JPH1099765A - Adjustment method of recovered cating liquid, adjusting device of recovered coating liquid and coating machine - Google Patents

Adjustment method of recovered cating liquid, adjusting device of recovered coating liquid and coating machine

Info

Publication number
JPH1099765A
JPH1099765A JP25599596A JP25599596A JPH1099765A JP H1099765 A JPH1099765 A JP H1099765A JP 25599596 A JP25599596 A JP 25599596A JP 25599596 A JP25599596 A JP 25599596A JP H1099765 A JPH1099765 A JP H1099765A
Authority
JP
Japan
Prior art keywords
coating liquid
coating
viscosity
liquid
recovered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25599596A
Other languages
Japanese (ja)
Inventor
Katsuoki Uesugi
勝興 上杉
Toshio Takeuchi
利雄 竹内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP25599596A priority Critical patent/JPH1099765A/en
Publication of JPH1099765A publication Critical patent/JPH1099765A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To adjust the change with time of physical properties of a recovered coating liq. and improve a reusing property by recovering a used coating liq. to mix with a previously prepared coating liq. and moreover controlling a concn. or viscosity of the mixed coating liq. in a prescribed value. SOLUTION: The coating liq. used at a coating machine 1 is collected to a tray 2 for recovering the coating liq., and the coating liq. is recovered from here to a mixing tank 5 provided with an agitator 4 by a piping 3, etc., and mixed with the coating liq. previously prepared in the mixing tank 5. A part of the mixed coating liq. 6 is circulated so that it may be returned to the mixing tank 5 via a flow passage 7 from the mixing tank 5. In the flow passage 7, the coating liq. 6 flows into a circulating pump on the way, then passes through a filter to remove a fine foreign matter in the coating liq. 6, then enters in a temp. correcting process viscometer 10 and viscosity is measured. Then a correcting liq. 11 low in viscosity is supplied to the mixing tank 5 till the viscosity reaches the prescribed value when the measured viscosity is larger than a prescribed value and stopped the supply at the point at which the viscosity reaches the prescribed value.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、カラーフィルタ作
製用塗液等の塗液のための回収塗液の調整方法、回収塗
液の調整装置及び塗工機に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for adjusting a recovered coating liquid for a coating liquid such as a coating liquid for producing a color filter, an apparatus for adjusting the recovered coating liquid, and a coating machine.

【0002】[0002]

【従来の技術】液晶セル用のカラーフィルタ等の微細な
パターンを着色塗液を用いた薄膜技術により形成する場
合、従来は着色塗液はスピンコート法により塗布するこ
とが行われていたが、この方法は塗布膜厚を均一に所要
通り制御できるが、塗液の大部分が飛散し、回収再使用
できないため塗液の利用率が悪いという難点があった。
これに対して、ロールコート法、バーコート法、リップ
コート法により塗布することも行われていたが、これら
の方法は塗液の利用率を上げることができるが、塗布作
業中に塗液の物性、特に溶剤の蒸発等によって濃度が経
時変化するという難点があった。このように一般に回収
塗液の再利用を考えた場合、回収塗液の濃度、粘度等の
物性の経時変化に対処することが必要である。
2. Description of the Related Art When a fine pattern such as a color filter for a liquid crystal cell is formed by a thin film technique using a colored coating solution, the colored coating solution has conventionally been applied by a spin coating method. This method can uniformly control the coating film thickness as required, but has the disadvantage that the coating liquid usage is poor because most of the coating liquid is scattered and cannot be recovered and reused.
On the other hand, application by a roll coating method, a bar coating method, and a lip coating method has also been performed, but these methods can increase the utilization rate of the coating liquid, but the coating liquid is applied during the coating operation. There was a drawback that the physical properties, particularly the concentration, changed with time due to evaporation of the solvent. As described above, when considering the reuse of the recovered coating solution, it is generally necessary to deal with a change with time of the physical properties such as the concentration and the viscosity of the recovered coating solution.

