JPH109872A - Angular velocity sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To detect rotational angular velocity with high accuracy even if an excitation phase is rotated by θ deg.. SOLUTION: Excitation electrodes 5-1 to 5-8 are formed to the leg parts 4-1, 4-2 of an H-shaped vibrator element 4, electrodes 6-1 to 6-4 for detecting excitation amplitude in an X-axis direction are formed to a leg part 4-3 and electrodes 7-1 to 7-4 for detecting angular velocity are formed to a leg part 4-4. The amplitude of the excitation vibration signal (e) applied to the excitation electrodes 5-1 to 5-8 is adjusted so that the excitation amplitude in the X-axis direction detected by the electrodes 6-1 to 6-4 becomes a predetermined constant value.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of applying an AC voltage (excitation vibration signal) to an excitation electrode when the vibrator is excited in an X-axis direction or a Z-axis direction. The present invention relates to an angular velocity sensor for detecting a rotational angular velocity acting around a sensor based on an amount of electric charge generated at an electrode for detecting an angular velocity.

[0002]

2. Description of the Related Art A vibrator vibrating along a predetermined direction,
For example, when a vibrator vibrating along the X axis in the orthogonal coordinate axis plane (XY plane) rotates around the Y axis, a Coriolis force is applied to the vibrator in the Z axis direction (perpendicular to the XY plane). Occurs. Since this Coriolis force is determined in proportion to the magnitude of the angular velocity, if the Coriolis force is directly measured as the amount of deflection displacement of the vibrator, directly by the piezoelectric effect of the piezoelectric element, capacitance change, etc. The magnitude of the rotational angular velocity acting around the child in the Y-axis direction can be obtained. For this reason, a vibrating vibrator is mounted on a vehicle, an aircraft, or the like as an angular velocity detecting element, and its running or flight trajectory is recorded, and yaw rate generated at the time of turning is detected. In addition, this angular velocity detection element is mounted on a robot,
It is also applied to such attitude control.

FIG. 6 shows a conventional "cantilever" using quartz.
FIG. 3 is a diagram showing a main part of the angular velocity sensor of FIG. In the figure,
6A is a plan view, FIG. 6B is a view of FIG. 6A viewed from a direction A, FIG. 6C is a view of FIG. 6A as viewed from a direction B, and FIG. 6D is a view of FIG. FIG. 5 is a diagram viewed from a direction C. In the figure,
Reference numeral 1 denotes a vibrator element (quartz plate), 2-1 to 2-4 denote excitation electrodes (excitation electrodes), 3-1 to 3-4 denote angular velocity detection electrodes (detection electrodes), and an excitation electrode 2 -1 to 2-4 are on the upper, lower, left and right surfaces of one end 1-1 of the vibrator element 1, and the detection electrodes 3-1 to 3-4 are the other end 1-2 of the vibrator element 1.
Are provided on the left and right surfaces. In this figure, the other end 1-2 of the transducer element 1 is a base end (fixed end).

[0004] In this angular velocity sensor, FIG.
As shown in FIG. 3, the excitation electrodes 2-1 and 2-3 are connected to the terminal P
1, the excitation electrodes 2-2 and 2-4 are commonly connected to a terminal P2, and an AC voltage (excitation vibration signal) e is applied between the terminals P1 and P2. For this reason, at one time, an electric field is generated as shown by an arrow in FIG. 6B, and then an electric field in the opposite direction is generated, so that one end 1-1 of the vibrator element 1 vibrates left and right. I do.

Here, the vibration direction (excitation direction) of the vibrator element 1 is the X-axis direction, and the direction (longitudinal direction of the vibrator element 1) in FIG. When the axial direction, that is, the direction perpendicular to the XY plane (perpendicular to the plate surface of the transducer element 1) is the Z-axis direction, when the rotational angular velocity acts around the Y-axis direction,
Is rotated about the Y-axis, a Z-axis vibration component is generated by Coriolis force. Since the magnitude of this vibration component is proportional to the Coriolis force, the other end 1-
2, a pole charge corresponding to the direction of vibration is generated with a magnitude proportional to the rotational angular velocity.

