JPH11118528A - Measurement data display - Google Patents

Abstract

PROBLEM TO BE SOLVED: To accurately monitor an operating state of a board treating unit by an operator by easily grasping an outline of measurement data by a graphic display and accurately grasping its content by displaying desired data numeric value. SOLUTION: In the measurement data display, a memory means 12 stores measurement data with a measuring time as a key, and a display control means 15 graphically displays the data stored in the memory 12 at a time base as a reference on a display screen 14. And, when a position in a graph is designated from an input means 16, a retrieving means 13 retrieves data numeric value of the corresponding time from the designated position, and a display control means 15 displays and outputs the numeric value of the retrieved data on the screen 14. Accordingly, an operator can grasp accurate data numeric value at that time point merely by designating a position where change in the graph is, for example, large.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measurement data display device applied to a substrate processing apparatus such as an LCD manufacturing apparatus or a semiconductor manufacturing apparatus (including a semiconductor device manufacturing apparatus). And a measurement data display device for displaying a graph and a numerical display associated with the graph.

[0002]

2. Description of the Related Art For example, in an automation line of a semiconductor manufacturing plant, a process execution state of a semiconductor manufacturing apparatus is conventionally measured by a sensor or the like, and obtained measurement data (temperature, pressure, gas flow rate, etc.) is transmitted to an operator. Output on a display screen. For equipment that requires a particularly clean environment, such as semiconductor manufacturing equipment, measurement data can be confirmed at a remote location, and the operator can operate the equipment without entering the installation area of the semiconductor manufacturing equipment. Can be monitored.

Conventionally, such measurement data is displayed by simply displaying and outputting the measurement data as a graph, or displaying the numerical values of the measurement data as a list. Therefore, the operator reads the numerical value from the scale axis of the graph or reads the numerical value from the list in order to know the desired data numerical value.

[0004]

However, when reading numerical values from the scale axis of the graph, there is a problem that accurate data numerical values cannot be obtained and the operating state of the apparatus cannot be monitored in detail. there were. On the other hand, when reading numerical values from the list, it is possible to obtain accurate data numerical values, but on the other hand, there is a problem that it is difficult to grasp the position of the data numerical values in relation to other data. Was. For example, in a graph display, it is easy to grasp how data at a certain point has changed with respect to data before and after the point in time, but such a grasp is difficult from a list.

The present invention has been made in view of the above-mentioned conventional circumstances, and has as its object to display measured data from a substrate processing apparatus in a manner that is easy for an operator to grasp. More specifically, an object of the present invention is to provide a measurement data display device that displays measurement data from a substrate processing apparatus on a same display screen as a graph and a numerical value associated with the graph.

[0006]

In order to achieve the above object, in a measurement data display device according to the present invention, a display control means displays and outputs data measured from a substrate processing apparatus as a graph on a display screen, and an input means. When the operator specifies a numerical value to be confirmed by specifying a desired position in the graph from the above, the display control means displays and outputs the numerical value of the measurement data corresponding to the specified position on the display screen. Therefore, the operator can easily grasp the outline of the measurement data by the graph display, can grasp the desired data value accurately, and can accurately monitor the operation state of the substrate processing apparatus. it can.

In the measurement data display device according to the present invention, the storage means stores the measurement data using the measurement time as a key, and the display control means stores the measurement data stored in the storage means on the basis of the time axis. Display a graph on the display screen. When a position in the graph is designated by the input means, the retrieval means retrieves the data value of the corresponding measurement time from the designated position from the storage means, and the display control means displays the retrieved numerical value of the measurement data on the display. Output to the screen. Therefore, the operator can grasp an accurate data value at that time, for example, only by pointing to a position in the graph where the change is large, and can accurately monitor the operation state of the substrate processing apparatus.

Further, in the measurement data display device according to the present invention, data measured from a plurality of substrate processing apparatuses is displayed and output on the same display screen. For this purpose, the storage means stores the measurement data for each substrate processing apparatus using the measurement time as a key, and the display control means stores the measurement data of the plurality of substrate processing apparatuses stored in the storage means on the same time axis. A graph is displayed on the display screen as a reference. And
When a position in the graph is designated from the input means, the search means retrieves the data value of the corresponding measurement time from the designated position from the storage means, and the display control means associates the retrieved measured data value with each graph. And display it on the display screen. Therefore, the operator can, for example, only specify a certain point in the graph to obtain an accurate data value of each substrate processing apparatus at that point in time, and compare the operating states of a plurality of substrate processing apparatuses to obtain accurate data values. Can be monitored.

