JPH1081445A - Film separating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To sufficiently and smoothly carry it without causing damage or the like in a base board even when rigidity of the base board is comparatively small by arranging an auxiliary roller, which is rotatably installed in a cylindri cal member and acts on the base board carried in the prescribed direction, in a gas injection means. SOLUTION: When a base board 40 does not exist between an auxiliary roller 38 and a carrier roller 20, the auxiliary roller 38 is positioned in the most descent position shown by a solid line, and is contacted with the carrier roller 20. When the base board 40 enters between the auxiliary roller 38 and the carrier roller 20, the auxiliary roller 38 and a cylindrical member are raised by a thickness quantity of the base board 40. In this way, the cylindrical member is raised according to a thickness of the base board 40 carried through its under side, and therefore, even if a thickness of the base board 40 changes, a position of the cylindrical member, in more detail, its gas injection hole to a surface of the base board 40, does not substantially change, and the action of gas blown out of the gas injection hole to the surface of the base board 40 does not substantially change.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film peeling device for peeling a film adhered to a substrate,
The present invention relates to a film peeling device that partially separates a front end (one end) of a film attached to a substrate from a substrate, and then completely separates the film having a partially separated front end from the substrate.

[0002]

2. Description of the Related Art In the manufacture of a printed circuit board, as is well known to those skilled in the art, a copper-clad laminate is formed by attaching copper foil to both sides of a core plate made of glass fiber reinforced epoxy resin or the like. A printed circuit board material is used in which a photoresist layer and a protective film are laminated on both sides of such a copper-clad laminate. Then, a required circuit is irradiated on both sides of the printed circuit board material to expose the photoresist layer, and thereafter, the protective films existing on both surfaces are peeled off.

Japanese Patent Application Laid-Open No. 62-83974 (US Pat. No. 4,724,032) discloses a film such as a protective film from a substrate such as a printed circuit board material on at least one surface, usually both surfaces. The term "film" as used herein includes not only relatively thin strips but also relatively thick strips, so-called sheets). Is disclosed.

[0004] This film peeling device comprises a substrate transport means,
An end separation means and a peeling means are provided. The substrate transporting means transports the substrate having the film affixed to at least one side thereof in a substantially horizontal state, in a predetermined direction until the front end of the substrate is located at the end separation position, temporarily stops the substrate, and further performs the predetermined operation. Transport in the direction. Such a substrate transfer means includes a rotary transfer member that defines a transfer path of the substrate. The edge separation means acts on the front edge of the substrate located at the edge separation position to partially separate the front edge of the film from the substrate. Peeling means for completely separating the film whose front end has been partially separated from the substrate is gas injection means for injecting compressed gas between the substrate being moved in a predetermined direction and the front end of the film. Contains. Such a gas injection unit includes a hollow member extending in the width direction of the substrate and having a gas injection hole formed therein. This hollow member, which is a stationary member, is connected to a compressed gas supply source via an appropriate communication means.

[0005]

However, in the film peeling device, when the substrate conveyed in a predetermined direction passes through the gas ejecting means, there is a possibility that the function of conveying the substrate is impaired. More specifically, on the upstream side and the downstream side of the hollow member in the gas injection means, there are disposed rotary transfer members that respectively define transfer paths for the substrates. Since the hollow member located between the rotary transport members is a stationary member, it has no substrate transport function. Therefore, when the substrate is transported from the transport path, that is, the rotary transport member on the upstream side of the hollow member to the rotary transport member on the downstream side of the hollow member via the hollow member, smooth transport is hindered by contact with the hollow member. And damage may be created. In particular, when the substrate is relatively thin and its rigidity is relatively small, the tendency becomes stronger.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-described circumstances, and has as its object the purpose of allowing a substrate to pass through a gas injection means without causing damage to the substrate even when the rigidity of the substrate is relatively small. An object of the present invention is to provide an improved film peeling device which can be transported sufficiently smoothly as described above.

[0007]

According to the present invention, there is provided a substrate transport means for transporting a substrate having a film adhered on at least one surface in a predetermined direction, and a method for partially moving a front end of the film from the substrate. An edge separating means for separating the film, and a peeling means for completely separating the film from which the front end part has been partially separated from the substrate, wherein the substrate transport means is a rotary transport that defines a transport path of the substrate. A film ejecting device for ejecting a compressed gas between the substrate moved in the predetermined direction and the front end of the film, wherein the gas ejecting means includes a member. Is a cylindrical member extending in the width direction of the substrate and having a gas injection hole formed therein, and an auxiliary roller that is rotatably mounted on the cylindrical member and acts on the substrate conveyed in the predetermined direction. Contains Film peeling apparatus characterized by, is provided.

