JPH1094275A - Multidirectional rotary drive ultrasonic motor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To drive a driven body in an arbitrary direction using a single motor without requiring any special mechanism for switching the direction of driving force. SOLUTION: A rotor 100 is a spherical shell having an opening at a part thereof. A support 200 supports the rotor 100 while wrapping a part thereof. The rotor 100 has outer surface arranged with a whole surface electrode and inner surface arranged regularly with a plurality of piezoelectric elements each fixed with a polarization electrode. A high frequency AC voltage is applied between the polarization electrode and the whole surface electrode to generate an ultrasonic vibration in the rotor thus turning the rotor.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multi-directional rotary drive type ultrasonic motor device in which a high frequency vibration (ultrasonic vibration) is generated by using a piezoelectric element, and the rotor is rotationally driven by the high frequency vibration. Things.

[0002]

2. Description of the Related Art Conventionally, when a driven body is driven in two or three axis directions, two or three motors corresponding to each axis are used. In addition, using one motor, the direction of the driving force is switched by a clutch or a gear,
The driven body is driven in two or three axis directions.

[0003]

When the driven body is controlled to be driven in two or three axes as described above, two or three motors are required. When a driven body is driven in two or three axes using one motor, a clutch or a gear is required to switch the direction of the driving force of the motor.

However, if a plurality of motors are used or a mechanism for switching the direction of the driving force is involved, the structure of the device on which the motor is mounted becomes complicated, and space saving and cost reduction of the device are hindered. It becomes a factor.

Accordingly, it is an object of the present invention to provide a multi-directional rotating mechanism in which a special mechanism for switching the direction of driving force is not required, and a driven body can be driven in any direction by one motor. A drive type ultrasonic motor device is provided.

[0006]

SUMMARY OF THE INVENTION The present invention provides a spherical shell-like rotor having an opening in a part thereof, a support member enclosing a part of the rotor and rotatably supported, and Drive means for generating ultrasonic vibration to rotate the rotor.

Thus, even with a single motor, the rotor can be driven to rotate in any direction depending on the direction in which the signal voltage for generating the ultrasonic vibration is applied to the polarization electrode.

[0008]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows an embodiment of the present invention. Basically, it is composed of a spherical shell-shaped rotor 100 partially provided with an opening, and a supporting body 200 that wraps a part of the rotor 100 and rotatably supports it. The rotor 100 and the support 200 are in frictional contact.

FIG. 2 shows a cross section of an embodiment of the present invention. The support 200 wraps a part of the spherical shell-shaped rotor 100 having an opening in a part thereof, and
0 is rotatably supported. Support 200 and rotor 1
00 is in frictional contact.

The rotor 100 has a spherical vibrating body 120 having an opening in a part thereof, a full-surface electrode 122 provided on the outer surface of the vibrating body 120, and regularly arranged on the inner surface of the vibrating body 120. The plurality of piezoelectric elements 123 and the plurality of piezoelectric elements 1
23, and a polarization electrode 124 provided on the upper surface.

Here, a high-frequency AC voltage is applied between the entire surface electrode 122 and the plurality of polarization electrodes 124, and the rotor 10
When the ultrasonic vibration is generated at zero, the rotor 100 can rotate. The AC voltage is output from an AC voltage supply unit 125 serving as a driving unit. The AC voltage can be applied to the applied electrode so that the rotation direction can be controlled as described later.

FIG. 3 shows a cross section of another embodiment of the present invention. The support 200 wraps a part of the spherical shell-shaped rotor 100 having an opening in a part thereof, and
0 is rotatably supported. Support 200 and rotor 1
00 is in frictional contact.

The rotor 100 has a spherical shell-shaped vibrating body 130 having an opening in a part thereof, a plurality of piezoelectric elements 131 regularly arranged on the inner surface of the vibrating body 130, and a plurality of piezoelectric elements 13.
And a polarization electrode 132 provided on the upper surface of the first electrode 1. The entire surface electrode 133 is provided on the surface of the support 200 that contacts the rotor 100.

