JPH08203010A - Manufacture of magnetic head - Google Patents

Abstract

PURPOSE: To suppress the occurrence of a gap length defect and to improve the manufacturing yield. CONSTITUTION: When plural track width control grooves are formed on a magnetic substrate, and when winding wire grooves 18, 26 and glass grooves 19, 27 are formed in the direction orthogonally crossing the track width control grooves, the glass grooves 19, 27 are formed so as to open to one side edge of the magnetic substrate, and a pair of magnetic core half body blocks 23, 24 are formed. Then, in the state that the positions of the track width control grooves, the winding wire grooves 18, 26 and the glass grooves 19, 27 of a pair of magnetic half body blocks 23, 24 are respectively matched with each other, while pressing them, welding glass 29, 30 are melt and filled up into gap parts formed between the winding wire grooves 18, 26 and between the glass grooves 19, 27 respectively, and a pair of magnetic core half body blocks 23, 24 are joined and integrated, and are divided in a prescribed width. At this time, the width w in the depth direction of the glass grooves 19, 27 is made 20% or below of the whole length W by one piece of magnetic head in the depth direction of the magnetic substrate.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head manufacturing method for manufacturing a high density recording magnetic head mounted on a video tape recorder or the like.

[0002]

2. Description of the Related Art For example, in a magnetic recording / reproducing apparatus such as a VTR (video tape recorder), a track width and a gap length of a magnetic head are being narrowed down for the purpose of high density recording and a magnetic recording medium. A high coercive force magnetic recording medium such as a so-called metal tape using a ferromagnetic powder as a magnetic powder or a vapor deposition tape in which a ferromagnetic metal material is directly deposited on a base film has been used.

Further, in order to correspond to the above-mentioned high coercive force magnetic recording medium, research is also progressing in the field of magnetic heads, and a magnetic metal material is used for the magnetic core as a magnetic head for the high coercive force magnetic recording medium. Various magnetic heads have been developed. As a typical example of such a magnetic head, there is a metal-in-gap head (so-called MIG head) in which a ferromagnetic oxide material is used as a main core and a ferromagnetic metal material is arranged in the vicinity of a magnetic gap.

In the MIG head described above, a pair of magnetic core halves each having a metal magnetic film adhered to the opposite surface of a magnetic core substrate made of an oxide magnetic material such as ferrite, abut the metal magnetic films. The magnetic gaps (front gap and back gap) are formed between the abutting surfaces of the metal magnetic film.

At this time, a gap forming surface parallel to the magnetic gap is formed at a position corresponding to the magnetic gap on the opposing surface of the magnetic core substrate, and the track width of the magnetic gap is formed at both ends of the gap forming surface. A track width regulating groove for regulating is provided. Therefore, the metal magnetic film deposited along the shape on the facing surface of the magnetic core substrate is parallel to the magnetic gap on the gap forming surface. Further, fused glass is filled between the groove portions formed between the pair of magnetic core halves by the track width regulating groove, and the pair of magnetic core halves are joined and integrated.

The MIG head is formed as follows. That is, first, the surface of the substrate, such as a plate-shaped magnetic ferrite material, on which the track width regulating groove is formed is ground. Next, a track width regulating groove is formed on the substrate by machining.

Next, a winding groove and a glass groove having a substantially U-shaped cross section are formed on the substrate by machining in a direction orthogonal to the track width regulating groove. Subsequently, each groove forming surface is mirror-finished by polishing or the like.

Further, a ferromagnetic metal film is formed on the mirror-finished surface by a method such as a sputtering method, and a plurality of track width regulating grooves 102 and the tracks are formed on one main surface 101a as shown in FIG. A pair of magnetic core half blocks (one magnetic core half block 1 in FIG. 18 is formed with a winding groove 103 and a glass groove 104 which are orthogonal to the width regulating groove 102 and a metal magnetic film 105 are also formed.
Only 01 is shown. ) Get.

