JPH1070149A - Method and apparatus for wire bonding - Google Patents

Abstract

PROBLEM TO BE SOLVED: To secure the reliability of a connection with a covered wire at a second position. SOLUTION: An energizing force is applied to a covered wire B in a direction approximately vertical to the axis core of this covered wire, during an interval from its leaving a wire spool 12 to its reaching a bonding tool 10, and a tensile strength is applied by the energizing force applied, in the opposite direction to that at a specified side to be bonded. At a part where this energizing force is applied, the covered wire 13 is recognized, and the state of sagging of the covered wire 13 is detected, and the rotation of the wire spool 12 is controlled is as to make the sagging always constant by the detected result. On the occasion of a ball-forming discharge to the tip of the covered wire 13 and a covered film removing discharge to a second joining scheduled region, a gas is blown against the electrode surface of a discharging electrode from an air blowing nozzle 16.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire bonding technique, and more particularly to a technique effective when applied to a wire bonding step in assembling a semiconductor integrated circuit device using a covered wire.

[0002]

2. Description of the Related Art In an assembly process in the manufacture of a semiconductor integrated circuit device, a large number of external connection electrodes provided on a semiconductor pellet on which a predetermined integrated circuit is formed, and a plurality of leads functioning as external connection terminals during mounting. Is known as a method for connecting the two.

On the other hand, in response to recent demands for higher integration and miniaturization of semiconductor integrated circuit devices,
The density of external connection electrodes to be connected is increasing dramatically, and the spacing and wire diameter of bonding wires are steadily becoming smaller, resulting in short-circuiting between bonding wires and reduction in bonding wire rigidity. This causes problems such as abnormal wire loops.

In order to cope with the above-mentioned phenomena, there is known a wire bonding technique using a covered wire in which a core wire made of metal is coated with an insulating material.

However, in a known ball bonding technique in which the tip of a wire inserted into a bonding tool such as a capillary is melted and formed into a ball shape for bonding, bonding on the lead side is performed by using an insulated wire. Since the pressing is performed by pressing the side surface against the lead surface, there is a concern that bonding reliability may decrease such as a decrease in bonding strength or an increase in electric resistance.

In view of the above, Japanese Patent Application Laid-Open No. 62-14042
No. 8 and Japanese Patent Application Laid-Open No. 62-104127 disclose an improved proposal for wire bonding using a covered wire, particularly bonding to the lead side.

[0007] In the former, the pressing force of the bonding tool is increased in multiple stages during the bonding operation of the coated wire to the lead side, so that the insulating coating film interposed between the core wire of the coated wire and the lead is formed. It is intended to ensure the reliability of the joint by eliminating it.

In the latter method, the coating film is eliminated by using both the heating of the bonding tool and the application of ultrasonic waves to the bonding tool.

[0009]

However, any of the above techniques is different in that the bonding is started with the coating film interposed in the joint when bonding the coated wire to the lead side. However, there is a concern that foreign matter generated due to thermal denaturation of the coating film and the like may remain between the core wire and the lead and cause deterioration of bonding strength at the bonding portion and increase in electric resistance. It was difficult to improve the sex.

Furthermore, in both of the above techniques, since bonding is performed in a state in which the coating film is interposed between the core wire of the coated wire and the bonding tool, pieces of the coating film peeled off from the wire by a bonding load, heating, or the like. Foreign matter enters the wire insertion portion of the bonding tool and contaminates the wire, which hinders smooth feeding and drawing of the coated wire, making it difficult to realize a stable bonding operation.

The present invention has been made in view of the above problems, and has the following objects.

[0012] That is, the first object is to cover the coated wire and the second wire.
It is an object of the present invention to provide a technique capable of realizing the joining reliability at the position without complicating the device configuration.

A second object of the present invention is to provide a technique for preventing contamination of a bonding tool caused by a coating film constituting a coating wire and enabling a stable bonding operation.

A third object of the present invention is to provide a technique capable of stably performing the wire drawing and drawing operations.

A fourth object of the present invention is to provide a technique which enables a stable ball formation at the time of forming a bonding ball.

The above and other objects and novel features of the present invention will become apparent from the description of the present specification and the accompanying drawings.

[0017]

The outline of a typical invention disclosed in the present application will be briefly described as follows.

According to the present invention, a discharge is generated between a tip of a covered wire wound around a spool and fed from a bonding tool and a discharge electrode, and a ball is formed at the tip of the covered wire by the discharge energy. Pressing the ball to a first position with the bonding tool to join the ball, and projecting the covered wire from the tip of the bonding tool by a required length calculated based on the first and second position information. A discharge is performed between the core wire of the covered wire and the discharge electrode via the covering film at a second joint planned portion of the covered wire, and the discharge energy at that time preliminarily reduces one of the covering films. Removing the portion to form an exposed portion of the core wire, and joining the exposed portion of the covered wire unreeled from the bonding tool to a second position. A step of applying tension to the covered wire in a direction opposite to a predetermined bonding site by an urging force applied in a direction substantially perpendicular to the axial direction of the covered wire from the spool to the bonding tool; A step of detecting the slack state of the coated wire by recognizing the coated wire at a portion where the urging force is applied, and a step of controlling the rotation of the spool so that the slack is always constant based on the detection result. And characterized in that:

Further, according to the present invention, gas is supplied between a pair of air blowing plates disposed on both sides of a wire path from the spool to the bonding tool, and the sheath wire is supplied to the sheath wire in the axial direction of the sheath wire. A step of applying a tension in a direction opposite to the predetermined bonding portion by a biasing force applied in a substantially vertical direction, a light emitting member provided on the air spray plate and irradiating light to the covering wire, and the covering wire Detecting the slack state of the covered wire by a detecting means having a light receiving member for receiving the reflected light from the controller, and controlling the rotation of the spool so that the slack is always constant based on the detection result. It is characterized by the following.

Further, the present invention provides a method of manufacturing a semiconductor device, comprising the steps of: providing a discharge for forming a ball to a first bonding site and a discharging for removing a coating film to the second bonding site in the coated wire; Spraying a gas onto the surface.

According to the present invention, the covered wire can be always maintained in a constant slack state, and a stable bonding operation can be performed without causing a variation in the tensile force of the covered wire above the bonding tool. Becomes possible.

Further, since a gas is blown to the electrode surface of the discharge electrode at the time of discharge, it is possible to prevent the coating film from being contaminated by a pyrolysis gas or the like.

[0023]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First, a wire bonding apparatus according to an embodiment of the present invention will be described with reference to FIG.

A bonding stage 2 is arranged on the gantry 1 so as to have a longitudinal direction in the front direction in FIG.

A lead frame 4 is mounted on the bonding stage 2 as a mounting member. The lead frame 4 has a tab 4a formed in the center thereof.
The semiconductor chip 3 is fixed thereon by a conductive adhesive such as a resin paste (not shown), and has a structure in which the temperature is increased to a predetermined temperature condition by a heater 2 a provided inside the bonding stage 2.

Further, an XY table 5 movable on a horizontal plane is disposed on the side of the bonding stage 2 on the gantry 1. This XY
Above the table 5, a bonding head 6 having one end positioned above the bonding stage 2 is pivotally supported via a pivot 7 in a vertical plane. The other end of the bonding head 6 is configured to be movable in the vertical direction by a linear motor 8 fixed to the XY table 5.

At the end of the bonding head 6 on the side of the bonding stage 2, a bonding arm 9 is supported in the horizontal direction.
A capillary 10 as a bonding tool made of ruby, ceramic, or the like is mounted at a tip portion located immediately above the bonding tool. The capillary 10 is fixed in a posture in which a wire insertion hole (not shown) formed to penetrate in the axial direction is substantially vertical.

The sheath wire 13 supplied from the wire spool 12 is inserted into a wire insertion hole (not shown) of the capillary 10 with a wire tension portion 22 and a wire guide 2.
1, the second clamper 15 and the first clamper 14 are inserted.

On the other hand, an ultrasonic oscillator 11 composed of a piezo element or the like is arranged on the base end side of the bonding arm 9, for example, at about 60 kHz with respect to the capillary 10 fixed to the tip end of the bonding arm 9. 0.5 amplitude
Ultrasonic vibration of about μm to 2.0 μm can be applied at any time.

The bonding head 6 described above is
Control unit 20 incorporating CPU and storage device (not shown)
Such a control method includes, for example, driving of the linear motor 8 based on output signals from a speed detecting means (not shown) for detecting the operation of the bonding head 6 and a position detecting means. This is performed by servo-controlling the voltage. Furthermore, the joining load at the time of joining on the semiconductor chip 3 and the lead frame 4 is controlled by controlling the drive current of the same linear motor 8.

A recognition device 19 fixed to the XY table 5 is disposed above the bonding head 6. The recognition device 19 is configured by, for example, a TV camera or the like, and has a function of detecting a bonding position between the semiconductor chip 3 and the lead frame 4. That is, the control unit 20 based on the imaging information by the recognition device 19
Is configured to instruct the bonding head 6 to continuously bond and wire between the detection point of the semiconductor chip 3 and the detection point on the lead frame 4 with the covering wire 13.

