JPH1098095A - Floor-penetrating type storage shelf device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a storage shelf device, wherein with easy assembly and set-up, the turn center of a stacker and the center axis of the storage shelf are aligned with each other with precision. SOLUTION: A storage shelf 2 of a floor penetrating type storage shelf device M, provided with a cylindrical storage shelf 2, which while penetrating a grating floor G, extends from an under-floor space YK to an over-floor space, and a cylindrical coordinate type stacker 105 provided inside the storage shelf 2 is divided into under-floor units B and C and an over-floor unit A provided with a case 1 for housing/holding it, and an I/O port unit which is inserted in the over-floor unit A, for mutual connection. Each storage shelf part 2B, 2C, and 2A is allowed to be position-adjusted in horizontal direction agent each case part 1B, 1C, and 1A of the under-floor units B and C and the over- floor unit A, so that the load of the storage shelf parts, 2B, 2C, and 2A are supported with the case parts 1B, 1C, and 1A of each unit B, C, and A.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a storage rack device mainly installed in a clean room.

[0002]

2. Description of the Related Art Semiconductor manufacturing is performed in a special room called a "clean room". This room often has the following structure to keep it clean. (1) Clean air is blown from the ceiling through a filter. (2) The floor is formed of a "saw-shaped" plate called "grating" or a plate having a plurality of air through holes called "punched metal". Equipment for semiconductor manufacturing is usually installed on this floor. (3) The underfloor is a large space for allowing the air flow from the ceiling to easily pass through the floor surface and for storing machinery for operating the clean room.

[0003] Meanwhile, since the cost per unit area (both the construction cost and the maintenance cost) of the clean room is high, there is a demand to use the floor area as effectively as possible.

[0004] As equipment necessary for the semiconductor manufacturing process, there is a "stocker (storage shelf device)" for temporarily storing semiconductor materials (wafers) in the manufacturing process. For the foregoing reasons, it is desirable for the stocker to be able to store as many wafers as possible with the smallest possible footprint.

[0005] A conventional stocker is installed on the floor of a clean room like other semiconductor manufacturing equipment. FIG. 9 shows a configuration of a conventional stocker, (a) is a plan view,
(B) is a side view.

The stocker 200 is installed on a grating floor G of a clean room, and a left and right flat storage shelf units 202 are arranged facing each other on a housing 201 having an outer wall structure. Storage shelf unit 202
Has a large number of storage units 2 in a grid pattern in the horizontal and vertical directions.
03 is secured, and the storage object H can be stored in each storage unit 203. In addition, the storage shelf unit 20
At the end between the two, the housing 201 is provided with a transfer unit (I / O port) 205 for taking in and out of the storage object H with the outside.

[0007] A stacker (transfer device) 210 is provided between the left and right storage rack units 202 to transfer the storage material H between the transfer unit 205 and the storage unit 203.
The stacker 210 is supported by a traveling rail 211 extending horizontally between storage shelf units 202, a lifting column 215 erected on a traveling carriage 212 traveling on the traveling rail 211, and a lifting column 215. An elevator 216 that is moved up and down and driven, and a two-axis horizontal robot 217 mounted on the elevator 216 are configured to hold the storage object H by a hand at the tip of the two-axis horizontal robot 217.

[0008] The storage procedure of the storage items H in the stocker 200 is as follows. (1) The stacker 210 previously has the two-axis horizontal robot 21
In a state where the arm 7 is contracted, for example, it stands by at the initial position. (2) In this state, the storage object H is placed on the delivery unit 205 manually or by a robot or the like. (3) In response to the transfer instruction, the stacker 210 operates, travels and moves up and down from the standby position, and moves the elevator 216 to the transfer unit 205. (4) When the elevator 216 moves to the transfer unit 205,
The arm of the two-axis horizontal robot 217 is extended, and the hand is inserted into the transfer unit 205. (5) Then, the user holds the object H by hand. (6) In this state, the arm of the two-axis horizontal robot 217 is contracted, and the storage object H is drawn into the stocker 200. (7) Next, the vehicle is run and moved up and down, and the storage object H is moved to the position of the storage unit 203 to be stored. (8) After the movement, the arm of the biaxial horizontal robot 217 is extended, and the hand is inserted into the storage unit 203. (9) Then, the storage object H is lowered onto the shelf of the storage unit 203. (10) Next, the arm of the two-axis horizontal robot 217 is contracted, the hand is taken out of the storage unit 203, moved to the standby position, and waits until a next operation instruction is issued.