Next, a gap film (not shown) is formed on the metal magnetic film 105 of the pair of magnetic core half blocks by a sputtering method, a vapor deposition method or the like.

Next, as shown in FIG. 19, the pair of magnetic core half blocks 101 and 111 are made to face each other so that the metal magnetic films 105 and 115 are butted against each other, and a plurality of track width regulating grooves 102 are provided. , 112, the winding grooves 103, 113, and the glass grooves 104, 114 are aligned, and the fused glass is formed between the winding grooves 103, 113 and between the groove portions formed between the glass grooves 104, 114. 106 and 107 are arranged respectively.

The magnetic core half blocks 101, 1
As shown in FIG. 20, the fused glasses 106 and 107 are melted and filled by pressurizing 11 and bringing them into contact with each other to bond and integrate the pair of magnetic core half blocks 101 and 111.

Finally, the pair of magnetic core half blocks 101 and 111, which have been joined and integrated, are divided into a predetermined width to obtain a magnetic head.

[0013]

However, in the MIG head manufactured as described above, a defect of a gap length is apt to occur and a manufacturing yield is not good.

As described above, even in the MIG head,
Narrow track widths and narrow gap lengths are being advanced for high-density recording, and the track width is set to 15 μm or less, for example. As the track width is narrowed in this way, the gap between the track width regulating grooves, that is, the magnetic gap forming portion is chipped when the track width regulating groove is formed, when each groove forming surface is mirror-finished, or when dividing into a predetermined width. Tends easily.

Further, in manufacturing the MIG head, the depth direction of the magnetic gap of the substrate, which is a plate-shaped magnetic ferrite material forming the magnetic core half block in order to keep the manufacturing cost as low as possible and to improve the productivity. Is approximately equal to the length of the magnetic core half block in the depth direction. Therefore, the glass groove 104 having a substantially U-shaped cross section and the one side edge 101 of the magnetic core half block 101 of the magnetic core half block 101 having the winding groove 103 and the glass groove 104 as shown in FIG.
The thickness t in the depth direction of the portion 108 between 0.
It will be about 1 mm.

That is, the magnetic core half block 10 described above.
The portion 108 between the glass groove 104 and the one side edge 101b
Is a very small columnar protrusion having a cross-sectional area of about 0.1 mm × 15 μm, and its rigidity becomes extremely small. Then, after the track width regulating groove, the winding groove, and the glass groove are formed, each groove forming surface is mirror-finished or divided into a predetermined width, the magnetic core half block 101 of the magnetic core half block 101 as shown in FIG. Glass groove 104 and one side edge 101
A portion 108 between b (hereinafter, referred to as a protruding portion 108).
Very easily chipped or broken.

By the way, when manufacturing the above-mentioned MIG head, due to a processing strain in forming each groove on a substrate made of a magnetic ferrite material and a difference in coefficient of thermal expansion in forming a metal magnetic film on a substrate made of a magnetic ferrite material, 23, a pair of magnetic core half blocks 101, 111
(In FIG. 23, only one magnetic core half block 101 is shown.) For example, one main surface 10 which is a groove forming surface.
A warp occurs such that the side 1a is convex. The warp amount L of the warp is usually about 5 to 6 μm. Therefore, when such a pair of magnetic core half blocks 101 and 111 are joined and integrated, pressure is applied as described above, and the pressure is 10 to 2 at which the warp can be eliminated.
It is set to 0 MPa (about 100 to 200 kg / cm ² ).

Further, the MIG head as described above is usually required to have a gap length accuracy of about ± 0.01 μm, and in order to achieve the above gap length accuracy,
It is necessary to uniformly apply a pressure for joining and integrating the pair of magnetic core half blocks 101 and 111 to the entire butting surfaces. However, if the projection 108 is chipped or broken as described above, the pressure cannot be uniformly applied to the entire butting surface, and a gap length defect is likely to occur.

