JPH10300631A - Array element inspection method and device therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To inspect the relative position of an array element with high resolution, in a wide range, and at relatively low costs. SOLUTION: Light from each fiber 1b of a fiber array 1 are made incident on a lens array 2 in which optical axes corresponding to each fiber 1b can be arranged substantially in parallel, and extracted as substantially parallel lights from this. The parallel lights from the lens array 2 are image-formed at substantially the same point by an image forming lens 3. The image-formed images of the fibers 1b are photographed by a CCD camera 4, and the relative position of each element is calculated from the photographic signal by a computer 5. Then, the validity of the fiber array 1 can be judged from a deviation value from the same point.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for inspecting an array element in which a plurality of elements are arranged in a predetermined arrangement and an apparatus for inspecting an array element, and is particularly suitable for inspecting the position of a fiber in a fiber array block. About things.

[0002]

2. Description of the Related Art Conventional array element inspection methods include:
For example, photograph the entire array element with a CCD camera, etc.
The position of each element has been determined by performing image processing on this photographing signal. Alternatively, each element is detected by a moving stage, and the relative position of the element is obtained from the moving amount of the stage.

[0003]

The conventional inspection method has been configured as described above, but in recent years, the miniaturization of elements has progressed and the positional accuracy of elements has been required to be 1 μm or less.

[0004] In this regard, in image processing using a CCD camera,
In order to obtain a high resolution, the imaging range is limited in order to directly image the plurality of elements as they are.
In order to obtain a resolution of μm, the range is limited to several tens μm.

On the other hand, when a moving stage is used, it is possible to expand the measurement range, but the stage must be moved with high accuracy, so that the inspection apparatus becomes very expensive.

SUMMARY OF THE INVENTION An object of the present invention is to provide an array element inspection method and an array element inspection apparatus capable of solving the problems of the prior art and inspecting the position of the array element with high resolution over a wide range and relatively inexpensively. Is to do.

[0007]

To achieve the above object, a first array element inspection method of the present invention detects the positions of a plurality of elements arranged in an array using optical detection means. Method, wherein the light from the plurality of elements,
An optical axis corresponding to each element is taken out by a lens array having a plurality of lenses arranged substantially parallel to each other, and light from each lens of the lens array is formed into an image in a light receiving area of the detection means by an imaging lens. , An image of the formed element is detected, and the position of each element is obtained from the detection signal.

Since the light of a plurality of elements is formed into an image in the light receiving area of the detecting means, the inspection can be performed over a wide area at a high resolution and the measurement can be performed at a relatively low cost, as compared with a method in which the whole of the plurality of elements is directly photographed. it can. If there is no error in the measurement system, such as a case where there is no pitch error in the plurality of elements, the images of the plurality of elements are formed at predetermined positions (the same point, etc.) in the light receiving area of the detecting means. In the case where an image is formed, an image is formed shifted from the predetermined position, and the quality of the array element can be easily determined from the shift amount.

In a second array element inspection method according to the present invention, the plurality of elements have optical axes substantially parallel to each other, and the i-th element (i = 1 to N, i) in a plane perpendicular to the optical axis. N is the above first array element inspecting method for detecting the position of the array elements arranged in an array as the coordinates of the elements of the element number of) is expressed as (Xo _i, Yo _i), said plurality corresponding to each of the elements, a plurality of lenses having a focal length f ₁ equal to optical axis substantially parallel to each other, the coordinate of the optical axis of the i-th lens in a plane perpendicular to the optical axis of each lens The lens array includes a lens array arranged as (Xl _i , Yl _i ) and an imaging lens having a focal length f ₂ for imaging light from each lens of the lens array.

When an image of each element is formed by a lens array and an imaging lens on a detection surface in a light receiving area of the detection means perpendicular to an optical axis of a lens constituting the lens array. The arrangement of the lens array and the imaging lens with respect to the plurality of elements satisfies the relationships of the following equations (1) to (3), and light from the i-th element among the plurality of elements is transmitted to the lens array. The extracted light is extracted by an i-th lens, the extracted light is formed by an imaging lens at a desired position (Xs _i , Ys _i ) on the detection surface, and the formed image of each element is detected. The position of each element is obtained from the detection signal.