Here, the covering wire 13 will be briefly described. The covering wire 13 is constituted by a core wire 13a which is a conductor, and a covering film 13b made of a polymer resin material having electrical insulation and attached around the core wire 13a. . The core wire 13a may be, for example, a gold (Au) wire having a diameter of 20 to 50 μm, and preferably has a diameter of about 25 to 32 μm. Coating film 13b
For example, a molecular material such as polyurethane, polyester, polyamide imide, polyester imide or nylon can be considered. Preferably, the above-mentioned polyurethane or a heat-resistant polyurethane obtained by heat-treating the above-mentioned polyurethane is desirable. The thickness of the coating may be about 0.2 μm to 5.0 μm, and preferably about 0.5 to 2.0 μm. As a method for applying the coating film 13b, a method in which the core wire 13a is immersed in a solution obtained by diluting the resin material with a solvent to a concentration of, for example, 5 to 20%, and then dried by heating is considered. It is desirable to repeat application and drying a plurality of times in order to suppress pinholes. Specifically, the occurrence of pinholes was significantly reduced by repeating coating and drying 5 to 15 times.

The coated wire 13 is wound around the wire spool 12 by, for example, about 100 to 1000 m, and the base end 13 h (one end) of the core wire 13 a is connected to the conductive portion of the wire spool 12. The wire spool 12 is electrically connected to a spool holder 25, and is connected to a discharge power circuit 18 via the spool holder 25.

FIG. 14 shows the structure of the wire spool 12 in more detail. Wire spool 12
Is made of a conductive metal such as aluminum (Al). Here, the base end 13h of the covered wire 13 is
3b has been removed. As the removing means at this time, the coating film 13b may be thermally decomposed and removed by heating with a gas burner (not shown) or the like. At this time, the core wire 13a itself may be heated to form a ball at the base end of the core wire 13a. Also, in order to improve the electrical connection reliability, the core wire 1
A plurality of balls may be formed in the middle of 3a. In this manner, the base end where the core wire 13a is exposed is fixed to the end of the wire spool 12 with an adhesive tape or the like. As described above, the electric potential of the base end 13h of the core wire 13a of the covered wire 13 and the wire spool 1
2 can be made the same as the potential.

FIG. 15 shows the mounting structure of the wire spool 12. As shown in FIG. That is, the wire spool 12
Is fixed to the spool holder 25 by a spool fixing portion 252 for further fixing. The spool holder 25
Is connected to a rotating shaft 26a from a rotating motor 26 held by an L-shaped holding portion 254 fixed to the gantry 1, so that the rotation of the wire spool 12 together with the spool holder 25 can be controlled.

The electrode terminal 2 provided on the holding portion 254
For example, the rear end of an L-shaped leaf spring 253 is fixed to 55, and the distal end of the leaf spring 253 is attached to the spool holder 25.
Is urged outward from the rotation shaft 26a. The electrode terminal 255 is connected to the ground (G
ND) side.

As described above, with the configuration shown in FIG. 15, the core wire 13a of the covering wire 13 is connected to the GND potential of the discharge power supply circuit 18 via the wire spool 12, the spool holder 25, the plate spring 253, and the electrode terminal 255. The same potential is set. The wire spool 12
The supplied wire 13 is subjected to predetermined tension application and detection in the wire tension unit 22.

Next, the structure of the wire tension portion 22 will be described with reference to FIG. The wire tension portion 22 has a pair of air blowing plates 22a, 22a held at predetermined intervals by a holding portion 22d. In this opposed space, a supply gas supplied from an air supply port 23 is supplied at a predetermined flow pressure. It has a structure to pass through. The covering wire 13
The opposed space is inserted in a direction substantially perpendicular to the longitudinal direction of the air blowing plates 22a, 22a, and is urged in a direction opposite to the air supply port 23 by the flow pressure of the supply gas, so as to be applied to the covering wire 13. The structure is such that a predetermined tension acts.

On the main surface of the one air blowing plate 22a,
Circular detection holes 22b are opened in the directions facing each other. The tip of a reflection type optical fiber sensor 24 as a light detecting means is inserted into the detection hole 22b.

FIG. 13 is a sectional view illustrating the wire detecting mechanism in the wire tension section 22 in more detail.

In the figure, an optical fiber sensor 24 is
It is composed of a light emitting fiber 141a and a light receiving fiber 141b. Both fibers 141a, 141b
Are composed of optical fiber cables 24a having the same structure. The light emitting fiber 141a is an L (not shown).
The light receiving fiber 141b is connected to a light receiving element such as a phototransistor. Therefore, the detection light emitted from the tip of the light emitting fiber 141a is reflected on the peripheral surface of the covering wire 13, and the reflected light is detected by the light receiving fiber 141b.

At this time, the distance from the tip of the optical fiber sensor 24 to the inner end face of the air blast plate 22a on the opposite side is δ1, and the distance from the tip of the optical fiber sensor 24 to the inner end face of the air blast plate 22a closer to this. Is δ2, the distance between the opposing surfaces between the air blowing plates 22a, 22a is δ3, and the distance from the tip of the optical fiber sensor 24 to the outer end surface of the air blowing plate 22a on the opposite side is δ4, for example, δ1 = 0. 4mm, δ2
= 0.1 mm, δ3 = 0.3 mm, and δ5 ≧ 2δ4tan
By setting the angle to 30 °, it is possible to detect the covered wire 13 having a small diameter of up to about 15 μm.

The numerical values described above are merely examples, and can be appropriately changed according to the wire diameter, the light transmission characteristics of the optical fiber cable 24a, the fiber diameter, and the like. In short, it is only necessary to be in a range where the covered wire 13 can be detected.

The hole 22c having a diameter of δ5 provided on the opposite side of the optical fiber sensor 24 is provided with the detection light emitted from the light-emitting fiber 141a so that the detection light emitted from the light-emitting fiber 141a faces the air blowing plate 2 on the opposite side.
The optical fiber sensor 24 is opened to prevent the optical fiber sensor 24 from malfunctioning by being reflected on the inner surface of the optical fiber 2a. Therefore, instead of providing such holes 22c, the inner surface of the air blowing plate 22a is blackened to absorb the detection light,
The reflected light may not be generated.

Further, the light emitting fiber 141a and the light receiving fiber 141b may be arranged so as to face the covering wire 13 from different directions.

In the wire tension portion 22 having the above structure, the coating wire 13 is always given a constant tension by the flow pressure of the supply gas supplied between the air blowing plates 22a. As the supply gas, air purified by passing through a filter or the like, that is, air can be used, and the flow rate is desirably about 5 to 20 liters per minute. That is, if the flow rate is lower than this, the slack of the covering wire 13 occurs between the first clamper 14 and the second clamper 15, so that it is difficult to appropriately control the covering wire 13. On the other hand, if the flow rate is higher than this, the upward pulling force becomes too strong, which makes it difficult not only to secure an appropriate wire loop, but also to make it difficult to make an accurate tail cut at the time of the second bonding, and to cause inconvenience such as cutting of the coated wire 13. This is because there is a possibility of causing.

In the wire tension section 22, the slack state of the covering wire 13 is constantly monitored by the optical fiber sensor 24 described above. That is, when the optical fiber sensor 24 detects the reflected light from the coated wire 13, it is determined that the slack state is equal to or less than a certain value, that is, a tension state, and the rotation is connected to the spool holder 25. The motor 26 is rotated by a predetermined amount, and the coated wire 13 is sent out from the wire spool 12 by a predetermined length. Therefore, the covering wire 13 always maintains a constant slack state above the wire guide 21.

By the wire tension portion 22 integrated with the air supply means, the application of the tensile force to the covering wire 13 and the detection of the covering wire 13 can be performed at the same position and at the same time. The control can be appropriately performed, and the covering wire 13 can be always maintained in a constant slack state. Therefore, a stable bonding operation can always be performed without causing a variation in the tensile force above the capillary 10.

Further, since the coated wire 13 can be detected in a non-contact state with the coated wire 13 using the optical fiber sensor 24, the coated wire 13 can be detected without being damaged without being damaged. A decrease in insulation and a decrease in strength can be prevented.

Further, the structure of the wire tension portion 22 integrated with the air supply means described above eliminates the need to separately provide a detection mechanism for the covered wire 13, and can simplify the device structure.

The coated wire 13 positioned by passing through the wire guide 21 is passed through the capillary 10 via the second clamper 15 located at the upper part of the drawing and the first clamper 14 located at the lower part.

The first clamper 14 has a structure fixed to the bonding head 6 and can move up and down in synchronization with the bonding arm 9. Although not shown in detail, the clamp portion of the first clamper 14 is disposed immediately above the capillary 10 and its clamp load is controlled to 50 to 150 g.

On the other hand, the second clamper 15 is fixed to the XY table 5 and is disposed just above the first clamper 14 at such a height that does not interfere with the vertical movement of the first clamper 14. It has a mechanism capable of opening and closing independently of one clamper 14.

Next, the clamp mechanism of the second clamper 15, which is one of the features of the present embodiment, will be described with reference to FIG.

The second clamper 15 has clamper chips 151a and 151b each having opposing surfaces made of ruby or the like.
And the clamper chips 151a, 151b
Has a structure in which the covering wire 13 is opened and gripped by opening and closing operations.

One of the clamper chips 151a is fixed to a swing arm 156.
Is rotatable about a shaft fulcrum 157, and its rear end is urged in the expanding direction by a compression coil spring 155 attached to the holding portion 158. The swing arm 156
A solenoid 153a is disposed between the rear end of the shaft 157 and the shaft fulcrum 157.
When 3a is off, the rear end of the swing arm 156 is opened by the expanding force of the compression coil spring 155, and the front end of the clamper tip 151a is closed.
That is, the coated wire 13 is clamped. On the other hand, when the solenoid 153a is turned on, the rod 154a of the solenoid 153a is moved leftward in the drawing, thereby releasing the covering wire 13 from the clamped state.