That is, as shown in FIG. 24, when a pair of magnetic core half blocks 101 and 111 are made to face each other so as to be joined and integrated, and when they are pressed against each other in the direction indicated by the arrow P in the drawing, Projection 108 of magnetic core half block 101 and projection 11 of magnetic core half block 111
When trying to butt between the eight, the protrusions 108, 118
The magnetic gap forming side on the opposite side is opened, it is difficult to achieve the above gap length accuracy, a gap length defect is likely to occur, and the manufacturing yield is not good.

In order to solve these problems, the protrusion 10
It is considered that the thickness t of 8, 118 in the depth direction is increased (for example, about 0.3 mm) to prevent the above-described chipping or breaking of the protrusions 108, 118 and prevent the occurrence of a defective gap length. However, for that purpose, the length of the substrate made of a magnetic ferrite material in the depth direction needs to be made larger than in the conventional case, which causes an increase in manufacturing cost, which is not preferable.

Therefore, the present invention has been proposed in view of the conventional circumstances. Even if the track width is narrowed and the gap length is narrowed, a defective gap length is unlikely to occur, and the manufacturing yield is improved.
An object of the present invention is to provide a magnetic head manufacturing method capable of manufacturing a magnetic head without increasing the manufacturing cost.

[0022]

In order to solve the above-mentioned problems, the present invention forms a plurality of track width restricting grooves for restricting the track width of a magnetic gap on one main surface of a magnetic substrate, A winding groove and a glass groove are formed in a direction orthogonal to the regulation groove to form a pair of magnetic core half blocks, and the pair of magnetic core half blocks are opposed to each other with each groove portion forming surface facing each other. The pair of magnetic cores are melt-filled with a fused glass between the groove portions formed between the winding grooves of the pair of magnetic core half blocks and the groove portions formed between the glass grooves while applying pressure in the aligned state. In a method of manufacturing a magnetic head in which a half head block is joined and integrated and then divided into a predetermined width to obtain a magnetic head, a glass groove is formed to be open at one side edge of a magnetic substrate, and a magnetic gap Depth In those, wherein the width w of the glass groove is 20% or less of the total length for one piece of magnetic substrate a magnetic head.

In the magnetic head manufacturing method of the present invention, a metal magnetic film may be formed on each groove forming surface of the magnetic substrate.

Further, in the magnetic head manufacturing method of the present invention, the track width of the magnetic gap may be 15 μm or less.

[0025]

In the method of manufacturing a magnetic head according to the present invention, a plurality of track width regulating grooves for regulating the track width of the magnetic gap are formed on the magnetic substrate, and winding grooves are formed in the direction orthogonal to the track width regulating grooves. When forming the glass groove,
Since the glass groove is formed so as to open at one side edge of the magnetic substrate to form a pair of magnetic core half blocks, a columnar shape is formed between the one side edge of the magnetic core half block and the glass groove as in the conventional case. No protrusion is formed, and no chipping or breakage occurs at this portion. Therefore, when the fusion glass is melt-filled between the groove portions formed between the winding grooves and the groove portions formed between the glass grooves while pressurizing in order to join and integrate the pair of magnetic core half blocks, The pressure is uniformly applied to the entire abutting surface to ensure the accuracy of the gap length. Further, the width w of the glass groove in the depth direction is 20 which is the total length W of one magnetic head in the depth direction of the magnetic substrate.
%, The abutting surface is sufficiently secured and the gap length accuracy is secured.

[0026]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments to which the present invention is applied will be described in detail below with reference to the drawings. In the magnetic head manufacturing method of this embodiment, the MIG head is manufactured.

First, a magnetic head manufactured by the method of manufacturing a magnetic head of this embodiment will be described.

As shown in FIG. 1, the magnetic head has magnetic core substrates 3 and 4 made of an oxide magnetic material such as ferrite.
A pair of magnetic core halves 1 and 2 having metal magnetic films 5 and 6 adhered to the opposite surfaces of are joined and integrated so that the metal magnetic films 5 and 6 are butted. A magnetic gap g ₁ (front gap) that operates as recording / reproducing and a magnetic gap g ₂ (back gap) that does not operate as recording / reproducing are formed between the abutting surfaces of the metal magnetic films 5 and 6.

