JPH1087833A - Optical disk - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain an optical disk capable of being written or read by using read oscillation laser beams currently used and having a high recording density by composing it of a metallic layer formed on a base and specified silicon compound layers formed on the metallic layer. SOLUTION: This disk is composed of a metallic layer formed on a base and a plurality of silicon compound layers formed on the metallic layer. Each silicon compound layer is composed of parts which are arranged on the same plane, one of which comprises a polysilane compound comprising repeating units represented by formula I (wherein R1 and R2 are each a (substituted) alkyl, an alkoxyl, an aryl or a heteroaryl (which may have a branch comprising a polysilane comprising repeating Si units) and the other of which comprises a siloxane compound comprising repeating units represented by formula II. The part comprising the siloxane compound can be obtained by exposing a thin film comprising a polysiloxane compound to ultraviolet rays at a wavelength of 250-360nm.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an optical disk including a compact disk.

[0002]

2. Description of the Related Art FIG. 10 is a schematic sectional view of a conventional compact disk. The compact disk has a three-layer structure as shown in FIG. Pits 3 are formed on one surface of the aluminum reflection layer 2 on the surface of the plastic substrate 1. A protective layer 4 is provided on the opposite surface of the aluminum reflector 2.
Is provided.

When reading data from a compact disk, first, laser light in a red region emitted from a laser diode is condensed by an objective lens so as to be focused on the compact disk. Irradiated. The laser light hitting the portion without the pit 3 through the plastic substrate 1 is reflected as it is and returns to the objective lens, and the laser light hitting the portion having the pit 3 is diffracted and returns only a part. The reading of the recording is performed by reading the intensity of the reflected light at this time and converting this into an electric signal.

At present, a method of improving the recording density of a compact disc by making the pits formed in the aluminum reflective layer finer and increasing the density is being sought. However, when the pits formed in the aluminum reflective layer are miniaturized, a problem occurs on the reading side. In other words, it is necessary to shorten the wavelength of laser light used for reading out a record or to use a super-resolution technique for narrowing down reflected light at high density. However, at present, such a technique has not yet been established, and there has been a limit in increasing the density of compact discs.

[0005]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and it is possible to use a red oscillation laser beam which is currently used even when applied as a compact disc and to obtain a high recording density. It is intended to provide an optical disk.

[0006]

The present invention comprises a metal layer formed on a substrate and a plurality of silicon compound layers formed on the metal layer. The silicon compound layer is represented by the following general formula (I): An optical disc characterized in that a portion composed of a polysilane compound having a repeating unit represented by the following formula and a portion composed of a siloxane compound having a repeating unit represented by the following general formula (II) are arranged on the same plane.

[0007]

Embedded image (Wherein R 1 and R 2 may be the same or different from each other, and each represents a substituted or unsubstituted alkyl group,
It represents an alkoxy group, an aryl group or a heteroaryl group.
Further, it may be branched by a polysilane having a Si repeating unit. )

[0008]

Embedded image (Wherein R 1 and R 2 may be the same or different from each other, and each represents a substituted or unsubstituted alkyl group,
It represents an alkoxy group, an aryl group, or a heteroaryl group.
Further, it may be branched by a polysilane having a Si repeating unit. The present invention also provides a substrate, a metal layer formed on the substrate,
A plurality of silicon compound layers formed on the metal layer,
The silicon compound layer is made of a polysilane compound having a repeating unit represented by the following general formula (I), and is an optical disc characterized by having a patterning portion by partial exposure.

[0009]

Embedded image (Wherein R 1 and R 2 may be the same or different from each other, and each represents a substituted or unsubstituted alkyl group,
It represents an alkoxy group, an aryl group, or a heteroaryl group.
Further, it may be branched by a polysilane having a Si repeating unit. The present invention also provides a substrate, a metal layer formed on the substrate,
A silicon compound layer formed on the metal layer, wherein the silicon compound layer comprises a portion composed of a polysilane compound having a repeating unit represented by the following general formula (I) and a repeating unit represented by the following general formula (II) An optical disk characterized in that a portion made of a siloxane compound having the following formula is arranged on the same plane, and the portion made of the siloxane compound contains a coloring pigment.

