JPH11108392A - Clean room - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve inconveniences that a heat exchanger is expensive and that the temperature distribution of air becomes uneven when a bypass passage is provided because large air supply power is necessary for circulating air. SOLUTION: A heat exchanging means 10 comprises at least one bypass means 13 including a bypass passage and deflecting vane members 13a to 13c arranged in the bypass passage and having variable inclination for adjusting the advancing direction of fluid flowing in the bypass passage and heat exchangers 11 and 12 which are substantially flush with each other. The heat exchanging means is disposed in an inclined state in the vicinity of a corner part in which the direction of flow in a return air passage changes.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean room used in a semiconductor manufacturing facility or the like, and more particularly to a clean room in which temperature is controlled by a heat exchanger.

[0002]

2. Description of the Related Art Generally, there are the following two types of temperature control systems for clean rooms. In the first method,
As disclosed in Japanese Patent No. 48256, a cooler is provided that is arranged to fill the cross-sectional area of the circulating air, and the surface temperature of the cooler is adjusted so that the temperature difference from the circulating air is reduced.

In the second method, a fan coil unit is provided in a return air flow path, and a part of circulating air is passed through the fan coil unit. The fan coil unit is a unit including a cooler and a blower. In the fan coil unit, the temperature difference between the surface temperature of the cooler and the circulating air is relatively large. It is desirable that the change in humidity in the clean room is small and the change in humidity is suppressed. Further, it is indispensable to remove the temperature unevenness of the supply air to the room in order to avoid thermal expansion of the material. Therefore, from the viewpoint of maintaining the product yield,
The first method is currently mainstream.

However, heat exchangers are expensive because copper is used as a material to prevent corrosion. When using a dry cooler (a heat exchanger where the surface temperature of the heat exchange coil is higher than the condensation point of the passing air and no condensation occurs on the surface), the difference in temperature between the inlet and outlet should be large. In general, the number of rows is generally two, and at most four, because of the need to increase the amount of circulating air and prevent an increase in static pressure. Therefore, it is impossible to reduce the number of columns.

On the other hand, it is conceivable to reduce the width of the coil to bypass a part of the circulating air. However, in this case, since temperature unevenness occurs in the cross section of the circulation flow path, there is a problem that when the air is supplied into the room, the temperature distribution is not uniform in a planar manner. Patent No. 26
In the specification of Japanese Patent No. 27613, a blower dedicated to a heat exchanger is provided separately from a blower for air circulation, to reduce the size of the heat exchanger and prevent an increase in static pressure. However, there is no mixing of airflow that can withstand precision processing.

[0006]

By the way, for example, when the flow path is bent at a right angle in the middle of the return air flow path,
A turbulent flow area occurs at the bend, causing a large pressure loss. The present technology also intends to reduce the "pressure loss due to the heat exchanger" by providing the heat exchange means at this location.

Further, the pressure distribution in the flow path is not uniform, and a high pressure region and a low pressure region are formed. That is, as shown in FIG. 5, a high-pressure portion is formed at the entrance corner outside the flow path, and a pressure gradient inclined toward the inside of the flow path is formed. However, when the air passes through such a pressure gradient, especially the air passing through the inside changes its direction relatively just before reaching the bend, and is not mixed with the air passing outside, The flow is laminar. This is not an effective improvement even if the heat exchange means shown by the dotted line in FIG. 5 is installed.

The present invention suppresses an increase in pressure loss due to a heat exchanger, enables cost reduction of a heat exchanger, makes the temperature distribution of indoor air uniform, and achieves space saving. Aim.

[0009]

According to a first aspect of the present invention, there is provided a clean room, comprising: an air-conditioning chamber; a return air flow path communicating between an exhaust port and an air supply port of the air-conditioning chamber; In a clean room equipped with a heat exchanger, heat exchange means
Near the corner where the direction of the flow path in the return air flow path changes,
Arranged in an inclined state, on the heat exchange means, a bypass flow path, arranged in the bypass flow path, adjusts the traveling direction of the fluid flowing through the bypass flow path, the inclination is variable deflection blade member and The bypass unit and the heat exchanger are integrally formed in a state where at least one bypass unit provided with the heat exchanger is arranged on substantially the same plane.

According to a second aspect of the present invention, in the clean room according to the first aspect, the bottom and top walls of the heat exchanger and the bypass unit are inclined with respect to an axis perpendicular to the plane of the temperature control unit. It is characterized by being arranged.