Further, in the measurement data display device according to the present invention, data measured from a plurality of locations of the substrate processing apparatus is displayed and output on the same display screen. For this purpose, the storage means stores the measurement data of each measurement location using the measurement time as a key, and the display control means stores the measurement data of the plurality of locations stored in the storage means on the display screen with reference to the same time axis. To graph. When a position in the graph is designated by the input means, the retrieval means retrieves the data value of the corresponding measurement time from the designated position from the storage means, and the display control means retrieves the retrieved measured data value in each graph. And output it on the display screen in association with. Therefore, the operator can, for example, only specify a certain point in the graph to obtain accurate data values at each measurement point at the point in time. Can be monitored.

In the measurement data display device according to the present invention, in order to display the data measured from the substrate processing apparatus, an area for displaying the measurement data in a graph format and a predetermined value in the graph are represented by numerical values. The display area is formed on the same display screen. Therefore, on the same screen, the operator can easily grasp the outline of the measurement data by the graph display, can grasp the desired data numerical value accurately, and change the operation state of the substrate processing apparatus. It can be monitored accurately.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A measurement data display device according to one embodiment of the present invention will be described with reference to the drawings. The present embodiment is an example in which a plurality of semiconductor manufacturing apparatuses are connected to a host computer, and the semiconductor manufacturing apparatus is applied to a group management system that integrally controls the semiconductor manufacturing apparatuses by communication from the host computer. The apparatus is attached to a host computer in order to display measurement data from these semiconductor manufacturing apparatuses on the same display screen.

That is, as shown in FIG.
A group management system 4 mainly composed of a host computer is connected to one of the semiconductor manufacturing apparatuses 1, 2, and 3 via a communication line 5, and the semiconductor manufacturing apparatuses are controlled under the overall control of the group management system 4. 1, 2, and 3 execute predetermined process processing operations. Sensors are provided at required positions of the respective semiconductor manufacturing apparatuses 1, 2, and 3 so that process data measured by these sensors is transmitted to the group management system 4 via the communication line 5. It has become.

FIG. 2 shows a main configuration of the measurement data display device according to the present embodiment. The measurement data display device is configured as a part of the group management system 4 using the function means of the host computer. ing. This measurement data display device is connected to the communication line
Measurement data storage means 10 for storing the measurement data transmitted via the PC, data conversion means 11 for converting the measurement data stored in the measurement data storage means 10 into display data in a predetermined format, A display data storage unit for storing display data converted by the unit; a search unit for searching data stored in the display data storage unit; and a display unit comprising a CRT or a liquid crystal panel. A display control means 15 for displaying and outputting data stored in the display data storage means 12 on a display screen of the display means 14; and an input means 16 such as a mouse for receiving an input instruction from an operator.
And

The measurement data storage means 10 is composed of a readable and writable memory device such as a hard disk device. In this embodiment, an external storage device such as a hard disk device having a relatively large capacity so as to be able to accumulate measurement data over a long period of time. It is composed of a memory. The transmitted measurement data is stored in the measurement data storage means 10 as a file for each semiconductor manufacturing apparatus with the measurement time attached thereto. Note that such filing and management of the measurement time are realized by a data management function provided in the host computer. In this example, each semiconductor manufacturing apparatus is identified in correspondence with the sensor for measuring data, and the sensor is identified. Although the time when the data is received from is set as the measurement time of the data, other management methods may of course be adopted in the present invention.

The data conversion means 11 and the search means 1
In this example, the display control means 3 and the display control means 15 are configured by executing a predetermined control program by hardware resources of the host computer. However, in the present invention, these functional means may be configured as dedicated devices. Good. Further, the display data storage means 12 is constituted by a memory device which is readable and writable, and in this example, is constituted by an internal memory such as a RAM so that the search processing is particularly quickly executed.

Here, the input means 16 not only indicates the position in the graph as will be described later, but also the period of the measurement data which the operator wants to display and output on the display screen.
An instruction for specifying display target data such as a type of measurement data, a semiconductor manufacturing apparatus, and the like is also input, and based on such an instruction, the data conversion unit 11 reads the specified measurement data from the measurement data storage unit 10. The format is converted and stored in the display data storage unit 12. The display data stored in the display data storage means 12 has a structure as shown in FIG. 3 in this example, and collects each measurement data as a record using the measurement time as a key.
Each record includes measured gas data (gas flow rate), pressure data (process chamber pressure), temperature data (process temperature), and the like. In this example, display data as described above is stored in the display data storage unit 12 for a plurality of semiconductor manufacturing apparatuses and periods specified as display targets.