【0003】[0003]

【発明が解決しようとする課題】請求項1乃至2記載の
発明は、回収塗液の物性の経時変化を調整して塗液の再
利用性を向上させる回収塗液の調整方法を提供するもの
である。請求項3乃至5記載の発明は、上記の方法を実
現するための回収塗液の調整装置を提供するものであ
る。
SUMMARY OF THE INVENTION The invention according to claims 1 and 2 provides a method for adjusting a recovered coating liquid to improve the reusability of the coating liquid by adjusting the time-dependent changes in the physical properties of the recovered coating liquid. It is. The invention according to claims 3 to 5 provides an apparatus for adjusting a recovered coating liquid for realizing the above method.

【0004】[0004]

【課題を解決するための手段】本発明は、使用された塗
液を回収して予め用意された塗液と混合するようにし、
さらに、この混合された塗液の濃度又は粘度を所定値に
調整することを特徴とする回収塗液の調整方法に関す
る。本発明は、また、この回収塗液の調整方法におい
て、混合された塗液の濃度又は粘度の調整を、混合され
た塗液の一部を循環させ、循環路内で塗液の濃度又は粘
度を測定し、濃度又は粘度が所定の値になるように補正
液を上記の混合された塗液に混合することにより行う回
収塗液の調整方法に関する。本発明は、また、混合槽
(5)に使用された塗液を回収するための機構、混合槽
(5)内の塗液を循環するための流路(7)、流路
(7)内に設けられた循環ポンプ(8)及びプロセス粘
度計(10)、混合槽(5)に温度補正式プロセス粘度
計(10)と連動してその粘度計(10)により示され
る粘度が所定値になるように補正液を供給するための機
構を設けてなる回収塗液の調整装置に関する。
According to the present invention, a used coating solution is collected and mixed with a previously prepared coating solution.
Further, the present invention relates to a method for adjusting a recovered coating liquid, which comprises adjusting the concentration or viscosity of the mixed coating liquid to a predetermined value. The present invention also provides a method of adjusting the concentration or viscosity of the mixed coating liquid, in which the concentration or the viscosity of the mixed coating liquid is adjusted by circulating a part of the mixed coating liquid, and the concentration or viscosity of the coating liquid in the circulation path. The present invention relates to a method for adjusting a recovered coating liquid, which is performed by measuring the above-mentioned correction liquid and mixing the correction liquid with the above-mentioned mixed coating liquid so that the concentration or viscosity becomes a predetermined value. The present invention also provides a mechanism for collecting the coating liquid used in the mixing tank (5), a flow path (7) for circulating the coating liquid in the mixing tank (5), and a flow path (7). The viscosity indicated by the viscometer (10) in the mixing pump (8) and the process viscometer (10) in the mixing tank (5) is set to a predetermined value in conjunction with the temperature compensating process viscometer (10). The present invention relates to an apparatus for adjusting a recovered coating liquid provided with a mechanism for supplying a correction liquid.

【0005】本発明は、また、この回収塗液の調整装置
において、流路(7)内にさらに濾過器(9)を設けて
なる回収塗液の調整装置に関する。本発明は、さらに、
請求項3又は4記載の回収塗液の調整装置を備えて成る
塗工機に関する。
[0005] The present invention also relates to an apparatus for adjusting a recovered coating liquid, which further comprises a filter (9) in a flow path (7). The present invention further provides:
A coating machine comprising the apparatus for adjusting a recovered coating liquid according to claim 3 or 4.

【0006】[0006]

【発明の実施の形態】以下、本発明を図面を用いて説明
する。図1は本発明に係る回収塗液の調整装置を備えた
塗工機の一例を示す系統図である。図1において、塗工
機1で使用された塗液が塗液回収用トレイ2に集めら
れ、ここから配管3等により攪拌機4が備え付けられて
いる混合槽5に回収され、混合槽5内に予め用意されて
いる塗液と混合される。塗工機1で使用された塗液が塗
液回収用トレイ2に集められ、ここから配管3等により
混合槽5に回収される機構が、混合槽5に、使用された
塗液を回収するための機構の一例である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings. FIG. 1 is a system diagram showing an example of a coating machine provided with a recovery coating liquid adjusting device according to the present invention. In FIG. 1, a coating liquid used in a coating machine 1 is collected in a coating liquid collecting tray 2, and is collected by a pipe 3 or the like into a mixing tank 5 provided with a stirrer 4. It is mixed with a previously prepared coating liquid. A mechanism in which the coating liquid used in the coating machine 1 is collected in a coating liquid collecting tray 2 and collected in a mixing tank 5 by a pipe 3 or the like from the coating liquid collecting tray 2 collects the used coating liquid in the mixing tank 5. Is an example of a mechanism for this.

