JPH10316776A - Plastic film roll used for vacuum treatment - Google Patents
Plastic film roll used for vacuum treatmentInfo
- Publication number
- JPH10316776A JPH10316776A JP9147198A JP14719897A JPH10316776A JP H10316776 A JPH10316776 A JP H10316776A JP 9147198 A JP9147198 A JP 9147198A JP 14719897 A JP14719897 A JP 14719897A JP H10316776 A JPH10316776 A JP H10316776A
- Authority
- JP
- Japan
- Prior art keywords
- film
- plastic film
- roll
- winding
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2701/00—Handled material; Storage means
- B65H2701/30—Handled filamentary material
- B65H2701/37—Tapes
Landscapes
- Winding Of Webs (AREA)
- Storage Of Web-Like Or Filamentary Materials (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、プラスチックフイ
ルムを巻芯を用いてロール状に巻いた真空処理に供され
るプラスチックフイルム巻層体に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plastic film wound body which is subjected to a vacuum treatment in which a plastic film is wound into a roll using a core.
【0002】[0002]
【従来の技術】プラスチックフイルムはその優れた機械
的、熱的、電気的性質等のために、磁気記録用途、電気
絶縁用途、印刷・グラフィック用途、写真用途、コンデ
ンサ用途を始め種々の用途で広く用いられている。とり
わけプラスチックフイルムの表面を真空下で磁性材や導
電性のある金属薄膜で覆い、磁気記録用途やコンデンサ
用途に用いられている。この加工工程においては、蒸着
やスパッタと呼ばれる加工法が採られるが、その工程で
は、プラスチックフイルムの連続体を巻芯を用いてロー
ル状に巻いたプラスチックフイルム巻層体を真空に減圧
したチャンバー内で巻き戻しながら、フイルムの片面を
ロールで冷却し、反対面側に前記材料を蒸着やスパッタ
法などで処理する。この真空中で巻き戻すときに、プラ
スチックフイルム巻層体の中に巻き込まれた空気がチャ
ンバー内圧力との差圧により膨張し、プラスチックフイ
ルム巻層体の上でフイルムが横方向にずれることがあ
る。このようなずれは真空チャンバー内を走行中のプラ
スチックフイルムに蛇行を引き起こし、蒸着後の巻取り
において端面が不揃いになったり、蒸着中にマージン位
置がずれたりしたりする。2. Description of the Related Art Plastic films are widely used in various applications including magnetic recording applications, electrical insulation applications, printing / graphic applications, photographic applications, and capacitor applications because of their excellent mechanical, thermal, and electrical properties. Used. Particularly, the surface of a plastic film is covered with a magnetic material or a conductive metal thin film under vacuum, and is used for magnetic recording and capacitor applications. In this processing step, a processing method called vapor deposition or sputtering is employed.In this step, a plastic film winding body obtained by winding a continuous body of plastic film into a roll using a core is depressurized in a chamber. While the film is being rewound, one side of the film is cooled by a roll, and the opposite side is treated with the material by vapor deposition or sputtering. When the film is unwound in the vacuum, the air entrapped in the plastic film roll expands due to the pressure difference from the pressure in the chamber, and the film may be shifted laterally on the plastic film roll. . Such a shift causes meandering of the plastic film running in the vacuum chamber, resulting in uneven end faces during winding after vapor deposition or a shift in a margin position during vapor deposition.
【0003】[0003]
【発明が解決しようとする課題】本発明の課題は、前述
の問題点に着目し、真空処理に供されるプラスチックフ
イルム巻層体に良好な巻き戻し性を与えるプラスチック
フイルム巻層体を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a plastic film roll which gives a good rewinding property to a plastic film roll subjected to a vacuum treatment, focusing on the above-mentioned problems. It is in.
【0004】[0004]
【課題を解決するための手段】本発明者等は鋭意研究の
結果、フイルム巻層体が真空処理工程で巻ずれのない良
好な走行をするにはある特定の巻き状態が必要であるこ
とを見い出し、本発明に到達した。Means for Solving the Problems The inventors of the present invention have conducted intensive studies and found that a specific winding state is necessary for the film winding body to run well in the vacuum processing step without winding deviation. Found and arrived at the present invention.
【0005】すなわち本発明のプラスチックフイルム巻
層体は、膨張力が180Pa以下であるロール状に巻い
た真空処理に供されるものからなる。[0005] That is, the plastic film wound layered body of the present invention is one which is subjected to a vacuum treatment wound in a roll having an expansion force of 180 Pa or less.
