JPH11118470A - Information of shaft position detecting device - Google Patents

Information of shaft position detecting device

Info

Publication number
JPH11118470A
JPH11118470A JP29636597A JP29636597A JPH11118470A JP H11118470 A JPH11118470 A JP H11118470A JP 29636597 A JP29636597 A JP 29636597A JP 29636597 A JP29636597 A JP 29636597A JP H11118470 A JPH11118470 A JP H11118470A
Authority
JP
Japan
Prior art keywords
angle
rotating shaft
time
displacement
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29636597A
Other languages
Japanese (ja)
Inventor
Kazuya Nakamura
一也 中村
Nobutaka Sato
伸孝 佐藤
Shigeru Ogura
茂 小倉
Kakuo Yoshinari
赫夫 吉成
Tetsuo Sekiya
哲夫 関谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Namiki Precision Jewel Co Ltd
Original Assignee
Namiki Precision Jewel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Namiki Precision Jewel Co Ltd filed Critical Namiki Precision Jewel Co Ltd
Priority to JP29636597A priority Critical patent/JPH11118470A/en
Publication of JPH11118470A publication Critical patent/JPH11118470A/en
Pending legal-status Critical Current

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  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Optical Transform (AREA)

Abstract

PROBLEM TO BE SOLVED: To improve the measurement precision of the rotating angle, angle speed and angle acceleration of a micro motor of milli-machine or less by providing the intrinsic circumferential direction signal of a rotating shaft on the basis of the signal information continuously outputted in real time from a non-contact displacement sensor, and recognizing the rotating angle, angle speed and angle acceleration. SOLUTION: A non-contact displacement sensor continuously detect the circumferential direction displacement of a rotating shaft which is rotated, or the surface form or minute roughness in real time, and provides a waveform signal in which the displacement is fluctuated to time. The positions (a)-(k) on the circumference of the rotating shaft corresponding to waveform signals (a)-(k). Since the angle aox is univocally determined in relation to the position on the optional circumference of the rotating shaft, the rotating angle of the rotating shaft in an optional time can be continuously recognized from the phase and displacement to the origin of the displacement waveform signal. Further, the time-rotating angle relational expression can be calculated on the basis of this waveform signal, this relational expression can be differentially calculated to calculate the time-angle speed relational expression, and the time-angle acceleration relational expression can be further calculated by the differential calculation thereof.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明はミリマシーン以下の
小型モータの回転角、(角)速度及び(角)加速度検出手段
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotation angle, (angular) speed and (angular) acceleration detecting means of a small motor of millimeter machine or less.

【0002】[0002]

【従来の技術】従来より、モータのステータに内蔵さ
れ、ホール効果を利用したホール素子や、回転軸に接続
された突極を有した回転体と固定子とのインピーダンス
の変化を利用したレゾルバーがモータの回転角検出器と
して用いられている。
2. Description of the Related Art Conventionally, a hall element utilizing a Hall effect and a resolver utilizing a change in impedance between a stator and a rotating body having salient poles connected to a rotating shaft are incorporated in a stator of a motor. It is used as a motor rotation angle detector.

【0003】また、回転軸に直結され、回転速度に比例
した電圧を発生するタコメーターや、モータの電機子巻
線に生ずる誘起電圧を利用したものが速度検出器として
用いられている。
[0003] A tachometer which is directly connected to a rotating shaft and generates a voltage proportional to the rotation speed, or a device utilizing an induced voltage generated in an armature winding of a motor is used as a speed detector.

【0004】また、回転軸に取り付けられ、周方向に所
定の間隔で配列したスリットが形成された回転円盤が回
転すると、前記スリット部により、発光素子及び受光素
子からなるセンサ部の光通路が断続的に遮断され、セン
サ部から回転角、速度を示す矩形波信号が出力される光
学式ロータリーエンコーダが回転角及び速度検出器とし
て用いられている。
[0004] When a rotating disk, which is attached to a rotating shaft and has slits arranged at predetermined intervals in the circumferential direction, rotates, the slits interrupt the light path of a sensor section comprising a light emitting element and a light receiving element. An optical rotary encoder which is cut off from the sensor and outputs a rectangular wave signal indicating a rotation angle and a speed from a sensor unit is used as a rotation angle and a speed detector.

