JPH1091913A - Production of magnetic head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a process for producing a magnetic head which is wide in the permissible range of fusion conditions and is improved in a production yield without the occurrence of such inconvenience as the deformation of the magnetic metallic films in a gap forming part, the expansion of the gap, the mismatching of tracks and the inflow of glass to a window part for conductive windings. SOLUTION: This process for producing the magnetic head consists of joining a pair of magnetic core half bodies formed by forming plural V-grooves on the front surfaces of ceramic or crystallized glass substrate 1, providing the one-side groove wall surfaces of these grooves with magnetic films 2 and packing the glass 3 into the grooves provided with these magnetic films 2 in such a manner that the surfaces (end faces) of the magnetic films 2 face each other. In such a case, the pressure P at the time of the joining described above is set at 13MPa<=P<=20MPa. The glass 3 that a pair of the magnetic core half bodies have respective is so constituted that the glass has compsns. varying from each other and more specifically that the softening points of the each glass 3 vary in a range of 30 to 150 deg.C.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a magnetic head having a high saturation magnetic flux density required for performing high-density recording and reproduction of a video tape recorder and the like.

[0002]

2. Description of the Related Art For example, in the field of magnetic recording, a so-called so-called magnetic head for high-density magnetic recording having excellent high-frequency characteristics is formed by laminating a thin metal magnetic film in layers through an insulating film. A magnetic head using a laminated metal magnetic film has been developed. As such a magnetic head,
For example, a groove is formed in a substrate, and a pair of magnetic core halves having a configuration in which a magnetic metal thin film and an insulating film are alternately laminated along the groove are formed with a gap between the end faces of the magnetic film. A magnetic head (hereinafter referred to as a TFS head) formed by gap welding with a low melting point welding glass so that the substrate and the low melting point glass of the pair of magnetic core halves have the same composition. No. Japanese Patent Application Laid-Open No. 6-338020 discloses a magnetic head in which a pair of magnetic core halves having a metal magnetic film sandwiched in a film thickness direction is gap-fused by a substrate at least partially made of a ferrite material. Therefore, the gap length can be formed with high precision, and no residual stress is generated in the metal magnetic film and the substrate during the gap fusion between the magnetic core halves. A method is disclosed. In such a magnetic head, the track width has been reduced in order to achieve higher density recording.

[0003]

By the way, the above TFS
In the head manufacturing method, when the magnetic core halves are gap-fused together, it is necessary to apply a predetermined pressure to these magnetic core halves for fusion. However, depending on the magnitude of the pressure, inconveniences such as deformation of the metal magnetic film in the gap forming portion, enlargement of the gap, and track mismatching occur. The above tendency is particularly remarkable when the gap is narrowed. Therefore, it is necessary to control the pressing force in the gap fusion. Further, during fusion, a slight change in the gap fusion temperature causes glass to flow into the conductor winding window and occupies a part of the window, so that a predetermined number of turns may not be obtained. Occurs.
In general heads including the one disclosed in JP-A-6-338020, the composition of the glass to be gap-fused is the same in each magnetic core half.
There is a problem that the allowable range for the variation in the fusing temperature is narrow.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned circumstances, and has been described in terms of deformation of a metal magnetic film in a gap forming portion, enlargement of a gap, misalignment of tracks, and inflow of glass into a window for winding a conductive wire. It is an object of the present invention to provide a method of manufacturing a magnetic head which does not cause any inconvenience, has a wide allowable range of fusing conditions, and improves manufacturing yield.

[0005]

According to the first aspect of the present invention, a plurality of V-shaped grooves are formed on the surface of a ceramic or crystallized glass substrate, and a magnetic film is provided on one of the groove walls. A method of manufacturing a magnetic head, comprising joining a pair of magnetic core halves formed by filling a groove provided with the magnetic film with glass so that the magnetic film surfaces (end faces) face each other. Pressure P at 13MPa ≦ P ≦ 20MP
The magnetic head can be manufactured without inconvenience such as deformation of the magnetic film in the gap forming portion, enlargement of the gap, and track mismatching. Things.

