JPH1097965A - Production control method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a production control method by which such production control that can adapt itself to the pulling system can be realized and the burden of a production control section can be lightened, and then, a production supporting section can flexibly control the flows of materials to be worked at its own discretion. SOLUTION: A production control section 3 which gives instructions about the setting of throughput and production, recognizes the actual throughput, and controls the progress of each process and each process and a production supporting section 13a which is composed of a plurality of work module controllers 18 provided correspondingly to each process or each related process group and supports the production by communicating information with the section 3 are provided. Each controller 18 is made to generate instruction information and control information about the manufacturing devices of its corresponding process or process group, operators, and materials to be worked based on the information from the section 3 and give instructions to the operators or control the manufacturing devices based on the generated information.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a production management method.

[0002]

2. Description of the Related Art Management related to the manufacture of semiconductor devices is performed by, for example, a production management system shown in FIG. In the figure, 1 is a host computer, 2 is an analysis system, 3
Reference numeral 1 denotes a production management unit based on an area computer which is connected to these units 1 and 2 online, and is provided, for example, for each semiconductor device manufacturing factory or each manufacturing building. A network 4 connects the host computer 1, the analysis system 2, and the area computer.

[0005] Reference numeral 5 denotes a plan management unit for setting the production amount for each type of semiconductor device. Reference numeral 6 denotes a basic manufacturing information management unit that manages basic manufacturing-related information such as manufacturing conditions and manufacturing process sequence for each type of semiconductor device. Reference numeral 7 denotes a result management unit which processes information on the results of actual manufacturing to grasp the production results. A process progress management unit 8 manages the progress of the process for each model. .., 9,..., A cell management unit, which exists for each process or a main process and a process group including a process before or after the process, and manages the process or the process group. A network 10 connects the area computer to a production support unit (13) described below. 11, a user interface; and 12, a user terminal.

A production support unit 13 includes an inter-process transfer controller 14, a machine management controller 15, and an in-process controller 16. Inter-process transfer controller 1
Numeral 4 manages all the transport of the processing material (wafer and the like) between different processes and manages all the stock in each process. The machine management controller 15 manages (controls) each semiconductor manufacturing apparatus. The intra-process transfer controller 16 manages the transfer in the process for each process. Reference numeral 17 denotes a terminal device connected to the in-process transfer controller 16.

In the conventional production management method, the production management unit 2 of each area computer sets the production amount of each type of semiconductor device in a factory (or ridge) to which it is assigned, and also sets the production amount for each type of semiconductor device. The manufacturing support unit 13 manages the series of processes, conditions of each process, and the like. In addition, the progress of each process is grasped, the progress is managed, and the production results are grasped.

On the other hand, based on the instruction from the production management section 3, the production support section 13 gives an instruction to each stocker and each inter-process transport device by the inter-process transport controller 14 regarding the transport of the processing material between the processes. And receive information on the execution status of the instruction. The control of each semiconductor manufacturing apparatus is performed through the machine management controller 15. The in-process transfer is controlled through the in-process transfer controller 16.

The conventional production management method comprises a production management unit 3, an inter-process transfer controller 14 of a production support unit 13 belonging to a lower level, a machine management controller 15,
The in-process controller 16 has a hierarchical structure.
The control of the stockers, inter-process transfer equipment, semiconductor manufacturing equipment, in-process transfer tools, etc. by the controllers 14, 15, 16 is also completely controlled by the production management unit 3,
There was no room for discretion.

[0008]

By the way, according to the conventional production management method, the production management unit 3 located at the upper level of the hierarchy structure uses a controller such as the inter-process transfer controller 14 or the like, a stocker, an inter-process transfer device, a semiconductor manufacturing apparatus, and a process. Since this method manages all the controls on the inner carrier and the like, it is suitable for mass production of small varieties, but is unsuitable for recent mass production of small varieties. One of the most important things in high-mix low-volume production is TAT
(Turn Around Time) is to be shortened by flowing a small lot, implementing a post-process pick-up system, and using an apparatus, a process, or a process group including one process and a process before or after the process as a unit. However, it is necessary to perform management for each unit, but it is impossible to issue an instruction in the production management unit 3 for all such detailed management for each unit. In particular, the conventional method is a management mainly based on manufacturing management, that is, control of a semiconductor manufacturing apparatus, and is not easily adapted to a so-called logistical management of picking up a post-process.

In the post-process pick-up method, when a processing material (for example, a wafer) at a stage where the previous processing is completed in a certain process or equipment becomes necessary, the processing is performed at the previous process. It is a method that goes to get the material, performs processing on it, puts the processed material after processing is completed, and leaves it to take the necessary post-process, sometimes called the kanban method .

Therefore, the inventor of the present application has set one process or a process group including one process and its pre-processing process and / or post-processing process as one work unit, and provided a work module controller for each work unit. I felt the necessity of object-oriented management including material transportation and workers, and came to accomplish the present invention.

That is, the present invention enables a production control which is compatible with the post-process pick-up system, reduces the load on the production control section, and flexibly controls the flow of the processing material at the discretion of the production support section. It is intended to provide.

[0012]

According to a first aspect of the present invention, there is provided a production management method, comprising: a production management unit for setting a production amount, giving an instruction on production, grasping production results, and managing progress of each process; A production support unit, which comprises a plurality of operation module controllers provided correspondingly to each other, and exchanges information with the production management unit to support production; Based on the information from the department, it creates instruction information and control information on the manufacturing device, operator and processing material of the process or process group corresponding to itself, and based on that, gives instructions to the operator, control of the manufacturing device and processing material transport device It is characterized by having

According to the production management method of the first aspect, a production support section is formed for each one step constituting a series of steps for each type, or for each step group including one step and steps before and after it. A work module controller is provided, and in each work module controller, an operator relating to the object to be managed, a semiconductor manufacturing apparatus, and instruction information and control information relating to the transfer of the processing material are created, and based on the instruction, the operator is instructed or the manufacturing apparatus and the transfer apparatus are manufactured. Control.
The work module controller allows the operator to be optimally arranged and the work material to be transported at each time, thereby shortening the TAT.