As a result, as shown in FIG. 6C, a terminal P which connects the detection electrodes 3-1 and 3-4 in common is provided.
3 and a terminal P4 commonly connecting the detection electrodes 3-2 and 3-3, an electric charge is generated in the direction of the arrow at one time and then in the opposite direction, and a voltage signal corresponding to the Coriolis force is generated. e _s is obtained. The magnitude of the voltage signal e _s, it is possible to know the magnitude of the rotational angular velocity acting about the Y-axis direction. The voltage signal e _s is basically obtained as a sine curve, and the waveform of the voltage signal e _s and the excitation vibration signal e
By comparing the phase with the waveform (excitation waveform), the direction of the rotational angular velocity can be known based on the lead and lag of the phase.

The amplitude of the excitation vibration signal e applied between the terminals P1 and P2 is kept constant by a temperature compensating circuit (not shown) even if the various constants and the vibration mode of the element change due to a temperature change. The amplitude is kept. Further, in response to the excitation vibration signal e applied between the terminals P1 and P2, the terminals P3 and P
4 and the voltage signal e _s obtained between them is extremely small.

[0008]

However, in such a conventional angular velocity sensor, it is sufficient to generate an excitation vibration parallel to the X-axis direction. However, due to the relation between mass balance and two vibration modes generated in the manufacturing process. Due to (degeneration phenomenon), the vibrator element 1 (hereinafter, collectively referred to as a vibrator) including the excitation electrode 2 and the detection electrode 3 vibrates in a direction inclined with respect to the X-axis direction.

That is, vibrations due to manufacturing technical reasons such as electrode arrangement (accuracy: position, size, amount of formation), element shape (processing accuracy: etching, machining), crystal structure, crystal defects (impurities, etc.). Imbalance of child mass, 2
Due to the degeneration phenomenon of the vibration system due to approximation of the directional vibration frequency, the vibration direction of the vibrator shifts by θ ゜ with respect to the X-axis direction as shown in FIG. It is known that the deviation in the vibration direction (rotation of the excitation phase) also fluctuates due to a temperature change. This phenomenon is called "vibration leakage". Due to the rotation of the excitation phase, the amount of charge generated in the Z-axis direction of the vibrator changes irrespective of the Coriolis force, and an error occurs in the detected rotational angular velocity.

FIG. 8 shows a situation where an error occurs in the rotational angular velocity.
This will be described with reference to FIG. Now, as an ideal state, it is assumed that the vibrator is vibrating in the X-axis direction. In this case, the vibrator vibrates in the X-axis direction (θ = 0 °) with its amplitude being W1. At this time, when the rotational angular velocity ω1 acts around the Y-axis direction of the vibrator, Coriolis force F1 is generated on the vibrator in the Z-axis direction by the rotational angular velocity ω1. The Coriolis force F1 is proportional to the rotational angular velocity ω1, and the rotational angular velocity ω1 can be detected from the Coriolis force F1.

On the other hand, if the excitation phase is rotated by θ °, that is, if the vibrator is vibrating by θ ° with respect to the X-axis direction with its amplitude being W2, the vibrator in the Y-axis direction When the rotational angular velocity ω2 acts around, a Coriolis force F2 is generated in a direction shifted by θ ゜ from the Z-axis direction. In addition,
Here, for easy understanding, W1 = W2, F1 = F2,
Let ω1 = ω2. In this case, the Coriolis force F2 ′ acting in the Z-axis direction is F2 ′ = F2 · cos θ, which is smaller than the original Coriolis force F2 (= F1). The rotational angular velocity ω2 ′ detected from the Coriolis force F2 ′
Is the rotational angular velocity ω1 detected from the Coriolis force F1,
That is, it becomes smaller than the true rotational angular velocity ω2.

The present invention has been made in order to solve such a problem, and an object of the present invention is to be able to detect a rotational angular velocity with high accuracy even when the excitation phase is rotating by θ ゜. It is to provide an angular velocity sensor.

[0013]

In order to achieve such an object, a first invention (an invention according to claim 1) provides an amplitude for detecting an excitation amplitude of a vibrator in the X-axis direction by a detection arm. The magnitude of the AC voltage applied to the excitation electrode so that the excitation amplitude in the X-axis direction becomes a predetermined value based on the detection means and the excitation amplitude in the X-axis direction detected by the amplitude detection means. And amplitude adjustment means for adjusting the amplitude. According to the present invention, the excitation amplitude of the vibrator in the X-axis direction is detected by the detection-side arm, and the AC applied to the excitation electrode is set so that the excitation amplitude in the X-axis direction has a predetermined value. The magnitude of the voltage (the amplitude of the excitation vibration signal) is adjusted.