In the film peeling apparatus of the present invention, since the auxiliary roller is rotatably mounted on the cylindrical member of the gas ejecting means, the gas ejecting means has a function of transporting the substrate in addition to the gas ejecting function. ing. Therefore, when the substrate is conveyed in the predetermined direction and passes through the gas ejecting means, even if it comes into contact with the auxiliary roller, the substrate is conveyed sufficiently smoothly as desired by the rotary conveying operation of the auxiliary roller, and no damage is generated. This effect can be obtained even when the substrate is relatively thin and its rigidity is relatively small. Further, since the auxiliary roller of the gas ejecting means functions as a rotary transport member as described above, it can be said that the gas ejecting means can be disposed by effectively utilizing the rotary transport member of the substrate transport means.
As a result, the gas injection means can be put to practical use at a relatively compact size and at a relatively low cost.

Preferably, a plurality of the gas injection holes are formed in the cylindrical member at intervals in the width direction of the substrate, and the auxiliary roller is preferably mounted between the gas injection holes.
According to the present invention, the gas injection means having the gas injection function and the rotary conveyance function can be obtained by a very simple structure without waste. Films are stuck on both sides of the substrate, the substrate transport means transports the substrate in a substantially horizontal state, and the peeling means is disposed on both the upper surface side and the lower surface side of the substrate. Is preferred. In the present invention, when the substrate is transported in the predetermined direction and passes through the gas injection means, the substrate is transported sufficiently smoothly, and the separation of the films adhered to both surfaces of the substrate from each substrate is promoted. The tubular member of the gas ejecting means of the peeling means provided on the upper surface side of the substrate is mounted movably in the up-down direction, and the auxiliary roller mounted on the cylindrical member is mounted on the substrate by the substrate. Is preferably pressed against the upper surface of the substrate. In the present invention, since the auxiliary roller and the cylindrical member are raised and lowered in accordance with the thickness of the substrate, even if the thickness of the substrate changes, the position of the cylindrical member with respect to the upper surface of the substrate, and therefore, the position of the gas injection hole is maintained. There is virtually no change.
As a result, the effect of the gas injected from the gas injection holes on the upper surface of the substrate is maintained in a desired relationship without substantially changing.

[0010]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a film peeling apparatus according to an embodiment of the present invention;

Referring to FIG. 1, the illustrated film peeling apparatus constructed in accordance with the present invention includes a substrate conveying means 2, an edge separating means 4, and a peeling means 6. The substrate transport means 2 includes a plurality of transport rollers 10, 12, 14, 16, 18, 20, 22, 22, 24 and 26 that define a lower side of a transport path extending substantially horizontally from left to right in FIG. Contains. An auxiliary roller 28 is provided below the conveying path.
(This auxiliary roller 28 will be further described later).

The substrate transfer means 2 further includes transfer rollers 30 and 32 disposed above the transfer path, and auxiliary rollers 3
4. It includes an auxiliary guide roller 36 and an auxiliary roller 38 (the auxiliary guide roller 36 and the auxiliary roller 38 will be further described later). The rollers 30, 32, 34, 36 and 38 disposed on the upper side of the conveying path are mounted so as to be movable in the vertical direction over a predetermined range, and are biased by their own weight or by appropriate pressing means. Transport rollers 16 and 18 located below each other, a belt mechanism to be described later, an auxiliary roller 28, and a transport roller 2
It is biased towards zero. Therefore, when the substrate 40 to be conveyed does not exist, the rollers 30, 32, 34, 36, and 38 disposed on the upper side of the transport path are connected to the rollers or belt mechanisms disposed on the lower side of the transport path. Although it is brought into contact, when it acts on and transports the substrate 40, it is raised by the thickness of the substrate 40 and pressed against the upper surface of the substrate 40. The various rollers constituting the substrate transfer means 2 are rotationally driven in the direction indicated by the arrow 42 by a rotary drive source (not shown) which may be an electric motor. Transport roller pair 16 and 3
An end separation position is defined between 0 and the conveying roller pairs 18 and 32, and a stopping means 44 is provided in relation to the end separation position.

The stopping means 44 is mounted so as to be able to move up and down between a non-operating position indicated by a solid line and an operating position indicated by a two-dot chain line, and is provided by an appropriate means (not shown) such as a pneumatic cylinder mechanism. , The non-working position and the working position. When the stop means 44 is located at the non-operation position, the stopping means 44 is retracted downward from the transfer path, and does not interfere with the transfer of the substrate 40. However, when positioned at the operative position, the distal end of the stopping means 44 protrudes upward from below through the transport path and prevents the substrate 40 from advancing in the direction indicated by the arrow 42.

