JPH10300669A - Equipment for measuring quantity of scattering light - Google Patents

Equipment for measuring quantity of scattering light

Info

Publication number
JPH10300669A
JPH10300669A JP13049397A JP13049397A JPH10300669A JP H10300669 A JPH10300669 A JP H10300669A JP 13049397 A JP13049397 A JP 13049397A JP 13049397 A JP13049397 A JP 13049397A JP H10300669 A JPH10300669 A JP H10300669A
Authority
JP
Japan
Prior art keywords
light
scattered light
scattered
amount
scattering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13049397A
Other languages
Japanese (ja)
Inventor
Jiro Shibata
治郎 柴田
Masahiko Ito
正彦 伊藤
Katsuyoshi Ito
勝良 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Giken Co Ltd
Original Assignee
Nippon Giken Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Giken Co Ltd filed Critical Nippon Giken Co Ltd
Priority to JP13049397A priority Critical patent/JPH10300669A/en
Publication of JPH10300669A publication Critical patent/JPH10300669A/en
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PROBLEM TO BE SOLVED: To realize a measurement responsive to high rate variation in the quantity of scattering light while suppressing the effect of optical noise by measuring a specific instantaneous value, the peak value of an electric signal, corresponding to the quantity of scattering light in synchronism with the period of irradiating light. SOLUTION: The equipment for measuring the quantity of scattering light being employed as a range finder, a roughness meter, a chrominance meter or an optical absorption meter comprises a laser diode light source LS for irradiating a light scattering part P1 with a light IL at a quantity of light Q varying at a period T and a frequency f, and a photodiode PD for converting a part of a scattering light S entering through an optical fiber F into a current. Output current from the photodiode PD is passed through a bandpass filter BF of frequency f and amplified to produce a voltage signal Vm and the instantaneous values V1, V2,... at the peak points W1, W2,... of the voltage signal Vm synchronized with the peak points m1, m2,... of the quantity of irradiating light Φ are measured as the quantity of scattering light. The shape at the light scattering part can be observed when an image processor is provided.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、照射光が光散乱箇
所から散乱する光量を測定する装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for measuring the amount of light scattered from a light scattering point.

【0002】[0002]

【従来の技術】従来、光散乱の度合を測定する場合は、
照射光に直流光を用いたり、また、光量が一定周波数で
変化する照射光を光散乱箇所に照射して、ここから散乱
してくる散乱光量を光電変換器で電気信号に変換した
後、前記周波数のバンドパスフィルタで濾過し、且つ、
ロ−パスフィルタを通して、前記電気信号の波形をほぼ
直流まで平滑化してからデ−タ採取して計測している。
2. Description of the Related Art Conventionally, when measuring the degree of light scattering,
Using DC light as the irradiation light, or irradiating the light scattering portion with the light amount changing at a constant frequency to the light scattering portion, and converting the scattered light amount scattered from here to an electric signal by a photoelectric converter, Filter with a frequency band pass filter, and
The waveform of the electric signal is smoothed to almost DC through a low-pass filter, and then data is sampled and measured.

【0003】[0003]

【発明が解決しようとする課題】従来の散乱光量測定装
置においては、照射光に直流光を用いた場合は光雑音に
よる測定ミスを生じ易く、また、前記光量が一定周波数
で変化する照射光を用いた場合は、この周波数より充分
低周波のロ−パスフィルタを用いて平滑化しているため
に、散乱光量の高速変化に応答する計測が難しい。
In the conventional scattered light amount measuring apparatus, when DC light is used as the irradiation light, a measurement error due to optical noise is apt to occur, and the irradiation light whose light amount changes at a constant frequency is used. When used, the measurement is smoothed using a low-pass filter having a frequency sufficiently lower than this frequency, so that it is difficult to measure in response to a high-speed change in the amount of scattered light.

【0004】本発明は、このような事情に対処されたも
ので、外部からの光雑音に影響され難く、且つ、散乱光
量の高速変化に応答する計測が可能な散乱光量測定装置
を提供することを目的とする。
The present invention has been made in view of the above circumstances, and provides a scattered light amount measuring apparatus which is hardly affected by external light noise and which can perform measurement in response to a high-speed change in scattered light amount. With the goal.

