JPH1063301A - System for detecting abnormality in rotary machine unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a rotary machine unit abnormality detecting system where various kinds of phenomena caused during the work of a rotary machine are previously grasped, the damage of a rotor, etc., is prevented and a producing device is efficiently maintained and managed while keeping the work of the device. SOLUTION: Plural system rotary machine units 1 are provided, at least one system rotary unit 1 is made to work, remaining system rotary machine units 1 are provided as the spare one and a change-over means 3 is provided, which is provided at least more than one means for detecting the respective sensor outputs of vibration sensors 9, temp. sensors 8 and pressure sensors 10 arranged in the rotary machine units 1 during working or motor driving power and also which changes over the rotary machine unit system during working into the preliminary rotary machine unit system when one of respective detecting values becomes out of a prescribed range.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a system for detecting an abnormality in a rotating machine unit including a rotating machine used in a manufacturing factory and a drive motor.

[0002]

2. Description of the Related Art A conventional abnormality detection system for a rotating machine unit has a structure in which a vibration sensor is attached to a main body of a rotating machine, a value detected by the vibration sensor is compared with a preset value, an abnormality is detected, and a warning is issued. (Japanese Unexamined Patent Publication No. 06-173)
854).

[0003]

However, a conventional abnormality detection system for a rotary machine provided with only a vibration sensor cannot previously and accurately grasp various abnormalities occurring during the operation of the rotary machine.

For example, in the case of a rotary machine using a fluid containing a powdery substance, the powdery substance contained in the suction gas adheres and deposits on the inner wall of the suction duct or the discharge duct, so that the pressure of the duct system increases. However, there is a case where abnormal pressure is applied to the rotating machine body and mechanical damage is caused, or a deposit in the suction duct is peeled off and bites into a rotor or the like in the rotating machine, resulting in mechanical damage. According to the vibration sensor, these abnormalities could not be detected in advance. For this reason, a problem has been pointed out that the production equipment is stopped due to the sudden stop of the rotating machine due to the mechanical damage, and the product yield is reduced.

[0005] The present invention has been made based on the above circumstances. Generally, various abnormal phenomena occurring during the operation of a rotating machine are preliminarily detected to prevent damage to the rotor and the like, and to prevent a normal operation. It is an object of the present invention to provide an abnormality detection system for a rotating machine unit that can maintain the above.

[Means for Solving the Problems]

[Configuration] In order to achieve the above-described object, a first characteristic configuration of the abnormality detection system for a rotating machine unit according to the present invention is as described in claim 1 of the claims. Detection means for detecting a motor drive current or motor drive power; a vibration sensor for detecting vibration of the rotating machine unit; a temperature sensor for detecting the temperature of the rotating machine unit; and detecting a pressure in a suction / discharge system of the rotating machine. At least one or more detecting means or sensors among the pressure sensors to perform, and when any of the detected values deviates from a predetermined range, an abnormality of the operating rotating machine unit is detected. . Further, a leak sensor, a displacement sensor, or the like is used as the detecting means depending on the type of the rotating machine or the fluid to be handled. Further, the second feature configuration has a plurality of rotating machine units in addition to the first feature configuration as described in claim 2 of the claims section, and at least one rotating machine unit. A unit for operating the unit, providing a spare rotating machine unit as a spare, and providing switching means for switching the operating rotating machine unit to a spare rotating machine unit when an abnormality of the operating rotating machine unit is detected. There is a point.

[Operation and Effect] According to the first characteristic configuration, an increase in the load on the rotary machine is detected by monitoring the power or current consumption of the drive motor of the rotary machine regardless of the speed of the change. If the value deviates from the allowable range, it can be determined that there is a possibility that mechanical damage may occur to the rotating machine in operation. The detection means, a vibration sensor for detecting mechanical vibration of the rotating machine unit, a temperature sensor for detecting temperature, at least one or more detection means among pressure sensors for detecting pressure in a suction / discharge system of the rotating machine or The abnormality of the rotating machine unit is detected by a sensor. For example, in a rotary machine using a fluid containing a powdery substance, a rise in the back pressure on the discharge side of the rotary machine due to the powdery substance or the like contained in the suction gas being deposited on the inner wall of the suction duct or the discharge duct. By confirming the increase of the deposit by the above-mentioned detecting means, it is possible to prevent a sudden stop of the manufacturing apparatus using the rotating machine by detecting the deposit in advance.