According to the measurement data display device having the above configuration,
The data measured from each of the semiconductor manufacturing apparatuses 1, 2, 3 is displayed and output on the display screen of the display means 14 as follows. In a state where the measurement data to be displayed is converted and stored in the display data storage unit 12 as described above, the display control unit 15 reads out the display data and creates a graph, and generates the graph in a predetermined graph format. The output is displayed on the display screen of the display means 14. It should be noted that such a display in a graph format can employ various known methods.

In this example, as shown in FIG. 4A, data (temperature data in this example) measured from the semiconductor manufacturing apparatuses 1, 2, and 3 is measured by using the measurement time as a reference axis (horizontal axis). A (thick solid line), B (thin solid line), C
It is output to the graph display area 20 on the display screen as a (dotted line) graph. The display control means 15
Displays a "mark function" button 21 for switching the display to FIG. 4B on the display screen. As a result, the operator looks at the graph,
An overview of how each of the semiconductor manufacturing apparatuses 1, 2, and 3 is operating can be easily grasped over time.

When a graph is displayed as shown in FIG. 4A, the display control means 15 and the search means 13 are in a state of waiting for display switching processing. Then, when the operator operates the mouse 16 and clicks the "mark function" button 21, the display switching process shown in FIG. 5 is started, and the display control unit 15 waits for coordinate input (step S1).

When the operator operates the mouse 16 and clicks on an arbitrary position in the graph display area 20 (step S2), the display control means 15 calculates a coordinate position on the display screen from the clicked position.
The time position designated by the operator is specified from the coordinates corresponding to the time axis of the graph (that is, the coordinate points on the horizontal axis) (step S3). In this example, as shown in FIG. 4B, the display control means 15 displays a line on the display screen from the position clicked by the operator vertically to the graph time axis, and displays the time position designated by the operator. To make it easier to check.

As described above, the time data obtained by the display control means 15 is passed to the search means 13, and the search means 13 searches the display data storage means 12 using the time data as a key (step S4). . That is, FIG.
As shown in (1), the retrieval unit 13 retrieves the data record stored in the display data storage unit 12, and obtains the numerical value of the data (in this example, temperature in this example) from the data record corresponding to the time key. (The numerical value of the data), and transfers the numerical data to the display control means 15. In this example, since the points at which the lines intersect are indicated for the three graphs A, B, and C, the search means 13 searches the corresponding numerical data for each of the graphs A, B, and C, respectively. I do.

The display control means 15 displays the numerical data display area 22 on the same display screen as the graph display area 20, and within this area 22, the search means 1
Each numerical data received from 3 is displayed and output in association with each of the graphs A, B, and C (step S5). That is,
As shown in FIG. 4B, the numerical data display area 22 includes types A (thick solid line), B (thin solid line), and C of each graph.
The numerical value at the measurement time instructed by the operator is displayed and output in association with (dotted line). As a result, the operator looks at the display screen,
An outline of what state each of the semiconductor manufacturing apparatuses 1, 2, and 3 is operating can be easily grasped from a graph.
It is possible to accurately grasp the detailed contents of the state of operation 2 and 3 from the numerical data.

In the above description, an example in which the present invention is applied to a semiconductor manufacturing apparatus is shown. However, the present invention can of course be applied to other substrate processing apparatuses. In the above description, the group management system that displays measurement data from a plurality of semiconductor manufacturing apparatuses has been described. However, the present invention uses the same display screen to display data obtained from a plurality of measurement points of one substrate processing apparatus. The present invention can also be applied to a case where a graph and a numerical value are displayed. In this case, for example, a measuring means such as a sensor may be provided at each measurement point of the substrate processing apparatus, and these measurement data may be displayed as a graph as shown in FIG.

In the above description, a case where a plurality of measurement data are simultaneously displayed is shown. However, the present invention can be applied to a case where one measurement data is displayed as a graph and a numerical value on the same display screen. Even in this case, even in this case, the object of the present invention that the outline can be easily grasped and the contents can be accurately grasped can be sufficiently achieved. Also,
As shown in the above description, when the measurement data is stored and graph-displayed with the time axis as a key, it is easy to grasp the outline of the operation state of the apparatus according to the time transition, which is convenient for the maintenance management of the apparatus. In the present invention, there is no particular limitation on keys used for storage and graph display, for example, such as displaying a graph in the relationship between gas data and pressure data.