[0010]

Embedded image (Wherein R 1 and R 2 may be the same or different from each other, and each represents a substituted or unsubstituted alkyl group,
It represents an alkoxy group, an aryl group, or a heteroaryl group.
Further, it may be branched by a polysilane having a Si repeating unit. )

[0011]

Embedded image (Wherein R 1 and R 2 may be the same or different from each other, and each represents a substituted or unsubstituted alkyl group,
It represents an alkoxy group, an aryl group, or a heteroaryl group.
Further, it may be branched by a polysilane having a Si repeating unit. Further, the present invention comprises a substrate, a metal layer formed on the substrate, and a plurality of silicon compound layers formed on the metal layer, wherein the silicon compound layer is represented by the following general formula (I). An optical disc comprising a polysilane compound having a repeating unit, partially having a patterning portion by exposure, and including a coloring pigment in the patterning portion by exposure.

[0012]

Embedded image (Wherein R 1 and R 2 may be the same or different from each other, and each represents a substituted or unsubstituted alkyl group,
It represents an alkoxy group, an aryl group, or a heteroaryl group.
Further, it may be branched by a polysilane having a Si repeating unit. )

[0013]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing a first optical disk according to the present invention; FIG. 1 is a schematic sectional view showing an example of the first optical disk of the present invention.

A metal layer 12 serving as a reflection layer of a laser beam 15 is formed on a substrate 11. Silicon compound layers 13 and 14 are formed on metal layer 12. In the silicon compound layers 13 and 14, a portion 16 made of a polysilane compound and a portion 17 made of a siloxane compound are formed on the same plane, and information is recorded by the size and arrangement of these two portions.

The polysilane compound is a polymer compound having a repeating unit represented by the following general formula (I). The siloxane compound is a compound represented by the following general formula (II).

[0016]

Embedded image (Wherein R 1 and R 2 may be the same or different from each other, and each represents a substituted or unsubstituted alkyl group,
It represents an alkoxy group, an aryl group, or a heteroaryl group.
Further, it may be branched by a polysilane having a Si repeating unit. )

[0017]

Embedded image (Wherein R 1 and R 2 may be the same or different from each other, and each represents a substituted or unsubstituted alkyl group,
It represents an alkoxy group, an aryl group or a heteroaryl group.
Further, it may be branched by a polysilane having a Si repeating unit. When the optical disk is irradiated with the laser light 15, the polysilane compound and the siloxane compound have different refractive indices of laser light (about 1.9 for the polysilane compound and about 1.4 for the siloxane compound). The laser beam reflected from the portion 12 is diffracted at the portion 16 made of polysilane and returns only partially, but the portion 17 made of siloxane
In this case, the diffraction is small and returns to a larger amount than the portion 16 made of the polysilane compound. By detecting the intensity of the light as a signal, information can be read.

When the polysilane compound according to the present invention is used, the silicon compound layers 13 and 14 can be formed as fine patterns as the pits of a conventional compact disk. Further, since the silicon compound layer has a plurality of layers, the amount of information that can be stored in the compact disc to which the present invention is applied can be increased as compared with the conventional case. For example, when the silicon compound layer has two layers, for example, as shown in FIG.
7 is formed over two layers (22), a region (21) where the portion 17 made of a siloxane compound is formed only in one layer, a region (21) where the portion made of a siloxane compound is not formed on any layer ( 23), the amount of laser light reflected from each is different, so that it can be detected as three types of signals "0", "1", and "2" according to the amount of each light. For this reason, by adopting the above structure having a plurality of silicon compound layers, the amount of information that can be stored in a compact disc can be increased.