Here, a high-frequency AC voltage is applied between the whole-surface electrode 133 and the plurality of polarization electrodes 132 to apply
When the ultrasonic vibration is generated at zero, the rotor 100 can rotate.

FIG. 4 shows a cross section of still another embodiment of the present invention. The support 200 encloses a part of the spherical shell-shaped rotor 100 provided with an opening in a part, and rotatably supports the rotor 100. The support 200 and the rotor 100 are in frictional contact.

The rotor 100 has a spherical shell-shaped piezoelectric element 140 having an opening in a part thereof, an entire surface electrode 141 provided on the outer surface of the piezoelectric element 140, and regularly arranged on the inner surface of the piezoelectric element 140. It comprises a plurality of polarization electrodes 142.

Here, a high-frequency AC voltage is applied between the entire surface electrode 141 and the plurality of polarization electrodes 142 to apply
When the ultrasonic vibration is generated at zero, the rotor 100 can rotate.

FIG. 5 shows a cross section of still another embodiment of the present invention. The support 200 encloses a part of the spherical shell-shaped rotor 100 provided with an opening in a part, and rotatably supports the rotor 100. The support 200 and the rotor 100 are in frictional contact.

The rotor 100 has a spherical shell-shaped piezoelectric element 150 partially provided with an opening, and a plurality of polarization electrodes 151 regularly arranged on the inner surface of the piezoelectric element 150. The whole surface electrode 152 is provided on the surface of the support 200 that contacts the rotor 100.
Is provided.

Here, a high-frequency AC voltage is applied between the entire surface electrode 152 and the plurality of polarization electrodes 151 to rotate the rotor 10.
When the ultrasonic vibration is generated at zero, the rotor 100 can rotate.

FIG. 6 shows a cross section of another embodiment of the present invention. The support 200 encloses a part of the spherical shell-shaped rotor 100 provided with an opening in a part, and rotatably supports the rotor 100. The support 200 and the rotor 100 are in frictional contact.

The rotator 100 has a spherical shell-shaped piezoelectric element 160 partially provided with an opening, an entire surface electrode 161 provided on the inner surface of the piezoelectric element 160, and regularly arranged on the outer surface of the piezoelectric element 160. And a plurality of polarization electrodes 162.

Here, a high-frequency AC voltage is applied between the entire surface electrode 161 and the plurality of polarization electrodes 162 to apply
When the ultrasonic vibration is generated at zero, the rotor 100 can rotate.

FIG. 7 shows a cross section of still another embodiment of the present invention. The support 200 encloses a part of the spherical shell-shaped rotor 100 provided with an opening in a part, and rotatably supports the rotor 100. Support 200
And the rotor 100 are in frictional contact.

The rotor 100 has a spherical shell-shaped piezoelectric element 170 partially provided with an opening, and a full-surface electrode 171 provided on the inner surface of the piezoelectric element 170. A plurality of polarization electrodes 172 are provided on the surface of the support 200 that contacts the rotor 100.

Here, a high-frequency AC voltage is applied between the entire surface electrode 171 and the plurality of polarization electrodes 172 to apply
When the ultrasonic vibration is generated at zero, the rotor 100 can rotate.

FIG. 8 shows an example of a polarization method in which the circumference of the above-mentioned rotor 100 is polarized by the above-mentioned polarization electrodes. In this example, the opening of the rotor 100 or the support 200 is divided into 16 parts in the circumferential direction and seven parts in the direction perpendicular to the circumference. Polarized electrodes are 1 from A1 to A7, B1 to.
There are twelve. For convenience, the X-axis, Y-axis, and Z-axis are determined as shown in the figure, and the rotation directions around the respective axes are θx, θ
y and θz.

FIG. 9 is an expanded view of FIG. The horizontal direction is θx, the vertical direction is θy, and the rotation direction parallel to the paper is θz. FIG. 10 is an example of polarization when the rotor is driven in the θx direction.