[0014] Substrate transfer means 2 in the illustrated embodiment
Further includes guide means 46 disposed in relation to the end separation position. The guide means 46 moves the support shaft 4 between a retreat position shown by a solid line and a guide position shown by a two-dot chain line.
8 has a support arm 50 mounted so as to be pivotable about 8. A shaft 51 extending substantially horizontally is attached to the distal end of the support arm 50, and a plurality of guide rollers 52 are provided on the shaft 51 at intervals in the width direction of the substrate 40.
Is rotatably mounted. The support arm 50 is selectively positioned between the retracted position and the guide position by appropriate means such as a pneumatic cylinder mechanism. As will be described in detail later, at the end separation position, the end separation means 4 is moved in the width direction of the substrate 40 (that is, the direction perpendicular to the plane of FIG. 1).
When 2 is positioned at the retracted position shown by the solid line,
The end separation means 4 can reciprocate in the width direction of the substrate 40 without being hindered by the support arm 50 and the guide roller 52. On the other hand, when the support arm 50 and the guide roller 52 are positioned at the guide positions indicated by the two-dot chain lines, the guide roller 52 is located below the transfer path of the substrate 40 and is transported therethrough. I will guide you.

In order to allow the end separation means 4 to reciprocate in the width direction of the substrate 40, the conveying roller pairs 16 and 3
Although a relatively long interval exists in the transport direction between the transport roller pair 18 and the transport roller pair 18 and 32, the guide roller 52 is located at the guide position.
Transfer roller pairs 16 and 30 to transfer roller pairs 18 and 3
The substrate 40 is smoothly transported to 2. When the guide means 46 is not provided, especially when the rigidity of the substrate 40 is relatively small, the front end of the substrate 40 becomes excessively low between the transport roller pairs 16 and 30 and the transport roller pairs 18 and 32. , And there is a possibility that the sheet is not nipped by the conveying roller pairs 18 and 32.

In the illustrated embodiment, a clamping means 54 is further provided immediately downstream of the conveying roller pairs 16 and 30. The clamping means 54 includes an upper clamp member 56 and a lower clamp member 58. Pressing means (not shown), which may be a pneumatic cylinder mechanism, is attached to each of the upper clamp member 56 and the lower clamp member 58, and the non-clamp position (two points) separated upward and downward from the substrate 40, respectively. It is selectively positioned at a clamp position (a position shown by a solid line) which is pressed against the upper and lower surfaces of the substrate 40 with a predetermined pressure.

In the illustrated film peeling apparatus provided with the above-described substrate transport means 2, the substrate 40, which may be a printed circuit board having protective films 59 adhered on both sides, is provided by appropriate supply means (not shown). It is supplied to the upstream part of the conveying means 2 and is conveyed in the direction indicated by the arrow 42 by the action of the conveying rollers 10, 12 and 14 and the conveying roller pairs 16 and 30. When the front end of the substrate 40 is brought into contact with the distal end of the stopping means 44 in the operation position shown by the two-dot chain line, further advance of the substrate 40 is reliably prevented, and the driving of the substrate conveying means 2 is stopped. Can be Next, the stopping means 44 is retracted to the non-operating position shown by the solid line, and the upper clamping member 56 of the clamping means 54 is moved.
Further, the lower clamp member 58 is moved to the clamp position, and the substrate 40 is securely held at the stop position. The front end of the protective film 59 adhered to both sides of the substrate 40 is partially separated from the substrate 40 by the operation of the edge separating means 4 as described later. Edge separation means 4
When the end separating means 4 is separated from the substrate 40 to the outside in the width direction after the operation of the above, the upper clamp member 56 and the lower clamp member 58 of the clamp means 54 are returned to the non-clamp position, and The holding is released, and the guide means 46 is moved from the retracted position shown by the solid line to the guide position shown by the two-dot chain line. Then, the driving of the substrate transport means 2 is restarted, and the substrate 40 starts to be transported again in the direction indicated by the arrow 42. Then, while the substrate 40 is being conveyed in the direction indicated by the arrow 42, the protective film 59 is completely separated from both surfaces of the substrate 40 by the action of the peeling means 6 described later.

The end separating means 4 will be described with reference to FIGS. 2 to 4 together with FIG. 1. The end separating means 4 includes a main support frame 60. On a stationary base frame (not shown) of the entire apparatus, two support rails 62 and 64 extending substantially horizontally in the width direction of the substrate 40 above the end separation position.
Has been fixed. Each of the support rails 62 and 64
It is formed from a round bar having a circular cross section. On the other hand,
A guided block 65 is fixed to an upper portion of the main support frame 60. The guided block 65 is formed with two through holes extending in the horizontal direction. By inserting the support rails 62 and 64 into the holes, the guide block 65 is slidable along the support rails 62 and 64. Main support frame 6
0 is attached. A pneumatic cylinder mechanism 70 extending substantially horizontally is mounted on the stationary base frame adjacent to the support rails 62 and 64. The output end of the cylinder mechanism 70 is connected to the guided block 72 of the main support frame 60. Thus, by the action of the cylinder mechanism 70, the main support frame 60 of the end separation means 4 is moved to the position shown in FIG.
The movement start position indicated by the dotted chain line 60A and the two-dot chain line B in FIG.
Can be reciprocated between the turn-back positions indicated by.