According to a second invention (an invention according to claim 2), an amplitude detecting means for detecting an excitation amplitude of a vibrator in a Z-axis direction by a detection-side arm, and in an Z-axis direction detected by the amplitude detecting means. And an amplitude adjusting means for adjusting the magnitude of the AC voltage applied to the excitation electrode so that the excitation amplitude in the Z-axis direction is set to a predetermined value based on the excitation amplitude. According to the present invention, the detection side arm uses the oscillator Z
The amplitude of the excitation in the axial direction is detected, and the magnitude of the AC voltage (the amplitude of the excitation vibration signal) applied to the excitation electrode is adjusted so that the excitation amplitude in the Z-axis direction has a predetermined value. You.

[0015] The third invention (the invention according to claim 3) is the first invention.
In the invention or the second invention, the vibrator element is an H-type vibrator element, and excitation electrodes are formed on first and second legs opposed to each other across the first space of the H-type vibrator element, Second
An electrode for detecting angular velocity is formed on one of the third and fourth legs facing each other across the space, and an electrode for detecting the excitation amplitude is formed on the other of the third and fourth legs. is there.
According to the present invention, the excitation amplitude in the X-axis direction or the Z-axis direction of the vibrator is detected using the detection electrode formed on the other of the third and fourth legs, and the X-axis direction or the Z-axis is detected. The magnitude of the AC voltage (amplitude of the excitation vibration signal) applied to the excitation electrodes formed on the first and second legs is adjusted so that the excitation amplitude in the direction becomes a predetermined value. .

The fourth invention (the invention according to claim 4) is the first invention.
In the invention or the second invention, the vibrator element is an H-type vibrator element, and excitation electrodes are formed on first and second legs opposed to each other across the first space of the H-type vibrator element, Second
An electrode for detecting an angular velocity and an electrode for detecting an excitation amplitude are formed in the third and fourth legs opposed to each other across the space. According to the present invention, the excitation amplitude in the X-axis direction or the Z-axis direction of the vibrator is detected by using the detection electrodes formed on the third and fourth legs in combination with the electrodes for detecting the angular velocity, The first and second excitation amplitudes are set so that the excitation amplitude in the X-axis direction or the Z-axis direction becomes a predetermined value.
The magnitude of the AC voltage (amplitude of the excitation vibration signal) applied to the excitation electrodes formed on the legs of is adjusted.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail for the case of excitation in the X-axis direction and detection in the Z-axis direction based on the embodiments. FIG. 1 is a diagram showing a main part of an angular velocity sensor showing one embodiment of the present invention. In the same figure, (a) is a perspective view, (b) is a view of FIG. (A) viewed from a direction A, and (c) is a view of FIG. (A) viewed from a direction B. In FIG.
4 is an H-type vibrator element (H-type quartz plate), 5-1 to 5-8 are excitation electrodes, and 6-1 to 6-4 are electrodes for detecting the excitation amplitude of the vibrator element 4 in the X-axis direction ( Detection electrodes), 7-1 to 7-4
Is an electrode (detection electrode) for detecting angular velocity acting around the Y-axis direction of the vibrator element 4.

As shown in FIG. 1A, the vibrator element 4 has first legs 4-1 and 4-2 opposed to each other across a first space 4-5, and a second leg 4-2. It has third legs 4-3 and 4-4 opposed to each other with the space 4-6 interposed therebetween. Excitation electrodes 5 are provided on the front and back surfaces and the left and right surfaces of the tip of the first leg 4-1.
Excitation electrodes 5-5 to 5-8 are provided on the front and back surfaces and left and right surfaces of the tip of the second leg 4-2, and the third leg 4-3 is provided on the left and right surfaces.
The electrodes 6-1 to 6-4 for detecting the excitation amplitude in the X-axis direction are provided on the front and back surfaces and the left and right surfaces of the tip of the fourth leg portion 4-4. -1 to 7-4 are formed.