【0005】[0005]

【課題を解決するための手段】請求項1記載の発明は、
照射光を光散乱する箇所に照射して、この箇所からの光
散乱の度合を散乱光量から計測する場合において、光量
が一定周波数で変化する照射光を光散乱箇所に照射し
て、ここから散乱してくる散乱光量を光電変換器で電気
信号に変換した後、前記周波数のバンドパスフィルタで
濾過し、且つ、照射光の周期に同期させた周期でこの電
気信号のピ−ク値などの特定の瞬時値を測定して散乱光
量を計測するようにしたことを特徴とする。
According to the first aspect of the present invention,
When irradiating the light to the light scattering location and measuring the degree of light scattering from this location from the amount of scattered light, irradiate the light scattering location with the light whose light quantity changes at a constant frequency and scatter After converting the scattered light amount into an electric signal by a photoelectric converter, the scattered light amount is filtered by a band-pass filter having the above-mentioned frequency, and the peak value of the electric signal is specified in a cycle synchronized with the cycle of the irradiation light. The instantaneous value is measured to measure the amount of scattered light.

【0006】前記の電気信号は、光散乱の度合すなわち
散乱光量の代用特性を呈するものとされている。
The above-mentioned electric signal is assumed to exhibit a degree of light scattering, that is, a substitute characteristic of the amount of scattered light.

【0007】この発明では、前記電気信号を特定の周波
数帯域で濾過しているので、この周波数以外の外部雑音
に影響され難く、また、前記瞬時値を測定する周期と比
較して長い時定数のロ−パスフィルタを用いた前記電気
信号の平滑化は行わず、前記照射光量の周期に同期させ
て電気信号のピ−ク値などの特異な瞬時値を測定するよ
うにしているので、散乱光量の高速変化に応答する計測
が可能となる。
In the present invention, since the electric signal is filtered in a specific frequency band, the electric signal is hardly affected by external noises other than this frequency, and has a longer time constant than the period of measuring the instantaneous value. The electric signal is not smoothed using a low-pass filter, but a unique instantaneous value such as a peak value of the electric signal is measured in synchronization with the cycle of the irradiation light amount. Measurement that responds to high-speed changes in

【0008】請求項2記載の発明は、光散乱する箇所と
散乱光量を測定する箇所との距離が関係付けられている
測距計として設定されていること特徴とする。
The invention according to claim 2 is characterized in that the distance measuring device is set as a distance measuring device in which a distance between a light scattering portion and a portion where the amount of scattered light is measured is related.

【0009】この発明では、光散乱する箇所から離れる
に従い散乱光量が低減する関係を利用したものであり、
散乱光量から光散乱する箇所と散乱光量を測定する箇所
までの距離が測定される。
In the present invention, the relationship that the amount of scattered light decreases as the distance from the portion where light is scattered is reduced, is utilized.
The distance from the scattered light amount to the position where the light is scattered and the position where the scattered light amount is measured is measured.

【0010】請求項3記載の発明は、光散乱する箇所の
粗さと散乱光量とが関係付けられている粗さ計として設
定されていること特徴とする。
The invention according to claim 3 is characterized in that the roughness is set as a roughness meter in which the roughness of a portion where light is scattered and the amount of scattered light are related.

【0011】この発明では、光散乱する箇所の粗さによ
って散乱光量が異なることを利用したものであり、散乱
光量から光散乱する箇所の粗さが測定される。
The present invention utilizes the fact that the amount of scattered light varies depending on the roughness of the portion where light is scattered, and the roughness of the portion where light is scattered is measured from the amount of scattered light.

【0012】請求項4記載の発明は、光散乱する箇所の
色あるいは色濃淡と散乱光量とが関係付けられている色
差計として設定されていること特徴とする。
The invention according to claim 4 is characterized in that it is set as a color difference meter in which the color or shade of light at which light is scattered and the amount of scattered light are related.

【0013】この発明では、光散乱する箇所の色あるい
は色濃淡の違いによって散乱光量が異なることを利用し
たものであり、散乱光量から光散乱する箇所の色差ある
いは色濃淡が測定される。
The present invention utilizes the fact that the amount of scattered light varies depending on the color or the color density of the light scattering portion, and the color difference or color density of the light scattering portion is measured from the scattered light amount.

