JPH06309617A - Magnetic head and its production - Google Patents

Abstract

PURPOSE:To produce a magnetic head excellent in productivity and durability. CONSTITUTION:Laminated films 2a, 2b each formed by laminating a soft magnetic thin film of 'Sendust(R)', etc., having a high saturation magnetic flux density and a thin film of a nonmagnetic nonconductor such as SiO2 are disposed on substrates 1a, 1b of a nonmagnetic material such as crystallized glass and the substrates 1a, 1b are bonded with melt bonding glass 3 having a low m.p. The substrates 1a, 1b have a window 5 for winding to be wound with winding wire and a glass surface tension controlling film 4 of Cr, Ti, Ag, Cu, etc., has been disposed on the inner surface of the window 5.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head used for a high-density recording medium in an electronic device for high-density recording / reproduction such as a video tape recorder, and a manufacturing method thereof.

[0002]

2. Description of the Related Art In recent years, with the increase in density of magnetic recording, a magnetic recording medium such as a magnetic tape has a high coercive force, and a magnetic head has a narrow track and a material having a high saturation magnetic flux density is required.

As a conventional magnetic head, for example, there is one as shown in FIG. The structure of this magnetic head is
Substrates 101a and 101b made of a non-magnetic material, in which laminated films 102a and 102b in which a soft magnetic thin film having a high saturation magnetic flux density and a non-magnetic non-conductive thin film are laminated, are fused by a low melting point fused glass 103. The window for winding 105 around which the winding is wound is provided.

Next, a method of manufacturing the conventional magnetic head will be described with reference to FIGS. On the surface of a substantially rectangular parallelepiped substrate 101a made of a non-magnetic material such as crystallized glass or ceramics, V having a constant width and depth in cross section
A plurality of V-shaped grooves having a V shape are continuously formed. Then, on one surface of the V-shaped groove, a laminated film 102a in which a soft magnetic thin film such as sendust and a non-magnetic non-conductor thin film such as silicon dioxide (hereinafter referred to as SiO ₂ ) are alternately laminated is vacuum-deposited. Method, sputtering method, or the like. Then, the low-melting glass 103 is filled so as to fill each V-shaped groove, and thereafter, the surface of the low-melting glass is polished into a flat surface until the apex position of the V-shaped groove is reached. A winding groove 105a to be a window is formed. In this way, the one-sided block 106a as shown in FIG. 7 is obtained. Next, the gap surface is polished, and a gap layer is formed using a nonmagnetic gap material such as SiO ₂ by a vacuum vapor deposition method, a sputtering method or the like.
Then, just as with the one-sided block 106a, the one-sided block 106b, which has completed the polishing of the gap surface and the formation of the gap layer, is made to face the one-sided block 106a and the gap surface, and the respective laminated films 102a and 102b are aligned on the same straight line. The low melting point glass 103 is heated by being positioned.
By welding with, a block as shown in FIG. 8 is obtained. This block is cut along the dotted line in FIG. 8 and the magnetic tape sliding surface is processed into a curved surface to obtain a magnetic head as shown in FIG.

In addition, as shown in FIG. 9, a type called a double head type in which two magnetic heads 110 and 120 are arranged on one head base 130 is also proposed. As shown in FIG. 10, the structure of the magnetic head 110 includes substrates 111a and 111b made of a non-magnetic material in which laminated films 112a and 112b in which a soft magnetic thin film having a high saturation magnetic flux density and a non-magnetic non-conductive thin film are laminated are arranged. Is welded by the low melting point glass 113, and has a winding window 115 around which a winding is wound.

The method of manufacturing this type of magnetic head is almost the same as that described above, but there are the following differences in structure. In the case of the double head type, since two magnetic heads are arranged on one head base, the substrate 111a
The substrate 111b and the substrate 111b do not have a symmetrical shape with respect to the welding surface, and the magnetic tape sliding surface of each magnetic head is processed into a curved surface in consideration of the arrangement position. The shape of the winding window of the magnetic head is designed in consideration of the magnetic path, and has a shape as shown in FIG.