In this angular velocity sensor, FIG.
As shown in FIG. 5, the excitation electrodes 5-1, 5-3, 5-6 and 5-8 are commonly connected to the terminal P1, and the excitation electrodes
2, 5-4, 5-5 and 5-7 are commonly connected to a terminal P2, and an AC voltage (excitation vibration signal) e is applied between the terminals P1 and P2. For this reason, at some point
An electric field is generated as shown by an arrow in (b), and then an electric field in the opposite direction is generated.
1 and 4-2 vibrate right and left, and the legs 4-3 and 4-4 also vibrate right and left in conjunction with each other.

In FIG. 1A, the legs 4-1 to 4-4
If the longitudinal direction of the axis is the Y-axis direction, the direction perpendicular to the paper is the Z-axis direction, and the axis orthogonal to the Y-axis and the Z-axis is the X-axis, when the rotational angular velocity acts around the Y-axis direction, the Coriolis force Generates a vibration component in the Z-axis direction. Since the magnitude of this vibration component is proportional to the Coriolis force, a pole charge corresponding to the direction of vibration is generated at the electrodes of the legs 4-4 of the vibrator element 4 in a magnitude proportional to the rotational angular velocity. I do. As a result, FIG.
As shown in (c), there is a terminal P3 that connects the detection electrodes 7-1 and 7-4 in common and a terminal P4 that connects the detection electrodes 7-2 and 7-3 in common. sometimes the direction of the arrow, the next reverse charge is generated, the voltage signal e _s corresponding to the Coriolis force can be obtained.

On the other hand, in the leg 4-3 of the vibrator element 4, as shown in FIG. 1C, the detection electrodes 6-1 and 6-3 are commonly connected to the terminal P5, and 2 and 6-4 are commonly connected to terminal P6. In this case, leg 4
-3 is due to the vibration component in the X-axis direction due to vibration leakage.
In some cases, charges are generated between the terminals P5 and P6 in the direction of the arrow and then in the opposite direction, and a voltage signal e _FB corresponding to the magnitude of the vibration is obtained.

FIG. 2 is a block diagram showing a main part of a processing circuit attached to the vibrator element 4 (hereinafter, referred to as a vibrator) including the excitation electrodes 5, the detection electrodes 6, and 7. In the figure, 10 is an oscillation circuit, 11, 12 and 13 are amplification circuits, 14 is a rectification circuit, 15 and 16 are smoothing circuits, and 17 is 9
0 ° phase shift circuit, 18 is a multiplication circuit, and 19 is a low-pass filter circuit. In this processing circuit, the oscillation circuit 10 supplies the excitation vibration signal e between the terminals P1 and P2 shown in FIG. Further, the amplifier circuit 12, the voltage signal e _s occurring between the terminals P3 and P4 shown in FIG. 1 is input. Further, the terminal P shown in FIG.
The voltage signal e _FB generated between 5 and P6 is input.

The voltage signal e _FB from the vibrator is _supplied to the amplifier 11
Is amplified by This is converted to a voltage signal a1 (FIG. 3A).
See). This voltage signal a1 is rectified by the rectifier circuit 14 and smoothed by the smoothing circuit 15. The rectified and smoothed voltage signal is referred to as a control signal (gain control signal) a3.

Here, it is assumed that no rotation occurs in the excitation phase of the vibrator, that is, the vibrator sets its amplitude to W1.
Assuming that the vibration is parallel to the X axis (θ = 0 °) (see FIG. 4), the vibration amplitude component in the X axis direction is W1 itself. On the other hand, if a rotation occurs in the excitation phase of the vibrator, that is, the vibrator changes its amplitude to W2 (W2
1 = W2) and vibrates with a deviation of θ ゜ with respect to the X-axis direction (see FIG. 4), the vibration amplitude component in the X-axis direction is W1
Is smaller than W2 '.

The smoothing circuit 15 sends a gain control signal a3 to the oscillation circuit 10 so that the vibration amplitude component of the vibrator in the X-axis direction becomes W1. That is, when the vibration amplitude component in the X-axis direction is W2 ', the gain control signal a3 is sent to the oscillation circuit 10 so that the vibration amplitude component W2' becomes W1, and the excitation vibration signal e
Adjust the amplitude of. As a result, the vibrator has an amplitude of W3 (W3> W3) with a deviation of θ ゜ with respect to the X-axis direction.
Vibration is performed as in 2), and as a result, the vibration amplitude component in the X-axis direction is W1.