At this time, as shown in FIG. 2, at the positions corresponding to the magnetic gaps g ₁ and g ₂ on the opposing surfaces of the magnetic core substrates 3 and 4, a gap forming surface 3a parallel to the magnetic gaps g ₁ and g ₂ is formed. , 4a are formed (only the magnetic gap g ₁ is shown in FIG. 2), and the magnetic gap g is formed at both ends thereof.
Track width restricting grooves 7 and 8 for restricting the track widths of ₁ and g ₂ are provided.

That is, the metal magnetic films 5 and 6 deposited on the facing surfaces of the magnetic core substrates 3 and 4 along the shape thereof are:
On the gap forming surfaces 3a and 4a, the magnetic gap g ₁
Will be parallel to. Further, since the widths of the gap forming surfaces 3a and 4a of the magnetic core substrates 3 and 4 are restricted by the track width restricting grooves 7 and 8, the widths of the abutting surfaces of the metal magnetic films 5 and 6 are naturally restricted. Becomes Therefore, the track width Tw of the magnetic gaps g ₁ and g ₂ formed between the abutting surfaces of the metal magnetic films 5 and 6 is also regulated. (Only the magnetic gap g ₁ is shown in FIG. 2.)
In this embodiment, the track width Tw is 15 μm or less.

Further, fused glass 9, 10 is filled between the groove portions formed by the track width regulating grooves 7, 8 on the magnetic gap g ₁ (front gap) side and the magnetic gap g ₂ (back gap) side, The magnetic core halves 1 and 2 are joined and integrated.

Further, the magnetic core substrates 3 and 4 are provided with winding grooves 11 and 12 for winding a coil and winding auxiliary grooves 13 and 14 at positions opposite to these. In this magnetic head, a step is provided on the sliding surface of the magnetic recording medium that is in sliding contact with the magnetic recording medium in order to ensure contact with the magnetic recording medium.

Next, a method of manufacturing the magnetic head of this embodiment will be described. First, as shown in FIG. 3, a magnetic substrate 16 made of an oxide magnetic material such as ferrite is prepared, and one main surface 16a for forming each groove of the magnetic substrate 16 is prepared.
After the grinding process is performed on the first main surface 16a, a track width regulation groove 17 for regulating the width of the abutting surface of the magnetic core substrate, that is, the track width Tw of the magnetic gap g ₁ formed in the subsequent step is machined. A plurality is formed by processing.

An oxide magnetic material such as ferrite is used as the magnetic substrate 16 as described above, and as such an oxide magnetic material, ferrite single crystal or polycrystal, or a bonding material thereof is used. Can be mentioned. In this example, a ferrite single crystal was used.

Then, as shown in FIG. 4, a winding groove 18 having a substantially U-shaped cross section for winding a coil and a glass groove 19 having a substantially V-shaped cross section for performing glass fusion bonding are formed in a track width. Formed by machining so as to be orthogonal to the restriction groove 17,
One main surface 16a of the magnetic substrate 16 is mirror-finished by polishing or the like. In this embodiment, two winding grooves 18 and two glass grooves 19 are formed so that the magnetic substrate 16 can form two magnetic core half blocks.

At this time, one side surface 18a of the winding groove 18
Is an inclined surface because it regulates the depth (depth) of the magnetic gap g ₁ (front gap) formed in the subsequent step. The other side surface 18b of the winding groove 18
May be an inclined surface or a vertical surface.

In the present embodiment, as shown in FIG. 5, the glass groove 19 is formed as a groove portion having a substantially V-shaped cross section, and the side surface on the side which becomes the bottom surface after completion of the magnetic head is one main surface 1.
The width w of the glass groove 19 in the depth direction is set to be 20% or less of the depth W of one magnetic head in the magnetic substrate 16 in the depth direction.

