JPH1058167A - Scanning laser marking device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To perform simply, quickly and accurately the positioning of an object to be machined in a marking device. SOLUTION: A controller, entering a 'marking area projection' mode, first identifies a selected start-up number, and then retrieves plotting data of the marking area corresponding to this start-up number. Next, with an He-Ne laser actuated, a visible (red) guide beam is turned on. Then, a control signal corresponding to the retrieved plotting data and conditions data is transmitted to a scanning head, with the beam spot of the guide beam scanned once on the surface of an object to be machined, and with the marking area plotted that is related to the pattern of this start-up number. This scanning operation is continuously repeated until a prescribed command is inputted. Thus, the plotting of the marking area is repeated continuously at high speed; also, with a human visual after-image effect added, a standing projection image of the marking area is formed on the surface of the object to be machined.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0010]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scanning type laser marking device.

[0020]

2. Description of the Related Art A scanning type laser marking method irradiates a workpiece with laser light focused at a high density,
The laser light is shaken by a scan mirror to scan a laser spot on the surface of the workpiece, and while evaporating or discoloring a minute portion of the surface of the workpiece hit by the beam spot with laser energy, characters, This is a technique for marking (engraving) by drawing a desired pattern such as a figure or a symbol.

In general, a scanning type laser marking apparatus includes a laser oscillating section for oscillating and outputting a laser beam, and a scanning head for condensing and irradiating a laser beam from the laser oscillating section toward a workpiece while scanning (scanning) the laser beam. And a control unit that controls each operation (laser oscillation operation, scanning operation) of the laser oscillation unit and the scanning head unit.

The scanning head is fixedly arranged with its laser emission port facing, for example, a marking processing position on a work table. Scanning coordinates on software are set on the work table as viewed from the apparatus side. The workpiece is set on the workbench with the surface to be marked (marking surface) facing the laser emission port side of the scanning head. By changing the position and orientation of the workpiece on the worktable, the marking position (pattern forming position) on the workpiece can be adjusted.

[0050]

In a laser marking apparatus of this type, a pattern to be marked on a workpiece is set at an arbitrary position on scanning coordinates and has an arbitrary spread and directionality. It is necessary to position the workpiece in the Y (horizontal, vertical) direction and the θ (rotation) direction.

Conventionally, in order to adjust or determine a marking position on a workpiece, a desired pattern is actually marked on a sample of the workpiece, and a worker (working position) and a desired marking position are marked. An error with respect to the marking position is estimated and the position of the workpiece is adjusted according to the estimated error.

However, in the conventional method of performing the positioning of the workpiece by trial and error while performing the marking process, the laser oscillator, the workpiece (sample), and the like are wastefully consumed or consumed. However, there is a problem that much time and labor are required for alignment and productivity is low.

The present invention has been made in view of such a conventional problem, and an object of the present invention is to provide a scanning type laser marking apparatus capable of simply, quickly and accurately adjusting a marking position on a workpiece. And

[0090]

In order to achieve the above object, according to the first aspect of the present invention, a laser beam for marking from a laser oscillating section is received via a scan mirror. By irradiating the workpiece with the scanning mirror in accordance with a scanning control signal from a control unit, the scanning mirror is swung to scan a beam spot of the laser light on the surface of the workpiece, and to display characters and symbols. Alternatively, in a scanning laser marking apparatus for marking a desired pattern composed of a figure or the like, a marking area diagram setting means for setting a marking area diagram that graphically represents a marking area of the pattern, and a guide light prior to the marking step. Irradiating the workpiece with visibility guide light from the generating means through the scan mirror, The scanning mirror is swung by the scanning means in response to a scanning control signal from the scanner, and the beam spot of the guide light is continuously and repeatedly scanned on the surface of the workpiece to project the marking area diagram. Marking area diagram projection means for forming an image.

The invention according to claim 2 is the same as the invention according to claim 1.
3. The apparatus according to claim 1, wherein a scanning speed for forming a projection image of the marking area diagram is higher than a scanning speed for the marking step.

According to a third aspect of the present invention, a workpiece is irradiated with a laser beam for marking from a laser oscillating unit via a scan mirror, and scanning means is provided in response to a scanning control signal from a control unit. In the scanning laser marking device to swing the scan mirror, scan the beam spot of the laser light on the surface of the workpiece, to mark a desired pattern consisting of characters, symbols or figures, Marking area diagram setting means for setting a marking area diagram that graphically represents the marking area of the pattern; a monitor camera for imaging the workpiece within a predetermined area; and a display means having a screen capable of displaying an image Obtained by the monitor camera on the screen of the display means prior to the marking step. Nita simultaneously displaying an image, characterized by comprising a composite display control means for displaying an image of the marking area diagram are set by the marking area view setting means superimposed on the monitor image.