According to a second aspect of the present invention, in the first aspect of the present invention, the glasses provided in the pair of magnetic core halves have different compositions from each other. This allows the allowable range for the deposition temperature to be widened.

According to a third aspect of the present invention, in the second aspect of the present invention, each glass provided in the pair of magnetic cores is:
The difference in the softening point of each of the glasses is set in the range of 30 ° C. to 150 ° C., so that the allowable range for the fusion temperature can be widened.

[0008]

Embodiments of the present invention will be specifically described below with reference to the accompanying drawings.
FIG. 1 is a perspective view showing an example of a magnetic head formed by a method of manufacturing a magnetic head to which the present invention is applied.
1 is a substrate, 2 is a metal magnetic film, 3 is a low-melting glass, 4 is a window for winding a wire, and 5 is a window for winding and fixing a wire. FIG.
FIG. 3 is a perspective view showing a part of a magnetic head manufacturing process for explaining an example of a method of manufacturing a magnetic head to which the present invention is applied,
In the figure, 11 is a substrate, 12 is a sendust laminated thin film, 13 is a low melting point glass, and 14 is a window for winding a conductive wire.

In manufacturing a magnetic head, in order to obtain a magnetic core half block, first, as shown in FIG. 2A, a substantially rectangular parallelepiped substrate 11 made of a nonmagnetic material such as crystallized glass or ceramics is used. Predetermined dimensions on the surface,
A plurality of grooves having a substantially V-shaped cross section having a depth are formed by dicing with a diamond blade. One side of this V-shaped groove is a sendust (Fe) which is a metal magnetic film.
-Al-Si) Since it becomes the film-forming portion of the laminated thin film 12, it is particularly mirror-finished. By using a nonmagnetic material for the substrate, the magnetic path of the magnetic head chip can be limited to the sendust laminated thin film 12, and the resonance frequency can be higher than the video band. A sendust film is laminated and deposited on the mirror surface of the substrate 11 on which the plurality of V-shaped grooves have been processed. At this time, the substrate 11 is precision-cleaned in advance, and then set in a vapor deposition apparatus, and the sendust film is removed. S
Intermediate films such as iO2 are alternately laminated until a predetermined total thickness is reached, and this total thickness is set to be the track width of the magnetic head.

Next, as shown in FIG. 2B, a window 14 for winding the conductive wire for imparting an electromagnetic conversion element function is processed, and thereafter, bonding is performed at the time of forming a gap of a magnetic head later. Glass 13 serving as an agent is filled in the V-shaped groove. Then, the raised portion of the glass is removed, and the sendust laminated thin film 12 is ground to a small extent by a diamond cup-type grindstone until the sendust laminated thin film 12 is slightly exposed.
A magnetic core half block is obtained, after which such a magnetic core half block is cut into a magnetic core half.
The exposed surface of the sendust laminated thin film of the magnetic core half is further polished by fine diamond free abrasive grains. Then, the magnetic core halves are opposed to each other via a gap so that the sendust laminated thin film 12 becomes linear, and are aligned and fused. As a result, the magnetic core halves are joined and integrated.

At this time, the pressure P at the time of fusing the magnetic core halves is set within a range of 13 MPa ≦ P ≦ 20 MPa. If the pressure is out of the above range and the pressure is small, the magnetic core halves face each other. Although the sendust laminated thin film 12 was aligned so as to be straight,
When the force for fixing the magnetic core halves is weak, the track may be displaced due to expansion of the core when moving the core or at a high temperature, and when the pressure is outside the above range, the pressure is large,
When the glass 13 is softened by high temperature, the sendust laminated thin film in the gap forming portion may be deformed, or when the core is warped, the core itself may be deformed and the gap forming portion may be widened.