【0014】請求項5記載の発明は、光散乱する箇所の
光吸収率と散乱光量とが関係付けられている光吸収率計
として設定されていること特徴とする。
The invention according to claim 5 is characterized in that it is set as a light absorptivity meter in which the light absorptance of a portion where light is scattered and the amount of scattered light are related.

【0015】この発明では、光散乱する箇所の光吸収率
の違いによって散乱光量が異なることを利用したもので
あり、散乱光量から光散乱する箇所の光吸収率が測定さ
れる。
The present invention utilizes the fact that the amount of scattered light differs depending on the difference in the light absorptance of the portion where light is scattered, and the light absorptance of the portion where light is scattered is measured from the amount of scattered light.

【0016】請求項6記載の発明は、光散乱箇所の画像
デ−タを併せて取り込める画像処理装置を備えているこ
と特徴とする。
According to a sixth aspect of the present invention, there is provided an image processing apparatus capable of simultaneously taking in image data of a light scattering portion.

【0017】この発明では、光ファイバやCCDカメラ
などで構成される画像処理装置を備えているので、散乱
光量と画像デ−タを併せて取り込むことができる。
According to the present invention, since the image processing apparatus including the optical fiber and the CCD camera is provided, the scattered light amount and the image data can be taken together.

【0018】[0018]

【発明の実施の形態】以下、本発明の実施の形態の詳細
を図面に基づいて説明する。図1は、本発明の散乱光量
測定装置の一実施の形態を示すものである。レ−ザダイ
オ−ド光源LSから周期T、周波数fで経過時間tとと
もに変化している照射光量Φの照射光ILが、光散乱箇
所P1に照射されると、散乱光Sの一部が散乱光量φで
距離lの位置にある光ファイバFの端面P2から入射し
てフォトダイオ−ドPD上に集光され電流に変換され
る。この電流に混入している余計な周波数の信号は、周
波数fのバンドパスフィルタBFで除去された後、増幅
器APで増幅されて電圧信号Vmとなる。図において、
電圧信号Vmのピ−ク箇所W1,W2,・・・・・Wn
は、照射光量Φのピ−ク箇所m1,m2・・・・mnと
タイミングが合わせられており、照射光量Φの瞬時値n
1,n2,・・・・nnの周期Tと同一周期Tで電圧信
号Vmの瞬時値v1,v2,・・・・vnが測定され
る。従って、これらの瞬時値が光散乱の度合を表し、測
定できる速度は照射光源の周波数fまで上げられる。
Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 shows an embodiment of a scattered light amount measuring apparatus according to the present invention. When the irradiation light IL of the irradiation light amount Φ changing with the period T and the frequency f with the elapsed time t from the laser diode light source LS is applied to the light scattering portion P1, a part of the scattered light S becomes the scattered light amount. The light is incident on the end face P2 of the optical fiber F at the position of the distance l by φ and is condensed on the photodiode PD and converted into a current. An extra frequency signal mixed into this current is removed by a band-pass filter BF of frequency f, and then amplified by an amplifier AP to become a voltage signal Vm. In the figure,
Peak points W1, W2,... Wn of the voltage signal Vm
Is synchronized with the peak positions m1, m2,... Mn of the irradiation light amount Φ, and the instantaneous value n of the irradiation light amount Φ
The instantaneous values v1, v2,... Vn of the voltage signal Vm are measured at the same cycle T as the cycle T of 1, n2,. Therefore, these instantaneous values indicate the degree of light scattering, and the measurable speed is increased to the frequency f of the irradiation light source.

【0019】前記の例では、電圧信号Vmをロ−パスフ
ィルタを通さず周期Tの連続サンプリングで瞬時値を測
定しているが、サンプリング周期を3Tのとびとびにす
るとか、あるいは、サンプリング周期はTで照射光の周
期をT/5として、それぞれ3TあるいはTより短い時
定数のロ−パスフィルタを通して測定した場合は、電圧
信号Vmに重畳している高調波雑音が除去され、且つ、
散乱光量の変化に対して3T,Tの周期でデ−タが得ら
れる。
In the above example, the instantaneous value is measured by continuous sampling of the cycle T without passing the low-pass filter through the voltage signal Vm. However, the sampling cycle may be 3T or the sampling cycle may be T. When the measurement is performed through a low-pass filter having a time constant of 3T or a time shorter than T, where T / 5 is the cycle of the irradiation light, harmonic noise superimposed on the voltage signal Vm is removed, and
Data is obtained with a period of 3T, T for a change in the amount of scattered light.

