JPH11110044A - Fine positioning controller - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the positioning characteristic by combining a motion mode-based non-interference feedback device which performs for a three-axis fine positioning mechanism and a fine positioning device where a collocation correction matrix is inserted. SOLUTION: A fine positioning mechanism consists of the actuators 2M, 2R and 2L which control the positioning of a rigid object 1 to be positioned, the position sensors 3M, 3R and 3L which detect the position of the object 1 and the acceleration sensors 9M, 9R and 9L which detect the acceleration of the object 1. Then a non-interference feedback device inserts the collocation matrixes 17 and 16, uses the outputs of sensors 3M to 3L and 9M to 9L as the outputs defined at the placement parts of the actuators existing near those sensors and performs the decoupling to the outputs of both matrixes 17 and 16 based on the motion mode of the object 1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the positioning of a fine positioning mechanism using a piezoelectric element, which is a representative of a displacement generating actuator, or a linear motor, which is a representative of an electromagnetic actuator. And a fine movement positioning control device.

[0002]

2. Description of the Related Art In recent years, positioning precision on the order of submicrons has been required for fine positioning in fields such as precision processing, assembly, and adjustment. In particular, in the case of an ultra-precision positioning stage for the purpose of exposing fine patterns, in order to achieve high drive resolution and a wide frequency response, piezoelectric and electrostrictive elements, which are representative of displacement-generating actuators, or electromagnetic actuators Representative linear motors are frequently used. As an example, FIG. 5 shows a three-degree-of-freedom fine movement positioning device that performs positioning control of one degree of freedom in vertical translation and two degrees of inclination in a horizontal plane. In this apparatus, positioning control is performed by actuators 2M, 2R, and 2L that vertically displace a flat substrate 1 in accordance with an applied voltage. Actuator 2M, 2
R and 2L include a piezoelectric element as a driving element and a displacement magnifying mechanism for enlarging the displacement, or in the case of a linear motor, a mover and a stator. Here, the prior art in which the former actuator is used will be described. Further, near the actuators 2M, 2R, 2L, a position sensor 3 for measuring the displacement of the substrate 1 in the vertical direction is provided.
M, 3R and 3L are arranged. Also, as needed, near the actuators 2M, 2R, 2L, acceleration sensors 9M, 9R, which measure the vertical acceleration of the substrate 1, are provided.
9L may be provided. A mechanism including these components is called a fine movement positioning mechanism.

[0003] Displacement signals of the substrate 1 measured by the position sensors 3M, 3R, 3L are transmitted to position amplifiers 4M, 4M.
It is converted into an electric signal by R and 4L. The electric signal is guided to the motion mode extraction calculating means 10 relating to the position, and the output thereof is a motion mode displacement of translation of the substrate 1 and two kinds of rotations in a horizontal plane. These motion mode displacements are compared with command voltages applied to command voltage input terminals 5M, 5R, 5L and input to deviation amplifiers 6M, 6R, 6L,
Its output is a gain compensator 7 for adjusting the characteristics of the control loop.
M, 7R, 7L. Further, the outputs of the acceleration sensors 9M, 9R, 9L provided as necessary are converted into electric signals by the acceleration amplifiers 11M, 11R, 11L. This electric signal is guided to the motion mode extraction / calculation means 12 relating to acceleration, and acquires a motion mode acceleration signal such as translation or rotation of the substrate 1 in the same manner as the displacement signal. These motion mode acceleration signals have, for example, a band-pass filter (BPF) 13M, which has appropriate frequency characteristics for blocking extremely low frequency signals and suppressing high frequency noise.
Gain elements 14M, 14R, 14 guided to 13R, 13L and further adjusting damping for each exercise mode
L to generate a negative feedback signal. The output signals of the gain compensators 7M, 7R, 7L described above and this negative feedback signal are added to become a drive signal for each motion mode, which is input to the motion mode distribution calculating means 15. The motion mode distribution calculating means 15 generates a drive signal to be driven by each axis from the drive signal for each motion mode.