The clamper tip 151b is attached to the tip of a leaf spring 152a protruding from the holding portion 158. The clamper tip 151b is connected to the tip of a rod 154b of a solenoid 153b different from the solenoid 153a. With this structure, the chip surface is urged from behind. In the figure, the solenoid 153b is
This shows a case in which the plate spring 1 is in the n-state.
52a has a structure in which its deformation is restrained by a rod 154b and loses its function as a leaf spring. The rod 154b has one end fixed to a holding portion 158.
A letter-shaped leaf spring 152b is attached, and has a function of urging the rod 154b rightward in the drawing when the solenoid 153b is turned off. Therefore, the solenoid 1
When 53b is turned off, the leaf spring 152a holding the clamper chip 151b is restored to its original function as a leaf spring.

As described above, the clamping force on the clamper tip 151b side can be clamped in two stages, that is, the case where the biasing force of the leaf spring 152a is used and the case where the solenoid 153b is fixed by the rod 154b. Thus, it is possible to provide both the function of a fixed clamper for fixedly holding the covered wire 13 with respect to the second clamper 15 and the function of a friction clamper for holding in a predetermined frictional state.

Next, the control of the clamping force by the second clamper 15 will be specifically described.

At the time of clamp-off At this time, one solenoid 153a is turned on, the rod 154a is moved rightward in the drawing against the compression coil spring 155, and the tip of the swing arm 156 is opened, so that the clamper tip 156 is opened. 151a is retracted to a position away from the covering wire 13.

The other solenoid 153b is turned off.
In this state, the rod 154b is moved rightward in the figure by the urging force of the L-shaped leaf spring 152b.
Therefore, the covering wire 13 is in a free state between the clamper chips 151a and 151b.

When the first clamp load is set This is a so-called "friction clamp" state. In this case, first, one of the solenoids 153a is turned off, so that the compression coil spring 155 urges the rear end of the swing arm 156 in the expanding direction. As a result, the clamper tip 151 a at the tip of the swing arm 156 moves in the direction of the covering wire 13. The moving distance at this time is defined by, for example, a stopper (not shown).

At this time, the other solenoid 153b is turned off.
In the f state, the rod 154b is moved rightward in the figure by the urging force of the L-shaped leaf spring 152b.

Therefore, one of the clamper chips 151
The biasing force of the compression coil spring 155 is applied to a, and the biasing force of the leaf spring 152a is applied to the other clamper tip 151b. At this time, by appropriately adjusting the elastic force and the deformation amount of the leaf spring 152a, the clamp load on the covering wire 13 can be set to a very small load. At this time, when the covering wire 13 is not completely restrained by the second clamper 15 and a force is applied to the covering wire 13 so as to pull the covering wire 13 out of the capillary 10, the clamper chip 151 a of the second clamper 15 and The structure is such that the covering wire 13 is fed out in a frictional state between 151b. Here, since the breaking tension of the coated wire 13 is about 12 to 16 gf when the core wire diameter is 30 μm, it is desirable that the breaking force be less than this, for example, about 1 to 4 gf. At this time,
For example, if the friction coefficient is about 0.2, the above-mentioned friction force of about 1 to 4 gf corresponds to a clamping force of about 5 to 20 gf.

By making such a “friction clamp” state function at the time of wire bonding described later (see the description of FIG. 2B (f)), the second clamper 15 is used for controlling the height of the wire loop. It can be a clamper. Therefore, in this device structure,
Without separately providing a loop control clamper, the wire is pulled up only by the second clamper 15 (during fixed clamping: see FIG. 2B (J)), and the wire loop height is controlled (during friction clamping: FIG. 2B (f) )).

When the second clamp load is set This is a so-called "fixed clamp" state. First, when the other solenoid 153b is turned on first, the rod 154b is moved leftward in the drawing against the urging force of the L-shaped leaf spring 152b. As a result, the leaf spring 152a is in a state where its own elastic deformation is restrained.

Subsequently, one of the solenoids 153a is turned off.
f state, and the compression coil spring 155
6 is urged in a direction to expand the rear end. As a result, the clamper tip 151 a at the tip of the swing arm 156 moves in the direction of the covering wire 13. At this time, the clamp load is applied to the leaf spring 1 supporting the other clamper tip 151b.
Since the elastic deformation of 52a is restrained by the rod 154b, it is determined by the urging force of the compression coil spring 155. Here, for example, the clamp load by the compression coil spring 155 is set to 50 to 150 gf, and the solenoid 153 is used.
b of the rod 154b by the electromagnetic force of 300 g
By setting to f, the urging force of the compression coil spring 155 can be effectively transmitted to the covering wire 13.

Although the solenoids 153a and 153b and the leaf springs 152a and 152b are used as the driving mechanism of the second clamper 15 described above, the solenoid 1
Instead of 53a and 153b, an actuator such as a rotary motor or a linear motor, or a compression coil spring 155
A tension coil spring or the like may be used instead of the leaf springs 152a and 152b. The point is that the clamp load by the clamper can be switched and used according to the purpose and application.

The coated wire 13 that has passed through the first clamper 14 and the second clamper 15 passes through the capillary 10 so that the wire tip 13e projects from the tip of the capillary 10.

In FIG. 1, an air blowing nozzle 16 and a discharge electrode 17 are arranged below the capillary 10 respectively.

The air spray nozzle 16 sprays gas onto the electrode surface of the discharge electrode 17 during discharge, as shown in FIG. 8, to prevent the coating film 13b on the electrode surface from being contaminated by pyrolysis gas or the like. The air blowing nozzle 16 is fixed to the XY table 5,
It has a structure capable of blowing air to a set height position (L ₀ or L ₃ ) immediately below the capillary 10. That is, the air blowing nozzle 16 is connected to the gas supply port 16.
The nozzle tube 16a has a nozzle tube 16a for guiding the gas (air) supplied from the nozzle b. At the tip of the nozzle tube 16a, there is formed a gas outlet 16c having a narrow opening cross-sectional area and an increased blowing pressure.

Here, the spray height L ₁₇ of the spray nozzle 16 with respect to the lead frame 4 is equal to the discharge electrode 17.
Is preferably an intermediate position between L ₀ and L ₃ which is the height position of the electrode surface. Therefore, such a height L ₁₇ can be calculated by the following equation.

L ₁₇ = (L ₀ + L ₃ ) / 2 As an example, the cross-sectional area of the gas outlet 16 c is 0.2 to 1.0.
0 mm ^2, the distance between the spray flow rate from 0.1 to 0.5 liters / min, the gas outlet 16c and the electrode surface was able to obtain a good effect by a 0.5 to 2.0 mm.

If the flow rate of the air is significantly larger than the above value, the discharge spark S becomes unstable and the ball 13
In some cases, it becomes difficult to form c or the coating film 13b cannot be removed properly. Further, when the spray amount is extremely small, there is a case where the contamination of the electrode surface cannot be effectively prevented.

Although air is used as the blowing gas, the invention is not limited to this, and an inert gas such as argon (Ar) or nitrogen (N ₂ ) or another gas may be used.

Next, referring to FIG.
The structure of the discharge electrode 17 arranged at the position opposing to No. 6 will be described.

The discharge electrode 17 has an electromagnetic piece 170a and an electromagnetic piece 170b as discharge terminals. Among them, the former electromagnetic piece 170a is an electrode dedicated to removing the coating film 13b, while the latter electromagnetic piece 170b functions as a combined electrode for removing the coating film 13b and forming a ball. The electromagnetic piece 170a has a structure in which the upper and lower surfaces in FIG. 9 are sandwiched by insulating pieces 170c made of an electrically insulating material, and these are supported by electrode arms 174a. As shown in FIG. 10, each of the cross-sectional structures of the electromagnetic pieces 170a and 170b has an opposite cross-section machined at an acute angle, and the discharge spark S concentrates between the electromagnetic wire 170a and the core wire 13a when the coating film 13b is removed. The structure is liable to occur.

Note that the electromagnetic piece 170b is
Similarly to a, the upper and lower surfaces have a structure sandwiched by insulating pieces 170d, but the upper surface has a structure in which the discharge surface is exposed, and the exposed portion functions as a ball forming electrode surface. .

The electromagnetic pieces 170a and 170b can be made of a heat-resistant conductive material such as tungsten (W), and ceramic can be used as an insulating material for forming the insulating pieces 170c and 170d. is there. The electromagnetic pieces 170a, 170b and the insulating pieces 170c,
For fixing to 170d, for example, a heat-resistant adhesive such as a ceramic bond can be used.

The electromagnetic pieces 170a, 170b and the insulating pieces 170c, 170d are respectively connected to the electrode arms 174a, 174a.
It is connected to swing arms 173a and 173b that can rotate around a shaft fulcrum 171 via 74b.

The swing arm 173a is connected to a discharge electrode first solenoid 172a fixed to the holding portion 175 at the end opposite to the electrode arm 174a, and the swing arm 173b is connected to the discharge electrode. It is connected to the second solenoid 172b. Each swing arm 17
Both 3a and 173b are biased obliquely to the upper right in FIG. 9 by tension coil springs 176a and 176b.

Next, an operation mechanism of the discharge electrode 17 will be described.

In the case where the discharging operation is not performed At this time, the first solenoid 172a for the discharge electrode is in the off state, and the electromagnetic piece 170a is disengaged from the covering wire 13 by the urging force of the extension coil spring 176a locked on the swing arm 173a. It is attracted in the direction of going away, and is stopped at a predetermined position by a stopper (not shown) or the like.