Continuing the description with reference to FIGS.
A roller support block 74 is fixed below the main support frame 60. Further, a supporting column 76 extending substantially vertically is fixed to the main supporting frame 60 at intervals in the width direction of the substrate 40, and a sub supporting frame 78 is vertically attached to the supporting column 76, and It is mounted movably in the thickness direction. The sub-support frame 78, which can be composed of a substantially rectangular parallelepiped block, has a predetermined spacing in the width direction.
The short shafts 80, 82, 84, 86, 88 and 90 are fixed, and the short shafts have one-side (upper) pressing rollers 92, 94, 96 and 98 and one-side (upper) guide rollers 100 and 90, respectively. 102 is mounted.

As can be clearly understood by referring to FIG. 4, two short axes 80 and 8 located at the center in the width direction are provided.
2 and two short axes 88 and 9 located on both outer sides in the width direction.
0 extends substantially parallel to the transport direction of the substrate 40 (the vertical direction in FIG. 4), but the remaining two short axes 84 and 86 are inward in the width direction toward the upstream side in the transport direction of the substrate 40. At a slight angle α, which may be about 2 to 10 degrees. Therefore, the two pressing rollers 96 and 98
Is inclined at a slight angle α with respect to the substrate 40. Also, as can be clearly understood with reference to FIG. 3, two short axes 88 and 90 are connected to the other short axis 80,
Displaced somewhat upwards relative to 82, 84 and 86, the two guide rollers 100 and 102
It is displaced somewhat upwards with respect to the four pressure rollers 92, 94, 96 and 98.

The roller support block 74 fixed below the main support frame 60 also has six short axes 104, 106, 108, 110, 112, and 1 at predetermined intervals in the width direction.
The other side (lower) pressure rollers 116, 118, 120 and 122 and the other (lower) guide rollers 124 and 126 are mounted on the short shafts, respectively.

As can be clearly understood by referring to FIG. 4, two short axes 104 and 106 located at the center in the width direction and two short axes 112 located at both outer sides in the width direction.
And 114 extend substantially parallel to the transport direction of the substrate 40 (the vertical direction in FIG. 4), but the other two short axes 108 and 110 are in the width direction toward the upstream side in the transport direction of the substrate 40. It is inclined inward by a slight angle α which may be about 2 to 5 degrees. Therefore, the two pressing rollers 1
20 and 122 are also inclined by a small angle α with respect to the substrate 40. Also, as can be clearly understood by referring to FIG. 3, two short axes 112 and 114 are provided.
Has been displaced somewhat downward with respect to the other short axes 104, 106, 108 and 110, so that the two guide rollers 124 and 126 have four pressing rollers 116,
Displaced somewhat downwards relative to 118, 120 and 122.

A support plate 127 located above the sub support frame 78 is also fixed to the main support frame 60, and a pneumatic cylinder mechanism 128 is mounted on the lower surface of the support plate 127. Output rod 130 of pneumatic cylinder mechanism 128
Is projected downward, and is brought into contact with the upper surface of the sub-support frame 78. The sub support frame 78 is displaced downward by the pressing force applied from the pneumatic cylinder mechanism 128 together with its own weight. Therefore, the one-side pressure contact rollers 92, 94, 96 mounted on the sub-support frame 78
And 98, and between the one-side guide rollers 100 and 102 and the other-side pressing rollers 116, 118, 120 and 122 attached to the roller support block 74 of the main support frame 60, and the other-side guide rollers 124 and 126, In the absence state, the one-side pressing rollers 92, 94, 9
6 and 98 are pressed against the other-side pressing rollers 116, 118, 120 and 122. The pressing force applied from the cylinder mechanism 128 to the sub support frame 78 may be about 5 to 10 kg.

One-side pressing rollers 92, 94, 96 and 98
Is pressed against the other-side pressure rollers 116, 118, 120 and 122, the one-side guide roller 1
There is a slight gap t between 00 and 102 and the other side guide rollers 124 and 126. This gap t is 1 to 5
mm. Pressing rollers 92, 94, 96, 98,
116, 118, 120 and 122 and guide roller 1
00, 102, 124, and 126 can be formed from a suitable metal such as steel or a suitable synthetic resin or rubber such as nylon having relatively high hardness and excellent wear resistance. Pressing rollers 92, 94, 96, 98, 116, 11
It is advantageous that the surfaces of 8, 120 and 122 are subjected to a so-called knurling process (grooving process) or the like to increase the friction coefficient.