According to a fourth aspect of the present invention, a workpiece is irradiated with a laser beam for marking from a laser oscillating unit via a scan mirror, and scanning means is provided in response to a scanning control signal from a control unit. In the scanning laser marking device to swing the scan mirror, scan the beam spot of the laser light on the surface of the workpiece, to mark a desired pattern consisting of characters, symbols or figures, A monitor camera for capturing an image of the workpiece within a predetermined area, display means having a screen capable of displaying an image, and a monitor obtained on the screen of the display means prior to the marking step. At the same time as displaying the monitor image,
Combined display control means for displaying the image of the pattern superimposed on the monitor image.

[0130]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the accompanying drawings.

FIG. 1 shows the appearance of a scanning YAG laser marking apparatus according to this embodiment. This YAG
The laser marking device has a control power supply unit 10, a laser oscillation unit 12, and a scanning head 20.

In the control power supply unit 10, a display 13 of a display section is provided in an upper room, a keyboard and a control board are provided in an intermediate room (behind the front door 14), and a lower room (behind the front door 16). , A laser power supply circuit, a laser cooling device, and the like are arranged. The scanning control signal generated by the control unit in the intermediate room is transmitted to the scanning head 20 via a predetermined signal line (not shown). The scanning head 20 is attached to the laser emission port of the laser oscillation unit 12, and the work table 18 is provided directly below the head 20.
Is arranged. On the worktable 18, the workpiece W
Is marked. In addition, a monitor camera 48 for capturing an image of the workpiece W on the worktable 18 is disposed near the scanning head 20 via a suitable support member.

FIG. 2 shows a configuration of a main part in the control power supply unit 10 and the laser oscillation unit 12.

The laser oscillation unit 12 includes a YAG laser beam LM for oscillating and outputting a YAG laser beam LM for marking.
In addition to the laser oscillator 22, a He-Ne laser 24 for generating visibility, for example, red guide light LG is also provided. The YAG laser light LM oscillated and output from the YAG laser oscillator 22 is first bent at a right angle by a mirror 26, then bent at a right angle by a mirror 28, and then travels straight to the scanning head 20.
The guide light LG generated by the He-Ne laser 24 is:
First, the optical path is bent at a right angle by the mirror 30, and then the mirror 3
After the optical path is bent at a right angle in 2, the light passes through the mirror 28 from the back side, travels straight as it is, and is sent to the scanning head 20.

In the control power supply unit 10, a YAG laser power supply section 34, a He-Ne laser power supply section 36, a control section 3
8, display unit 40, input unit 42, interface circuit 44
Etc. are provided. The YAG laser power supply unit 34 supplies power to laser excitation means (for example, an excitation lamp) in the YAG laser oscillator 22 under the control of the control unit 38. H
The e-Ne laser power supply unit 36 supplies power to laser excitation means (for example, a laser tube) in the He-Ne laser 24 under the control of the control unit 38.

The display unit 40 displays an image on the display 13 according to the image data and the display control from the control unit 38. The input unit 42 includes input devices such as a keyboard, a mouse, and an image scanner. The interface circuit 44 is used to exchange data, control signals, and the like with an external device (not shown).

The control unit 38 comprises a microcomputer, performs required data processing according to predetermined software stored in a built-in memory, and controls each unit in the apparatus. For example, the control unit 38 supplies a scanning drive circuit in the head 20 with a scanning control signal for controlling a scanning operation in the scanning head 20 as described later. Further, the YAG laser oscillator 22 has a built-in Q switch for obtaining a pulse laser beam having an extremely high peak output (peak value).
The control unit 38 controls the Q switch via a control line (not shown). Further, the control unit 38 includes a monitor camera 48
It also has an image memory for temporarily storing a monitor image (moving image) from the camera, for example, a frame memory.

FIG. 3 shows the configuration of the scanning mechanism in the scanning head 20. This scanning mechanism includes an X-axis scan mirror 52 and a Y-axis scan mirror 54 attached to rotating axes 52a and 54a orthogonal to each other, and an X-axis galvanometer 56 for rotating and oscillating (swinging) both mirrors 52 and 54, respectively. And a Y-axis galvanometer 58.