The constant current amplifier 8M,
When 8R and 8L are excited, the gain elements 14M, 14R,
The command voltage input terminals 5M, 5R, and 5L can be positioned to the designated posture without a steady deviation under the appropriate damping action obtained by the adjustment of 14L. Here, a decoupling feedback loop for each motion mode configured based on the outputs of the above-described position sensors 3M, 3R, and 3L and a non-interference for each motion mode configured based on the output of an acceleration sensor provided as necessary. This is called a non-interacting feedback device including the feedback loop, and a fine positioning controller including the fine positioning mechanism and the non-interacting feedback device.

[0005] The configuration of the fine-movement positioning control device provided with the above-described decoupling feedback device for each motion mode has been proposed in, for example, Japanese Patent Laid-Open No. 7-319549 (fine-motion positioning control device). This control device has excellent features. In other words, since the positioning control characteristics can be adjusted for each motion mode, finer adjustment of the characteristics is possible as compared with the case where each axis is independently provided with a feedback loop, thereby improving the indicators such as positioning accuracy and positioning time. You can do it. Further, when an acceleration sensor is provided as disclosed in JP-A-6-151272 (fine movement positioning device with acceleration feedback), it was possible to finely adjust the damping characteristics for each motion mode in addition to the position.

However, there is a constant demand for improved positioning characteristics, and in order to meet such demands, a method of improving the positioning characteristics from a viewpoint different from that of a decoupling feedback device for each motion mode has been proposed by the present applicant. According to
5925 (fine movement positioning control device). In this feedback device, a correction matrix obtained by multiplying an inverse matrix of a transformation matrix from a displacement vector regarding an inertia principal axis of a positioning substrate to a measurement point by a position sensor by a right side of a transformation matrix from a displacement vector to a driving point by an actuator is obtained. An operation is required, and a correction means using this correction matrix is provided on the output side of the position sensor. JP-A-7-5
In the embodiment described in 925, the above correction matrix is inserted into a closed loop system independent of each of the three axes.

According to the teachings of control theory, when the sensor and the actuator are arranged at the same position, that is, when the collocation is satisfied, the closed-loop system becomes easy to control.
However, since both the sensor and the actuator have finite physical dimensions and must use them to realize the entire fine movement positioning mechanism with a finite size, it is practically impossible to realize collocation. Therefore, in the above-mentioned Japanese Patent Application Laid-Open No. 7-5925, collocation is realized by inserting a collocation correction matrix using the output of the position sensor as an input, and a closed-loop system independent of each axis for a three-axis fine movement positioning mechanism is configured. Provides a control device.

[0008]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a fine-movement positioning control device in which the position accuracy and the positioning time are further improved as compared with the conventional example described above.

[0009]

In order to solve the above-mentioned problems, in the present invention, a non-interacting feedback device for each motion mode for the three-axis fine movement positioning mechanism described in Japanese Patent Application Laid-Open No. 7-319549, The positioning characteristics are further improved by combining with a fine movement positioning control device in which a correction matrix operation for realizing collocation in 5925 is inserted.

That is, the fine-movement positioning control device of the present invention comprises a plurality of actuators for driving a positioning object, a plurality of position sensors for measuring the position displacement of the object, and each of the position sensors based on the output of each position sensor. A colocation correction matrix calculating means for generating a position displacement signal of a portion where the actuator is disposed, and a motion mode for generating a displacement signal for each motion mode of the object from an output of the collocation correction matrix calculating means for the position Another signal extracting means, a motion mode compensation signal for comparing the motion mode displacement signal with a command signal corresponding to each displacement signal to create a motion mode deviation signal and independently compensating for each deviation signal Generating means for generating a drive signal for each of the actuators from an output of the motion mode-specific compensation signal generating means That in response to the motion mode distributing means and the driving signal, characterized by comprising said made from the power amplifier for driving the actuator motion mode by decoupling the feedback device.