Since the θx direction is the horizontal direction on the paper,
As the polarization electrodes, A1 to B7, G1 to J7, and O1 to P7 are selected. When a first AC voltage and a second AC voltage having phases shifted by 90 degrees from each other are applied to the selected polarization electrodes, the first AC voltage is alternately shown in the left and right directions as shown by + and-in FIG. A voltage and a second AC voltage are applied. In this way, the ultrasonic vibration propagates in the left-right direction.

FIG. 11 shows an example of polarization when the rotor is driven in the θy direction. Since the θy direction is the vertical direction in the drawing, C1 to F7 and K1 to N7 are selected as the polarization electrodes. When a first AC voltage and a second AC voltage having phases shifted by 90 degrees from each other are applied to the selected polarization electrodes, the first AC voltage is alternately shown in the vertical direction as indicated by + and-in FIG. A voltage and a second AC voltage are applied. In this case, the ultrasonic vibration propagates in the vertical direction.

FIG. 12 shows an example of polarization when the rotor is driven in the θz direction. Since the θz direction is a rotation direction parallel to the paper surface, all the polarization electrodes are selected. The first polarization electrode is 90 degrees out of phase with the selected polarization electrode.
When the AC voltage and the second AC voltage are applied, the first AC voltage and the second AC voltage are alternately applied as indicated by + and-in the rotation direction parallel to the paper surface as shown in the figure. In this way, the ultrasonic vibration propagates in the rotational direction parallel to the paper.

FIG. 13 shows an example of a circuit configuration as driving means for driving the rotor 100. The polarization electrodes A1 to P7 correspond to the polarization electrodes shown in FIG. By switching the rotation direction switch SW1, θ
The polarization electrodes corresponding to the rotation directions of x, θy, and θz are selected. A first AC voltage or a second AC voltage obtained by phase-shifting the first AC voltage is selectively applied to the selected polarization electrode. When the rotation direction of the rotor is switched to the normal rotation or the reverse rotation direction, the rotation direction can be easily switched by switching the second AC voltage by the forward / reverse inversion switch SW2.

The polarization electrodes A1 to A7 are connected in series by an FET, and B1 to B7 are also connected in series by an FET.
1 to C7 are also connected in series by FETs.
1 to D7, E1 to E7, F1 to F7, G1 to G7, H1
~ H7, I1 ~ I7, J1 ~ J7, K1 ~ K7, L1 ~
L7, M1 to M7, N1 to N7, O1 to O7, P1 to P
7 are also connected in series. Next, A2 and B2,
When A4 and B4 and A6 and B6 are connected in series under the control of FETs, respectively, it is possible to supply a first AC voltage to them, and A1 and B1, A3 and B3, A5
And B5, and A7 and B7 are connected in series under the control of FETs, respectively, so that a second AC voltage can be supplied to them. Similarly, C2 to F2, C4 to F4, C
When 6 to F6 are connected in series under the control of FETs, respectively, it is possible to supply a first AC voltage to them, and to these, C1 to F1, C3 to F3, and C5 to F5 can be supplied.
5, when C7 to F7 are connected in series under the control of FETs, respectively, it is possible to supply the second AC voltage. G1 to J1, G3 to J3, G5 to J5, G
When 7 to J7 are connected in series under the control of FETs, respectively, it is possible to supply a first AC voltage to them, and to supply them to G2 to J2, G4 to J4, and G6 to J6.
Are connected in series under the control of FETs, respectively.
It is possible to supply a second alternating voltage. Also, K
When 1 to N1, K3 to N3, K5 to N5, and K7 to N7 are connected in series under the control of FETs, respectively, it is possible to supply a first AC voltage to these, and to these, K2 to N2, K4 to N4 and K6 to N6 are FE
When connected in series under the control of T, a second AC voltage can be supplied. O2-P2, O4
When P4 and O6 to P6 are connected in series under the control of FETs, respectively, it is possible to supply a first AC voltage to them, and to supply O1 to P1, O3 to P3,
When O5 to P5 and O7 to P7 are connected in series under the control of FETs, respectively, it is possible to supply the second AC voltage.