[0011] _{Xo i - (k × Xl i} ) = Xs i / M (1) Yo i - (k × Yl i) = Ys i / M (2) η = {(k-1) × (β + ξ) - 1} × β / {ξ × (k-1) -1} (3) However, k: each element, the distance between the first principal point of the lens in the lens array corresponding to respective devices at f ₁ Divided value β: Value obtained by dividing focal length f ₂ of the imaging lens by f ₁ ξ: Focal length f ₁ and focal length f _{1 based} on the distance between the second principal point of each lens of the lens array and the first principal point of the imaging lens the value the distance minus f ₂ is divided by f ₁ eta: value the distance between the second principal point and the detection surface of the imaging lens divided by f ₁ M: magnification of the optical system consisting of a lens array and an imaging lens And expressed as M = −β / {1+ (1-k) ×}. X, Y axes: have a direction perpendicular to the direction of the optical axis (Z-axis direction) of the lens constituting the lens array. And orthogonal to each other That a coordinate _{axis, (Xo i, Yo i)} , (Xl i, Y
l _i ) and (Xs _i , Ys _i ) are also based on the common X and Y coordinate axes. As described above, the image of each element can be formed at an arbitrary position on the inspection surface. Can be observed. Further, by determining the parameters in the above equation (3), the magnification of the optical system can be changed even when lenses having the same focal length are used, and the erect and inverted element images can be obtained by changing the sign of the magnification. Can be freely selected.

In the second array element inspection method,
If the light from each element is focused on substantially the same point on the detection surface, the measurement system can be configured without any moving parts, and highly accurate position detection can be performed. Further, when the optical system including the lens array and the imaging lens is arranged to be an afocal system,
ξ = 0, and the magnification M does not depend on k and is not affected by the error of k, so that it is hardly affected by the error, and accurate measurement can be performed. Further, in the first and second array element inspection methods, when light from the array element is taken out as substantially parallel light by the lens array (that is, when tandem arrangement of k = 1), an image is formed with the lens array. Since the light becomes parallel light between the lens and the lens, an accurate measurement system can be constructed which is not affected by the size of ξ and further has no influence of errors. Further, by setting ξ = 0 and k = 1,
More accurate measurement becomes possible.

A first array element inspection apparatus according to the present invention is an apparatus for carrying out the first array element inspection method, wherein the array element inspection apparatus detects the positions of a plurality of elements arranged in an array. In the apparatus, a lens array having a plurality of lenses whose optical axes respectively corresponding to the plurality of elements are arranged substantially in parallel with each other, and forming an image of light from each lens of the lens array in a light receiving area of a detection unit At least one imaging lens for detecting the image of the element formed, and a calculation circuit for obtaining the position of each element from the detection signal of the detection means, the lens array, The imaging lens and the detection means are arranged so as to form an image of light from each lens of the lens array in a light receiving area of the detection means.

The image of the element is preferably taken by, for example, a CCD camera or detected by a split type photodiode. Since the light of a plurality of elements is formed into an image in the light receiving region of the detecting means, it is possible to provide a measuring system having no movable part including a lens array, an imaging lens, a detecting means, and an arithmetic circuit. Yes, the position can be detected with high accuracy.

A second array element inspection apparatus according to the present invention is an apparatus for implementing the second array element inspection method, wherein a plurality of elements have optical axes substantially parallel to each other, The ith (i = 1) in a plane perpendicular to the optical axis
ＮN, where N is the number of elements, the coordinates of the elements are (Xo _i , Yo)
_i ) In the first array element inspection apparatus for detecting the positions of array elements arranged in an array as represented by _i ), a focal length equal to an optical axis substantially parallel to each other and corresponding to each of the plurality of elements. a plurality of lenses having f ₁ is the coordinates (Xl _i, Yl _i) of the optical axis of the i-th lens in a plane perpendicular to the optical axis of each lens lens array arranged to be represented as When the light from the lens array, and a focal length of f ₂ imaging lens for forming in the plane of the detection surface of the light receiving region of vertical said detecting means with respect to the optical axis of the lens constituting the lens array Prepare.