【0006】プラスチックフイルムの厚みとしては、
0.5〜15μmの範囲が好ましく、また、このプララ
スチックフイルムは、真空蒸着加工されるものが好適で
ある。ここでプラスチックフイルムとは、例えばポリエ
ステルフイルムである。The thickness of the plastic film is as follows:
The thickness is preferably in the range of 0.5 to 15 μm, and the plastic film is preferably formed by vacuum deposition. Here, the plastic film is, for example, a polyester film.
【0007】[0007]
【発明の実施の形態】以下、さらに詳しく本発明のプラ
スチック巻層体について説明する。本発明のプラスチッ
クフイルム巻層体は、例えば、二軸延伸後熱処理したプ
ラスチックフイルムを、所定の張力および/または面圧
をかけて所定の幅、長さにスリットして巻芯上に巻き取
られたものである。このプラスチックフイルム巻層体
は、一般的には大気圧下で巻き取られるので、巻層間に
空気が存在している。この巻層間のすき間及び巻き込ま
れた空気の量は、巻取張力、面圧、速度等の巻取条件、
フイルムの表面粗さ及びフイルムの剛性等のフイルムの
持つ特性及び空気の温度、湿度、圧力等によって決定さ
れるが、これら全ての条件を含んだ真空処理に供される
プラスチックフイルム巻層体をしわ等の欠点無しに巻き
上げるための指標は、巻層間を極力狭く、巻き込まれた
空気の量を極力少なくして、かつ、空気そのものの持つ
特性も真空処理時に好適になるような温度、湿度、圧力
で巻き取ることができれば、最も好ましい真空処理に供
されるプラスチックフイルム巻層体を得ることができ
る。BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the plastic wound body of the present invention will be described in more detail. The plastic film wound layer body of the present invention is obtained by, for example, slitting a heat-treated plastic film after biaxial stretching to a predetermined width and length by applying a predetermined tension and / or surface pressure, and winding the film on a core. It is a thing. Since this plastic film winding body is generally wound under atmospheric pressure, air exists between the winding layers. The gap between the winding layers and the amount of entrained air are determined by winding conditions such as winding tension, surface pressure, and speed.
It is determined by the characteristics of the film, such as the film surface roughness and the film rigidity, and the temperature, humidity, pressure, etc. of the air, but the plastic film winding body subjected to the vacuum treatment including all these conditions is wrinkled. The index for winding up without defects such as temperature, humidity, pressure, etc. is such that the gap between the winding layers is as narrow as possible, the amount of entrapped air is minimized, and the characteristics of air itself are also suitable during vacuum processing. If it is possible to wind the film, a plastic film wound body which is subjected to the most preferable vacuum treatment can be obtained.
【0008】このプラスチックフイルム巻層体を真空下
で巻き戻した場合、プラスチックフイルム巻層間の空気
は真空下でチャンバー内の圧力(真空圧)との差圧によ
り膨張し、プラスチックフイルム巻層体を膨張させる。
この膨張力はフイルムに応力を与え、その膨張力P(1
03 Pa)は、フイルム厚みをt(μm)、巻層体の半
径をR(mm)、断面積当たりのフイルムの応力をT
(MPa)とした場合 P=(t×T)/R (1) となる。すなわち、このPが大きいとフイルムが応力を
もって巻層体から浮上するので、巻戻し時にプラスチッ
クフイルムがずれ易くなる。When the plastic film roll is rewound under vacuum, the air between the plastic film roll layers expands under vacuum due to the pressure difference between the pressure in the chamber (vacuum pressure) and the plastic film roll is removed. Inflate.
This expansion force applies a stress to the film, and the expansion force P (1
0 3 Pa), the film thickness is t (μm), the radius of the wound body is R (mm), and the stress of the film per sectional area is T (μm).
In the case of (MPa), P = (t × T) / R (1) That is, if the value of P is large, the film floats from the wound body with a stress, so that the plastic film easily shifts during rewinding.
【0009】これを回避するために、例えば特公昭59
−4335号公報のように予めプラスチックフイルム巻
層体を真空下で巻き取る方法は最も効果的な方法の一つ
として提案されている。しかし、真空下で巻き取るため
には、巻取装置を真空チャンバー内に置かなければなら
ないし、製品ロールの脱着毎に真空状態のブレークが必
要になるなど、設備、生産性の点で問題が多い。また、
巻取搬送時に真空下では空気が介在しないため、プラス
チックフイルムの搬送条件などについて制約が厳しくな
ることもあり、微妙な真空度調整が必要となることがわ
かっている。In order to avoid this, for example, Japanese Patent Publication No. Sho 59
A method in which a plastic film wound body is wound in advance under a vacuum as disclosed in JP-A-4335 is proposed as one of the most effective methods. However, in order to take up under vacuum, the take-up device must be placed in a vacuum chamber, and a break in the vacuum state is required every time a product roll is attached or detached. Many. Also,
It is known that since no air is interposed under vacuum during the winding and transporting, there may be strict restrictions on the transport conditions of the plastic film and the like, and it is necessary to finely adjust the degree of vacuum.
