JPH10302709A - Ion introducing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To introduce plenty of ions to a mass analyzer by focusing both of direction of the ions and energy of the ions. SOLUTION: Both of a sample ion and neutral particles which are generated by plasma of a plasma generator 1 enters a cylindrical deflection electric field electrode group 16 of an interface part. Charged ions are deflected along the deflection electric field group 16 by an action of an electric field generated by the deflection electric field electrode group 16 and the direction and energy of ions which have several energy are focused. Accordingly, plenty of ions which have many directions and many kinds of energy are emitted from the deflection electric field electrode group 16 and introduced to a mass analyzer 14. Since uncharged neutral particles are not affected by an action of the electric field generated by the deflection electric field electrode group 16, they are dispersed after they impinge on an inner surface of the fan-shaped deflection electric field electrode group 16. Therefore, almost all the neutral particles are not emitted from the deflection electric field electrode group 16 so that they are not introduced to the mass analyzer.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ion-introducing apparatus for use in, for example, an inductively coupled plasma mass spectrometer (hereinafter also referred to as ICP MS) for introducing ions of a sample into the mass spectrometer. And, in particular, to the technical field of iontophoresis devices for sample ions generated by plasma.

[0002]

2. Description of the Related Art An ICP MS excites a sample using an inductively coupled plasma to generate ions from the sample, and guides the generated ions to a mass spectrometer through an interface unit including a nozzle, a skimmer, and a pull-out. By measuring the amount of ions with this mass spectrometer, the elements to be measured in the sample are analyzed.

FIG. 5 is a diagram schematically showing a conventional example of such an ICP MS. In the drawing, 1 is a plasma generator, 2 is a sampling cone, 3 is an orifice formed in the sampling cone 2, 4 is a skimmer cone, 5 is an orifice formed in the skimmer cone 4, 6 is a sampling cone 2 and a skimmer cone 4 Between the first
A chamber, 7 is a pullout, 8 is an orifice formed in the pullout 7, 9 is a second chamber defined between the skimmer cone 4 and the pullout 7, 10 is a partition, and 11 is a main slit formed in the partition 10. , 12 is a third chamber defined between the pull-out 7 and the partition wall 10, 13 is a straight cylindrical focus electrode provided in the third chamber 12, and 14 is the ion into which the ions of the sample are introduced. Mass spectrometer (hereinafter referred to as MS)
Analysis unit). The plasma outlet of the plasma generator 1, the orifices 3, 5, 8, the focus electrode 13, and the main slit 11 are aligned on the central axis 15.

[0004] The conventional ICP MS constructed as described above.
At the time of analysis, the first to third chambers 6, 9, 12
The inside is evacuated and depressurized by a vacuum pump such as a rotary pump. The MS analyzer 14 is also in a high vacuum state. When a sample (not shown) is introduced into the plasma generated by the plasma generator 1, the sample is excited by the plasma to generate ions. The generated sample ions fly through the orifice 3 of the sampling cone 2, the first chamber 6, the orifice 5 and the second chamber 9 of the skimmer cone 4, and the orifice 8 of the pullout 7, and reach the focus electrode 13.
The focus electrode 13 uses the arrived ions as the main slit 11
The sample ions are focused on the main slit 1
1 to the MS analyzer 14. MS analyzer 1
Numeral 4 analyzes ions of the introduced sample.

[0005]

By the way, in such a conventional ICP MS, when ions of a sample fly, not only these ions but also a large number of neutral particles fly on the orbit where the ions fly. Become like Then, neutral particles traveling in the same direction as the traveling direction of ions on the central axis 15 are introduced into the MS analyzer 14 from the main slit 11 through the focus electrode 13 together with the ions. For this reason, the degree of vacuum of the MS analyzer 14 that requires a high vacuum is deteriorated, and a problem arises that the analysis sensitivity of the MS analyzer 14 is reduced.

In addition, ions fly at a relatively high speed, while neutral particles fly at a relatively low speed, so that the degree of collision of the ions with the neutral particles is high. When ions collide with neutral particles, the trajectories of the ions are bent on the way,
The amount of ions introduced from the main slit 11 to the MS analysis unit decreases, or ions are lost due to loss of charge of the ions. For this reason, there is a problem in that the ion detection sensitivity of the MS analyzer 14 is also reduced by the collision between the ions and the neutral particles.