Next, the gap forming surface 16b shown by the shaded portion in the drawing left by the formation of the track width regulating groove 17, the winding groove 18 and the glass groove 19 of the magnetic substrate 16 as shown in FIG. 6 is polished or the like. Mirror processing is performed by.

Then, the magnetic substrate 16 is replaced with the magnetic substrate 16 shown in FIGS.
A pair of block halves (only one of the block halves 20 is shown in the figure) is formed by cutting along the cutting lines indicated by XX 'and YY' in FIG. . At this time, as shown in FIG.
The glass groove 19 of the block half 20 is made of a magnetic substrate.
It is formed to be open at one side edge, and the same applies to the other block half.

Next, as shown in FIGS. 9 and 10, on the gap forming surface 20a of the block half body 20 in which the track width regulating groove 17, the winding groove 18, and the glass groove 19 are formed,
The metal magnetic film 21 is formed by a vacuum thin film forming method such as a sputtering method or a vapor deposition method. At this time, in order to improve the adhesive force between the metal magnetic film 21 and the block half body 20, a base film may be interposed therebetween.

As the metal magnetic film 21, sendust (Fe-Al-Si) and the one to which Ti is added,
A crystalline magnetic metal film made of Fe-Ru-Ga-Si or the like,
Alternatively, a Fe-based or Co-based microcrystalline magnetic metal film or the like may be used, and a laminated film of these may be used. Further, as the base film, an oxide film such as SiO ₂ , Ta ₂ O ₅ or Si ₃ N _{4 is used.}
And the like, and a metal film of Cr, Al, Pt, or the like. In this embodiment, a Fe-Ru-Ga-Si film is formed as the metal magnetic film 21 and Si is used as the base film.
An O ₂ film was formed.

Subsequently, as shown in FIG. 11, the metal magnetic film 2 is formed.
A magnetic core half block 23 is obtained by forming a gap film 22 on the substrate 1 by a method such as a sputtering method or a vapor deposition method so as to form a predetermined gap length. In this embodiment, a SiO ₂ film having a thickness of 100 nm is formed as the gap film 22 by the sputtering method.

Next, as shown in FIG. 12, the magnetic core half block 23 obtained as described above and the magnetic core half block 24 formed in the same manner as described above are joined and integrated, respectively. With the metal magnetic film formed on the opposite surface facing each other through the gap film, the track width regulating grooves, the winding grooves 18, 26, and the glass grooves 19, 27 are aligned, and Fused glass 29,3 between the groove portions of 18,26 and between the groove portions of glass grooves 19,27
Place 0 respectively. Note that, in FIG. 12, the illustration of the metal magnetic film and the track width regulating groove of the magnetic core half blocks 23 and 24 is omitted.

The magnetic core half block 23,
Fusion glass 29, 30 while pressing 24 against each other
Is heated to a temperature at which the fused glass 29, 30 is melted.
Is melt-filled from the winding grooves 18 and 26 to the track width regulating groove or from the glass grooves 19 and 27 to the track width regulating groove. Then, it is cooled to room temperature and fused glass 2
Allow 9,30 to solidify and release pressure. As a result,
As shown in FIG. 3, a pair of magnetic core half blocks 23, 24
Is the fused glass 2 filled between the groove portions of the winding grooves 18 and 26.
9 and the glass grooves 19, 27 are bonded and integrated by the fused glass 30 filled between the groove portions. Incidentally, also in FIG. 13, the illustration of the metal magnetic film and the track width regulating groove of the magnetic core half blocks 23 and 24 is omitted.

At this time, a magnetic gap g ₁ (front gap) and a magnetic gap g ₂ (back gap) not shown are formed between the abutting surfaces of the metal magnetic film not shown.