【0020】図において、発振器OC、変調器MD、電
源PW、色フィルタQ、レンズL、光散乱面P0、電流
電圧変換器I/V、出力装置Oが付いており、出力装置
Oには、出力機能に合わせたCPUやA/D・D/Aコ
ンバ−タ、表示器などが装備されている。
In the figure, an oscillator OC, a modulator MD, a power supply PW, a color filter Q, a lens L, a light scattering surface P0, a current / voltage converter I / V, and an output device O are provided. A CPU, an A / D / D / A converter, a display and the like are provided according to the output function.

【0021】図2は、従来の散乱光量測定装置の一実施
の形態を示すものであり、散乱光量による電圧信号Vm
が周期Tより充分長い回路時定数を持つロ−パスフィル
タLFで平滑化されているので、例えば、散乱光量が周
期Tより短時間に変化している場合、これに応答して計
測することが難しい。
FIG. 2 shows an embodiment of a conventional scattered light amount measuring apparatus, in which a voltage signal Vm based on the scattered light amount is shown.
Is smoothed by a low-pass filter LF having a circuit time constant sufficiently longer than the period T. For example, when the amount of scattered light changes in a shorter time than the period T, measurement can be performed in response to this. difficult.

【0022】図3は、請求項2に係るものであり、距離
lnとファイバ端面P2から入射する散乱光量に依る電
圧信号の瞬時値vnとを予め検量線で関係付けて出力装
置Oに記録しておくと、電圧信号の瞬時値vnの測定値
から出力装置内の計算機などによって、即座に距離ln
を計測するとが可能な測距計が供給される。
FIG. 3 relates to claim 2 in which the distance ln and the instantaneous value vn of the voltage signal depending on the amount of scattered light incident from the fiber end face P2 are recorded in the output device O in advance by correlating them with a calibration curve. In this case, the distance ln is immediately calculated from the measured value of the instantaneous value vn of the voltage signal by a computer or the like in the output device.
A range finder capable of measuring the distance is provided.

【0023】光照射位置をCCDやPSDで読み取って
距離を計測する測距計と比較してみると、ここでは、光
ファイバを光路に用いているので、寸法が極めて小型で
あり、また、高温状態や有毒雰囲気など厳しい環境での
使用も可能である。
Compared with a distance meter that measures the distance by reading the light irradiation position with a CCD or PSD, the size is extremely small because an optical fiber is used in the optical path. It can be used in harsh environments such as conditions and toxic atmospheres.

【0024】さらに、高周波で作動するレ−ザダイオ−
ドとPINフォトダイオ−ドを用いているために照射光
量の高周波変調が可能となるので、桁違いの高速測定や
照度が極端に変動する環境での使用も可能である。
Further, a laser diode operating at a high frequency
The use of a PIN and a photodiode allows high-frequency modulation of the amount of irradiated light, so that it can be used in an extremely high-speed measurement and in an environment where the illuminance varies extremely.

【0025】F1 、F2 は光モニタの一部であり、それ
ぞれが光取り込み口になっていて光源光量の較生用光フ
ァイバと散乱光量の較生用光ファイバである。
F 1 and F 2 are part of an optical monitor, each of which serves as a light taking-in port.

【0026】図4は、請求項3に係るものであり、光散
乱する箇所P1と光ファイバFの端面P2の距離lを一
定に保ちながら粗さ測定物を矢印の方向に移動させると
粗さR1 とR2 が測定されるものである。
FIG. 4 shows a third embodiment of the present invention, in which the roughness measurement object is moved in the direction of the arrow while maintaining the distance l between the light scattering portion P1 and the end face P2 of the optical fiber F constant. R 1 and R 2 are to be measured.

【0027】すなわち、測定対象物の粗さRnとファイ
バ端面P2から入射する散乱光量による電圧信号の瞬時
値vnとを予め検量線で関係付けておいて、電圧信号の
瞬時値vnを測定して粗さRnを計測する粗さ計であ
る。
That is, the roughness Rn of the object to be measured and the instantaneous value vn of the voltage signal due to the amount of scattered light incident from the fiber end face P2 are previously associated with a calibration curve, and the instantaneous value vn of the voltage signal is measured. This is a roughness meter for measuring the roughness Rn.