【0007】攪拌機4は適宜設けられるが、撹拌機4で
混合槽5内の塗液6を常に攪拌していることが好まし
い。これは、混合槽5内に予め用意された塗液と塗液を
回収するための機構から送られてくる濃度、粘度等が変
化した回収塗液、さらに調整のために加えられる補正液
を速やかに混合均一化するためである。
Although the stirrer 4 is appropriately provided, it is preferable that the stirrer 4 constantly stirs the coating liquid 6 in the mixing tank 5. This is because the coating liquid prepared in advance in the mixing tank 5 and the recovered coating liquid whose concentration, viscosity, etc. are changed from the mechanism for recovering the coating liquid, and the correction liquid added for adjustment can be quickly changed. This is for uniform mixing.

【0008】塗液6の一部は混合槽5から流路7を経由
して混合槽5に戻るように循環させられる。流路7にお
いて、塗液6は、その途中にある循環ポンプ8に流入
し、次いで濾過器9を通過し、ここで塗液中の微細な異
物が除去されのち、温度補正式プロセス粘度計10に入
り、粘度が測定される。ここで、濾過器9の設置は好ま
しい態様である。流路7はパイプ等の配管により形成さ
れる。
A part of the coating liquid 6 is circulated from the mixing tank 5 to return to the mixing tank 5 via the flow path 7. In the flow path 7, the coating liquid 6 flows into a circulation pump 8 in the middle thereof, and then passes through a filter 9, where fine foreign substances in the coating liquid are removed. And the viscosity is measured. Here, the installation of the filter 9 is a preferable embodiment. The flow path 7 is formed by a pipe such as a pipe.

【0009】プロセス粘度計10は、ここで測られた粘
度が所定値と異なる時は、塗工機1等の塗液が使用され
るべき場所に供給されるべき塗液の粘度より低い粘度又
は高い粘度の補正液を混合槽5に供給して所定の粘度に
なるようにするための機構と連動するようになってい
る。すなわち、プロセス粘度計10により測定される粘
度が所定値より大きい場合は、所定値に達するまで上記
粘度が低い補正液が混合槽5に供給され、所定値に達し
た時点でその供給が停止される。このような補正液は、
塗液の溶剤のみでも良く、溶剤以外の組成は塗工機1等
の塗液が使用されるべき場所に供給されるべき塗液にお
ける組成と同じであって、全体の濃度が小さい又は大き
いものであっても良く、塗工機1等の塗液が使用される
べき場所で或る成分のみが特に消費又は散逸する場合
は、その成分のみが大きめの濃度とされていてもよい。
このようにして、循環流路における粘度の管理により、
塗液の濃度又は粘度の管理を行うことができる。また、
プロセス粘度計10としては、温度補正式プロセス粘度
計が好ましい。また、プロセス粘度計の代わりに濃度の
測定装置等を設置してもよい。
When the viscosity measured here is different from a predetermined value, the process viscometer 10 determines whether the viscosity is lower than the viscosity of the coating liquid to be supplied to the place where the coating liquid is to be used, such as the coating machine 1 or the like. A mechanism for supplying a high-viscosity correction liquid to the mixing tank 5 to have a predetermined viscosity is interlocked. That is, when the viscosity measured by the process viscometer 10 is larger than a predetermined value, the correction liquid having the low viscosity is supplied to the mixing tank 5 until the viscosity reaches the predetermined value, and when the correction liquid reaches the predetermined value, the supply is stopped. You. Such a correction fluid is
Only the solvent of the coating liquid may be used, and the composition other than the solvent is the same as the composition of the coating liquid to be supplied to the place where the coating liquid is to be used, such as the coating machine 1, and has a small or large overall concentration. When only a certain component is particularly consumed or dissipated in a place where the coating liquid is to be used, such as the coating machine 1, only the component may have a higher concentration.
In this way, by controlling the viscosity in the circulation channel,
The concentration or viscosity of the coating liquid can be controlled. Also,
As the process viscometer 10, a temperature correction type process viscometer is preferable. Further, a concentration measuring device or the like may be provided instead of the process viscometer.