Finally, the magnetic core half blocks 23, 24
Winding auxiliary grooves are formed at positions opposite to the winding grooves 18 and 26, and the sliding surfaces of these magnetic recording media are subjected to cylindrical grinding.
The magnetic head as shown in FIG. 1 is completed by inclining to a predetermined azimuth angle as necessary and performing step processing to secure a contact width and dividing into a predetermined width (chip thickness).

That is, in the method of manufacturing the magnetic head of this embodiment, the pair of magnetic core half blocks 23 and 24 are used.
The glass grooves 19 and 27 in each magnetic core half block 23,
Since it is formed so as to be open at one side edge of 24, a columnar protrusion is not formed between the one side edge of the magnetic core half block and the glass groove as in the conventional case, and there is no chipping of this portion. It does not break.

Therefore, the pair of magnetic core half blocks 2
Winding groove 1 while applying pressure to join and integrate 3, 24
Even when the fused glass 29, 30 is melt-filled between the groove portions formed between the groove portions 8 and 26 and between the groove portions formed between the glass grooves 19 and 27, the pressure is uniformly applied to the entire abutting surface and the gap length. Accuracy is secured and manufacturing yield is improved.

Since the width w of the glass grooves 19 and 27 in the depth direction is set to be 20% or less of the depth W of one magnetic head in the magnetic substrate 16 in the depth direction,
A sufficient butting surface is ensured when the magnetic core half blocks 23 and 24 are integrally joined, the gap length accuracy is improved, and the manufacturing yield is improved.

Further, in the method of manufacturing the magnetic head of this embodiment, the magnetic head is manufactured without changing the size of the magnetic substrate used, and therefore the manufacturing cost does not increase.

In the above-mentioned embodiment, an example in which the glass groove is formed as a groove portion having a substantially V-shaped cross section has been described. U-shaped ones are also included. That is, FIG.
As shown in FIG. 4, a glass groove 49 is formed in the magnetic substrate 46 as a groove portion having a substantially U-shaped cross section, and at least the surface on the side which becomes the bottom surface after the completion of the magnetic head becomes the groove portion forming surface.
It may be perpendicular to a.

The magnetic substrate 46 is replaced by x- in FIG.
When a pair of block halves are formed by cutting along the cutting lines indicated by x ′ and yy ′, the glass groove 49 is opened at one side edge of the block half 50 made of a magnetic substrate as shown in FIG. Thus, the same effects as those of the above-described embodiment are obtained.

Further, in the above-mentioned embodiment, the example in which the present invention is applied to the manufacture of the MIG head has been described. It goes without saying that the method can be applied as long as it is a method of manufacturing a magnetic head, which is manufactured by melting and filling, and integrally bonding.

Next, the influence of the depth direction width of the glass groove on the gap length accuracy was investigated. That is, when the magnetic head was manufactured according to the above-described embodiment, the width of the glass groove 19 in the depth direction was changed to manufacture each magnetic head, and the occurrence rate of the gap length defect in each magnetic head was investigated. The gap length is 0.2μ here.
m.

Specifically, as shown in FIG. 16, the total length of the magnetic core half body 61 (magnetic substrate) of the manufactured magnetic head in the depth direction is W, and the width of the glass groove 62 in the depth direction is w. Then, the width w of the glass groove 62 in the depth direction is changed so that these ratios w / W are 0.1, 0.15, 0.2.
Magnetic heads of 0, 0.25 and 0.30 were manufactured, and the gap lengths of these magnetic heads were measured by a scanning electron microscope. And the gap length is 0.2
When the gap length was more than ± 0.01 μm, the gap length was determined to be defective, and the occurrence rate was investigated.

For comparison, a magnetic head was manufactured also by the conventional method of manufacturing a magnetic head, and the gap length defect was also investigated for this. However, when a magnetic head is manufactured according to the conventional method of manufacturing a magnetic head, as shown in FIG. 17, the width w of the glass groove 72 in the depth direction and the total length W of the magnetic core half 71 of the magnetic head in the depth direction are manufactured.
And the glass groove 72 has a magnetic core half body 71 of 0.30.
It was formed so as not to cover one side edge.