Further, the arrangement of the lens array and the imaging lens with respect to the plurality of elements is set so as to satisfy the following equations (1) to (3). Is formed at a desired position (Xs _i , Ys _i ) on the detection surface by the i-th lens and the imaging lens in the lens array, and the formed image of each element is detected. And an arithmetic circuit for determining the position of each element from the detection signal of the detecting means.

[0017] _{Xo i - (k × Xl i} ) = Xs i / M (1) Yo i - (k × Yl i) = Ys i / M (2) η = {(k-1) × (β + ξ) - 1} × β / {ξ × (k-1) -1} (3) However, k: each element, the distance between the first principal point of the lens in the lens array corresponding to respective devices at f ₁ Divided value β: Value obtained by dividing focal length f ₂ of the imaging lens by f ₁ ξ: Focal length f ₁ and focal length f _{1 based} on the distance between the second principal point of each lens of the lens array and the first principal point of the imaging lens the value the distance minus f ₂ is divided by f ₁ eta: value the distance between the second principal point and the detection surface of the imaging lens divided by f ₁ M: magnification of the optical system consisting of a lens array and an imaging lens And expressed as M = −β / {1+ (1-k) ×}. X, Y axes: have a direction perpendicular to the direction of the optical axis (Z-axis direction) of the lens constituting the lens array. And orthogonal to each other That a coordinate _{axis, (Xo i, Yo i)} , (Xl i, Y
l _i ) and (Xs _i , Ys _i ) are also based on the common X and Y coordinate axes.

[0018]

Embodiments of the present invention will be described below.

FIG. 1 is a schematic view of the configuration of an array element inspection apparatus according to the present invention, which comprises a lens array 2, an imaging lens 3, a CCD camera 4, and a computer 5 as an arithmetic circuit having a display device.

The array element to be inspected is a fiber array 1 having a diameter of 125 μm arranged in a line at a pitch of 250 μm. FIG. 8 shows the appearance of a fiber array block 15 constituting the fiber array 1.

As an objective lens for converting the light from the fiber array 1 into parallel light, an integrated lens array 2 which is a refraction lens was used. Lens 2b constituting lens array 2
Of the pitch accuracy level of the fiber 1b of the fiber array 1
This is to ensure the same level. The lens array 2 is manufactured by etching a quartz substrate using a lithography technique, and has a pitch of 250 μm, a diameter of 246 μm, and a focal length.
2 mm. By using a lithography technique, a pitch error of 0.1 μm or less is obtained. The fiber end face 1a was set at the focal plane of the lens array 2.

The imaging lens 3 has a focal length of 40 mm and a diameter of 30
A CCD camera 4 as an image detecting means was installed at an image-side focal position using an achromatic lens of mm. The fiber end face images are formed by the corresponding lens arrays 2 and imaging lenses 3 in the light receiving area of the CCD camera 4, more specifically, at substantially the same point on the photographing surface. The magnification is determined by the ratio of the focal length between the lens array 2 and the imaging lens 3, and is 20 times in the present embodiment. The pixel size of the CCD camera 4 is
11 × 13μm, resolution per pixel 0.55 and 0.65μm
It is. Further, the image processing is performed by the computer 5 to perform the interpolation processing, and the resolution is 1/10 of the above value.
An image formation position is obtained by image processing in units of one pixel, the pixel unit is converted into a length unit based on the pixel size, and a relative position of the image formation position obtained in the length unit is obtained. If the fiber array 1 is accurately arranged at a pitch of 250 μm, the images of the fiber end faces are all formed at the same point, but if there is a pitch error in the fiber array 1, the shift amount is increased by 20 times. Image. This is processed by the computer 5 to determine the quality of the fiber array 1. The calculation results and the image of the fiber 1b are displayed on the display device of the computer 5.

In the above embodiment, the image formed by the imaging lens 3 is directly captured by the CCD camera 4. However, a magnifying optical system, for example, a lens may be interposed therebetween, so that the resolution can be further improved.