The laser light LM and / or the guide light LG from the laser oscillation unit 12 that has entered the scanning head 20 first enters the X-axis scan mirror 52, where it is totally reflected and then Y-axis. The light enters the scan mirror 54, is totally reflected by the mirror 54, passes through the fθ lens 60, and is condensed and irradiated on the marking processing surface of the workpiece W. The position of the beam spot SP on the marking surface is determined by the deflection angle of the X-axis scan mirror 52 in the X direction, and is determined by the deflection angle of the Y-axis scan mirror 54 in the Y direction.

The X-axis scan mirror 52 oscillates (oscillates) in the directions of arrows A and A 'when the X-axis galvanometer 56 is driven. On the other hand, the Y-axis scan mirror 54 oscillates (oscillates) in the directions of arrows B and B ′ by driving the Y-axis galvanometer 58.

The X-axis galvanometer 56 contains a movable iron piece (rotor) coupled to the X-axis scan mirror 52, a control spring connected to the movable iron piece, and a drive coil attached to the stator. Have been. A driving current corresponding to an X-direction scanning control signal is supplied from an X-axis galvanometer driving circuit (not shown) to the driving coil in the X-axis galvanometer 56 via an electric cable 62, so that the movable iron piece (rotor) ) Swings at an angle specified by the X-direction scanning control signal integrally with the X-axis scan mirror 52 against the control spring.

The Y-axis galvanometer 58 has the same configuration, and a drive current corresponding to a Y-direction scanning control signal is supplied from a Y-axis galvanometer drive circuit (not shown) via the electric cable 64 to the Y-axis galvanometer 58. , The movable iron piece (rotor) in the Y-axis galvanometer 58 swings at an angle designated by the Y-direction scanning control signal together with the Y-axis scan mirror 54.

Therefore, each time the laser light LM and / or the guide light LG from the laser oscillation unit 12 enters the scanning head 20 at a predetermined timing, the two galvanometers 56 and 58 are synchronized with the scanning in the X direction. By oscillating the X-axis scan mirror 52 and the Y-axis scan mirror 54 at predetermined angles in response to the Y-direction scanning control signal, the laser light LM and / or the guide light LG on the marking surface of the workpiece W.
Is scanned.

FIG. 4 shows an example of a setting screen displayed on the display 13 of the control power supply unit 10. In the left area of the screen, the current mode (the illustrated mode is the “start standby” mode) is displayed at the top. Below that,
A start No. for designating the marking operation. Is displayed, and the activation No. is displayed below it. , The condition data defining the marking operation, ie, Q switch frequency, marking speed, lamp current, aperture No. The setting input values of various condition data such as are listed and displayed. In the right area of the screen, the start number is displayed. Are displayed on the XY coordinates in accordance with the drawing data that defines the pattern of. In the right area of the screen, a monitor image obtained by the monitor camera 48 can also be displayed.

[0280] The ROM in the control section 38 stores the start No. Software for a “setting input” mode for setting and inputting drawing data and various condition data for defining a desired pattern in units of unit; Software for a “marking execution” mode for controlling the execution of the marking operation in units is stored. In the RAM or the external storage device in the control unit 38, each start No. Drawing data, condition data, and the like set and input for each are stored in predetermined storage locations in a correspondence relationship as shown in FIG.

In this embodiment, the software and the set values for executing the “marking area diagram setting” mode, the “marking area diagram projection” mode, the “composite display” mode, etc., which will be described later, are also controlled by the control unit 38. RO within
M and stored in RAM.

In this laser marking apparatus, in addition to the “start standby” mode as shown in FIG. 4, a “setting input” mode, a “marking execution” mode, and a “marking area diagram setting” mode, a “marking area” mode according to the present embodiment. There are a "graphic projection" mode and a "synthesized image display" mode. Each mode is switched by inputting a predetermined command from a keyboard or a mouse of the input unit 42 or the like.

FIG. 6 is a flowchart showing the processing operation of the control unit 38 in the “marking area diagram setting” mode.

For example, in the example shown in FIG. 4, when entering the “marking area diagram setting” mode, the control unit 38 firstly activates the start No. currently displayed on the screen of the display 13.
3 is identified (step A1). 3
Is retrieved from the memory for drawing data Dm3 (image data of "ABCD") (step A2). At this time, position (coordinate) data defining the drawing position is also searched.