The operation of the end separating means 4 is as follows. As described above, when the front end of the substrate 40 is positioned at the end separation position, and the clamping means 54 holds the substrate 40 at such a position, the main support frame 60 of the end separation means 4 2 is located at the movement start position indicated by the two-dot chain line 60A. In this state, the main support frame 60 and the sub support frame 78 attached thereto are mounted.
Are separated from the substrate 40 to one side in the width direction.
The operation of the end separating means 4 is such that the main support frame 60 (and the sub-support frame 78 attached thereto) is moved from the above-mentioned movement start position 60A by the operation of the cylinder mechanism 70 constituting the width direction moving means. To the turning position shown by the two-dot chain line 60B in the width direction, and further turning back to the turning position 60B.
This is accomplished by moving the robot back to the movement start position 60A. At the folded position 60B, the main support frame 60 and the sub-support frame 78 mounted on the main support frame 60 are separated from the substrate 40 on the other side in the width direction.

While the main support frame 60 and the sub-support frame 78 mounted on the main support frame 60 are reciprocated as described above, one-side (upper) pressing rollers 92, 94, 96 and 98 are provided.
The front end (one end) of the protective film 59 which is sandwiched between the substrate 40 and the other (lower) pressure contact rollers 116, 118, 120 and 122, and is adhered to the upper surface of the substrate 40
The pressing rollers 92, 94, 96 and 98 apply a rubbing action to the front side of the protective film 59 attached to the lower surface of the substrate 40.
8, 120 and 122 apply a rubbing action, and thus the front end of the protective film 59 is separated from the substrate 40. If desired, the substrate 40 may be moved in the width direction instead of moving the end separation means 4 in the width direction.

In the film peeling apparatus constructed in accordance with the present invention, the end separating means 4 is also provided with one-side guide rollers 100 and 102 and the other-side guide rollers 124 and 126. 92, 94,
96 and 98 are the other-side pressing rollers 116, 118, 120
And 122, one-side guide rollers 100 and 102 and the other-side guide rollers 124 and 1 are in contact with each other.
There is a slight gap between the gap 26 and the center. Therefore, regardless of whether the substrate 40 is relatively thin or relatively thick, the substrate 40 can be sufficiently smoothly pressed with the one-side pressing rollers 92, 94, 96 and 98 and the other-side pressing rollers 116, 118, 120 without damaging the substrate 40. And 122.

More specifically, when the substrate 40 is relatively thin and its rigidity is relatively small, the guide rollers 100, 10
When there are no 2, 124 and 126, the substrate 40 is not smoothly sandwiched between the one-side pressing rollers 92, 94, 96 and 98 and the other-side pressing rollers 116, 118, 120 and 122, and the substrate 40 It is not unlikely that the substrate 40 is curved or the side edge of the substrate 40 is damaged.
However, according to the invention, the guide rollers 100, 10
In the case where 2, 124 and 126 are provided, the substrate 40 is first loaded with the guide roller pair 100 and 124 or 1
02 and 126 and then into guide roller pairs 100 and 124 or 102 and 12
6 and is guided between the pressure roller pairs 96 and 120 or 98 and 122, and
The support by 00 and 124 or 102 and 126 increases its apparent stiffness and is thus introduced sufficiently smoothly between the pressure roller pairs 96 and 120 or 98 and 122.

Further, even when the substrate 40 is relatively thick, when the guide rollers 100, 102, 124, and 126 are not present, the substrate 40 is pressed against the one-side pressing rollers 92, 94, 96.
, 98 and the other-side pressing rollers 116, 118, 120, and 122, the side edges of the substrate 40 are likely to be damaged. However, according to the present invention, the guide rollers 100, 102, 124
And 126 are provided, the substrate 40 is initially loaded with guide roller pairs 100 and 124 or 102 and 12
6 and thus the thickness of the substrate 40 is greater than the initial gap t between the guide roller pairs 100 and 124 or 102 and 126, so that the sub support frame 78 is
0 and therefore the pressure roller pair 9
6 and 120 or 98 and 122 are slightly spaced from each other. Thereafter, the guide roller pairs 100 and 12
4 or 102 and 126 is guided between the press roller pairs 96 and 120 or 98 and 122,
Press roller pairs 96 and 120 slightly spaced
Alternatively, it can be entered sufficiently smoothly between 98 and 122.

Continuing the description with reference to FIG. 1, the peeling means 6 in the illustrated embodiment comprises the film peeling and conveying means 1
32 and gas injection means 134. And
The film peeling / conveying means 132 includes a one-side (upper) belt mechanism 136 and the other-side (lower) belt mechanism 138.

Referring to FIG. 5 together with FIG. 1, the one-side belt mechanism 136 will be described. A stationary base frame (not shown) of the entire apparatus is provided with an appropriate interval in the transport direction of the substrate 40 and the vertical direction. Five rotating shafts 1 extending substantially horizontally
40, 142, 144, 146 and 148 are rotatably mounted. A plurality of upstream lower belt wheels 150 are fixed to the rotating shaft 140 at appropriate intervals in the width direction,
A plurality of central lower belt wheels 152 are fixed to the rotating shaft 142 at intervals in the width direction, and a plurality of downstream lower belt wheels 154 are fixed to the rotating shaft 144 at intervals in the width direction. A plurality of intermediate belt wheels 156 are fixed to 146 at intervals in the width direction.
The plurality of upper belt wheels 158 are spaced apart in the width direction.
Has been fixed.