(Action) (Claim 1) At the corner where the direction of the flow path in the return air flow path changes, unless special measures are taken, the pressure distribution in the flow path becomes non-uniform, and the high pressure region and the low pressure region become Tends to form.

In the present invention, the heat exchange means is disposed in an inclined state in the vicinity of the corner of the return air flow path where the direction of the flow path changes. The bypass means of the heat exchange means includes a deflecting blade member having a variable inclination. Since the inclination of the deflecting blade member is variable, it is possible to adjust the traveling direction of the air flow passing through the heat exchanger of the temperature control unit and the traveling direction of the air flow passing through the bypass unit of the temperature control unit to be different.

Therefore, a relatively large turbulent flow area can be formed in the flow path by the air flow passing through the heat exchanger and the air flow passing through the bypass means, which travel in different directions. The presence of this turbulence zone promotes the mixing of the airflow through the heat exchanger and the airflow through the bypass means. Particularly, since the heat exchange means is present near the corner where the direction of the flow path in the return air flow path changes, the upward flow induced by the function of the deflecting blade member induces the high pressure shown in FIG. The flow of the air staying in the region is promoted.

Therefore, the pressure distribution in the flow path is made uniform,
Mixing of the airflow passing through the heat exchanger and the airflow passing through the bypass means is promoted, and the temperature distribution is made uniform. In addition, the air resistance of the heat exchange means is reduced, and the amount of air required for circulation of the air flow is reduced. Also, since a portion of the airflow bypasses the heat exchanger, the area of the coil is reduced, equipment costs are reduced, and the amount of wind required to circulate the airflow is reduced.

In the space of a clean room, generally,
The space below the floor serves as both a space for installing utility piping and disaster prevention equipment and a space for maintenance and inspection, but the corners of the return air flow path are dead spaces. However, in the present invention,
The corners of the return air passage can also be used effectively.

Since the degree of opening of the bypass passage changes according to the inclination of the deflecting blade member, the flow rate of air passing through the bypass passage can be adjusted. By this adjustment, the ratio between the air passing through the heat exchanger and the air passing through the bypass passage can be changed, and the temperature adjustment ability of the clean room can be changed. When a plurality of bypass units are provided, the traveling direction and the distribution state of the airflow passing through the heat exchanger and the airflow passing through the bypass unit can be more finely adjusted in the vertical direction. Therefore, the mixing of the airflow passing through the heat exchanger and the airflow passing through the bypass means is promoted, and the temperature distribution of the airflow is made uniform.

In particular, by the function of the bypass means disposed on the outermost side, the stagnation area formed at the outer entrance corner of the flow path is eliminated, and the flow resistance of the system is further reduced. (Claim 2) In order to promote the mixing of the airflow passing through the heat exchanger and the airflow passing through the bypass means, the traveling direction of the airflow passing through the bypass means is controlled by the temperature control means. In order to tilt with respect to an axis perpendicular to the plane, the direction of the deflecting blade member also needs to be tilted with respect to the axis.

The wall surface at the boundary between the heat exchanger and the bypass means is inclined with respect to an axis perpendicular to the surface of the temperature control means, similarly to the deflection blade member, so that the deflection blade member is inclined. In the standard state, the degree of opening of the flow path of the bypass means can be increased. Therefore, even when the opening area of the bypass unit is relatively small, the flow rate of air passing through the bypass unit can be relatively large.

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION

(First Embodiment) The configuration and operation of the device of this embodiment are described below.
This is shown in FIGS. 1, 2, 3 and 4. This embodiment corresponds to claim 1. FIG. 1 is a vertical sectional view showing a clean room 1 and a flow path of air circulating therethrough. FIG. 2 is an enlarged vertical sectional view showing a part of FIG. 1, and FIG. 3 is an air conditioning unit shown in FIG. It is a front view of 10. FIG. 4 is a schematic diagram showing the traveling directions of air passing through the air conditioning unit 10 and air flowing out of the air conditioning unit 10 at respective positions.

In this embodiment, the air-conditioning room according to the first aspect,
The deflecting blade member, the bypass unit, the heat exchanger, and the heat exchange unit are respectively provided in the clean room 1 and the blade 13 shown in FIG.
a to 13c, the damper unit 13, the heat exchange units 11, 12 and the air conditioning unit 10. First, the overall outline of the air conditioning system will be described with reference to FIG. The arrow shown in FIG. 1 indicates the direction of air flow.