Next, the control unit 38 controls the retrieved image data D
Based on m3 and position data, the pattern ("ABC
D ") is determined (step A)
3).

Next, as shown in FIG. 7, the control unit 38 sets the mode or type (a), (b), (c), (d) (for example, 4 (Step A4), and a marking area diagram ES that graphically represents a marking area in the designated graphic mode is displayed on the screen of the display 13 in accordance with the pattern ("ABCD"). ) Image M
It is displayed together with S (step A5). Therefore, the start No. When the user selects the graphic mode (a) in the example of 3, for example, an image as shown in FIG. 10 is displayed in the right area of the display screen 13. Here, on the display screen, the marking area diagram ES and the pattern M
S is preferably displayed in a different color so as to be clearly distinguished from S.

[0350] The user (operator) can check the display screen 1
If the user does not like the marking area diagram ES of the graphic mode (a) displayed in 3, it is possible to change to another graphic mode, for example, the marking area diagram ES of (d) (steps A 6 → A 7 → A 4 →). A5) If a favorite marking area diagram ES is displayed on the display screen, a "confirmation" command may be input there (step A6). Then, the selected marking area diagram is set and registered (step A8). In this embodiment, the drawing data (image data and position data) representing the registered marking area diagram is, for example, in the format of FIG. (No. 3) and may be stored in the memory.

The marking area diagram can be any pattern as long as it is a graphic representation of the area where the pattern is to be marked. Usually, however, as shown in FIG. It is preferable to use a simple figure showing a frame, for example, a quadrilateral. Although the pattern (“ABCD”) in the illustrated example is a relatively simple single character string, the marking area diagram of a plurality of character strings, a complicated graphic, or a graphic having a solid portion is still the same as the entire pattern. It is set as a simple figure showing the outline or outline.

As will be described later, in the “projection of marking area diagram” mode of this embodiment, a marking area diagram is projected by repeatedly scanning visible guide light LC on the surface of the workpiece W. At this time, since the design of the marking area diagram is simple, one scanning time (period) can be shortened, and a projected image of the marking area diagram can be clearly formed.

FIG. 9 is a flowchart showing the processing operation of the control unit 38 in the “marking area diagram projection” mode.

[0390] For example, the above-mentioned start No. In the example 3, when the “marking area diagram projection” mode is entered, the control unit 38
Is the start No. currently displayed on the screen of the display 13. 3 is identified (step B1). The drawing data of the marking area diagram ES corresponding to No. 3 is retrieved from the memory (step B2). However, for the condition data such as the scanning speed, the set value for the “marking area diagram projection” mode is searched (step B).
3). Note that the scanning speed for the “marking area diagram projection” mode is generally set to a value higher than the setting value for the marking process.

Next, the control section 38 keeps the YAG laser oscillator 22 in the off state while keeping the He-Ne laser power supply section 3
The He-Ne laser 24 is operated through 6 to turn on the guide light LG (step B4). Then, a scanning control signal corresponding to the drawing data and the condition data of the searched marking area diagram ES is sent to the scanning head 20, and the beam spot SP of the guide light LG is scanned once on the surface of the workpiece W. , The start No. on the surface of the workpiece W. Pattern 3 ("ABCD")
Is drawn (step B5).
). This scanning operation is continuously repeated until a predetermined command is input (step B5 → B6 → B
7 → B5).

In this repetitive scanning, the beam spot SP returns from the end point of the pattern to the start point for some time. By increasing the limit speed of the scan mirror, the return time of the beam spot SP can be reduced. In addition, since the marking area diagram ES is generally much simpler than the pattern, a single scanning time (period) itself can be very short.

As described above, the visible (red) guide light L
The drawing of the marking area diagram ES by G is continuously repeated at a high speed, and the visual afterimage effect of a human being is added, so that the marking area diagram ES is displayed on the surface of the workpiece W. A stationary projection image is formed.

Therefore, the operator only has to adjust the position of the workpiece W such that the projected image of the marking area diagram ES coincides with a desired marking position (location) on the workpiece W.

For example, as shown in FIG. 10, when the workpiece W is shifted from the projected image of the marking area diagram ES in the graphic mode (a) (FIG. 10A), By rotating W in the θ direction or moving it in parallel in the X and Y directions, the marking area diagram ES can be adjusted to a desired marking position on the workpiece W (FIG. 10B). At this time, since the projected images of the marking area diagram ES are fixed at the same position, the position of the workpiece W can be quickly and accurately adjusted based on the projected images.