An endless inner belt 160 is wound around each of the central lower belt wheel 152 and each of the intermediate belt wheels 156. Further, each of the upper and lower belt pulleys 150, 158, and the lower and lower belt pulleys 15
4 and each of the intermediate belt wheels 156, an endless outer belt 162 is wound therearound. As can be clearly understood from FIG. 1, the inner belt 160 and the outer belt 162
Cooperate to first extend upward above the upper surface of the substrate 40,
Next, a substantially U-shaped film transport path extending in the opposite direction and extending downward is defined. The one-side belt mechanism 136 is drivingly connected to a driving source (not shown) which may be an electric motor, and is driven to rotate in a direction indicated by an arrow 164.

Continuing the description with reference to FIGS. 1 and 5,
A substantially horizontal support shaft 166 is disposed adjacent to and somewhat downstream of the rotary shaft 142. The support shaft 166 is movably mounted between a lowermost position indicated by a solid line and a highest position indicated by a two-dot chain line by inserting both ends of the support shaft 166 into an elongated slot 168 extending vertically. . And, this support shaft 166
A plurality of auxiliary guide rollers 36 are rotatably mounted at intervals in the width direction. When the substrate 40 does not exist between the auxiliary roller 28 and the auxiliary guide roller 36, the auxiliary guide roller 36 is located at the lowest position shown by the solid line and is in contact with the auxiliary roller 28. When the substrate 40 enters between the auxiliary roller 28 and the auxiliary guide roller 36, the auxiliary guide roller 36 (and the support shaft 1 thereof)
66) is raised by the thickness of the substrate 40.

Referring to FIG. 1, another (lower) belt mechanism 1
38, a stationary base frame (not shown)
The four rotating shafts 170, 17 extending substantially horizontally at appropriate intervals in the transport direction of the substrate 40 and the vertical direction.
2, 174 and 176 are rotatably mounted. A plurality of upstream lower belt wheels 178 are fixed to the rotating shaft 170 at intervals in the width direction, and a plurality of upper upper belt wheels 180 are fixed to the rotating shaft 172 at intervals in the width direction. A plurality of downstream lower sheaves 182 are fixed to the shaft 174 at intervals in the width direction.
Has a plurality of downstream upper belt wheels 1 spaced apart in the width direction.
84 is fixed.

Each of the upstream lower belt wheel 178 and the upstream upper belt wheel 180 has an endless upstream belt 186.
Is wound around each of the downstream lower belt wheel 182 and each of the downstream upper belt wheel 184.
88 are wound. The upstream belt 186 and the downstream belt 188 cooperate to define a substantially vertically downward film transport path. Such other side belt mechanism 1
Reference numeral 38 is also drivingly connected to a drive source (not shown) which may be an electric motor, and is rotationally driven in a direction indicated by an arrow 164.

Continuing the description with reference to FIG. 1, the gas injection means 134 includes one (upper) gas injection means 190 and the other (lower) gas injection means 192. Referring to FIG. 6 together with FIG. 1, the one-sided gas injection means 190 has a hollow cylindrical member 194 extending substantially horizontally in the width direction. Closing pieces 196 are fixed to both ends of the cylindrical member 194, and support projections 198 having a rectangular parallelepiped shape are formed on the closing pieces. By inserting the supported projection 198 into the elongated slot 200 extending in the vertical direction, the cylindrical member 194 is vertically movable between the lowest position shown by the solid line and the highest position shown by the two-dot chain line. It is supported so that it cannot rotate. Cylindrical member 194
A plurality of gas injection holes 202 are formed on the upstream side surface at intervals in the width direction. The cylindrical member 194 is connected to a compressed gas supply source (not shown) by an appropriate communication means (not shown) such as a flexible hose. It is injected.

In the illustrated embodiment, a plurality of the auxiliary rollers 38 are rotatably mounted on the cylindrical member 194 at intervals in the width direction. When the substrate 40 does not exist between the auxiliary roller 38 and the transport roller 20, the auxiliary roller 38 is located at the lowest position shown by a solid line and is in contact with the transport roller 20. When the substrate 40 enters between the auxiliary roller 38 and the transport roller 20, the auxiliary roller 38 and the cylindrical member 194
Is raised by the thickness of the substrate 40. Thus, the cylindrical member 194 is raised according to the thickness of the substrate 40 conveyed through its lower side, and
Cylindrical member 1 with respect to the surface of substrate 40 even if the thickness of
94, more specifically, the position of the gas injection holes 202 does not substantially change, and the effect of the gas injected from the gas injection holes 202 on the surface of the substrate 40 remains substantially unchanged and does not change. .