A control signal for controlling on / off of each FET is a signal for selecting a polarization electrode and θ
It becomes a control signal according to the rotation direction of x, θy, θz. This control signal is given from the switch SW1.

FIG. 14 shows an example in which the motor device of the present invention is used for a joint portion of a robot arm. By reducing the range in which the support 200 wraps the rotor 100, the range of rotation (region) of the arm 400 is increased (the angle α in the figure can be increased).

FIG. 15 also shows an example in which the motor device of the present invention is used for a joint of an arm of a robot. The magnet 4 serves as a frictional contact mechanism between the support 200 and the rotor 100.
10 is used. In this manner, the range in which the rotor 100 is wrapped by the support 200 can be significantly reduced. As a result, the rotation range (region) of the arm 400 can be further increased. Also at this time,
It is convenient to provide an entire surface electrode (magnetic material) 411 around the rotor 100.

FIG. 16 shows an example in which the motor device of the present invention is used for a camera base. A lens barrel 510 is attached to the opening of the rotor 100, and a lens 511 is provided therein. Inside the rotator 100, a photoelectric conversion element 512 as a solid-state imaging element is provided on the optical axis. Further, inside the rotor 100, a driving circuit (TG) for driving the photoelectric conversion element 512, a noise reduction circuit (CDS) for reducing noise of the photoelectric conversion output, an amplifier, and the like are provided. Further, a flexible cable is taken out through the lens barrel 510 and connected to a camera control unit (CCU). As a result, the direction of the camera can be controlled, and the extracted signal can be encoded into a prescribed format. A camera having such a motor is effective as a monitoring camera or a remote control camera.

[0038]

As described above, according to the present invention,
No special mechanism for switching the direction of the driving force is required, and the driven body can be driven in any direction by one motor. Thus, the structure of the device on which the motor is mounted does not become complicated, and further, space saving and cost reduction of the device can be realized.

[Brief description of the drawings]

FIG. 1 is a diagram showing an appearance according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view of the basic configuration of the first embodiment of the present invention.

FIG. 3 is a cross-sectional view of a basic configuration according to a second embodiment of the present invention.

FIG. 4 is a cross-sectional view of a basic configuration according to a third embodiment of the present invention.

FIG. 5 is a cross-sectional view of a basic configuration according to a fourth embodiment of the present invention.

FIG. 6 is a cross-sectional view of a basic configuration according to a fifth embodiment of the present invention.

FIG. 7 is a cross-sectional view of a basic configuration according to a sixth embodiment of the present invention.

FIG. 8 is an explanatory view of a polarized electrode according to the present invention.

FIG. 9 is an explanatory view of a polarization electrode according to the present invention.

FIG. 10 is an explanatory diagram of polarization during operation of the device of the present invention.

FIG. 11 is an explanatory diagram of polarization during operation of the device of the present invention.

FIG. 12 is an explanatory diagram of polarization during operation of the device of the present invention.

FIG. 13 is a diagram showing an example of a drive circuit of the device of the present invention.

FIG. 14 is a diagram showing an example of use of the device of the present invention.

FIG. 15 is a view showing another example of use of the device of the present invention.

FIG. 16 is a view showing still another use example of the device of the present invention.

[Explanation of symbols]

 100 Rotor 200 Supports 120, 130 Vibrators 122, 133, 141 Full-surface electrodes 123, 131, 140 Piezoelectric elements 124, 132, 142 Polarized electrodes 150, 160, 170 Piezoelectric elements 151, 162 172: polarized electrode 152, 161, 171: whole surface electrode.