At this time, the second solenoid 1 for the discharge electrode
72b is in an on state, and the electromagnetic piece 170b is connected to the second solenoid 1 for the discharge electrode with respect to the swing arm 173b.
It is retracted in a direction away from the covering wire 13 by the electromagnetic force of 72b.

At the time of ball formation First, when the second solenoid for discharge electrode 172b is turned off, the swing arm 173b is applied with the tensile force of the extension coil spring 176b, and moves in the direction of the covering wire 13. At this time, the electromagnetic piece 170b is moved by the action of a stopper (not shown) so that the wire tip 1
Stop at the position immediately below 3e (lower end). In FIG. 9, for simplicity of explanation, the discharge electrode 1 is
Although it is illustrated as if the side 7 moves up and down, the height position of the discharge electrode 17 is actually fixed, and the covered wire 13 is displaced to the up and down position by the action of the capillary 10 and the first clamper 14. Is what is being done. At this time, it is desirable to adjust the position of the stopper so as to control the ball forming electrode surface (exposed surface) of the electromagnetic piece 170b to be at an optimum position for generating a discharge function.

At the time of removing the coating film In this case, first, the first solenoid 172a for the discharge electrode is used.
Is turned on, and the swing arm 173a is attracted by the electromagnetic force of the first solenoid for discharge electrode 172a, the electromagnetic piece 170a moves in the direction of the covering wire 13 against the tensile force of the extension coil spring 176a, and Stop at the position. The stop position at this time is determined by the set height position of the discharge electrode first solenoid 172a. In addition,
The first solenoid 172a for the discharge electrode and the second solenoid 172b for the discharge electrode can adjust the height position independently of each other. For this reason, the first solenoid 172a for the discharge electrode can be appropriately adjusted so that the electromagnetic piece 170a stops at about 100 μm before the covering wire 13, for example, so as not to contact the covering wire 13.

Next, the second solenoid for discharge electrode 172b
Is turned off, the tension coil spring 176 is turned off.
The electromagnetic piece 170b is attracted in the direction of the covering wire 13 by the tensile force of b. At this time, the action of the stopper 177 provided on the swing arm 173b causes the electromagnetic piece 170
b is positioned relatively to the position of the electromagnetic piece 170a. That is, the interval between the two electromagnetic pieces 170a and 170b depends on the length of the protrusion of the stopper 177. By appropriately adjusting the stopper 177, for example, by setting the interval between them to about 200 μm,
3 can be sandwiched between the electromagnetic pieces 170a and 170b in a non-contact state.

At the time of releasing the pinching, the above operations may be performed in reverse order. Needless to say, in order to properly realize the above operation, the electromagnetic force of both solenoids 172a and 172b needs to be greater than the tensile force of extension coil springs 176a and 176b. As an example, when the electromagnetic force when the two solenoids 172a and 172b are in close contact with each other is 500 gf, the extension coil springs 176a and 176a
The above effect could be obtained by setting the tensile force of 76b to 100 gf.

Next, the detailed structure of the electromagnetic pieces 170a and 170b will be described with reference to FIG.

In the present embodiment, the insulating pieces 170c and 170c are provided on the side facing the electromagnetic pieces 170a and 170b.
The d has a said electromagnetic piece 170a, which protrude in mutual opposite direction by l ₂ than the opposite tip of 170b structures. Here, assuming that the diameter of the core wire of the covering wire 13 is l ₃ and the distance between the insulating pieces 170c and 170d is l ₁ , the discharge gap length l ₄ (see FIGS. 10 and 19) satisfies the following conditional expression. Is set to

L ₂ ≦ l ₄ ≦ l ₂ + (l ₁ −l ₃ ) / 2 where l ₂ = 200 μm, l ₃ = 30 μm, l ₁ = 1
If it is set to 00 μm, the discharge gap can be set with high accuracy of 200 μm ≦ l ₄ ≦ 235 μm.
A stable discharge state can be obtained.

9 and 10, the electromagnetic piece 17
Although the insulating pieces 170c and 170d sandwiching Oa and 170b are shown as having a structure in which the insulating pieces 170c and 170d are divided into two pieces and bonded together, the present invention is not limited to this. , 170b
The electromagnetic pieces 170a and 170b may not easily fall off due to repeated impact during driving.

In FIG. 9, the first solenoid 172a for the discharge electrode, the second solenoid 172b for the discharge electrode, and the extension coil springs 176a, 176b serve as the driving mechanism.
However, the present invention is not limited to this, and an actuator such as a linear motor or a rotary motor may be used instead of the solenoid, and a spring element such as a pressure spring or a leaf spring may be used instead of the extension coil spring.

Next, referring to FIG.
The circuit configuration of the discharge power supply circuit 18 to which the a and 170b are connected will be described.

The discharge power supply circuit 18 has a high voltage generator 18a for generating a discharge spark S between the covering wire 13 and the discharge electrode 17, centering on a power supply circuit controller 18d for controlling the entire circuit. A low voltage generator 18g for measuring the total resistance of the covered wire 13, a detector 18b for detecting these, and a storage unit 18c for storing the detected value;
Further, it has resistors R _{1 to} R ₄ for voltage measurement and current measurement connected in parallel and in series. Further, switches 18e and 18f are provided between the high voltage generator 18a and the low voltage generator 18g and the covering wire 13 and the electromagnetic piece 170b, respectively. That is, when the switch 18e is short-circuited, the electromagnetic piece 170b and the coated wire 1
A predetermined high voltage is applied to the third core wire 13a, and a predetermined low voltage is applied by the low voltage generator 18g when the switch 18f is short-circuited.

Here, the reason why the discharge voltage is controlled by using the discharge power supply circuit 18 having the above configuration is as follows.

That is, unlike the case where the bare wire is used, when the covered wire 13 is used as in the present embodiment,
As shown in FIG. 17 and FIG.
Since the entire length of the covered wire 13 wound around the wire contributes to the voltage drop ΔV in the discharge circuit, if a constant voltage is always applied ignoring the length of the wound wire, the discharge voltage Variations occur and stable ball 13c
Is difficult to form. For example, the core wire 1 of the covering wire 13
3a is made of 30 μm gold wire, and the wire spool 1
In the case where the winding length in No. 2 is 1000 m, the total resistance of the covered wire 13 immediately after mounting the wire spool 12 is about 34 kΩ.

On the other hand, the wire tip 13e of the core wire 13a
The discharge conditions for forming the ball 13c having a diameter of about 75 μm are as follows:
A condition of 0.5 msec is conceivable.
Is 3400 V immediately after the new wire spool 12 is mounted.

Also, the electromagnetic piece 170b and the wire tip 13e
Can be obtained from the discharge current and the discharge gap length as described below. For example, when about 300 V, when both are added,
Applied voltage V required to generate discharge spark S
Is V = 3400 + 300 = 3700V.

Further, the value of the voltage drop ΔV gradually decreases with the consumption of the covered wire 13 due to the progress of the bonding operation, and the value of the covered wire 1 wound on the wire spool 12 is reduced.
By the time that 3 is used up, it almost reaches 0V. For this reason,
If a constant voltage is applied from the start to the end of using the covering wire 13 from the new wire spool 12, a large variation occurs in the balls 13c to be formed.

Therefore, in the present embodiment, the ball 13c
The following control is performed using the discharge power supply circuit 18 in order to stabilize the formation of.

First, the switch 18e is opened immediately after the formation of the ball 13c, and the switch 18f is closed to connect the low voltage generator 18g to the discharge circuit. In this state, the capillary 10 is lowered and the ball 13c and the electromagnetic piece 1 are moved.
70b is short-circuited to the low-voltage generating section 18g.
From applying a relatively small voltage V _4.

At this time, the detector 18b measures the voltage V ₃ across the resistor R ₄ . Here, the resistance R of the entire length of the covered wire 13 is calculated by the following equation.

R = R ₄ × (V ₄ / V ₃ ) +1 (Ω) For example, when V ₄ = 100 (V) and R ₄ = 100 (Ω), V ₃ = 0.5 (V) Is measured, the resistance value of the covered wire 13 over the entire length is R = 20.1 kΩ.

Next, assuming that the optimal target current in the discharge for forming the ball 13c is I _OPT = 0.1 (A), the voltage drop ΔV in the covering wire 13 at the time of forming the ball 13c is ΔV = 20100 × 0.1 = 2010 (V).

The value obtained by adding the voltage drop V ′ at the discharge gap to this value is the target voltage V during ball formation.
_OPT , which is expressed by the following equation.

V _OPT = ΔV + V 'The above V _OPT is stored in the storage section 18c and used at the time of forming the ball 13c next time. That is, at the time of the next ball formation, the switch 18f is opened and the switch 18e is closed, the high voltage generator 18a is connected to the discharge circuit, and the controller 20d is controlled by the power supply circuit controller 18d.
When an instruction to more discharge start is made, the power supply circuit control section 18d as a trigger this by from the storage unit 18c reads the value V _OPT instructs the high voltage generating unit 18a to generate a voltage of the value . Thereby, the electromagnetic piece 170
At b and the wire tip 13e, the ball 13c can be formed under substantially the same discharge conditions as the previous time.

Next, a method of calculating the voltage drop V 'in the discharge gap will be described.

In general, the gap voltage depends on parameters such as the discharge atmosphere, the atmospheric pressure, the electrode material on the cathode side, the discharge gap length, the discharge current, and the like. This is the discharge current.