Referring to FIG. 5 together with FIG. 1, the other side (lower side) gas injection means 192 has a hollow cylindrical member 204 extending substantially horizontally. Both ends of the cylindrical member 204 are closed by a suitable closing piece and fixed at a required position. A plurality of gas injection holes 206 are formed on the upstream side surface of the cylindrical member 204 at intervals in the width direction. The cylindrical member 204 is also connected to a compressed gas supply source (not shown) by a communicating means (not shown) which may be a flexible hose, and a compressed gas which may be compressed air is injected from the gas injection hole 206. Can be A plurality of the auxiliary rollers 28 are rotatably mounted on the cylindrical member 204 at intervals in the width direction.

The operation of the peeling means 6 as described above is as follows. Mainly referring to FIG. 1, the substrate 40 is transported in a state where the front ends of the protective films 59 attached to the upper surface and the lower surface are partially separated by the action of the end separating means 4. On the upper surface side of the substrate 40, the compressed gas flow injected from one end (upper) gas injection means 190, more specifically from the gas injection holes 202 of the cylindrical member 194, is partially separated from the substrate 40. Sprayed between the protective film 59 and the front end thereof.
This promotes the separation of the protective film 59, and also deflects the front end of the separated protective film 59 upward.

The protective film 59 deflected upward.
Is brought into contact with the peripheral surface of the auxiliary guide roller 36 which is rotated in the direction indicated by the arrow 42, and is guided by the auxiliary guide roller 36 so that the one-side (upper) belt mechanism 13
6 is guided between the inner belt 160 and the outer belt 162. Thereafter, the cooperation of the inner belt 160 and the outer belt 162 causes the protection film 59 to move in the direction indicated by the arrow 1.
The protective film 59 is positively transported in the direction indicated by 64 and the protective film 59 is gradually peeled off from the substrate 40 in accordance with the transport of the substrate 40. The protective film 59 completely separated from the substrate 40 by the cooperation of the inner belt 160 and the outer belt 162
Is further continued in the direction indicated by the arrow 164, and after the substrate 40 has passed below the one-side belt mechanism 136, FIG.
As shown by an arrow 208 in FIG. 2, the substrate is conveyed downward through the conveyance path of the substrate 40 and guided to the other (lower) belt mechanism 138. Then, it is further conveyed downward by the other side belt mechanism 138 and discharged into a collection box (not shown).

Regarding the peeling action of the protective film 59 stuck on the upper surface of the substrate 40 as described above, attention should be paid to the existence of the auxiliary guide roller 36. Particularly when the substrate 40 is relatively thin, there is some gap between the surface of the substrate 40 and the lowermost end of the inner belt 160 in the one-side belt mechanism 136. Therefore, when the auxiliary guide roller 36 is not present, the front end of the protective film 59 peeled from the substrate 40 is not introduced between the inner belt 160 and the outer belt 162 as required.
There is not a few dangers of entering between the substrate 40 and the lowermost end of the inner belt 160. However, the auxiliary guide roller 36, which is raised and lowered according to the thickness of the substrate 40 and is always in contact with the upper surface of the substrate 40, prevents the front end of the protective film 59 from entering below the lowermost end of the inner belt 160. In addition, the front end of the protective film 59 is reliably guided between the inner belt 160 and the outer belt 162.

On the lower surface side of the substrate 40, the other side (lower side) gas injection means 192, more specifically, the cylindrical member 2
The compressed gas flow injected from the gas injection hole 206 of No. 04 is
Substrate 40 and protective film 5 partially separated therefrom
9 between the protective film 59 and the front end of the protective film 59, thereby promoting the separation of the protective film 59, and also deflecting the front end of the separated protective film 59 downward. The protective film 59 deflected downward is guided between the upstream belt 186 and the downstream belt 188 of the other (lower) belt mechanism 138. Thereafter, the protection film 59 is positively conveyed in the direction indicated by the arrow 164 by cooperation of the upstream belt 186 and the downstream belt 188, and the protection film 59 is gradually peeled off from the substrate 40 in accordance with the conveyance of the substrate 40. Is done. The protection film 59 completely separated from the substrate 40 by the cooperation of the upstream belt 186 and the downstream belt 188 continues to be further transported in the direction indicated by the arrow 164, and is disposed below the other belt mechanism 138. Into a collection box (not shown).

As described above, the embodiment of the film peeling apparatus constituted according to the present invention has been described in detail with reference to the accompanying drawings. However, the present invention is not limited to such an embodiment and departs from the scope of the present invention. It is not necessary to say that various changes and modifications can be made without doing so. For example,
In the illustrated embodiment, the substrate 40 is transported in a substantially horizontal state. However, if desired, the substrate 40 is transported in a substantially vertical state. The edge separating means 4 and the peeling means 6 can also be operated.