In the present invention, the higher the number of the stacked silicon compound layers, the higher the density can be achieved. However, in order to sufficiently secure the S / N ratio of the reflected laser light from the optical disk,
Alternatively, it is desirable that the number of layers be within 5 layers in order to facilitate alignment.

The portion comprising the siloxane compound according to the present invention can be obtained by exposing a thin film comprising the polysilane compound according to the present invention to ultraviolet light having a wavelength of 250 nm to 360 nm. Therefore, in order to obtain the first optical disc of the present invention, first, a metal layer is formed on a substrate, a layer made of a polysilane compound dissolved in a solvent by a spin coating method or the like is formed thereon, and after drying, By exposing a layer made of the polysilane compound to a predetermined pattern using a mask or the like, a portion made of the polysilane compound,
It is possible to form a silicon compound layer in which portions composed of a siloxane compound are arranged on the same plane. Further, by repeating the steps from the formation of the layer made of the polysilane compound to the exposure of the predetermined pattern, a plurality of layers can be formed, and the first optical disc of the present invention is obtained.

Further, as shown in FIG. 3, by forming a translucent mirror 18 on the outer surface of the first optical disk of the present invention, the S / N ratio of the laser light reflected from the optical disk can be increased. It is preferable because the signal can be easily detected.

Next, a second optical disk according to the present invention will be described with reference to FIG.
FIG. 4 is a schematic sectional view showing an example of the second optical disk of the present invention.

On the substrate 11, a metal layer 12 is formed. A silicon compound layer 31 is formed on the metal layer.
The silicon compound layer 31 includes a portion 35 made of a polysilane compound and portions 32, 33, and 34 made of a siloxane compound.
Are formed on the same plane, and the siloxane portions 32, 33, and 34 each contain a coloring pigment having a different color. Information is recorded by the size and arrangement of each of these parts.

When the optical disk is irradiated with the laser beam, the reflected light reflected from the metal plate is not added to the portion 35 made of the polysilane compound with the coloring pigment, but the portions 32, 33, Since different color pigments are added to the color filters 34, respectively, the laser light transmittances are different. Therefore, 32, 33,
Light transmitted through 34 and 35 has different intensities, and the intensity of these lights is represented by a signal such as “0”, “1”, “2”,
By detecting as "3", information can be read. Therefore, by adopting the above structure, the types of signals are increased, and the amount of information that can be stored in the compact disc to which the present invention is applied can be increased.

The polysilane compound according to the present invention is excellent in coloring stability because the exposed area is more colored by a coloring pigment. The number of colors contained in the portion composed of the siloxane compound may be one or more, but the larger the number, the greater the amount of information that can be stored on the optical disc.

In order to obtain the second optical disk of the present invention, a metal layer is formed on a substrate, a layer made of a polysilane compound dissolved by a solvent is formed thereon by spin coating or the like, and dried. Thereafter, a layer composed of the polysilane compound is exposed to a predetermined pattern using a mask or the like, thereby forming a silicon compound layer in which the portion composed of the polysilane compound and the portion composed of the siloxane compound are arranged on the same plane. be able to. For red, Anthraquinone Red, Basic Red, Basic Red 27, Solvent Red 125, Solvent Red 132, Solvent Red 83, Solvent Red 109, Disperse Red 60, Disperse Red 72, Pigment Red 220, Pigment Red 53: 1, etc., if blue, phthalocyanine blue,
Basic Blue 26, Basic Blue 77,
Solvent Blue 25, Disperse Blue 56,
Disperse Blue 60, Pigment Blue 15:
3. Pigment Blue 60, etc. If it is green, use coloring pigments such as phthalocyanine green, basic green, Pigment Green 7, etc., and color by immersing the silicon compound layer on the substrate in a solution in which each coloring pigment is dissolved. And then dried. Further, the second optical disc of the present invention can be obtained by repeating the exposure to coloring steps in order to sequentially color another color.