【0010】補正液を混合槽5に供給するための機構の
具体例は、補正液11の貯槽12とこの貯槽12から補
正液11が混合槽5に供給されるのを直接制御する滴下
バルブ13及び配管14である。
A specific example of a mechanism for supplying the correction liquid to the mixing tank 5 is a storage tank 12 for the correction liquid 11 and a drip valve 13 for directly controlling the supply of the correction liquid 11 from the storage tank 12 to the mixing tank 5. And piping 14.

【0011】プロセス粘度計10と滴下バルブ13と
は、プロセス粘度計10により検知された粘度に関する
値を比較する制御系を介しこれから発せられる制御信号
によりにより滴下バルブ13の開閉が行われるように連
動する。具体的には、プロセス粘度計10における測定
値は、制御装置15に伝えられ、ここで、所定値との大
小の比較が行われ、測定値が所定値より大きい又は小さ
い場合、制御装置からバルブ開放の信号が滴下バルブ1
3に伝えられ、この結果、滴下バルブ13が開放されて
貯槽12内の補正液11が混合槽5内に導入され、プロ
セス粘度計10における測定値が所定値に達したならば
滴下バルブ13が閉じられ、補正液11の混合槽5への
導入が停止される。制御装置15は、プロセス粘度計1
0に温度センサ16が備え付けられている。制御装置1
5は、プロセス粘度計10から送られてくる温度及び粘
度の測定値(例えば、電圧値)を比較するための値に変
換する変換器、及び変換器で生成された値と所定の値を
比較し、滴下バルブ13を開閉する信号を生成する調節
器から成るようにしてもよい。この間、変換器で生成さ
れる粘度の値は塗液6の温度を例えば、25℃に補正し
た値にされる。制御装置は一つのコンピュータであって
もよい。滴下バルブ12の開閉は、一例として、30秒
だけ開き、その後5分間閉まっている状態をくり返して
行われ、この間に塗液6の粘度が所要の値になればこの
動作を停止し、閉鎖されたままにされる。
The process viscometer 10 and the drip valve 13 are linked so that the drip valve 13 is opened and closed by a control signal issued from a control system for comparing the values related to the viscosity detected by the process viscometer 10. I do. Specifically, the measured value of the process viscometer 10 is transmitted to the control device 15, where a magnitude comparison with a predetermined value is performed. When the measured value is larger or smaller than the predetermined value, the valve is transmitted from the control device to the valve. Open signal is dripping valve 1
3, the dropping valve 13 is opened, the correction liquid 11 in the storage tank 12 is introduced into the mixing tank 5, and when the measured value in the process viscometer 10 reaches a predetermined value, the dropping valve 13 is opened. It is closed, and the introduction of the correction liquid 11 into the mixing tank 5 is stopped. The control device 15 controls the process viscometer 1
0 is provided with a temperature sensor 16. Control device 1
5 is a converter for converting measured values of temperature and viscosity (for example, voltage value) sent from the process viscometer 10 into values for comparison, and comparing a value generated by the converter with a predetermined value. Alternatively, a controller for generating a signal for opening and closing the drip valve 13 may be provided. During this time, the value of the viscosity generated by the converter is a value obtained by correcting the temperature of the coating liquid 6 to, for example, 25 ° C. The control device may be one computer. The opening and closing of the drip valve 12 is performed, for example, by repeating the state of opening for 30 seconds and then closing for 5 minutes. During this time, if the viscosity of the coating liquid 6 reaches a required value, this operation is stopped and closed. Be left alone.