【0028】図5は、請求項4に係るものであり、光散
乱する箇所P1と光ファイバFの端面P2の距離lを一
定に保ちながら色あるいは色濃淡の違う測定物を矢印の
方向に移動させると色によって散乱量が異なるので色C
1とC2の差あるいは色濃淡D1とD2が測定されるも
のである。
FIG. 5 relates to claim 4, in which the object having different colors or different shades is moved in the direction of the arrow while keeping the distance l between the light scattering portion P1 and the end face P2 of the optical fiber F constant. The color C
The difference between 1 and C2 or the color shades D1 and D2 are measured.

【0029】すなわち、測定対象物の色Cnあるいは色
濃淡Dnとファイバ端面P2から入射する散乱光量によ
る電圧信号の瞬時値vnとを予め検量線で関係付けてお
いて、電圧信号の瞬時値vnを測定して色Cnあるいは
色濃淡Dnを計測する色差計である。
That is, the color value Cn or the color density Dn of the object to be measured and the instantaneous value vn of the voltage signal due to the amount of scattered light incident from the fiber end face P2 are previously associated with a calibration curve, and the instantaneous value vn of the voltage signal is calculated. This is a color difference meter that measures color Cn or color density Dn.

【0030】図6は、請求項5に係るものであり、光散
乱する箇所P1と光ファイバFの端面P2の距離lを一
定に保ちながら光吸収率の違う測定物を矢印の方向に移
動させると光吸収率によって散乱量が異なるので光吸収
率E1 、E2 が測定されるものである。
FIG. 6 relates to claim 5, wherein a measured object having a different light absorptivity is moved in the direction of the arrow while keeping the distance l between the light scattering portion P1 and the end face P2 of the optical fiber F constant. Since the scattering amount differs depending on the light absorption rate and the light absorption rate, the light absorption rates E 1 and E 2 are measured.

【0031】すなわち、測定対象物の光吸収率Enとフ
ァイバ端面P2から入射する散乱光量による電圧信号の
瞬時値vnとを予め検量線で関係付けておいて、電圧信
号の瞬時値vnを測定して光吸収率Enを測定する光吸
収率計である。
That is, the instantaneous value vn of the voltage signal is measured by associating the light absorption rate En of the object to be measured with the instantaneous value vn of the voltage signal due to the amount of scattered light incident from the fiber end face P2 by a calibration curve in advance. This is a light absorption rate meter for measuring the light absorption rate En.

【0032】図7は、請求項6に係るものであり、ファ
イバ端面P2から入射した光がファイバ2本に分岐さ
れ、一方は、請求項1、2、3、4又は5記載の散乱光
量測定装置として用いており、他方は、光散乱箇所の画
像デ−タを取り込める画像処理装置Gが備わっているの
で、散乱光量などを計測しながら光散乱箇所の形態を観
測できる。
FIG. 7 relates to claim 6, wherein the light incident from the fiber end face P2 is split into two fibers, one of which is the scattered light amount measurement according to claim 1, 2, 3, 4 or 5. The other is provided with an image processing device G capable of taking in image data of a light scattering portion, so that the form of the light scattering portion can be observed while measuring the amount of scattered light.

【0033】本発明の実施の形態において、光学系の構
成は主に光ファイバの部分について説明したが、これに
限らずレンズや鏡などの光学部品をを測定対象に合わせ
て単独あるいは複数組み合わせて適宜使用することも可
能である。また、光源は、レ−ザ光を例に上げて説明し
たが、これに限らずLED光源や白色光源、あるいは、
2色以上の単色光源を組み合わせて用いることも可能で
ある。
In the embodiments of the present invention, the configuration of the optical system has mainly been described for the optical fiber. However, the present invention is not limited to this, and optical components such as lenses and mirrors may be used alone or in combination according to the object to be measured. It can be used as appropriate. Also, the light source has been described using laser light as an example. However, the present invention is not limited to this, and LED light sources, white light sources, or
It is also possible to use a combination of two or more monochromatic light sources.