Alternatively, as shown in FIG.
A configuration in which the screen 16 is arranged on the image plane to photograph the image may be used. By capturing the image projected on the screen, a clearer image can be detected.

In the above embodiment, the focal point of the lens array 2 is located outside the lens substrate 2a constituting the lens array 2. However, the focal point is formed on the substrate surface, and the fiber array is formed. 1 to the lens substrate 2a
It may be configured so as to be in close contact with. This facilitates positioning and alignment at the time of setting the element to be measured. Each lens 1b corresponds to each fiber 1b.
Are arranged so as to have the same focal position, so that an image can be formed at the same point with a simple optical system.

In the above embodiment, the case where images of all the fibers 1b are formed simultaneously has been described. However, as shown in FIG. 3, for example, the light-shielding plate 6 provided with one pinhole 7 is connected to the fiber array 1. The light shielding plate 6 is provided between the lens array 2 and the lens array 2 so as to be movable in a direction orthogonal to the optical axis.
May be used to image the fibers 1b one by one. This makes it possible to measure the position of each fiber 1b. Note that a plurality of pinholes can be provided to perform position measurement in units of a plurality of fibers. The pinhole may be provided between the lens array 2 and the imaging lens 3.

Alternatively, as shown in FIG. 4, a wavelength filter 8 having a different wavelength for each fiber 1b is arranged in front of the lens array 2, and by using this wavelength filter 8, each fiber 1b can be distinguished by color. Become. (Note that the wavelength filter 8 may be disposed behind the lens array 2.) Further, as shown in FIG. 5, if a wavelength tunable filter 9 is used between the lens array 2 and the imaging lens 3, the transmission wavelength can be reduced. By controlling, even the monochrome CCD camera can identify the fiber 1b. The tunable filter 9 can be constituted by a liquid crystal filter. Instead of arranging the wavelength tunable filter 9 between the lens array 2 and the imaging lens 3 as described above, a wavelength tunable light source (not shown) is used for illuminating the element as illumination means for transmitting or reflecting the element. May be.

In the above embodiment, the case where a refraction type lens is used as the objective lens has been described. However, in order to obtain higher light collection efficiency, a diffraction type lens 10 as shown in FIG. May be. The use of the diffractive lens increases the degree of freedom in design as compared with the refractive lens. Further, an off-axis optical system that can obtain an image with better contrast and less fluctuation in light amount can be used. FIG. 6B is an example of an off-axis optical system using the binary lens 11, and the radius R of the binary lens 11 is set to about 2 of the lens 10 of FIG.
In order to increase the lens area, this is divided into a semicircular shape, and the semicircular binary lens 11
Are arranged such that the optical axes corresponding to the respective fibers are substantially parallel to each other and are alternately shifted left and right along a straight line connecting the optical axes. As described above, by using the binary lens 11 as an off-axis objective lens of the optical system, the F number can be increased, and a bright and high-resolution measurement can be realized.
The off-axis optical system may be a part of the lens array instead of the whole.

Although the object to be inspected can be applied to an opaque one, when the object to be inspected is an optical fiber that transmits light, light (monochromatic or white light) is incident from the opposite side of the inspection surface and the emitted light is coupled. By imaging, the position of the core can be detected more accurately. In particular, the structure can be simplified by using a beam position detecting means such as a split photodiode as a detecting means in this combination. For example, FIG.
As shown in FIG. 5, each optical fiber is formed into an image at the middle point (corresponding to the same point) of the four-division type photodiode 12, and the difference in the amount of light received from each optical fiber detected by each photodiode 12a. Is obtained by the comparator 13, and the result of the comparison is input to the arithmetic circuit 14, and the deviation of each optical fiber from the same point is inspected from the difference in the amount of received light. Thereby, the structure can be simplified as compared with the image processing, and the position can be detected at high speed and at low cost.