【0012】混合槽5には、さらに液面計17が設置さ
れていてもよい。また、混合槽5及び温度補正式プロセ
ス粘度計10には、塗液が所定温度になるように温度制
御装置(冷却装置、加熱装置又は加熱・冷却装置)を備
えていることが好ましい。混合槽5には、さらに、塗液
を再利用するために、塗工機1等の塗液が使用されるべ
き場所に供給するため、バルブ18及び供給ポンプ19
が適宜備え付けられた配管20が設置されていることが
好ましい。
The mixing tank 5 may further be provided with a liquid level gauge 17. Further, it is preferable that the mixing tank 5 and the temperature-correcting process viscometer 10 include a temperature control device (cooling device, heating device, or heating / cooling device) so that the coating liquid has a predetermined temperature. The mixing tank 5 further includes a valve 18 and a supply pump 19 for supplying a coating liquid such as the coating machine 1 to a place where the coating liquid is to be used in order to reuse the coating liquid.
It is preferable that a pipe 20 appropriately provided is installed.

【0013】[0013]

【作用】上記構成によれば、塗工機等から回収した塗液
の濃度又は粘度を、温度補正式プロセス粘度計等の計測
器とこれと連動する補正液の供給機構により、塗液の濃
度又は粘度の変化に対して補正液を滴下バルブを開いて
間欠的に又は連続的に塗液に導入することにより塗液の
濃度又は粘度を常に所要の値に保持することができ、さ
らに、使用済み塗液を取りかえることなく回収再使用で
き、その結果、塗液の利用率が大幅に向上する。
According to the above construction, the concentration or viscosity of the coating liquid recovered from the coating machine or the like is measured by a measuring instrument such as a temperature correction type process viscometer and a correction liquid supply mechanism interlocked with the measuring instrument. Alternatively, the concentration or viscosity of the coating liquid can be constantly maintained at a required value by opening the valve for dropping the correction liquid intermittently or continuously with respect to the change in viscosity, thereby enabling the use of the correction liquid. The used coating solution can be collected and reused without being replaced, and as a result, the usage rate of the coating solution is greatly improved.

【0014】[0014]

【実施例】図1に示す装置(プロセス粘度計10として
は、温度補正式プロセス粘度計を使用した)を用い、塗
液としてカラフィルター作製用感光液からなる塗液を用
いて本発明を実施した場合の例を示す。 混合槽5内の液量:2400ml 流路7での塗液循環量:1000ml/分 塗工機1への塗液の供給量:180ml/分 塗工機1から混合槽5への塗液の回収量:179ml/分 混合槽5内の塗液の初期粘度:25.0mPa・s(25℃
補正値) 補正液(濃度以外は上記塗液と同じ組成)の粘度:20
mPa・s(25℃補正値) として、実施したところ、塗工機1から混合槽5への回
収塗液の粘度は、25.05mPa・s(25℃補正値)で
あった。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention is practiced by using an apparatus shown in FIG. 1 (a temperature-correcting process viscometer is used as the process viscometer 10) and using a coating liquid composed of a photosensitive liquid for producing a color filter as a coating liquid. Here is an example of the case. Liquid amount in the mixing tank 5: 2400 ml Circulating amount of the coating liquid in the flow path 7: 1000 ml / min Supply amount of the coating liquid to the coating machine 1: 180 ml / min Coating liquid from the coating machine 1 to the mixing tank 5 Recovery amount: 179 ml / min Initial viscosity of the coating liquid in the mixing tank 5: 25.0 mPa · s (25 ° C.
Correction value) Viscosity of correction liquid (same composition as the above coating liquid except concentration): 20
As a result, the viscosity of the recovered coating liquid from the coating machine 1 to the mixing tank 5 was 25.05 mPa · s (corrected at 25 ° C.).

【0015】この回収塗液を混合槽5に回収し続けて、
補正液の導入をしない場合、混合槽5内の塗液の粘度は
1時間後25.2mPa・s(25℃補正値)に上昇した。
しかし、温度補正式プロセス粘度計で検知される粘度が
25.1mPa・s(25℃補正値)に達したときに、補正
液を30秒で10ml混合層に導入し、この後5分間停止
する状態をくり返し、温度補正式プロセス粘度計で検知
される粘度が混合槽5内の塗液の粘度が25.0mPa・s
(25℃補正値)になれば補正液の導入を完全に停止す
るようにしたところ、塗液の粘度を常に25.0mPa・s
(25℃補正値)と25.1mPa・s(25℃補正値)の
間に制御することができた。
The collected coating liquid is continuously collected in the mixing tank 5,
When the correction liquid was not introduced, the viscosity of the coating liquid in the mixing tank 5 increased to 25.2 mPa · s (25 ° C. correction value) after one hour.
However, when the viscosity detected by the temperature correction type process viscometer reaches 25.1 mPa · s (correction value at 25 ° C.), the correction liquid is introduced into the 10 ml mixed layer in 30 seconds, and then stopped for 5 minutes. The state is repeated, and the viscosity detected by the temperature correction type process viscometer indicates that the viscosity of the coating liquid in the mixing tank 5 is 25.0 mPa · s.
(25 ° C correction value), when the introduction of the correction liquid was completely stopped, the viscosity of the coating liquid was always 25.0 mPa · s.
(25 ° C. correction value) and 25.1 mPa · s (25 ° C. correction value).