Therefore, Japanese Patent Laid-Open No. 7-7859 discloses a mass spectrometer in which the trajectory of ions of a sample generated by plasma is deflected so as to be simply separated from the trajectory of neutral particles.
No. 0 proposes this. According to the mass spectrometer disclosed in this publication, since the neutral particles are not directly introduced into the mass spectrometer, the above problem can be solved to some extent.

However, since the electrodes for deflecting the trajectory of the ions are merely constituted by four rod-shaped electrodes such that the paths of the ions and the neutral particles form a crossroad, various directions are required. Not only cannot the ions possessed be effectively focused and introduced into the mass spectrometer, but also ions having various energies cannot be effectively focused. For this reason, it is difficult to introduce a large number of ions having a wide direction and energy into the mass spectrometer, even if the trajectories of the ions of the sample can be separated from the paths of the neutral particles. There is a problem that the improvement of the analysis sensitivity of the mass spectrometer is limited.

The present invention has been made in view of such circumstances, and an object of the present invention is to focus both the direction of ions and the energy of ions to mass-analyze a large amount of ions having directions and energies. It is an object of the present invention to provide an iontophoretic device which can be introduced into the device and can improve the analysis sensitivity of the mass spectrometer.

[0010]

According to a first aspect of the present invention, there is provided an interface unit for exciting a sample by plasma to generate ions from the sample and introducing the ions into a mass spectrometer. The iontophoretic device according to the above, further comprising a fan-shaped electric field that deflects the direction of the ions, focuses the direction of the ions in a predetermined direction, and focuses energy of the ions.

Further, the invention according to claim 2 is characterized in that an electrode for generating the sector electric field is provided with an outlet in which neutral particles moving with the ions go straight out without being deflected. Further, the invention according to claim 3 is characterized in that the sector electric field is a cylindrical electric field. Further, the invention according to claim 4 is characterized in that the sector electric field is a spherical electric field. Further, the invention of claim 5 is characterized in that the sector electric field is a toroidal electric field.

[0012]

In the ion introducing apparatus of the present invention having such a configuration, the ions of the sample generated by the plasma of the plasma generator enter into the fan-shaped electric field of the interface together with the neutral particles. The charged ions are deflected along the sector of the sector by the action of the sector. In this case, ions in various directions are focused in one direction by the sector electric field, and ions having various energies are focused and fly out of the sector electric field. Therefore, a large amount of ions having a spread in direction and energy are emitted from the deflecting electric field electrode for generating the sector electric field and introduced into the mass spectrometer.

On the other hand, neutral particles having no electric charge are not affected by the sector electric field, and thus collide with the inner wall surface of the deflection electric field electrode for generating the sector electric field and diffuse. As a result, almost no neutral particles are emitted from the deflection field electrode, and only a very small amount of neutral particles jump out of the deflection field electrode and are introduced into the mass spectrometer.
Therefore, deterioration of the degree of vacuum of the mass spectrometer due to neutral particles can be prevented. Further, since the amount of neutral particles introduced into the mass spectrometer is significantly reduced, the rate of ion introduction into the mass spectrometer is improved.

Further, since the trajectory on which ions move and the trajectory on which most neutral particles move are different, the degree of collision between ions and neutral particles is extremely small. Thereby, the loss of ions is greatly suppressed.

As described above, in the iontophoresis apparatus of the present invention, a large amount of ions having directions and energies are introduced into the mass spectrometer, so that the analysis sensitivity of the mass spectrometer is greatly improved. I do.

[0016]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram similar to FIG. 5, schematically showing an ICP MS to which an example of an embodiment of an iontophoresis device according to the present invention is applied. The same components as those of the conventional ICP MS shown in FIG. 5 described above are denoted by the same reference numerals, and a detailed description thereof will be omitted.

As shown in FIG. 1, the iontophoresis apparatus of this embodiment has a deflection electric field electrode group 16 provided in the third chamber 12 instead of the focus electrode 13 in the ICP MS iontophoresis apparatus shown in FIG. ing. This deflection electric field electrode group 1
Reference numeral 6 denotes an arrangement in which first to third electric field electrodes 16a, 16b, and 16c composed of three sets of concentric cylindrical electrodes are sequentially arranged in an ion path.

