JPH11106956A - Manufacture of etched parts - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide the manufacturing method of the etched parts capable of obtaining the etched parts free from deficiencies and excellent in quality even when a metallic sheet is used where a plurality of metallic sheets are connected to each other to form a long strip. SOLUTION: In a manufacturing method of an etched parts where a long striplike metallic sheet 1 is a stock, when the metallic sheet 1 is divided, and has a joint 2 to connect the divided Parts, an identiflcation mark 3 is attached near a joint part, a detecting means 4 which is carried together with metallic sheet and detects the identification mark 3, and a means to calculate the carrying distance of the identification mark after the identification mark is detected, are provided, and the manufacturing condition to the joint part is changed by recognizing the position of the joint part in the manufacturing process by the carrying distance calculating means 5.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of etching a lead frame used for a semiconductor integrated circuit device or a shadow mask used for a color picture tube by using a long strip-shaped metal thin plate as a material by a photoetching method. The present invention relates to a method for manufacturing a part.

[0002]

2. Description of the Related Art Metallic electronic parts such as a lead frame used in a semiconductor integrated circuit device or a shadow mask used in a color picture tube are made of a thin metal plate.
Manufacturing by a well-known photo-etching method is mainstream.

That is, a photosensitive resin (photoresist) is applied on a thin metal plate such as an iron alloy or copper to form a photoresist film, and then the photoresist film is patterned on the photoresist film via an exposure pattern mask having a predetermined pattern. Perform exposure. Next, the photoresist film is developed, hardened, and the like. As a result, a resist layer (etching-resistant layer) exposing the metal sheet is formed on the metal sheet according to a predetermined pattern.

[0004] Next, by using a ferric chloride solution or the like as an etchant and bringing the etchant into contact with the metal thin plate, etching is selectively performed on a portion of the metal thin plate exposed from the resist layer (etching resistant layer). A predetermined etching pattern is formed on the thin plate.

[0005] Next, a stripping solution such as an alkali solution is brought into contact with the etched metal thin plate, and then washed with water to remove the resist layer (etching-resistant layer) formed on the metal thin plate. Do.

Thereafter, using a mold or the like, the metal sheet is cut, unnecessary portions are removed, and the like, and an etched part (part manufactured by a photoetching method) is obtained. The manufacture of an etched component using a photoetching method includes at least the above-described steps.

[0007]

In the manufacture of the above-mentioned etching parts, as shown in FIG. 5, a long strip-shaped thin metal sheet 1 supplied from a take-up roll 15 is used as a material, and a transport roller 13 and the like are used. In many cases, a series of manufacturing steps are performed on the metal sheet 1 that is continuously conveyed in a belt shape on the conveyance means.

That is, an etching part is formed continuously on the long strip-shaped metal sheet 1, and thereafter, the long strip-shaped metal sheet 1 is cut into sheets, unnecessary portions are removed, etc. It is assumed that. By continuously forming the etching parts on the long strip-shaped thin metal plate 1, it is possible to increase the production efficiency.

However, when the thin metal sheet 1 is formed into a long strip shape, the thin metal sheet 1 may be divided, and two joints connecting the divided thin metal sheets 1 may be formed. The following examples can be given as factors that cause the metal sheet 1 to be divided and become a strip-shaped metal sheet 1 in which two seams are formed.

[0010] For example, when the take-up roll that has been supplying the thin metal sheet is completed, a new take-up roll is mounted, and the roll is supplied to the rear end of the previous thin metal sheet from the newly mounted take-up roll. In this case, the front end of the metal sheet is added. Also, when it is required to continuously form an etched part on a metal sheet having a width different from the width of the metal sheet used up to that time, cut the metal sheet used so far, etc. When connecting a new metal sheet of a different width to the rear end of the previous metal sheet,
Further, when the metal sheet is unexpectedly cut for some reason, connecting the cutting places is another factor.

In any case, a plurality of strip-shaped metal sheets are connected to each other to form a continuous strip-shaped metal sheet 1 and to manufacture etched parts continuously without stopping the manufacturing process. Becomes possible.