As a result, the gap length defect occurrence rate was 0% for those having w / W of 0.2 or less. w /
Regarding W of 0.25, the gap length tends to be large, and the gap length defect occurrence rate is 10%.
The gap length of 0.30 also tended to be large, and the defective rate of the gap length was 30%.

In the magnetic head manufactured according to the conventional method of manufacturing a magnetic head, the gap length tends to be large, and the gap length defect occurrence rate was 30%. Further, the glass groove 72 and the one side edge 7 of the magnetic substrate 71.
The protrusions 73 between 1b were frequently chipped or broken.

That is, as in the magnetic head manufacturing method of the present invention, the magnetic head is formed so as to be open at one side edge of the magnetic substrate, and the width w in the depth direction is the total length W in the depth direction of one magnetic head of the magnetic substrate. If a pair of magnetic core half blocks are formed by forming a glass groove that is 20% or less of the above, a pair of magnetic core half blocks are formed between the winding grooves while applying pressure to join and integrate them. It was confirmed that when melt-filling the fused glass between the groove portions formed between the groove portions and the glass groove portion, the pressure is uniformly applied to the entire abutting surfaces to ensure the gap length accuracy.

[0060]

As is apparent from the above description, in the method of manufacturing a magnetic head of the present invention, a plurality of track width regulating grooves for regulating the track width of the magnetic gap are formed in the magnetic substrate, and the above-mentioned track is formed. When forming the winding groove and the glass groove in the direction orthogonal to the width regulating groove, the glass groove is formed so as to be opened to one side edge of the magnetic substrate to form a pair of magnetic core half blocks. As described above, a columnar protrusion is not formed between the one side edge of the magnetic core half block and the glass groove, and no chipping or breakage of this portion occurs. Therefore, when the fusion glass is melt-filled between the groove portions formed between the winding grooves and the groove portions formed between the glass grooves while pressurizing in order to join and integrate the pair of magnetic core half blocks, The pressure is uniformly applied to the entire abutting surface, the accuracy of the gap length is secured, and the manufacturing yield is improved. Further, since the width w of the glass groove in the depth direction is 20% or less of the total length W of one magnetic head in the depth direction of the magnetic substrate, the abutting surface is sufficiently secured and the gap length accuracy is secured. To be done.

[Brief description of drawings]

FIG. 1 is a perspective view showing a magnetic head manufactured by a method of manufacturing a magnetic head to which the present invention is applied.

FIG. 2 is an enlarged plan view of an essential part showing a magnetic gap vicinity part of a magnetic head manufactured by a magnetic head manufacturing method to which the invention is applied.

FIG. 3 is a perspective view showing an example of a method of manufacturing a magnetic head to which the present invention is applied in the order of steps, showing steps of forming a track width regulating groove in a magnetic substrate.

FIG. 4 is a perspective view showing an example of a method of manufacturing a magnetic head to which the present invention is applied, in the order of steps, showing steps of forming winding grooves and glass grooves on a magnetic substrate.

FIG. 5 is a side view showing an example of a method of manufacturing a magnetic head to which the present invention is applied, in the order of steps, showing steps of forming winding grooves and glass grooves on a magnetic substrate.

FIG. 6 is a perspective view showing an example of a method of manufacturing a magnetic head to which the present invention is applied, in the order of steps, and showing a step of performing mirror finishing on a magnetic substrate.

FIG. 7 shows an example of a method of manufacturing a magnetic head to which the present invention is applied in the order of steps, and is a perspective view showing a block half obtained by cutting a magnetic substrate.

FIG. 8 shows an example of a method of manufacturing a magnetic head to which the present invention is applied in the order of steps, and is a side view showing a block half body.

FIG. 9 is a perspective view showing an example of a method of manufacturing a magnetic head to which the present invention is applied in the order of steps, showing steps of forming a metal magnetic film on a block half body.