In the first and second optical disks of the present invention, it is desirable to use glass or plastic as a substrate from the viewpoint of durability. Examples of the plastic include polyethylene, polypropylene, polystyrene, polyvinyl chloride, polytetrafluoroethylene, polyvinyl alcohol, polyamide, polycarbonate, polyethylene terephthalate, polyester, phenol resin, polyimide, and polyalate. Particularly desirably, melting point, polyalate having a high glass transition temperature,
Polycarbonate and the like are preferred. The thickness is 0.5-1m
m is desirable. If the thickness is too large, the portability is inferior, and if the thickness is too small, breakage easily occurs.

In the first and second optical disks of the present invention, the metal layer 12 desirably has a high laser light reflectance, such as aluminum, copper, gold, and silver. These metal layers can be formed on the substrate by means such as vapor deposition. It is desirable to use aluminum in consideration of cost and ease of vapor deposition. The polysilane compound according to the first and second optical disks of the present invention is a compound represented by the following general formula (I).

[0029]

Embedded image (Wherein R 1 and R 2 may be the same or different from each other, and each represents a substituted or unsubstituted alkyl group,
It represents an alkoxy group, an aryl group, or a heteroaryl group.
Further, it may be branched by a polysilane having a Si repeating unit. In particular, polymethylphenylmethylsilane using a phenyl group and a methyl group as R1 and R2, respectively, or R
1, polyphenylhydrosilane using a phenyl group and -H as R2 can be efficiently exposed by a mercury lamp, and is suitable for manufacturing the optical disk of the present invention. The molecular weight of the polysilane compound is 1000 to 2000.
Desirably, it is in the range of 00. It is desirable to be about 1300 to 1700 in consideration of cost. The siloxane compound according to the first and second optical disks of the present invention is a compound represented by the following general formula (II).

[0030]

Embedded image (Wherein R 1 and R 2 may be the same or different from each other, and each represents a substituted or unsubstituted alkyl group,
It represents an alkoxy group, an aryl group, or a heteroaryl group.
Further, it may be branched by a polysilane having a Si repeating unit. In particular, polymethylphenylmethylsiloxane using a phenyl group and a methyl group as R1 and R2, respectively, or polyphenylhydroxysiloxane using a phenyl group and -H as R1 and R2, respectively, can be efficiently exposed by a mercury lamp. It is suitable for manufacturing the first and second optical disks of the invention. Further, the molecular weight of the polysilane compound is desirably in the range of 1,000 to 200,000. Considering the cost, it may be about 1300 to 1700.

In the first and second optical discs of the present invention, the thickness of the silicon compound layer is such that the thickness of the single layer is 0.2 to 0.1.
It is preferable that the thickness be in the range of 5 μm because lamination is easy in production. In the present invention, red laser light or the like can be used as the laser light.

[0032]

【Example】

(Embodiment 1) This embodiment will be described with reference to FIG. FIG. 5 is a schematic sectional view showing a sample used in this example. First, a molecular weight of 30 having a repeating unit represented by the following formula 17
00 polyphenylmethylsilane was prepared.

[0033]

Embedded image

The above phenylmethylsilane is added to toluene in 3 parts.
It is melted at a concentration of 0.2 wt% and spin-coated at a rotation speed of 3000 rpm on a glass substrate 41 having a thickness of 0.7 mm.
The coating was applied at a thickness of 2 ± 0.03 μm to form a silicon compound layer 42. After drying, a portion was exposed to ultraviolet light of 365 nm for 2 minutes. As a result, polyphenylmethylsiloxane was formed in the exposed portion 43. FIG. 6 shows the light transmittance of the exposed portion 43 and the unexposed portion with respect to light having a wavelength of 400 nm to 800 nm. In FIG. 6, the transmittance of the exposed portion is indicated by a solid line, and the transmittance of the unexposed portion is indicated by a wavy line. As is clear from FIG. 6, a considerable difference was observed in the transmittance between the exposed portion and the unexposed portion, confirming that the material can be used as a material for an optical disk.