In the above description, the storage means for storing the measurement data and the display data is constituted by separate memory devices. However, in the present invention, these storage means are divided into the same memory device. And so on. In the above description, an example in which a mouse is used as the input means has been described. However, other known input means such as a keyboard, a touch panel provided on a display screen, or the like may be used.

[0026]

As described above, according to the measurement data display device of the present invention, the data measured from the substrate processing apparatus is output as a graph on a display screen, and the corresponding measurement data is displayed based on an instruction to the operator. Since the numerical values are displayed and output on the display screen, the operator can easily grasp the outline of the measurement data by the graph display, and can accurately grasp the desired data numerical value. The operating state can be monitored accurately. Also, even if multiple displayed graphs overlap,
By displaying the numerical data, each data can be identified and grasped, and an error in data reading can be avoided.

[Brief description of the drawings]

FIG. 1 is a configuration diagram illustrating a group management system for a semiconductor manufacturing apparatus according to an embodiment of the present invention.

FIG. 2 is a configuration diagram of a measurement data display device according to an embodiment of the present invention.

FIG. 3 is a diagram illustrating an example of display data.

FIG. 4 is a diagram showing a display example of a display screen;
(A) shows a state in which graph display is performed, and (b) shows a state in which graph display and numerical value display are performed.

FIG. 5 is a flowchart illustrating an example of a display switching process.

[Explanation of symbols]

1, 2, 3 ... semiconductor manufacturing equipment, 4 ... group management system, 5 ... communication line, 10 ... measurement data storage means, 11 ... data conversion means, 12 ... for display Data storage means, 13 ... search means, 14 ...
Display means 15 Display control means 16 Input means 20 Graphic display area 22 Numerical data display area

Continued on the front page (51) Int.Cl. ⁶ Identification code FI H01L 21/68 H01L 21/68 A

Claims (5)

[Claims] 1. A measurement data display device for displaying and outputting data measured from a substrate processing apparatus on a display screen, an input means for receiving an instruction input from an operator on the display screen, and displaying the measurement data in a graph on the display screen. And a display control means for displaying the numerical value of the measurement data corresponding to the designated position in the graph received from the input means on the display screen, and a display control means. 2. The measurement data display device according to claim 1, further comprising storage means for storing the measurement data using a measurement time as a key, wherein the display control means stores the measurement data stored in the storage means in time. A graph display on the display screen based on the axis; and a search unit for searching the storage unit for a data value of a corresponding measurement time from a designated position in the graph received from the input unit, the display unit comprising: The measurement data display device, wherein the control means displays and outputs the retrieved numerical value of the measurement data on the display screen. 3. The measurement data display device according to claim 2, wherein the measurement data display device displays and outputs data measured from a plurality of substrate processing apparatuses on a same display screen. The measurement data for each processing apparatus is stored using a measurement time as a key, and the display control means displays the measurement data of the plurality of substrate processing apparatuses stored in the storage means on the display screen based on the same time axis. Further, for the measurement data displayed in the graph, the search unit searches the storage unit for a data value of a corresponding measurement time from a designated position in the graph received from the input unit, and the display control The means is characterized in that the retrieved measured data numerical values are displayed on the display screen in association with the respective graphs. Constant data display device. 4. The measurement data display device according to claim 2, wherein the measurement data display device displays and outputs data measured from a plurality of locations of the substrate processing apparatus on a same display screen. The means stores measurement data for each measurement location using a measurement time as a key, and the display control means plots the measurement data stored at the storage means at a plurality of locations on the display screen on the basis of the same time axis. Displaying, further, for the measurement data displayed in the graph, the storage unit retrieves a data value of a corresponding measurement time from a designated position in the graph received from the input unit, and displaying the data. The control means displays and outputs the retrieved measured data numerical values on the display screen in association with the respective graphs. Measurement data display device. 5. A measurement data display device for displaying and outputting data measured from a substrate processing apparatus on a display screen, wherein an area for displaying measurement data in a graph format and a predetermined value in the graph are displayed numerically. The measurement data display device is characterized in that the area to be measured is formed on the same display screen.