FIG. 10 is an enlarged side view of an essential part showing an example of a method of manufacturing a magnetic head to which the present invention is applied, in the order of steps, showing a step of forming a metal magnetic film on a block half body.

FIG. 11 shows an example of a method of manufacturing a magnetic head to which the present invention is applied in the order of steps, and is an enlarged side view of relevant parts showing a step of forming a gap film on a metal magnetic film.

FIG. 12 is a perspective view showing an example of a method of manufacturing a magnetic head to which the present invention is applied, in the order of steps, and showing a step of joining and integrating a pair of magnetic core half blocks.

FIG. 13 is a perspective view showing an example of a method of manufacturing a magnetic head to which the present invention is applied in the order of steps, showing a state in which a pair of magnetic core half blocks are joined and integrated.

FIG. 14 is a side view showing a step of forming a glass groove in a magnetic substrate in another example of the method of manufacturing a magnetic head to which the present invention is applied.

FIG. 15 is a side view showing a block half body of another example of the method of manufacturing a magnetic head to which the present invention is applied.

FIG. 16 is a schematic diagram showing an example of the relationship between the entire length of the magnetic core half in the depth direction and the width of the glass groove in the depth direction.

FIG. 17 is a schematic diagram showing another example of the relationship between the total length of the magnetic core half in the depth direction and the width of the glass groove in the depth direction.

FIG. 18 is a perspective view showing a method of manufacturing a conventional magnetic head in the order of steps and is a perspective view showing a step of forming a magnetic core half block.

FIG. 19 is a perspective view showing a method of manufacturing a conventional magnetic head in the order of steps, showing a step of joining and integrating a pair of magnetic core half blocks.

FIG. 20 is a perspective view showing a method of manufacturing a conventional magnetic head in the order of steps, and showing a state in which a pair of magnetic core half blocks are joined and integrated.

FIG. 21 is a side view showing a magnetic core half block formed by a conventional magnetic head manufacturing method.

FIG. 22 is a perspective view showing a magnetic core half block formed by a conventional magnetic head manufacturing method.

FIG. 23 is a schematic view showing a state where the magnetic core half block is warped in the conventional method of manufacturing a magnetic head.

FIG. 24 is a schematic view showing a state in which a magnetic gap forming side is opened when joining a pair of magnetic core half blocks in a conventional method of manufacturing a magnetic head.

[Explanation of symbols]

 16 ... Magnetic substrate 16a ... One main surface 17 ... Track width regulation groove 18, 26 ... Winding groove 19, 27 ... Glass groove 21 ... Metal magnetic film 23, 24 ...・ Magnetic core half block 29, 30 ... Fused glass

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kazuhisa Goto Takae Nakata-cho, Nakata-cho, Tome-gun, Miyagi Prefecture Kano Sakae 30 Sony Precision Magne Stock Company In-house

Claims (3)

[Claims] 1. A plurality of track width regulating grooves for regulating a track width of a magnetic gap are formed on one main surface of a magnetic substrate, and a winding groove and a glass groove are formed in a direction orthogonal to the track width regulating grooves. To form a pair of magnetic core half blocks, and the pair of magnetic core half blocks are opposed to each other with the groove forming surfaces facing each other. Fused glass is melt-filled between the groove portions formed between the winding grooves and the groove portions formed between the glass grooves to join and integrate the pair of magnetic core half blocks, and then cut into a predetermined width. In a method of manufacturing a magnetic head, a glass groove is formed so as to be opened at one side edge of a magnetic substrate, and the width w of the glass groove in the depth direction of the magnetic gap is a magnetic substrate. 20% of the total length of the individual worth
A method of manufacturing a magnetic head, characterized in that: 2. The method of manufacturing a magnetic head according to claim 1, wherein a metal magnetic film is formed on each groove forming surface of the magnetic substrate. 3. The method of manufacturing a magnetic head according to claim 1, wherein the track width of the magnetic gap is 15 μm or less.