【0016】[0016]

【発明の効果】請求項1乃至2における回収塗液の調整
方法により、塗液の物性を容易に一定に調整することが
でき、塗液の利用率を顕著に向上させることができる。
請求項3乃至4における回収塗液の調整装置により、作
業性、操作性よく、上記の効果を達成することができ
る。請求工5における塗工機により、塗液の利用率を向
上させた上で、基材に対して常に均一は膜厚の塗膜を形
成することができる。
According to the method for adjusting the recovered coating liquid according to claims 1 and 2, the physical properties of the coating liquid can be easily adjusted to be constant, and the utilization rate of the coating liquid can be remarkably improved.
The above effects can be achieved with good workability and operability by the recovery coating liquid adjusting device according to claims 3 and 4. With the coating machine in claim 5, it is possible to form a coating film having a uniform thickness on the base material while improving the utilization rate of the coating liquid.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明における回収塗液の調整装置を備えた塗
工機の一例を示す系統図である。
FIG. 1 is a system diagram showing an example of a coating machine provided with a recovery coating liquid adjusting device according to the present invention.

【符号の説明】[Explanation of symbols]

1 塗工機 2 塗液回収トレイ 3 配管 4 撹拌機 5 混合槽 6 塗液 7 流路 8 循環ポンプ 9 濾過器 10 温度補正式プロセス粘度計 11 補正液 12 貯槽 13 滴下バルブ 14 配管 15 制御装置 16 温度センサ 17 液面計 18 バルブ 19 塗液供給ポンプ 20 配管 DESCRIPTION OF SYMBOLS 1 Coating machine 2 Coating liquid collection tray 3 Pipe 4 Stirrer 5 Mixing tank 6 Coating liquid 7 Flow path 8 Circulation pump 9 Filter 10 Temperature correction type process viscometer 11 Correction liquid 12 Storage tank 13 Drop valve 14 Pipe 15 Control device 16 Temperature sensor 17 Level gauge 18 Valve 19 Coating liquid supply pump 20 Piping

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 使用された塗液を回収して予め用意され
た塗液と混合するようにし、さらに、この混合された塗
液の濃度又は粘度を所定値に調整することを特徴とする
回収塗液の調整方法。
1. A collection method comprising: collecting a used coating solution and mixing it with a previously prepared coating solution; and adjusting the concentration or viscosity of the mixed coating solution to a predetermined value. How to adjust the coating liquid.
【請求項2】 混合された塗液の濃度又は粘度の調整
を、混合された塗液の一部を循環させ、循環路内で塗液
の濃度又は粘度を測定し、濃度又は粘度が所定の値にな
るように補正液を上記の混合された塗液に混合すること
により行う請求項1記載の回収塗液の調整方法。
2. The concentration or viscosity of the mixed coating liquid is adjusted by circulating a part of the mixed coating liquid and measuring the concentration or viscosity of the coating liquid in a circulation path. The method for adjusting a recovered coating liquid according to claim 1, wherein the method is performed by mixing a correction liquid with the mixed coating liquid so as to obtain a value.
【請求項3】 混合槽(5)に使用された塗液を回収す
るための機構、混合槽(5)内の塗液を循環するための
流路(7)、流路(7)内に設けられた循環ポンプ
(8)及びプロセス粘度計(10)、混合槽(5)に温
度補正式プロセス粘度計(10)と連動してその粘度計
(10)により示される粘度が所定値になるように補正
液を供給するための機構を設けてなる回収塗液の調整装
置。
3. A mechanism for collecting the coating liquid used in the mixing tank (5), a channel (7) for circulating the coating liquid in the mixing tank (5), and a In the provided circulation pump (8), process viscometer (10), and mixing tank (5), the viscosity indicated by the viscometer (10) becomes a predetermined value in conjunction with the temperature-correcting process viscometer (10). For adjusting the recovered coating liquid provided with a mechanism for supplying the correction liquid.
【請求項4】 流路(7)内にさらに濾過器(9)を設
けてなる請求項3記載の回収塗液の調整装置。
4. The apparatus for adjusting a recovered coating liquid according to claim 3, wherein a filter (9) is further provided in the flow path (7).
【請求項5】 請求項3又は4記載の回収塗液の調整装
置を備えて成る塗工機。
5. A coating machine comprising the apparatus for adjusting a recovered coating liquid according to claim 3 or 4.
JP25599596A 1996-09-27 1996-09-27 Adjustment method of recovered cating liquid, adjusting device of recovered coating liquid and coating machine Pending JPH1099765A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25599596A JPH1099765A (en) 1996-09-27 1996-09-27 Adjustment method of recovered cating liquid, adjusting device of recovered coating liquid and coating machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25599596A JPH1099765A (en) 1996-09-27 1996-09-27 Adjustment method of recovered cating liquid, adjusting device of recovered coating liquid and coating machine