【0005】以上のように、従来の回転角・速度検出器
は、モータ内部あるいは回転軸に取り付けて使用される
のが一般的である。
As described above, the conventional rotation angle / speed detector is generally used inside a motor or mounted on a rotation shaft.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、例えば
ミリマシーン以下の小型モータ単体の時間に対する回転
角、速度を計測する場合、従来のように、検出器が被測
定モータの回転軸に直結されると、モータのロータの慣
性モーメントに対し、検出器の回転子の慣性モーメント
が大きい、あるいは無視できないレベルであるため、測
定値における検出器の影響が大きく、正確に被測定モー
タ単体の特性が測定できないという欠点を有していた。
However, for example, when measuring the rotation angle and the speed of a small motor of a millimeter machine or less with respect to time, if the detector is directly connected to the rotation shaft of the motor to be measured, as in the prior art. Since the moment of inertia of the rotor of the detector is large or not negligible compared to the moment of inertia of the rotor of the motor, the effect of the detector on the measured value is large and the characteristics of the motor to be measured cannot be measured accurately. Had the disadvantage that

【0007】また、検出器を被測定モータの回転軸に接
続するということは、負荷を接続していることにもな
り、測定時、不必要な負荷をかけた状態で被測定モータ
が運転されるという欠点を有していた。
Connecting the detector to the rotating shaft of the motor to be measured also means that a load is connected, and the motor to be measured is operated with an unnecessary load applied during measurement. Disadvantage.

【0008】以上のような検出器の影響は、被測定モー
タが小型になればなるほど顕著に現れ、モータ単体の回
転角あるいは速度を測定する際の大きな障害となってい
た。一方、モータの小型化にともない、モータ内部の余
空間が減少し、例えばホール素子などのセンサーの内蔵
は非常に困難となっている。
The influence of the detector as described above becomes more conspicuous as the size of the motor to be measured becomes smaller, and has become a major obstacle in measuring the rotation angle or speed of the motor itself. On the other hand, with the downsizing of the motor, the extra space inside the motor has been reduced, and it is very difficult to incorporate a sensor such as a Hall element.

【0009】本発明の目的は、上記のような欠点を解決
し、ミリマシーン以下の小型モータの回転角、速度ある
いは加速度を測定する際の検出器の影響を解消し、計測
精度の大幅な改善を目的としたものである。
SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned drawbacks, eliminate the influence of a detector when measuring the rotation angle, speed or acceleration of a small motor of millimeter or less, and greatly improve the measurement accuracy. It is intended for.

【0010】[0010]

【課題を解決するための手段】本発明は、前記従来の課
題を解決するためになされたもので、請求項1記載の発
明は、回転軸の円周方向の表面形状及びその微小粗度情
報を、リアルタイムで連続的に出力する非接触型変位セ
ンサーからの信号情報を基に、回転軸固有の円周方向信
号を得て、同回転軸の起点を含めた回転角、速度及び加
速度を認識するものである。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned conventional problems, and the invention according to the first aspect is directed to a method of forming a surface shape of a rotating shaft in a circumferential direction and information on minute roughness thereof. Based on the signal information from the non-contact type displacement sensor that outputs continuously in real time, obtains the circumferential direction signal unique to the rotation axis and recognizes the rotation angle, speed and acceleration including the starting point of the rotation axis Is what you do.

【0011】[0011]

【作用】これにより、検出器が被測定モータに接触しな
いため、被測定モータがミリマシーン以下の小型モータ
であっても、測定時の検出器の影響を解消でき、計測精
度の大幅な向上が実現できる。
[Function] Since the detector does not contact the motor to be measured, even if the motor to be measured is a small motor of a millimeter machine or smaller, the influence of the detector at the time of measurement can be eliminated, and the measurement accuracy is greatly improved. realizable.