In this example, the clean room 1 is located on the second floor of a building (not shown). Air is introduced into the space of the clean room 1 by the blowers 2, 3 and 4 provided on the ceiling 1a. Blowers 2, 3 and 4
Each has a built-in high-performance filter 5,
Cleaned air is introduced into the clean room 1.

In the space of the clean room 1, air flows from top to bottom, as indicated by arrows. Since the floor surface of the clean room 1 is constituted by the grating floor 1b formed in a lattice shape, the air flows into the grating floor 1b.
b, it is discharged from the clean room 1 to the utility space 6 on the first floor. The discharged air rises from the utility space 6 through a return air passage 7 formed at a position adjacent to the clean room 1, and the clean room 1
Into the ceiling space 8 formed above. Then, the air passes through the blowers 2, 3 and 4 and returns to the clean room 1 again.
Will be introduced.

That is, the air circulates through the route of the ceiling space 8, the clean room 1, the utility space 6, the return air flow path 7, the ceiling space 8, and so on. An air-conditioning unit 10 is installed at a corner of the boundary between the utility space 6 and the return air passage 7 in an inclined state. The air conditioning unit 10 is used for controlling the temperature of air. A blower 9 is provided in the middle of the return air flow path 7.

Next, the air conditioning unit 10 will be described with reference to FIGS. The air conditioning unit 10 includes heat exchange units 11 and 12 and a damper unit 13. The heat exchange units 11 and 12 and the damper unit 13 are fixed to frame members 10a and 10b arranged at both ends of the air conditioning unit 10, and are integrated. Each of the heat exchange units 11 and 12 is a heat exchanger constituting a dry coil. That is,
The heat exchange units 11 and 12 are controlled by the heat quantity of the fluid introduced into the pipes 11a and 12a shown in FIG.
And 12 are adjusted in temperature in the thickness direction.

The damper section 13 has thin plate-like blades 13a, 13b and 13c arranged side by side. Feather 1
The rotating shaft 13d arranged at the center in the width direction of 3a, 13b and 13c is rotatably supported at both ends by frame members 10a and 10b. Blades 13a, 13b
And 13c, one end of each rotating shaft 13d is connected to the speed reducer 1
4 is connected to the drive shaft of the DC electric motor 15. To detect the inclination of the blades 13a, 13b and 13c, a low-speed encoder 16 is connected to the drive shaft of the DC electric motor 15.

When the DC electric motor 15 is driven, the blade 1
3a, 13b and 13c are simultaneously driven by the same amount,
The slope changes. Three blades 13a, 13b and 13c
Is adjusted in advance so that the inclination is the same. When the inclination of the blades 13a, 13b, and 13c is changed, the opening area (opening) of the damper unit 13 changes, and the flow rate of air passing through the damper unit 13 changes. Although an electric circuit for controlling the DC electric motor 15 is not shown, the DC electric motor 15 can be driven to change the opening of the damper unit 13 as necessary.

In this example, the blades 13a, 13b and 13
The most important function of c is to change the traveling direction of the air passing through the damper unit 13. This will be described in detail below. When the air-conditioning unit 10 shown in FIG. 2 is used, a part of the air exhausted from the clean room 1 passes through the damper unit 13 and bypasses the heat exchange units 11 and 12, so that the air flow required for air circulation is required. To
Can be reduced.

However, since the temperature of the air passing through the heat exchange sections 11 and 12 and the temperature of the air passing through the damper section 13 are different from each other, the temperature distribution in the air will be high unless the air flows of both are sufficiently mixed. Becomes uneven. When the inclination of the blades 13a, 13b and 13c is adjusted in a direction perpendicular to the surface of the air conditioning unit 10, the traveling direction of the air flow in each part is not so different from that in FIG. Becomes uneven.

FIG. 4 shows that the directions of the blades 13a, 13b and 13c are inclined with respect to an axis perpendicular to the plane of the air conditioning unit 10, and the blades 13a, 13b and 13c
2 shows the direction of travel of the air flow in each part when the direction of the air flow passing through the air conditioner is adjusted so as to be forcibly changed. Especially,
In the example shown in FIG. 4, the blades 13a, 13a, 13a,
The inclinations of 13b and 13c are adjusted.

