JPH10301143A - Alignment mark of liquid crystal display device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain an alignment mark which enhances visibility without being formed separately and permits alignment with ease and precision. SOLUTION: This alignment mark aligns a TFT (thin film transistor) substrate and a micro lens array 33 forming a lens part 9 molded from a lens molding material different from a base glass 1. In this case, an on-substrate alignment mark of an arbitrary shape formed on the TFT substrate and an on-microlens alignment mark 35, which is formed into the micro lens array 33 by using a lens molding material 7 at a position corresponding to the on-TFT substrate alignment mark and of which an analog part 39 larger than the on- TFT substrate alignment mark is formed by excluding the lens molding material 7, are provided.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a camera-integrated VT.
More specifically, the present invention relates to an alignment mark of a liquid crystal display device used for a liquid crystal projector device or the like, and more specifically, to align a microlens array formed with microlenses with a TFT substrate formed with a thin film transistor (TFT) for controlling each pixel. Things.

[0002]

2. Description of the Related Art In a liquid crystal display device, in order to increase luminance,
In some cases, a microlens array is attached to a TFT substrate. 8 and 9 are explanatory views showing a method for manufacturing two typical microlens arrays. In the method of manufacturing the microlens array shown in FIG. 8, the concave portions 3 and 5 of the lens portion and the alignment mark portion are formed on the surface of the base glass 1 by etching. Next, a lens-forming material (resin) 7 is poured into these concave portions 3 and 5 to form a lens 9 and a microlens-side alignment mark 11, and then a cover glass 13 is attached to the surface of the base glass 1 to form a microlens array. Complete No. 15. In the method of manufacturing the microlens array shown in FIG.
The lens 9 and the microlens-side alignment mark 11 are formed by applying a lens forming material (resin) 17 and pressing the resin 17 with a mold, and a cover glass 13 is attached to the surface of the lens 9 and the microlens array 19. To complete. In any of these manufacturing methods, the lens 9 and the microlens-side alignment mark 11 are formed simultaneously in order to reduce the manufacturing cost.

FIG. 10 is a view of a conventional alignment mark on the microlens side, and FIG. 10A is a view taken in the direction of arrow a in FIGS. 8 and 9 (B).
FIG. 1 (A) shows the view in the direction of arrow b. FIG. 1 (C) shows the view in the direction of arrow c of FIG.
Reference numeral 1 denotes a TFT on which a TFT substrate-side alignment mark is formed.
FIG. 12 is a plan view of the substrate, FIG. 12 is an enlarged view of the alignment mark on the TFT substrate side, and FIG. 13 is an explanatory diagram showing how the two alignment marks look when the microlens and the TFT substrate are bonded together. As shown in FIG. 10, the microlens-side alignment mark 11 is formed by forming two linear portions 23, 23 orthogonal to the mark portion made of resin. As shown in FIGS. 11 and 12, the TFT substrate-side alignment mark 25 is formed by two orthogonal linear portions 29, 29.
Are formed on the TFT substrate 27 in a cross shape.

[0004] The bonding of the microlens array 15 (or 19) and the TFT substrate 27 is performed by stacking the microlens array 15 on the surface of the TFT substrate 27 and, as shown in FIG. The alignment is performed by overlapping the side alignment marks 11 and matching the cross shapes of both.
After the alignment, the TFT substrate 27 and the microlens array 15 are temporarily bonded with a UV adhesive, and then thermally cured at 150 to 200 ° C. while applying pressure by a hot press method to complete the bonding.

[0005]

However, in the above-mentioned conventional alignment mark, the micro-lens alignment mark 11 is formed by using a lens forming material, so that the TFT substrate-side alignment mark 25 and the micro-lens alignment mark 11 are formed. When light is superimposed, light passing through the microlens-side alignment mark 11 is refracted, and the TFT substrate-side alignment mark 25 appears to be distorted or the edge is blurred. There was a problem that alignment with the lens array 15 could not be performed easily and with high accuracy. On the other hand, if the microlens-side alignment mark is formed of a metal such as chrome or aluminum similarly to the TFT substrate-side alignment mark after the production of the microlens array, the visibility is improved, but the production of the microlens array and the formation of the alignment mark are improved. A double process is required, and the microlens array and the alignment mark are separately manufactured, so that the relative position accuracy between the microlens array and the alignment mark is reduced. The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an alignment mark which can improve visibility without separately forming the alignment mark and can perform easy and highly accurate alignment.