After positioning the workpiece W in the “marking area diagram projection” mode as described above, the operator may input a predetermined command, for example, a command in the “marking execution” mode. Then, the control unit 38
Stops the scanning control signal (step B8), turns off the guide light LC (step B9), terminates the "marking area diagram projection" mode, and then enters the "marking execution" mode.

FIG. 11 is a flowchart showing the processing operation of the control unit 38 in the “marking execution” mode.

[0470] For example, the above-mentioned activation No. When entering the “marking execution” mode in the example of the example No. 3, the control unit 38 firstly activates the start No. currently displayed on the screen of the display 13.
3 (step C1), and then the activation No. 3 is identified. 3
Is searched from the memory for the drawing data Dm3 (drawing data of "ABCD") and the condition data (Q switch frequency, marking speed, etc.) corresponding to (step C2).

Next, the control unit 38 controls the YAG laser oscillator 22 and the He-Ne laser 24 through the YAG laser power supply unit 34 and the He-Ne laser power supply unit 36, respectively.
To turn on the YAG laser light LM and the guide light LG, respectively (steps C3 and C4). And
A scanning control signal corresponding to the retrieved drawing data and condition data is sent to the scanning head 20, and the beam spot SP of the YAG laser light LM and the guide light LG is scanned once on the surface of the workpiece W,
This activation No. is displayed on the surface of the workpiece W. A pattern MS ("ABCD" character) according to (No. 3) is drawn (step C5).

By this scanning operation, the work W
On the surface of the workpiece, a minute portion of the surface of the workpiece hit by the beam spot of the YAG laser beam LM is instantaneously evaporated or discolored by the laser energy, and as a result, the pattern
S ("ABCD") is marked (engraved). Further, since the beam spot of the visible light (red) guide light LG draws the same pattern as the beam spot of the invisible light (infrared light) YAG laser light LM, the trajectory of the marking can be visually confirmed.

A state in which the workpiece W on the worktable 18 is marked is imaged by the monitor camera 48.
The monitor image (moving image) can be displayed on the screen of the display 13. In particular, when the size of the workpiece W or the size of the marking pattern is small, it is more convenient to confirm the state of the marking process through a monitor image of a large angle of view obtained from the monitor camera 48 than by visual observation. Also, when a light-shielding cover is provided between the scanning head 20 and the workpiece W for the safety of the worker's eyes, etc., it is difficult to directly view the workpiece W. It is convenient to do.

Normally, the marking process is completed by one scanning. Therefore, after one scanning, the scanning control signal is stopped there (step C6), and the YAG laser light LM and the guide light LG are turned off (step C7). Note that scanning for marking processing can be repeated a plurality of times as necessary.

By performing the scanning with the YAG laser beam LM in the “marking execution” mode as described above, the “marking area diagram projection” immediately before, for example, as shown in FIG. A desired pattern ("ABCD") is marked (engraved) at the position aligned in the mode.

The guide light generating means (He-Ne laser 24) is provided for the purpose of visually confirming the trajectory of the marking in the “marking execution” mode by a human (operator).
It is provided conventionally. In the apparatus according to the present embodiment, the guide light generating means (He-Ne laser 24) is also used in the "marking area diagram projection" mode so as to obtain a pattern projection image by the guide light LG. Therefore, for the "Marking area map projection" mode,
It is not necessary to newly provide a guide light generating means.

Next, the “composite image display” mode will be described with reference to FIGS. This “composite image display” mode can be used instead of the “marking area diagram projection” mode described above. That is, it may be used when positioning the workpiece W on the worktable 18 prior to the marking process in the “marking execution” mode. In particular, when the size of the workpiece W or the size of the marking pattern is small, or when a light-shielding cover is attached near the scanning head 20, the "composite image display" mode is selected together with the use of the monitor camera 48. Good.

In the “composite image display” mode of this embodiment,
There are two types of sub-modes: a “first composite image display” mode in which a marking area diagram is displayed on a monitor image obtained by the monitor camera 48, and a “first composite image display” mode in which a pattern to be marked is displayed on the monitor image. 2 combined image display mode.

FIG. 13 is a flowchart showing the processing operation of the control unit 38 in the “first combined image display” mode.