[0011] Preferably, a plurality of acceleration sensors for measuring the acceleration of the positioning object, and a collocation correction matrix relating to acceleration, which generates an acceleration signal of a portion where each of the actuators is arranged from an output of each acceleration sensor. A calculating means, a motion mode signal extracting means for generating an acceleration signal for each motion mode of the object from an output of the collocation correction matrix calculating means for the acceleration, and a motion mode specific acceleration signal for the motion mode. The apparatus further includes an acceleration signal compensating means for processing with an optimum amplification degree and a transfer characteristic, and further includes a motion mode decoupling acceleration feedback device for feeding back an output signal of the acceleration signal compensating means to a stage preceding the motion mode distribution means.

The calculation of the collocation correction matrix and the calculation of the motion mode relating to the position or the acceleration may be realized by a correction means for each position or acceleration.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A fine movement positioning control device according to a preferred embodiment of the present invention comprises a flat substrate for controlling positioning of one translational degree of freedom and two degrees of freedom of rotation, and a degree of freedom for positioning and driving the substrate. Minute actuator, a position sensor for measuring the displacement of the substrate in the vicinity of the actuator, and a degree of freedom for measuring the acceleration of the substrate in the vicinity of the actuator. In a fine movement positioning mechanism having an acceleration sensor of
A collocation correction matrix relating to a position for generating a position detection signal from the output of each of the position sensors as if each position sensor was disposed at a position where an actuator in the vicinity of the actuator is located; A collocation correction matrix relating to acceleration for generating an acceleration signal at a portion where the colocation correction matrix relating to position and a collocation correction matrix relating to acceleration are output. doing.

Here, the respective collocation correction matrices for the position and the acceleration, and the respective motion mode extraction calculating means provided in the decoupling feedback device based on the respective motion modes for the position and the acceleration,
The correction means may be collective.

It is easy to apply the present invention to a multi-degree-of-freedom fine movement positioning mechanism. In this case, a rigid object to be positioned, an actuator for at least the degree of freedom of movement for controlling the positioning, and at least this movement In a fine-motion positioning mechanism equipped with a position sensor for detecting the position of a rigid object having a degree of freedom and an acceleration sensor for at least the degree of freedom of movement, which is equipped as necessary and detects acceleration of the rigid object, each position A collocation correction matrix related to the position to make the output of the sensor the output at the portion where each actuator located in the vicinity is formed, and the output of each acceleration sensor at the portion where each actuator located in the vicinity is located A collocation correction matrix for position and acceleration, comprising: The decoupling feedback device based on the motion mode of the rigid object to be positioned with respect to each output is the may be configured respectively.

[0016]

According to the teachings of the control theory, when the sensor and the actuator are arranged at the same position, that is, when the collocation is satisfied, the closed loop system is easily controlled. However, since both the sensor and the actuator have finite physical dimensions and must use them to realize the entire fine movement positioning mechanism with a finite size, it is practically impossible to realize collocation. In view of this, the present applicant has proposed to realize collocation by inserting a collocation correction matrix which has already received the output of the position sensor as an input (for example, Japanese Patent Laid-Open No. 7-592 described above).
5). In this proposal, a control device is provided in which a closed-loop system independent of each axis is configured for a three-axis fine movement positioning mechanism. On the other hand, a decoupling feedback control device for each motion mode that can finely adjust a closed loop system for each motion mode such as translation or rotation has also been proposed (for example, Japanese Patent Application Laid-Open No. 7-319549).

However, there has been a permanent need to improve the positioning accuracy and shorten the positioning time. In order to cope with this, the present invention provides a fine-movement positioning control device that simultaneously enjoys the benefits of the above two proposals. To improve the positioning characteristics.