Next, another embodiment of the present invention will be described.
FIG. 9 is a diagram showing each parameter in the optical system of the array element inspection device. Also in this embodiment, an image of each fiber 21 of the fiber array to be inspected is formed by each corresponding lens 22 and imaging lens 23 of the lens array,
The position of the formed image of the fiber 21 is obtained using a CCD camera and a computer. In FIG. 9, one fiber 21 of the fiber array is shown.
And only one lens 22 of the lens array facing this.

The number of the fibers 21 of the fiber array arranged in a line is eight, and the coordinates of the _i- th fiber (i = 1 to 8, the fiber 21 at one end is the first) are represented by (Xo _i , Yo _i ). Further, the i-th coordinate of the i-th lens 22 of the lens array provided to face the fiber 21 and (Xl _i, Yl _i).

Further, for each fiber 21 of the fiber array, each lens 22 of the lens array and the imaging lens 23
Is set so as to substantially satisfy the relations of the following equations (1) to (3), light from the i-th fiber 21 is extracted by the i-th lens 22, and the extracted light is An image is formed at a desired position (Xs _i , Ys _i ) on the image plane. (Here, X-Y-axis has a direction perpendicular to the direction of the optical axis of the imaging lens 23 (Z axis direction), and a coordinate axis perpendicular to each other, (Xo _i, Yo _i), (Xl
_i, Yl _i) and (Xs _i, also the coordinates of Ys _i) are based on the common X-Y coordinate axes. _{) Xo i - (k × Xl} i) = Xs i / M (1) Yo i - (k × Yl i) = Ys i / M (2) η = {(k-1) × (β + ξ) -1} × β / {ξ × (k -1) -1} (3) However, k: each element, the distance between the first principal point of the lens in the lens array corresponding to each element divided by f ₁ Value β: value obtained by dividing the focal length f ₂ of the imaging lens by f ₁ ξ: focal length f ₁ and f _{2 based} on the distance between the second principal point of each lens of the lens array and the first principal point of the imaging lens. value distance divided by f ₁ minus the eta: value the distance between the second principal point and the detection surface divided by f ₁ of the image forming lens M: Yes in the magnification of the optical system consisting of a lens array and an imaging lens And magnification M = −β / {1+ (1-k) ×}. As described above, the distance in the Z-axis direction is
It is normalized by the focal length f ₁ of the. Equation (3) is
This satisfies the condition that the imaging point is constant even if the light from the element is not parallel to the Z axis but inclined.

In FIG. 9, the light ray indicated by the solid line is the ideal light ray trajectory when the light ray is arranged as designed, and the light ray indicated by the broken line is the light ray when the fiber 21 is displaced (at this time, The coordinates of the i-th fiber 21 are (X ′
o _i , Y ′ o _i )).

The fiber array of this embodiment is also the same as that shown in FIG.
As in the embodiment of FIG.
They are arranged at m pitches. The lens array has a pitch of 246 mm in diameter and a focal length of 3 mm.
It has a pitch of 0.1 μm or less by lithography technology. Further, in this embodiment, the end face of the fiber 21 is set to the focal plane of the lens 22 (hence, k = 1). Further, a lens having a focal length of 300 mm was used as the imaging lens 23, and a CCD camera was installed at the image side focal position. Furthermore, ξ is about -130
(Note that ξ can be determined irrespective of the expressions (1) to (3), and the optical system can be downsized by setting ξ to be negative.) The pixel size of the CCD is the same as in the above embodiment,
11 × 13μm, resolution per pixel is 0.11 and 0.13μm
Further, by performing an interpolation process by a computer, the resolution is set to 1/10 of the above value.

The end face image of each fiber 21 is formed at a substantially central position on the image pickup surface of the CCD camera by the corresponding lens 22 and imaging lens 23, respectively. Since the tandem arrangement is k = 1, the magnification M is equal to the lens 22 and the imaging lens 2.
The focal length is determined by the ratio f ₂ / f ₁ of 3, and in the present embodiment, the magnification is 100 times.