[0570] When entering the "first combined image display" mode, the control unit 38 determines that the selected start No. Is identified (step D1), and the activation No. The drawing data of the marking area diagram set in advance in the "marking area diagram setting" mode is searched for the pattern (step D2).
). Next, the monitor image from the monitor camera 48 is loaded into the frame memory (step D3), and the drawing data of the searched marking area diagram is written into the frame memory, so that the marking area diagram is superimposed on the monitor image in the frame memory (step D3). Step D4).
Then, the composite image is displayed on the screen of the display 13 (step D5). This composite image display is continued until a predetermined command is input (steps D5 → D6 → D
7 → D3 → D4 → D5).

As a result, as shown in FIG. 14, a monitor image showing the work W on the worktable 18 is displayed on the screen of the display 13 and, at the same time, the start No. is superimposed on the monitor image. . The marking area diagram ES for the pattern (“ABCD”) is also displayed. Here, the worker may appropriately move the workpiece W on the worktable 18 in the X, Y, and θ directions while viewing the composite image displayed on the display 13. Then, the work W moves on the screen of the display 13 as the work W moves on the worktable 18. However, the marking area diagram ES remains fixed (still) at the display position corresponding to the drawing position.

[0590] Therefore, as shown in FIG. 15, the worker operates the work table 18 so that the marking area diagram ES on the screen of the display 13 matches the desired marking position (location) on the workpiece W in the monitor image. The position of the workpiece W may be adjusted. Similarly to the above-described “marking area diagram projection” mode, in the “first combined image display” mode, the position of the workpiece W can be quickly and accurately adjusted based on the stationary marking area diagram ES. Can be.

FIG. 16 is a flowchart showing the processing operation of the control unit 38 in the “second synthesized image display” mode. In the “second synthesized image display” mode, instead of the marking area diagram ES, as shown in FIG.
(“ABCDEF”) is displayed on the screen of the display 13. According to the “second composite image display” mode, the pattern MS (“ABCDE”) is displayed on the display screen.
F ″) may be adjusted so that the position of the workpiece W on the worktable 18 is aligned with the desired marking position on the workpiece W. The “second synthesized image display” is a marking area diagram. It can be executed without setting.

FIG. 18 shows an example of the screen of the display 13 in the “third combined image display” mode according to a modification. In the “third composite image display” mode, a marking area diagram E
Both S and pattern MS are displayed in a superimposed manner.

In the above embodiment, the marking area map is set in advance in the “marking area map setting” mode and stored in the memory, and the “marking area map projection” mode and the “first
In the "composite image display" mode or the "second composite image display" mode. However, even if the “marking area diagram setting” mode is omitted and the “marking area diagram projection” mode or the like is required (as needed), the marking area diagram is set (created) from the image data and position data of the selected pattern. Good.

In the above embodiment, the workpiece W was moved in order to adjust the marking position on the workpiece W. However, the scanning head 20 may be moved.

In the YAG laser marking device according to the above-described embodiment, the laser oscillation unit for marking is constituted by a YAG laser oscillator, and the guide light generating means is constituted by a He-Ne laser. However, these are only examples, and in the present invention, any laser oscillation unit for marking and any guide light generating means can be used.

[0650]

As described above, according to the present invention,
Prior to the laser marking step, the beam spot of the visible guide light is continuously and repeatedly scanned on the surface of the workpiece to form a projected image of a marking area diagram that graphically represents the area of the marking pattern. Thus, the adjustment of the marking position on the workpiece can be performed easily, quickly and accurately.

Also, according to the present invention, prior to the laser marking step, the marking area diagram is displayed on the screen of the display means so as to be superimposed on the monitor image of the workpiece. Position adjustment can be performed simply, quickly and accurately.

According to the present invention, prior to the laser marking step, the pattern is displayed on the screen of the display means so as to overlap the monitor image of the workpiece.
The adjustment of the marking position on the workpiece can be performed simply, quickly and accurately.

[Brief description of the drawings]

FIG. 1 shows a scanning YAG according to an embodiment of the present invention.
It is a perspective view showing the appearance of a laser marking device.

FIG. 2 is a block diagram showing a configuration of a main part in a control power supply unit and a laser oscillation unit in the apparatus of the embodiment.

FIG. 3 is a perspective view showing a configuration example of a scanning mechanism in a scanning head in the apparatus of the embodiment.

FIG. 4 is a diagram illustrating an example of a setting screen displayed on a display of a control power supply unit in the apparatus according to the embodiment.