FIG. 20 shows an example of the gap drop voltage obtained from the experimental results. From the figure, it is assumed that the change amount of the gap voltage when the discharge gap length is 1.0 mm is ΔV ′ with respect to the gap voltage V ₀ ′ when the discharge gap length is 0.02 mm and the discharge current is constant. It was found that the following equation holds.

V ′ = 270 + G × ΔV ′ (V) In the above equation, G indicates a discharge gap (mm).

Next, according to FIG. 21, in which the horizontal axis represents the discharge current I on a logarithmic scale and the vertical axis represents ΔV ′, the characteristic at this time has a characteristic that becomes a straight line on a logarithmic scale. It has been found that the following is obtained when the following equation is used.

ΔV ′ = 280−100 log ₁₀ I (V) From the above two equations, it has been found that the gap voltage V ′ is a function of the discharge gap length G and the discharge current I and is expressed by the following equation.

V ′ = 270 + G × (280−100 log ₁₀ I) (V) However, each constant term in the above equation is not an invariable quantity, but an initial condition of the wire bonding apparatus, for example, a material of the core wire 13a, a discharge electrode. 17 (electromagnetic piece 170b) differs depending on the material, discharge atmosphere, and the like. Therefore, it is necessary to obtain the values in advance by experiments and the like.

Since the above equation is merely an interpolation of the experimental result, the applicable range is the experimental range, for example, the discharge current I =
The range is 7 to 220 mA, and the discharge gap G is limited to the range of 0.02 to 1.0 mm.

Thus, the function of the above equation is stored in the storage unit 18
By storing the value in c, even if the set value of the discharge current I in the discharge gap is changed, an appropriate gap voltage V 'can always be calculated from the above equation and used for the above-described series of applied voltage calculations. Therefore, the discharge for forming the ball 13c that is always stable over the entire length of the covering wire 13 and the removal of the covering film 13b can be performed.

In the above description, the applied voltage is controlled so as to decrease as the covered wire 13 becomes shorter. However, if the applied voltage at this time is reduced to about 1000 V or less, insulation breakdown may occur. In some cases, it becomes difficult to start discharging. In such a case, FIG.
As shown in FIG. 5, before the main discharge, a voltage for dielectric breakdown, for example, a voltage of 2000 to 4000 V, is negligibly short with respect to the entire discharge energy, for example, 0.01 to 0.05.
The voltage may be applied for about msec.

Next, a specific example of calculating the applied voltage will be described.

First, the covering wire 13 is inserted into the capillary 10, and the first clamper 14 is closed with the wire tip 13 e protruding about 1 mm from the tip of the capillary 10 to fix the covering wire 13. At this time, the wire tip 13e may be heated by a gas burner or the like (not shown) to completely remove the coating film 13b on the wire tip 13e. In short, it is sufficient that a part of the core wire 13a is exposed at a portion of the wire tip 13e facing the discharge electrode surface.

Next, the capillary 10 is lowered to expose the exposed portion of the core wire 13a at the wire tip 13e and the electromagnetic piece 170b.
Contact with the surface. At this time, for example, the discharge power supply circuit 1
A short detection circuit or the like (not shown) may be provided in the interior of the capillary 8 to detect the contact state between the wire tip 13e and the electromagnetic piece 170b and stop the lowering of the capillary 10.

Next, the switch 18e inside the discharge power supply circuit 18 is opened, and the switch 18f is closed instead. In this state, a voltage relatively lower than that of the low voltage generator 18g is applied to the discharge circuit including the entire length of the covered wire 13. At this time, the detection unit 18b, the applied voltage V ₄ and the circuit for measuring the voltage V ₃ across the resistor R ₄ which are inserted in series. This allows the wire spool 12
Can be calculated by the following equation.

R = R ₄ × [(V ₄ / V ₃ ) +1] (Ω) Here, for example, V ₄ = 100 (V), R ₄ = 100
(Ω), when V ₃ = 0.5 (V) is measured, R = 20.1 (kΩ).

Through the above steps, the wire spool 12
Is completed, the detection of the winding resistance of the covered wire 13 is completed. The value of the winding resistance R thus obtained is stored in the storage unit 18c in the discharge power supply circuit 18.

Next, the case of the ball forming discharge which is the first discharge will be described with reference to FIG.

As an example, the wire tip 13 of the covered wire 13 in which the core wire 13a is formed of a gold wire having a diameter of 30 μm.
When a ball 13c having a diameter of 75 μm is formed on e,
The electromagnetic piece 170b for ball formation is set on the negative electrode side, for example, with a discharge time of 0.5 msec, a discharge current of 0.1 A (100 mA),
It is conceivable that the discharge gap is set to about 0.5 mm.

The discharge current at this time, that is, the target current I =
An applied voltage V that enables 0.1 A is calculated by the following method.

First, from the winding resistance R calculated above and the target current I, the voltage drop ΔVa at the winding portion of the covering wire 13 is as follows: ΔVa = I × R = 0.1 × 20.1 × 10 ³ = 2010 (V).

Next, the voltage drop V in the discharge gap
a 'is calculated from Va = 270 × G × (280-100 log ₁₀ I) = 270 × 0.5 × (280-100 log ₁₀ 100) = 310 (V) from G = 0.5 mm and I = 100 mA. You. Therefore, the applied voltage V under the above conditions
V = ΔVa + Va ′ = 2010 + 310 = 2320 (V)

The applied voltage V obtained as described above is stored in the storage section 18c.

Subsequently, when performing a discharge for forming a ball, the switch 18e is first closed, and then the switch 18f is opened to enable the high voltage generator 18a.

Next, the power supply circuit control unit 18d
8c (= 2320)
(V)), and instructs the high voltage generator 18a to generate this voltage value. In this way, a discharge current of I = 100 mA, which is the target current, can flow through the electromagnetic piece 170b as a discharge terminal for ball formation.

As described above, the applied voltage V and the drop voltage ΔVa
FIG. 18 shows the relationship.

The above description is about the discharge conditions at the time of forming the ball for the first bonding.
Next, discharge conditions for removing the coating film 13b for the second bonding will be described with reference to FIG.

For example, a core wire 1 made of a gold wire having a diameter of 30 μm
The thickness of the heat-resistant polyurethane resin is 1 around 3a.
In the case of the coated wire 13 to which the coating film 13b of μm is applied, the case where the coating film 13b at the portion to be joined in the second bonding is thermally decomposed and removed in the axial direction within a range of 500 μm will be described.

In this case, first, as the discharge conditions, the discharge electrode 17 side is set to a negative polarity, for example, for a discharge time of 10 msec.
It is conceivable that the discharge current (target current Ib) is 0.01 A (10 mA) and the discharge gap length is 0.2 mm.

The applied voltage for achieving the target current Ib = 10 mA is calculated by the following method.

First, from the winding resistance R of the covered wire 13 calculated in the above-mentioned initial setting and the target current Ib, the voltage drop ΔVb at the winding portion is as follows: ΔVb = Ib × R = 0.11 × 20.1 × It is calculated as 10 ³ = 201 (V).

Next, the voltage drop Vb ′ in the discharge gap (G = 0.2 mm) is as follows: Vb ′ = 270 + G × (280−100 log ₁₀ I) = 270 + 0.2 × (280−100 log ₁₀ 10) = 304 (V). Thus, the target applied voltage V is as follows: V = ΔVb + Vb ′ = 201 + 304 = 505 (V)

The voltage value thus obtained (V = 50
5 (V)) is stored in the storage unit 18c of the discharge power supply circuit 18.

Next, at the time of actual discharge removal of the coating film 13b, the switch 18e is closed to make the high voltage generating section 18a effective, and the power supply circuit control section 18d issues an instruction.
The applied voltage (V = 5) stored in the storage unit 18c above
05 (V)), and instructs the high voltage generator 18a to generate this voltage value. In this manner, the two electromagnetic pieces 170 which are discharge terminals for removing the coating film are formed.
A discharge current of I = 10 mA, which is the target current, can be passed to a and 170b.

When the applied voltage calculated as described above is 1000 V or less, it is often difficult to start a stable discharge because the voltage is too low. Therefore, as shown in FIG. As an initial voltage for starting, for example, 2000
A high voltage of about V may be applied for a short time that does not affect the entire discharge, for example, about 0.01 msec. When the calculated applied voltage is a value of about 2000 V or more, it is needless to say that such an initial voltage need not be applied.

The series of steps described above were calculated based on the winding resistance R (R = 20.1 (KΩ) in the above example) calculated immediately after the new wire spool 12 was mounted. Things. Here, as the length of the covered wire 13 gradually decreases as the bonding process proceeds, the above-described calculation of the applied voltage V requires a decrease in the value of the winding resistance R due to a decrease in the total length of the covered wire 13. Must be considered. The measurement of the gradually decreasing winding resistance is performed in the same manner as in the above-mentioned initial setting, that is, the ball 13c formed on the wire tip 13e of the covering wire 13 and the electromagnetic piece 1 are used for each wire bonding process.
The switch 18e inside the discharge power supply circuit 18 is opened, and the switch 18f is replaced with the switch 18f.
Is closed. In this state, the low voltage generator 18g
A relatively lower voltage is applied to the discharge circuit including the entire length of the covering wire 13. At this time, the detection unit 18b, the applied voltage V ₄ and the circuit for measuring the voltage V ₃ across the resistor R ₄ which are inserted in series. Thus, the winding resistance R of the covering wire 13 wound on the wire spool 12 can be calculated for each bonding cycle, as in the above-described initial setting.