In the case of the three-axis fine movement positioning mechanism to which the present invention is applied, a correction operation is performed on the output signal of the position sensor, and the output of the position sensor is located at the same position as the actuator. When a closed loop system independent of each axis is configured so that output can be obtained as a result, the response waveforms other than the step drive axis become symmetrical, and the convergent waveform has the property of not being biased with respect to the signal ground. I know it. In general, when performing the positioning convergence determination, sampling is performed from the positioning convergence waveform of each axis, an average value and a standard deviation are calculated from the time series data, and the settling determination is performed based on a predetermined standard. Therefore, the property that the convergence waveform of the position deviation signal is not biased with respect to the signal ground due to collocation acts to give a preferable property from the viewpoint of an index such as positioning accuracy and positioning time.

On the other hand, the decoupling feedback control device for each motion mode is characterized in that a substantially independent closed loop system can be adjusted for each motion mode such as translation or rotation. In other words, as a result of performing adjustment for each motion mode, it works so that the control performance of the fine movement positioning device can be pursued to the utmost.

According to the present invention, the position sensor and the acceleration sensor provided as needed are arranged at the driving point of the actuator, and a non-interacting feedback control device for each motion mode is configured based on a co-located signal. Therefore, it is possible to easily seek the positioning characteristics to the limit, and as a result, it works to improve the positioning performance.

Therefore, while enjoying the benefits brought by being co-located, it is possible to finely adjust the characteristics for each motion mode, and to pursue the index of position accuracy and positioning time to the utmost. ,
The positioning characteristics are improved, and the productivity is improved.

[0022]

Embodiments of the present invention will be described below with reference to the drawings. First Embodiment FIG. 1 shows a fine movement positioning control device according to an embodiment of the present invention. 5 are different from the acceleration amplifiers 11M and 11M in FIG.
The collocation correction matrix 16 relating to the acceleration inserted at the next stage of R, 11L and before the motion mode extracting / calculating means 12 relating to the acceleration, and the motion mode extracting / calculating means 10 relating to the position following the position amplifiers 4M, 4R, 4L and at the next stage. Collocation correction matrix 1 for the position inserted in the previous stage
7 is added. The reason why the collocation must be realized by calculation until these correction matrices are inserted is, of course, that the position sensor and the acceleration sensor have a physically finite size. Because it can be done. In addition, since the physical space for realizing the entire fine movement positioning mechanism is of course subject to practical restrictions, it is impossible for a practical fine movement positioning mechanism to arrange various sensors in the same place as the actuator. FIG. 2 shows an arrangement example of the actuator, the position sensor, and the acceleration sensor. From the viewpoint of production, it is considered reasonable to combine the actuator, the position sensor, and the acceleration sensor into one and produce three as the drive sensing unit 18 and incorporate them into the positioning stage. In the figure, portions 18M, 18R, and 18L surrounded by a square broken line are
This is a drive sensing unit including an actuator, a position sensor, and an acceleration sensor. Since this is arranged on the positioning substrate 1, the actuators 2M, 2M,
The position sensor and the acceleration sensor are both offset with reference to 2R and 2L.

Hereinafter, the collocation correction matrix 1 will be specifically described.
7 and 16 and the contents of the exercise mode extraction calculation means 10 and 12 are shown. First, the symbols are defined below.

[0024]

(Equation 1) Now, actuators 2M, 2R, 2L, position sensor 3
M, 3R, 3L and the acceleration sensor 9M, 9R, using symbols in Fig. 2 described illustrating an example of the arrangement of 9 L, collocation correction matrix 16, 17 on the position and acceleration operation contents J _p, J _a is the less, respectively Asked to do so. (1) The calculation formula J _sx of the collocation correction matrix J _p regarding the position is given by the formula (1).

[0025]

(Equation 2) Therefore, the output obtained by applying the collocation correction matrix 17 (FIG. 1) expressed by the following equation to the outputs of the position sensors 3M, 3R, and 3L is output by the position sensors 3M, 3R, and 3L to the actuators 2M, 2R, and 2L. And it is equivalent to measuring the displacement there.