【0012】[0012]

【発明の実施の形態】以下、本発明の実施例について、
図面を参照して説明する。図1は本発明の実施例の軸位
置情報検出装置を説明する図、図2は本発明の他の実施
例の軸位置情報検出装置を説明する図である。
BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described.
This will be described with reference to the drawings. FIG. 1 is a diagram illustrating a shaft position information detecting device according to an embodiment of the present invention, and FIG. 2 is a diagram illustrating a shaft position information detecting device according to another embodiment of the present invention.

【0013】本発明の骨子となる測定システム及び検出
手段について図1を用いて説明すると、図1(イ)に示す
ように、本発明の測定システムは、例えばレーザ変位
計、静電容量型変位計などの非接触型変位センサーと、
同センサーからの変位出力信号の周期あるいはパルス幅
の認識、各種演算を行うための演算器より構成される。
The measuring system and the detecting means which are the gist of the present invention will be described with reference to FIG. 1. As shown in FIG. 1 (a), the measuring system of the present invention comprises, for example, a laser displacement meter, a capacitance type displacement. Non-contact type displacement sensors such as
It is composed of an arithmetic unit for recognizing the cycle or pulse width of the displacement output signal from the sensor and performing various calculations.

【0014】非接触型変位センサーでは、図1(イ)及び
図1(ロ)に示すように、回転する回転軸の円周方向の変
位、すなわち表面形状、微小粗度をリアルタイムで連続
的に検出し、例えば、回転軸の被検出部断面が図1(ロ)
に示すような形状である場合、非接触型変位センサーか
ら、図1(ハ)に示すような、起点を時間=0点とし、変
位が時間に対し変動する波形信号が得られる。
In the non-contact type displacement sensor, as shown in FIGS. 1A and 1B, the circumferential displacement of the rotating rotating shaft, that is, the surface shape and minute roughness are continuously and continuously measured in real time. For example, the cross section of the detected part of the rotating shaft is
In the case of the shape shown in FIG. 1, a non-contact displacement sensor obtains a waveform signal in which the starting point is time = 0 and the displacement varies with time, as shown in FIG.

【0015】ここで、図1(ロ)に示す回転軸の円周上位
置a〜kと、図1(ハ)に示すa〜kがそれぞれ対応して
いる。また、図中a点は起点、p点は停止点、o点は軸
中心を示す。
Here, positions a to k on the circumference of the rotating shaft shown in FIG. 1B correspond to a to k shown in FIG. In the figure, point a indicates the starting point, point p indicates the stopping point, and point o indicates the axis center.

【0016】図1(ロ)において、回転軸の任意の円周上
位置xに対し、角度∠aoxは一義的に決まる値である
ため、非接触型変位センサーから出力される変位波形信
号の、起点に対する位相及びその変位より、任意の時間
における回転軸の回転角が連続的に認識できる。
In FIG. 1B, since the angle ∠aox is a value uniquely determined with respect to an arbitrary circumferential position x of the rotating shaft, the displacement waveform signal output from the non-contact displacement sensor is From the phase with respect to the starting point and its displacement, the rotation angle of the rotating shaft at any time can be continuously recognized.

【0017】例えば図1(ハ)の場合には、p点の起点に
対する位相及びその変位より、回転軸は、起点から2.
20回転(回転角=13.8rad=793.0°)して停止
したことがわかる。さらに、2点間の回転角変化量を時
間変化量で除することにより、任意の時間における角速
度が認識できる。
For example, in the case of FIG. 1C, the rotation axis is set at 2.
It can be seen that the motor stopped after 20 rotations (rotation angle = 13.8 rad = 793.0 °). Furthermore, the angular velocity at an arbitrary time can be recognized by dividing the rotation angle change between two points by the time change.

【0018】もう一つの検出手段を以下に説明する。非
接触型変位センサーから出力される信号を基に、時間−
回転角関係式を算出する。続いて、前述の時間−回転角
関係式を微分演算して時間−角速度関係式を算出する。
さらに、その時間−角速度関係式を微分演算して時間−
角加速度関係式を算出する。以上のような演算処理によ
り、任意の時間における回転角、角速度、角加速度を認
識することができる。
Another detecting means will be described below. Based on the signal output from the non-contact type displacement sensor,
Calculate the rotation angle relational expression. Subsequently, the time-rotation angle relational expression is differentiated to calculate a time-angular velocity relational expression.
Further, the time-angular velocity relational expression is differentiated to calculate the time-
Calculate the angular acceleration relational expression. By the above-described arithmetic processing, the rotation angle, the angular velocity, and the angular acceleration at an arbitrary time can be recognized.