In particular, if each working module controller runs out of working material to be worked by itself,
If the material is transported so as to go to a certain process, the post-process pick-up method (Kanban method) becomes possible, and the flow of the material can be reduced without waste even under multi-product small-quantity production. It can be something.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the illustrated embodiments. FIG. 1 is a system diagram of a production management system used for implementing the present invention.

In the figure, 1 is a host computer, 2
Is an analysis system, and 3 is a production management unit based on an area computer connected online to these devices 1 and 2, and is provided, for example, at each semiconductor device manufacturing factory or each manufacturing building. A network 4 connects the host computer 1, the analysis system 2, and the area computer.

Reference numeral 5 denotes a plan management unit for setting the production amount for each type of semiconductor device. Reference numeral 6 denotes a basic manufacturing information management unit that manages basic manufacturing-related information such as manufacturing conditions and manufacturing process sequence for each type of semiconductor device. Reference numeral 7 denotes a result management unit which processes information on the results of actual manufacturing to grasp the production results. A process progress management unit 8 manages the progress of the process for each model. .., 9,..., A cell management unit, which exists for each process or a main process and a process group including a process before or after the process, and manages the process or the process group. A network 10 connects between the area computer and a production support unit (13a) described below. 11
Is a user interface, and 12 is a user terminal.

Reference numeral 13a denotes a production support unit which comprises a number of operation module controllers 18, 18,... The work module controllers 18, 18,... Are provided for each one process constituting a series of processes for each product type or for each process group including one process and processes before and after the process. The control of the manufacturing apparatus regarding the process (for example, diffusion) within the management target, the arrangement of the operator, and the management of the transfer of the processing material are performed.

It should be noted that the management target of each work module controller 18 is basically one process, for example, diffusion, CV
D, exposure, development, and the like. If there is a pre-processing step and a post-processing step, a single process group including a main step and processing steps before and after the main step may be set as one management target. As shown in FIG. 2, the transport of the processing material includes transport by a transport device and transport by an operator. If not only transfer by the transfer device but also transfer by an operator can be performed, it is possible to flexibly and promptly respond to a change of a product that is important in multi-product small-quantity production.

Each work module controller 18 is, of course, under the control of the production management unit 3 and, as a result of setting the production amount, does not ignore the basic production information,
A great deal of discretion is allowed in the transport of the processing material, and the most appropriate flow of the processing material is determined from time to time,
The transport control and the semiconductor manufacturing apparatus are controlled based on the determination result. In particular, with regard to the transport of processed materials, a post-process pick-up method is adopted, and if there is no process to be controlled by itself, it is possible to go to the process with the desired processed material, but there are multiple processes that can be taken. If there is one, one of them will be selected in consideration of various circumstances.

FIGS. 3 (A) and 3 (B) show processing capacity (transport, setup, recipe setting, etc.) by the operator of each of the processes A, B, and C and distribution setting of the processing capacity by the semiconductor manufacturing apparatus. This is an example. Conventionally, FIG.
As shown in (B), there is a need to make the processing capacity of the operator and the processing capacity of the semiconductor device relatively uniform. However, in the production management system, in each of the processes A, B, and C, the processing capability of the operator and the processing capability of the semiconductor manufacturing apparatus do not necessarily need to be uniform, and even if there is an imbalance, the entire process as a process may be performed. Smooth production management can be achieved if the target capacity (the sum of the processing capacity of the operator and the processing capacity of the semiconductor device) is relatively uniform between the processes.

The production method of the present invention can be applied not only to the production of semiconductor devices but also to the production of other products.

[0023]

According to the production management method of the first aspect, the production support section is provided for each one of the steps constituting a series of steps for each type, or for each step group including one step and steps before and after it. A work module controller is provided, and each work module controller creates an operator related to the object to be managed, a semiconductor manufacturing apparatus, and instruction information and control information related to the transfer of the processing material, and instructs the operator or the manufacturing apparatus and the transfer based on the information. To control the equipment,
The work module controller allows the operator to be optimally arranged and the work material to be transported at each time, thereby shortening the TAT.

In particular, if each working module controller runs out of working material to be worked by itself,
If the material is transported so as to go to a certain process, the post-process pick-up method (Kanban method) becomes possible, and the flow of the material can be reduced without waste even under multi-product small-quantity production. It can be something.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a production management system used for implementing a production management method of the present invention.

FIG. 2 is a layout diagram for explaining the transfer of a processing material in the implementation of the production management method of the present invention.

FIGS. 3A and 3B are diagrams showing different examples regarding the distribution of the capability by the operator and the capability by the semiconductor manufacturing apparatus in each process.

FIG. 4 is a schematic configuration diagram of a production management system used for implementing a conventional production management method.

[Explanation of symbols]

1 ... Production Management Department, 13a ... Production Support Department, 18.
..Work module controllers.

Claims (1)

[Claims] 1. A production management unit for setting a production amount, giving an instruction regarding production, grasping production results, and managing progress of each process, and a plurality of operation module controllers provided corresponding to each process or a group of related processes. And a production support unit that exchanges information with the production management unit to support production, and wherein each of the work module controllers has a process corresponding to itself based on information from the production management unit or A production management method characterized by creating instruction information and control information relating to a manufacturing apparatus, an operator, and a processing material in a process group, and instructing the operator based on the information and controlling the manufacturing apparatus and the processing material transport apparatus.