The operation for unloading the storage H may be performed by replacing the delivery unit 205 and the storage unit 203 in the above operation.

[0010]

As described above, a stocker in a clean room is required to be able to store as many wafers as possible with an occupation area as small as possible.

In this respect, the above-mentioned conventional stocker has a dimension (normally about 3.5 m) from the floor to the ceiling of a clean room.
It is set to fit in the height, so if you try to increase the storage area, the occupied area in the horizontal direction will increase,
I can't respond to the previous request.

Therefore, as a measure to meet the above demand, a part of the grating floor is opened by using a space under the floor which has not been used so far, and a height from the ceiling to the floor is provided. The realization of a tall stocker is desired.

However, if the size in the height direction is simply increased while following the structure of the above-mentioned conventional example in order to realize a high stocker, the lifting column 215 which is moved in the horizontal direction by the traveling carriage 212 is used. The dimensions of
When the running operation is started / stopped, a large overturning moment is generated in the lifting column 215. For example, if the length of the lifting column is doubled, the weight is simply calculated as 2
Since the height and the height of the center of gravity are doubled, the overturning moment is quadrupled. Therefore, there is a problem that the load on the mechanism for guiding the travel increases, the structure and weight of the guide mechanism and the traveling drive system as well as the lifting column increase, the equipment becomes large, and the cost increases.

To cope with this, it is conceivable to arrange a cylindrical coordinate type stacker inside a cylindrical storage shelf. FIG. 10 shows a configuration of a cylindrical coordinate type stocker 100. FIG. 1A is a longitudinal sectional view, and FIG. 1B is a top view. In this stocker 100, a cylindrical storage shelf 101 is
02, and a stacker 105 is provided therein. The stacker 105 includes a vertically elevating column 106 and a turning mechanism 1 for rotating the elevating column 106 around the central axis L of the storage shelf 101 as shown by an arrow (b).
07, an elevating table (equivalent to an elevating slewing body) 108 which is raised and lowered along an elevating column 106 as shown by an arrow (a),
A hand 109 for holding the storage object H is provided on an elevating table 108 via an expansion / contraction mechanism (not shown) that expands / contracts as shown by an arrow (c).

In the case of this cylindrical coordinate type stocker 100,
Since the elevating column 105 itself does not travel in the horizontal direction, a guide mechanism or the like for traveling is not required, and the equipment can be prevented from being enlarged. Therefore, it is easy to increase the height dimension.

By the way, the assembling operation of the stocker 100 is as follows.
I want to carry it into a clean room after assembling it in another place, rather than in a clean room as much as possible.
This is for the convenience of the stocker manufacturer and to suppress the generation of dust due to the assembling work.

However, the housing 102 supporting the lowermost and uppermost portions of the elevating column 105, which is the pivot, has a large dimensional error as compared with the accuracy that must be achieved, and is assembled with a welding structure or bolts. Due to the structure, the required assembly accuracy cannot be realized only by the manufacturing accuracy of the parts alone. As shown in FIG. 11, if the center L1 of the pivot axis, that is, the pivot center of the elevating column 105 that supports the elevating platform 108, and the center axis L of the storage shelf 101 do not accurately coincide with each other, the hand for the stored object Since the position of 109 is deviated, there is a possibility that the holding operation is hindered. for that reason,
After loading and installation, it is necessary to adjust the rotational support position of the upper end of the elevating column 105, in particular, with the position adjusting mechanism 110 shown in FIG.