[0006]

In order to achieve the above object, an alignment mark of a liquid crystal display device according to the present invention is provided.
An alignment mark of a liquid crystal display device for aligning a TFT substrate and a microlens array having a lens portion formed on a base glass with a lens forming material different from the base glass, the alignment mark being formed on the TFT substrate and having an arbitrary shape. An alignment mark formed on the microlens array using the lens-forming material at a position corresponding to the TFT substrate-side alignment mark;
A similar shape portion larger than the substrate-side alignment mark is formed by the micro-lens-side alignment mark formed excluding the lens-forming material. Further, the alignment mark is an alignment mark of a liquid crystal display device for aligning a TFT substrate and a microlens array in which a lens portion is formed on a base glass with a lens forming material different from the base glass.
A TFT substrate-side alignment mark having at least a linear portion formed on the substrate; and a microlens array formed at the position corresponding to the TFT substrate-side alignment mark using the lens-forming material, wherein the linear portion is formed. A V-shaped notch that symmetrically intersects at left and right opposite sides may be formed by a microlens-side alignment mark formed by removing the lens-forming material. Further, the alignment mark is an alignment mark of a liquid crystal display device for aligning a TFT substrate and a microlens array in which a lens portion is formed on a base glass with a lens forming material different from the base glass, and is one linear portion or A TFT substrate-side alignment mark formed on the TFT substrate by a plurality of linear portions that intersect so that the angles formed by adjacent linear portions are all equal;
A hole formed in the microlens array using the lens-forming material at a position corresponding to the FT substrate-side alignment mark and divided into equal areas by the TFT substrate-side alignment mark excluding the lens-forming material And a micro-lens side alignment mark formed by the above method.

In the alignment mark configured as described above, a similar shape portion excluding the lens-forming material is formed on the microlens-side alignment mark.
Since the TFT substrate-side alignment mark is located in a similar shape portion composed of only the base glass and the cover glass, distortion and blur of the TFT substrate-side alignment mark due to refraction of light are eliminated. In addition, in the alignment mark having the V-shaped notch formed therein, the distortion and blurring of the alignment mark on the TFT substrate side due to the refraction of light are eliminated, and the linear portion of the alignment mark on the TFT substrate side and the V-shaped notch are formed. Alignment based on the intersection of the notch with the inclined side and the horizontal distance from the linear part to the left and right inclined sides is possible. Further, in the alignment mark in which the hole is formed, similar to the above-described operation, the TFT is formed by refraction of light.
Distortion and blurring of the substrate-side alignment mark are eliminated, and alignment becomes possible by the ratio of the area surrounded by the through-hole portion partitioned by the TFT substrate-side alignment mark.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of an alignment mark according to the present invention will be described below in detail with reference to the drawings. FIG. 1 is an enlarged view of a main part of a microlens array on which an alignment mark according to a first embodiment of the present invention is formed,
2A and 2B are diagrams of the alignment mark on the microlens side according to the first embodiment of the present invention. FIG. 2A is a view from arrow d in FIG. 1, FIG. FIG. 3 is an explanatory view showing how the alignment marks look when the microlens array of FIG. 1 and the TFT substrate are bonded together. The alignment mark 31 according to this embodiment has a T
A cross-shaped TFT substrate-side alignment mark 25 similar to the conventional one formed on an FT substrate 27 (see FIG. 11);
A microlens alignment mark 35 formed on the microlens array 33 at a position corresponding to the TFT substrate alignment mark 25.

[0009] Microlens alignment mark 35
For example, the concave portions 3 and 37 of the lens portion and the alignment mark portion are formed by etching on the surface of the base glass 1 by the manufacturing method shown in FIG. 8, and the lens forming material (resin) 7 is formed in the concave portions 3 and 37. After the lens portion 9 and the microlens alignment mark 35 are formed, the cover glass 13 is attached to the surface of the base glass 1 to complete the process.

The microlens-side alignment mark 35 formed on the microlens array 33 has a similar portion 39 larger than the TFT substrate-side alignment mark 25 except for the resin 7. In other words, the microlens array 33 is formed by arranging four identically-shaped rectangular portions 41 made of the resin 7 on four sides so that the mutual intervals are the same, so that only the base glass 1 and the cover glass 13 are provided. A similar shaped portion 39 is formed. Accordingly, since the resin 7 does not intervene in the similar shaped portion 39, the entered light is transmitted without being refracted.

The alignment mark 3 constructed as described above
In order to perform the alignment using the microlens array 1, the microlens array 33 is overlaid on the TFT substrate 27, and as shown in FIG.
Alignment is performed so that the similar portions 39 of the microlens alignment marks 35 are positioned at equal intervals on the FT substrate alignment marks 25.