[0007]

However, in the above-mentioned conventional example, the cross-sectional view taken along the line YY in FIG. 8 due to the surface tension of the melted low-melting glass during welding by heating with the low-melting glass. As shown in FIG. 11, the low-melting-point glass 103 has a shape that partially bulges in the winding groove 105a, and as shown in FIG. Shrinks. Therefore, if an error occurs in the melting condition of the low-melting-point glass and the melting temperature is too high, the shape of the winding window is deformed and the opening area shrinks, making it difficult to wind the winding a sufficient number of turns. Or, it was difficult to automate winding work. On the other hand, if the melting temperature is too low, the adhesive strength becomes insufficient, causing cracks and damages of the magnetic head, which not only lowers the productivity but also deteriorates the durability.

Further, in the case of the double head type, in addition to the above-mentioned problems, the shape of the window for winding is deformed and the opening area is contracted at the time of welding by heating using the low melting point glass. It is necessary to process the winding groove not only on the substrate 111a side of substrate 10 but also on the substrate 111b side. For this reason, the positional relationship as shown in FIG. 12 may be caused due to misalignment of positioning at the time of welding and a processing error, and a defective product having a gap 117 may be generated, which significantly deteriorates the productivity. .

The present invention has been made to solve the above problems, and provides a magnetic head suitable for automation of winding work, excellent in productivity and durability, and a manufacturing method thereof. The purpose is to provide.

[0010]

In order to solve the above problems, according to the present invention, in a magnetic head having a winding window formed by welding two substrates with a low melting point glass, an inner surface of the winding window is formed. In addition, the glass surface tension suppressing film is arranged. Further, the magnetic head may be a double head type magnetic head having two head portions on one head base.

Further, in the present invention, the winding groove is formed on at least one of the two substrates having the groove portion in which the soft magnetic thin film and the nonmagnetic thin film are alternately laminated and filled with the low melting point glass, and the two substrates are formed. In a method of manufacturing a magnetic head in which the above are opposed and welded, a glass surface tension suppressing film is formed on the surface of the winding groove and the surface of the other substrate facing the winding groove, and then the low melting glass is melted. The step of welding the two substrates is included.

[0012]

According to the present invention, in the magnetic head having the above-described structure, chromium (Cr), titanium (Ti), silver (Ag), copper ( Due to the action of the glass surface tension suppressing film made of Cu or the like, the surface tension of the melted low melting point glass is suppressed, the shape of the winding window is deformed, and the opening area of the winding window is contracted. Never. Therefore, it is possible to form the window for winding almost as designed, and under the melting condition of the low melting point glass at the time of welding, sufficient adhesion can be achieved without the need to control with higher accuracy than the conventional method. Welding with strength is possible. Furthermore, in the case of the double head type,
It is possible to eliminate the step of processing the winding groove only on one substrate side and processing the winding groove on the other substrate.

As described above, according to the present invention, it is possible to provide a magnetic head excellent in productivity and durability and a method for manufacturing the magnetic head.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

First, the first embodiment will be described. FIG. 1 is a perspective view showing the structure of a magnetic head according to the present invention. Reference numerals 1a and 1b are non-magnetic substrates such as crystallized glass and ceramics, 2a and 2b are laminated films in which soft magnetic thin films and non-magnetic thin films are alternately laminated, 3 is a low melting glass, 4 is a glass surface tension suppressing film, Reference numeral 5 is a window for winding. As shown in FIG. 1, the structure of this magnetic head has a laminated film 2 in which a soft magnetic thin film having a high saturation magnetic flux density and a non-magnetic non-conductive thin film are laminated.
Substrates 1a and 1b made of non-magnetic material in which a and 2b are arranged
Is welded by the low-melting glass 3, and has a winding window 5 around which a winding is wound, and the glass surface tension suppressing film 4 is disposed on the inner surface of the winding window 5. There is. In this magnetic head, due to the action of the glass surface tension suppressing film 4, when the low melting glass 3 is welded by heating,
The shape of the winding window 5 does not change, and the winding window 5 does not change.
Can be formed without shrinking the opening area.

Next, a method of manufacturing the magnetic head according to the present invention will be described. A plurality of V-shaped grooves each having a V-shaped cross section with a constant width and depth are continuously formed on the surface of a substantially rectangular parallelepiped substrate 1a made of a non-magnetic material such as crystallized glass or ceramics. In this embodiment, as the substrate 1a,
Crystallized glass was used. Further, in this embodiment, both the width and the depth of the V-shaped groove are set to about 0.7 mm, but the present invention is not limited to this.