As shown in detail in FIG. 2, the first electric field electrode 1
6a is made arc-shaped inner electrodes 16a ₁ and arc-shaped outer electrode 16a ₂ Prefecture, in these, the outer electrodes 16a _1, 16
a ₂ is disposed the center of each arc with a predetermined spacing and concentrically. Then, the first electric field electrode 16a
Is provided with an inlet 16d in which the center of the interval between the inner and outer electrodes 16a ₁ and 16a ₂ is located on the central axis 15 and is disposed opposite the orifice 8;
And a second outlet 16f at a tip of a portion extending straight along the central axis 15 from the inlet 16d at a tip of a portion extending along the arc from the oblique angle of 45 degrees. ing.

Further, the second field electrode 16b is made of arc-shaped inner electrode 16b ₁ and the arc-shaped outer electrode 16b ₂ Prefecture, in these, the outer electrode 16b _1, 16b _2, the center of each arc is concentrically Also, they are arranged at predetermined intervals. Then, the second electric field electrode 16b is connected to the first electric field electrode 16b.
a 16g of inlets, which are arranged opposite to the first outlet 16e of FIG.
At the end of the portion extending along the arc from the outlet, there is provided an outlet 16h directed obliquely upward at 45 degrees.

Furthermore, the third field electrode 16c is made of arc-shaped inner electrode 16c ₁ and arc-shaped outer electrode 16c ₂ Prefecture, in these in the same way, the outer electrode 16c _1, 16c _2, the center of each arc Are arranged concentrically and at predetermined intervals. Then, the outlet 16h of the second electric field electrode 16b
, An entrance 16i which is disposed to face with a predetermined gap, and faces obliquely downward at 45 degrees, and inner and outer electrodes 16c ₁ , 16c
The center of the interval ₂ is located on the central axis 15 and has an outlet 16j disposed opposite the main slit 11. In that case, the second outlet of the first field electrode 16a is disposed at a position where the outer electrode 16c ₂ crosses the central axis 15 1
6f.

As described above, the first to third electric field electrodes 16
a, 16b, and 16c are combined with a predetermined gap, and the first to third electric field electrodes 16a, 16a
b and 16c respectively form a sector electric field,
The directions of ions in various flight directions incident on the entrance 16d of the first electric field electrode 16a are changed to the exit 16j of the third electric field electrode 16c.
, The directions of the ions are focused and emitted in the direction of the central axis 15, and the ions having a predetermined width of energy incident on the inlet 16 d are collected and collected on the outlet 16 j of the third electrode 16 c.
, And has a function of double focusing of the direction and energy of ions. In other words, the first to third electric field electrodes 16a, 16b, 16c are combined so as to satisfy the double focusing condition. Other configurations of the ICP MS to which the iontophoresis apparatus of the present example is applied are the same as those of the conventional ICPMS.

In the ICP MS to which the iontophoresis apparatus of this embodiment configured as described above is applied, ions of the sample generated by the plasma pass through the orifice 8 of the pull-out 7 together with the neutral particles as in the conventional case. 3 rooms 12
To enter. The ions and neutral particles that have entered the third chamber 12 enter from the entrance 16d of the first electric field electrode 16a of the deflection electric field electrode group 16 and into the cylindrical space between the outer electrodes 16a ₁ and 16a ₂ . Since the ions that have entered the space have electric charges, they are deflected obliquely downward along the cylindrical space by the fan-shaped electric field of the first electrode 16a, and proceed from the first outlet 16e of the first electric field electrode 16a. 2 electric field electrode 1
The inner and outer electrodes 16b ₁ and 16b pass through the inlet 16g of the inner electrode 6b.
Enter within the cylindrical spacing of ₂ . The ions that have entered the space are further deflected obliquely upward from obliquely downward along the cylindrical space by the fan-shaped electric field of the second electric field electrode 16b, and proceed from the outlet 16h of the second electric field electrode 16b to the third electric field electrode. inner through 16c of the inlet 16i, outer electrode 16c _1, 1
6c _{2 into} the cylindrical space. The ions that have entered the space are further deflected from the obliquely upward direction toward the central axis 15 along the cylindrical space by the sector electric field of the third electric field electrode 16b, and proceed from the exit 16j of the third electric field electrode 16c to the central axis. Light is emitted in 15 directions. This third electric field electrode 16
The ions emitted from the outlet 16j of c are introduced into the MS analyzer 14 through the main slit 11 as in the related art. Thus, ions in various directions are focused in the direction of the central axis 15 by the deflection electric field electrode group 16. Also, the energy of ions emitted from the outlet 16j of the third electrode 16c is collected by the deflecting electric field electrode group 16 so that ions of various energies are collected and passed through the main slit 11 to MS.
It is introduced into the analysis unit 14. Thus, the deflection field electrode group 1
6, ions of various energies are focused to form MS
It is introduced into the analysis unit 14.