Further, it was confirmed that the material of the present invention can form lines and spaces of 0.5 μm and 1.0 μm, and can form a fine pattern comparable to that of a conventional compact disk.

(Embodiment 2) This embodiment will be described with reference to FIG. FIG. 7 is a schematic sectional view showing a manufacturing process of the optical disk of the present embodiment.

First, a glass substrate 51 having a thickness of 0.7 mm 51
An aluminum layer 52 having a thickness of 1.1 μm was formed by evaporation. Next, the same polyphenylmethylsilane as in Example 1 was dissolved in toluene at a concentration of 3 wt%, and 3000 r
The silicon compound layer 53 was formed into a film with a thickness of 0.32 μm on the aluminum layer 53 by spin coating at a rotation speed of pm. After drying, the substrate was exposed to ultraviolet light of 365 nm for 2 minutes using the mask 58 (step a). As a result, polyphenylmethylsiloxane was formed on the exposed portion 57. Unexposed part 5
6 remained polyphenylmethylsilane. The obtained pattern was a line and space having a width of 0.5 μm and a length of 1.0 μm (step b). Further, the step a was repeated, and the same silicon compound layer 54 was formed in a layered manner, and exposed and similarly patterned to obtain an optical disk (step c). -Ne
The operation was confirmed by irradiating a laser beam having a wavelength of 632.8 nm. Interference intensity from unexposed polysilane: interference intensity from one-layer exposed part: interference intensity from two-layer exposed part = 1.0: 0.37: 0.03, and the S / N ratio of laser light as a compact disc is It turned out to be well achieved. Further, it has been found that since a fine pattern equivalent to that of the conventional compact disk is formed in a plurality of layers, the density can be increased more than that of the conventional compact disk.

(Embodiment 3) This embodiment will be described with reference to FIG. FIG. 8 is a schematic diagram showing a sample used in this example.

First, the same polyphenylmethylsilane as in Example 1 was dissolved in toluene to prepare a solution having a concentration of 3 wt%, applied on a glass substrate (not shown) by spin coating, and dried. A silicon compound layer 42 having a thickness of about 0.3 μm was formed. A mask was overlaid on the obtained silicon compound layer, and exposure was performed using a KrF laser having a wavelength of 248 nm to form a 0.3 μm diameter spot.

Subsequently, phthalocyanine blue (Pigment Blue 15-6; Lionol Blue FG) was used as a coloring dye.
7330 Toyo Ink) 10 wt%, N-vinyl-5
-Methylpyrrolidone, 1-butene copolymer (molecular weight 70
00) A phthalocyanine blue dispersion obtained by mixing 10 wt% and water 80 wt% and performing dispersion treatment in a ball mill.
The silicon compound layer together with the glass substrate was immersed in a coloring liquid containing 5 g, 5.0 g of a 54 wt% aqueous solution of acetonitrile, and 2.0 g of a sol solution composed of silicon alkoxy and its decomposition product at 25 ° C. for 10 minutes. The silicon sol solution was 5.6 g of ethyl orthosilicate, 2.8 g of methyltriethoxysilane, 23.2 g of isopropanol, and 8.35 of water.
0.06 g of nitric acid was added to the solution consisting of
It was prepared in advance by heating for one minute, cooling and then adding isopropanol. 120 ° C after washing
After heating and drying for 10 minutes, the exposed portion 44 was colored blue.

Next, a mask is placed on the silicon compound layer so as to be shifted so that the exposed portion 44 colored blue is covered, and a KrF laser having a wavelength of 248 nm is irradiated to form a 0.3 μm diameter spot. did. Subsequently, anthraquinone red (Pigment Red 17) is used as a pigment dispersion.
7) 10 wt%, N-vinyl-5-ethylpyrrolidone,
2.0 g of an anthraquinone red dispersion obtained by mixing 10 wt% of a 1-butene copolymer (molecular weight: 8000) and 80 wt% of water and performing a dispersion treatment with a paint shaker, 4.0 g of a 50 wt% aqueous solution of acetonitrile, and an alkoxide of silicon And a sol solution comprising the decomposition product
The polysilane thin film was immersed in the coloring liquid containing g at 25 ° C. for 30 minutes. After washing with water, the exposed area 46 was colored red by heating and drying at 120 ° C. for 10 minutes.