【0019】前述した回転軸の円周上の表面形状及び微
小粗度は、外径や真円度のバラツキ、加工方法、表面仕
上げの状態によって異なるその回転軸固有のもので、軸
指紋とも言えるものである。したがって、本発明は、回
転軸の識別にも利用することが可能である。
The above-described surface shape and minute roughness on the circumference of the rotating shaft are unique to the rotating shaft, which vary depending on the variation of the outer diameter and roundness, the processing method, and the state of the surface finish, and can be said to be the axial fingerprint. Things. Therefore, the present invention can also be used for identifying a rotation axis.

【0020】回転中、回転軸のフレをともない、回転角
の認識に支障をきたす場合には、回転数以下の周波数成
分を阻止するHPF(High Pass Filter)を非接触型
変位センサーと演算器との間に挿入することにより解決
できる。また、本発明は、回転軸に溝を形成するなど、
積極的に表面形状を特徴づける加工を施しても何ら差し
支えない。
In the case where the rotation of the rotating shaft is displaced during rotation and the recognition of the rotation angle is hindered, an HPF (High Pass Filter) for blocking a frequency component lower than the rotation speed is provided with a non-contact type displacement sensor and an arithmetic unit. The problem can be solved by inserting between them. In addition, the present invention, such as forming a groove in the rotating shaft,
There is no problem even if the processing for positively characterizing the surface shape is performed.

【0021】例えば、回転軸の被検出部断面を図2(イ)
に示す形状に加工した場合、非接触型変位センサーから
は、図2(ロ)に示すような、起点を時間=0点とし、変
位が時間に対し変動する波形信号が得られる。図2(イ)
に示す回転軸の円周上の位置a'〜l'と図2(ロ)に示す
a'〜l'がそれぞれ対応しいる。o点は軸中心を示す。
For example, FIG. 2A is a sectional view of a portion to be detected of the rotating shaft.
In the case of processing into the shape shown in (1), the non-contact type displacement sensor obtains a waveform signal in which the starting point is time = 0 and the displacement varies with time, as shown in FIG. Fig. 2 (a)
2 correspond to the positions a ′ to l ′ on the circumference of the rotation shaft shown in FIG. Point o indicates the axis center.

【0022】前述のように、回転軸の任意の円周上位置
に対し、回転角が一義的に決まるため、非接触型変位セ
ンサーから出力される変位波形信号の、起点に対する位
相及びその変位より、任意の時間における回転軸の回転
角が連続的に認識できる。
As described above, since the rotation angle is uniquely determined with respect to an arbitrary position on the circumference of the rotation axis, the phase of the displacement waveform signal output from the non-contact type displacement sensor with respect to the starting point and the displacement thereof can be calculated. , The rotation angle of the rotation shaft at any time can be continuously recognized.

【0023】なお、回転軸の加工形状は、本説明例に限
定されるものではなく、適宜、設定することができる。
The processing shape of the rotating shaft is not limited to this example, but can be set as appropriate.

【0024】[0024]

【発明の効果】本発明の請求項1による軸位置情報検出
装置によると、実施例で詳細に説明したとおり、ミリマ
シーン以下の小型モータの回転角、速度あるいは加速度
を測定する際の検出器の影響を解消し、計測精度を大幅
に改善することができる。
According to the shaft position information detecting device according to the first aspect of the present invention, as described in detail in the embodiment, the detector for measuring the rotation angle, speed or acceleration of a small motor of millimeter machine or less is used. The influence can be eliminated and the measurement accuracy can be greatly improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施例の軸位置情報検出装置を説明す
る図。
FIG. 1 is a diagram illustrating a shaft position information detecting device according to an embodiment of the present invention.