Claims (10)

[Claims] 1. A spherical shell-shaped rotor having an opening in a part thereof, a support member enclosing a part of the rotor and rotatably supported, and generating ultrasonic vibration in the rotor, And a driving means for rotating the rotor. 2. The rotor according to claim 1, wherein the rotor has a spherical shell-shaped vibrator partially provided with an opening, a full-surface electrode provided on an outer surface of the vibrator, and regularly arranged on an inner surface of the vibrator. A plurality of piezoelectric elements, and a polarization electrode provided on an upper surface of each of the plurality of piezoelectric elements, and applying a high-frequency AC voltage between the full-surface electrode and the plurality of polarization electrodes to the rotor. 2. The multi-directional rotation drive type ultrasonic motor device according to claim 1, wherein the rotor is driven to rotate by generating ultrasonic vibration. 3. The rotator includes a spherical vibrator having an opening in a part thereof, a plurality of piezoelectric elements regularly arranged on an inner surface of the vibrator, and an upper surface of the plurality of piezoelectric elements. A polarization electrode provided on each of the plurality of polarization electrodes, and a full-surface electrode is provided on a surface of the support that contacts the rotor, and a high-frequency AC voltage is applied between the full-surface electrode and the plurality of polarization electrodes. 2. The multi-directional rotary drive type ultrasonic motor device according to claim 1, wherein the rotor is driven to rotate by generating ultrasonic vibrations in the rotor. 4. The rotator includes a spherical shell-shaped piezoelectric element having an opening in a part thereof, an entire surface electrode provided on an outer surface of the piezoelectric element, and regularly arranged on an inner surface of the piezoelectric element. It comprises a plurality of polarization electrodes, and applies a high-frequency AC voltage between the full-surface electrodes and the plurality of polarization electrodes to generate ultrasonic vibrations in the rotor and rotationally drive the rotor. The multi-directional rotation drive type ultrasonic motor device according to claim 1, wherein 5. The rotator has a spherical shell-shaped piezoelectric element having an opening in a part thereof, and a plurality of polarization electrodes regularly arranged on an inner surface of the piezoelectric element. A full-surface electrode is provided on a surface that is in contact with the rotor, and a high-frequency AC voltage is applied between the full-surface electrode and the plurality of polarization electrodes to generate ultrasonic vibrations in the rotor. 2. The multi-directional rotary drive type ultrasonic motor device according to claim 1, wherein the rotary drive is performed. 6. The rotator has a spherical shell-shaped piezoelectric element provided with an opening in a part thereof, an entire surface electrode provided on an inner surface of the piezoelectric element, and regularly arranged on an outer surface of the piezoelectric element. A plurality of polarization electrodes, and applying a high-frequency AC voltage between the full-surface electrodes and the plurality of polarization electrodes to generate ultrasonic vibrations in the rotor and rotationally drive the rotor. The multi-directional rotation drive type ultrasonic motor device according to claim 1, wherein: 7. The rotator includes a spherical shell-shaped piezoelectric element having an opening in a part thereof, a full-surface electrode provided on an inner surface of the piezoelectric element, and a surface of the support that is in contact with the rotor. Is provided with a plurality of polarization electrodes, and applies a high-frequency AC voltage between the full-surface electrodes and the plurality of polarization electrodes to generate ultrasonic vibrations in the rotor and rotationally drive the rotor. The multi-directional rotation drive type ultrasonic motor device according to claim 1, wherein: 8. The AC voltage is a plurality of AC voltages having phases shifted from each other, and selects the polarized electrode to which the AC voltage is applied according to a driving direction of the rotor, and selects the polarized electrode. The method according to any one of claims 2, 3, 4, 5, 6, and 7, wherein the AC voltage is applied between the electrode and the entire surface electrode, and the rotor can be driven to rotate in an arbitrary direction. A multi-directional rotary drive type ultrasonic motor device as described in the above. 9. The multi-directional rotary drive type ultrasonic motor according to claim 1, wherein a region in which the support wraps the rotator is reduced to increase a rotatable range of the rotator. apparatus. 10. The multi-directional rotary drive type ultrasonic motor device according to claim 1, wherein said support and said rotating body are brought into contact with each other by magnetic force.