In the above description, the case where the value of the winding resistance R is calculated for each bonding cycle has been described.
Alternatively, each time one unit of the semiconductor chip 3 is bonded,
This may be performed in a range where the value of the winding resistance R does not change so much.

When calculating the applied voltage V, the following method is also possible.

In the following description, it is assumed that the initial setting operation has already been performed, the value of the winding resistance R has been determined, and the bonding process is proceeding sequentially.

First, the switch 18e of the discharge power supply circuit 18
Is closed and the switch 18f is opened to open the high-voltage generator 1
8a is assumed to be valid.

In this state, a discharge voltage for ball formation is applied from the high voltage generating section 18a so that a current flows through the circuit, and a resistor R ₃ for voltage detection inserted in parallel with the circuit is used.
Measured across the voltage V ₁ of the of the resistance R ₁ of the current detection is inserted in series circuit across the voltage V _2, respectively. From these voltages V ₁ and V ₂ , the generated voltage V and the current I at that time are calculated as follows.

V = (R ₂ + R ₃ ) / R ₃ × V ₁ I = V ₂ / R ₁ Here, assuming that the voltage drop in the discharge gap is Va ′, the value of the winding resistance R in the coated wire 13 is: R = (V−Va ′) × I Here, for example, R ₁ = 10Ω, R ₂ = 1
Assuming that 0 MΩ, R ₃ = 100 kΩ, and the voltage measurement results are V ₁ = 2 (V) and V ₂ = 1 (V), V = (10 × 10 ⁶ + 100 × 10 ³ ) / (100 × 10 ³ ) ³ ) × 2 = 2020 (V) I = 1/10 = 0.1 (A) Using this current I = 0.1 A (= 100 mA) and the value of the discharge gap G (for example, G = 0.5 mm), Va ′ = 270 + G × (280-100 log ₁₀ I) = 270 + 0.5 × (280-100 log ₁₀ 100) = 310 (V). From these values, the winding resistance R is as follows: R = (V−Va ′) × I = (2020−310) /0.1=17100 (Ω) = 17.1 (kΩ) The value of the winding resistance R at this time is stored in the storage unit 18c as described above.

Based on the value of the winding resistance R obtained in this way, it is possible to calculate an appropriate applied voltage in the discharge for forming the ball 13c in the next cycle.

Although the control for the ball forming discharge at the first bonding position of the coating wire 13 has been described above, the control may be performed at the second bonding position, that is, at the time of the discharge for removing the coating film.

By the control in the discharge power supply circuit 18 as described above, the change in the winding resistance R can be accurately detected at any time as the length of the covering wire 13 decreases with the progress of bonding. The setting can be made, the formation of the ball 13c having a constant shape over the entire length of the covering wire 13, and the covering film 13b in a certain range
Can be removed, and a stable bonding operation can be performed.

Next, a wire bonding step to which the above technique is applied will be described with reference to FIG.

In FIG. 2A (a), the bonding stage 2
Immediately above the upper semiconductor chip 3, the first clamper 14
Is closed and the sheathing wire 13 is clamped, and the tip of the capillary 10 is moved from the wire tip 13e of the sheathing wire 13 to La (for example, La = 0.5 mm to 1.0 mm).
Degree). At this time, the wire tip 13e is coated with the coating film 13b by the above-described discharge technique.
Has already been removed in the range of about 0.1 to 0.4 mm, but this step will be described later in the step of FIG. 2B (i).

In FIG. 2A (b), the electromagnetic piece 170b of the discharge electrode 17 is connected to the wire tip 13e of the covered wire 13 via a gap (discharge gap) having a predetermined length.
3e, the ball 13c is formed by application of the high voltage of the discharge power supply circuit 18 described above. Discharge gap L ₁₀ at this time, 0.
It can be set in the range of about 2mm to 1.0mm,
A range of 0.7 mm is desirable.

Although not shown in the figure, immediately after the formation of the ball 13c, the ball 13c
b, and contact with the discharge surface of
May be measured.

In FIG. 2C, the second clamper 15 is the first clamper.
The clamp load, that is, the state of the friction clamp is set, and the first clamper 14 is in an open state. In the state of the friction clamp, a tension of about 1.0 gf to 4.0 gf is applied to the coated wire 13 as described above. In this state, when the capillary 10 descends toward the first bonding position (first position) on the semiconductor chip 3 as shown in FIG. 2A (d), the ball 13c is locked at the tip of the capillary 10 to cover the semiconductor chip 3. The entire wire 13 is lowered accordingly.

FIG. 2A (e) shows a state in which the first bonding has been performed. That is, the capillary 1
In a state in which the ball 13c held at the tip of the zero lands on the semiconductor chip 3, a load of 50 to 50 is applied to the capillary 10.
100 gf is applied, and the ultrasonic oscillator 11 applies an ultrasonic vibration of, for example, 60 kHz and an amplitude of about 0.5 μm to 1.0 μm to the capillary 10. The ball 13c
Due to the synergistic effect of the ultrasonic vibration and the heating of about 200 ° C. from the heater 2a in the bonding stage 2, the covering wire 13 is bonded to the semiconductor chip 3 (bonding pad 3b) in a bonding time of about 20 to 40 msec. Is done. Such bonding is achieved by promoting diffusion of atoms between gold (Au) forming the ball 13c and aluminum (Al) forming the bonding pad 3b by heating and ultrasonic vibration. At this time, the second clamper 15 is in an opened state (clamp-off), whereby the covered wire 13 is in the first state.
The state is not restricted by either the clamper 14 or the second clamper 15.

FIG. 2B (f) shows a state where the capillary 10 has been raised by a predetermined amount after the completion of the first bonding. At this time, the rising amount of the capillary 10 is controlled such that the portion (exposed portion 13 d) of the coating film 13 b in the middle of the coating wire 13 becomes the tip of the capillary 10. FIG. 5 shows a case where the above-described positioning is performed when the capillary 10 reaches the highest ascending position. However, the present invention is not limited to this, and the capillary 10 may be lowered to the second bonding position (the inner lead 4b). ) At any part of the intermediate state until the capillary 10
The exposed portion 13d may be positioned with respect to the tip of the head.

In the state shown in FIG. 2B (f), after the capillary 10 ascends to a predetermined height, the second clamper 15 is moved at an appropriate point during the descent to the second bonding position (inner lead 4b). In the friction clamp state (first
Capillary 10 descending as clamp load setting state)
By applying a tensile force to the covering wire 13 in the upward direction, the wire pull-in failure does not occur, so that the height of the wire loop can be stably controlled. By setting the second clamper 15 in the friction clamp state when the capillary 10 is lowered in this way, an abnormal loop due to poor wire drawing into the capillary does not occur, and the length of the wire necessary for forming the wire loop is reduced. The position of the wire at the portion to be joined to the second joining portion (the position at which the coating film is to be removed) can be set with high precision because the stability can be controlled stably.

FIG. 2B (g) shows a state where the capillary 10 lands on the second bonding position (the inner lead 4b) and the second bonding is performed. In the figure, the movement of the capillary 10 in the horizontal direction is relatively performed by the movement of the XY table 5.

The bonding conditions in the second bonding are as follows: a bonding load on the capillary 10 of 100 to 100;
150gf, bonding time 10-30msec, ultrasonic frequency 6
0 kHz, an amplitude of 1.0 to 2.0 μm, and a junction temperature of about 200 ° C. are preferable. Under these conditions, the coated wire 13
The mutual diffusion between the Au atoms of the core wire 13a in the exposed portion 13d and the Ag atoms in the silver plating on the inner lead 4b is promoted, and the bonding is realized. At this time, in the present embodiment, in a state where the coating film 13b is removed in advance at the second bonding portion of the coating wire 13 to form an exposed portion 13d, and the peripheral side surface of the core wire 13a is in direct contact with the inner lead 4b. The application of the ultrasonic vibration has the following advantages.

First, there is no need to apply ultrasonic vibration for removing the coating film 13b. That is, in order to mechanically break and remove the coating film 13b at the second joint portion, it is necessary to apply multi-stage ultrasonic vibration. However, in the present embodiment, this is unnecessary, so that the bonding operation is not performed. Can be performed efficiently.

Second, the bonding strength in the second bonding can be kept extremely high. In other words, since the coating film 13b is removed in advance during the second bonding and the core wire 13a is exposed, it is possible to obtain high bonding strength without application of a coating film piece or the like when applying ultrasonic vibration. Can be. Therefore, bonding reliability can be improved.

Third, at the time of the second bonding, since the coating film 13b has been removed in an appropriate range in advance, low-temperature bonding can be realized, and the temperature condition in the second bonding is substantially the same as that for the bare wire. Therefore, element destruction and fatigue due to heating can be prevented.

By removing the coating film 13b by electric discharge, the thickness of the coating film 13b can be increased, and the insulation of the coating wire 13 can be maintained high.

[0166] In the following figure 2B (h), after completion of the second bonding, without moving the XY table 5 shows a state where the capillary 10 is raised from the surface of the lead frame 4 by L _1. L ₁ at this time is calculated by the first and second information about the junction in the manner described below, and device configuration conditions of the. When the capillary 10 is raised to a height of L ₁ in this manner, insulated wire 13 is clamped state first clamper 14 is closed.

[0167] In FIG. 2B (i), shows a state where the capillary 10 with the first clamper 14 is insulated wire 13 is closed is clamped is further increased to a height of L _2. At this time, the first clamper 14 rises in conjunction with the capillary 10 in a state where the coated wire is clamped,
The covering wire 13 is cut at the second joint site. As a result, insulated wire 13 is in a state of being protruded from the distal end of the capillary 10 of length amount corresponding the L _1.