Therefore, in this circuit configuration, when the rotational angular velocity ω3 acts around the Y-axis direction of the vibrator, the Coriolis force F3 is shifted by θ ゜ with respect to the Z-axis of the vibrator due to the rotational angular velocity ω3. Occurs. In this case, the Z direction component of the Coriolis force is F3 ′, F3 ′ = F3 · cos θ
Becomes

This F3 'is a gain control signal a
Since the excitation amplitude is corrected by the oscillation circuit 10 controlled in step 3, when the rotation angular velocity ω3 acts on the vibrator in the Y-axis direction when the excitation phase does not rotate, the oscillation acts on the Z-axis direction. Equivalent to the power of Coriolis. Therefore, when the rotational angular velocity ω3 is detected from the Coriolis force F3 ′, even if the excitation phase of the vibrator rotates by θ 、 and fluctuates, the rotational angular velocity ω3 is detected with high accuracy regardless of the rotation. It becomes possible.

The voltage signal e _s from the oscillator, the amplifier circuit 1
2 and a voltage signal b (FIG. 3B)
reference). In this case, assuming that the excitation phase is rotated by θ 励, the voltage signal b is a voltage signal (output by Coriolis force) b1 corresponding to the Coriolis force in the Z-axis direction.
And a voltage signal (leakage output) b2 corresponding to a vibration component in the Z-axis direction due to vibration shifted by θ ゜ with respect to the X-axis direction.

The phase of the voltage signal b (b1, b2) is shifted by 90.degree.
The voltage signal is c (c1, c2) (see FIG. 3C). This voltage signal c (c1, c2) is applied to the multiplication circuit 18. The multiplication circuit 18 is a 90 ° phase shift circuit 1
7 is multiplied by a voltage signal c2 (c1, c2) from the oscillation circuit 10 and a voltage signal a2 from the oscillation circuit 10 (a voltage signal on the upper line of the excitation vibration signal e from the oscillation circuit 10), and a voltage signal d is obtained.
(D1, d2) (see FIG. 3D).

This voltage signal d (d1, d2) is applied to the smoothing circuit 16 through the low-pass filter circuit 19,
A voltage signal f is set (see FIG. 3E). In this case, the voltage signal f2 corresponding to the leakage output becomes zero, and only the voltage signal f1 corresponding to the output due to the Coriolis force is obtained.
Then, the voltage signal f1 is given to the amplifier circuit 13,
It is output as a voltage signal g indicating a rotational angular velocity acting around the Y-axis direction of the vibrator.

In the above-described embodiment, the voltage signal on the upper line of the excitation vibration signal e from the oscillation circuit 10 is supplied to the multiplier 18 as a2, but the voltage signal on the lower line is supplied as a2. You may do so. In the above-described embodiment, the multiplication circuit 1
8, the voltage signal c (c1, c2) is multiplied by the voltage signal a2 to obtain the voltage signal d. However, the voltage signal a1 and the voltage signal c (c1, c
The voltage signal d may be obtained by performing multiplication with 2). In this case, a voltage signal from the preceding stage (upper line or lower line) of the amplifier circuit 11 may be supplied to the multiplying circuit 18 instead of the voltage signal a1.

In the above-described embodiment, the electrodes 4-1 to 6-4 for detecting the excitation amplitude in the X-axis direction are attached to the legs 4-3 of the vibrator element 4. Although the electrodes 7-1 to 7-4 for detecting the angular velocity are formed, as shown in FIG. 5, they are mixed with the legs 4-3 and 4-4 to detect the excitation amplitude in the X-axis direction. And the electrode for detecting the angular velocity may be formed. That is, the electrodes 4-1 to 8-3 for detecting the excitation amplitude in the X-axis direction and the electrodes 9-1 to 9-4 for detecting the angular velocity in the X direction are attached to the leg 4-3, and the X-axis direction is attached to the leg 4-4 The electrodes 8-4 to 8-6 for detecting the excitation amplitude and the electrodes 9-5 to 9-8 for detecting the angular velocity may be formed.

In the above-described embodiment, the vibrator element 4 is an H-type vibrator element. However, the present invention is not limited to the H-type vibrator element. Can be similarly applied.
In the above-described embodiment, when detecting the rotational angular velocity acting around the Y-axis direction, it has been described that the vibration component generated in the Z-axis direction is detected while the vibrator is excited in the X-axis direction. However, the present invention can be similarly applied to a case where the vibrator is not excited in the Z-axis direction but a vibration component generated in the X-axis direction is detected.

