体の他の例の構成を示す
要部概略断面図である。
FIG. 2 is a schematic cross-sectional view of a main part showing a configuration of another example of the optical recording medium according to the present invention.

【図3】基板の中心からの距離と反射膜表面の基板表面
からの高さの関係を示す特性図である。
FIG. 3 is a characteristic diagram showing a relationship between a distance from a center of a substrate and a height of a reflection film surface from a substrate surface.

【図4】書き換え回数とジッターの関係を示す特性図で
ある。
FIG. 4 is a characteristic diagram showing the relationship between the number of times of rewriting and jitter.

【符号の説明】[Explanation of symbols]

1,11 基板、1a,11a 一主面、2,12 案
内溝、3,13 反射膜、4,14 相変化型記録膜、
5,15 光透過層、16 第1の誘電体層、17 第
2の誘電体層
1,11 substrate, 1a, 11a one main surface, 2,12 guide groove, 3,13 reflection film, 4,14 phase change type recording film,
5, 15 light transmitting layer, 16 first dielectric layer, 17 second dielectric layer

───────────────────────────────────────────────────── フロントページの続き (72)発明者 黒川 光太郎 東京都品川区北品川6丁目7番35号 ソニ ー株式会社内 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Kotaro Kurokawa 6-7-35 Kita Shinagawa, Shinagawa-ku, Tokyo Inside Sony Corporation

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 厚さ0.3〜1.2(mm)の基板上に
反射膜が形成され、上記反射膜上に少なくとも相変化型
記録膜が形成され、その上に厚さ10〜177(μm)
の光透過層が形成されてなる光記録媒体において、 上記反射膜が、Alを主成分とし、Siを0.4〜0.
8(重量%)、Feを0.7(重量%)以下、Cuを
0.15〜0.40(重量%)、Mnを0.15(重量
%)以下、Mgを0.8〜1.2(重量%)、Crを
0.04〜0.35(重量%)、Znを0.25(重量
%)以下、Tiを0.15(重量%)以下の割合で含有
する材料よりなることを特徴とする光記録媒体。
1. A reflection film is formed on a substrate having a thickness of 0.3 to 1.2 (mm), at least a phase change recording film is formed on the reflection film, and a thickness of 10 to 177 is formed thereon. (Μm)
In the optical recording medium in which the light transmitting layer is formed, the reflective film has Al as a main component and Si has a thickness of 0.4 to 0.2.
8 (wt%), Fe is 0.7 (wt%) or less, Cu is 0.15 to 0.40 (wt%), Mn is 0.15 (wt%) or less, and Mg is 0.8 to 1. 2 (% by weight), a material containing 0.04 to 0.35 (% by weight) of Cr, 0.25 (% by weight) or less of Zn, and 0.15 (% by weight) or less of Ti An optical recording medium characterized by the above-mentioned.
【請求項2】 上記反射膜上に、誘電体膜を介して相変
化型記録膜が形成され、その上に誘電体膜を介して光透
過層が形成されていることを特徴とする請求項1記載の
光記録媒体。
2. The method according to claim 1, wherein a phase change type recording film is formed on the reflection film via a dielectric film, and a light transmission layer is formed on the phase change type recording film via the dielectric film. 2. The optical recording medium according to 1.
【請求項3】 上記基板の反射膜形成面側に凹凸部が形
成されていることを特徴とする請求項1記載の光記録媒
体。
3. The optical recording medium according to claim 1, wherein an uneven portion is formed on the reflection film forming surface side of the substrate.
JP9276027A 1997-10-08 1997-10-08 Optical recording medium Abandoned JPH11120613A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9276027A JPH11120613A (en) 1997-10-08 1997-10-08 Optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9276027A JPH11120613A (en) 1997-10-08 1997-10-08 Optical recording medium

Publications (1)

Publication Number Publication Date
JPH11120613A true JPH11120613A (en) 1999-04-30

Family

ID=17563783

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9276027A Abandoned JPH11120613A (en) 1997-10-08 1997-10-08 Optical recording medium

Country Status (1)

Country Link
JP (1) JPH11120613A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1154420A2 (en) * 2000-05-11 2001-11-14 Victor Company Of Japan, Limited Information recording medium
US6495308B2 (en) 2000-03-30 2002-12-17 Tdk Corporation Optical recording method and optical recording medium
US6600717B2 (en) 2000-09-14 2003-07-29 Tdk Corporation Optical information medium
US6677104B2 (en) 2000-02-10 2004-01-13 Tdk Corporation Optical information medium
US6680899B2 (en) 2000-06-28 2004-01-20 Tdk Corporation Optical information medium
US6731590B1 (en) * 1999-11-19 2004-05-04 Tdk Corporation Optical recording medium containing a substrate, an intermediate layer having therein an amorphous material, the intermediate layer having a reflective layer thereon
US6875488B2 (en) 2002-04-09 2005-04-05 Nec Corporation Optical information recording medium
US20090246553A1 (en) * 2008-03-26 2009-10-01 National Applied Research Laboratories Reflective film and method for manufacturing the same

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6731590B1 (en) * 1999-11-19 2004-05-04 Tdk Corporation Optical recording medium containing a substrate, an intermediate layer having therein an amorphous material, the intermediate layer having a reflective layer thereon
US6677104B2 (en) 2000-02-10 2004-01-13 Tdk Corporation Optical information medium
US6495308B2 (en) 2000-03-30 2002-12-17 Tdk Corporation Optical recording method and optical recording medium
EP1154420A2 (en) * 2000-05-11 2001-11-14 Victor Company Of Japan, Limited Information recording medium
EP1154420A3 (en) * 2000-05-11 2006-04-19 Victor Company Of Japan, Limited Information recording medium
US6680899B2 (en) 2000-06-28 2004-01-20 Tdk Corporation Optical information medium
US6600717B2 (en) 2000-09-14 2003-07-29 Tdk Corporation Optical information medium
US6875488B2 (en) 2002-04-09 2005-04-05 Nec Corporation Optical information recording medium
US20090246553A1 (en) * 2008-03-26 2009-10-01 National Applied Research Laboratories Reflective film and method for manufacturing the same

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