[0026]

(Equation 3) (2) The calculation of the collocation correction matrix J _a for acceleration is performed by the above-described collocation correction matrix J for position.
The same calculation procedure as that of _p may be adopted, and the following equation is obtained in correspondence with equations (1) to (3).

[0027]

(Equation 4) Here, it must be noted that the contents of the co-location correction matrix operation J _p, motion mode extracting operation unit 10, 12 that connect to the next stage of the output of the J _a. The outputs of the collocation correction matrices 17 and 16 are position sensors 3M, 3R,
It should be noted that both the 3L and the acceleration sensors 9M, 9R, 9L have the same J _mod because they are co-located.

Conventionally, that is, when the collocation correction is not performed, the operation expression of the motion mode extraction operation means 10 relating to the position has been realized by the following expression.

[0029]

(Equation 5) As is clear from the above equation, J _{mod (old)} of the conventional motion mode extraction calculation means is the arrangement angle θ _s of the position sensors 3M, 3R, 3L and the arrangement angle θ of the actuators 2M, 2R, 2L.
_d and relied on.

However, the J _mod of the motion mode extracting / calculating means 10 in the present embodiment becomes as follows, and does not depend on the arrangement angle θ _s of the position sensors 3M, 3R, 3L. This is because the position sensors 3M, 3R, and 3L are collocated by the function of the collocation correction matrix 17. On the other hand, in the case of FIG. 2, the acceleration sensors 9M, 9
Since R and 9L do not have an offset angle with respect to the actuators 2M, 2R and 2L, the expression (8) is also obtained. However, even if the R and 9L are arranged with an offset angle, the next stage is obtained by inserting the collocation correction matrix 16. The motion mode extraction calculation means 12 relating to the acceleration connected to is represented by equation (8). That is, if the collocation correction matrices 17 and 16 are simply inserted into the conventional decoupling feedback control device for each motion mode, improvement in control performance cannot be expected. It is argued that the mode extraction operation means 10 and 12 must be reconfigured.

[0031]

(Equation 6) Note that J _dtr which is the content of the exercise mode distribution calculating means 15
Is given by the following equation, which is the same as in the prior art.

[0032]

(Equation 7) The effect of the present embodiment will be described using a simple numerical example.
FIG. 3 shows a convergence waveform of the motion mode deviation signal (e, eθ _x , eθ _y ) with respect to the step input for each motion mode. The broken line in the figure indicates the case of the conventional fine movement positioning control device which does not perform collocation correction, and the solid line indicates the fine movement positioning control device according to the present embodiment in which the collocation correction matrix 17 is inserted in front of the motion mode extraction means 10 relating to the position. The case of is shown. For comparison, the gain compensators 7M, 7R, and 7L that adjust the closed-loop characteristics of each motion mode are the same regardless of the presence or absence of collocation correction. Now, in the translation step, there is almost no difference between the two convergent waveforms. To put it simply, there is a slight difference in the amplitude of eθ _y . When the collocation correction is performed, the maximum amplitude can be suppressed.
Regarding the rotation step around the x-axis, the convergence waveform is almost the same regardless of the presence or absence of the collocation correction. As in the translation step, there is a slight difference in the amplitude of eθ _y , and it is slightly more advantageous to perform collocation correction. The largest difference is the rotation step around the y-axis. The response eθ _y of the step axis itself is extremely oscillatory without collocation correction. That is, unless the collocation correction is performed, the loop gain of this motion mode using the gain compensator 7L that adjusts the rotational motion characteristics around the y-axis is suppressed to a low level.