【0010】本発明は、真空下で走行性の良いプラスチ
ックフイルム巻層体を提供するものであり、走行を抑制
するために空気の膨張力Pによるフイルムの応力Tを小
さくする方法を鋭意研究し本発明に達したものである。
Pが180Pa以下の真空処理に供されるプラスチック
フイルム巻層体は、繰り返し真空処理装置で確認した結
果、本発明の目的である巻ずれのない良好な走行をする
ことを見い出した。ここでPはスリット工程での巻取条
件にも依存し、巻取時の張力によるフイルム残留応力、
空気の抜け易さ、空気の粘性、フイルムの滑り性等によ
って支配されることがわかっている。また、フイルム応
力を小さくする巻取方法として、低張力でフイルム残留
応力歪を小さくし、高面圧を与えて直接的に巻き込み空
気量を抑えることが有効である。また、プラスチックフ
イルム自身の強度(ヤング率)を下げて空気の膨張力に
抗するフイルム応力を小さくしてフイルム応力Tを下げ
る方法でもよい。さらに、巻取中又は巻取後に巻層間の
空気粘性を下げるために空気の温度を下げること及び/
又は空気の湿度を下げる方法等も効果的である。当然空
気抜けの良いプラスチックフイルムの設計なども重要で
あり、プラスチックフイルムの表面設計、剛性等も重要
な指標である。The present invention provides a plastic film wound body having good running properties in a vacuum, and has intensively studied a method for reducing the stress T of the film due to the expansion force P of air to suppress running. The present invention has been achieved.
As a result of repeatedly confirming with a vacuum processing apparatus, it was found that the plastic film wound body subjected to the vacuum processing in which P was 180 Pa or less performed good running without winding deviation, which is the object of the present invention. Here, P depends on the winding condition in the slitting process, and the film residual stress due to the tension at the time of winding,
It is known that it is governed by the ease of air release, the viscosity of the air, the slipperiness of the film, and the like. Further, as a winding method for reducing the film stress, it is effective to reduce the residual stress strain of the film at low tension and to apply a high surface pressure to directly suppress the amount of air taken in. Further, a method of lowering the film stress T by lowering the strength (Young's modulus) of the plastic film itself to reduce the film stress against the expansion force of air may be used. Further reducing the temperature of the air during or after winding to reduce the air viscosity between the winding layers;
Alternatively, a method of lowering the humidity of air or the like is also effective. Naturally, the design of a plastic film with good air release is also important, and the surface design, rigidity, etc. of the plastic film are also important indicators.
【0011】このように本発明においては、プラスチッ
クフイルム巻層体に巻き込まれた空気圧による膨張力を
180Pa以下に抑えフイルム応力Tを小さくすること
により本発明の目的が達成される。As described above, in the present invention, the object of the present invention is achieved by suppressing the expansion force due to the air pressure wound in the plastic film winding body to 180 Pa or less and reducing the film stress T.
【0012】すなわち、本発明の膨張力が180Pa以
下のプラスチックフイルム巻層体では、巻き込み空気が
十分に排除され、かつ、フイルムに残留応力が残らない
良好なプラスチックフイルム巻層体であるから、真空処
理工程でずれのない良好に走行するプラスチックフイル
ム巻層体を提供することができる。That is, the plastic film wound body of the present invention having an expansion force of 180 Pa or less is a good plastic film wound body in which entrapped air is sufficiently removed and no residual stress remains in the film. It is possible to provide a plastic film wound body that runs well without any deviation in the processing steps.
【0013】本発明において、真空下でのフイルム応力
T、及び膨張力Pは以下の方法によって測定することが
できる。図1に示すように、1torr以下に減圧可能なチ
ャンバー1内にプラスチックフイルム巻層体2を固定
し、巻き戻されるプラスチックフイルム3に15.5N
/mの張力をかけたロードセル4を回転自在に支承した
ガイドロール5を介してセットし、排気孔6より真空ポ
ンプ7によって排気しながらロードセルの指示値を記録
した。空気の膨張力によるフイルムの応力Tの代表的な
特性例を図2に示す。ここで平衡に達した位置でロード
セル4の値Tを読み取り、前述の(1)式により空気圧
による膨張力Pを求めた。In the present invention, the film stress T and the expansion force P under vacuum can be measured by the following methods. As shown in FIG. 1, a plastic film roll 2 is fixed in a chamber 1 capable of reducing the pressure to 1 torr or less, and 15.5 N is applied to the plastic film 3 to be rewound.