In the illustrated embodiment, the upper pressing rollers 92, 94, 96 and 98, the upper guide rollers 100 and the upper pressing rollers 92 are attached to the sub support frame 78 which is movably mounted in the vertical direction in the end separating means 4. The lower pressing rollers 116, 118, 120 and 122 and the lower pressing roller 102 are mounted on the sub-supporting frame 78 which is mounted movably in the up and down direction, contrary to the case of the illustrated embodiment, if desired. Side guide rollers 124 and 126 can also be mounted.

Further, in the end separation means 4 in the illustrated embodiment, the pressing rollers 92, 94, 96 and 98
And one guide roller 100 and 102 and 124 and 1 on each side of 116, 118, 120 and 122, respectively.
26, but if desired, a plurality of guide rollers are provided on each side thereof, and the gap between the guide roller pairs is gradually reduced from the outside to the inside in the width direction. Can also. Further, in order to prevent the smooth conveyance of the protective film 59 conveyed by the one-side belt mechanism 136 or the other-side belt mechanism 138 from being hindered, if necessary, for example, the one-side belt mechanism 136 A static elimination means such as a grounded static elimination brush may be provided near the exit of the protection film conveyance path or near the exit of the protection film conveyance path of the other side belt mechanism 138. In addition, an appropriate guide member may be provided between the one belt mechanism 136 and the other belt mechanism 138 so that the protection film 59 is smoothly transported to the other belt mechanism 138.

[0046]

According to the film peeling apparatus of the present invention, even when the thickness of the substrate is relatively thin or relatively thick, the substrate can be passed through the gas injection means without damaging the substrate. It can be transported sufficiently smoothly. Further, the gas injection means can be put into practical use at a relatively compact and relatively low cost.

[Brief description of the drawings]

FIG. 1 is a simplified side view showing an embodiment of a film peeling device configured according to the present invention.

FIG. 2 is a partial oblique view mainly showing an end separating means in the film peeling device of FIG. 1;

FIG. 3 is a partial front view showing a part of an end separating means in the film peeling device of FIG. 1;

FIG. 4 is a partial cross-sectional view showing a part of an end separating means in the film peeling device of FIG.

FIG. 5 is a partial slope view showing a part of a peeling means in the film peeling device of FIG. 1;

FIG. 6 is a partial oblique view showing one-side gas injection means of the peeling means in the film peeling apparatus of FIG. 1;

[Explanation of symbols]

 2 Substrate conveying means 4 End separation means 6 Peeling means 28 Auxiliary roller 36 Auxiliary guide roller 38 Auxiliary roller 40 Substrate 46 Guide means 48 Support arm 50 Guide roller 54 Clamp means 59 Protective film 60 Main support frame 70 Cylinder mechanism (width direction) Moving means) 78 Sub-supporting frame bodies 92, 94, 96, 98 Pressing rollers 100, 102 Guide rollers 116, 118, 120, 122 Pressing rollers 124, 126 Guide rollers 132 Film peeling / conveying means 134 Gas ejecting means 136 One-side belt mechanism 138 Other belt mechanism 150 Upstream lower belt wheel 152 Central lower belt wheel 154 Downstream lower belt wheel 156 Middle belt wheel 158 Upper belt wheel 160 Inner belt 162 Outer belt 190 One-side gas injection means 192 Other-side gas injection means 194 Cylindrical section 202 gas injection holes 204 cylindrical member 206 gas injection holes

Claims (4)

[Claims] 1. A substrate transport means for transporting a substrate having a film adhered on at least one surface thereof in a predetermined direction;
An edge separating means for partially separating the front end of the film from the substrate; and a peeling means for completely separating the film from which the front end is partially separated from the substrate. The means includes a rotary conveying member for defining a conveying path of the substrate, and the peeling means for injecting a compressed gas between the substrate moved in the predetermined direction and the front end of the film. In the film peeling apparatus, the gas ejecting means includes: a tubular member extending in a width direction of the substrate and having a gas ejecting hole formed therein; And an auxiliary roller acting on the substrate conveyed to the film. 2. The gas injection holes are formed in the cylindrical member at intervals in the width direction of the substrate, and the auxiliary roller is mounted between the gas injection holes. The film peeling device as described in the above. 3. A film is stuck on both surfaces of the substrate, the substrate transport means transports the substrate in a substantially horizontal state, and the peeling means transports the upper and lower surfaces of the substrate. 3. The film peeling device according to claim 1, which is provided on both sides. 4. The tubular member of the gas ejecting means of the peeling means provided on the upper surface side of the substrate is mounted movably up and down, and the cylindrical member mounted on the tubular member is provided. The film peeling device according to claim 3, wherein the auxiliary roller is pressed against the upper surface of the substrate.