As shown in FIG. 3 (a), the end portions of the two metal sheets are connected to each other by overlapping the end portions of the metal sheets 1a and 1b. Or a metal sheet as shown in FIG. 3 (b).
There is a form in which a metal piece is inserted between 1a and 1b for connection. The metal piece inserted between the thin metal plates 1a and 1b may be referred to as a guide plate 6, and is made of a metal that is not dissolved and eroded by an etching solution during etching, for example, a titanium material.

Here, as shown in FIG. 3, when two strip-shaped metal thin plates are connected to each other and the seam 2 is formed on the long strip-shaped metal thin plate 1, the following inconvenience occurs.

That is, as described above, the metal sheet 1a,
In some cases, a metal piece is inserted between 1b to connect two metal sheets. This metal piece (hereinafter referred to as a guide plate 6)
For example, a titanium material is used as a metal that is not corroded by an etching solution during etching. However,
The guide plate 6 made of a titanium material or the like may be dissolved in a film removing solution such as an alkali solution used in the film removing step even if it is not eroded by the etching solution.

When the guide plate 6 is dissolved in a stripping solution such as an alkaline solution in the stripping step, the metal sheet is naturally cut at two joints. As a result, the manufacturing process is interrupted, and furthermore, the metal sheet becomes violent, and the etching part becomes defective due to contact with the transport roller or winding.

Further, there is another problem that a chemical solution or foreign matter adheres to the two joints and the chemical solution or foreign matter re-adheres to another thin metal plate portion, thereby causing a defect in an etched part.

It can be said that this problem tends to occur particularly in the step of removing the resist layer. That is, in the film removing step, the film removing liquid such as an alkali solution is brought into contact with the resist layer formed on the metal sheet by means such as immersing the metal sheet in a film removing tank having a film removing liquid such as an alkaline solution. Then, the resist layer is swelled and weakened, washed with water, and peeled off the swelled and weakened resist layer from the metal sheet. The resist layer is
The film is peeled off as a film piece from the metal sheet, and a minute resist layer piece of the film piece adheres to the joint 2 of the metal sheet.

The two joints are portions where the thin metal plates and the guide plate overlap each other, and have gaps and steps. Therefore, particularly, there are minute resist layer pieces and chemicals used in the process (for example, stripping film). It can be said that the liquid (liquid) easily adheres. When a small resist layer piece or a chemical solution used in the process (for example, a stripping solution) adheres to two joints, the small resist layer piece or the chemical solution can be removed by washing and washing the metal sheet after the film is stripped. Instead, it is transported as it is with the metal sheet.

As a means for removing water remaining on the surface of the metal sheet 1 after the metal sheet 1 is washed with water, there is a method of bringing a water-absorbing roll into contact with the surface of the metal sheet (hereinafter, the roll having the water absorbing property). Is referred to as a squeezing roll). When the fine resist layer piece is a foreign substance or a chemical liquid is attached to the joint 2 portion of the metal sheet 1, when the squeezing roll comes into contact with the metal sheet, the foreign substance or the chemical liquid is transferred to the squeezing roll, and further, Seam 2 via squeezing roll
It can be said that it re-adheres to a metal sheet part other than the part.

The strip-shaped metal sheet is transported on transport means such as transport rollers. For this reason, the foreign matter and the chemical liquid adhering to the joint portion 2 of the metal sheet 1 are reattached to the metal sheet portion other than the joint portion 2 even through the transport roller that comes into contact with the metal sheet.

When the resist layer pieces and the chemical solution are re-adhered to the metal thin plate, they cause deformation defects such as rust and scratches on the etched parts.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-described problems, and has as its object the use of a single long strip-shaped metal sheet by connecting a plurality of metal sheets to provide high quality without defects. It is an object of the present invention to provide a method of manufacturing an etched component that can obtain an etched component.