Referring to FIG. 4, since the traveling direction of the air flow passing through the damper portion 13 is forcibly bent upward by the blades 13a, 13b and 13c, it is difficult for the air flow to concentrate, and It can be seen that no problem occurs. FIG.
In the condition (1), the pressure distribution downstream of the air conditioning unit 10 becomes uniform, so that the air passing through the heat exchange units 11 and 12 and the air passing through the damper unit 13 are easily mixed. In the state shown in FIG. 4, since the traveling direction of the airflow passing through the damper portion 13 is bent, the turbulence region is relatively wide.
Mixing of the air passing through the heat exchange sections 11 and 12 and the air passing through the damper section 13 is promoted. Therefore, the temperature distribution of the circulating air becomes uniform.

In the case where the damper opening is adjusted, the flow rate of the heat medium flowing through the heat exchanger is reduced or increased in accordance with the reduction of the damper or the increase of the damper opening. A predetermined supply air temperature can be compensated. (Second Embodiment) In this embodiment, an air conditioning unit 10B shown in FIG. Other configurations are the same as those of the first embodiment. This embodiment corresponds to claims 1 and 2.

In this embodiment, the deflecting blade member, the bypass means, the heat exchanger and the heat exchange means according to the first embodiment are respectively composed of blades 21a to 21c and 22a to 22 shown in FIG.
c, damper sections 21, 22, heat exchange sections 11B, 12B and air conditioning unit 10B. This will be described with reference to FIG. The air conditioning unit 10B includes a heat exchange unit 11
B, 12B and damper sections 21, 22. 2
One of the features of the air conditioning unit 10B is that the air conditioning unit 10B includes two damper portions 21 and 22 and these are arranged at positions difficult to each other.

That is, since the heat exchange units 11B and 12B and the damper units 21 and 22 are alternately arranged, it is possible to bend the traveling direction of the air flow at each of two vertical positions in the flow path. For this reason, the mixing of the air flows passing through the heat exchange units 11B and 12B and the air flows passing through the damper units 21 and 22 is further promoted. The damper part 21 is
a, 21b, and 21c, and the damper portion 22 includes the blade 2
2a, 22b and 22c. Air conditioning unit 1
Similarly to 0, the blades 21a, 21b, and 21c are supported by a rotating shaft 21d, and the inclination can be adjusted. Further, the blades 22a, 22b and 22c are supported by a rotating shaft 22d, and the inclination can be adjusted.

The functions and configurations of the heat exchange units 11B and 12B are the same as those of the heat exchange units 11 and 12 of the first embodiment. However, the heat exchange units 11B, 12B and the damper unit 21,
The wall surfaces 23a, 23b and 23c of the boundary with the air-conditioning unit 22 are on an axis X in a direction (thickness direction) perpendicular to the surface of the air conditioning unit 10B.
Is inclined with respect to Further, the blade 2 of the damper portion 21
Partitions 21e and 21f are formed at the boundary between 1a and 21b and at the boundary between blades 21b and 21c, respectively. These partition walls 21e and 21f are connected to the wall 2
It is arranged parallel to 3a, 23b and 23c.

Similarly, the blades 22a, 22 of the damper portion 22
Partition walls 22e and 22f are formed at the boundary portion of b and the boundary portions of the blades 22b and 22c, respectively.
These partition walls 22e and 22f are connected to the wall surfaces 23a and 2f.
It is arranged in parallel with 3b and 23c. Wall surfaces 23a, 2
The reason why 3b and 23c are inclined with respect to the axis X is to increase the degree of opening of the dampers 21 and 22 in a normal use state.

In a normal use state, the damper units 21 and 22
Blade 2 to bend the direction of travel of the airflow passing through
It is necessary to incline the directions of 1a, 21b, 21c, 22a, 22b and 22c with respect to the axis X. Therefore, if the walls 23a, 23b and 23c are parallel to the axis X,
The dampers 21 and 22 must be used with the degree of opening being considerably reduced.

In the case of the air conditioning unit 10B shown in FIG.
Since 3a, 23b and 23c are inclined with respect to axis X, they can be used in a state where the degree of opening of damper portions 21 and 22 is close to 100%. Therefore, even when the opening areas of the damper portions 21 and 22 are relatively small, the heat exchange portions 11B and 1
The flow rate of the air flowing to the damper sections 21 and 22 can be increased by bypassing the 2B.