[0034]

As is apparent from the above description, according to the present invention, the excitation amplitude of the vibrator is detected, and the AC applied to the excitation electrode is set so that the excitation amplitude has a predetermined value. The magnitude of the voltage (the amplitude of the excitation vibration signal) is adjusted, so that the rotational angular velocity can be detected with high accuracy even when the excitation phase is rotating by θ ゜.

[Brief description of the drawings]

FIG. 1 is a diagram showing a main part of an angular velocity sensor according to an embodiment of the present invention.

FIG. 2 is a block diagram showing a main part of a processing circuit attached to a vibrator of the angular velocity sensor.

FIG. 3 is a time chart for explaining the operation of the processing circuit.

FIG. 4 is a diagram for explaining an amplitude adjusting operation of the excitation vibration signal e based on the voltage signal e _FB in the processing circuit.

FIG. 5 is a diagram showing a main part of an angular velocity sensor in which electrodes for amplitude detection in the X-axis direction and electrodes for angular velocity detection are mixedly formed in legs 4-3 and 4-4.

FIG. 6 is a diagram showing a main part of a conventional angular velocity sensor.

FIG. 7 is a diagram illustrating rotation of an excitation phase in the angular velocity sensor.

FIG. 8 is a diagram illustrating a situation in which an error occurs in a rotational angular velocity detected when the excitation phase rotates by θ ゜ in this angular velocity sensor.

[Explanation of symbols]

4 H-type vibrator element, 4-1 first leg, 4-2 second leg, 4-3 third leg, 4-4 fourth leg,
4-5: first space, 4-6: second space, 5-1
... 5-8: Excitation electrodes, 6-1 to 6-4: Electrodes for detecting excitation amplitude in the X-axis direction (detection electrodes), 7-1 to 7-4: Electrodes for detection of angular velocity (detection electrodes), 10 ... oscillation circuit, 1
1, 12, 13 ... amplification circuit, 14 ... rectification circuit, 15, 1
6: smoothing circuit, 17: 90 ° phase shift circuit, 18: multiplication circuit, 19: low-pass filter.

Claims (4)

[Claims] 1. A vibrator comprising a vibrator element, an excitation electrode formed on the vibrator element, and an electrode for detecting angular velocity, wherein an AC voltage is applied to the excitation electrode so that the vibrator is moved in the X-axis direction. An angular velocity sensor that detects a rotational angular velocity based on the amount of electric charge generated on the angular velocity detecting electrode when rotated about the Y axis while being excited in the X-axis direction. And an AC voltage applied to the excitation electrode so that the amplitude in the X-axis direction is set to a predetermined value based on the amplitude in the X-axis direction detected by the amplitude detection unit. And an amplitude adjusting means for adjusting the size of the angular velocity. 2. An AC voltage is applied to the excitation electrode of a vibrator including a vibrator element, an excitation electrode formed on the vibrator element, and an electrode for detecting angular velocity, whereby the vibrator is moved in the Z-axis direction. An angular velocity sensor that detects a rotational angular velocity based on the amount of electric charge generated on the angular velocity detecting electrode when rotated about the Y axis while being excited in the Y axis. An AC voltage applied to the excitation electrode such that the amplitude in the Z-axis direction is set to a predetermined value based on the amplitude in the Z-axis direction detected by the amplitude detection means. And an amplitude adjusting means for adjusting the size of the angular velocity. 3. The vibrator element according to claim 1, wherein said vibrator element is an H-shaped vibrator element, and said first and second legs are opposed to each other across a first space of said H-shaped vibrator element. An excitation electrode is formed, an electrode for detecting angular velocity is formed on one of the third and fourth legs opposed to each other across the second space, and an excitation amplitude is detected on the other of the third and fourth legs. Angular velocity sensor, wherein an electrode for use is formed. 4. The vibrator element according to claim 1, wherein the vibrator element is an H-shaped vibrator element, and the first and second legs are opposed to each other across the first space of the H-shaped vibrator element. An excitation electrode is formed, and an electrode for detecting an angular velocity and an electrode for detecting an excitation amplitude are formed so as to coexist with the third and fourth legs opposed to each other across the second space. Angular velocity sensor.