【0034】なお、以上の各実施の形態においては、そ
れぞれの目的に応じた散乱光量測定装置及びその応用シ
ステムを説明してきたが、これらの例に限らず、上述し
たそれぞれ散乱光量測定装置を適宜組合せ、制御手段に
よってこれらの散乱光量測定装置に所定の関連性をもた
せるようにしてもよい。
In each of the embodiments described above, the scattered light amount measuring apparatus and its application system corresponding to each purpose have been described. However, the present invention is not limited to these examples, and the above-described scattered light amount measuring apparatuses may be appropriately used. The scattered light amount measuring device may be given a predetermined relationship by a combination and control means.

【0035】[0035]

【発明の効果】本発明によれば、照射光の周期に同期さ
せた周期で散乱光量に対応する電気信号のピ−ク値など
の特定の瞬時値を測定して光散乱の度合を計測するもの
で、高速性・正確性があり、且つ、小型の散乱光量測定
装置及びその応用システムが構築される。
According to the present invention, the degree of light scattering is measured by measuring a specific instantaneous value such as a peak value of an electric signal corresponding to the amount of scattered light in a cycle synchronized with the cycle of irradiation light. Therefore, a high-speed, accurate, and small-sized scattered light amount measuring apparatus and its application system are constructed.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の散乱光量測定装置の一実施の形態を示
す説明図である。
FIG. 1 is an explanatory diagram showing an embodiment of a scattered light amount measuring apparatus according to the present invention.

【図2】従来の散乱光量測定装置の一実施の形態を示す
説明図である。
FIG. 2 is an explanatory diagram showing an embodiment of a conventional scattered light amount measuring device.

【図3】本発明の実施例で測距計に適用した場合の説明
図である。
FIG. 3 is an explanatory diagram of a case where the present invention is applied to a range finder in the embodiment.

【図4】本発明の実施例で粗さ計に適用した場合の説明
図である。
FIG. 4 is an explanatory diagram of a case where the present invention is applied to a roughness meter in an embodiment.

【図5】本発明の実施例で色差計に適用した場合の説明
図である。
FIG. 5 is an explanatory diagram when applied to a color difference meter in the embodiment of the present invention.

【図6】本発明の実施例で光吸収率計に適用した場合の
説明図である。
FIG. 6 is an explanatory diagram of a case where the present invention is applied to a light absorptometer in an embodiment.

【図7】本発明の実施例で画像処理装置を備えた場合の
説明図である。
FIG. 7 is an explanatory diagram in a case where an image processing apparatus is provided in the embodiment of the present invention.

【符号の説明】[Explanation of symbols]

LS レ−ザダイオ−ド光源 T 周期 f 周波数 t 経過時間 Φ 照射光量 IL 照射光 P1 光散乱箇所 S 散乱光 φ 散乱光量 l、ln 距離 F、F12 光ファイバ P2 端面 PD フォトダイオ−ド BF バンドパスフィルタ AP 増幅器 Vm 電圧信号 W1〜Wm 電圧信号のピ−ク箇所 m1〜mn 照射光量のピ−ク箇所 n1〜nn 照射光量の瞬時値 v1〜vn 電圧信号の瞬時値 OC 発振器 MD 変調器 PW 電源 Q 色フィルタ L レンズ PO 光散乱面 I/V 電流電圧変換器 O 出力装置 LF ロ−パスフィルタ Rn、R12 粗さ Cn、C12 色 Dn、D12 色濃度 En、E12 光吸収率 G 画像処理装置LS laser diode light source T period f frequency t elapsed time Φ irradiation light amount IL irradiation light P1 light scattering point S scattered light φ scattered light amount 1, ln distance F, F 1 , 2 optical fiber P2 end face PD photo diode BF Band pass filter AP amplifier Vm Voltage signal W1 to Wm Peak position of voltage signal m1 to mn Peak position of irradiation light amount n1 to nn Instantaneous value of irradiation light amount v1 to vn Instantaneous value of voltage signal OC oscillator MD modulator PW power Q color filter L lens PO light scattering surface I / V voltage converter O output device LF Russia - pass filter Rn, R 1, 2 roughness Cn, C 1, 2-color Dn, D 1, 2-color density En, E 1, 2 optical absorptance G image processing apparatus