The fibers 21 of the fiber array are exactly 25
If the fibers 21 are arranged at a pitch of 0 μm, the images of the end faces of the fibers 21 are all formed at almost the same point, but if there is a pitch error in the fiber 21, the images are shifted by a distance 100 times the error amount. An image is formed (see equations (1) and (2)). (By setting k = 1, the error due to the optical system is 0.02
μm or less. In order to separate the image of each fiber 21, a slit is provided on the incident side of the fiber 21 so that light is incident on only one fiber 21 at a time,
By scanning this slit, the position of each fiber is sequentially detected, and image processing is performed by a computer to determine the quality of each fiber in the fiber array.

FIG. 10 shows an embodiment in which the arrangement of the lenses 22 of the lens array is adjusted so that end images of the fibers 21 are formed at different positions on the detection surface. In this embodiment, as shown in FIG. 10A, the lenses 22 of the lens array are arranged in the X-axis direction at a constant pitch of approximately 250 μm corresponding to each fiber 21 in the same manner as in the above embodiment. The position of the lens 22 is not exactly at a constant pitch, but eight lenses 22 are placed at this constant pitch position ((0 μm
m, 0 μm), (250 μm, 0 μm), (500 μm, 0
μm),... slightly offset in the X and Y directions. That is, the position coordinates of the first lens 22 are set to (0-15
μm, 10 μm), and the position coordinates of the second to eighth lenses 22 are respectively (250-15 μm, -10 μm).
m), (500-7.5 μm, 0 μm), (750 μm, 10 μm
m), (1000 μm, -10 μm), (1250 + 7.5 μm, 0 μm
m), (1500 + 15 μm, 10 μm), (1750 + 15 μm, -1
0 μm). Other conditions are the same as in the embodiment of FIG.

If each lens 22 is accurately arranged at a fixed pitch position and each fiber 21 is not displaced, the image of each fiber 21 is captured by the imaging surface (detection surface) of the CCD camera.
An image is formed at the center position of 30 (point C in FIG. 10B).
However, in this embodiment, as described above, each lens 2
Since the position 2 is displaced from the constant pitch position, the image 31 (32 is an image of the core) of the end face of each fiber 21 is dispersed and formed as shown in FIG. 10 (b). . For example, considering the image forming position of the first fiber 21, this fiber 21 (assuming no displacement)
Is shifted from the fixed pitch position by -15 μm in the X direction and +10 μm in the Y direction, and from the above equations (1) and (2), Xs ₁ = −100 × (X
o ₁ −Xl ₁ ), Ys ₁ = −100 × (Yo ₁ −Yl ₁ ), and −1.5 m in the X direction from the point C at the center position of the imaging surface 30.
An image is formed at a position shifted by +1.0 mm in the m and Y directions. In this manner, since the images 31 of the respective fibers are dispersed and formed on the imaging surface 30, eight images can be observed simultaneously,
There is no need to move the slit as in the above embodiment.

In the above embodiment, the imaging lens is 1
Although the number of lenses is one, a plurality of lenses may be combined to form an imaging lens. In this case, the present invention can be applied to a single imaging lens composed of a plurality of lenses.

In the above embodiment, the fiber arrays arranged at regular intervals have been described. However, the arrangement may be irregular, and the object to be inspected may be a semiconductor laser, a light emitting diode or the like other than the fiber. May be arranged.

[0041]

As described above in detail, according to the array element inspection method of the present invention, each array element is imaged at a predetermined position (substantially the same point or the like) or a desired arrangement in the light receiving region of the detecting means. Because of this, inspection can be performed over a wide range with high resolution, and the quality of the array element can be inspected relatively inexpensively from the amount of displacement of the formed element image. In particular, when the light of a plurality of elements is focused on substantially the same point, it can be easily determined whether or not there is a pitch error or the like in the plurality of elements based on the displacement of the images. Further, when an image of each element is formed in a desired arrangement on the inspection surface, a plurality of elements can be observed at one time.

According to the array element inspection apparatus of the present invention, the light of a plurality of elements is imaged at a predetermined position (substantially the same point or the like) or a desired arrangement in the light receiving area of the detecting means. It is possible to provide a measurement system having no movable part, which is composed of an array, an imaging lens, a detection means, and an arithmetic circuit, and highly accurate position detection can be realized with a simple structure.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram showing an embodiment of an array element inspection device of the present invention.