Further, blue color is applied to the silicon compound layer.
The mask was overlapped with the position shifted so as to cover the portion colored red, and a KrF laser having a wavelength of 248 was irradiated to form a spot having a diameter of 0.3 μm. Subsequently, phthalocyanine green (Pigment Green 36; Vinamon Green 6Y-FW ICI) is used as a pigment dispersion.
2.5 g of a phthalocyanine green dispersion obtained by mixing 10 wt%, 10 wt% of N-vinylpyrrolidone, 1-butene copolymer (molecular weight: about 8000) and 80% of water and performing a dispersion treatment with a paint shaker, and 50 wt% of acetonitrile
The exposed area 45 was colored green by immersing in a coloring liquid containing 2.5 g of a 2.5% aqueous solution at 25 ° C. for 20 minutes, washing with water, and drying by heating at 120 ° C. for 10 minutes.

As a result, a silicon compound layer in which predetermined regions were colored blue, red, and green, respectively, was obtained. FIG. 9 shows the results of the light transmittance of the silicon compound layer in the red, blue and green regions. A considerable difference was observed in each transmittance, confirming that it can be used as a recording material for a compact disc.

Next, the colored portion of the silicon compound layer was evaluated for its durability by examining its chemical resistance to toluene, ethanol, dimethylacetamide and butyrolactone. The dye was not eluted even when immersed in these organic solvents. It was found that the coloring layer was sufficiently fixed without peeling from the substrate.

Example 4 Aluminum was 0.05 μm
For a 0.7 mm thick glass substrate deposited with a thickness of
An optical disk was obtained by forming a silicon compound layer having regions colored blue, red and green on the aluminum layer in the same manner as in Example 3.

For this compact disc, He-N
The operation was confirmed by irradiating a laser beam having a wavelength of 632.8 nm of an e-laser. Interference intensity from unexposed polysilane: Interference intensity from red region: Interference intensity from green region: Interference intensity from blue region = 1.0: 0.5
7: 0.39: 0.01, indicating that the S / N ratio of the laser beam as a compact disc was sufficiently achieved. According to the optical disk of the present embodiment, a fine pattern comparable to that of a conventional compact disk is formed, and four types of signals can be read out. It has been found that the amount of information that can be obtained can be increased.

[0047]

As described above, according to the present invention, it is possible to provide an optical disk which can use the currently used red oscillation laser beam and can increase the recording density.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view showing an example of a first optical disk of the present invention.

FIG. 2 is a schematic sectional view showing an example of a first optical disk of the present invention.

FIG. 3 is a schematic sectional view showing an example of a first optical disk of the present invention.

FIG. 4 is a schematic sectional view showing an example of a second optical disk of the present invention.

FIG. 5 is a schematic sectional view showing a sample used in Example 1.

FIG. 6 is a characteristic diagram showing light transmittance of a sample used in Example 1.

FIG. 7 is a schematic view showing a manufacturing process of the optical disc of the second embodiment.

FIG. 8 is a schematic diagram showing a sample used in Example 3.

FIG. 9 is a characteristic diagram showing light transmittance of a sample used in Example 3.