In this alignment mark 31, a TFT
The substrate-side alignment mark 25 is located at the similar shape portion 39 composed of only the base glass 1 and the cover glass 13, and the TFT substrate is refracted by the light generated when the mark overlaps the mark composed of the lens forming material as in the related art. The distortion and blurring of the side alignment mark 25 are eliminated, and the edge of the TFT substrate side alignment mark 25 can be clearly recognized.

Next, a second embodiment of the alignment mark according to the present invention will be described with reference to FIGS. FIGS. 4A and 4B are views of a microlens-side alignment mark according to the second embodiment of the present invention, wherein FIG. 4A is a plan view, FIG. FIG. 5 is an explanatory view showing how the alignment mark looks when the microlens array and the TFT substrate are bonded together, FIG. 6 is an enlarged view of a part j in FIG. 5, and FIG. 7 is an enlarged view of a part k in FIG. The alignment mark 51 according to this embodiment is provided on the TFT substrate 27 (FIG. 11).
) Formed on the microlens array at a position corresponding to the TFT substrate-side alignment mark 25 in the same manner as in the related art.
3 Microlens alignment mark 5
3 can be manufactured by, for example, the manufacturing method shown in FIG.

The microlens-side alignment mark 53 formed on the microlens array has a square base 55 formed of a lens forming material. On each side of the base portion 55, the linear portions 29, 29 of the TFT substrate side alignment mark 25 are symmetrically inclined in left and right opposite sides 57, 59.
The V-shaped notch 61 intersecting with the mark is formed except for the lens forming material. In the center of the base 55, a square-shaped punched hole 63 that is divided into equal areas by the cross-shaped TFT substrate-side alignment marks 25 and that is rotated by 90 ° with respect to the base 55, for example, is formed of a lens forming material. It is formed excluding. Therefore, since the resin 7 does not intervene in the V-shaped cutout portion 61 and the hole 63, the entered light is transmitted without being refracted.

The alignment mark 5 constructed as described above
In order to perform alignment using the alignment mark 1, the microlens alignment mark 53 is superimposed on the TFT substrate alignment mark 25 as shown in FIG. 5, and the V-shaped notch of the microlens alignment mark 53 is formed as shown in FIG. This is performed based on the positional relationship between 61 and the linear portion 29 of the alignment mark 25 on the TFT substrate side. That is, the linear portion 29
And the intersections P _A and P _{B of the} sloping sides 57 and 59 become horizontal,
Further, alignment is performed so that the horizontal distances L _A and L _B from the linear portion 29 to the left and right inclined sides 57 and 59 are equal at an arbitrary position of the linear portion 29.

The alignment mark 51 is formed by a hole 63 of the micro lens side alignment mark 53.
Alignment is also possible depending on the positional relationship between the alignment mark 25 and the TFT substrate side alignment mark 25. That is, the TFT substrate-side alignment mark 25 is superimposed on the hole 63 formed in the center of the microlens-side alignment mark 53, and the four areas S surrounded by the hole 63 are separated by the TFT substrate-side alignment mark 25. _A ,
S _B, S _C, aligned as S _D are equal.

In this alignment mark 51,
Like the alignment mark 31, the alignment on the TFT substrate side
Mark 25 is only base glass 1 and cover glass 13
Are located in the V-shaped notch 61 and the hole 63 made of
This means that a lens made of a lens-forming material
Of the TFT substrate due to the refraction of light that occurs when
The distortion and blur of the alignment mark 25 are eliminated, and the TF
Edge of T substrate alignment mark 25 is clearly visible
Will be acceptable. In addition, the linear portion 29 and the inclined sides 57 and 59
Intersection P with_A, P_B, The inclined sides 57, 5
Distance L to 9 _A, L_B, Four surrounded by holes 63
Area S_A, S_B, S_C, S_DEtc.
Location can be aligned.

In the first embodiment, the TF
The T-substrate-side alignment mark 25 is not limited to the cross shape, and the same effects as described above can be obtained even if the T-substrate-side alignment mark 25 has any shape as long as it is similar to the similar shape portion 39. In the alignment mark 31 of the second embodiment described above, the V-shaped notch 61 and the punched hole 63 are formed in one microlens-side alignment mark 53. Only the notch 61,
Alternatively, only the hole 63 may be formed alone. Further, in the above-described second embodiment, the case where the TFT substrate side alignment mark 25 has a cross shape has been described as an example.
It may be composed of two or more linear portions that intersect so that the angles formed by adjacent linear portions are all equal.