On the other hand, the neutral particles that have entered the first electric field electrode 16a together with the ions have no charge, and
It is not affected by the fan-shaped electric field of the electric field electrode 16a. Therefore, most of the neutral particles go straight in the direction of the central axis 15 and jump out of the second outlet 16f of the first electric field electrode 16a,
The protruding neutral particles are the outer electrode 1 of the third electric field electrode 16c.
6c ₂ collides with the outer peripheral wall and diffuses into the third chamber 12. Further, the remaining small neutral particles, of the first field electrode 16a, the inner wall of the outer electrode 16a _1, 16a _2, of the second field electrode 16b, the inner wall of the outer electrode 16b _1, 16b _2, and Outer electrodes 16c ₁ and 16c ₂ among the third electric field electrodes 16c
The neutral particles are repeatedly collided with the inner walls and diffused, and a part of the neutral particles is further separated into the gap between the first field electrode 16a and the second field electrode 16b or the second field electrode 16b and the third field electrode 16b.
The neutral particles diffuse out of the deflection electric field electrode group 16 from the gap c, and the amount of neutral particles emitted from the outlet 16j of the third electric field electrode 16c becomes extremely small. Therefore, very few neutral particles enter the MS analyzer 14 from the main slit 11 as a particle beam.

Furthermore, since the trajectory where the ions move and the trajectory where most neutral particles move are different from each other and only a very small number of neutral particles are translated on the same trajectory as the ions, the ion and The degree of collision with neutral particles is extremely small. Thereby, the loss of ions is greatly suppressed.

According to the iontophoresis apparatus of this example, since the number of neutral particles introduced into the MS analyzer 14 is greatly reduced as compared with the conventional one, the degree of vacuum of the MS analyzer 14 is not deteriorated. It is possible to maintain a high degree of vacuum.
In addition, since the trajectory where the ions move and the trajectory where most of the neutral particles move are different, the chances of the ions and the neutral particles translating are reduced, and the degree of collision between them is reduced. Thereby, loss of ions due to collision between ions and neutral particles can be reduced. Further, since the amount of neutral particles passing through the main slit 11 is greatly reduced, the ion passing rate of the main slit 11 is improved.

Therefore, in the iontophoresis apparatus of this example, a large amount of ions having a wide range of directions and energies can be introduced into the MS analyzer 14, so that M
The analysis sensitivity of the S analyzer 14 can be greatly improved.

FIGS. 3A to 3D show other examples of the embodiment of the iontophoresis apparatus of the present invention.
FIG. The same components as those of the iontophoresis apparatus of the example shown in FIG. 2 are denoted by the same reference numerals, and detailed description thereof will be omitted.

The iontophoresis apparatus of the example shown in FIG.
Outer electrodes 16a ₁ of the first field electrode 16a of the deflecting field electrode group 16 is made to have been omitted second outlet 16f of the outer electrodes 16a ₁ of the example shown in FIGS. 1 and 2 described above. Other configurations of the iontophoresis device of this example are the same as those of the example shown in FIGS.

In the iontophoresis apparatus of this example, the first
Neutral particles that have entered the entrance 16d of the electric field electrode 16a together with the ions are the outer electrodes 16a ₁ , 1 of the first electric field electrode 16a as in the case of the slight neutral particles in the above-described example.
6a ₂ , inner electrode of the second electric field electrode 16b, outer electrode 1
6b ₁ , 16b ₂ and the inner wall of the outer electrodes 16c ₁ , 16c ₂ of the third electric field electrode 16c repeatedly collides and diffuses, and furthermore, a part of the neutral particles is dispersed in the first electric field electrode. From the gap between the second electric field electrode 16b and the second electric field electrode 16b or from the gap between the second electric field electrode 16b and the third electric field electrode 16c, the light is diffused out of the deflection electric field electrode group 16 and emitted from the exit 16j of the third electric field electrode 16c. Neutral particles are extremely small. For this reason, the MS analyzer 1
Neutral particles entering 4 will be very small.

Further, neutral particles are used as inner and outer electrodes 16a ₁ , 1
6a ₂ ; 16b ₁ , 16b ₂ ; 16c ₁ , 16c ₂ collides with the respective inner walls, a part of the neutral particles adhere to these inner walls. Therefore, the first to third electric field electrodes 16
By heating a, 16b, 16c with a heater or the like, neutral particles attached to the inner wall are burned out.