FIG. 10 is a schematic sectional view showing a conventional compact disc.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Plastic substrate 2 ... Aluminum reflective layer 3 ... Pit 4 ... Protective layer 11 ... Substrate 11 12 ... Metal layer 13, 14 ... Silicon compound layer 15 ... Laser light 16 ... Part consisting of a polysilane compound 17 ... Part consisting of a siloxane compound 18 ... Semi-transparent mirror 21 ... A region where a portion composed of a siloxane compound is formed in only one layer 22 ... A region where a portion composed of a siloxane compound is formed in two layers 23 ... A portion composed of a siloxane compound is formed in any layer Unused region 31 Silicon compound layer 32 Part composed of siloxane compound 33 Part composed of siloxane compound 34 Part composed of siloxane compound 35 Part composed of polysilane compound 41 Glass substrate 42 Silicon compound layer 43 Exposure part 44 ... exposed part 45 ... exposed part 46 ... exposed Min 51 ... glass substrate 52 ... aluminum layer 53 ... silicon compound layer 54 ... silicide layer 56 ... unexposed portions 57 ... exposed portion 58 ... mask

Continuing from the front page (72) Inventor Sawako Fujioka 1 Toshiba R & D Center, Komukai Toshiba-cho, Saiwai-ku, Kawasaki-shi, Kanagawa

Claims (4)

[Claims] 1. A semiconductor device comprising: a substrate; a metal layer formed on the substrate; and a plurality of silicon compound layers formed on the metal layer, wherein the silicon compound layer comprises a repeating unit represented by the following general formula (I). An optical disc, wherein a portion comprising a polysilane compound and a portion comprising a siloxane compound having a repeating unit represented by the following general formula (II) are arranged on the same plane. Embedded image (Wherein R 1 and R 2 may be the same or different from each other, and each represents a substituted or unsubstituted alkyl group,
It represents an alkoxy group, an aryl group or a heteroaryl group.
Further, it may be branched by a polysilane having a Si repeating unit. ) (Wherein R 1 and R 2 may be the same or different from each other, and each represents a substituted or unsubstituted alkyl group,
It represents an alkoxy group, an aryl group, or a heteroaryl group.
Further, it may be branched by a polysilane having a Si repeating unit. ) 2. A semiconductor device comprising: a substrate; a metal layer formed on the substrate; and a plurality of silicon compound layers formed on the metal layer, wherein the silicon compound layer comprises a repeating unit represented by the following general formula (I). An optical disc comprising a polysilane compound having a patterning portion formed by partial exposure. Embedded image (Wherein R 1 and R 2 may be the same or different from each other, and each represents a substituted or unsubstituted alkyl group,
It represents an alkoxy group, an aryl group, or a heteroaryl group.
Further, it may be branched by a polysilane having a Si repeating unit. ) 3. A substrate comprising: a substrate; a metal layer formed on the substrate; and a silicon compound layer formed on the metal layer. The silicon compound layer has a repeating unit represented by the following general formula (I). A portion composed of a polysilane compound and a compound represented by the following general formula (I
An optical disk, wherein a portion composed of a siloxane compound having a repeating unit represented by I) is arranged on the same plane, and the portion composed of the siloxane compound contains a coloring pigment. Embedded image (Wherein R 1 and R 2 may be the same or different from each other, and each represents a substituted or unsubstituted alkyl group,
It represents an alkoxy group, an aryl group, or a heteroaryl group.
Further, it may be branched by a polysilane having a Si repeating unit. ) (Wherein R 1 and R 2 may be the same or different from each other, and each represents a substituted or unsubstituted alkyl group,
It represents an alkoxy group, an aryl group, or a heteroaryl group.
Further, it may be branched by a polysilane having a Si repeating unit. ) 4. A substrate comprising a substrate, a metal layer formed on the substrate, and a plurality of silicon compound layers formed on the metal layer, wherein the silicon compound layer is a repeating unit represented by the following general formula (I): An optical disk comprising a polysilane compound having the formula (1), partially having a patterned portion by exposure, and including a colored pigment in the patterned portion by the exposure. Embedded image (Wherein R 1 and R 2 may be the same or different from each other, and each represents a substituted or unsubstituted alkyl group,
It represents an alkoxy group, an aryl group, or a heteroaryl group.
Further, it may be branched by a polysilane having a Si repeating unit. )