Subsequently, on one surface of the V-shaped groove, a laminated film 2a is formed by alternately laminating a soft magnetic thin film such as sendust and a non-magnetic non-conductive thin film such as silicon dioxide (hereinafter referred to as SiO ₂ ). It is formed by a vacuum evaporation method, a sputtering method, or the like. In this embodiment, a sendust film having a thickness of about 5 μm as a soft magnetic thin film and a SiO ₂ film having a thickness of about 0.2 μm as a non-magnetic thin film are alternately formed in a total of 20 layers, 10 layers each.
Although the layers and the layers were formed by the vacuum vapor deposition method to form the laminated film 2a, the thickness of each film and the number of laminated layers are not limited to this, and the film forming method is also limited to the above-described embodiment. Alternatively, a sputtering method or the like may be used.

Then, the low-melting glass 3 is filled so as to fill each V-shaped groove, and thereafter, the surface of the low-melting glass is polished into a flat surface until the apex position of the V-shaped groove is reached. , Chromium (hereinafter referred to as Cr), titanium (hereinafter referred to as Ti), silver (hereinafter referred to as Ag), copper (hereinafter referred to as Cu)
The glass surface tension suppressing film 4 made of, for example, is formed on the surface of the winding groove 5a to be the winding window by a vacuum deposition method, a sputtering method, or the like. In this way, the one-sided core block 6a as shown in FIG. 2 is obtained. In this embodiment, the winding groove 5a has a depth of about 0.24 mm, and the glass surface tension suppressing film 4 preferably has a thickness of 0.5 μm to 1 μm. Then, C with a film thickness of 0.5 μm
Although the r thin film was formed by the sputtering method, these are not limited to the above-mentioned embodiments.

Next, the gap surface of the one-sided block 6a is polished, and a gap layer is formed using a non-magnetic gap material such as SiO ₂ by a vacuum vapor deposition method, a sputtering method or the like.
Then, just as with the one-sided block 6a, the one-sided block 6b and the one-sided block 6a, which have been subjected to the polishing of the gap surface and the formation of the gap layer, and the one-sided block 6a, have their gap surfaces facing each other, and the respective laminated films 2a and 2b have the same straight line. A block as shown in FIG. 3 is obtained by heating and welding with the low melting point glass 3 while being positioned on the line. When this block is cut at the portion shown by the dotted line in FIG. 3 and the magnetic tape sliding surface is processed into a curved surface, a magnetic head as shown in FIG. 1 is obtained. Here, in this example, as the welding condition, the temperature was heated in the range of 500 to 560 ° C. for 90 minutes, but good results were obtained at any temperature, and it was good in a wide temperature range as compared with the conventional method. It turned out that various welding is possible.

As shown in FIG. 4, which is a sectional view taken along the line X--X in FIG.
By the action of the glass surface tension suppressing film 4, the surface tension of the low melting point glass 3 is suppressed, and the low melting point glass 3 does not partially rise in the winding groove 5a, and the shape is deformed as shown in FIG. The unwinding window 5 could be formed.

As a second embodiment, a magnetic head in the case where the present invention is applied to a double head type in which two magnetic heads are arranged on one head base will be described. Figure 5
FIG. 3 is a perspective view showing the structure of one double-head type magnetic head according to the present invention. As shown in FIG. 5, in the structure of this magnetic head, as in the first embodiment, laminated films 12a and 12b in which a soft magnetic thin film having a high saturation magnetic flux density and a nonmagnetic nonconductor thin film are laminated are arranged. Substrates 11a and 11b made of a non-magnetic material are welded by a low-melting glass 3 and have a winding window 5 around which a winding is wound, and a glass surface tension suppressing film 14 is provided for the winding. It is arranged on the inner surface of the window 15.

This magnetic head is different from the magnetic head of the first embodiment in that two magnetic heads are arranged on one head base, so that the substrate 11a and the substrate 11b have symmetrical shapes with respect to the welding surface. Moreover, the magnetic tape sliding surface of each magnetic head is processed into a curved surface in consideration of the arrangement position, and the shape of the winding window 15 of each magnetic head has a magnetic path. It is designed with consideration.