Other functions and effects of the iontophoresis device of this embodiment are the same as those of the embodiment shown in FIGS.

Further, in the ion implantation apparatus 16 of the example shown in FIG. 3A, three first to third electric field electrodes 16a, 1
3b, the iontophoretic device of the example shown in FIG. 3 (b) is configured such that a gap is provided between the second electric field electrode 16b at the left and right central portions thereof, and the two electric field electrodes 16b ', 16c are provided.
b ", the four first, second, second 'and third field electrodes 16a, 16b', 16b",
16c. Other configurations and operational effects of the iontophoresis apparatus of this example are the same as those of the example shown in FIG.

Further, in the ion implantation apparatus 16 of the example shown in FIG. 3A, the turning radii of the three first to third electric field electrodes are all set to be the same, but the example shown in FIG. In the iontophoresis device, the radius of gyration of ions by the two second and third field electrodes 16b and 16c is set smaller than the radius of gyration by the first field electrode 16a. As a result, the beam width of the ions is reduced, the density of the ions is increased, and the reduction rate of the lens action of the deflection electric field electrode group 16 is increased. Although not shown, for example, by making the radius of gyration of the two first and second electric fields smaller than the radius of gyration of the third electric field, it is also possible to reduce the reduction ratio of the lens action of the deflection electric field electrode group 16. As described above, the reduction ratio of the lens action can be changed by appropriately combining electric fields having different ion turning radii. Other configurations and other operational effects of the iontophoresis apparatus of this example are the same as those of the example shown in FIG.

The iontophoresis apparatus of the example shown in FIG.
The deflection electric field electrode group 16 is constituted by the first and second electric field electrodes 16a and 16b 'in the left half of the iontophoretic device of the example shown in FIG. In the deflection field electrode group 16, the direction of incidence of ions and the direction of emission of ions are the same, but the axis of incidence of ions and the axis of emission of ions are different. This allows
The position of the main slit 11, that is, the ion introduction position of the MS analyzer 14 can be set to a desired position off the central axis 15. Other configurations and other effects of the iontophoresis device of this example are the same as those of the example shown in FIG.

FIGS. 4A and 4B show still another example of the embodiment of the iontophoresis apparatus of the present invention.
FIG. 3 is a view similar to FIG. 2. Note that the same components as those of the iontophoresis apparatus of the example shown in FIG. 2 are denoted by the same reference numerals, and a detailed description thereof will be omitted.

The deflection electric field electrode group 16 of the iontophoresis apparatus of the example shown in FIG.
Of the pair of concentric spherical electrodes having radii r and r 'giving a deflection angle of ゜, the outer electrodes 16m ₁ and 16m ₂ are configured as a spherical electrode 16m, and the outer electrodes 16m ₁ and 16m ₂ among these electrodes. Form a spherical electric field. The charged ions are the outer electrodes 16m ₁ and 16m ₂ among these.
Is bent by 90 ° by the action of the spherical electric field, and its emission direction is perpendicular to the incidence direction. Neutral particles having no charge are not affected by the spherical electric field of the outer electrodes 16m ₁ , 16m ₂ , and the inner and outer electrodes 16m ₁ , 16m 2
It collides with the inner wall of ₂ and diffuses by repeating this collision.

Thus, the inner and outer electrodes 16m ₁ , 16m
Neutral particles are hardly emitted from the outlet ₂ and ions are emitted with the direction and energy focused by the double focusing action of the inner and outer electrodes 16m ₁ and 16m ₂ . In addition, the direction of incidence of ions of the deflection electric field electrode group 16 and the direction of emission of ions can be changed by 90 °, and the direction of the central axis 15 in the direction of incidence can be changed with respect to the main slit 11 which is the inlet of the MS analyzer 154. The position and direction can be set at 90 ° different directions. The convergence point can be set freely by combining a lens for adjusting the focal length and the like. Other configurations and other operational effects of the iontophoresis apparatus of this example are the same as those of the example shown in FIG.

In the iontophoretic device of the example shown in FIG. 4A, a spherical electric field is generated by the concentric spherical electrode 16m.
Although the ions are deflected by 90 °, FIG.
Iontophoretic device in the example shown in are arranged at predetermined intervals, consisting of spherical electrodes of a pair of identical radius r that gives a 270 ° deflection angle, among the configuration by the outer electrode 16n _1, 16n ₂ as toroidal electrodes 16n are, among these, the toroidal electric field is formed by the outer electrode 16n _1, 16n _2. In this example, the ions are the inner and outer electrodes 1
Due to the action of the 6n ₁ and 16n ₂ toroidal electric fields, 270
出 射 The light is deflected and emitted. Other configurations and other operational effects of the iontophoresis apparatus of this example are the same as those of the example shown in FIG.