FIG. 2 is a schematic sectional view showing an embodiment in which a screen is arranged after an imaging lens.

FIG. 3 is a schematic configuration diagram showing an embodiment in which a light shielding plate provided with a pinhole is movably arranged in front of a lens array.

FIG. 4 is a schematic configuration diagram showing an embodiment of an array element inspection device in which a wavelength filter is arranged before a lens array.

FIG. 5 is a schematic configuration diagram showing an embodiment of an array element inspection apparatus in which a wavelength filter is arranged before a lens array and a wavelength variable filter is arranged after the lens array.

FIGS. 6A and 6B are front views showing an embodiment of an objective lens viewed from an optical axis direction, wherein FIG. 6A shows an optical system in a normal arrangement, and FIG. 6B shows an off-axis optical system.

FIG. 7 is a schematic configuration diagram showing an embodiment in which a split type photodiode is used as a detection unit.

FIG. 8 is a perspective view of a main part of an embodiment of a fiber array block to be inspected.

FIG. 9 is a diagram showing parameters of an optical system in an embodiment of an array element inspection apparatus according to the present invention.

FIG. 10 adjusts the arrangement of each lens in the lens array,
FIGS. 4A and 4B show an embodiment in which an end face image of each fiber is formed at a different position on a detection surface. FIG. 4A shows the arrangement of each lens in a lens array, and FIG. FIG. 6 is a diagram showing an end face image of each fiber formed by the imaging.

[Explanation of symbols]

 1 Fiber Array 1b Fiber 2 Lens Array 2b Lens 3 Imaging Lens 4 CCD Camera 5 Computer 21 Fiber 22 Lens 23 Imaging Lens

Claims (7)