In the manufacturing process of this magnetic head, the one side block on the substrate 11a side can be manufactured in exactly the same manner as in the first embodiment. However, the substrate 11
In the prior art, a winding groove had to be formed on the b-side one-side block in the same manner as the other one-side block, but the substrate 11b facing the substrate 11a-side winding groove was formed.
Only the glass surface tension suppressing film 14 made of Cr, Ti, Ag, Cu or the like is formed on the surface of the one side block on one side, and the processing step of forming the winding groove is not necessary. Therefore,
The glass window tension suppressing film 14 does not form a winding groove in one block on the side of the substrate 11b, and the window 15 for winding is formed by the action of the glass 13 having a low melting point by heating.
It could be formed without deforming the shape and without shrinking the opening area of the winding window 15.

[0024]

As described above, according to the magnetic head and the method of manufacturing the same of the present invention, chromium (Cr), titanium (Ti), silver (A
The surface tension of the molten low melting point glass is suppressed by the action of the glass surface tension suppressing film made of g), copper (Cu), etc., and the shape of the winding window is deformed or the opening area of the winding window is reduced. It is possible to form the window for winding with a dimension almost as designed without shrinkage. Therefore, it becomes possible to realize a magnetic head suitable for automation of winding work.

Further, according to the present invention, under the melting conditions of the low melting point glass at the time of welding, it is possible to perform welding having sufficient adhesive force without requiring control with higher accuracy than in the prior art. It is possible to improve problems such as insufficient adhesion force caused by the welding process and cracks and damages of the magnetic head, which occurred in the technology.

Further, according to the present invention, in the case of the double head type, the groove for winding is processed only on one substrate side,
The step of processing the winding groove on the other substrate can be made unnecessary, and further, it is possible to prevent the occurrence of defective products caused by misalignment during welding and processing errors.

As described above, according to the present invention, it is possible to provide a magnetic head excellent in productivity and durability and a manufacturing method thereof.

[Brief description of drawings]

FIG. 1 is a perspective view showing a structure of a magnetic head according to an embodiment of the present invention.

FIG. 2 is an explanatory diagram of a method of manufacturing a magnetic head according to an embodiment of the present invention.

FIG. 3 is an explanatory diagram of a method of manufacturing a magnetic head according to an embodiment of the present invention.

FIG. 4 is a cross-sectional view of a block after welding in this embodiment.

FIG. 5 is a perspective view showing the structure of a double-head type magnetic head according to an embodiment of the present invention.

FIG. 6 is a perspective view showing the structure of a conventional magnetic head.

FIG. 7 is an explanatory diagram of a conventional magnetic head manufacturing method.

FIG. 8 is an explanatory diagram of a conventional magnetic head manufacturing method.

FIG. 9 is a diagram showing a configuration of a double head.

FIG. 10 is a perspective view showing the structure of a conventional double-head type magnetic head.

FIG. 11 is a cross-sectional view of a block after welding in the related art.

FIG. 12 is a view showing a shape of a defective double-head type magnetic head of the related art.

[Explanation of symbols]

 1a, 1b, 11a, 11b Substrate 2a, 2b, 12a, 12b Laminated film 3,13 Low melting point glass 4,14 Glass surface tension suppressing film 5,15 Winding window

Claims (3)

[Claims] 1. A magnetic head having a winding window, which is formed by welding two substrates with a low melting point glass, wherein a glass surface tension suppressing film is disposed on the inner surface of the winding window. And a magnetic head. 2. The magnetic head according to claim 1, wherein the magnetic head is a double head type having two head portions on one head base. 3. A winding groove is formed on at least one of two substrates having a groove portion in which soft magnetic thin films and non-magnetic thin films are alternately laminated and filled with low melting point glass, and the two substrates are opposed to each other. In a method of manufacturing a magnetic head for welding,
A step of forming a glass surface tension suppressing film on the surface of the winding groove and a surface facing the winding groove, and then melting the low melting point glass to weld the two substrates together. Method for manufacturing magnetic head.