The load cell 4 to which a tension of / m was applied was set via a guide roll 5 rotatably supported, and the indicated value of the load cell was recorded while evacuating from the exhaust hole 6 by a vacuum pump 7. FIG. 2 shows a typical characteristic example of the film stress T due to the expansion force of air. Here, the value T of the load cell 4 was read at the position where the equilibrium was reached, and the expansion force P due to the air pressure was obtained by the above-mentioned equation (1).
【0014】[0014]
【実施例】以下に、本発明を実施例に基づいて説明する
が、本発明はこの実施例に限定されるものではない。な
お、真空チャンバー内のプラスチックフイルムの走行性
の評価法は次の方法によった。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to embodiments, but the present invention is not limited to these embodiments. The following method was used to evaluate the running property of the plastic film in the vacuum chamber.
【0015】真空度1torr以下において、プラスチック
フイルム巻層体2を速度200m/分、巻出し側の張力
を9.8N/mで図3に示したように巻き出し、押さえ
ロール9を介して巻取ロール10として巻き取った。こ
のとき、チャンバー1のガラス窓8から巻出し側のプラ
スチックフイルム3のずれ量11(図4)をカセトメー
タで読み取る。なお、図4では、ずれ量11を誇張して
示してある。ずれ量の値が2mm未満なら良で○、2m
m以上なら不良で×とする。When the degree of vacuum is 1 torr or less, the plastic film wound body 2 is unwound at a speed of 200 m / min and a tension on the unwinding side of 9.8 N / m as shown in FIG. It was wound up as a take-up roll 10. At this time, the displacement amount 11 (FIG. 4) of the plastic film 3 on the unwinding side from the glass window 8 of the chamber 1 is read by a cassette meter. In FIG. 4, the shift amount 11 is exaggerated. Good if the deviation value is less than 2mm, 2m
If it is not less than m, it is determined to be bad.
【0016】真空走行性の評価と膨張力の測定には以下
の水準を用いて実施した。ここで用いた巻層体のサイズ
は厚み1.9μm、幅315mm、巻長さ18000m
で外径160mmの巻芯に巻き取った二軸延伸後熱処理
したポリエステルフイルムの巻層体である。The evaluation of the vacuum running property and the measurement of the expansion force were carried out using the following standards. The size of the wound layer body used here was 1.9 μm in thickness, 315 mm in width, and 18,000 m in winding length.
Is a wound layer of a polyester film which has been biaxially stretched and heat-treated after being wound around a core having an outer diameter of 160 mm.
【0017】以下に、実施例及び比較例を示す。 実施例1 巻取張力を巻径に対して24.5→19.6MPaに直
線的に下げ、かつ、面圧を巻径に対して539→637
N/mに直線的に上げて巻き取った。Hereinafter, Examples and Comparative Examples will be described. Example 1 The winding tension was linearly reduced from 24.5 to 19.6 MPa with respect to the winding diameter, and the surface pressure was reduced from 539 to 637 with respect to the winding diameter.
It was raised linearly to N / m and wound up.
【0018】比較例1 巻取張力(24.5MPa)及び面圧(539N/m)
を巻径に対して変化させず一定にして巻き取った。Comparative Example 1 Winding tension (24.5 MPa) and surface pressure (539 N / m)
Was wound without changing the winding diameter.
【0019】実施例2 比較例1のフイルム巻層体を、シリカゲルを入れて、ポ
リエチレンフイルムにアルミ箔をラミネートした袋に密
閉し、フイルム巻層体を充分乾燥させた。Example 2 The film wound body of Comparative Example 1 was sealed in a bag in which silica gel was put and a polyethylene film was laminated with an aluminum foil, and the film wound body was sufficiently dried.
【0020】比較例2 実施例1のフイルム巻層体を室温40℃、湿度90%に
コントロールされた室内で24時間放置した。Comparative Example 2 The film wound body of Example 1 was left in a room controlled at room temperature of 40 ° C. and humidity of 90% for 24 hours.
【0021】実施例3 製膜工程で、巻取方向のフイルムのヤング率を4.7G
Pa以下のフイルムを製膜して比較例1の条件で巻き取
った。Example 3 In the film forming process, the film had a Young's modulus of 4.7 G in the winding direction.
A film having a thickness of Pa or less was formed and wound under the conditions of Comparative Example 1.