[0023]

Means for Solving the Problems The present inventors have made intensive studies to solve the above-mentioned problems, and have reached the present invention. That is, in order to achieve the above object in the present invention, first, in claim 1, a metal sheet conveyed in a belt shape is used as a raw material, and an opening that exposes the metal sheet according to a predetermined pattern is formed on the metal sheet. A method of manufacturing an etched component, comprising at least a step of forming a resist layer having, a step of performing etching on a metal sheet, and a step of removing the resist layer, wherein the metal sheet is divided and a seam connecting the divided portions is provided. When having an identification mark attached to the vicinity of the seam portion, further detecting means for detecting the identification mark conveyed with the metal sheet, and means for calculating the conveyance distance of the identification mark after detecting the identification mark The transfer distance calculating means recognizes the transfer position of the seam portion and changes the manufacturing conditions for the seam portion. It is obtained by the manufacturing method of etching parts that.

According to a second aspect of the present invention, when the seam portion is carried into the film-stripping step, the stripping condition for the seam portion is changed by means for controlling the film-stripping condition. Item 10 is a method for producing an etching component according to item 1.

Further, in the third aspect, there is provided means for changing a squeezing roll which comes into contact with the thin metal plate and removes moisture adhering to the surface of the thin metal plate. 3. The method of manufacturing an etched part according to claim 1, wherein a squeezing roll contacting with another metal sheet portion is separated from a squeezing roll contacting with another sheet metal part.

According to a fourth aspect of the present invention, there is provided a means for changing the conveying means, wherein the conveying means contacting the seam portion which has been carried out in the film removing step is different from the conveying means contacting another metal sheet portion. 3. A method according to claim 1, wherein
Or a method for manufacturing an etched part according to item 3.

According to a fifth aspect of the present invention, the identification mark is a color tape and the detection means is a color identification sensor. It is a manufacturing method.

[0028]

Embodiments of the present invention will be described below with reference to the drawings.

In the method of manufacturing an etched part according to the present invention, as described in the above section (prior art), an etched part is formed on a strip-shaped thin metal plate by a conventionally known photoetching method. .

Here, as a feature of the method for manufacturing an etched part of the present invention, when the metal sheet 1 is divided and has two seams connecting the cut parts, the two seams are recognized as shown in FIG. Identification mark 3 for seam 2
It is attached near the site. In FIG. 2, the ends of the metal sheets 1a and 1b are connected to each other.
In the embodiment shown in (b) in which the guide plate 6 is inserted between the thin metal plates 1a and 1b for connection, the identification mark 3 is attached near the joint 2 site.

Next, in the present invention, a detecting means 4 for detecting the identification mark 3 attached to the metal sheet 1 and then conveyed together with the metal sheet 1 is provided in the conveying path of the metal sheet 1.

When the detection means 4 detects the identification mark 3 on the metal sheet 1 to be conveyed, it sends a detection signal to the conveyance distance calculation means 5 (for example, an encoder) for calculating the conveyance distance of the identification mark 3. . The transport distance calculating means 5 that has received the detection signal calculates the transport distance of the identification mark 3 from the detecting means 4. For example, when the transport distance calculation means 5 is an encoder, the transport distance of the thin metal sheet 1 is converted into a rotation speed (pulse), and the arrival time until the set rotation speed is reached is measured. Means 4
To calculate the transport distance.

That is, based on the transport distance from the installation position of the detecting means 4, the transport distance calculating means 5 can recognize where the two joints are located in the manufacturing process. The means 5 outputs a control signal for changing a predetermined process at the stage when the two seams are carried into a predetermined process. It should be noted that once the detection is performed, the position of the two joints can be determined by the transport distance calculating means 5 later, so that the identification mark 3 may be peeled off together with the resist layer in the film removing step.

The difference in the form of the two seams, that is, whether the two seams are simply connecting the thin metal plates 1a and 1b or being connected via the guide plate 6 is identified as follows. The identification mark 3 to be attached can be changed according to the form of the joint 2 and the difference between the identification marks 3 can be detected by the detection means 4.

The installation position of the detecting means 4 may be any position after the place where the identification mark 3 is attached, and in this embodiment, it is provided before the etching step.