Of course, the blades 21a, 21b, 21c,
By further increasing the inclination angles of 22a, 22b and 22c,
If the opening degree of the damper portions 21 and 22 is reduced, the damper portion 2
The flow rates of 1, 22 can be limited. Note that the angle of the deflecting blade member does not necessarily have to be variable by automatic control. In a system consisting of an external air conditioner and a heat exchanger for indoor circulation, if the uniformization of the indoor temperature distribution is achieved manually during test operation, even if the angle of the deflecting blade member is fixed,
Satisfactory operation of the clean room is obtained.

[0039]

【The invention's effect】

(Claim 1) By the function of the deflecting blade member, the pressure distribution in the flow passage is made uniform, and the mixing of the air flow passing through the heat exchanger and the air flow passing through the bypass means is promoted, and the temperature distribution is increased. Is made uniform.

Also, since a part of the air flow bypasses the heat exchanger, the amount of wind required to circulate the air flow is reduced. Since the degree of opening of the bypass passage changes according to the inclination of the deflecting blade member, the flow rate of air passing through the bypass passage can be adjusted. By this adjustment, the ratio between the air passing through the heat exchanger and the air passing through the bypass passage can be changed, and the temperature adjustment ability of the clean room can be changed.

(Claim 2) By inclining the wall surface at the boundary between the heat exchanger and the bypass means with respect to an axis perpendicular to the surface of the temperature control means, similarly to the deflection blade member,
The degree of opening of the flow path of the bypass means can be increased in a standard state in which the deflection blade member is inclined. Therefore, even when the opening area of the bypass unit is relatively small, the flow rate of air passing through the bypass unit can be relatively large.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing a clean room 1 and a flow path of air circulating therethrough.

FIG. 2 is an enlarged longitudinal sectional view showing a part of FIG.

FIG. 3 is a front view of the air conditioning unit 10 shown in FIG.

FIG. 4 shows air passing through the air conditioning unit 10 and the air conditioning unit 1
It is a schematic diagram which shows the advancing direction in each position of the air which came out from zero.

FIG. 5 is a schematic diagram showing a traveling direction of an air flow at each position in a return air flow in a clean room.

FIG. 6 shows an air conditioning unit 10B according to a second embodiment.
Is a longitudinal sectional view as viewed from the side.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Clean room 1a Ceiling 1b Grating floor 2,3,4 Blower 5 High-performance filter 6 Utility space 7 Return air flow path 8 Ceiling space 9 Blower 10,10B Air conditioning unit 10a, 10b Frame member 11,12,11B, 12B Heat exchange part 11a , 12a Pipe 13, 21, 22 Damper 13a, 13b, 13c Blade 13d Rotary shaft 14 Reduction gear 15 DC electric motor 16 Rotary encoder 21a, 21b, 21c, 22a, 22b, 22c Blade 21d, 22d Rotary shaft 21e, 21f, 22e, 22f Partition walls 23a, 23b, 23c Wall surfaces

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Hiroshi Yagabe 4-2-2, Tenjin, Chuo-ku, Fukuoka City, Fukuoka Prefecture Inside the Kyushu Branch of Takenaka Corporation (72) Inventor Shozo Taura 4 Tenjin, Chuo-ku, Fukuoka City, Fukuoka Prefecture No. 2-20, Takenaka Corporation Kyushu Branch (72) Inventor Kazuo Hayashida 2-3-7 Hakata Ekimae, Hakata-ku, Fukuoka, Fukuoka Takasago Thermal Engineering Kyushu Branch

Claims (2)

[Claims] 1. A clean room comprising: an air conditioning room; a return air flow passage communicating between an exhaust port and an air supply opening of the air conditioning room; and a heat exchanger disposed in the return air flow passage. Is disposed in an inclined state in the vicinity of a corner where the direction of the flow path in the return air flow path changes, and on the heat exchange means, a bypass flow path, and a bypass flow path are disposed in the bypass flow path. At least one bypass means having a variable inclination deflecting blade member for adjusting the traveling direction of the fluid flowing through the flow path; and the heat exchange means and the heat exchange means arranged substantially on the same plane. A clean room characterized by a unitary structure. 2. The clean room according to claim 1, wherein bottom walls and a top wall of the heat exchanger and the bypass unit are arranged to be inclined with respect to an axis perpendicular to a plane of the heat exchange unit. A clean room characterized by the following.