The loading / installing operation of the stocker 100 is performed as follows. (1) Put the stocker 100 in the almost assembled state
Carry in a clean room. (2) Install the housing 102 of the stocker 100 at the installation location. (3) Determine the level of the entire stocker 100. (4) The mounting position of the uppermost rotation support portion of the lifting column 108 is adjusted in the horizontal direction, and the lifting column 108 is set upright. As described above, by aligning the center of rotation with the central axis of the storage shelf 101, the loading / unloading operation can be performed without any trouble.

However, if the size in the height direction is simply increased to realize a stocker having a height from the ceiling to the bottom of the floor, there are the following problems.

That is, the height of the stocker is too large to be integrated into the clean room. In order to carry in, it is necessary to divide it into a plurality of units of a size that can be carried in and to make it a structure that can be easily assembled after carrying in. Axis alignment is difficult.

The present invention provides a through-the-floor type storage shelf apparatus which can be easily assembled and installed in consideration of the above circumstances, and which can easily and precisely match the center of rotation of the stacker with the center axis of the storage shelf. The purpose is to:

[0022]

According to a first aspect of the present invention, there is provided a cylindrical storage shelf which penetrates a floor and extends from an underfloor space to an overfloor space, and a cylindrical coordinate type stacker disposed inside the storage shelf. A floor-through type storage shelf device comprising: a storage unit, a storage unit, a lower floor unit and a lower floor unit each including a housing for housing and holding the storage rack, and a transfer unit that fits into a cutout formed in the floor unit. It is divided into three parts so that they can be connected to each other, and the height range of the cutout portion is set to a range from the lower end of the floor unit to the upper end of the transfer unit, and the lower floor unit and the housing unit of the floor unit are set. On the other hand, the position of each storage shelf can be adjusted in the horizontal direction, and the load of the storage shelf is supported by the housing of each unit.

According to a second aspect of the present invention, in the first aspect, the stacker has an elevating column for ascending and descending guide of an elevating revolving body that moves up and down along a central axis of the storage shelf and turns around the central axis. The elevating column is divided into a plurality so as to be vertically connectable, and one of the divided surfaces of the elevating column is
It is within the height range of the notch formed in the floor unit.

According to a third aspect of the present invention, in the second aspect, the elevating column is supported by the housing at an uppermost portion and a lowermost portion, and a position adjusting mechanism for adjusting a horizontal supporting position of the elevating column at the uppermost portion. Is provided.

[0025]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a longitudinal sectional view showing the overall configuration of a stocker (storage shelf apparatus) M according to the embodiment, and FIGS. 2 and 3 are perspective views showing how the stocker is assembled. This stocker M is a grating floor G of a clean room CR.
And has a full height from the floor surface Y of the underfloor space YK to the vicinity of the ceiling T of the overfloor space (clean room CR), and has a cylindrical storage shelf 2 extending from the underfloor space YK to the overfloor space; Square housing 1 for housing and holding it
And a stacker 105 of cylindrical coordinate type disposed inside the storage shelf 2.

The stocker M is vertically divided into a plurality of units. Above the grating floor G (hereinafter, referred to as
Above the floor G is divided into an on-floor unit A and an I / O port unit (transfer unit unit) E, and a portion below the grating floor G (hereinafter, referred to as the underfloor) is an upper underfloor U unit B and a lower portion. Is divided into an under-floor L unit C on the side and a machine room unit D on the lower side. The elevating column 106 is divided into three units: an upper unit, a middle unit, and a lower unit.
And the lower unit 10C is a machine room unit D
Built in. Further, the intermediate unit 106B is provided independently.

FIGS. 4 and 5 show the details of the configuration of the underfloor U unit B and the underfloor unit A, respectively. 1 to 5
As shown in the appropriate drawings, the above-floor unit A, the below-floor U unit B, and the below-floor L unit C each have a housing 1A, 1B, 1C obtained by dividing the housing 2 at an appropriate height, and a storage shelf 2 as appropriate. Storage shelves 2A, 2B, and 2C divided by height are provided. Also, each of the housings 1 of these units A, B, and C
A, 1B, and 1C have supporting portions 12A, 12 that support the loads of the storage shelves 2A, 2B, and 2C so that the flange portions 13A, 13B, and 13C of the storage shelves 2A, 2B, and 2C are placed.
B and 12C are provided. The upper end of the storage shelf 2B of the underfloor U unit B is set at a position higher than the housing 1B, and projects above the grating floor G in the installed state. Note that the machine room unit D has only the housing 1D, and no storage shelf is provided.