When a temperature sensor or a pressure sensor is used, for example, by monitoring a gas temperature and a pressure change in the suction duct or the discharge duct, it is possible to detect that the inside of the suction duct or the discharge duct is closed. Also, a rise in back pressure on the discharge side of the rotating machine can be confirmed. In the case where a vibration sensor is used, for example, by monitoring the vibration acceleration and the vibration speed, it is possible to accurately detect damage to, for example, a rotor, a gear, a bearing, and the like. By properly selecting these detection means for detecting the motor drive current or motor drive power, temperature sensor, pressure sensor, vibration sensor, and the like, and combining them as necessary, abnormalities specific to individual rotating machines can be more accurately detected. This makes it possible to detect the occurrence of an abnormality at an early stage based on the detected values. For example, in a manufacturing apparatus using a rotating machine, sudden stoppage of the apparatus can be prevented.

According to the second characteristic configuration, when the occurrence of an abnormality in the rotating machine unit is detected at an early stage by the first characteristic configuration, the switching means is actuated so that the operating rotating machine unit can be operated. It is possible to switch to a spare rotating machine unit. In addition, a sudden stoppage of the manufacturing apparatus using the rotating machine unit can be prevented beforehand, and the rotating machine unit can be repaired or replaced while the normal operation of the apparatus is maintained. Efficient and economical maintenance management of the device can be achieved.

[0009]

Embodiments of the present invention will be described below with reference to the drawings.

As an embodiment of the abnormality monitoring system for a rotating machine unit according to the present invention, an example of a pump for handling a fluid containing a powdery substance will be described. As shown in FIG. 1, a main pump 1 and a booster pump 6, which are rotating machine units, are arranged in series, and the main pump 1 and the booster pump 6 arranged in series are arranged in two parallel systems. A suction duct 4 is connected to each suction port of the main pump 1, a first discharge duct 5 is connected to each discharge port, and the discharge duct 5 is further connected to a suction port of the booster pump 6, The second discharge duct 7 is connected to each discharge port of the booster pump 6. Now, an example will be described in which one of the two main pumps 1 and the booster pump 6 is put to practical use and the other is used as a spare.

When the abnormality detection system of the rotating machine unit is operated, the one of the two main pumps 1 which is assigned to practical use is in the operating state, and the other is in the standby state as a spare. At least one of the suction port and the discharge port of the main pump 1 in the standby state is shut off on the pump side or the duct side.

An active wattmeter 2a and a reactive wattmeter 2b as detection means 2 are interposed in a power supply line provided commonly to the motors of the two main pumps 1 to enable the active main pump 1 to operate. Monitor power and reactive power.

Further, a temperature sensor 8 is provided at each of the rotor casings 1a of the two main pumps 1 and at one of the discharge ducts 5 connected to each of the discharge ports, so that the temperature of the suction fluid and the temperature of the rotor are increased. Monitor. Also, the pressure sensor 1
By setting 0, pressure rise in the duct can be detected.

Further, a vibration sensor 9 is provided at each of the rotor casings 1a of the two main pumps 1, one at the motor-directed side 1b, and one at the gear side 1c. And monitor the vibration speed.

The active power meter 2a and the reactive power meter 2
b, when the detected value of any one of the temperature sensor 8 and the vibration sensor 9 is out of a predetermined range, the switching means 3 for switching the operating rotating machine unit system to the spare rotating machine unit system is preset. Operate according to the procedure described. For example, at the same time as detecting an abnormality in the operating main pump 1, the standby main pump 1 is operated.

The switching means 3 includes, for example, a microcomputer having an A / D converter built therein, uses the detected values as analog input signals, and executes the preset procedure as an execution program of the microcomputer. It is stored in a read-only memory built in the computer, and on / off of the power switch of the main pump 1 is sequentially controlled by an output signal as a result of executing the program.

As shown in FIG. 2, when the back pressure of the main pump 1 is forcibly changed, both the active power and the reactive power change accurately, while the main pump 1 Rotor casing 1a, motor direct connection side 1
b, It is found that the change in the vibration acceleration of each part of the gear side 1c does not follow at all, and monitoring the power or current consumption of the rotating machine drive motor detects an increase in the back pressure on the rotating machine discharge side. It turns out to be very effective.

As an experimental example, when the lubricating oil has run out,
In the case of a gear bearing breakage, the vibration sensor mounted on the rotor casing was able to detect abnormalities significantly.
In order to detect the phenomenon of a gradual rise in back pressure, a temperature sensor attached to an exhaust pipe or a rotor casing can also detect a phenomenon other than the power sensor. From the above, the abnormality of the rotating machine unit may be detected when the detection value of one or more of the power sensor, the vibration sensor, and the temperature sensor is out of the predetermined range.