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 照射光を光散乱する箇所に照射して、こ
の箇所からの光散乱の度合を散乱光量から計測する場合
において、光量が一定周波数で変化する照射光を光散乱
箇所に照射して、この箇所から散乱してくる散乱光量を
光電変換器で電気信号に変換した後、前記周波数のバン
ドパスフィルタで濾過し、且つ、照射光の周期に同期さ
せた周期でこの電気信号のピ−ク値などの特定の瞬時値
を測定して散乱光量を計測するようにしたことを特徴と
する。
When irradiating light to a light scattering location and measuring the degree of light scattering from this location from the amount of scattered light, irradiation light whose light quantity changes at a constant frequency is applied to the light scattering location. After converting the amount of scattered light scattered from this portion into an electric signal by a photoelectric converter, the scattered light amount is filtered by a band-pass filter of the above-mentioned frequency, and the electric signal is pipied at a period synchronized with the period of irradiation light. The characteristic is that a specific instantaneous value such as a peak value is measured to measure the amount of scattered light.
【請求項2】 光散乱する箇所と散乱光量を測定する箇
所との距離が関係付けられている測距計として設定され
ていること特徴とする請求項1記載の散乱光量測定装
置。
2. The scattered light amount measuring apparatus according to claim 1, wherein the distance between the light scattering part and the scattered light amount measuring part is set as a distance meter.
【請求項3】 光散乱する箇所の粗さと散乱光量とが関
係付けられている粗さ計として設定されていること特徴
とする請求項1記載の散乱光量測定装置。
3. The scattered light amount measuring device according to claim 1, wherein the scattered light amount measuring device is set as a roughness meter that associates the roughness of the light scattering portion with the scattered light amount.
【請求項4】 光散乱する箇所の色あるいは色濃淡と散
乱光量とが関係付けられている色差計として設定されて
いること特徴とする請求項1記載の散乱光量測定装置。
4. The scattered light amount measuring device according to claim 1, wherein the scattered light amount measurement device is set as a color difference meter that associates the scattered light amount with the color or color shading of the light scattering portion.
【請求項5】 光散乱する箇所の光吸収率と散乱光量と
が関係付けられている光吸収率計として設定されている
こと特徴とする請求項1記載の散乱光量測定装置。
5. The scattered light amount measuring device according to claim 1, wherein the scattered light amount measuring device is set as a light absorptance meter that associates the light absorptance of a portion where light is scattered with the scattered light amount.
【請求項6】 光散乱箇所の画像デ−タを併せて取り込
める画像処理装置を備えていること特徴とする請求項
1、2、3、4又は5記載の散乱光量測定装置。
6. The scattered light amount measuring device according to claim 1, further comprising an image processing device capable of taking in image data of a light scattering portion.
JP13049397A 1997-05-01 1997-05-01 Equipment for measuring quantity of scattering light Pending JPH10300669A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13049397A JPH10300669A (en) 1997-05-01 1997-05-01 Equipment for measuring quantity of scattering light

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13049397A JPH10300669A (en) 1997-05-01 1997-05-01 Equipment for measuring quantity of scattering light

Publications (1)

Publication Number Publication Date
JPH10300669A true JPH10300669A (en) 1998-11-13

Family

ID=15035589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13049397A Pending JPH10300669A (en) 1997-05-01 1997-05-01 Equipment for measuring quantity of scattering light

Country Status (1)

Country Link
JP (1) JPH10300669A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100580202B1 (en) 2004-04-30 2006-05-16 삼성전자주식회사 Method and system for evaluating the scattering properties of transparency image
CN104007069A (en) * 2014-05-20 2014-08-27 中国科学院合肥物质科学研究院 Differential optical absorption spectroscopy measurement system based on off-axis paraboloid mirror

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100580202B1 (en) 2004-04-30 2006-05-16 삼성전자주식회사 Method and system for evaluating the scattering properties of transparency image
CN104007069A (en) * 2014-05-20 2014-08-27 中国科学院合肥物质科学研究院 Differential optical absorption spectroscopy measurement system based on off-axis paraboloid mirror
CN104007069B (en) * 2014-05-20 2017-04-19 中国科学院合肥物质科学研究院 Differential optical absorption spectroscopy measurement system based on off-axis paraboloid mirror

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