【0022】比較例3 製膜工程で、巻取方向のフイルムのヤング率を4.9G
Pa以上のフイルムを製膜して比較例1の条件で巻き取
った。Comparative Example 3 In the film forming process, the film had a Young's modulus of 4.9 G in the winding direction.
A film of Pa or more was formed and wound under the conditions of Comparative Example 1.
【0023】以上得られたフイルム巻層体の巻き込まれ
た空気圧による膨張力P及び真空走行性をまとめて表1
に示した。また、フイルム厚み0.9、1.2、1.
4、1.9μmに対し実施例1と同様な巻取パターンで
巻き取ったフイルム巻層体(実施例)と、比較例1と同
様な巻取パターンで巻き取ったフイルム巻層体(比較
例)の膨張力と真空走行性を表2に示した(実施例4〜
7、比較例4〜7)。Table 1 summarizes the expansion force P and the vacuum running property of the obtained film wound body due to the air pressure involved.
It was shown to. Further, the film thickness is 0.9, 1.2, 1..
4, 1.9 μm, a film wound up in the same winding pattern as in Example 1 (Example), and a film wound up in the same winding pattern as in Comparative Example 1 (Comparative Example) ) Are shown in Table 2 (Examples 4 to 5).
7, Comparative Examples 4 to 7).
【0024】[0024]
【表1】 [Table 1]
【0025】[0025]
【表2】 [Table 2]
【0026】表1、表2から明らかなように、フイルム
巻層体の膨張力が180Pa以下である場合、良好な真
空走行性が得られる。As is clear from Tables 1 and 2, when the expansion force of the film wound body is 180 Pa or less, good vacuum running properties can be obtained.
【0027】[0027]
【発明の効果】本発明のプラスチックフイルム巻層体に
よれば、真空処理工程で巻ずれのない良好な走行性が得
られる。According to the rolled plastic film of the present invention, a good running property without winding deviation in the vacuum processing step can be obtained.
【図1】フイルム応力Tの測定装置の概略構成図であ
る。FIG. 1 is a schematic configuration diagram of an apparatus for measuring a film stress T.
【図2】フイルム応力Tとチャンバー減圧時間との関係
図である。FIG. 2 is a relationship diagram between a film stress T and a chamber decompression time.
【図3】真空処理装置の概略構成図である。FIG. 3 is a schematic configuration diagram of a vacuum processing apparatus.
【図4】真空中での巻戻し中の巻ずれ量観察の説明図で
ある。FIG. 4 is an explanatory diagram of observation of a winding deviation amount during rewinding in a vacuum.
1 真空チャンバー 2 プラスチックフイルム巻層体 3 フイルム 4 ロードセル 5 ガイドロール 6 排気孔 7 真空ポンプ 8 ガラス窓 9 巻取ロール 10 押さえロール 11 巻ずれ量 DESCRIPTION OF SYMBOLS 1 Vacuum chamber 2 Plastic film winding layer 3 Film 4 Load cell 5 Guide roll 6 Exhaust hole 7 Vacuum pump 8 Glass window 9 Take-up roll 10 Holding roll 11 Winding deviation
Claims (4)
に巻いた真空処理に供されるプラスチックフイルム巻層
体。1. A roll of plastic film which is subjected to a vacuum treatment wound in a roll having an expansion force of 180 Pa or less.
15μmの範囲にある、請求項1のプラスチックフイル
ム巻層体。2. The plastic film has a thickness of 0.5 to 0.5.
The plastic film roll according to claim 1, which is in a range of 15 µm.
れるものである、請求項1または2のプラスチックフイ
ルム巻層体。3. The plastic film roll according to claim 1, wherein the plastic film is processed by vacuum deposition.
イルムである、請求項1、2または3のプラスチックフ
イルム巻層体。4. The plastic film roll according to claim 1, wherein the plastic film is a polyester film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9147198A JPH10316776A (en) | 1997-05-20 | 1997-05-20 | Plastic film roll used for vacuum treatment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9147198A JPH10316776A (en) | 1997-05-20 | 1997-05-20 | Plastic film roll used for vacuum treatment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH10316776A true JPH10316776A (en) | 1998-12-02 |
Family
ID=15424781
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9147198A Pending JPH10316776A (en) | 1997-05-20 | 1997-05-20 | Plastic film roll used for vacuum treatment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH10316776A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018123350A (en) * | 2017-01-30 | 2018-08-09 | 株式会社カネカ | Method and apparatus for manufacturing product roll |
-
1997
- 1997-05-20 JP JP9147198A patent/JPH10316776A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018123350A (en) * | 2017-01-30 | 2018-08-09 | 株式会社カネカ | Method and apparatus for manufacturing product roll |
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