[Claims] 1. A method for detecting the position of a plurality of elements arranged in an array using an optical detection means, wherein light from the plurality of elements is mutually aligned with an optical axis corresponding to each element. It is taken out by a lens array having a plurality of lenses arranged substantially in parallel, light from each lens of the lens array is formed into an image in a light receiving area of the detecting means by an image forming lens, and an image of the formed element is formed. An array element inspection method, comprising: detecting and detecting the position of each element from a detection signal. 2. A device according to claim 1, wherein the plurality of elements have optical axes substantially parallel to each other, and an i-th element (i = 1) in a plane perpendicular to the optical axis.
ＮN, where N is the number of elements, the coordinates of the elements are (Xo _i , Yo)
_2. The method according to claim 1, wherein the position of the array elements arranged in an array is detected as represented by _i ), wherein the focal point corresponds to each of the plurality of elements and is equal to an optical axis substantially parallel to each other. a plurality of lenses having a distance f ₁ is the coordinates (Xl _i, Yl _i) of the optical axis of the i-th lens in a plane perpendicular to the optical axis of each lens array lenses as represented as comprising an array, and the imaging lens focal length f ₂ for imaging the light from each lens of the lens array, the lens array and an imaging lens, the perpendicular to the optical axis of the lens constituting the lens array When an image of each element is formed on the detection surface in the light receiving area of the detection means, the arrangement of the lens array and the imaging lens with respect to the plurality of elements is determined by the following equations (1) to (3). So as to satisfy the i-th one of the plurality of elements. Light from the element is extracted by the i-th lens in the lens array, and the extracted light is extracted by the imaging lens at a desired position (Xs
_i , Ys _i ), an image of each formed element is detected, and a position of each element is obtained from a detection signal. _{Xo i - (k × Xl i} ) = Xs i / M (1) Yo i - (k × Yl i) = Ys i / M (2) η = {(k-1) × (β + ξ) -1} × β / {ξ × (k- 1) -1} (3) However, k: each element, the value of the distance between the first principal point of the lens in the lens array corresponding to each element divided by f ₁ β: the value obtained by dividing the focal length f ₂ of the imaging lens by f ₁ ξ: the focal lengths f ₁ and f ₂ are calculated from the distance between the second principal point of each lens of the lens array and the first principal point of the imaging lens. A value obtained by dividing the subtracted distance by f ₁ η: a value obtained by dividing the distance between the second principal point of the imaging lens and the detection surface by f ₁ M: a magnification of an optical system including the lens array and the imaging lens; M = −β / {1+ (1−k) ×} X, Y axes: directions perpendicular to the optical axis direction (Z axis direction) of the lenses constituting the lens array, With orthogonal coordinate axes _{Ri, (Xo i, Yo i)} , (Xl i, Y
l _i ) and (Xs _i , Ys _i ) are also based on the common X and Y coordinate axes. 3. The array element inspection method according to claim 1, wherein light from each of the elements is imaged at substantially the same point on a detection surface in a light receiving area of the detection means. . 4. The array inspection method according to claim 1, wherein the optical system including the lens array and the imaging lens is arranged to be an afocal system. 5. The array element inspection method according to claim 1, wherein light from the array element is extracted as substantially parallel light by the lens array. 6. An array element inspection apparatus for detecting positions of a plurality of elements arranged in an array, wherein the plurality of lenses have a plurality of lenses whose optical axes respectively corresponding to the plurality of elements are arranged substantially parallel to each other. An array, at least one image forming lens for forming an image of light from each lens of the lens array in a light receiving area of the detecting means, detecting means for detecting an image of the formed element, and detecting means. An arithmetic circuit for determining the position of each element from the detection signal, wherein the lens array, the imaging lens, and the detection means
An array element inspection apparatus, wherein light from each lens of the lens array is arranged to form an image in a light receiving area of the detection means. 7. A plurality of elements have optical axes substantially parallel to each other, and an ith (i = 1) plane in a plane perpendicular to said optical axis.
ＮN, where N is the number of elements, the coordinates of the elements are (Xo _i , Yo)
7. The array element inspection apparatus according to claim 6, wherein the positions of the array elements arranged in an array are detected as represented by _i ), and the optical axes correspond to each of the plurality of elements and are substantially parallel to each other. a plurality of lenses having a focal length f ₁ is the arranged as coordinates of the optical axis of the i-th lens in a plane perpendicular to the optical axis of each lens is expressed as (Xl _i, Yl _i) lens array and the light from the lens array, the focal length f ₂ of the imaging lens for forming in the plane of the detection surface of the light receiving region of vertical said detecting means with respect to the optical axis of the lens constituting the lens array And setting the arrangement of the lens array and the imaging lens with respect to the plurality of elements so as to satisfy the following expressions (1) to (3), whereby light from the i-th element among the plurality of elements is obtained. Is the i-th in the lens array Desired position of the detection surface by a lens and the imaging lens (Xs _i, Y
s _i ), comprising: detecting means for detecting the image of each of the formed elements; and an arithmetic circuit for determining the position of each element from a detection signal of the detecting means. Characteristic array element inspection equipment. _{Xo i - (k × Xl i} ) = Xs i / M (1) Yo i - (k × Yl i) = Ys i / M (2) η = {(k-1) × (β + ξ) -1} × β / {ξ × (k- 1) -1} (3) However, k: each element, the value of the distance between the first principal point of the lens in the lens array corresponding to each element divided by f ₁ β: the value obtained by dividing the focal length f ₂ of the imaging lens by f ₁ ξ: the focal lengths f ₁ and f ₂ are calculated from the distance between the second principal point of each lens of the lens array and the first principal point of the imaging lens. A value obtained by dividing the subtracted distance by f ₁ η: a value obtained by dividing the distance between the second principal point of the imaging lens and the detection surface by f ₁ M: a magnification of an optical system including the lens array and the imaging lens; X and Y axes are expressed as M = −β / {1+ (1-k) ×}. The X and Y axes have directions perpendicular to the direction of the optical axis (Z-axis direction) of the lenses constituting the lens array. With orthogonal coordinate axes _{Ri, (Xo i, Yo i)} , (Xl i, Y
l _i ) and (Xs _i , Ys _i ) are also based on the common X and Y coordinate axes.