A major factor of the back pressure rise on the discharge side of the rotary machine is considered to be that powdery substances and the like contained in the suction gas adhere to and accumulate on the inner wall of the discharge duct. In the case where the powdery substance is deposited on the inner wall, the powdery substance or the like is also considered to be deposited on the inner wall of the suction duct. It is possible to accurately grasp the situation in which the substance or the like adheres and accumulates on the inner wall of the suction duct or the discharge duct. Further, by providing the pressure sensor, the state of adhesion and deposition can be grasped by monitoring the pressure rise.

(Another Embodiment) Another embodiment will be described below. <1> The abnormality detection system for a rotating machine unit of the present invention is not limited to the above-described embodiment. For example, detection means and various sensors provided in the main pump 1 also for the booster pump 6 shown in FIG. It is also a preferable embodiment to provide an abnormality detection in the same manner. Further, as shown in FIG. 3, one booster pump 6 is provided for a plurality of main pumps 1 to monitor the abnormality of each main pump 1, or as shown in FIG. Depending on the use of the abnormality detection system, it is not necessary to provide the booster pump 6, and a configuration in which one rotating machine 1 is provided in each rotating machine unit system is also conceivable. Further, the number of systems of the rotating machine unit can be any number of two or more. <2> The detection means 2 shown in FIG. 1 may be provided for each system, and the switching means 3 shown in FIG. 1 may be manually operated or automatically controlled. <3> Incidentally, as the rotating machine unit used in the abnormality detecting system of the rotating machine unit of the present invention, for example, a vacuum pump used in a semiconductor factory or the like, various kinds of oil rotary vacuum pumps, a reciprocating vacuum pump, a rotary type A vacuum pump or the like is applicable. <4> Further, as shown in FIG. 5, for example, in the embodiment of the abnormality detection system of the rotating machine unit shown in FIG. After receiving and amplifying at 16, the data can be transferred to the personal computer 17, and the trend can be managed on the personal computer 17. In this case, the temperature sensor output signal 11, the vibration sensor output signal 12, the pressure sensor output signal 13, and the power sensor output signal 14 are received and amplified by the terminal control unit 15 in the abnormality monitoring system 18, and the receiving unit of the signal receiving unit 16 The data is transferred to the personal computer 17 via the communication unit 16b. <5> In the above-described embodiment, a configuration in which both the active power meter 2a and the reactive power meter 2b are provided as the detection unit 2 has been described. However, only one of the power meters may be used. The detecting means 2 may be a means for detecting a current other than the electric power. Further, the temperature sensor 8, the vibration sensor 9, and the pressure sensor 10 may not be provided, and only the detection unit 2 may be provided.

[Brief description of the drawings]

FIG. 1 is a system configuration diagram showing an embodiment of the present invention.

FIG. 2 is a characteristic diagram showing experimental results of follow-up characteristics of active power and reactive power with respect to a change in back pressure on the discharge port side of the rotating machine, and experimental results of follow-up characteristics of vibration acceleration of a rotor casing, a motor directly connected side, and a gear side of the rotating machine.

FIG. 3 is a system configuration diagram showing another embodiment of the present invention.

FIG. 4 is a system configuration diagram showing another embodiment of the present invention.

FIG. 5 is a system configuration diagram showing another embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Rotating machine unit 2 Detecting means 3 Switching means 4 Suction duct 5 First discharge duct 6 Booster pump 7 Second discharge duct 8 Temperature sensor 9 Vibration sensor 10 Pressure sensor

Claims (2)

[Claims] 1. A rotating machine unit (1) comprising a rotating machine and a driving motor, etc., wherein a detecting means (2) for detecting a motor driving current or a motor driving power of the rotating machine unit (1); A vibration sensor (9) for detecting mechanical vibration of the unit (1), a temperature sensor (8) for detecting the temperature of the rotating machine unit (1), and a pressure for detecting a pressure in a suction / discharge system of the rotating machine Sensor (1
0) wherein at least one of the detecting means or the sensor is provided, and when any of the detected values is out of a predetermined range, the rotating machine unit for detecting an abnormality of the rotating mechanical system in operation. Anomaly detection system. 2. A rotating machine unit (1) having a plurality of systems, at least one rotating machine unit (1) is operated, and the remaining rotating machine unit (1) is provided as a spare. The rotating device according to claim 1, further comprising a switching unit (3) for switching the operating rotating machine unit (1) to a spare rotating machine unit (1) when an abnormality of the rotating machine unit (1) is detected. Machine unit abnormality detection system.