【図2】本発明の他の実施例の軸位置情報検出装置を説
明する図。
FIG. 2 is a diagram illustrating a shaft position information detecting device according to another embodiment of the present invention.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 吉成 赫夫 東京都足立区新田3丁目8番22号 並木精 密宝石株式会社内 (72)発明者 関谷 哲夫 東京都足立区新田3丁目8番22号 並木精 密宝石株式会社内 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Kakuo Yoshinari 3-8-22 Nitta, Adachi-ku, Tokyo Inside Namiki Seimitsu Jewelry Co., Ltd. (72) Inventor Tetsuo Sekiya 3-8 Nitta, Adachi-ku, Tokyo No. 22 Namiki Seiki Inside Jewelry Co., Ltd.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 回転軸の円周方向の表面形状及びその微
小粗度情報を、リアルタイムで連続的に出力する非接触
型変位センサーからの信号情報を基に、回転軸固有の円
周方向信号を得て、同回転軸のその起点を含めた回転
角、速度及び加速度を認識するようにしたことを特徴と
する回転軸の軸位置情報検出装置。
1. A circumferential signal unique to a rotating shaft, based on signal information from a non-contact type displacement sensor that continuously outputs, in real time, information on a circumferential surface shape of the rotating shaft and minute roughness information thereof. A rotation angle, a speed, and an acceleration of the rotation axis including the starting point of the rotation axis are recognized.
【請求項2】 請求項1記載の軸位置情報検出装置にお
いて、前記非接触型変位センサーからの出力波形情報を
得られるように、前記回転軸の少なくとも被検出部に表
面形状を特徴づける為の凹凸が施されていることを特徴
とする回転軸の軸位置情報検出装置。
2. The shaft position information detecting device according to claim 1, wherein at least a portion to be detected of the rotating shaft has a surface shape so as to obtain output waveform information from the non-contact type displacement sensor. A shaft position information detecting device for a rotating shaft, characterized in that it has irregularities.
JP29636597A 1997-10-14 1997-10-14 Information of shaft position detecting device Pending JPH11118470A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29636597A JPH11118470A (en) 1997-10-14 1997-10-14 Information of shaft position detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29636597A JPH11118470A (en) 1997-10-14 1997-10-14 Information of shaft position detecting device

Publications (1)

Publication Number Publication Date
JPH11118470A true JPH11118470A (en) 1999-04-30

Family

ID=17832615

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29636597A Pending JPH11118470A (en) 1997-10-14 1997-10-14 Information of shaft position detecting device

Country Status (1)

Country Link
JP (1) JPH11118470A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013069838A (en) * 2011-09-22 2013-04-18 Nec Corp Individual identification device and method for circuit board
CN107505475A (en) * 2017-10-13 2017-12-22 河海大学 A kind of measurement apparatus and method of rotating shaft transient speed and throw based on laser
CN109782011A (en) * 2019-02-18 2019-05-21 江苏大学 A kind of rotation-speed measuring device and method of sea water desalination high-pressure pump and turbine all-in-one machine
CN109798250A (en) * 2019-02-18 2019-05-24 江苏大学 A kind of device and method measuring sea water desalination high-pressure pump and turbine one arbor frequency
CN111458531A (en) * 2020-04-29 2020-07-28 华中科技大学 Rotor displacement-based rotating speed monitoring system for magnetic suspension spindle

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013069838A (en) * 2011-09-22 2013-04-18 Nec Corp Individual identification device and method for circuit board
CN107505475A (en) * 2017-10-13 2017-12-22 河海大学 A kind of measurement apparatus and method of rotating shaft transient speed and throw based on laser
CN109782011A (en) * 2019-02-18 2019-05-21 江苏大学 A kind of rotation-speed measuring device and method of sea water desalination high-pressure pump and turbine all-in-one machine
CN109798250A (en) * 2019-02-18 2019-05-24 江苏大学 A kind of device and method measuring sea water desalination high-pressure pump and turbine one arbor frequency
CN111458531A (en) * 2020-04-29 2020-07-28 华中科技大学 Rotor displacement-based rotating speed monitoring system for magnetic suspension spindle

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