FIGS. 3B to 3D and FIG.
In each of the examples of the iontophoresis apparatus shown in FIGS. 1A and 1B, the center axis 1 of the example shown in FIGS.
Although the outlet 16f from which the neutral particles moving in the five directions fly out is not provided, the outlet 16f can be provided.

Further, in the iontophoresis apparatus of the example shown in FIG. 1, the deflection electric field electrode group 16 is provided in the third chamber 12 between the pull-out 7 and the partition wall 10 having the main slit 11. The electric field electrode group 16 can be provided in the first chamber 6 between the sampling cone 2 and the skimmer cone 4 or in the second chamber 9 between the skimmer cone 4 and the pull-out 7, and the first to sixth chambers can be provided. 3 rooms 6,
Of 9, 12, two or all rooms may be provided. 2 and FIGS. 3 (a) to 3 (d) and FIG.
The deflection electric field electrode groups shown in (a) and (b) may be provided in an appropriate combination.

[0041]

As is apparent from the above description, according to the iontophoresis apparatus of the present invention, both the direction and energy of ions are focused by a sectoral electric field such as a cylindrical electric field, a spherical electric field, and a toroidal electric field. Therefore, a large amount of ions having a wide direction and energy can be introduced into the mass spectrometer.

Further, since most of the neutral particles are not diffused by the deflection electric field electrode and introduced into the mass spectrometer, it is possible to prevent the degree of vacuum of the mass spectrometer from deteriorating due to the neutral particles. Further, since the amount of neutral particles introduced into the mass spectrometer is significantly reduced, the rate of ion introduction into the mass spectrometer can be improved.

Further, since the trajectory on which ions move and the trajectory on which most neutral particles move are different, the degree of collision between ions and neutral particles can be extremely reduced. Thereby, the loss of ions can be significantly suppressed.

As described above, according to the iontophoresis apparatus of the present invention, a large amount of ions having a wide range of directions and energies can be introduced into the mass spectrometer, thereby greatly improving the analysis sensitivity of the mass spectrometer. Can be done.

[Brief description of the drawings]

FIG. 1 is a diagram showing an example of an embodiment of an iontophoresis device according to the present invention.

FIG. 2 is an enlarged view showing a deflection electric field electrode group of the iontophoresis apparatus of the example shown in FIG.

FIG. 3 is a view similar to FIG. 2, showing another example of a deflection electric field electrode group of the iontophoresis device of the present invention.

FIG. 4 is a view similar to FIG. 2, but showing still another example of a deflection electric field electrode group of the iontophoresis apparatus of the present invention.

FIG. 5 is a diagram showing an example of a conventional ICP MS.

[Explanation of symbols]

1 ... plasma generator, 2 ... sampling cone, 3 ...
Orifice, 4 ... Skimmer cone, 5 ... Orifice, 6
… First room, 7… Pull out, 8… Orifice, 9… First
Room 10, partition wall, 11 main slit, 12 second room, 1
Reference numeral 4: mass spectrometry unit (MS analysis unit), 16: deflection electric field electrode group, 16a: first electric field electrode, 16b: second electric field electrode, 1
6c: third electric field electrode, 16d: inlet, 16f: second outlet, 16j: outlet, 16m: spherical electrode, 16n: toroidal electrode

Claims (5)

[Claims] 1. An iontophoretic device of an interface section for exciting a sample by plasma to generate ions from the sample and introducing the ions into a mass spectrometric section, wherein the direction of the ions is deflected and the direction of the ions is changed. An iontophoretic device comprising a sector electric field for focusing in a predetermined direction and for focusing the energy of the ions. 2. An electrode for generating the sector electric field,
2. The iontophoresis device according to claim 1, wherein an outlet is provided for neutral particles moving with the ions to go straight out without being deflected. 3. The iontophoresis device according to claim 1, wherein the electric sector is a cylindrical electric field. 4. The iontophoretic device according to claim 1, wherein the sector electric field is a spherical electric field. 5. The iontophoresis device according to claim 1, wherein the sector electric field is a toroidal electric field.