[0019]

As described above in detail, according to the alignment mark according to the present invention, since the microlens-side alignment mark is formed with a similar shape excluding the lens forming material, the alignment mark on the TFT substrate is not required during alignment. The alignment mark is located at a similar shape portion composed of only the base glass and the cover glass, and distortion and blurring of the alignment mark on the TFT substrate side due to refraction of light are eliminated, so that the alignment mark on the TFT substrate side can be clearly recognized. As a result,
Using the alignment mark on the musculo-lens side formed at the same time as the lens portion, easy and highly accurate alignment can be performed. In addition, according to the alignment mark having the V-shaped notch, the TFT substrate-side alignment mark can be clearly recognized, as in the above-described effect.
Alignment can be performed based on the intersection between the linear portion of the TFT substrate side alignment mark and the inclined side of the V-shaped cutout, and the horizontal distance from the linear portion to the left and right inclined sides. Furthermore,
According to the alignment mark having the hole formed therein, similarly to the effect described above, the alignment mark on the TFT substrate side can be clearly recognized, and the area surrounded by the hole separated by the alignment mark on the TFT substrate side can be reduced. Alignment can be performed by the ratio.

[Brief description of the drawings]

FIG. 1 is an enlarged view of a main part of a microlens array on which an alignment mark is formed according to a first embodiment of the present invention.

FIG. 2 is a diagram of a microlens-side alignment mark according to the first embodiment of the present invention.

FIG. 3 is an explanatory view showing how an alignment mark looks when the microlens array of FIG. 1 is bonded to a TFT substrate.

FIG. 4 is a diagram of a microlens-side alignment mark according to a second embodiment of the present invention.

FIG. 5 is an explanatory diagram showing how alignment marks look when a microlens array and a TFT substrate are bonded together.

FIG. 6 is an enlarged view of a part j in FIG. 5;

FIG. 7 is an enlarged view of a portion k in FIG. 5;

FIG. 8 is an explanatory diagram illustrating a method for manufacturing a microlens array.

FIG. 9 is an explanatory view showing another method of manufacturing the microlens array.

FIG. 10 is a diagram of a conventional microlens alignment mark.

FIG. 11 is a plan view of a TFT substrate on which a TFT substrate-side alignment mark is formed.

FIG. 12 is an enlarged view of a TFT substrate side alignment mark.

FIG. 13 is an explanatory diagram showing the appearance of both alignment marks when a microlens and a TFT substrate are bonded together.

[Explanation of symbols]

1 base glass 7, 17 resin (lens forming material)
9 Lens part 25 TFT substrate side alignment mark 27 TF
T-substrate 29 Linear part 31, 51 Alignment mark 33 Micro lens array 35, 53 Micro lens side alignment mark 39 Similar part 57, 59 Inclined side 61 V-shaped notch 63 Drilled hole

Claims (3)

[Claims] 1. An alignment mark of a liquid crystal display device for aligning a TFT substrate and a microlens array in which a lens portion is formed on a base glass with a lens forming material different from the base glass, the alignment mark being formed on the TFT substrate. A TFT substrate-side alignment mark having a shape, and a similar-shaped portion formed on the microlens array using the lens-forming material at a position corresponding to the TFT substrate-side alignment mark and larger than the TFT substrate-side alignment mark. An alignment mark for a liquid crystal display device, comprising: a microlens-side alignment mark formed excluding a lens-forming material. 2. An alignment mark of a liquid crystal display device for aligning a TFT substrate and a microlens array in which a lens portion is formed on a base glass with a lens forming material different from the base glass, wherein the alignment mark is formed on the TFT substrate. A TFT substrate-side alignment mark having a linear portion, and formed in the microlens array using the lens-forming material at a position corresponding to the TFT substrate-side alignment mark, and the linear portion is symmetrically reversed in left and right directions. A V-shaped cutout portion intersecting the inclined side of the microlens-side alignment mark formed excluding the lens-forming material. 3. An alignment mark of a liquid crystal display device for aligning a TFT substrate and a microlens array in which a lens portion is formed on a base glass with a lens forming material different from the base glass, wherein the alignment mark is one linear portion or an adjacent portion. A TFT substrate-side alignment mark formed on the TFT substrate by a plurality of linear portions that intersect so that the angles formed by the linear portions are all equal; and forming the lens at a position corresponding to the TFT substrate-side alignment mark. The microlens array is made of a material, and the microlens-side alignment mark is formed by removing the lens-forming material and forming a hole portion divided into equal areas by the TFT substrate-side alignment mark. An alignment mark for a liquid crystal display device.