However, if fusion is performed in such a pressure range,
As described above, there is no inconvenience such as deformation of the sendust laminated thin film in the gap forming portion, enlargement of the gap, and track mismatch. Further, at this time, the melting temperature is very important. If it is too high, the deformation of the sendust laminated thin film in the gap forming portion becomes remarkable, and the glass flows into the window for winding the conductive wire, so that one part of the window portion is formed. In some cases, a predetermined number of turns cannot be obtained due to occupation of the part. Conversely, if the temperature is too low, the glass 13 of the magnetic core does not melt, and a magnetic core block cannot be formed. However, if the low-melting glass used for the magnetic core halves to be fused has different compositions in each of the halves, and the substrate has a composition matching the thermal expansion characteristics of each low-melting glass, the control temperature at the time of fusion is controlled. Even if there is some variation in the magnetic core block, the magnetic core block can be formed without the above-described inconvenience, and the yield can be improved. Thereafter, the fused magnetic core block is ground so that the surface on which the magnetic recording medium slides has an appropriate curvature. The wire winding fixing window is formed on both sides of the block. Thereafter, a sliding surface regulating groove is formed by grooving with a dicing saw or the like.

Next, the magnetic head chip is cut off from the magnetic block. The width t is determined by the pitch at which the V-shaped groove is formed and the cutting margin at this time. It is performed by a saw or the like. Thereafter, a conductive wire is wound so as to reach a predetermined inductance as an electromagnetic conversion element, and the sliding surface of the magnetic recording medium is precisely polished to complete a magnetic head as shown in FIG.

[0014]

As is clear from the above embodiments,
The following effects can be obtained by the method of manufacturing a magnetic head according to the present invention. According to the first aspect of the present invention, in the method of manufacturing a TFS head, the pressure P at the time of gap fusion is set to 13 MPa ≦ P ≦ 20M.
By setting to Pa, the magnetic head can be manufactured without inconveniences such as deformation of the metal magnetic film in the gap forming portion, enlargement of the gap, and track mismatch.

According to the second and third aspects of the present invention, the low-melting glass used for the pair of magnetic core halves to be fused has different compositions or different softening temperature characteristics, so that there is a slight variation in the control temperature. Even if it is, for example, if the metal magnetic film of the gap forming portion is excessively high, or the problem of insufficient number of turns due to the occupation of the glass window flowing into the window for winding the lead wire, or conversely, The magnetic head can be manufactured without a problem such as poor block formation due to unmelted glass when the temperature is too low, and the yield can be improved.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an example of a magnetic head formed by a method of manufacturing a magnetic head to which the present invention is applied.

FIG. 2 is a perspective view illustrating a part of a magnetic head manufacturing process for describing an example of a magnetic head manufacturing method to which the present invention is applied.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Substrate, 2 ... Metal magnetic film, 3 ... Low melting point glass, 4 ... Conductor winding window part, 5 ... Conductor winding fixing window, 11 ... Substrate, 1
2 ... Sendust laminated thin film, 13 ... Low melting point glass, 14 ...
Window for winding wire.

Claims (3)

[Claims] 1. A plurality of V-shaped grooves are formed on the surface of a ceramic or crystallized glass substrate, a magnetic film is provided on one of the groove walls, and glass is filled in the groove provided with the magnetic film. In a method for manufacturing a magnetic head in which a pair of magnetic core halves formed by joining the magnetic film surfaces are opposed to each other, the pressure P at the time of joining is set to 13 MPa ≦ P
≦ 20 MPa, a method for manufacturing a magnetic head. 2. The method according to claim 1, wherein each of the substrates and the glass of the pair of magnetic core halves has a different composition. 3. The glass of each of the pair of magnetic core halves has a softening point difference of 30 ° C. to 1 ° C.
3. The method according to claim 2, wherein the temperature is in a range of 50 [deg.] C.