FIG. 4 shows the response of eθ _{y to} the application of a step-like target value and the application of a disturbance which designate rotation about the y-axis. The gain is adjusted so that the convergence waveform with respect to the application of the target value becomes almost the same regardless of the presence or absence of the collocation correction. As shown, eθ _{y with} respect to the target value application
Are macroscopically almost the same.
However, the response to the disturbance response applied at 0.1 seconds is different. The amplitude of the collocation correction is suppressed, indicating a favorable characteristic in terms of positioning characteristics.

Second Embodiment In the first embodiment described above, the collocation correction matrix 17 expressed by the expression (3) and the motion mode extraction operation means 10 expressed by the expression (8) are realized separately. ing. Similarly, regarding the acceleration, the collocation correction matrix 16 expressed by the expression (6) and the motion mode extraction calculation means 12 expressed by the expression (8) are separately realized. However, it is not prevented that the collocation correction matrix 17 and the motion mode extraction calculation means 10 are realized at once.
Here, “collectively” means to realize J _mod J _p .
Of course, with regard to the acceleration, the collocation correction matrix 16 and the motion mode extraction calculation means 12 can be realized collectively. In this case, the attempt to realize J _mod J _a.

Third Embodiment In the first and second embodiments described above, three actuators 2M, 2R, and 2L are provided in the same plane, and have one degree of freedom of translation in the vertical direction and two rotations in the horizontal plane. Total 3 degrees of freedom
A fine-motion positioning mechanism that controls the degree of freedom is targeted. However, the present invention is not limited to such a three-degree-of-freedom fine movement positioning mechanism, and can be applied to a mechanism having more degrees of freedom without departing from the gist of the present invention.

That is, in the third embodiment, a rigid object to be positioned, an actuator for at least the degree of freedom of movement for controlling the positioning, and a position sensor for detecting the position of the rigid object for at least the degree of freedom of movement. And a fine movement positioning mechanism provided with an acceleration sensor for at least the degree of freedom of movement for detecting acceleration of a rigid object as required, and a position for forming an output of the position sensor as an output at a portion where the actuator is disposed. And a collocation correction matrix related to acceleration for making the output of the acceleration sensor an output at a portion where the actuator is arranged. Then, a decoupling feedback device based on the motion mode of the rigid object positioned with respect to each output of the collocation correction matrix relating to position and acceleration is configured.

[0037]

The effects of the present invention are as follows. (1) By inserting the collocation correction matrix into the closed loop system, a co-located position sensor and acceleration sensor can be realized, and a decoupling control device for each motion mode is configured for the output signal. Therefore, it is possible to finely adjust the characteristics for each motion mode while enjoying the benefits brought by being co-located, and to pursue the index of position accuracy and positioning time to the utmost. (2) Therefore, there is an overall effect that the positioning characteristics are improved and the productivity is improved.

[Brief description of the drawings]

FIG. 1 is a block configuration diagram of a fine movement positioning control device according to one embodiment of the present invention.

FIG. 2 is a layout diagram of an actuator, a position sensor, and an acceleration sensor.

FIG. 3 is a convergence waveform diagram of a motion mode deviation signal with respect to a step input for each motion mode.

FIG. 4 is a response diagram of eθ _y to target value application and disturbance application.

FIG. 5 is a configuration diagram of a conventional fine movement positioning control device.

[Explanation of symbols]

1: substrate, 2M, 2R, 2L: actuator such as piezoelectric element, 3, 3M, 3R, 3L: position sensor, 4, 4
M, 4R, 4L: displacement amplifier, 5, 5M, 5R, 5L:
Command voltage input terminal, e _M , e _R , e _L : deviation signal, 6,
6M, 6R, 6L: deviation amplifier, 7, 7M, 7R, 7
L: gain compensator, 8M, 8R, 8L: constant current amplifier
9M, 9R, 9L: acceleration sensor, 10: motion mode extraction / calculation means for position, 11M, 11R, 11L: acceleration amplifier, 12: motion mode extraction / calculation means for acceleration, 13M, 13R, 13L: band pass filter (BPF) , 14M, 14R, 14L: gain element, 1
5: exercise mode distribution calculation means, 16: collocation correction matrix, 17: collocation correction matrix, 18: drive sensing unit.