It is conceivable that the above-mentioned identification mark 3 is made of a metal piece having a different light reflectance, and the identification mark 3 is detected based on a difference in the light reflectance. However, the present inventors have found that the detecting means 4
As a result, the identification mark 3 is colored with a color material such as a colored tape such as red or blue (for example, manufactured by Nitto Denko Corporation). ,
If the detection means 4 is a color identification sensor (for example, a product name "Color mark sensor" manufactured by Izumi Electric Co., Ltd.), the detection can be reliably performed depending on the color difference and the degree of brightness. And propose this.

For example, in the present invention, as will be described later, the difference in the form of the two seams, that is, as shown in FIG.
The seam 2 connects the metal sheets 1 together, or
The processing in the film stripping process is changed depending on whether the connection is performed via the guide plate 6, but the difference in the form of the two joints can be easily identified by changing the color of the identification mark 3 to be attached. It is possible to make a distinction with a color identification sensor. For example, as shown in FIG. 3 (a), when the seam 2 is a connection of the thin metal plates 1a and 1b, a red color tape is pasted as the identification mark 3;
When the connection is made via the guide plate 6 as shown in (b), the identification mark 3 is detected by a color identification sensor by using a blue color tape or the like.
The difference in the color makes it possible to easily identify the difference in the form of the two joints.

In the present embodiment, when the two seams whose positions are recognized by the above-described means are carried into the film stripping step, the processing as shown in FIG. 1 is performed. In the present embodiment, as shown in FIG. 4, the metal sheet 1 is once wound up at a stage where a resist layer exposing the metal sheet is formed on the metal sheet 1 supplied from the winding roll 15 in accordance with a predetermined pattern. , And take-up roll 15 ',
The take-up roll 15 'is transported to the etching step, and the sheet metal 1 is supplied from the take-up roll 15' to the etching step.

The strip-shaped metal sheet 1 shown in FIG. 1 which is conveyed from left to right in the figure has been subjected to the etching process after being supplied from the winding roll 15 ', and has two joints. have. An identification mark 3 (trade name “Line Tape” manufactured by Nitto Denko Corporation) is attached near the two joints, and the color of the tape is changed according to the difference in form of the two joints. Further, the detecting means 4 (product name "Color mark sensor", manufactured by Izumi Electric Co., Ltd.) is installed before the etching step (part A in FIG. 4).
At the stage where the identification mark 3 attached to the joint 2 of the metal sheet 1 carried into the etching process is detected as shown in FIG. 2, a detection signal is sent to the transport distance calculating means 5 in FIG. is there.

Here, when the detection means 4 detects that the metal sheet 1 has the joint 2 and the joint 2 has the guide plate 6 by the detection of the identification mark 3, This is to change the conditions for removing the film at the two joints by means for changing the film conditions. That is, as described above, when the stripping solution is brought into contact with the guide plate 6, the guide plate 6 is dissolved. For this reason, the seam 2 having the guide plate 6
The conditions for removing the film on the portion are different from the conditions for removing the film on the thin metal plate portion other than the two joints. That is, in the present embodiment, as shown in FIG. 1 and the following description, the two seams having the guide plate 6 are prevented from coming into contact with the stripping solution.

In this embodiment, the film removing tank 8 having the film removing liquid 7 is used.
While the metal sheet 1 is being conveyed through the inside, when the joint 2 having the guide plate 6 is carried into the stripping tank 8, the control by the conveying distance calculating means 5 which recognizes the position of the joint 2 is performed. The supply pump 10 is operated by a signal, the film removing liquid 7 in the film removing tank 8 is returned to the film removing liquid supply tank 9, and the liquid level of the film removing liquid 7 in the film removing tank 8 is lowered. This prevents contact between the two portions of the joint having the guide plate 6 and the film removing liquid 7. When one metal sheet other than the two seams is carried into the stripping tank 8, the stripping solution 7 is supplied from the stripping solution supply tank 9 to the stripping tank 8 by the supply pump 10, and the stripping solution is supplied. The liquid level of the stripping solution 7 in the tank 8 is raised to a predetermined position, and the metal sheet 1 and the stripping solution 7 are brought into contact. In addition, when the form of the joint 2 is not connected by the guide plate 6 (the form of FIG. 3A), the joint of the joint 2 and the stripping solution 7 can be brought into contact with each other, or You don't have to.