FIG. 5 is a diagram illustrating a format example of data management of setting values in the apparatus according to the embodiment.

FIG. 6 is a flowchart illustrating a processing operation of a control unit for a “marking area diagram setting” mode in the apparatus according to the embodiment.

FIG. 7 is a diagram illustrating an example of a mode (type) of a marking area diagram prepared in a “marking area diagram setting” mode according to the embodiment.

FIG. 8 is a diagram illustrating an example of a marking area diagram displayed on a display screen in a “marking region diagram setting” mode of the embodiment.

FIG. 9 is a flowchart illustrating a processing operation of a control unit for a “marking area diagram projection” mode of the embodiment.

FIG. 10 is a diagram showing an example of positioning of a workpiece in a “marking area diagram projection” mode of the embodiment.

FIG. 11 is a flowchart illustrating a processing operation of a control unit for a “marking execution” mode according to the embodiment.

FIG. 12 is a diagram illustrating an example of a pattern marked on a workpiece in a “marking execution” mode according to the embodiment.

FIG. 13 is a flowchart illustrating a processing operation of a control unit for a “first combined image display” mode of the embodiment.

FIG. 14 is a composite image (before alignment) displayed on the display screen in the “first composite image display” mode of the embodiment.
It is a figure showing an example of.

FIG. 15 is a composite image (after alignment) displayed on the display screen in the “first composite image display” mode of the embodiment.
It is a figure showing an example of.

FIG. 16 is a flowchart illustrating a processing operation of a control unit for a “second synthesized image display” mode of the embodiment.

FIG. 17 is a composite image (after alignment) displayed on the display screen in the “second composite image display” mode of the embodiment.
It is a figure showing an example of.

FIG. 18 is a diagram illustrating an example of a composite image (after alignment) displayed on a display screen in a “third composite image display” mode according to a modification of the embodiment.

[Explanation of symbols]

 13 Display 20 Scanning Head 22 YAG Laser Oscillator 24 He-Ne Laser 38 Control Unit 40 Display Unit 42 Input Unit 48 Monitor Camera W Workpiece

Claims (4)

[Claims] An object to be processed is irradiated with a laser beam for marking from a laser oscillation unit via a scan mirror, and the scanning mirror is swung by scanning means in response to a scanning control signal from a control unit. A scanning type laser marking apparatus that scans a beam spot of the laser beam on a surface of the workpiece to mark a desired pattern including a character, a symbol, a graphic, and the like. Marking area diagram setting means for setting a marking area diagram to be represented, and prior to the marking step, irradiating the workpiece with visibility guide light from the guide light generating means via the scan mirror, The scanning unit performs the scan in response to a scanning control signal from the control unit. Marking area map projection means for continuously and repeatedly scanning a beam spot of the guide light on the surface of the workpiece by oscillating a mirror to form a projection image of the marking area map. Scanning type laser marking device. 2. The scanning type laser marking apparatus according to claim 1, wherein a scanning speed for forming a projection image of the marking area diagram is higher than a scanning speed for the marking step. 3. A workpiece is irradiated with laser light for marking from a laser oscillation unit via a scan mirror, and the scanning mirror is swung by scanning means in response to a scanning control signal from a control unit. A scanning type laser marking apparatus that scans a beam spot of the laser beam on the surface of the workpiece to mark a desired pattern including a character, a symbol, a graphic, and the like. Marking area diagram setting means for setting a marking area diagram to be represented; a monitor camera for imaging the workpiece; a display means having a screen capable of displaying an image; and a screen of the display means prior to the marking step. Displaying the monitor image obtained from the monitor camera, Scanning type laser marking device, characterized in that it comprises a monitor display control means for displaying an image of the marking area diagram are set by the marking area view setting means superimposed on the image. 4. A workpiece is irradiated with a laser beam for marking from a laser oscillation unit via a scan mirror, and the scanning mirror is swung by scanning means in response to a scanning control signal from a control unit. A scanning type laser marking apparatus that scans a beam spot of the laser light on the surface of the workpiece to mark a desired pattern including a character, a symbol, a figure, and the like, for imaging the workpiece. A monitor camera, display means having a screen capable of displaying an image, and prior to the marking step, displaying a monitor image obtained from the monitor camera on the screen of the display means, and simultaneously superimposing the monitor image on the monitor image. And a monitor display control means for displaying an image of the pattern. Laser marking device.