Claims (7)

[Claims] 1. A plurality of actuators for driving a positioning object, a plurality of position sensors for measuring a position displacement of the object, and a position displacement of a portion where each of the actuators is arranged based on an output of each position sensor. A colocation correction matrix calculating means relating to a position, which generates a signal of: a motion mode signal extracting means generating a displacement signal according to a motion mode of the object from an output of the collocation correction matrix calculating means relating to the position; A motion mode compensation signal generating means for comparing each of the displacement signals with a command signal corresponding to each of the displacement signals to generate a deviation signal for each motion mode and independently compensating for each deviation signal; Motion mode distribution means for generating a drive signal for each of the actuators from an output of the compensation signal generation means; And a power amplifier that drives each of the actuators in response to a signal. 2. The method according to claim 1, wherein the collocation correction matrix calculating means and the motion mode signal extracting means include correction means for performing a collective calculation of the collocation correction matrix calculation relating to the position and the motion mode extracting calculating means relating to the position. The fine movement positioning control device according to claim 1. 3. A plurality of acceleration sensors for measuring the acceleration of the positioning object, and a collocation correction matrix calculating means for acceleration, which generates an acceleration signal of a portion where each of the actuators is arranged from an output of each of the acceleration sensors. A motion mode signal extraction means for generating an acceleration signal for each motion mode of the object from the output of the collocation correction matrix calculation means for the acceleration; and optimally independent for each motion mode acceleration signal. An acceleration signal compensating means for processing the signal based on the amplification degree and the transfer characteristic, and further comprising a motion mode decoupling acceleration feedback device for feeding back an output signal of the acceleration signal compensating means to a stage preceding the motion mode distributing means. The fine movement positioning control device according to claim 1, wherein 4. The method according to claim 3, wherein the collocation correction matrix calculation for the position and the acceleration and the motion mode extraction calculation means for the position and the acceleration are realized by a correction means for each position and acceleration. Fine movement positioning control device. 5. A flat substrate for controlling positioning of one degree of freedom of translation and two degrees of rotation, an actuator for a degree of freedom for positioning and driving the substrate, and measuring displacement of the substrate near the actuator. A fine motion positioning mechanism comprising: a position sensor for a degree of freedom; and an acceleration sensor for a degree of freedom, which is equipped as needed and measures the acceleration of the substrate near the actuator. A collocation correction matrix means for generating a displacement signal of a portion where each of the actuators is arranged from an output, and a collocation correction for acceleration which generates an acceleration signal of a portion where the actuator is arranged from an output of each of the acceleration sensors. Matrix means; a collocation correction matrix for the position; A fine motion positioning control device, comprising: a decoupling feedback device based on a motion mode for each output of the motion correction matrix. 6. A correcting means which collectively comprises a collocation correction matrix relating to the position and acceleration and a motion mode extracting operation means provided in a decoupling feedback device based on a motion mode relating to the position and acceleration for each position and acceleration. 6. The fine-movement positioning control device according to claim 5, wherein: 7. A rigid object to be positioned, an actuator for at least the degree of freedom of movement for controlling the positioning, a position sensor for detecting the position of the rigid object for at least the degree of freedom of movement, and equipment as required. A fine movement positioning mechanism comprising: an acceleration sensor for detecting at least the degree of freedom of motion for detecting the acceleration of the rigid object, wherein an output of each of the position sensors is converted into an output at a portion where each of the actuators is arranged. A collocation correction matrix means relating to a position to perform, a collocation correction matrix means relating to an acceleration for converting an output of each of the acceleration sensors into an output at a portion where the actuator is disposed, and a collocation correction matrix relating to the position and the acceleration. Decoupling based on motion mode of a rigid object positioned with respect to output A fine movement positioning control device comprising a feedback device.