Publications (1)

Publication Number Publication Date
JPH1099765A true JPH1099765A (en) 1998-04-21

Family

ID=17286446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25599596A Pending JPH1099765A (en) 1996-09-27 1996-09-27 Adjustment method of recovered cating liquid, adjusting device of recovered coating liquid and coating machine

Country Status (1)

Country Link
JP (1) JPH1099765A (en)

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US6517979B1 (en) * 1998-12-28 2003-02-11 Canon Kk Coating method, coating system, method of manufacturing color filter substrate employing the coating method, and liquid crystal display device employing the color filter substrate manufactured in accordance with the coating method
JP2007048870A (en) * 2005-08-09 2007-02-22 Tokyo Electron Ltd Coating treatment apparatus, coating treatment method, and computer readable storage medium
JP2007103895A (en) * 2005-09-06 2007-04-19 Tokyo Ohka Kogyo Co Ltd Resist liquid feeder and reforming kit for obtaining the same
JP2010192920A (en) * 2010-04-12 2010-09-02 Tokyo Electron Ltd Coating processor
CN103480542A (en) * 2013-09-30 2014-01-01 昆山乐凯锦富光电科技有限公司 Feed system for producing optical film
KR101451892B1 (en) * 2013-03-26 2014-10-16 (주)마스터코리아 flow coating device
CN104907230A (en) * 2015-05-15 2015-09-16 中航复合材料有限责任公司 Glue liquid circulation system used for honeycomb glue coating process
GB2500162B (en) * 2011-01-14 2020-04-08 Newlife Paints Ltd Method for manufacturing emulsion paint

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6517979B1 (en) * 1998-12-28 2003-02-11 Canon Kk Coating method, coating system, method of manufacturing color filter substrate employing the coating method, and liquid crystal display device employing the color filter substrate manufactured in accordance with the coating method
JP2007048870A (en) * 2005-08-09 2007-02-22 Tokyo Electron Ltd Coating treatment apparatus, coating treatment method, and computer readable storage medium
JP2007103895A (en) * 2005-09-06 2007-04-19 Tokyo Ohka Kogyo Co Ltd Resist liquid feeder and reforming kit for obtaining the same
JP2010192920A (en) * 2010-04-12 2010-09-02 Tokyo Electron Ltd Coating processor
GB2500162B (en) * 2011-01-14 2020-04-08 Newlife Paints Ltd Method for manufacturing emulsion paint
KR101451892B1 (en) * 2013-03-26 2014-10-16 (주)마스터코리아 flow coating device
CN103480542A (en) * 2013-09-30 2014-01-01 昆山乐凯锦富光电科技有限公司 Feed system for producing optical film
CN104907230A (en) * 2015-05-15 2015-09-16 中航复合材料有限责任公司 Glue liquid circulation system used for honeycomb glue coating process

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