Next, the resist layer which has come into contact with the stripping solution 7 and swelled and weakened is separated from the metal sheet 1 by spray cleaning in which water is sprayed from a spray nozzle 11. Then
In the present invention, as shown in FIG. 1, a squeezing roll 12 that comes into contact with the metal sheet 1 after spray cleaning and removes water remaining on the metal sheet 1 is provided with a squeezing roll 12a that comes into contact with two seams, and a seam. It is characterized in that it is distinguished from the drawing roll 12b which is in contact with one portion of the metal sheet other than the two portions.

That is, the metal sheet 1 other than the two seams
When the part is being conveyed, the squeezing roll 12b is brought into contact. Here, when the two seams are conveyed, the squeezing roll 12b is separated from the metal sheet as shown in FIG. 1, and the squeezing roll 12a is brought into contact with the metal sheet 1 instead. Next, when the two seams are conveyed from the squeezing roll 12, the squeezing roll 12a is separated from the sheet metal, and the squeezing roll 12b is brought into contact with the sheet metal 1 instead.

Thus, a squeezing roll is provided at the two seams.
12a comes into contact, and the drawing roll portion 12b comes into contact with one portion of the metal sheet other than the two seams. That is,
Foreign matter and chemicals adhering to the seam 2 portion are transferred to the squeezing roll 12a, but the squeezing roll 12a does not contact the metal sheet 1 other than the seam 2 portion. It is possible to prevent a foreign substance or a chemical solution from re-adhering to one site.

Next, the present invention is characterized in that the transporting means which comes into contact with the metal sheet 1 is classified into a transporting means which comes into contact with two portions of the seam and a transporting means which comes in contact with one portion of the metal sheet other than the two seams. And especially, squeezing roll 12
Subsequent transport means are distinguished.

That is, in the transport process after the squeezing roll 12, when the metal sheet 1 other than the two seams is transported, the metal sheet 1 is transported by the transport roller 13b.
Next, when the two seams are conveyed from the squeezing roll 12, the conveying roller 13a is raised. Since the joint 2 is lifted by the transport roller 13a and transported by the transport roller 13a, the transport roller 13b does not contact the joint 2 portion. Then
After the two seams have passed, the transport roller 13a is lowered, so that the one thin metal plate other than the two seams is transported by the transport rollers 13b.

As a result, the transport roller 13a comes into contact with the two seams, and the transport roller 13b comes into contact with one metal sheet other than the two seams. That is, the foreign matter and the chemical liquid attached to the joint 2 are transferred to the transport roller 13a, but the transport roller 13a does not come into contact with the metal sheet 1 other than the joint 2; It is possible to prevent a foreign substance or a chemical solution from re-adhering to one portion of the metal thin plate other than the portion. The pressing roller 14 in FIG. 1 is configured to move up and down in conjunction with the transport roller 13a to prevent the metal sheet 1 from meandering when the transport path is changed. Further, the above-described conveying means after the film removing step (squeezing roll 12)
It is desirable that the modification of 13 be performed up to the cutting step of the metal sheet 1 for the purpose of preventing the re-adhesion of foreign matter and the chemical solution to the metal sheet 1 part other than the joint 2 part.

As described above, the squeezing roll 12 to the two seams
The change of the transport means 13 is performed by a drive means (not shown) such as a separately provided motor by outputting a control signal from the transport distance calculating means 5 which recognizes the position of the two joints. In addition, foreign substances and chemicals are likely to adhere to the two joints.
Alternatively, the above-described change of the squeezing roll 12 and the conveying means 13 is performed at the joint 2 regardless of whether the connection is performed via the guide plate 6.

Next, in the present invention, the metal sheet 1 having been subjected to the film-stripping step is subjected to the same steps as in the prior art, such as cutting of the metal sheet and removal of unnecessary portions, using a mold, and etching parts are removed. What you get.