Further, a base portion 5 of the machine room unit D,
At a connection portion of the storage shelf unit 6 of the underfloor L unit C located thereon, there is provided a horizontal alignment mechanism 6 for performing horizontal positioning and connecting the two in the horizontal direction. Similarly, a horizontal alignment mechanism 7 is provided at the joint between the storage shelves 2B and 2C of the underfloor U unit B and the underfloor L unit C, and the two storage shelves 2 of the underfloor unit A and the underfloor U unit B are provided.
A horizontal alignment mechanism 8 is provided at the joint between A and 2B.
The horizontal alignment mechanism 9 is provided at the junction between the storage shelf 2A and the storage shelf 2A of the unit A. Positioning member 10
Is for rotatably supporting the upper end of the elevating column 106. The position of the positioning member 10 is adjusted by the horizontal position adjusting mechanism 11 so that the relative position between the storage shelf 2 and the elevating column 106 can be accurately adjusted. Has become.

The floor unit A is provided with a cutout 4 on a part of the side surface, and the I / O port unit E fits into the cutout 4. In this case, the height range of the notch 4 is set to a dimension from the lower end of the floor unit A to the upper end of the I / O port unit E. Also, the mating surface (divided surface) of the intermediate unit 106B and the upper unit 106A of the elevating column 106 is within the height range of the notch 4.

The horizontal positioning of the storage shelves 2 at the time of installation is performed with reference to the lowermost and uppermost positions of the stacker 105, and the connection between the storage shelves 2A, 2B and 2C is
The alignment is performed by the alignment mechanisms 7 and 8 that determine only the horizontal position. The center of rotation L1 of the stacker 105 and the center axis L of the rotating shelf 2 coincide with each other by aligning the positioning mechanisms 7 and 8. Therefore, even if the mounting position of the uppermost part of the stacker 105 is adjusted, the storage shelf 2 also moves along with the adjustment, so that the center axis L of the storage shelf 2 always coincides with the turning center L1 of the stacker 105. .

Next, the operation will be described. The operation of storing and unloading the stored items is the same as in the conventional example, and will not be described here.
The loading / installation of the stocker M is performed as follows.
This will be described with reference to FIGS. The reference numerals of the respective items correspond to the reference numerals in the figure. The unit is carried in from a room (clean room CR) above the grating floor G. (A) First, the machine room unit D is lowered from above the floor to below the floor, and (b) it is installed on the floor Y and the level is set. (C) Next, the underfloor L unit C is lowered from above the floor to below the floor, and (d) the machine room unit D is overlaid, and the housing units 1D and 1C are connected to each other. Further, the base unit 5 also serving as a positioning reference at the lower part of the stacker 106 and the storage shelf 2C of the underfloor L unit C are connected by the horizontal positioning mechanism 6. (E) Lowering the intermediate unit 106B of the elevating column 106 from above the floor to below the floor, and (f) elevating the column or the unit 10 of the machine room unit D.
Connect with 6C. (G) Next, the underfloor U unit B is lowered from above the floor to below the floor. (H) The underfloor L unit C is overlaid, and the housing units 1B and 1C and the storage shelves 2B and 2C are connected. (I) Next, the unit A on the floor is laterally moved on the grating floor G, and (j) the unit A is moved from the cutout portion 4 onto the U unit B under the floor so that the housing units 1A and 1B, the storage shelf 2A, 2B and the units 106A and 106B of the elevating column are connected to each other. (K), (l) The I / O port unit E is fitted and connected to the cutout 4 of the floor unit A. (M) Adjust the mounting position of the upper end support of the pivot axis of the stacker in the horizontal direction, and adjust the pivot axis, in this case, the lifting column 106.
Upright. Along with this, the storage shelf 2 also moves, and the center axis L of the storage shelf 2 coincides with the turning center of the stacker 105. At this time, the center axis from the top to the bottom of the storage shelf 2 and the turning center of the stacker 105 are accurately matched, and the assembly is completed.