Next, the two electromagnetic pieces 170a and 170b of the above-described discharge electrode 17 are connected to the covering wire 1 while keeping the state shown in FIG.
3 is sandwiched from both sides thereof in a non-contact state, and the voltage controlled by the discharge power supply circuit 18 as described above is applied to the discharge electrode 17.
When a voltage is applied to the core member 13, discharge is performed between the electromagnetic pieces 170 a and 170 b and the core wire 13 a via the coating film 13 b. A part of the coating film 13b at a predetermined portion of the coating wire 13 is removed by the discharge energy at this time. As the discharge conditions at this time, for example, the discharge electrode 17 side is set to a negative
20 msec, discharge current 5-30 mA, discharge gap 0.1-
0.5 mm, but the discharge time is 10 mm as described above.
msec, discharge current (target current Ib) 0.01 A (10 m
A), Preferably, the discharge gap length is 0.2 mm. However, the present invention is not limited to these values.
It is necessary to heat the appropriate region to about 600 ° C. without heating to 1063 ° C. which is the melting point of u) and to the thermal decomposition temperature of the coating film 13b. In this regard, according to the above-described discharge conditions, only the coating film 13b can be completely thermally decomposed and removed without forming a ball or the like due to the discharge at an intermediate portion of the coating wire 13.
Stable removal in the range of 1 mm to 1.0 mm, and further in the range of 0.4 mm to 0.6 mm can be controlled.

If the installation height of the electrode surface of the discharge electrode 17 at this time is L ₃ and the length from the tip of the covering wire 13 to the removal center position is L ₄ , the distance between the above L ₁ and L ₂ is The following geometric relationship holds.

L ₂ -L ₃ = L ₁ -L ₄ Therefore, L ₁ = L ₂ -L ₃ + L ₄ where L ₂ and L ₃ are values determined by the initial setting of the apparatus, and L ₄ is This is a value determined by arithmetic processing based on information between bonding positions at the time of bonding.

After the above discharge, the discharge electrode 17 is retracted in a direction away from below the capillary 10 and the second clamper 15 is closed. At this time, the second clamper 15
Indicates a fixed clamp state, that is, a clamp load of 50 to 1
The second clamp load is set to about 50 gf, and the covered wire 13 is completely restrained.

[0172] In FIG. 2B (j), the first clamper 14 is opened, the capillary 10 is lowered relatively by L ₈ than in the state of FIG. 2B (i). At this time, since the covering wire 13 is restrained by the second clamper 15, the covering wire 1
3 is drawn into the capillary 10 by L ₈ , and the tip of the covering wire 13 projects from the tip of the capillary 10 by the tail length L ₉ . From this state, the first clamper 14 is closed, the second clamper 15 is opened, capillary 10 is the initial state at the next bonding cycle XY table 5 is moved a predetermined amount with increases up to the initial height L ₂ (See FIG. 2A (a)).

2A (a) to 2B (j) described above, the height position of the capillary 10 (bonding tool), the ON / OFF of the solenoids in the first clamper 14 and the second clamper 15, and other mechanisms. FIG. 3 shows the operation timing.

The following equation is established between L ₀ , L ₁ , L ₈ , L ₉ , and L ₁₀ described with reference to FIGS. 2A (a) to 2 (j).

L ₁ = L ₈ + L ₉ L ₂ = L ₀ + L ₁₀ + L ₉ Here, the height L ₀ of the electrode surface of the discharge electrode 17 for forming the ball is determined by the initial setting of the apparatus. Since the discharge gap L ₁₀ and the tail length L ₉ are determined by the initial settings of the operator, the initial height L ₂ of the capillary 10 is inevitably determined from these. In this case, for example, by contacting a tip end of the capillary 10 on the discharge side of the electromagnetic piece 170b of the discharge electrodes 17, L ₁₀ with high accuracy by detecting the height position using the position detecting mechanism not shown in the bonding head 6 Can be set. Discharge electrode height L ₃ of the covering film is removed along with this can also be calculated easily.

Next, L ₄ can be calculated by the following equation from FIG.

L ₄ = L ₆ + L ₇ Here, L ₆ is the covering wire 1 required for the next bonding.
The length of 3, L ₇ is the length required for forming the ball 13c. L ₇ is the diameter D of the diameter d and the ball 13c of the core wire 13a of the insulated wire 13 (Mm) (FIG. 2A (b) see)
From the relationship between, L ₇ = a ^{(1/3) × (D 3 /} d 2). Here, for example, if d = 30 μm, L ₇ =
7.41 × 10 ⁻⁴ × D ³ (Mm) Here, it can be understood that if the accuracy of the diameter D of the ball 13c is about 75 μm ± 5 μm, L ₇ is reproduced with an accuracy of about 320 ± 50 μm. FIG. 6 is a graph of the above equation shown as above.

Next, the length L required for bonding is
₆ is approximately from wiring distance L ₁₅ and the loop height L ₁₄ after the detection of the bonding positions, can be determined by the formula _{L 6 = L 14 + L 15} . Here, the loop height L
Reference numeral ₁₄ denotes wiring conditions, for example, mechanical properties based on the method of manufacturing the core wire 13a, steps between the first and second bonding sites, the trajectory of the capillary 10, the amount of back tension during wiring, discharge conditions for ball formation, and the like. it is a determined values, undergoes particularly large influence of wiring distance L ₁₅ among this. The loop height L ₁₄ in this case, to previously obtain a relation between the wiring distance L ₁₅ in experimentally beforehand, by storing it in the control unit 20, corresponding to the wiring distance L ₁₅ it is possible to obtain a loop height L _14.

[0179] As an experimental example of the above, an example of examining the relationship between the wiring distance L ₁₅ and the loop height L ₁₄ in the particular conditions in FIG. According to the figure, L ₁₄ is may be represented by a linear function of L _15, it becomes the following equation.

L ₁₄ = 0.05 × L ₁₅ +0.15 (mm) The above is only an example, and L ₁₄ may of course be a multidimensional function of L ₁₅ .

[0181] By using each of the above formulas, it is possible to calculate by calculating the length L ₄ from the tip of the insulated wire 13 at the next bonding to the coating film removing position (the exposed portion 13d). Further, L ₁ , L ₂ , and L ₈ can be calculated from the above values, and the bonding can be performed in an optimum positional relationship based on these values.

Although not described in the above description in order to avoid the complexity of the description, the following considerations are required for performing continuous bonding.

Hereinafter, description will be made with reference to FIG.

First, a joint position is detected (step 7).
01), to perform the calculation of the wiring distance L ₁₅ (702). Based on this information, it calculates the removal position L ₄ of the coating film 13b of each bonding cycle (703). Subsequently, when the bonding to be performed is the first wire of the semiconductor chip 4 (704), the bonding and the product on the tab 4a of the lead frame 4 or the tab suspension lead (not shown) are affected. Dummy bonding is performed on a portion not provided (705). The wiring distance of the dummy bonding at this time is set to a constant value according to an instruction from the control unit 20.

After the dummy bonding is performed, actual bonding is performed (706). Then the second
In joint portion, already on the basis of the calculated value of the already L _4, to remove the covering film 13b of the portion (708), and repeats the steps 704 and subsequent processing steps. Here, when the covering wire 13 is the last wire in the semiconductor chip 3 (707), the next wire is a covering wire 13b at a predetermined length to be joined designated by the control unit 20 as a dummy wire. It is removed (709). continue,
After the next semiconductor chip 3 (lead frame 4) is placed on the XY table 5, the above steps 701 to 704 are performed.
Is repeated for the semiconductor chip 3 at this time, the dummy bonding is performed in step 705 prior to this bonding, and the dummy wire prepared above is dummy-bonded. Here, since the wiring distance of the dummy wire is always a constant length, bonding from the subsequent first wire can always be performed with a stable optimum wiring distance.

Since the bonding state in the dummy bonding is not directly related to the reliability of the product, it is not necessary to set the position of the wiring distance in the next first bonding after bonding the final wire in the semiconductor chip 3.

In the wiring state shown in FIG.
Exposed length L ₁₃ of the core wire 13a in the bonding portion,
For example 0.4~0.6mm variations in the removal area, ± 50.mu. variations in calculation error of the L ₄ due to variations in loop height
(For the same wiring distance) m, by a variation ± 50 [mu] m of the calculation error of L ₇ due to variation of the ball diameter, can be controlled to approximately L ₁₃ = 0.1 to 0.4 mm, enable the wire short circuit or the like And the second bonding with high bonding reliability can be realized.

Although the invention made by the present inventors has been specifically described above, it goes without saying that the present invention can be variously modified without departing from the gist thereof, in addition to those described in the above embodiments. Absent.

In the above description, a case where the invention made by the present inventor is mainly applied to a wire bonding technique using a covered wire using a gold wire as a core wire, which is a field of application, has been described. However, the present invention can be applied to a wire bonding technique for a covered wire having a core wire of another conductive wire metal such as a copper wire or an aluminum wire.

[0190]

The effects obtained by the representative ones of the inventions disclosed in the present application will be briefly described as follows.

That is, it is possible to form a ball and to expose a core wire at the first and second portions to be joined in the covered wire without complicating the structure of the device, and to use a wire having high bonding strength using the covered wire. Bonding becomes possible.

Further, the wire can always be maintained in a constant slack state, and a stable bonding operation can always be performed without causing a variation in the tensile force of the wire above the bonding tool.