As described above, an example of the embodiment of the present invention has been described. However, the embodiment of the present invention is not limited to the above-described drawings and description, and various changes may be made based on the gist of the present invention. Needless to say, it does not matter.

For example, in the above description, the level of the stripping solution 7 in the stripping tank 8 is raised and lowered to prevent the stripping solution 7 from contacting the guide plate 6. Is sprayed onto the resist layer to perform the film removal, when the guide plate 6 is carried in, the spraying is interrupted to prevent the peeling liquid 7 from contacting the guide plate 6. No problem. Also,
It can be said that the installation location of the detection means 4 may be provided before the step of changing the desired condition. For this reason, for example, in the above description, the detecting means 4 is provided before the etching step, but the detecting means 4 may be provided before the film removing step. Further, in the above description, the manufacturing process is divided into the resist layer forming process and the etching process and thereafter, but the manufacturing process may be continuous as shown in FIG.

[0052]

According to the method of manufacturing an etched part of the present invention, even if metal sheets are connected by a guide plate so as to form a strip-shaped metal sheet, the metal sheet is melted by dissolving the guide plate in the film removing step. Can be prevented from being cut. Also, in the film removal process,
Dirt such as a resist layer piece and a chemical solution adhering to the seam of the strip-shaped metal sheet can be prevented from re-adhering to the metal sheet parts other than the seam. This makes it possible to obtain a high-quality etched part free of rust and deformation defects. Also,
As a further effect of the present invention, since the manufacturing conditions for the joint portion can be automatically changed, compared with the case where the manufacturing conditions for the joint portion are manually changed, there is no defect due to an operation error. This has the effect of improving the performance and saving labor and reducing the manufacturing cost.

[0053]

[Brief description of the drawings]

FIG. 1 is an explanatory view showing a main part of one embodiment of an etching part of the present invention.

FIG. 2 is an explanatory view showing another main part of one embodiment of the etching component of the present invention.

FIGS. 3A and 3B are explanatory diagrams showing examples of seams formed on a long strip-shaped thin metal plate.

FIG. 4 is an explanatory view showing one embodiment of the manufacturing process of the etching component of the present invention.

FIG. 5 is an explanatory view showing an example of a manufacturing process of an etching component.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Metal thin plate 2 Seam 3 Identification mark 4 Detecting means 5 Transport distance calculating means 6 Guide plate 7 Stripping liquid 8 Stripping tank 9 Supply tank 10 Supply pump 11 Spray nozzle 12 Squeeze roll 13 Transport roller 14 Pressing roller 15 Winding roll

Claims (5)

[Claims] A step of forming a resist layer having an opening exposing the metal sheet according to a predetermined pattern on the metal sheet using a metal sheet conveyed in a belt shape, and a step of etching the metal sheet. In the method of manufacturing an etched component having at least a step of stripping the resist layer, when the metal sheet is divided and has a joint connecting the divided portions, an identification mark is attached near the joint portion, A detecting means for detecting the identification mark conveyed together with the metal sheet, and a means for calculating the conveyance distance of the identification mark after detecting the identification mark,
A method for manufacturing an etched part, wherein the transfer distance calculating means recognizes a transfer position of the joint portion and changes manufacturing conditions for the joint portion. 2. The etching method according to claim 1, wherein when the joint portion is carried into a film removing step, the film removing condition for the joint portion is changed by means for controlling the film removing condition. The method of manufacturing the part. 3. A means for changing a squeezing roll which comes into contact with a sheet metal and removes moisture adhering to the surface of the sheet metal,
3. The squeezing roll that comes into contact with the seam portion after the rinsing and washing performed in the film removing step is separated from the squeezing roll that comes into contact with another metal sheet portion.
3. The method for producing an etched component according to claim 1. 4. A transporting means comprising means for changing a transporting means, wherein the transporting means which comes into contact with the seam portion which has been carried out in the film removing step,
4. The method for manufacturing an etched part according to claim 1, wherein the metal part is provided separately from a conveying means contacting the part. 5. The method according to claim 1, wherein the identification mark is a color tape, and the detection means is a color identification sensor.