[0032]

As described above, according to the first aspect of the present invention, the storage shelves are divided into units of a size that can be carried in, including the housing, and the storage shelves are provided for each housing. The horizontal position of the stocker can be adjusted and the housing of each unit supports the load on the storage shelf. Can be realized. In addition, although the load of the storage shelf is handled by the housing, the position of the storage shelf can be adjusted horizontally with respect to the housing, so that the stacker and the storage shelf can be easily aligned after loading and installation. . Therefore, the center of rotation of the stacker can be accurately aligned with the center axis of the storage shelf, and the operation of the stacker is not hindered.

If the lifting column is divided as in the second aspect of the present invention, the connecting operation can be simplified. According to the third aspect of the present invention, the vertical column can be set up vertically only by adjusting the position of the uppermost column.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing the overall configuration of an embodiment of the present invention.

FIG. 2 is an exploded perspective view showing a configuration on a lower floor side according to the embodiment of the present invention.

FIG. 3 is an exploded perspective view illustrating a configuration of a floor upper side according to the embodiment of the present invention.

FIG. 4A is a perspective view of an under-floor U unit according to the embodiment of the present invention, and FIG. 4B is a partial perspective view before placing a storage shelf 2B.

FIG. 5 is a perspective view of a floor unit according to the embodiment of the present invention.

FIG. 6 is an assembly process diagram (a) to an embodiment of the present invention.
(D).

FIG. 7 is an assembly process diagram (e) of an embodiment of the present invention.
(H).

FIG. 8 is an assembly process diagram (i) of an embodiment of the present invention.
(L).

9A and 9B are configuration diagrams of a conventional stocker, where FIG. 9A is a plan view and FIG. 9B is a side sectional view.

10A and 10B are configuration diagrams of a cylindrical coordinate type stocker devised by the present inventor, where FIG. 10A is a longitudinal sectional view and FIG. 10B is a top view.

11 is a plan view used to explain the relationship between the center of rotation of the stocker in FIG. 10 and the central axis of the storage shelf.

[Explanation of symbols]

 M Stacker (Storage Shelf Device) 1 Housing 1A, 1B, 1C, 1D Housing 2A, 2B, 2C Storage Shelf 4 Notch 6, 7, 8, 9 Horizontal Positioning Mechanism 11 Horizontal Position Adjusting Mechanism 105 Stocker 106 Elevating column G Grating floor CR Clean room (floor space) YK underfloor space A underfloor unit B underfloor U unit C underfloor L unit E I / O port unit (transfer unit) L Center axis of storage shelf L1 Rotating center of stacker

Claims (3)

[Claims] 1. A floor penetrating type storage shelf device comprising a cylindrical storage shelf penetrating the floor and extending from the underfloor space to the floor space, and a cylindrical coordinate type stacker disposed inside the storage shelf. The storage shelf is divided into three units: an under-floor unit and an on-floor unit having a housing for housing and holding the same, and a transfer unit that fits into a cutout formed in the on-floor unit, and can be connected to each other. At the same time, the height range of the notch is set to a range from the lower end of the on-floor unit to the upper end of the transfer unit, and each storage shelf is horizontally positioned with respect to each of the chassis of the under-floor unit and the on-floor unit. A through-the-floor type storage shelf device, wherein the storage shelf unit is adjustable and the load of the storage shelf unit is supported by the housing of each of these units. 2. The stacker has an elevating column for elevating and lowering a lifting revolving body that moves up and down along the central axis of the storage shelf and turns around the central axis, and the elevating column is vertically connected. The through-floor type storage rack device according to claim 1, wherein the storage rack device is divided into a plurality as much as possible, and one of the divided surfaces of the lifting column is within a height range of a notch formed in the floor unit. 3. The lifting column is supported by the housing at an uppermost portion and a lowermost portion, and a position adjusting mechanism for adjusting a horizontal support position of the lifting column is provided at an uppermost portion. The storage shelf device of the floor penetration type according to claim 2.