Further, the gas blown to the electrode surface of the discharge electrode at the time of discharge can prevent the coating film from being contaminated by a pyrolysis gas or the like, and can perform a high quality wire bonding operation. .

As described above, the bonding reliability of the semiconductor device obtained through the wire bonding step can be improved.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram showing a wire bonding apparatus according to an embodiment of the present invention.

FIG. 2A is an explanatory diagram showing a positional relationship of a bonding tool and the like in a wire bonding step according to the embodiment in the order of steps;

FIG. 2B is an explanatory diagram showing a positional relationship of a bonding tool and the like in a wire bonding step of the embodiment in the order of steps.

FIG. 3 is an explanatory diagram showing operation timing of each mechanism corresponding to a bonding step.

FIG. 4 is an explanatory diagram showing the periphery of a semiconductor chip in a state where bonding has been completed according to the embodiment;

FIG. 5 is an explanatory diagram showing a relationship between a loop height and a wiring distance in the present embodiment.

FIG. 6 is an explanatory diagram showing a relationship between a required ball formation length and a ball diameter in the present embodiment.

FIG. 7 is a flowchart showing a bonding step of the present embodiment.

FIG. 8 is a perspective view showing a positional relationship between an air blowing nozzle and a discharge electrode.

FIG. 9 is a perspective view showing a driving mechanism of a discharge electrode.

FIG. 10 is a sectional view showing a positional relationship between a discharge electrode and a covering wire.

FIG. 11 is a plan view showing a clamp mechanism of a second clamper.

FIG. 12 is a perspective view showing a wire tension unit.

FIG. 13 is a cross-sectional view illustrating a wire detection mechanism of a wire tension unit.

FIG. 14 is a perspective view showing a wire spool.

FIG. 15 is a partially cutaway plan view showing a wire spool mounting structure.

FIG. 16 is a block diagram showing a circuit configuration of a discharge power supply circuit.

FIG. 17 is a cross-sectional view showing a winding portion and a discharge portion of the covered wire.

FIG. 18 is an explanatory diagram showing a relationship between a voltage drop of a winding portion and a discharge gap and an applied voltage.

FIG. 19 is a schematic diagram for explaining discharge conditions for removing a coating film.

FIG. 20 is an explanatory diagram showing an example of a gap drop voltage obtained from an experimental result.

FIG. 21 is an explanatory diagram showing a relationship between a variation amount of a gap drop voltage and a discharge current.

FIG. 22 is an explanatory diagram showing a state where a voltage for dielectric breakdown is applied prior to a discharge for removing a coating film.

[Explanation of symbols]

1 ... stand, 2 ... bonding stage, 2a
..Heater, 3 ... semiconductor chip, 3b ... bonding pad, 4 ... lead frame, 4a ... tab, 4b ... inner lead, 5 ... XY table, 6 ... bonding Head, 7 ... shaft fulcrum, 8
... linear motor, 9 ... bonding arm, 1
0: Capillary (bonding tool), 11:
Ultrasonic oscillator, 12 ... wire spool, 13 ...
Covered wire, 13a ... core wire, 13b ... covered film,
13c: ball, 13d: exposed part, 13e ...
· Wire tip, 13h · · · base end, 14 · · · first clamper, 141a · · · light emitting fiber, 141b · · ·
.Receiving fiber, 15... Second clamper, 151a
... Clamper chip, 151b ... Clamper chip, 152a ... leaf spring, 152b ... leaf spring, 1
53a ... solenoid, 153b ... solenoid,
154a: rod, 154b: rod, 155
... compression coil spring, 156 ... swing arm, 15
7 ... shaft fulcrum, 158 ... holding part, 16 ... air blowing nozzle, 16 a ... nozzle tube, 16 b ... gas supply port, 16 c ... gas outlet, 17 ... discharge Electrode, 170a ... Electromagnetic piece, 170b ... Electromagnetic piece, 1
70c: insulating piece, 170d: insulating piece, 171
..Axle fulcrum, 172a ... first solenoid for discharge electrode, 172b ... second solenoid for discharge electrode, 173
a ... swing arm, 173b ... swing arm, 17
4a ... electrode arm, 175 ... holding part, 176a
... Tension coil spring, 176b ... Tension coil spring, 177 ... Stopper, 18 ... Discharge power supply circuit,
18a: High voltage generator, 18b: Detector, 18
c: storage unit, 18d: power supply circuit control unit, 18e
... Switch, 18f ... Switch, 18g ...
Low voltage generation unit, 19: recognition device, 20: control unit, 21: wire guide, 22: wire tension unit, 22a: air spray plate, 22b: detection hole, 22c ... holes, 22d ... holding parts, 23 ...
Air supply port, 24 ... optical fiber sensor, 24a ...
.Optical fiber cable, 25 ... spool holder, 2
52: Spool fixing part, 253: Leaf spring, 25
4 ... holding part, 255 ... electrode terminal, 26 ... rotating motor, 26a ... rotating shaft.

Claims (4)

[Claims] An operation of joining a distal end portion of a coated wire, which is inserted through a bonding tool and having an insulating coating film around a core wire made of a conductive metal, to a first position. Bonding the side surface of the covered wire drawn out from the bonding tool to a second position, thereby electrically connecting the first position to the second position. Causing a discharge to occur between the tip of the covered wire wound around a spool and being unreeled from the bonding tool and a discharge electrode, and forming a ball at the tip of the covered wire by the discharge energy. And bonding to the first position by the bonding tool, and the covering wire by a required length calculated based on the first and second position information. Projecting from the tip of the bonding tool, causing a discharge to occur between the core wire of the covered wire and the discharge electrode via the covering film at a second portion to be joined in the covered wire. Removing a part of the coating film in advance by energy to form an exposed portion of a core wire, and joining the exposed portion of the coated wire fed from the bonding tool to a second position; A step of applying tension to the covering wire in a direction opposite to the predetermined bonding portion by an urging force applied in a direction substantially perpendicular to the axial direction of the covering wire from the spool to the bonding tool; A step of detecting the slack state of the covered wire by recognizing the covered wire at a portion to which the power is applied; Wire bonding method characterized by always having a step of controlling the rotation of the spool to be constant. 2. An operation of using a coated wire which is inserted through a bonding tool and has an insulating coating film applied around a core wire made of a conductive metal, and joining an end portion of the coated wire to a first position. Bonding the side surface of the covered wire drawn out from the bonding tool to a second position, thereby electrically connecting the first position to the second position. Causing a discharge to occur between the tip of the covered wire wound around a spool and being unreeled from the bonding tool and a discharge electrode, and forming a ball at the tip of the covered wire by the discharge energy. And bonding to the first position by the bonding tool, and the covering wire by a required length calculated based on the first and second position information. Projecting from the tip of the bonding tool, causing a discharge to occur between the core wire of the covered wire and the discharge electrode via the covering film at a second portion to be joined in the covered wire. Removing a part of the coating film in advance by energy to form an exposed portion of a core wire, and joining the exposed portion of the coated wire fed from the bonding tool to a second position; A gas is supplied between a pair of air blowing plates disposed on both sides of a wire path from the spool to the bonding tool, and the biasing force applied to the coating wire in a direction substantially perpendicular to the axial direction of the coating wire is used to supply the gas. A step of applying a tension in a direction opposite to a predetermined bonding portion; and a light emission provided on the air spray plate and irradiating light to the covering wire. Detecting a slack state of the coated wire by a detecting means having a material and a light receiving member for receiving reflected light from the coated wire; and rotating the spool so that the slack is always constant based on the detection result. Controlling the wire bonding method. 3. An operation of using a covered wire which is inserted through a bonding tool and has an insulating covering film applied around a core wire made of a conductive metal, and joining a tip portion of the covered wire to a first position. Bonding the side surface of the covered wire drawn out from the bonding tool to a second position, thereby electrically connecting the first position to the second position. Causing a discharge to occur between the tip of the covered wire wound around a spool and being unreeled from the bonding tool and a discharge electrode, and forming a ball at the tip of the covered wire by the discharge energy. And bonding to the first position by the bonding tool, and the covering wire by a required length calculated based on the first and second position information. Projecting from the tip of the bonding tool, causing a discharge to occur between the core wire of the covered wire and the discharge electrode via the covering film at a second portion to be joined in the covered wire. Removing a part of the coating film in advance by energy to form an exposed portion of a core wire, and joining the exposed portion of the coated wire fed from the bonding tool to a second position; Blowing a gas to the electrode surface of the discharge electrode at the time of the discharge for forming the ball on the first scheduled portion and the discharge for removing the coating film on the second scheduled portion of the covered wire. A wire bonding method characterized by the above-mentioned. 4. An operation of using a coated wire which is inserted through a bonding tool and has an insulating coating film applied around a core wire made of a conductive metal, and joining an end portion of the coated wire to a first position. Bonding the side surface of the coated wire drawn out from the bonding tool to a second position, thereby electrically connecting the first position and the second position. A ball-forming electrode for causing a discharge to occur between a tip of the covered wire fed from the bonding tool and a discharge electrode, and forming a ball at the tip of the covered wire by the discharge energy; A discharge is made via the coating film between a core wire of the coating wire and the discharge electrode at a second scheduled portion of the coating wire protruding from the tip of the tool. And an exposed portion forming electrode that removes a part of the coating film in advance by the discharge energy at that time to form an exposed portion of the core wire, and an air blowing nozzle that blows gas against each of the electrodes. A wire bonding apparatus comprising: